Processing liquid nozzle

Abstract

The present invention relates to a processing liquid nozzle, comprising: a main body part in which a mixing space for mixing a processing liquid therein, a first inlet formed at the upper end of the main body part so as to communicate with the mixing space and into which a first processing liquid flows, a second inlet formed at the lower end of the main body part so as to communicate with the mixing space, and an ejection port formed at the upper end of the main body part and into which a second processing liquid flows; a second inflow port formed in a side surface of the body part so as to communicate with the mixing space and through which a second processing liquid flows into the mixing space, and an ejection port formed in a lower end of the body part so as to communicate with the mixing space; and a rotational flow guide part which is vertically provided in the mixing space so that the upper and lower ends thereof face the first inflow port and the injection port, respectively, and which comprises a spiral guide having a spiral groove formed in the outer peripheral surface thereof.

Description

Technical Field

[0001] The present invention relates to a treatment liquid nozzle, and more particularly, to a treatment liquid nozzle that can be used as a structure of a substrate processing device and is used to mix two or more treatment liquids and discharge the mixed liquids onto a substrate. Background Art

[0002] The substrate processing apparatus refers to an apparatus that uses a processing liquid to perform vapor deposition, development, etching or cleaning on substrates such as semiconductor wafers, display substrates, optical disk substrates, magnetic disk substrates, photomask substrates, ceramic substrates, and solar cell substrates.

[0003] The cleaning process is used to remove foreign matter or particles present on the substrate, and typically refers to a process of supplying a processing liquid to the surface or back side of the substrate while rotating the substrate at high speed while being supported by a chuck base (spinning head).

[0004] Typically, the treatment liquid is a cleaning liquid used for sulfuric acid peroxide solution (SPM) cleaning, and sulfuric acid and hydrogen peroxide are mixed in a specified ratio for cleaning. The sulfuric acid and hydrogen peroxide flow into the treatment liquid nozzle separately and are mixed before being sprayed onto the substrate.

[0005] There is currently disclosed a technique for utilizing a vortex in order to smoothly mix and spray the sulfuric acid and the hydrogen peroxide. To this end, the treatment liquid nozzle needs to have a structure that rotates the sulfuric acid and the hydrogen peroxide inside.

[0006] For example, in the main body constituting the treatment liquid nozzle, since the first supply pipe and the second supply pipe are provided on the inner peripheral surface of the mixing space in the tangential direction, as sulfuric acid and hydrogen peroxide flow into each supply pipe, mixing and injection can be smoothed by forming a vortex.

[0007] However, even if sulfuric acid and hydrogen peroxide only flow into the mixing space along the tangential direction, they cannot be mixed smoothly due to the difference in specific gravity. Therefore, when sprayed toward the substrate, there is a problem of causing defects due to partial uneven treatment.

[0008] Prior art literature

[0009] Patent Literature

[0010] Patent Document 1: Korean Patent Publication No. 10-1042539 (June 13, 2011)

[0011] Patent Document 2: Korean Patent Publication No. 10-2011-0057679 (June 1, 2011) Summary of the invention

[0012] In order to solve the above-mentioned problems of the prior art, the object of the present invention is to provide a processing liquid nozzle as follows, that is, when two or more processing liquids are flowed in separately and mixed and sprayed, not only the problems caused by the difference in specific gravity can be improved, but also substrate defects caused by spraying can be prevented by achieving uniform mixing.

[0013] In order to achieve the above-mentioned purpose, the processing liquid nozzle of the present invention includes: a main body, which is formed with a mixing space, a first inlet, a second inlet and an injection port, the mixing space is used to mix the processing liquid inside, the first inlet is formed at the upper end of the main body to be connected with the mixing space, and is used to flow the first processing liquid into the mixing space, the second inlet is formed on the side of the main body to be connected with the mixing space, and is used to flow the second processing liquid into the mixing space, the injection port is formed at the lower end of the main body and is connected with the mixing space; and a rotating flow guide part, which is erected in the mixing space in a manner that the upper and lower ends are respectively opposite to the first inlet and the injection port, and includes a spiral guide with a spiral groove formed on the outer peripheral surface.

[0014] The spiral guide is formed with a circular cross section and is configured to be gradually tapered from the upper end toward the lower end.

[0015] In the mixing space, one or more porous plates are respectively arranged on the upper side or the lower side of the spiral guide along the intersecting direction of the treatment liquid injection direction.

[0016] An upper porous plate is formed on the upper side of the spiral guide, and the second inlet is arranged below the upper porous plate.

[0017] A lower porous plate is formed on the lower side of the spiral guide, and the cross-sectional area of ​​the mixing space formed with the lower porous plate is smaller than the cross-sectional area of ​​the mixing space formed with the upper porous plate.

[0018] The swirling flow guide part further includes an upper coupling rod extending upward from an upper end of the spiral guide, and the upper coupling rod is coupled to the upper porous plate.

[0019] The swirling flow guide part further includes a lower coupling rod extending downward from a lower end of the spiral guide, and the lower coupling rod is coupled to at least one of the lower porous plates.

[0020] The upper end of the upper coupling rod faces the first inlet, forming a shape in which the cross-sectional area gradually decreases upward.

[0021] Furthermore, in the processing liquid nozzle of the present invention, the above-mentioned main body includes: a mixing body, which forms the above-mentioned mixing space inside, and has an upper opening and a lower opening connected to the above-mentioned mixing space formed at the upper end and the lower end respectively; an upper cover, which is detachably combined with the above-mentioned upper opening, and is provided with the above-mentioned first inlet through-through in the up-down direction; and a lower cover, which is detachably combined with the above-mentioned lower opening, and is provided with the above-mentioned injection port through-through.

[0022] In the above-mentioned mixing space of the above-mentioned mixing body, one or more porous plates are respectively combined with the upper side or the lower side of the above-mentioned spiral guide in a detachable manner along the cross direction of the treatment liquid injection direction, and the above-mentioned rotating flow guide part is combined with at least one of the above-mentioned porous plates in a detachable manner.

[0023] A porous plate is inserted into the lower opening of the mixing body, and the diameter of the through holes formed in the porous plate at the lower opening is smaller than the diameter of the through holes of the porous plate arranged at other positions.

[0024] The present invention of the above structure has the following effects, that is, since the treatment liquid nozzle of the present invention includes: a main body, which is formed with a mixing space, a first inlet, a second inlet and an injection port, the mixing space is used to mix the treatment liquid inside, the first inlet is formed at the upper end of the main body to communicate with the mixing space, and is used to flow the first treatment liquid into the mixing space, the second inlet is formed on the side of the main body to communicate with the mixing space, and is used to flow the second treatment liquid into the mixing space, and the injection port is formed at the lower end of the main body to communicate with the mixing space; and a rotating flow guide portion, which is erected in the mixing space in such a way that the upper and lower ends are respectively opposite to the first inlet and the injection port, and includes a spiral guide having a spiral groove formed on the outer peripheral surface, as the first treatment liquid flowing in through the first inlet collides with the upper end of the spiral guide and diffuses along the radial direction, it is not only naturally mixed with the second treatment liquid moving along the inner peripheral surface of the mixing space, but also the mixed treatment liquid can be moved along the spiral groove of the spiral guide to form a vortex, so that the treatment liquid can be discharged unimpeded through the injection port by achieving smoother and more uniform mixing.

[0025] Furthermore, in the present invention, since the spiral guide has a circular cross section and is configured to be gradually tapered from the upper end toward the lower end, a vortex can be formed toward the injection port to achieve smoother injection.

[0026] Furthermore, in the above-mentioned mixing space, one or more porous plates are respectively arranged on the upper side or the lower side of the above-mentioned spiral guide along the cross direction of the treatment liquid injection direction. Since the treatment liquid in the above-mentioned mixing space on the above-mentioned porous plate can be diffused by the above-mentioned porous plate and discharged evenly through the through holes of the porous plate, the present invention can further improve the mixing efficiency of the first treatment liquid and the second treatment liquid.

[0027] Furthermore, in the present invention, a lower porous plate is formed on the lower side of the spiral guide, and the cross-sectional area of ​​the mixing space formed by the lower porous plate is smaller than the cross-sectional area of ​​the mixing space formed by the upper porous plate, thereby achieving perfect mixing and stable discharge of the first treatment liquid and the second treatment liquid.

[0028] Furthermore, in the present invention, the rotating flow guide portion further includes an upper combining rod extending upward from the upper end of the spiral guide, and the upper combining rod is combined with the upper porous plate. Thus, the combining structure for simultaneously realizing the mixing effect of the spiral guide, the dispersion effect of the porous plate and the uniform discharge effect can be made more compact.

[0029] Furthermore, in the present invention, the upper end of the upper coupling rod faces the first inlet, forming a shape in which the cross-sectional area gradually decreases upward. Therefore, the first treatment liquid flowing in from the first inlet can be smoothly diffused along the radial direction to make mixing with the second treatment liquid smoother.

[0030] Furthermore, in the present invention, the rotating flow guide portion further includes a lower combining rod extending downward from the lower end of the spiral guide, and the lower combining rod is combined with the lower porous plate. Thus, the structural elements for simultaneously realizing the spiral guide effect and the lower porous plate effect can be made more compact.

[0031] Furthermore, in the present invention, since the mixing body, upper cover and / or lower cover, upper porous plate, lower porous plate and rotating flow guide part arranged in the main body are constructed in a detachable manner, the combined structure of the rotating flow guide part, the upper porous plate and the lower porous plate can be constructed in a variety of combinations, thereby selecting the best combination for application according to the process.

[0032] Furthermore, in the present invention, since the main body includes a detachable mixing body, an upper cover and a lower cover, the assembly and manufacturing of the porous plate and the rotating flow guide can be made simpler and more convenient.

[0033] Furthermore, in the present invention, since a porous plate is inserted into the lower opening of the mixing body, the diameter of the through hole formed in the porous plate at the lower opening is smaller than the diameter of the through hole of the porous plate arranged at other positions. Therefore, the mixed treatment liquid can be sprayed through the injection port in a more stable state. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a schematic structural diagram showing an example of a substrate processing apparatus.

[0035] Figure 2 It is a perspective view showing the treatment liquid nozzle of the present invention.

[0036] Figure 3 It is a longitudinal sectional view showing the treatment liquid nozzle of the present invention.

[0037] Figure 4 It is an exploded perspective view showing a treatment liquid nozzle according to the present invention as seen from above.

[0038] Figure 5 It is an exploded perspective view showing the treatment liquid nozzle of the present invention when viewed from below. DETAILED DESCRIPTION

[0039] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0040] like Figure 1 As shown, in general, the substrate processing apparatus T includes a processing liquid spraying unit 10 , a bowl assembly 20 and a substrate supporting device S.

[0041] The processing liquid spraying unit 10 is used to supply the processing liquid required for the substrate cleaning process to the substrate W. During the process, the substrate supporting device S performs a function of rotating while supporting the substrate W.

[0042] like Figures 2 to 5 As shown, the processing liquid nozzle 1000 of the present invention includes: a main body 100, which is formed with a mixing space 110, a first inlet 120, a second inlet 130 and an injection port 140, the mixing space 110 is used to mix the processing liquid inside, the first inlet 120 is formed at the upper end of the main body 100 to communicate with the mixing space 110, and is used to flow the first processing liquid 910 into the mixing space 110, the second inlet 130 is formed on the side of the main body 100 to communicate with the mixing space 110, and is used to flow the second processing liquid 920 into the mixing space 110, the injection port 140 is formed at the lower end of the main body 100, and is connected to the mixing space 110; and a rotating flow guide part 200, which is uprightly arranged in the mixing space 110 in a manner that the upper and lower ends are respectively opposite to the first inlet 120 and the injection port 140, and includes a spiral guide 220 with a spiral groove 210 formed on the outer peripheral surface.

[0043] Based on the above structure, the first treatment liquid 910 flowing in from the first inlet 120 is sprayed to the upper end of the spiral guide 220 and diffused in all directions. The second treatment liquid 920 flowing in from the second inlet 130 moves along the tangential direction on the inner circumference of the mixing space 110, and then rotates along the inner circumference of the mixing space 110, and a vortex is smoothly formed through the spiral groove 210 of the spiral guide 220 to improve the mixing efficiency.

[0044] That is, the first treatment liquid 910 that collides with the upper end of the above-mentioned spiral guide 220 and diffuses along the radial direction is not only naturally mixed with the second treatment liquid 920 that rotates along the inner circumferential surface of the above-mentioned mixing space 110, but also allows the mixed treatment liquid to move along the spiral groove 210 of the above-mentioned spiral guide 220 to form a vortex. Therefore, the treatment liquid can be discharged unimpeded through the injection port 140 by achieving smoother and more uniform mixing.

[0045] Furthermore, preferably, the spiral guide 220 is formed with a circular cross section and is configured to be gradually tapered from the upper end to the lower end, thereby forming a vortex toward the injection port 140 to achieve smoother injection.

[0046] Preferably, when observing the longitudinal section of the spiral guide 220, the outer contour is a partial cone shape, but it can also be formed into a curved surface shape that is convex to the outside or concave to the inside.

[0047] Furthermore, in the mixing space 110 , one or more porous plates 300 , 400 , 500 are respectively arranged on the upper or lower side of the spiral guide 220 along the cross direction of the treatment liquid injection direction. Preferably, the outer peripheral surface of the porous plates 300 , 400 , 500 is combined with the inner peripheral surface of the mixing space 110 .

[0048] Based on the above structure, since the treatment liquid flowing into the mixing space 110 on the porous plates 330, 400, 500 is diffused and uniformly discharged by the porous plates, the mixing efficiency of the first treatment liquid 910 and the second treatment liquid 920 can be further improved.

[0049] For example, an upper porous plate 300 is formed on an upper side of the spiral guide 220 , and the second inlet 130 may be disposed below the upper porous plate 300 .

[0050] Thus, after the first treatment liquid 910 flowing in through the first inlet 120 collides with the upper porous plate 300 and disperses or diffuses along the radial direction, it can be uniformly discharged toward the spiral guide 220 through the first through hole 310 formed in the upper porous plate 300. The discharged first treatment liquid 910 mixes with the second treatment liquid 920 discharged through the second inlet 130 to form a vortex and flows toward the injection port 140.

[0051] That is, as the first treatment liquid 910 such as sulfuric acid is uniformly discharged to the bottom through the porous structure of the upper porous plate 300, it can be smoothly mixed with the second treatment liquid 920 such as hydrogen peroxide flowing in from the bottom of the upper porous plate 300. In this state, since a vortex is formed by the above-mentioned spiral guide 220, the mixing and movement of the first treatment liquid 910 and the second treatment liquid 920 can become smooth.

[0052] The rotary flow guide 200 further includes an upper coupling rod 230 extending upward from an upper end of the spiral guide 200 . The upper coupling rod 230 may be coupled to the upper porous plate 300 .

[0053] Thus, the combined structure for simultaneously achieving the mixing effect of the spiral guide 220 and the dispersing effect and uniform discharge effect of the porous plate 300 can be made more compact.

[0054] In this case, the upper coupling rod 230 may be formed integrally with the upper porous plate 300 , or may be detachably coupled to the upper porous plate 300 .

[0055] In the case of being detachable, the rotating flow guide 200 may be rotatably coupled to or fixedly coupled to the upper porous plate 300 .

[0056] Furthermore, the upper end of the upper coupling rod 230 faces the first inlet 120 , forming a shape in which the cross-sectional area gradually decreases upward, preferably so that the first processing liquid 910 flowing in from the first inlet 120 can be smoothly diffused along the radial direction.

[0057] Furthermore, the lower porous plates 400 and 500 are formed below the spiral guide 220 , and the cross-sectional area of ​​the mixing space 110 formed with the lower porous plates 400 and 500 may be smaller than the cross-sectional area of ​​the mixing space 110 formed with the upper porous plate 300 .

[0058] The drawing shows a first space 111 formed with the upper porous plate 300 , a second space 112 and a third space 113 formed with the lower porous plates 400 and 500 , and the diameters representing the flow cross-sectional areas are D1 , D2 and D3 , respectively.

[0059] The diameter D3 of the third space 113 is smaller than the diameter D2 of the second space 112 , and a flow cross-sectional area is configured to gradually decrease from the first inlet 120 to the injection port 140 .

[0060] Based on the structure in which the flow cross-sectional area gradually decreases, the first processing liquid 910 and the second processing liquid 920 can be perfectly mixed and discharged stably.

[0061] That is, as the treatment liquid flows from the wide space into the narrow space, the mixing efficiency can be improved due to the close contact effect.

[0062] Similar to the upper porous plate 300 , since the second through hole 410 and the third through hole 510 are respectively formed through the lower porous plates 400 and 500 , the mixed liquid of the first processing liquid 910 and the second processing liquid 920 can be uniformly discharged.

[0063] The above-mentioned rotating flow guide part 200 also includes a lower side combining rod 240 extending downward from the lower end of the above-mentioned spiral guide 220. Preferably, the above-mentioned lower side combining rod 240 is combined with at least one of the above-mentioned lower porous plates 400, 500. In the accompanying drawings, the above-mentioned lower side combining rod 240 is combined with the lower porous plate 400 relatively arranged on the upper side.

[0064] The upper combining rod 230 and the lower combining rod 240 are respectively combined with the upper porous plate 300 and the lower porous plate 400. If the upper porous plate 300 and the lower porous plate 400 are firmly combined in the mixing space 110 of the main body 100, the rotating flow guide part 200 can be firmly combined with the main body 100 without shaking.

[0065] Furthermore, the combined structure for simultaneously achieving the mixing effect of the spiral guide 220 , the dispersion effect of the lower porous plate 400 , and the uniform discharge effect can be made more compact.

[0066] Preferably, the first space 111 , the second space 112 and the third space 113 are formed with a circular cross section, so that the flow in the surrounding direction as well as the up-down direction can be smoothly realized.

[0067] As described above, the first space 111, the second space 112, the third space 113 whose flow cross-sectional areas decrease successively and the porous plates 300, 400, 500 respectively formed in each space not only make the flow of the first processing liquid 910 and the second processing liquid 920 uniform, but also can achieve the effect of improving the mixing efficiency. As a result, the discharge (injection) of the injection port 140 can be further stabilized and uniform substrate processing can be achieved through the overall area.

[0068] On the other hand, the above-mentioned structural elements are detachable structures, and the structural combination including partial shapes can be changed according to the type of processing liquid or the type of substrate processing apparatus.

[0069] For example, the main body 100 may include: a mixing body 150, in which the above-mentioned mixing space 110 is formed, and an upper opening 151 and a lower opening 152 connected to the above-mentioned mixing space 110 are respectively formed at the upper end and the lower end; an upper cover 160, which is detachably connected to the above-mentioned upper opening 151, and has a first inlet 120 formed therethrough along the up-and-down directions; and a lower cover 170, which is detachably connected to the above-mentioned lower opening 152, and has the above-mentioned injection port 140 formed therethrough.

[0070] Preferably, the main body 100 includes a detachable mixing body 150, an upper cover 160 and a lower cover 170, so that the assembly and manufacturing of the porous plates 300, 400, 500 and the rotating flow guide 200 can be made simpler and more convenient.

[0071] In this case, in the mixing space 110 of the mixing body 150 , one or more porous plates 300 , 400 , 500 may be respectively disposed on the upper side or the lower side of the spiral guide 220 along a direction intersecting the spraying direction of the treatment liquid.

[0072] like Figure 3 As shown, in the embodiment of the present invention, an upper porous plate 300 and two lower porous plates 400 and 500 are respectively provided.

[0073] Also, the swirl flow guide 200 is detachably coupled to at least one of the porous plates 300 , 400 , and 500 .

[0074] like Figure 3 As shown, in the embodiment of the present invention, the rotating flow guide 200 is detachably combined with the upper porous plate 300 and a lower porous plate 400 .

[0075] A porous plate 500 is inserted into the lower opening 152 of the mixing body 150. The diameter of the through hole 510 formed in the porous plate 500 at the lower opening 152 is smaller than the diameter of the through holes 310 and 410 of the porous plates 300 and 400 arranged at other positions. Preferably, the mixed processing liquid can be sprayed through the spray port 140 in a more stable state.

[0076] Furthermore, a support ring 161 extending downward is formed on the upper cover 160 so that the upper cover 160 presses and supports the upper porous plate 300 from above.

[0077] The lower porous plate 500 may be coupled to the lower opening 152 of the mixing body 150 by screwing or the like.

[0078] As described above, since the mixing body 150, the upper cover 160 and / or the lower cover 170, the upper porous plate 300, the lower porous plates 400, 500 and the spiral guide 220 are detachable structures, the combined structure of the rotating flow guide part 200, the upper porous plate 300 and the lower porous plates 400, 500 can be constructed in a variety of combinations, thereby selecting the best combination for application according to the process.

[0079] For example, the length or shape of the spiral guide 220, the inclination angle or groove cross-sectional area of ​​the spiral groove 210, the diameter of the through holes formed in the porous plates 300, 400, 500, the number of through holes, or the distribution shape can be changed in various combinations.

[0080] It should be understood that the embodiments of the present invention are merely examples, and a person skilled in the art can implement various modifications and other equivalent embodiments within the scope of protection claimed by the invention.

Claims

1. A treatment liquid nozzle, characterized in that: include: a main body portion, formed with a mixing space, a first inlet, a second inlet, and an injection port, the mixing space being used to mix the treatment liquid therein, the first inlet being formed at the upper end of the main body portion to communicate with the mixing space and being used to flow the first treatment liquid into the mixing space, the second inlet being formed at the side of the main body portion to communicate with the mixing space and being used to flow the second treatment liquid into the mixing space, and the injection port being formed at the lower end of the main body portion to communicate with the mixing space; and The swirl flow guide is vertically arranged in the mixing space with its upper and lower ends facing the first inlet and the injection port respectively, and includes a spiral guide having a spiral groove formed on its outer peripheral surface.

2. The treatment liquid nozzle according to claim 1, characterized in that: The spiral guide is formed with a circular cross section and is configured to be gradually tapered from the upper end toward the lower end.

3. The treatment liquid nozzle according to claim 2, characterized in that: In the mixing space, one or more porous plates are respectively arranged on the upper side or the lower side of the spiral guide along the intersecting direction of the treatment liquid injection direction.

4. The treatment liquid nozzle according to any one of claims 1 to 3, characterized in that: An upper porous plate is formed on the upper side of the spiral guide, and the second inlet is arranged below the upper porous plate.

5. The treatment liquid nozzle according to claim 4, characterized in that: A lower porous plate is formed on the lower side of the spiral guide, and the cross-sectional area of ​​the mixing space formed with the lower porous plate is smaller than the cross-sectional area of ​​the mixing space formed with the upper porous plate.

6. The treatment liquid nozzle according to claim 4, characterized in that: The swirling flow guide part further includes an upper coupling rod extending upward from an upper end of the spiral guide, and the upper coupling rod is coupled to the upper porous plate.

7. The treatment liquid nozzle according to claim 5, characterized in that: The swirling flow guide part further includes a lower coupling rod extending downward from a lower end of the spiral guide, and the lower coupling rod is coupled to at least one of the lower porous plates.

8. The treatment liquid nozzle according to claim 6, characterized in that: The upper end of the upper coupling rod faces the first inlet, forming a shape in which the cross-sectional area gradually decreases upward.

9. The treatment liquid nozzle according to any one of claims 1 to 3, characterized in that: The main body comprises: A mixing body, having the mixing space formed therein, and having an upper opening and a lower opening communicated with the mixing space formed at the upper end and the lower end respectively; An upper cover is detachably coupled to the upper opening and is formed with the first inlet through the upper and lower openings; and The lower cover is detachably coupled to the lower opening and has the injection port formed therethrough.

10. The treatment liquid nozzle according to claim 9, characterized in that: In the mixing space of the mixing body, one or more porous plates are detachably connected to the upper or lower side of the spiral guide along the direction intersecting the direction of the treatment liquid injection. The swirl flow guide is detachably coupled to at least one of the porous plates.

11. The treatment liquid nozzle according to claim 10, characterized in that: A porous plate is inserted into the lower opening of the mixing body, and the diameter of the through holes formed in the porous plate at the lower opening is smaller than the diameter of the through holes of the porous plate arranged at other positions.

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