Full-flexible capacitive three-dimensional force touch sensor
A tactile sensor and capacitive technology, applied in the field of sensors, can solve the problems of lack of theoretical modeling, finite element simulation, difficulties, etc., and achieve the effect of improving the dielectric constant, fast response speed, and high detection sensitivity
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[0030] In order to make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be described clearly and completely in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of the embodiments of the present invention, but not all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0031] Figure 1 to Figure 7 Shows a schematic structural diagram of a preferred embodiment of the present invention. Such as figure 2 As shown, a fully flexible capacitive three-dimensional force tactile sensor of this embodiment is mainly composed of a flexible cavity 1, a flexible substrate 2, a flexible electrode, a semi-circ...
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