Full-flexible capacitive three-dimensional force touch sensor

Abstract

A full-flexible capacitive three-dimensional force touch sensor comprises a flexible cavity, a flexible substrate, a flexible electrode, a semi-circular groove and a semi-spherical contact, and the flexible electrode is led out through a wire and grounded to form a common end. The flexible cavity is a cylinder body, the flexible substrate is a circular plate, and the flexible cavity is adhered tothe flexible substrate. The square flexible induction electrodes form a 2 * 2 array structure and are adhered to the upper surface of the flexible substrate. The circular flexible common pole plate isadhered to the bottom surface of the hemispherical contact. The semi-circular groove is adhered around the bottom of the hemispherical contact and is connected to the inner surface of the flexible cavity. The semi-circular groove is adhered to the circular flexible common pole plate. An air layer is arranged between the circular flexible common polar plate and the square flexible induction electrodes as a dielectric layer, and the vertical projection area of the circular flexible common polar plate on the flexible substrate always comprises the areas of the four square flexible induction electrodes. The touch sensor has the advantages of novel structure, higher detection sensitivity and faster response speed.

Description

technical field [0001] The invention relates to a fully flexible capacitive three-dimensional force touch sensor, which belongs to the field of sensors. Background technique [0002] With the rapid development of manufacturing technology, functional materials, integrated packaging technology and smart sensor technology, flexible electronic skin has always been the focus of researchers at home and abroad. As an important part of electronic skin, three-dimensional force tactile sensor can sense normal force and tangential force at the same time, and is widely used in artificial skin, service robot, medical robot and other fields. Traditional rigid metal, semiconductor, magnetic, and fiber-optic 3D force tactile sensors play a key role in applications in industrial production, smart assembly, and micro-manipulation robots based on well-established manufacturing processes. However, these devices generally have disadvantages such as poor flexibility, poor wearing comfort, and lo...

AI Technical Summary

Problems solved by technology

However, previous research focused on structural design, finite element simulation, performance characteristics, etc., and lacked comprehensive verification of theoretical modeling, finite element simulation, and actual measurement. Therefore, it is particularly difficult to design a novel and efficient structure.

Images