High-sensitivity capacitive flexible three-dimensional force tactile sensor and preparation method thereof

Abstract

The invention discloses a high-sensitivity capacitive flexible three-dimensional force tactile sensor mainly comprising a hemispherical contact, flexible spherical-curved-surface excitation electrodes, a flexible common electrode and a flexible substrate. The flexible substrate serves as a bottom support; the top of the hemispherical contact is covered and an air cavity is formed in the hemispherical contact; the flexible common electrode and four flexible spherical-curved-surface excitation electrodes are bonded in the air cavity; the flexible common electrode is connected between the hemispherical contact and the flexible substrate and is arranged at the center of the four flexible spherical-curved-surface excitation electrodes; and the four flexible spherical-curved-surface excitation electrodes are distributed on the flexible substrate uniformly at intervals; and insulating layers are arranged on the surfaces of the flexible spherical-curved-surface excitation electrodes. The flexible common electrode and the flexible spherical-curved-surface excitation electrodes form four capacitors which are distributed in a spatial three-dimensional mode to form an overall inverted mushroom-shaped structure. The high-sensitivity capacitive flexible three-dimensional force tactile sensor has advantages of higher detection sensitivity and higher response speed and can be used as a flexible electronic skin applied to the fields of human-computer interaction, intelligent robots, rehabilitation therapy and the like.

Description

technical field [0001] The invention relates to a three-dimensional force tactile sensor, especially a high-sensitivity capacitive flexible three-dimensional force tactile sensor and a preparation method thereof, which are mainly used in soft robot electronic skins for sensing the direction and magnitude of external forces, and belong to soft robots and The technical field of combining sensors. Background technique [0002] In recent years, the application fields of intelligent robots have become more and more extensive. As a way for intelligent robots to perceive the external environment, various forms of flexible sensors have attracted extensive attention from scholars at home and abroad. With the industrial application of robots and the high-precision operation requirements of some industries, the requirements for the production of robots are becoming more and more stringent. Therefore, the flexible three-dimensional force tactile sensor is an important branch of the rob...

AI Technical Summary

Problems solved by technology

Research on flexible three-dimensional force tactile sensors includes flexible sensor technology, flexible material preparation and molding technology, durability research, etc. The key issues are mainly reflected in the following aspects: ① The measurement accuracy of flexible three-dimensional force tactile sensors is not high, and the error range is large

② Flexible three-dimensional force tactile sensor has slow measurement response speed and high delay

③The flexible three-dimensional force tactile sensor is easy to wear and tear, and most of them are irreversible damage

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