Infrared temperature measurement process furnace

Abstract

The invention discloses an infrared temperature measurement process furnace which comprises a zooming device. The zoom device comprises a holder provided with a seat hole, the seat hole is aligned with the corresponding temperature measuring hole, and an annular groove is formed in the seat hole; the retainer is also provided with a via hole penetrating into the ring groove from the side wall; the zoom lens is provided with an annular framework and two circular film coatings, so that a liquid cavity is formed, and transparent liquid is filled in the liquid cavity; wherein the framework is provided with a liquid hole and is positioned in the annular groove, so that the liquid hole is aligned with the via hole; and the metering liquid feeding device is connected with the liquid hole through the via hole so as to adjust the focal length of the zoom lens by controlling the filling amount of the liquid cavity. The temperature measuring part of the infrared temperature measuring process furnace is relatively compact in structure.

Description

Technical Field

[0001] The invention relates to an infrared temperature measurement process furnace. Background Art

[0002] The third band semiconductor material is also called wide bandgap semiconductor material. Representative materials include Ga 2 O 3 , AlN, SiC, GaN, etc., using their wide bandgap characteristics, can be used to make microelectronic devices with higher energy conversion efficiency, lower heat loss, and higher integration density, which has important economic value. However, due to the high temperature of their preparation process, except for GaN, the preparation process temperature of almost all wide bandgap semiconductor materials is above 1600℃, and HCl and NH are needed in the preparation process. 3 , H 2 、SiH 4 Special gases and harsh reaction conditions. The control of crystal growth process in such high temperature environment depends not only on the quality of temperature field structure, but also on the accuracy of temperature control and temperature measurement. Usually, the only temperature measurement methods in this temperature range are infrared temperature measurement method and tungsten-rhenium thermocouple temperature measurement method, but tungsten-rhenium thermocouple can only be used below 1800℃, and because it is a contact temperature measurement, it is easily affected by the atmosphere in the chamber, corroded and volatilized at high temperature, and has a short lifespan. Therefore, infrared temperature measurement becomes the preferred choice for this process.

[0003] However, infrared temperature measurement also has its limitations. Once the infrared temperature sensor is manufactured, its focal length is usually fixed. If you need to measure an object at a specific distance, you need to adapt it based on factors such as the focal length, the diameter of the temperature measuring hole, and the distance from the observation window to the object being measured. When the distance to the object being measured changes, you need to readjust its external installation position. If the target point position changes in real time, it cannot follow or track the target point and measure the temperature synchronously.

[0004] In view of this, there are electric focus infrared imaging temperature measurement devices used in other fields, such as electric focus lens, which includes an electric focus lens, which includes at least two zoom groups, each zoom group usually has at least two lenses, and the axial length of the entire electric focus lens is relatively large. The key problem is that this type of electric focus lens generally has a relatively large aperture, while the temperature measurement hole is usually relatively small. In addition, this type of electric focus lens is often equipped with a number of cylindrical cams. The drive configuration of the cylindrical cam (the stepper motor drives the cylindrical cam to rotate) and its movement form may interfere with the temperature measurement hole, etc., and it is relatively difficult to configure the lens barrel in a small space.

[0005] With the development of technology, a lens called zoom lens has emerged. Compared with the traditional lens composed of multiple lenses to achieve zoom, the axial size of the lens is relatively small, but its axial size is still relatively large. Compared with the traditional lens group, the zoom lens still has multiple lenses. The only difference is that the zoom lens changes the size of the projected image of the object on the photosensitive surface without changing the distance between the camera and the object. It usually includes one or more convex lenses and concave lenses. The distance between these lenses can be adjusted. By changing the position and distance of the lens, the path of the lens can be changed. In other words, it still needs to use a zoom ring, for example, to achieve zooming, and there are still many movable parts, which affects its use on, for example, temperature measuring holes.

[0006] The above is mechanical zoom. Another common zoom method is digital zoom. The principle is to enlarge or reduce the scene by performing pixel interpolation on a CCD image sensor, for example, without the need for mechanical zoom. However, digital zoom will cause image distortion and is difficult to use for infrared temperature measurement. Summary of the invention

[0007] The object of the present invention is to provide an infrared temperature measurement process furnace with a relatively compact temperature measurement part structure.

[0008] According to an embodiment of the present invention, an infrared temperature measurement process furnace is provided, wherein a zoom device is arranged outside an observation window of a temperature measurement hole of a furnace body, so as to zoom the infrared rays transmitted through the temperature measurement hole; Accordingly, an infrared thermometer is arranged outside the zoom lens; Wherein, the zoom device comprises: A retainer, the retainer has a circular seat hole, the seat hole is aligned with the temperature measuring hole, and there is an annular groove in the seat hole, the annular groove and the seat hole are coaxial; the retainer also has a through hole from the side wall to the annular groove; A variable focus lens having an annular frame and two circular film coatings, wherein the periphery of one film coating is connected to one end of a corresponding annular hole of the frame, and the periphery of the other film coating is connected to the other end of the annular hole to form a liquid cavity filled with a transparent liquid; wherein the frame is provided with a liquid hole and is positioned in the annular groove so that the liquid hole is aligned with the through hole; The metering liquid feeding device is connected to the liquid hole via the through hole to adjust the focal length of the zoom lens by controlling the filling amount of the liquid cavity.

[0009] Optionally, the pumping part of the metering liquid feeding device is a plunger metering pump.

[0010] Optionally, a stop valve is provided on the pipeline connecting the plunger metering pump and the liquid hole to maintain the liquid volume in the liquid cavity.

[0011] Optionally, the window glass of the observation window is transparent quartz glass.

[0012] Optionally, the film coating is a PE film coating.

[0013] Optionally, the liquid is a developer.

[0014] Optionally, the developer is a deionized aqueous solution of tetramethylammonium hydroxide, and the weight percentage of tetramethylammonium hydroxide in the aqueous solution is 6.71%.

[0015] Optionally, the retaining frame has a flange plate, through which the retaining frame is flange-connected to the temperature measuring hole.

[0016] Optionally, the retaining frame and the lens of the infrared thermometer are sealed and connected using a sleeve.

[0017] Optionally, the temperature measuring hole is connected through an extension pipe, and the extension pipe is equipped with a connecting flange for connecting with the flange plate.

[0018] In an embodiment of the present invention, a method for adjusting the focal length by means of a single lens zoom is provided, and the overall structure is relatively compact. The zoom lens used is composed of an annular frame and two circular film coatings, thereby forming a liquid cavity. By introducing different amounts of liquid into the liquid cavity, the two film coatings produce a change in curvature. The change in the curvature of the two film coatings causes the degree of the zoom lens to change, that is, under the condition that the diameter of the zoom lens remains unchanged, its focal length will change, thereby adjusting the filling amount of the zoom lens according to the change of the current temperature measurement point, thereby meeting the temperature measurement requirements for the change of the temperature measurement point. Since a single lens is used to achieve zooming, and its zooming is limited to the change of the lens filling amount, the change will not cause motion interference with the temperature measurement hole, etc., and it is also easy to control under the condition of a compact structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the main cross-sectional structure of an infrared temperature measurement process furnace in one embodiment.

[0020] Figure 2 The figure is a schematic diagram of a known fixed-focus infrared temperature measurement process furnace.

[0021] Figure 3 The schematic diagram of an infrared temperature measurement process furnace with variable focus in one embodiment.

[0022] Figure 4 Schematic diagram of the main cross-sectional structure of a zoom lens assembly in one embodiment.

[0023] Figure 5 Schematic diagram of the temperature measurement principle structure when the focal length of the zoom lens assembly increases in one embodiment.

[0024] Figure 6 Schematic diagram of the temperature measurement principle structure when the focal length of the zoom lens assembly decreases in one embodiment.

[0025] In the figure: 1. observation window, 2. bottom insulation layer, 3. outer shell, 4. temperature measuring channel, 5. side insulation layer, 6. furnace chamber, 7. substrate support, 8. top insulation layer, 9. lifting rod, 10. infrared thermometer, 11. epitaxial tube, 12. temperature measuring point, 13. plunger metering pump, 14. stop valve, 15. zoom lens assembly, 16. through hole, 17. ring shell, 18. PE film coating, 19. developer, 20. seat hole, 21. retaining frame. DETAILED DESCRIPTION

[0026] See also Figure 1 The illustrated structure is the same as a conventional process furnace in that the furnace body of the infrared temperature measurement process furnace according to the embodiment of the present invention is also a rotating body structure, specifically, a cylindrical structure in appearance, and has typical rotating body features.

[0027] Figure 1 The structure shown is a vertical infrared temperature measurement process furnace, which is also applicable to horizontal process furnaces. In other words, for infrared temperature measurement, there is no special requirement as to whether the applicable object is horizontal or vertical.

[0028] exist Figure 1 In the illustrated structure, a substrate holder 7 is provided at one end of the lifting rod 9 located in the furnace chamber 6 for supporting workpieces such as substrates. According to different process requirements and / or process stages, the position of the substrate holder 7 may change, thereby affecting the temperature measurement of the infrared thermometer 10.

[0029] Figure 2 The figure shows the temperature measurement principle diagram of a known infrared temperature measurement process furnace. It should be noted that: Figure 2 Most of the structure of the infrared temperature measurement process furnace in the embodiment of the present invention is used only for the convenience of drawing, highlighting the difference in the temperature measurement part, but it does not mean that the existing infrared temperature measurement process furnace has the same structure as the infrared temperature measurement process furnace in the embodiment of the present invention. Figure 2 The epitaxial tube 11 shown in FIG.

[0030] Figure 2 There is an observation window 1, which is usually constructed of a convex lens or a concave lens to adapt to different process objects. It is generally fixed at the outer end of the temperature measuring channel 4 and is used to seal the temperature measuring channel 4 from the outside at the same time to maintain the relative airtightness of the furnace chamber 6.

[0031] However, since the focus of the aforementioned convex lens or concave lens is fixed, when measuring temperature, for example, the position of the temperature measuring point 12 changes, resulting in inaccurate temperature measurement.

[0032] In the embodiment of the present invention, a zoom lens assembly 15 is used to achieve zooming, so that the focus can be adjusted according to the position change of the current temperature measurement point 12 to achieve accurate temperature measurement.

[0033] Correspondingly, in the embodiment of the present invention, the process furnace part of the infrared temperature measurement process furnace provided can be seen in Figure 1 In the illustrated structure, the furnace body has a cylindrical side insulation layer 5 and a top insulation layer 8 and a bottom insulation layer 2 having a round furnace plug structure. Figure 1 In the illustrated structure, the lifting rod 9 is arranged on the top insulation layer 8, and a temperature measuring channel 4 is opened on the bottom insulation layer 2. The temperature measuring channel 4 should be as small as possible while meeting the temperature measurement conditions. Therefore, it is often necessary to cooperate with a lens to achieve temperature measurement. For example, a traditional convex lens or concave lens is structurally configured as an observation window 1 and is used to seal the temperature measuring channel 4 (because the temperature measuring hole is relatively long, it is usually called a temperature measuring channel), that is, to achieve sealing.

[0034] As mentioned above, due to different process objects, etc., it is often necessary to adjust or replace the observation window 1 to meet the current temperature measurement needs. In other words, under this condition, the observation window 1 and, for example, the temperature measurement channel 4 are often connected in a detachable manner, and the tightness of the seal will be affected to a certain extent.

[0035] Furthermore, in the embodiment of the present invention, a zoom device is arranged outside the observation window 1, such as Figure 3 The zoom lens assembly 15 shown in the figure is used to zoom the infrared rays transmitted from the temperature measuring hole to achieve temperature measurement. Under this condition, the observation window 1 can be used as a fixed object, that is, there is no need to replace the observation window 1, and only the zoom lens assembly 15 needs to be operated, so that the tightness of the temperature measuring hole 4 can be more easily guaranteed.

[0036] Correspondingly, an infrared thermometer 10 is adapted outside the zoom lens. Its positional relationship with the zoom lens assembly 15 and the observation window 1 is obviously determined from the perspective of light transmission, that is, it is located on the corresponding optical path. Under this condition, it is determined and will not be repeated here.

[0037] Further, see the attached manual Figure 4 The figure shows a zoom lens assembly 15, which includes a frame part and a lens part, wherein the frame part is mainly used for installing the zoom lens assembly 15 on a frame related to an infrared temperature measurement process furnace, and serves as a mounting base for the lens part.

[0038] Among them, Figure 4In the illustrated structure, the main body of the frame part is a retaining frame 21, which has a circular seat hole 20. There is no requirement for the shape of the part that determines the seat hole 20. The main consideration is whether it is suitable for installation on a frame such as a furnace body or outside the furnace body. It can be square or circular and can have a base, etc., to facilitate its installation on the frame part of, for example, an infrared temperature measurement process furnace.

[0039] The seat hole 20 is a circular hole to adapt to the lens part which is circular as a whole. It should be known that although the lens part can be a plane mirror, a convex lens, a concave lens, etc., its basic shape is usually described as a circle, which does not affect the correct understanding of technicians in this field.

[0040] From the perspective of positional relationship, the seat hole 20 of the retaining frame 21 should be aligned with the temperature measuring channel 4. Under ideal conditions, the axis of the seat hole 20 and the axis of the temperature measuring channel 4 are collinear.

[0041] More precisely, the seat hole 20 is directly aligned with the observation window 1 located outside the temperature measuring channel 4 , that is, in an ideal state, the axis of the seat hole 20 is colinear with the axis of the observation window 1 .

[0042] exist Figure 4 In the illustrated structure, the periphery of the lens portion is positioned in the seat hole, and correspondingly, there should be an annular groove in the seat hole so that the periphery of the lens portion can be embedded therein, which is similar to the positioning method of the lens in the current lens barrel. The difference is that since the current lenses are generally made of relatively hard materials such as glass, they cannot be embedded therein by relying on their own elasticity. In an embodiment of the present invention, the frame that constructs the lens portion can be made of a material with a certain elasticity, such as PE, PC, aluminum frame, copper frame, stainless steel frame, etc., and although the PE film 18 has a certain tension, it is very small, so the elasticity of the lens portion can be used to embed the lens portion into the corresponding annular groove.

[0043] Obviously, the annular groove should be coaxial with the seat hole 20 so that the positioned lens part and the seat hole 20 can maintain relatively good coaxiality.

[0044] In view of the fact that in the embodiment of the present invention, the lens part is zoomed by the amount of liquid injected, so it is necessary to introduce a liquid injection pipeline for the lens part. Under this condition, the retaining frame 21 is required to have a through hole 16 from the side wall to the annular groove, so as to insert the pipeline through the through hole 16; The lens part is different from the traditional hard glass lens, but is a variable focus lens, which should first have a supporting part to stretch the relatively flexible part to a predetermined shape. The supporting part is a ring-shaped skeleton, and the main shape of the skeleton is a ring, such as Figure 4The ring shell 17 shown in the figure has a width (axial dimension) of one sixteenth to one thirteenth of the diameter of the lens portion, and its two end edges serve as connecting portions, which are obviously circular.

[0045] Furthermore, two circular film coatings are provided, and the film coatings are fixed on the connecting portion by, for example, chemical bonding. Specifically, the periphery of the film coating is fixedly connected to the connecting portion.

[0046] In addition, the connection between the film coating and the annular shell 17 can also be a flange of the film coating at the annular shell 17, which is cylindrical so as to just fit the annular shell 17 and then bonded by, for example, chemical bonding.

[0047] Obviously, the two film coatings correspond to the two ends of the annular shell 17 one by one, so that a liquid cavity is formed based on the sealing of the two ends of the annular shell 17, and the liquid cavity is used to be filled with a transparent liquid.

[0048] Furthermore, a liquid hole is opened on the side of the annular shell 17 constituting the skeleton, and the liquid hole should be aligned with the through hole 16 when the skeleton is positioned in the annular groove to facilitate the intervention of the pipeline for introducing the transparent liquid.

[0049] Furthermore, the liquid holes are connected through the pipeline, and the curvature of the two film coats is controlled by controlling the amount of liquid in the liquid cavity. A metering liquid feeding device is provided to accurately control the amount of liquid entering the liquid cavity through metering liquid feeding.

[0050] Regarding the selection of the metering liquid feeding device, a metering liquid feeding device with a relatively small flow rate but relatively high precision can be selected, such as a plunger metering pump 13.

[0051] The plunger metering pump 13 is referred to as a plunger metering pump, which can be used to accurately meter high-viscosity liquids or even liquids containing impurity particles. Since a developer 19 with a certain degree of corrosiveness and a certain viscosity is selected in a more preferred embodiment of the present invention, it is more suitable for use with this type of metering pump.

[0052] In order to avoid pressure relief caused by leakage, a stop valve 14 is provided on the pipeline connecting the plunger metering pump 13 and the liquid hole to maintain the liquid volume in the liquid cavity. Specifically, after the plunger metering pump 13 has finished feeding or returning liquid, the stop valve 14 is actuated to cut off the pipeline, and the pipeline is opened at the next adjustment. Through the stop valve 14, the current curvature of the PE film coating 18, for example, can be maintained more effectively.

[0053] Regarding the selection of the observation window 1, as mentioned above, the window glass is preferably transparent quartz glass, which has a certain heat insulation ability to avoid damage to the lens part.

[0054] In addition, as mentioned above, for example, transparent quartz glass can be fixed at the outer end of the temperature measuring channel 4 in a relatively more stable installation manner, without considering the convenience of its disassembly.

[0055] Regarding the film coating, a film coating with a certain hardness and toughness is used, such as a PE film coating 18. It should be known that since the outer periphery of the film coating is fixedly connected to, for example, the annular shell 17, under the condition that the liquid has a certain degree of fullness, the curvature of the PE film coating 18 changes relatively regularly and is not easy to produce irreversible deformation.

[0056] Regarding the selection of liquid, after a long period of research, it was found that the use of developer 19 has a relatively good effect. The general characteristics of developer 19 are that the transparency is very good, generally higher than 87%. At the same time, the refractive index of developer 19 is relatively good. For example, FSM-6000LE developer has a refractive index of 1.72, which is suitable for testing Corning's fourth-generation Gorilla tempered glass. It is mainly used for optical refractive index testing and optical microscopic analysis, that is, its refractive index is basically the same as that of optical glass (refractive index is generally 1.4~2.0). In the embodiment of the present invention, developer 19 is used to construct the lens part, which can meet the requirements of lens structure and refractive index.

[0057] Furthermore, after screening, the developer is a deionized aqueous solution of tetramethylammonium hydroxide, and the weight percentage of tetramethylammonium hydroxide in the aqueous solution is 6.71%.

[0058] In addition, in some embodiments, the retaining frame 21 has a flange, which is connected to the temperature measuring hole through a flange, so as to be shielded at the inner end to reduce the involvement of dust and affect the detection of the lens part.

[0059] Furthermore, the retaining frame 21 and the lens of the infrared thermometer 10 are sealed and connected by a sleeve to seal on the outside to reduce the influence of dust and the like on the transparency of the lens part.

[0060] Furthermore, the temperature measuring hole is connected through an extension tube, such as Figure 2 and 3 The epitaxial tube 11 shown in FIG. 1 is equipped with a connecting flange for connecting with the flange plate.

Claims

1. An infrared temperature measurement process furnace, characterized in that: The infrared temperature measurement process furnace is provided with a zoom device outside the observation window of the temperature measurement hole of the furnace body, so as to zoom the infrared rays transmitted through the temperature measurement hole; Accordingly, an infrared thermometer is arranged outside the zoom lens; Wherein, the zoom device comprises: A retainer, the retainer has a circular seat hole, the seat hole is aligned with the temperature measuring hole, and there is an annular groove in the seat hole, the annular groove and the seat hole are coaxial; the retainer also has a through hole from the side wall to the annular groove; A variable focus lens having an annular frame and two circular film coatings, wherein the periphery of one film coating is connected to one end of a corresponding annular hole of the frame, and the periphery of the other film coating is connected to the other end of the annular hole to form a liquid cavity filled with a transparent liquid; wherein the frame is provided with a liquid hole and is positioned in the annular groove so that the liquid hole is aligned with the through hole; The metering liquid feeding device is connected to the liquid hole via the through hole to adjust the focal length of the zoom lens by controlling the filling amount of the liquid cavity.

2. The infrared temperature measurement process furnace according to claim 1, characterized in that: The pumping part of the metering liquid feeding device is a plunger type metering pump.

3. The infrared temperature measurement process furnace according to claim 2, characterized in that: A stop valve is provided on the pipeline connecting the plunger type metering pump and the liquid hole to maintain the liquid volume in the liquid cavity.

4. The infrared temperature measurement process furnace according to claim 1, characterized in that: The window glass of the observation window is transparent quartz glass.

5. The infrared temperature measurement process furnace according to claim 1, characterized in that: The film coating is a PE film coating.

6. The infrared temperature measurement process furnace according to claim 1, characterized in that: The liquid is a developer.

7. The infrared temperature measurement process furnace according to claim 6, characterized in that: The developer is a deionized aqueous solution of tetramethylammonium hydroxide, and the weight percentage of tetramethylammonium hydroxide in the aqueous solution is 6.71%.

8. The infrared temperature measurement process furnace according to claim 1, characterized in that: The retaining frame has a flange plate, and is connected to the temperature measuring hole through the flange plate.

9. The infrared temperature measurement process furnace according to claim 8, characterized in that: The retaining frame and the lens of the infrared thermometer are sealed and connected by a sleeve.

10. The infrared temperature measurement process furnace according to claim 8, characterized in that: The temperature measuring hole is connected through an extension pipe, and the extension pipe is equipped with a connecting flange for connecting with the flange plate.

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