The invention discloses a vacuum
capacitor capable of accurately controlling a
capacitance value, which comprises a shell, two
electrode discs and two
electrode groups, and is characterized in that the two
electrode discs are respectively connected to two ends of the shell in a sealing manner so as to form a vacuum cavity in the shell; the two electrode sets are fixedly connected to the two electrode discs in a one-to-one correspondence mode, and meanwhile the two electrode sets are contained in the vacuum cavity in a mutually coupled mode. At least one of the two electrode plates is in sealed connection with the shell through a connecting piece, the connecting piece is provided with a deformation part, and when axial acting force is applied to the vacuum
capacitor, the connecting piece is stressed to enable the deformation part to deform, so that the length of the connecting piece in the axial direction is increased or reduced, and the vacuum
capacitor is more compact. Therefore, the distance between the electrode disc connected with the connecting piece and the shell is changed, and the
coupling area between the two electrode sets is controlled. According to the invention, the
coupling area between the two electrode groups can be regulated and controlled, the accurate adjustment of the
capacitance value is realized, and the requirement of
semiconductor manufacturing equipment on the accurate
capacitance value of the vacuum capacitor is met.