A particle tester based on the detection of ultrapure water for industrial semiconductors

Abstract

The present invention discloses a particle tester based on the detection of ultrapure water for industrial semiconductors. The present invention relates to the technical field of particle detection and includes a device main body. The device main body includes a conveying component for transfer and transportation, a lifting component connected to the device main body, an upper clamping component connected to the lifting component, a heating component connected to the upper clamping component, a temperature sensor component connected to the upper clamping component, a lower clamping component connected to the conveying component, and a collection component connected to the device main body. The advantages of the present invention are as follows: By adopting the method of corresponding clamping and heating with the upper clamping component and the lower clamping component, the side wall of the pipeline inside the detection area is heated. The upper monitoring component can control the corresponding collection component to work according to the address code, realize the synchronous work of different collection components, and transmit the working data to the upper monitoring component in real time, improving the sampling efficiency and accuracy of liquid particle data.

Description

Technical Field

[0001] The present invention relates to the technical field of particle detection, and particularly to a particle tester based on the detection of industrial semiconductor ultrapure water. Background Art

[0002] In the process of semiconductor manufacturing, ultrapure water plays a crucial role in four aspects, including wafer cleaning, photoresist formulation, chemical reagent dilution, and equipment cooling and flushing. Generally speaking, the semiconductor industry has extremely strict requirements for the quality of ultrapure water, which need to meet the standards of specific conductivity, particulate content, microbial level, and total organic carbon, etc. It can be seen that the ultrapure water in semiconductors plays a crucial role in the semiconductor manufacturing process, ensuring the high quality and excellent performance of chips.

[0003] The detector equipment is mainly used in the monitoring and detection of ultrapure water to ensure that the quantity and size of particulate matter in ultrapure water meet the production requirements. By regularly detecting the particulate contamination in ultrapure water, potential problems can be discovered in a timely manner and necessary measures can be taken, such as replacing filters, adjusting production parameters, etc., to ensure the quality of ultrapure water.

[0004] The particle testing device is mainly used for counting particles in a liquid or a body, and usually uses the light resistance method to infer the area occupied by the particles, and then calculates the particle content per unit volume. However, the light resistance method is not convenient for simultaneous multi-point sampling, and when the particulate matter in water changes significantly, the turbidity of the liquid reacts slowly, resulting in the light resistance method being unable to sensitively reflect the size and quantity of particles corresponding to the size in the measured liquid, and thus the test data is not accurate enough. For this reason, we propose a particle tester based on the detection of industrial semiconductor ultrapure water. Summary of the Invention

[0005] The purpose of the present invention is to provide a particle tester based on the detection of industrial semiconductor ultrapure water.

[0006] To achieve the above purpose, the present invention provides the following technical solution: A particle tester based on the detection of industrial semiconductor ultrapure water, including a device main body, the device main body includes a conveying component for transfer and transportation, a lifting component connected to the device main body, an upper clamping component connected to the lifting component, a heating component connected to the upper clamping component, a temperature sensor component connected to the upper clamping component, a collection component connected to the device main body, a limiting frame connected to the collection component, an extension structure connected to the limiting frame, a power component connected to the extension structure, and a transmission component connected to the power component.

[0007] The heating assembly includes a reserved groove and a ceramic heating plate, the ceramic heating plate is arranged inside the reserved groove, the temperature sensor assembly includes a first temperature sensor and a second temperature sensor, an elastic thermal pad is arranged between the first temperature sensor and the second temperature sensor, the first temperature sensor is arranged on the right side of the second temperature sensor, an upper monitoring assembly is arranged inside the device body, and the acquisition assembly includes a control device, a connecting line and a sampling probe, and the connecting line and the sampling probe are fixed to the lower end of the control device;

[0008] The stretching structure includes a fixed rod, a stretching column, a limiting plate, an arc groove, a vertical groove and a rear plate body, the left and right ends of the two fixed rods are fixed inside the limiting frame, the two vertical grooves are opened on both sides of the limiting frame, the two sides of the limiting plate slide inside the two vertical grooves, the rear plate body is arranged inside the limiting frame and fixed, the arc groove is opened inside the limiting plate, the stretching column is slidably connected inside the arc groove, and the plurality of control devices are fixed in front of the stretching column;

[0009] The power assembly includes a lifting screw rod 2, a power block and a motor 2, wherein the motor 2 is fixed to the top surface of the limiting frame, the upper end of the lifting screw rod 2 is fixed to the lower end of the motor 2, the power block is threadedly connected to the lifting screw rod 2, and a limiting plate is fixed in front of the power block;

[0010] The transmission assembly includes a driving wheel, a driven wheel, a screw rod three, a transmission rod, a dovetail block and a transmission plate, wherein belts are installed on the driving wheel and the driven wheel, the upper end of the screw rod three is fixed to the output end of the driven wheel, the bottom of the driven wheel is transmitted with a transmission wheel, the transmission rod is connected to the transmission wheel through a belt, the upper end of the dovetail block is fixed to the lower end of the transmission rod, a dovetail groove is opened on the transmission plate, the dovetail block is slidably connected to the dovetail groove, the screw rod three is threadedly connected to the transmission plate, and a plurality of the control devices are fixed to the transmission plate.

[0011] As a further solution of the present invention: the conveying assembly includes a water inlet pipe and a water outlet pipe, the water inlet pipe is arranged on the right side of the device body, the water outlet pipe is arranged on the left side of the device body, and a water pump is arranged on the water inlet pipe.

[0012] As a further solution of the present invention: the lifting assembly includes a clamping frame, a receiving block, a supporting slide bar, a connecting arm and a clamping arm one, a fixing groove is opened inside the clamping frame, side grooves are opened on both sides of the fixing groove, a lifting rod is fixed inside the side groove, the lower ends of the two lifting rods are fixedly connected to the lifting blocks, the receiving block is fixed between the two lifting blocks, the supporting slide bar is fixed inside the clamping frame, a telescopic rod is fixed to the left ends of the two lifting blocks, the left end of the telescopic rod is fixed to the right end of the connecting arm, a clamping plate is fixed between the two connecting arms, and the lower end of the clamping plate is fixed to the upper end of the clamping arm one.

[0013] As a further solution of the present invention: the upper clamping assembly includes a clamping arm 2 and a motor 1, the inner side of the clamping arm 2 is threadedly connected to the clamping arm 3, the top of the clamping arm 3 is fixed with a telescopic frame, the motor 1 is fixed inside the telescopic frame, the right end of the motor 1 is fixed with a fine-tuning screw 1, the fine-tuning screw 1 is threadedly connected to a fine-tuning block, and the upper end of the fine-tuning block is fixed to the lower end of the clamping arm 2.

[0014] As a further solution of the present invention: the upper monitoring component includes a hardware platform and a software system, and infrared sensors are fixed on the upper clamping component and the lower clamping component.

[0015] As a further solution of the present invention: two lower clamping assemblies are arranged on the conveying assembly, and the heating assembly is respectively arranged on the top surface and the bottom surface of the upper clamping assembly, and the lower clamping assembly includes an adjusting rod, and the lower clamping assembly is fixedly connected to the bottom surface of the upper clamping assembly through the adjusting rod, and the top surface of the upper clamping assembly is fixedly connected to a clamping arm.

[0016] As a further solution of the present invention: the acquisition component also includes a signal conditioning circuit, a microcontroller and a communication module, an area to be detected is set inside the device body, and multiple acquisition components are placed in the area to be detected inside the device body.

[0017] By adopting the above technical solution, compared with the prior art, the beneficial effects of the present invention are:

[0018] 1. The present invention heats the side wall of the pipeline inside the detection area by adopting the corresponding clamping and heating method of the upper clamping component and the lower clamping component. The upper monitoring component can control the corresponding collection component to work according to the address code, realize the synchronous work of different collection components, and transmit the working data to the upper monitoring component in real time, thereby improving the sampling efficiency and accuracy of liquid particle data;

[0019] 2. The present invention uses a collection component to correspond the standard particle size of various particles to the standard voltage signal of the voltage pulse signal, and timely feeds back the standard voltage signal data to the upper monitoring component. The upper monitoring component corresponds to the particle size interval of a certain particle according to the standard voltage signal, and then determines the number of particles in each particle size interval, thereby realizing real-time and specific detection of the measured liquid particles;

[0020] 3. The present invention senses the temperature through the first temperature sensor and the second temperature sensor. When heating, the ceramic heating sheet in the heating assembly heats the elastic thermal pad, which can increase the temperature inside the pipeline, making the particles inside the liquid flowing through the pipeline active, thereby preventing the accumulation of particles. At the same time, the particles in the water are collected at multiple points, and when the particles in the water change significantly, the size of the particles in the measured liquid and the number of corresponding sizes can be sensitively reflected;

[0021] 4. The present invention uses two motors to act on the power blocks, thereby driving the limiting plate to slide inside the vertical slot, thereby driving multiple control devices fixed in front of the extension column to extend, and multiple extension columns slide obliquely inside the arc slot, thereby regularly extending, and cooperating with the upper monitoring component, and then intuitively displaying the temperature distribution inside the pipeline on the display terminal, thereby realizing uniform detection of the temperature inside the pipeline;

[0022] 5. The present invention drives the driving wheel and the driven wheel to rotate under the action of the belt through the second motor, and drives the transmission wheel at the bottom to rotate, so that the third screw and the transmission rod can simultaneously transmit multiple vertical control devices, and the dovetail block slides inside the dovetail groove, thereby realizing simultaneous sensing of the horizontal and vertical control devices, thereby uniformly sensing the temperature of the inner wall of the pipeline, and cooperating with the heating component, the detection effect is accurate.

[0023] Other advantages, objectives and features of the present invention will be set forth in part in the following description and, in part, will be apparent to those skilled in the art based on an examination of the following or may be taught from the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a first stereoscopic schematic diagram in an embodiment of the present invention;

[0025] Figure 2 It is a schematic diagram of the connection structure of the lifting assembly, the upper clamping assembly and the heating assembly in an embodiment of the present invention;

[0026] Figure 3 for Figure 2 Schematic diagram at A in the middle;

[0027] Figure 4It is a schematic diagram of the connection structure of the lifting assembly, the temperature sensor assembly and the elastic thermal pad in an embodiment of the present invention;

[0028] Figure 5 for Figure 4 Schematic diagram at B in the middle;

[0029] Figure 6 This is a schematic diagram of the connection structure of the lower clamping assembly, the upper clamping assembly and the heating assembly in an embodiment of the present invention;

[0030] Figure 7 It is a first stereoscopic schematic diagram of a collection component in an embodiment of the present invention;

[0031] Figure 8 is a second stereoscopic schematic diagram of a collection component in an embodiment of the present invention;

[0032] Figure 9 Schematic diagram of the connection structure between the limiting frame and the stretching structure in an embodiment of the present invention;

[0033] Figure 10 It is a schematic diagram of the connection structure of the limiting frame, the extension structure and the transmission assembly in an embodiment of the present invention;

[0034] Figure 11 is a three-dimensional schematic diagram of a power assembly in an embodiment of the present invention;

[0035] Figure 12 Schematic diagram of the connection structure between the limiting plate and the arc groove in an embodiment of the present invention;

[0036] Figure 13 This is a schematic diagram of the connection structure between the transmission component and the collection component in an embodiment of the present invention;

[0037] Figure 14 Schematic diagram of the connection structure of the dovetail block and the dovetail groove in an embodiment of the present invention.

[0038] In the figure: 1, device body; 2, conveying assembly; 21, water inlet pipe; 22, water outlet pipe;

[0039] 3. Lifting assembly; 31. Clamping frame; 32. Lifting rod; 33. Lifting block; 34. Undertaking block; 35. Support slide bar; 36. Telescopic rod; 37. Connecting arm; 38. Clamping plate; 39. Clamping arm one; 4. Upper clamping assembly; 41. Clamping arm two; 42. Clamping arm three; 43. Telescopic frame; 44. Motor one; 45. Fine-tuning screw one; 46. Fine-tuning block; 5. Heating assembly; 51. Reserved slot; 52. Ceramic heating plate; 6. Temperature sensor assembly; 61. First temperature sensor; 62. Second temperature sensor; 7. Lower clamping assembly; 8. Collection assembly; 81. Control device; 82. Connecting line; 83. Sampling probe; 9. Elastic thermal pad; 10. Upper monitoring assembly;

[0040] 11. Limiting frame; 12. Extension structure; 121. Fixed rod; 122. Extension column; 123. Limiting plate; 1231. Arc groove; 124. Vertical groove; 125. Rear plate; 13. Power assembly; 131. Lifting screw rod 2; 132. Power block; 133. Motor 2; 14. Transmission assembly; 141. Driving wheel; 142. Driven wheel; 143. Screw rod 3; 144. Transmission wheel; 145. Transmission rod; 146. Dovetail block; 147. Dovetail groove. DETAILED DESCRIPTION

[0041] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention.

[0042] In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0043] Please refer to the attached Figure 1 -Attached Figure 14 The present invention discloses a particle tester based on industrial semiconductor ultrapure water detection, comprising a device body 1, wherein the device body 1 comprises a conveying assembly 2 for conveying, a lifting assembly 3 connected to the device body 1, an upper clamping assembly 4 connected to the lifting assembly 3, a heating assembly 5 connected to the upper clamping assembly 4, a temperature sensor assembly 6 connected to the upper clamping assembly 4, a collection assembly 8 connected to the device body 1, a limiting frame 11 connected to the collection assembly 8, a stretching structure 12 connected to the limiting frame 11, a power assembly 13 connected to the stretching structure 12, and a transmission assembly 14 connected to the power assembly 13;

[0044] The heating assembly 5 includes a reserved groove 51 and a ceramic heating plate 52, and the ceramic heating plate 52 is arranged inside the reserved groove 51. The temperature sensor assembly 6 includes a first temperature sensor 61 and a second temperature sensor 62. An elastic thermal pad 9 is arranged between the first temperature sensor 61 and the second temperature sensor 62. The first temperature sensor 61 is arranged on the right side of the elastic thermal pad 9. An upper monitoring assembly 10 is arranged inside the device body 1. The collection assembly 8 includes a control device 81, a connecting line 82 and a sampling probe 83. The connecting line 82 and the sampling probe 83 are fixed to the lower end of the control device 81;

[0045] The extension structure 12 includes a fixed rod 121, an extension column 122, a limiting plate 123, an arc groove 1231, a vertical groove 124 and a rear plate 125. The left and right ends of the two fixed rods 121 are fixed inside the limiting frame 11. The two vertical grooves 124 are opened on both sides of the limiting frame 11. Both sides of the limiting plate 123 slide inside the two vertical grooves 124. The rear plate 125 is arranged inside the limiting frame 11 and fixed. The arc groove 1231 is opened inside the limiting plate 123. The extension column 122 is slidably connected to the inside of the arc groove 1231. A plurality of control devices 81 are fixed in front of the extension column 122.

[0046] The power assembly 13 includes a second lifting screw 131, a power block 132 and a second motor 133. The second motor 133 is fixed to the top surface of the limiting frame 11. The upper end of the second lifting screw 131 is fixed to the lower end of the second motor 133. The power block 132 is threadedly connected to the second lifting screw 131. The limiting plate 123 is fixed in front of the power block 132.

[0047] The transmission assembly 14 includes a driving wheel 141, a driven wheel 142, a screw rod 143, a transmission rod 145, a dovetail block 146 and a transmission plate. Belts are installed on the driving wheel 141 and the driven wheel 142. The upper end of the screw rod 143 is fixed to the output end of the driven wheel 142. The bottom of the driven wheel 142 is driven by a transmission wheel 144. The transmission rod 145 is connected to the transmission wheel 144 through a belt. The upper end of the dovetail block 146 is fixed to the lower end of the transmission rod 145. A dovetail groove 147 is opened on the transmission plate. The dovetail block 146 is slidably connected to the dovetail groove 147. The screw rod 143 is threadedly connected to the transmission plate. A plurality of control devices 81 are fixed to the transmission plate.

[0048] In the first embodiment, the delivery assembly 2 includes a water inlet pipe 21 and a water outlet pipe 22. The water inlet pipe 21 is arranged on the right side of the device body 1, and the water outlet pipe 22 is arranged on the left side of the device body 1. A water pump is arranged on the water inlet pipe 21.

[0049] Specifically, through the water inlet pipe 21 and the water outlet pipe 22 in the conveying component 2, when it is necessary to detect the particle content in the sewage, water enters the interior of the device body 1 through the water pump inlet pipe 21, and finally flows out through the water outlet pipe 22, thereby realizing the transfer and transportation of water, which is convenient for entering the next process.

[0050] Embodiment 2. The lifting assembly 3 includes a clamping frame 31, a receiving block 34, a support sliding rod 35, a connecting arm 37, and a first clamping arm 39. A fixing groove is formed inside the clamping frame 31. Side grooves are formed on both sides inside the fixing groove. Lifting rods 32 are fixed inside the side grooves. The lower ends of the two lifting rods 32 are fixedly connected to a lifting block 33. The receiving block 34 is fixed between the two lifting blocks 33. The support sliding rod 35 is fixed inside the clamping frame 31. The left ends of the two lifting blocks 33 are fixed with telescopic rods 36. The left end of the telescopic rod 36 is fixedly connected to the right end of the connecting arm 37. A clamping plate 38 is fixed between the two connecting arms 37. The lower end of the clamping plate 38 is fixedly connected to the upper end of the first clamping arm 39;

[0051] Specifically, the lifting rods 32 in the lifting assembly 3 drive the lifting blocks 33 and the receiving block 34 on both sides to lift. The receiving block 34 slides and is supported on the support sliding rod 35 to achieve up and down lifting. The telescopic rod 36 drives the connecting arm 37 and the clamping plate 38 to move left and right, realizing the left and right extension of the first clamping arm 39.

[0052] Embodiment 3. The upper clamping assembly 4 includes a second clamping arm 41 and a first motor 44. A third clamping arm 42 is threadedly connected to the inner side of the second clamping arm 41. The top end of the third clamping arm 42 is fixed with a telescopic frame 43. The first motor 44 is fixed inside the telescopic frame 43. A first fine-tuning screw 45 is fixed to the right end of the first motor 44. A fine-tuning block 46 is threadedly connected to the first fine-tuning screw 45. The upper end of the fine-tuning block 46 is fixedly connected to the lower end of the second clamping arm 41;

[0053] Specifically, the first motor 44 drives the fine-tuning block 46 on the first fine-tuning screw 45 to slide. Since the second clamping arm 41 is fixedly connected to the upper end of the fine-tuning block 46, when the fine-tuning block 46 moves, it drives the second clamping arm 41 to move left and right, facilitating the adaptation to pipes of different lengths.

[0054] Embodiment 4. The upper monitoring assembly 10 includes a hardware platform and a software system. Infrared sensors are fixed on both the upper clamping assembly 4 and the lower clamping assembly 7 to sense and correspondingly clamp the clamped pipe;

[0055] Specifically, by setting the upper monitoring assembly 10, the requirements for a large amount of data processing and storage can be met, effectively controlling and data collecting the collecting assembly 8, meeting the requirements for detecting particulate matter in liquid, and having high precision, stability, and reliability.

[0056] Embodiment 5. Two lower clamping assemblies 7 are provided on the conveying assembly 2. The heating assemblies 5 are respectively arranged on the top surface and the bottom surface of the upper clamping assembly 4. The lower clamping assembly 7 includes an adjusting rod. The lower clamping assembly 7 is fixedly connected to the bottom surface of the upper clamping assembly 4 through the adjusting rod. The top surface of the upper clamping assembly 4 is fixedly connected to the first clamping arm 39;

[0057] Specifically, by setting the lower clamping component 7 and the upper clamping component 4 to correspond to each other, when clamping is required, the infrared sensor senses, and the adjusting rod in the lower clamping component 7 extends or retracts to the required height, cooperating with the upper clamping component 4 to clamp pipes with different diameters and lengths, and the relative clamping effect is good.

[0058] Embodiment 6, the acquisition component 8 further includes a signal conditioning circuit, a microcontroller, and a communication module. The sampling probe 83 is made of stainless steel, and a high-precision photoelectric sensor is installed inside. The signal conditioning circuit amplifies, filters, and shapes the weak electrical signal output by the photoelectric sensor, and converts it into a standard digital signal suitable for the microcontroller to process. The microcontroller selects a low-power, high-performance single-chip microcomputer, which is responsible for controlling the operation of the sampling probe 83, collecting, and processing signal data. The communication module uses an industrial-grade RS485 communication chip, which supports multi-node communication. A to-be-detected area is provided inside the device main body 1, and multiple acquisition components 8 are placed at the to-be-detected area inside the device main body 1;

[0059] Specifically, each acquisition component 8 has a unique address code, which is set on the communication module through a DIP switch. The upper monitoring component 10 can identify different acquisition components 8 according to the address code, and perform separate control and data acquisition on them.

[0060] Specifically, by adopting the method of corresponding clamping and heating with the upper clamping component 4 and the lower clamping component 7, the side wall of the pipe inside the detection area is heated. The upper monitoring component 10 can control the corresponding acquisition component 8 to work according to the address code, realize the synchronous work of different acquisition components 8, and transmit the working data to the upper monitoring component 10 in real time, improving the liquid particulate data sampling efficiency.

[0061] Specifically, the acquisition component 8 corresponds various particulate standard particle sizes to the standard voltage signals of voltage pulse signals, and timely feeds back the standard voltage signal data to the upper monitoring component 10. The upper monitoring component 10 determines the particle size interval of a certain particulate according to the standard voltage signal, and further determines the number of particulate in each particle size interval, realizing the real-time and specific detection of the measured liquid particulate.

[0062] Specifically, the first temperature sensor 61 and the second temperature sensor 62 sense the temperature. When heating, the ceramic heating sheet 52 in the heating component 5 heats the elastic heat-conducting pad 9, which can increase the temperature inside the pipe, make the particles inside the liquid flowing through the pipe active, thereby preventing particulate accumulation. At the same time, multi-point sampling of particulate in water is performed, and when the particulate in water changes significantly, it can sensitively reflect the size of the particles in the measured liquid and the number of particles corresponding to the size;

[0063] The liquid particle detector, its core working principle is based on the light scattering method, specifically including the following steps:

[0064] Laser beam emission: The particle analyzer is equipped with a high-precision laser for emitting a stable and monochromatic laser beam, which has a definite wavelength and intensity and serves as the basis for subsequent scattered light measurement.

[0065] Laser beam passing through the liquid to be measured: The laser beam is guided through the liquid sample to be measured. During the process of the laser beam passing through the liquid, the particulate matter in the liquid will interact with the laser beam, causing light scattering.

[0066] Measurement of scattered light intensity and wavelength: The particle analyzer is provided with multiple scattered light receivers located at different angles. These receivers are used to capture and measure the intensity and wavelength of the light scattered by the particulate matter.

[0067] The intensity of the scattered light is closely related to the size of the particles. Generally speaking, the larger the particles, the higher the intensity of the scattered light, and the wavelength of the scattered light will also change accordingly.

[0068] By measuring the scattered light intensity at different angles, a relationship curve between the scattered light intensity and the angle can be constructed, and then the particle size distribution of the particulate matter can be inferred.

[0069] Measurement of the light absorption effect of particulate matter: In addition to the scattering effect, the particulate matter will also have an absorption effect on the laser beam. This absorption effect will cause the intensity of the laser beam to weaken after passing through the liquid.

[0070] The particle analyzer is equipped with a light intensity detector for measuring the intensity change of the laser beam before and after passing through the liquid to be measured.

[0071] By comparing the initial intensity of the laser beam with the intensity after passing through the liquid, the light absorption degree of the particulate matter can be calculated, and then the concentration of the particulate matter can be inferred.

[0072] Data processing and analysis: The particle analyzer is equipped with a data processing system for processing and analyzing the collected scattered light intensity, wavelength, and light intensity change data.

[0073] Through specific algorithms and models, the data processing system can accurately calculate the particle size distribution and concentration of the particulate matter and display the results in an intuitive form.

[0074] Working principle:

[0075] First, the upper clamping component 4 and the lower clamping component 7 are used to clamp the two side walls of the water inlet pipe 21 in the conveying component 2 through which the liquid flows, and then the heating component 5 is turned on so that the heating component 5 can be heated by the upper clamping component 4 and the lower clamping component 7. Then, the heat is transferred to the pipeline through the elastic thermal pad 9, so that the temperature inside the pipeline will not be too low, so that the particles inside the liquid can be active, thereby preventing the particles from agglomerating and accumulating in one place, resulting in errors in the detection data. At the same time, multiple collection components 8 are placed in the area to be detected inside the device body 1, and each collection component 8 establishes data transmission with the upper monitoring component 10 respectively. Then, the area where the particle information needs to be collected is monitored by the upper monitoring component 10, and the collection component 8 arranged in the area is called to collect information. Before the collection work starts, the working state of the collection component 8 is pre-configured and then the collection work is done until the collection work is completed. During this period, the collection component 8 transmits data to the upper monitoring component 10 in real time, and the hardware platform and software system in the upper monitoring component 10 display the collected data in real time and store the collected data;

[0076] When it is necessary to evenly stretch the control device 81 fixed in front of the stretching column 122, start the second motor 133 to act on the power block 132, thereby driving the limiting plate 123 to slide inside the vertical groove 124, and then driving multiple control devices 81 fixed in front of the stretching column 122 to stretch. Multiple stretching columns 122 slide obliquely inside the arc groove 1231, thereby regularly stretching to achieve uniform temperature detection. At the same time, when the control device 81 fixed on the transmission plate is vertically and evenly stretched, the second motor 133 drives the active wheel 141 and the driven wheel 142 to rotate under the action of the belt, driving the bottom transmission wheel 144 to rotate, the screw three 143 and the transmission rod 145 can simultaneously transmit multiple vertical control devices 81, and the dovetail block 146 slides inside the dovetail groove 147, thereby achieving simultaneous sensing of the horizontal and vertical control devices 81. At this point, the entire workflow ends.

[0077] The above front, back, left, right, top and bottom are all in the instruction manual. Figure 1 The perspective of the device itself is used as the reference.

[0078] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the scope of protection of the present invention.

[0079] The embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the described embodiments.

[0080] For those skilled in the art, without departing from the principle and spirit of the present invention, various changes, modifications, substitutions, and variations made to these embodiments still fall within the protection scope of the present invention.

Claims

1. A particle tester based on industrial semiconductor ultrapure water detection, comprising a device body (1), characterized in that: The device body (1) comprises a conveying assembly (2) for transferring and transporting, a lifting assembly (3) connected to the device body (1), an upper clamping assembly (4) connected to the lifting assembly (3), a heating assembly (5) connected to the upper clamping assembly (4), a temperature sensor assembly (6) connected to the upper clamping assembly (4), a collection assembly (8) connected to the device body (1), a limiting frame (11) connected to the collection assembly (8), an extension structure (12) connected to the limiting frame (11), a power assembly (13) connected to the extension structure (12), and a transmission assembly (14) connected to the power assembly (13); The heating component (5) comprises a reserved groove (51) and a ceramic heating plate (52), wherein the ceramic heating plate (52) is arranged inside the reserved groove (51); the temperature sensor component (6) comprises a first temperature sensor (61) and a second temperature sensor (62), wherein an elastic thermal pad (9) is arranged between the first temperature sensor (61) and the second temperature sensor (62), and the first temperature sensor (61) is arranged on the right side of the second temperature sensor (62); an upper monitoring component (10) is arranged inside the device body (1); and the collection component (8) comprises a control device (81), a connecting line (82) and a sampling probe (83), wherein the connecting line (82) and the sampling probe (83) are fixed to the lower end of the control device (81); The stretching structure (12) comprises a fixing rod (121), a stretching column (122), a limiting plate (123), an arc-shaped groove (1231), a vertical groove (124) and a rear plate (125); the left and right ends of the two fixing rods (121) are fixed inside the limiting frame (11); the two vertical grooves (124) are opened on both sides of the limiting frame (11); the two sides of the limiting plate (123) slide inside the two vertical grooves (124); the rear plate (125) is arranged and fixed inside the limiting frame (11); the arc-shaped groove (1231) is opened inside the limiting plate (123); the stretching column (122) is slidably connected to the inside of the arc-shaped groove (1231); and the plurality of control devices (81) are fixed in front of the stretching column (122); The power assembly (13) comprises a second lifting screw (131), a power block (132) and a second motor (133); the second motor (133) is fixed to the top surface of the limiting frame (11); the upper end of the second lifting screw (131) is fixed to the lower end of the second motor (133); the power block (132) is threadedly connected to the second lifting screw (131); a limiting plate (123) is fixed in front of the power block (132); and the second lifting screw (131) is passed through the rear plate (125); The transmission assembly (14) comprises a driving wheel (141), a driven wheel (142), a screw rod (143), a transmission rod (145), a dovetail block (146) and a transmission plate. Belts are installed on the driving wheel (141) and the driven wheel (142). The upper end of the screw rod (143) is fixed to the output end of the driven wheel (142). The bottom of the driven wheel (142) is driven by a transmission wheel (144). The transmission rod (145) is connected to the transmission wheel (144) through a belt. The upper end of the dovetail block (146) is fixed to the lower end of the transmission rod (145). A dovetail groove (147) is provided on the transmission plate. The dovetail block (146) is slidably connected to the dovetail groove (147). The screw rod (143) is threadedly connected to the transmission plate. A plurality of control devices (81) are fixed to the transmission plate.

2. A particle tester based on industrial semiconductor ultrapure water detection according to claim 1, characterized in that: The conveying assembly (2) comprises a water inlet pipe (21) and a water outlet pipe (22); the water inlet pipe (21) is arranged on the right side of the device body (1); the water outlet pipe (22) is arranged on the left side of the device body (1); and a water pump is arranged on the water inlet pipe (21).

3. A particle tester based on industrial semiconductor ultrapure water detection according to claim 1, characterized in that: The lifting assembly (3) comprises a clamping frame (31), a receiving block (34), a supporting slide bar (35), a connecting arm (37) and a clamping arm (39). A fixing groove is provided inside the clamping frame (31), and side grooves are provided inside the fixing groove on both sides. A lifting rod (32) is fixed inside the side groove. The lower ends of the two lifting rods (32) are fixedly connected to the lifting blocks (33). The receiving block (34) is fixed between the two lifting blocks (33). The supporting slide bar (35) is fixed inside the clamping frame (31). A telescopic rod (36) is fixed to the left ends of the two lifting blocks (33). The left end of the telescopic rod (36) is fixed to the right end of the connecting arm (37). A clamping plate (38) is fixed between the two connecting arms (37), and the lower end of the clamping plate (38) is fixed to the upper end of the clamping arm (39).

4. A particle tester based on industrial semiconductor ultrapure water detection according to claim 1, characterized in that: The upper clamping assembly (4) comprises a clamping arm 2 (41) and a motor 1 (44); the inner side of the clamping arm 2 (41) is threadedly connected to the clamping arm 3 (42); a telescopic frame (43) is fixed to the top of the clamping arm 3 (42); the motor 1 (44) is fixed inside the telescopic frame (43); a fine-tuning screw rod 1 (45) is fixed to the right end of the motor 1 (44); a fine-tuning block (46) is threadedly connected to the fine-tuning screw rod 1 (45); the upper end of the fine-tuning block (46) is fixed to the lower end of the clamping arm 2 (41).

5. The particle tester based on industrial semiconductor ultrapure water detection according to claim 1 is characterized in that: The upper monitoring component (10) comprises a hardware platform and a software system, and infrared sensors are fixed on both the upper clamping component (4) and the lower clamping component (7).

6. A particle tester based on industrial semiconductor ultrapure water detection according to claim 1, characterized in that: The conveying component (2) is provided with two lower clamping components (7), and the heating component (5) is respectively provided on the top surface and the bottom surface of the upper clamping component (4), and the lower clamping component (7) includes an adjusting rod, and the lower clamping component (7) is fixedly connected to the bottom surface of the upper clamping component (4) via the adjusting rod, and the top surface of the upper clamping component (4) is fixedly connected to a clamping arm (39).

7. The particle tester based on industrial semiconductor ultrapure water detection according to claim 1 is characterized in that: The acquisition component (8) further comprises a signal conditioning circuit, a microcontroller and a communication module. An area to be detected is provided inside the device body (1), and a plurality of the acquisition components (8) are placed in the area to be detected inside the device body (1).

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