Light beam scanning table for objective lens image quality detection

Abstract

The invention belongs to the technical field of microelectronic experiment auxiliary equipment, and particularly relates to a light beam scanning table for objective lens image quality detection, which consists of a base, a supporting device, a light beam guiding device and a light condensing cylinder adjusting device, a drawer groove is formed in the front side of the top of the base, a mask plate is inserted into the drawer groove, a supporting device is installed on the rear side of the top of the base, the light beam guiding device is installed on the supporting device, and a light gathering cylinder adjusting device is installed on the rear side of the base and located under the light beam guiding device. The light beam scanning table for objective lens image quality detection is simple and practical, has a modularized structure, can be combined into a complete scanning table through the installation and cooperation of different module devices, can realize the flexible switching of the condensing lenses, greatly improves the efficiency of replacing condensing cylinders with different focal lengths in the experiment process, and is convenient to use. And a more efficient operation mode is provided for obtaining multiple groups of comparison data.

Description

Technical Field

[0001] The invention relates to the technical field of microelectronic experiment auxiliary equipment, in particular to a light beam scanning platform for detecting the image quality of an object. Background Art

[0002] The photolithography process is an important step in the semiconductor device manufacturing process. This step uses exposure and development to depict geometric structures on the photoresist layer, and then uses the etching process to transfer the patterns on the mask layer by layer to the substrate, eventually forming dozens of layers of complex circuit structures on the silicon wafer. The imaging quality of the objective lens directly affects the quality of the photolithography pattern and overlay, so the image quality detection of the objective lens is particularly important.

[0003] However, the existing scanning platforms are bulky and expensive, and use many precision components that are easily damaged. The cost of use and maintenance is also high. It is also necessary to consider how to reduce the cost of objective image quality detection while ensuring the imaging quality of the objective lens. Therefore, we propose a new type of beam scanning platform that can be put into use at any time, has a reasonable structure and low cost, which is specially used for objective image quality detection and experiments. Summary of the invention

[0004] The object of the present invention is to provide a light beam scanning stage for detecting the image quality of an objective, so as to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a beam scanning platform for detecting the image quality of an objective, which is composed of a base, a supporting device, a beam guiding device and a focusing tube adjusting device;

[0006] A drawer groove is provided on the top front side of the base, a mask plate is inserted into the drawer groove, a supporting device is installed on the top rear side of the base, the light beam guiding device is installed on the supporting device, a focusing tube adjusting device is installed on the rear side of the base, and the focusing tube adjusting device is located directly below the light beam guiding device;

[0007] The main body of the support device is a fixed rod, the upper part and the lower part of the fixed rod are respectively sleeved with an upper reflector and a lower reflector, the lower reflector reflects the light beam to the upper reflector, and the rear ends of the reflector and the lower reflector are fixed with a connecting rod, the connecting rod penetrates and is inserted in the fixed rod, and the directions of the upper reflector and the lower reflector can be adjusted by rotating the connecting rod;

[0008] The light beam guiding device is composed of a guide cylinder mounting seat and a guide cylinder, wherein the guide cylinder mounting seat is sleeved on a fixing rod; a guide cylinder is mounted at the front end of the guide cylinder mounting seat, wherein the guide cylinder is located below an upper reflector, and the upper reflector reflects the light beam into the guide cylinder;

[0009] The focusing tube adjustment device is composed of a focusing tube mounting frame, an adjustment shaft, and a plurality of focusing tubes. The focusing tube mounting frame is installed on the right side of the base by bolts, and the adjusting shaft and the driving shaft are rotatably installed on the top of the focusing tube mounting frame.

[0010] A plurality of focusing tubes are arranged around the outer side of the adjustment shaft, the leftmost focusing tube is located directly below the guide tube, and the light beam reflected by the upper reflector passes through the guide tube and is irradiated into the focusing tube, a focusing mirror is arranged in the focusing tube, and the focusing tube is located directly above the mask plate, and the light beam focused by the condenser is irradiated onto the mask plate.

[0011] Preferably, a fixing frame is sleeved on the outer side of the guide cylinder, an adjusting edge is provided on the side of the fixing frame close to the guide cylinder mounting seat, an adjusting groove is opened on the side of the guide cylinder mounting seat close to the fixing frame, the adjusting edge is slidably inserted in the adjusting groove, a mounting seat locking bolt is installed on the left side of the guide cylinder mounting seat, the mounting seat locking bolt is screwed inwardly to the adjusting edge, and the guide cylinder is fixed by the friction between the mounting seat locking bolt and the adjusting edge.

[0012] Preferably, a mounting seat locking bolt is also installed on the rear side of the guide cylinder mounting seat, and the mounting seat locking bolt on the rear side is screwed to the fixing rod, and the guide cylinder mounting seat is fixed by the friction between the mounting seat locking bolt on the rear side and the fixing rod.

[0013] Preferably, condensers with different focal lengths are respectively arranged in several of the condensing cylinders, and multiple sets of comparative data can be obtained when the condensing cylinders with different focal lengths are respectively adjusted under the guide cylinder; a driven gear ring is fixed to the lower part of the adjusting shaft, the driving shaft is installed on the right side of the adjusting shaft, a tooth edge is installed on the top of the driving shaft, and the tooth edge meshes with the driven gear ring to the left, the adjusting shaft can be driven to rotate by rotating the driving shaft, and the condensing cylinder under the guide cylinder can be replaced by rotating the adjusting shaft.

[0014] Preferably, mounting grooves are equidistantly formed on the upper inner wall of the condensing tube, mounting blocks are equidistantly fixed to the edge of the condensing mirror, and the condensing mirror is mounted in the mounting groove of the condensing tube using the mounting blocks.

[0015] Preferably, a limiting ring is also sleeved on the fixing rod, the limiting ring is located at the bottom of the guide cylinder mounting seat, and the limiting ring supports and limits the guide cylinder mounting seat upward, and a locking bolt is also provided on the limiting ring for locking.

[0016] Preferably, the connecting positions of the fixing rod and the connecting rod are both sleeved with a reflector locking ring, and the locking ring is threaded with a locking bolt, which abuts against the side wall of the connecting rod when facing inward, and the connecting rod is fixed by the friction between the locking bolt and the connecting rod.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] This solution provides a simple and practical beam scanning platform for objective image quality detection. The upper reflector and the lower reflector in the support device pass through the fixed rod through the connecting rod. This design allows the direction of the reflector to be adjusted by rotating the connecting rod. Compared with the traditional complex mechanical adjustment structure, this adjustment method is simpler and more direct, and can quickly and accurately change the angle of the reflector to meet the requirements of different beam incident angles and reflection paths, achieving the convenience of angle adjustment;

[0019] The fixed rod is a retractable rod body, so that the support device can flexibly adjust the height and spatial position according to different experimental environments and equipment layout requirements;

[0020] The modular focusing adjustment device has several focusing tubes arranged around the outer side of the adjustment shaft in the focusing tube adjustment device. The tooth edges and driven gear rings on the driving shaft and the adjustment shaft are meshed with each other. The adjustment shaft can be rotated by rotating the driving shaft, thereby replacing the focusing tube under the guide tube. This design enables the quick and convenient replacement of focusing tubes. Compared with the traditional method of disassembling and installing focusing tubes one by one, it greatly improves the efficiency of replacing focusing tubes with different focal lengths during the experiment, and provides a more efficient operation method for obtaining multiple sets of comparative data.

[0021] The upper part of the inner wall of the condenser tube is provided with mounting grooves at equal intervals, and mounting blocks are fixed at equal intervals on the edge of the condenser, which is installed in the mounting groove of the condenser tube using the mounting blocks. This condenser installation method is simple and firm. Compared with some complicated gluing or nesting installation methods, it is not only easy to install and disassemble, but also can ensure the position accuracy of the condenser in the condenser tube, which is conducive to a stable focusing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is the front view of the present invention;

[0023] Figure 2 It is a right side view of the present invention;

[0024] Figure 3 It is a rear view of the present invention;

[0025] Figure 4 For the present invention Figure 3 Partial magnification;

[0026] Figure 5 It is an exploded view of the focusing tube of the present invention.

[0027] In the figure: 10 a base, 101 a drawer slot, 102 a mask plate;

[0028] 20 supporting device, 201 fixing rod, 202 limiting ring, 203 upper reflector, 204 lower reflector, 205 reflector locking ring, 206 connecting rod;

[0029] 30 beam guiding device, 301 guide tube mounting seat, 302 mounting seat locking bolt, 303 guide tube, 304 adjusting edge;

[0030] 40 condenser adjustment device, 401 condenser mounting frame, 402 adjustment shaft, 403 condenser, 404 driven gear ring, 405 driving shaft;

[0031] 403-1 condenser, 403-2 mounting block, 403-3 mounting slot. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0034] Example:

[0035] See also Figure 1-5 The present invention provides a technical solution of a beam scanning platform for detecting the image quality of an object: it is composed of a base 10, a supporting device 20, a beam guiding device 30 and a focusing tube adjusting device 40;

[0036] A drawer groove 101 is provided on the top front side of the base 10, and a mask plate 102 is inserted into the drawer groove 101. A support device 20 is installed on the top rear side of the base 101, and a light beam guiding device 30 is installed on the support device 20. A focusing tube adjustment device 40 is installed on the rear side of the base 10, and the focusing tube adjustment device 40 is located directly below the light beam guiding device 30.

[0037] The main body of the supporting device 20 is a fixed rod 201, and the upper and lower parts of the fixed rod 201 are respectively sleeved with an upper reflector 203 and a lower reflector 204, and the lower reflector 204 reflects the light beam to the upper reflector 203. The rear ends of the reflector 203 and the lower reflector 204 are fixed with a connecting rod 206, and the connecting rod 206 penetrates and is inserted in the fixed rod 201. The directions of the upper reflector 203 and the lower reflector 204 can be adjusted by rotating the connecting rod 206. The connecting position of the fixed rod 201 and the connecting rod 206 is sleeved with a reflector locking ring 205, and the locking bolt is screwed on the locking ring 205. When the locking bolt is inward, it abuts against the side wall of the connecting rod 206, and the connecting rod 206 is fixed by the friction between the locking bolt and the connecting rod 206.

[0038] The fixing rod 201 is a telescopic rod body, and the length is adjusted by the structure of the nested sleeve. The limiting ring 202 below the guide tube mounting seat 301 is screwed inwardly and fixed. The locking bolt on the limiting ring 202 is screwed to the internal telescopic sleeve. The friction of the locking bolt is used to fix the telescopic sleeve to meet different working requirements.

[0039] The light beam guiding device 30 is composed of a guide cylinder mounting seat 301 and a guide cylinder 303. The guide cylinder mounting seat 301 is sleeved on the fixing rod 201. The fixing rod 201 is also sleeved with a limiting ring 202. The limiting ring 202 is located at the bottom of the guide cylinder mounting seat 301. The limiting ring 202 supports and limits the guide cylinder mounting seat 301 upwards. The limiting ring 202 is also provided with a locking bolt for locking.

[0040] A guide tube 303 is installed at the front end of the guide tube mounting seat 301. The guide tube 303 is located below the upper reflector 203, and the upper reflector 203 reflects the light beam into the guide tube 303.

[0041] A fixing frame is sleeved on the outer side of the guide cylinder 303, and an adjusting edge 304 is arranged on the side of the fixing frame close to the guide cylinder mounting seat 301. An adjusting groove is opened on the side of the guide cylinder mounting seat 301 close to the fixing frame, and the adjusting edge is slidably inserted in the adjusting groove. A mounting seat locking bolt 302 is installed on the left side of the guide cylinder mounting seat 301, and the mounting seat locking bolt 302 is screwed inwardly onto the adjusting edge 304, and the guide cylinder 303 is fixed by the friction between the mounting seat locking bolt 302 and the adjusting edge 304;

[0042] A mounting seat locking bolt 302 is also installed on the rear side of the guide cylinder mounting seat 301, and the mounting seat locking bolt 302 on the rear side is screwed to the fixing rod 201, and the guide cylinder mounting seat 301 is fixed by the friction between the mounting seat locking bolt 302 on the rear side and the fixing rod 201;

[0043] The focusing tube adjustment device 40 is composed of a focusing tube mounting frame 401, an adjustment shaft 402, and a plurality of focusing tubes 403. The focusing tube mounting frame 401 is installed on the right side of the base 10 by bolts, and the adjusting shaft 402 and the driving shaft 405 are rotatably installed on the top of the focusing tube mounting frame 401.

[0044] A plurality of condensing tubes 403 are arranged around the outer side of the adjustment shaft 402. The leftmost condensing tube 403 is located directly below the guide tube 303. The light beam reflected by the upper reflector 203 passes through the guide tube 303 and is irradiated into the condensing tube 403. A condensing mirror 403-1 is arranged in the condensing tube 403. The condensing tube 403 is located directly above the mask plate 102. The light beam condensed by the condensing mirror 403-1 is irradiated onto the mask plate 102.

[0045] Condensers 403-1 with different focal lengths are respectively arranged in a plurality of condensing tubes 403. When the condensing tubes 403 with different focal lengths are respectively adjusted below the guide tube 303, multiple sets of comparison data can be obtained. A driven gear ring 404 is fixed to the lower part of the adjustment shaft 402. A driving shaft 405 is installed on the right side of the adjustment shaft 402. A tooth edge is installed on the top of the driving shaft 405. The tooth edge meshes with the driven gear ring 404 to the left. The adjustment shaft 402 can be driven to rotate by rotating the driving shaft 405. The condensing tube 403 below the guide tube 303 can be replaced by rotating the adjustment shaft 402.

[0046] Mounting grooves 403-3 are equidistantly provided on the upper inner wall of the focusing tube 403, mounting blocks 403-2 are equidistantly fixed on the edge of the focusing lens 403, and the focusing lens 403-1 is mounted in the mounting groove 403-3 of the focusing tube 403 using the mounting blocks 403-2. This layout provides a reasonable architecture for operations such as light beam transmission, adjustment and focusing.

[0047] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention; therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is limited by the attached claims rather than the above description. Therefore, it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the present invention, and any figure marks in the claims should not be regarded as limiting the claims involved.

[0048] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A beam scanning platform for detecting the image quality of an object, comprising a base (10), a supporting device (20), a beam guiding device (30) and a focusing tube adjusting device (40), characterized in that: A drawer groove (101) is provided on the front side of the top of the base (10), a mask plate (102) is inserted into the drawer groove (101), a support device (20) is installed on the rear side of the top of the base (101), the light beam guiding device (30) is installed on the support device (20), and a focusing tube adjustment device (40) is installed on the rear side of the base (10), and the focusing tube adjustment device (40) is located directly below the light beam guiding device (30); The main body of the support device (20) is a fixed rod (201), the upper part and the lower part of the fixed rod (201) are respectively sleeved with an upper reflector (203) and a lower reflector (204), the lower reflector (204) reflects the light beam to the upper reflector (203), the rear ends of the reflector (203) and the lower reflector (204) are both fixed with a connecting rod (206), the connecting rod (206) penetrates and is inserted into the fixed rod (201), and the directions of the upper reflector (203) and the lower reflector (204) can be adjusted by rotating the connecting rod (206); The light beam guiding device (30) is composed of a guide cylinder mounting seat (301) and a guide cylinder (303), wherein the guide cylinder mounting seat (301) is sleeved on a fixing rod (201); a guide cylinder (303) is mounted at the front end of the guide cylinder mounting seat (301), the guide cylinder (303) is located below an upper reflector (203), and the upper reflector (203) reflects the light beam into the guide cylinder (303); The focusing tube adjustment device (40) is composed of a focusing tube mounting frame (401), an adjustment shaft (402), and a plurality of focusing tubes (403); the focusing tube mounting frame (401) is mounted on the right side of the base (10) by means of bolts; the adjusting shaft (402) and a driving shaft (405) are rotatably mounted on the top of the focusing tube mounting frame (401); A plurality of condensing tubes (403) are arranged around the outer side of the adjustment shaft (402), the leftmost condensing tube (403) is located directly below the guide tube (303), and the light beam reflected by the upper reflector (203) passes through the guide tube (303) and is irradiated into the condensing tube (403), a condensing mirror (403-1) is arranged in the condensing tube (403), the condensing tube (403) is located directly above the mask plate (102), and the light beam condensed by the condensing mirror (403-1) is irradiated onto the mask plate (102).

2. A beam scanning platform for detecting the image quality of an object according to claim 1, characterized in that: A fixing frame is sleeved on the outer side of the guide cylinder (303), and an adjusting edge (304) is arranged on a side of the fixing frame close to the guide cylinder mounting seat (301). An adjusting groove is provided on a side of the guide cylinder mounting seat (301) close to the fixing frame, and the adjusting edge is slidably inserted in the adjusting groove. A mounting seat locking bolt (302) is installed on the left side of the guide cylinder mounting seat (301), and the mounting seat locking bolt (302) is screwed inwardly onto the adjusting edge (304), and the guide cylinder (303) is fixed by friction between the mounting seat locking bolt (302) and the adjusting edge (304).

3. A beam scanning platform for detecting the image quality of an object according to claim 2, characterized in that: A mounting seat locking bolt (302) is also installed on the rear side of the guide cylinder mounting seat (301), and the mounting seat locking bolt (302) on the rear side is screwed to the fixing rod (201), and the guide cylinder mounting seat (301) is fixed by friction between the mounting seat locking bolt (302) on the rear side and the fixing rod (201).

4. The light beam scanning platform for detecting the image quality of an object according to claim 1, characterized in that: Condensers (403-1) with different focal lengths are respectively arranged in a plurality of the condensing tubes (403). When the condensing tubes (403) with different focal lengths are respectively adjusted below the guide tube (303), multiple sets of comparison data can be obtained. A driven gear ring (404) is fixed to the lower part of the adjustment shaft (402). The driving shaft (405) is installed on the right side of the adjustment shaft (402). A tooth edge is installed on the top of the driving shaft (405). The tooth edge meshes with the driven gear ring (404) to the left. The adjustment shaft (402) can be driven to rotate by rotating the driving shaft (405). The condensing tube (403) below the guide tube (303) can be replaced by rotating the adjustment shaft (402).

5. A beam scanning platform for detecting the image quality of an object according to claim 1 or 4, characterized in that: The upper part of the inner wall of the condensing tube (403) is provided with mounting grooves (403-3) at equal intervals, the edge of the condensing mirror (403) is fixed with mounting blocks (403-2) at equal intervals, and the condensing mirror (403-1) is mounted in the mounting groove (403-3) of the condensing tube (403) using the mounting blocks (403-2).

6. The light beam scanning platform for detecting the image quality of an object according to claim 1, characterized in that: The fixing rod (201) is also sleeved with a limiting ring (202), the limiting ring (202) is located at the bottom of the guide cylinder mounting seat (301), and the limiting ring (202) supports and limits the guide cylinder mounting seat (301) upwards, and a locking bolt is also provided on the limiting ring (202) for locking.

7. The light beam scanning platform for detecting the image quality of an object according to claim 1, characterized in that: A reflector locking ring (205) is sleeved at the connection position between the fixing rod (201) and the connecting rod (206), and a locking bolt is threaded on the locking ring (205). When the locking bolt is inwardly facing, it abuts against the side wall of the connecting rod (206), and the connecting rod (206) is fixed by the friction between the locking bolt and the connecting rod (206).

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