Line confocal spectral measurement device

Abstract

The invention belongs to the technical field of spectral measurement, and particularly relates to linear confocal spectral measurement equipment. The system comprises an object-side lens group, a half-reflecting mirror, a relay lens group, a confocal group, an image-side lens group and an image sensor. The confocal group comprises a light source; the light source emits a light beam to the relay lens group; a relay lens group which emits the light beam emitted by the light source to the half-reflecting mirror; a half mirror that emits the light beam that has passed through the relay lens group toward the object-side lens group; an object-side lens group that emits the light beam that has passed through the object-side lens group toward an object-side region; and the half-reflecting mirror, the image space lens group and the image sensor form an image acquisition system. The method has the advantages that equipment cost is saved, the position of the measured object can be accurately judged, and then three-dimensional information of the surface of the measured object is accurately scanned.

Description

Technical Field

[0001] The invention belongs to the technical field of spectrum measurement, and in particular relates to a line confocal spectrum measurement device. Background Art

[0002] At present, spectral confocal measurement is increasingly widely used in the field of precision detection. However, existing spectral confocal measurement equipment is difficult to accurately determine the position of the object being measured, and thus cannot accurately scan the three-dimensional information of the surface of the object being measured, resulting in limited application of spectral confocal measurement. The use of other technologies to accurately scan the three-dimensional information of the surface of the object being measured has the problems of high cost and difficulty in design.

[0003] In view of the above problems, it is very important to design a line confocal spectroscopy measurement device that saves equipment cost, can accurately determine the position of the object being measured, and then accurately scan the three-dimensional information of the surface of the object being measured.

[0004] For example, a spectral confocal measurement device described in a Chinese patent document with application number CN202123455872.1 adopts a modular design, dividing the entire system into three modules: a spectral confocal probe, a fiber adapter card module, and a controller module; wherein, there may be multiple spectral confocal probes, the fiber adapter card module may contain multiple fiber adapter cards, and one spectral confocal probe is connected to one fiber adapter card. Although each component contained in the above three modules can be replaced independently, when any of the components fails and needs to be replaced, only the failed component needs to be replaced and recalibrated, and the entire system does not need to be replaced, which greatly improves the interchangeability and maintainability of the system and reduces maintenance costs, but the disadvantage is that it cannot be used to accurately scan the three-dimensional information of the surface of the object being measured. Summary of the invention

[0005] The present invention aims to overcome the problem in the prior art that the existing spectral confocal measurement equipment is difficult to accurately determine the position of the object to be measured, and thus cannot accurately scan the three-dimensional information of the surface of the object to be measured, resulting in a limited scope of application of the spectral confocal measurement. The present invention provides a line confocal spectral measurement device that saves equipment cost, can accurately determine the position of the object to be measured, and then accurately scan the three-dimensional information of the surface of the object to be measured.

[0006] In order to achieve the above-mentioned object of the invention, the present invention adopts the following technical solutions:

[0007] Line confocal spectroscopy measurement equipment, including an object side lens group, a half-reflecting mirror, a relay lens group, a confocal group, an image side lens group and an image sensor;

[0008] The confocal group includes a light source; the light source emits a light beam to the relay lens group;

[0009] The relay lens group projects the light beam emitted by the light source toward the semi-reflective mirror;

[0010] The semi-reflective mirror emits the light beam passing through the relay lens group toward the object lens group;

[0011] The object lens group emits the light beam passing through the object lens group to the object area;

[0012] The semi-reflective mirror, the image-side lens group and the image sensor constitute an image acquisition system.

[0013] Preferably, the confocal group further comprises a pattern plate, a confocal group semi-reflective mirror, a light source focusing mirror, a collimating mirror, a grating, a focusing mirror and a confocal group image sensor;

[0014] The light source emits a light beam toward the light source focusing mirror;

[0015] The confocal group of semi-reflective mirrors emits the light beam passing through the light source focusing mirror toward the pattern plate;

[0016] The pattern plate receives the light beam to form a secondary light source and emits the light beam to the relay lens group;

[0017] The collimator collimates the light beam reflected by the confocal group semi-reflective mirror and emits the collimated light beam toward the grating;

[0018] The grating emits the light beam toward the focusing mirror after giving different deflection angles according to different wavelengths corresponding to the incident collimated light beam;

[0019] The focusing mirror focuses light beams with different incident angles on different positions of the confocal group image sensor.

[0020] Preferably, the object lens group, relay lens group, light source focusing lens, collimating lens and focusing lens each include at least one lens.

[0021] Preferably, the pattern plate is a film or optical fiber array attached to a glass surface or a digital micromirror device DMD for controlling pixel switches.

[0022] Preferably, the confocal group further comprises a confocal group semi-reflective mirror, a first relay lens, a first pattern plate, a light source focusing mirror, a second relay lens, a second pattern plate, a collimating mirror, a grating, a focusing mirror and a confocal group image sensor;

[0023] The light source emits a light beam toward the light source focusing mirror;

[0024] The first pattern plate receives the light beam to form a secondary light source and emits the light beam to the first relay lens;

[0025] The first relay lens directs the light beam emitted by the first pattern plate toward the confocal group half-reflective mirror;

[0026] The confocal group semi-reflective mirror emits the light beam passing through the first relay lens toward the relay lens group;

[0027] The second relay lens emits the light beam reflected by the confocal group half-reflecting mirror toward the second pattern plate;

[0028] The second pattern plate receives the light beam, forms a tertiary light source, and emits the light beam to the collimator;

[0029] The collimator collimates the light beam emitted by the second pattern plate and emits the collimated light beam toward the grating;

[0030] The grating emits the light beam toward the focusing mirror after giving different deflection angles according to different wavelengths corresponding to the incident collimated light beam;

[0031] The focusing mirror focuses light beams with different incident angles on different positions of the confocal group image sensor.

[0032] Preferably, the object lens group, the relay lens group, the first relay lens, the second relay lens, the light source focusing lens, the collimating lens and the focusing lens each include at least one lens.

[0033] Preferably, the grating is a projection grating, a reflection grating or a beam splitter prism.

[0034] Preferably, the first pattern plate and the second pattern plate are both formed of a film or an optical fiber array attached to a glass surface or a digital micromirror device DMD for controlling pixel switches.

[0035] Preferably, the light source comprises a light source and a focusing lens; the light source emits a light beam to the focusing lens; the focusing lens comprises at least one lens; the light source is an LED lamp or a gas discharge lamp or a laser.

[0036] Compared with the prior art, the present invention has the following advantages: (1) the present invention identifies the position of the bright spot on the image sensor through spectral measurement, and then accurately determines the position of the corresponding intersection on the surface of the object entering the measurement range, and then continuously changes the positional relationship between the object and the entire device, and finally scans and obtains the entire three-dimensional information of the surface of the object; (2) the present invention reduces the cost of the equipment and has a simple structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A schematic diagram of an optical path of a linear confocal spectroscopy measurement device provided in Example 1 of the present invention;

[0038] Figure 2A schematic diagram of an optical path of a linear confocal spectroscopy measurement device provided in Example 2 of the present invention;

[0039] Figure 3 A schematic diagram of the structure of a light source in the present invention;

[0040] Figure 4 is another structural schematic diagram of the light source in the present invention;

[0041] Figure 5 It is another structural schematic diagram of the light source in the present invention.

[0042] In the figure: object area 1, object lens group 2, half-reflecting mirror 3, relay lens group 4, confocal group 5, image lens group 6, image sensor 7, light source 501, pattern plate 502, confocal group half-reflecting mirror 503, light source focusing mirror 504, collimating mirror 505, grating 506, focusing mirror 507, confocal group image sensor 508, first relay lens 509, first pattern plate 510, second relay lens 511, second pattern plate 512, light source 5011, focusing lens 5012, optical fiber array 5013, lens array group 5014. DETAILED DESCRIPTION

[0043] In order to more clearly illustrate the embodiments of the present invention, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those of ordinary skill in the art, other accompanying drawings and other implementation methods can be obtained based on these accompanying drawings without creative work.

[0044] Embodiment 1:

[0045] like Figure 1 The line confocal spectrum measuring device shown includes an object side lens group 2, a half mirror 3, a relay lens group 4, a confocal group 5, an image side lens group 6 and an image sensor 7;

[0046] The confocal group includes a light source 501; the light source emits a light beam to the relay lens group;

[0047] The relay lens group projects the light beam emitted by the light source toward the half-reflecting mirror;

[0048] The half mirror directs the light beam passing through the relay lens group toward the object lens group;

[0049] The object lens group emits the light beam passing through the object lens group to the object area;

[0050] The half mirror, image side lens group and image sensor constitute the image acquisition system.

[0051] The object lens group and the relay lens group can be one or more lenses. The semi-reflective mirror can be a semi-reflective lens or prism that can both reflect a certain proportion of light and project a certain proportion of light, or a semi-reflective lens or prism that reflects light in a partial area and projects light in a partial area.

[0052] Further, the confocal group also includes a pattern plate 502, a confocal group semi-reflective mirror 503, a light source focusing mirror 504, a collimating mirror 505, a grating 506, a focusing mirror 507 and a confocal group image sensor 508;

[0053] The light source emits a light beam toward the light source focusing mirror;

[0054] The confocal group of half-reflecting mirrors emits the light beam passing through the light source focusing mirror toward the pattern plate;

[0055] The pattern plate receives the light beam, forms a secondary light source, and emits the light beam to the relay lens group;

[0056] A collimator lens, which collimates the light beam reflected by the confocal group half-reflection mirror and emits the collimated light beam toward the grating;

[0057] The grating gives different deflection angles according to the different wavelengths corresponding to the incident collimated light beam, and then emits the light beam to the focusing mirror.

[0058] The pattern plate can be formed by a film attached to the glass surface to form a pattern with some areas transparent and some areas opaque. The transparent area can be a line, a dot matrix, or multiple lines. The pattern plate can also be realized by an optical fiber array. The pattern plate can also be realized by a digital micromirror device DMD that can control pixel switches. When using DMD, since the light beam is reflected, the optical path and optical elements must be bent in the correct direction.

[0059] The confocal group semi-reflective mirror is partially reflective and partially transmissive. The light source focusing mirror, collimating mirror and focusing mirror can all be one or more lenses.

[0060] The grating can be a projection grating, a reflection grating, or a beam splitter prism. When using different gratings or beam splitters, the light path and optical elements on the right side should be folded in the correct direction.

[0061] by Figure 1 For example, the working principle of this embodiment is as follows:

[0062] Light is emitted from the light source, passes through the light source focusing mirror, and then passes through the light-transmitting area of ​​the confocal group semi-reflective mirror, and converges on the pattern line on the pattern plate to form a secondary light source.

[0063] The structural function of the object lens group and the relay lens group is to allow the lines of the pattern plate to obtain conjugate lines with different working distances (WD) depending on the wavelength at the position of the object area 1 (in this embodiment, the distance between the lines near the object area and the object lens group is called the working distance or WD).

[0064] The light from the linear quadratic light source of the pattern plate passes downward through the relay lens group, then through the half-reflecting mirror, and then through the object lens group to be focused near the object area, forming many conjugate lines of the pattern plate focused by light of different wavelengths, and each line of different WD corresponds to a unique wavelength.

[0065] When the object area is blocked by the surface of the measured object, if this line intersects with the surface contour of the object, one or more intersection points will be formed. Since the position of this intersection point is fixed, WD is fixed, and its corresponding wavelength W is also fixed. After being reflected, this point will pass upward through the object lens group, then through the half-reflecting mirror, and then through the relay lens group, and then through the pattern plate. Since this point is conjugate with a point on the line on the pattern plate only when the wavelength is W, the light will only have wavelength W after passing through the pattern plate, and other wavelengths are forced to defocus or scatter, and are greatly weakened.

[0066] At the same time, the pattern plate is used as a tertiary light source again, and the light emitted by it with the W wavelength filtered out continues to move upward and is reflected to the right in the reflection area of ​​the confocal group semi-reflective mirror, and then enters the grating after being collimated by the collimator.

[0067] The grating can give different deflection angles to the incident parallel light corresponding to different wavelengths and then emit it. The focusing lens can focus the light beams with different incident angles on different positions of the confocal group image sensor.

[0068] Therefore, after the light is emitted from the grating at a unique deflection angle corresponding to the wavelength W, it passes through the focusing lens and is focused on the corresponding position of the confocal group image sensor.

[0069] When the pattern of the pattern plate is filled with light because the object and its conjugate line just coincide with each other, a line corresponding to its wavelength can be projected on the confocal group image sensor. When the object keeps moving and changing its WD, and the object-side conjugate line of each WD just happens to fit the surface of the object, it can be observed that the bright line on the confocal group image sensor changes position as the object's WD keeps changing. Therefore, by analyzing the position of the line on the confocal group image sensor, the precise position of the object can be determined.

[0070] Take any point on the object conjugate line at random, and you can also find this unique point on the unique line corresponding to the object conjugate line on the confocal group image sensor. When the object surface is inclined to the conjugate line, and the intersection is this point, this point can be observed on the confocal group image sensor. At this time, move the object to make the intersection of the object surface and this conjugate line change continuously, and you can observe the continuous change of the corresponding bright spot position on the confocal group image sensor. On a fixed conjugate line, the position of the intersection of the conjugate line and the object surface in the X direction corresponds to its position in the X' direction on the confocal group image sensor, and it must be on the line on the confocal group image sensor.

[0071] Therefore, any point of X', Z' coordinates on the confocal image sensor corresponds to a point of X, Z coordinates on the object side. By identifying the position of the bright spot on the confocal image sensor, the position of the corresponding intersection on the surface of the object entering the measurement range can be accurately determined. By continuously changing the positional relationship between the object and the entire device, the entire three-dimensional information of the object surface can be scanned.

[0072] In addition, when the image acquisition function consisting of the half-mirror, the image-side lens group and the image sensor is not used, the optical path of the entire device can also remove the half-mirror, the image-side lens group and the image sensor.

[0073] When the object lens group can complete the function of making the pattern plate and the object conjugate, the relay lens group may not be used.

[0074] When a half mirror is present, the light paths on both sides of the half mirror can be interchanged. The light paths on both sides of the half mirror of the confocal group can also be interchanged.

[0075] like Figures 3 to 5 As shown, the light source in this embodiment can be used in the following ways:

[0076] The first one, such as Figure 3 As shown, the light source includes a light source 5011, a focusing lens 5012 and an optical fiber array 5013. The light source can be an LED, a gas discharge lamp, a wide spectrum laser or a light source excited by a laser phosphor. The focusing lens can be one or more lenses. The two ends of the optical fiber array have different shapes. Usually, the input end is a circle or hexagon that is more in line with the symmetry of the light source, and the output end is a rectangle or a strip that is more in line with the shape of the pattern plate.

[0077] The second type, such as Figure 4 As shown, Figure 3 Compared with the conventional optical fiber array, the light source lacks the optical fiber array. If the light source can directly illuminate the pattern plate by getting close to it, the focusing lens can be omitted.

[0078] The third type, such as Figure 5As shown, the light source includes a light source, two focusing lenses and a lens array group 5014 located between the two focusing lenses. The lens array group can change the distribution of the lateral and longitudinal Lach invariants of the light source, so that the light can be focused by the focusing lens after being emitted and becomes a specified rectangular or long strip illumination spot.

[0079] Embodiment 2:

[0080] like Figure 2 As shown, the difference between this embodiment and embodiment 1 is that the confocal group further includes a confocal group semi-reflective mirror, a first relay lens 509, a first pattern plate 510, a light source focusing mirror, a second relay lens 511, a second pattern plate 512, a collimating mirror, a grating, a focusing mirror and a confocal group image sensor;

[0081] The light source emits a light beam toward the light source focusing mirror;

[0082] a first pattern plate, receiving the light beam, forming a secondary light source, and emitting the light beam to the first relay lens;

[0083] A first relay lens directs the light beam emitted by the first pattern plate toward the confocal group half-reflective mirror;

[0084] The confocal group half-reflecting mirror emits the light beam passing through the first relay lens toward the relay lens group;

[0085] The second relay lens emits the light beam reflected by the confocal group half mirror to the second pattern plate;

[0086] The second pattern plate receives the light beam, forms a tertiary light source, and emits the light beam to the collimator lens;

[0087] A collimator lens, collimating the light beam emitted by the second pattern plate, and emitting the collimated light beam toward the grating;

[0088] The grating emits the light beam to the focusing mirror after giving different deflection angles according to the different wavelengths corresponding to the incident collimated light beam;

[0089] The focusing lens focuses light beams with different incident angles onto different positions of the confocal group image sensor.

[0090] The confocal group semi-reflective mirror is a semi-reflective mirror with partial reflection and partial transmission. The first relay lens, the light source focusing lens, the second relay lens, the collimating lens and the focusing lens can all be one or more lenses.

[0091] The first pattern plate and the second pattern plate can be formed by a film attached to the glass surface to form a pattern in which some areas are translucent and some areas are opaque. The translucent area can be a line, a dot matrix, or multiple lines, or can be realized by an optical fiber array.

[0092] The grating can be a projection grating, a reflection grating, or a beam splitter prism. When using different gratings or beam splitters, the light path and optical elements on the right side should be folded in the correct direction.

[0093] by Figure 2 For example, the working principle of this embodiment is as follows:

[0094] Light is emitted from the light source, passes through the light source focusing lens, and then passes through the light-transmitting area of ​​the first pattern plate, and converges on the pattern line on the second pattern plate to form a secondary light source.

[0095] The function of the object lens group, the relay lens group and the first relay lens, as well as the object lens group, the relay lens group and the second relay lens, is to allow the lines of the first pattern plate and the second pattern plate to obtain conjugate lines with different working distances (WD) depending on the wavelength in the object area (in this embodiment, the distance between the lines near the object area and the object lens group is called the working distance or WD), and the distribution of the conjugate lines obtained by the first pattern plate and the second pattern plate are the same as the relationship between the position and the wavelength.

[0096] The light from the linear secondary light source formed on the first pattern plate passes downward through the first relay lens, then through the light-transmitting area of ​​the confocal group semi-reflective mirror, then through the relay lens group, then through the semi-reflective mirror, and then through the object lens group to be focused near the object area, forming many conjugate lines of the first pattern plate and the second pattern plate focused by light of different wavelengths, and each line of different WD corresponds to a unique wavelength.

[0097] When the object area is blocked by the surface of the measured object, if this line intersects with the surface contour of the object, one or more intersection points will be formed. Since the position of this intersection point is fixed, WD is fixed, and its corresponding wavelength W is also fixed. After being reflected, this point will pass through the object lens group upward, then through the half-reflecting mirror, and then through the relay lens group, and be reflected to the right in the reflection area of ​​the confocal group half-reflecting mirror, and then pass through the second relay lens, and then through the second pattern plate. Since this point is conjugate with a point on the line on the second pattern plate only when the wavelength is W, the light will only have wavelength W after passing through the second pattern plate, and other wavelengths are forced to defocus or scatter, and are greatly weakened.

[0098] The second pattern plate can be regarded as a tertiary light source, and the light emitted by it that has been filtered out with a wavelength of W continues to go to the right and enters the grating after being collimated by the collimator.

[0099] The grating can give different deflection angles to the incident parallel light corresponding to different wavelengths and then emit it. The focusing lens can focus the light beams with different incident angles on different positions of the confocal group image sensor.

[0100] Therefore, after the light is emitted from the grating at a unique deflection angle corresponding to the wavelength W, it passes through the focusing lens and is focused on the corresponding position of the confocal group image sensor.

[0101] When the pattern of the second pattern plate is filled with light because the object and the conjugate line projected by the first pattern plate just coincide with each other, a line corresponding to its wavelength can be projected on the confocal group image sensor. When the object keeps moving and changing its WD, and the object-side conjugate line of each WD happens to fit the surface of the object, it can be observed that the bright line on the confocal group image sensor changes position as the object's WD keeps changing. Therefore, by analyzing the position of the line on the confocal group image sensor, the precise position of the object can be determined.

[0102] Take any point on the object conjugate line at random, and you can also find this unique point on the unique line corresponding to the object conjugate line on the confocal group image sensor. When the object surface is inclined to the conjugate line, and the intersection is this point, this point can be observed on the confocal group image sensor. At this time, move the object to make the intersection of the object surface and this conjugate line change continuously, and you can observe the continuous change of the corresponding bright spot position on the confocal group image sensor. On a fixed conjugate line, the position of the intersection of the conjugate line and the object surface in the X direction corresponds to its position in the X' direction on the confocal group image sensor, and it must be on the line on the confocal group image sensor.

[0103] Therefore, any point of X', Z' coordinates on the confocal image sensor corresponds to a point of X, Z coordinates on the object side. By identifying the position of the bright spot on the confocal image sensor, the position of the corresponding intersection on the surface of the object entering the measurement range can be accurately determined. By continuously changing the positional relationship between the object and the entire device, the entire three-dimensional information of the object surface can be scanned.

[0104] In addition, in this embodiment, when the image acquisition function composed of the half-reflecting mirror, the image-side lens group and the image sensor is not used, the optical path of the entire device can also remove the half-reflecting mirror, the image-side lens group and the image sensor.

[0105] When the object lens group can complete the function of making the pattern plate and the object conjugate, the relay lens group or the first relay lens or the second relay lens may not be used.

[0106] When a half mirror is present, the light paths on both sides of the half mirror can be interchanged. The light paths on both sides of the half mirror of the confocal group can also be interchanged.

[0107] The present invention identifies the position of the bright spot on the image sensor through spectral measurement, and then accurately determines the position of the corresponding intersection on the surface of the object entering the measurement range, and then continuously changes the positional relationship between the object and the entire device, and finally scans to obtain the entire three-dimensional information of the surface of the object; the present invention reduces the cost of the equipment and has a simple composition structure.

[0108] The above description is only a detailed description of the preferred embodiments and principles of the present invention. For ordinary technicians in this field, according to the ideas provided by the present invention, there will be changes in the specific implementation methods, and these changes should also be regarded as the protection scope of the present invention.

Claims

1. Line confocal spectroscopy measurement equipment, characterized in that, It includes an object side lens group, a half-reflecting mirror, a relay lens group, a confocal group, an image side lens group and an image sensor; The confocal group includes a light source; the light source emits a light beam to the relay lens group; The relay lens group projects the light beam emitted by the light source toward the semi-reflective mirror; The semi-reflective mirror emits the light beam passing through the relay lens group toward the object lens group; The object lens group emits the light beam passing through the object lens group to the object area; The semi-reflective mirror, the image-side lens group and the image sensor constitute an image acquisition system.

2. The linear confocal spectroscopy measuring device according to claim 1, characterized in that: The confocal group also includes a pattern plate, a confocal group semi-reflective mirror, a light source focusing mirror, a collimating mirror, a grating, a focusing mirror and a confocal group image sensor; The light source emits a light beam toward the light source focusing mirror; The confocal group of semi-reflective mirrors emits the light beam passing through the light source focusing mirror toward the pattern plate; The pattern plate receives the light beam to form a secondary light source and emits the light beam to the relay lens group; The collimator collimates the light beam reflected by the confocal group semi-reflective mirror and emits the collimated light beam toward the grating; The grating emits the light beam toward the focusing mirror after giving different deflection angles according to different wavelengths corresponding to the incident collimated light beam; The focusing mirror focuses light beams with different incident angles on different positions of the confocal group image sensor.

3. The linear confocal spectrum measuring device according to claim 2, characterized in that: The object lens group, relay lens group, light source focusing lens, collimating lens and focusing lens each include at least one lens.

4. The linear confocal spectrum measuring device according to claim 2, characterized in that: The pattern plate adopts a film or optical fiber array attached to a glass surface or a digital micromirror device DMD for controlling pixel switches.

5. The linear confocal spectrum measuring device according to claim 1, characterized in that: The confocal group also includes a confocal group semi-reflective mirror, a first relay lens, a first pattern plate, a light source focusing mirror, a second relay lens, a second pattern plate, a collimating mirror, a grating, a focusing mirror and a confocal group image sensor; The light source emits a light beam toward the light source focusing mirror; The first pattern plate receives the light beam to form a secondary light source and emits the light beam to the first relay lens; The first relay lens directs the light beam emitted by the first pattern plate toward the confocal group half-reflective mirror; The confocal group semi-reflective mirror emits the light beam passing through the first relay lens toward the relay lens group; The second relay lens emits the light beam reflected by the confocal group half-reflecting mirror toward the second pattern plate; The second pattern plate receives the light beam, forms a tertiary light source, and emits the light beam to the collimator; The collimator collimates the light beam emitted by the second pattern plate and emits the collimated light beam toward the grating; The grating emits the light beam toward the focusing mirror after giving different deflection angles according to different wavelengths corresponding to the incident collimated light beam; The focusing mirror focuses light beams with different incident angles on different positions of the confocal group image sensor.

6. The linear confocal spectrum measuring device according to claim 5, characterized in that: The object lens group, the relay lens group, the first relay lens, the second relay lens, the light source focusing lens, the collimating lens and the focusing lens each include at least one lens.

7. The linear confocal spectrum measuring device according to claim 5, characterized in that: The grating is a projection grating or a reflection grating or a beam splitter prism.

8. The linear confocal spectrum measuring device according to claim 5, characterized in that: The first pattern plate and the second pattern plate both adopt a film or an optical fiber array attached to a glass surface or a digital micromirror device DMD for controlling pixel switches.

9. The linear confocal spectroscopy measuring device according to any one of claims 1 to 8, characterized in that: The light source comprises a light source and a focusing lens; the light source emits a light beam to the focusing lens; the focusing lens comprises at least one lens; the light source is an LED lamp, a gas discharge lamp or a laser.

Images