Resin grinding wheel for silicon carbide silicon boat and manufacturing method of resin grinding wheel

Abstract

The invention relates to the technical field of semiconductor silicon material manufacturing, in particular to a resin grinding wheel for a silicon carbide silicon boat and a manufacturing method thereof. The grinding wheel comprises a base body and a grinding material layer arranged on the outer circumferential end face of the base body, a through hole is formed in the middle of the base body, and the grinding material layer comprises, by weight, 40-50 parts of resin powder; 10 to 20 parts of diamond; 10 to 20 parts of copper powder; 5-10 parts of microcrystalline corundum; 5-10 parts of reinforced fibers; and 5-8 parts of a wetting agent. The resin grinding wheel for the silicon carbide boat and the manufacturing method of the resin grinding wheel have the advantages that the shape retention is high, the cutting efficiency of the grinding wheel can be improved, the surface roughness of the silicon carbide boat is low, and grinding marks and grinding stripes are avoided.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor silicon material manufacturing, and in particular to a resin grinding wheel for a silicon carbide boat and a manufacturing method thereof. Background Art

[0002] Silicon wafers are the main substrate material for modern ultra-large-scale integrated circuits. Silicon wafer heat treatment (back sealing) is an important process in the processing of silicon device substrates. Heat treatment can deposit oxygen in silicon wafers, thereby stabilizing the resistivity of silicon wafers, which has a very important impact on the performance of integrated circuit preparation. At this time, a carrier that can carry semiconductor chips is needed. The semiconductor chips are placed on the carrier and then placed in a heat treatment furnace for treatment. This carrier is the silicon boat. The groove rod in the silicon boat is a key component of the silicon boat. It plays a vital role in the support, fixation and transmission of silicon wafers. Its precision and surface quality directly affect the subsequent production of silicon products.

[0003] Silicon boats are generally processed using traditional three-axis machining centers. The grinding wheel moves horizontally and vertically at the same time. During the processing, traditional grinding wheels will produce occasional step-shaped stripes in the tilt direction of the silicon boat, resulting in high roughness and heavy processing marks. The scrap rate is usually high, or additional manual grinding processes are required to eliminate them, which consumes a lot of labor costs and has low processing efficiency. Summary of the invention

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a resin grinding wheel for silicon carbide silicon boat and a manufacturing method thereof, so as to effectively solve the problems of high roughness, heavy processing marks and occasional step-shaped stripes existing in the existing grinding wheels.

[0005] The present invention first provides a resin grinding wheel for a silicon carbide silicon boat, wherein the grinding wheel comprises a base and an abrasive layer arranged on an outer circumferential end face of the base, a through hole is opened in the middle of the base, and the abrasive layer comprises the following raw materials in weight portions: the grinding wheel comprises a base and an abrasive layer arranged on an outer circumferential end face of the base, a through hole is opened in the middle of the base, and the abrasive layer comprises the following raw materials in weight portions: 40-50 parts of resin powder; 10-20 parts of diamond; 10-20 parts of copper powder; 5-10 parts of microcrystalline corundum; 5-10 parts of reinforcing fiber; and 5-8 parts of wetting agent.

[0006] More optimally, the resin powder is polyetherketone toughened modified phenolic resin, the resin powder includes a curing agent, wherein the curing agent is hexamethylenetetramine, the content of the curing agent is 8-12%, the flow length of the resin powder is 40-60, and the particle size of the resin powder is 5-10 μm.

[0007] More optimally, the diamond is polycrystalline nickel-plated diamond, the diamond particle size is 30-40 μm, and the weight gain rate of the nickel layer of the diamond is 60%.

[0008] Preferably, the copper powder is electrolytic nano copper powder, and the particle size of the copper powder is 100-200 nm.

[0009] More optimally, the particle size of the microcrystalline corundum is 100-300nm; the reinforcing fiber is carbon fiber or alumina fiber, and the aspect ratio of the reinforcing fiber is not greater than 15 and the diameter is less than 30um.

[0010] More optimally, the wetting agent is any one of furfural and sodium stearate.

[0011] Another aspect of the present invention further provides a method for preparing a resin grinding wheel for a silicon carbide silicon boat, comprising the following steps:

[0012] The raw materials resin powder, diamond, copper powder, microcrystalline corundum, reinforcing fiber and wetting agent are poured into a medium in proportion, and the silicon carbide resin grinding wheel for silicon boat is obtained through mixing, stirring, drying and dispersing, cold pressing, hot pressing sintering molding, and curing processing; wherein, the silicon carbide resin grinding wheel for silicon boat includes a substrate and an abrasive layer arranged on an outer circumferential end face of the substrate, a through hole is opened in the middle of the substrate, and the abrasive layer includes the following raw materials in parts by weight: 40-50 parts of resin powder; 10-20 parts of diamond; 10-20 parts of copper powder; 5-10 parts of microcrystalline corundum; 5-10 parts of reinforcing fiber; 5-8 parts of wetting agent.

[0013] More optimally, the medium is any one of anhydrous ethanol or pure water or a combination of the two, and the ratio of the amount of the medium to the amount of the raw material is 90-110 ml: 10-20 g.

[0014] More optimally, the mixing and stirring uses ultrasound, and the ultrasound time is not less than 60 minutes; the drying temperature is 80-110° C., and the dispersion is ultrasonic vibration, and the dispersion time is 1-3 hours.

[0015] More optimally, the cold pressing is performed in a cold press for 10-20 minutes; the hot pressing sintering molding has a sintering temperature of 150-200°C, a molding pressure of 5-10 MPa, and a sintering time of 10-15 minutes.

[0016] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0017] 1. The resin powder is a modified phenolic resin powder, which mainly acts as a binder in the grinding wheel. Compared with conventional phenolic resin powder, it has better fluidity and finer particle size, which can wrap diamond and other components well. Compared with conventional resin powder, this modified resin powder has better rigidity and hardness, which can play a good shape-keeping effect in the use of grinding wheels, and the service life is increased by about 30%.

[0018] 2. The diamond is polycrystalline nickel-plated diamond, which mainly acts as an abrasive in the grinding wheel and plays the role of removing the workpiece. Compared with conventional diamond, polycrystalline diamond has good toughness and self-sharpening, and has better continuous grinding effect. In the grinding process, the coarse particles have the ability to be micro-broken, and can be continuously broken into smaller particles to avoid scratches on the workpiece surface. Its unique self-sharpening and micro-broken ability can ensure the quality of the sample and improve the grinding efficiency. At the same time, the nickel coating of polycrystalline diamond can enhance the wear resistance of the grinding wheel, improve the holding force of the resin powder on the diamond, and at the same time improve the heat dissipation effect of the entire grinding wheel and improve the grinding quality of the workpiece surface.

[0019] 3. Electrolytic nano copper powder mainly acts as an additive in the grinding wheel. It has strong ductility and resistance to deformation. Compared with conventional electrolytic copper powder, its particle size is finer. Adding it to the grinding wheel can not only dissipate heat, but also improve the tensile strength and hardness of the grinding wheel, thereby significantly increasing the linear speed of the grinding wheel and improving the cutting efficiency of the grinding wheel.

[0020] 4. Microcrystalline corundum mainly acts as an auxiliary abrasive in the grinding wheel. It is prepared by the single sol-gel method and is a sintered abrasive. The abrasive is composed of a large number of submicron crystals. Compared with the traditional molten corundum abrasive, which wears and becomes blunt during the grinding process and the grinding efficiency drops sharply, the submicron crystals break smaller particles during the grinding process, making the microcrystalline corundum have a higher micro-crushing ability, strong cutting ability, high grinding efficiency, and can perform large cutting depth and large feed grinding without burning the workpiece, which can also improve the cutting efficiency of the grinding wheel.

[0021] 5. Reinforcement fiber mainly acts as a reinforcement skeleton in the grinding wheel. The addition of carbon fiber or alumina fiber can effectively improve the impact resistance of the grinding wheel, avoid excessive consumption of the grinding wheel under high-speed cutting conditions, and affect the processing size of the workpiece. The addition of reinforcement fiber has obvious beneficial effects on increasing the life of the grinding wheel and improving the consistency of the grinding product workpiece.

[0022] 6. The wetting agent acts as a dispersant during the grinding wheel mixing process, which can effectively avoid sample scratches caused by diamond agglomeration, effectively improve the scratches caused by sample grinding, and improve the surface quality of the product.

[0023] 7. The ratio of the amount of anhydrous ethanol or pure water medium to the amount of raw materials can ensure complete wetting, ensure the uniformity of ultrasonic mixing, and ensure that the liquid will not evaporate and solidify during the mixing period, causing differences in the uniformity of the mixture. It will not cause too much liquid and too long drying time, affecting the efficiency and uniformity of the mixture. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A cross-sectional view of a resin grinding wheel for a silicon carbide boat prepared in Example 1 of the present invention;

[0025] Figure 2 This is a schematic diagram of the abrasive layer of the resin grinding wheel for silicon carbide silicon boat prepared in Example 1 of the present invention. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] like Figure 1 As shown, the resin grinding wheel for silicon carbide silicon boat includes a substrate 1 and an abrasive layer 2 arranged on the outer circumferential end surface of the substrate. The abrasive layer 2 is evenly distributed on one end surface of the substrate 1, and the two sides of the abrasive layer 2 are inclined. A through hole 3 is opened in the middle of the substrate 1. The abrasive layer 2 includes the following raw materials in parts by weight: 40-50 parts of resin powder; 10-20 parts of diamond; 10-20 parts of copper powder; 5-10 parts of microcrystalline corundum; 5-10 parts of reinforcing fiber; 5-8 parts of wetting agent. The diamond is polycrystalline nickel-plated diamond, the diamond particle size is 30-40μm, the weight gain rate of the nickel layer of the diamond is 60%, and the weight gain rate = (mass after electroplating - mass before electroplating) / mass before electroplating * 100%.

[0028] like Figure 1 and Figure 2 As shown, the diameter R of the resin grinding wheel for the silicon carbide boat is 125 mm, the diameter Y of the through hole 3 is 30 mm, the width D of the abrasive layer is 7 mm, and the inclination angle θ of the two sides of the abrasive layer 2 is 13°.

[0029] Embodiment 1:

[0030] 1. Pour 45 parts of modified phenolic resin powder with a particle size of 5-10um, 15 parts of polycrystalline nickel-plated diamond with a particle size of 30-40um, 15 parts of nano copper powder with a particle size of 100-200nm, 10 parts of microcrystalline corundum with a particle size of 100-300nm, 10 parts of reinforcing fiber with a diameter of 2mm and a length of 250mm, and 5 parts of furfural wetting agent into anhydrous ethanol medium, mix and stir ultrasonically, wherein the ultrasonic time is 2.5h, mix and stir evenly to obtain a mixture.

[0031] 2. Dry the mixture at 100°C and disperse it by ultrasonic vibration for 2 hours to obtain a molding material.

[0032] 3. Place the molding material into a cold pressing mold and press in a cold pressing machine for 15 minutes to obtain a cold pressed blank.

[0033] 4. Place the cold pressed blank on a hot press machine and produce the required grinding wheel semi-finished product according to the hot pressing molding method. At this time, a grinding wheel hot pressed blank is obtained. The hot pressing sintering molding process is: sintering temperature 170°C, molding pressure 8MPa, and sintering time 12min.

[0034] 5. The hot pressed blank of the grinding wheel is cured, turned and ground.

[0035] The resin powder manufacturer is Jinan Shengquan Group Co., Ltd.; the diamond manufacturer is Henan Feimeng Diamond Co., Ltd., and the diamond model is PDMN60 polycrystalline nickel-plated diamond; the copper powder is electrolytic nano-copper powder, the manufacturer is Qingdao Defit Co., Ltd., the model is SSB-211E; the microcrystalline corundum manufacturer is Qingdao Ruiker New Materials Technology Co., Ltd., which is a micro-crushed ceramic abrasive prepared by a single sol-gel preparation technology, with a brand name of RE.

[0036] Embodiment 2:

[0037] 1. Pour 40 parts of modified phenolic resin powder with a particle size of 5-10um, 10 parts of polycrystalline nickel-plated diamond with a particle size of 30-40um, 10 parts of nano copper powder with a particle size of 100-200nm, 5 parts of microcrystalline corundum with a particle size of 100-300nm, 5 parts of reinforcing fiber with a diameter of 2mm and a length of 250mm, and 5 parts of furfural wetting agent into anhydrous ethanol medium, mix and stir ultrasonically, wherein the ultrasonic time is 2.5h, mix and stir evenly to obtain a mixture.

[0038] 2. Dry the mixture at 80°C and disperse it by ultrasonic vibration for 1 hour to obtain a molding material.

[0039] 3. Place the molding material into a cold pressing mold and press in a cold pressing machine for 10 minutes to obtain a cold pressed blank.

[0040] 4. Place the cold pressed blank on a hot press machine and produce the required grinding wheel semi-finished product according to the hot pressing molding method. At this time, a grinding wheel hot pressed blank is obtained. The hot pressing sintering molding process is: sintering temperature 150°C, molding pressure 5MPa, and sintering time 10min.

[0041] 5. The hot pressed blank of the grinding wheel is cured, turned and ground.

[0042] The resin powder manufacturer is Jinan Shengquan Group Co., Ltd.; the diamond manufacturer is Henan Feimeng Diamond Co., Ltd., and the diamond model is PDMN60 polycrystalline nickel-plated diamond; the copper powder is electrolytic nano-copper powder, the manufacturer is Qingdao Defit Co., Ltd., the model is SSB-211E; the microcrystalline corundum manufacturer is Qingdao Ruiker New Materials Technology Co., Ltd., which is a micro-crushed ceramic abrasive prepared by a single sol-gel preparation technology, with a brand name of RE.

[0043] Embodiment 3:

[0044] 1. Pour 50 parts of modified phenolic resin powder with a particle size of 5-10um, 20 parts of polycrystalline nickel-plated diamond with a particle size of 30-40um, 20 parts of nano copper powder with a particle size of 100-200nm, 10 parts of microcrystalline corundum with a particle size of 100-300nm, 10 parts of reinforcing fiber with a diameter of 2mm and a length of 250mm, and 8 parts of sodium stearate wetting agent into anhydrous ethanol medium, mix and stir ultrasonically, wherein the ultrasonic time is 2.5h, mix and stir evenly to obtain a mixture.

[0045] 2. Dry the mixture at 110°C and disperse it by ultrasonic vibration for 3 hours to obtain a molding material.

[0046] 3. Place the molding material into a cold pressing mold and press in a cold pressing machine for 20 minutes to obtain a cold pressed blank.

[0047] 4. Place the cold pressed blank on a hot press machine and produce the required grinding wheel semi-finished product according to the hot pressing molding method. At this time, a grinding wheel hot pressed blank is obtained. The hot pressing sintering molding process is: sintering temperature 200°C, molding pressure 10MPa, and sintering time 15min.

[0048] 5. The hot pressed blank of the grinding wheel is cured, turned and ground.

[0049] The resin powder manufacturer is Jinan Shengquan Group Co., Ltd.; the diamond manufacturer is Henan Feimeng Diamond Co., Ltd., and the diamond model is PDMN60 polycrystalline nickel-plated diamond; the copper powder is electrolytic nano-copper powder, the manufacturer is Qingdao Defit Co., Ltd., the model is SSB-211E; the microcrystalline corundum manufacturer is Qingdao Ruiker New Materials Technology Co., Ltd., which is a micro-crushed ceramic abrasive prepared by a single sol-gel preparation technology, with a brand name of RE.

[0050] Comparative Example 1:

[0051] The modified phenolic resin powder is replaced with ordinary phenolic resin powder, wherein the ordinary phenolic resin powder is Jinan Shengquan phenolic resin powder PF2801A, and the phenolic resin powder is used for universal abrasives. The other proportions and manufacturing methods are the same as those in Example 1.

[0052] Comparative Example 2:

[0053] The nickel-plated polycrystalline diamond is replaced with nickel-plated single crystal diamond, wherein the nickel-plated single crystal diamond is Henan Tailong JR1N6030-40 single crystal nickel-plated diamond, and the other proportions and manufacturing methods are the same as those in Example 1.

[0054] Comparative Example 3:

[0055] The nickel-plated polycrystalline diamond is replaced with polycrystalline diamond, wherein the polycrystalline diamond is Henan Feimeng PDM30-40 polycrystalline diamond, and the rest of the proportions and manufacturing method are the same as those in Example 1.

[0056] Comparative Example 4

[0057] The nano copper powder was replaced with ordinary copper powder, wherein the ordinary copper powder was electrolytic copper powder 300# from Chongqing Youyan Chongye New Materials Co., Ltd., with a size of about 40-50um. Ordinary electrolytic copper powder has a coarse particle size, its strength is only 1 / 3 of that of nano copper powder, and its ductility is only 1 / 50 of that of nano copper powder. The rest of the proportions and manufacturing methods are the same as those in Example 1.

[0058] Comparative Example 5

[0059] The microcrystalline corundum was replaced with ordinary corundum, wherein the ordinary corundum was single crystal corundum from Zhengzhou Yufa High-tech Materials Co., Ltd. The single crystal corundum had a coarse particle size and did not have a submicron crystal structure, and had poor overall crushing and self-sharpening properties. The remaining proportions and manufacturing methods were the same as those in Example 1.

[0060] Comparative Example 6

[0061] No reinforcing fiber is added, and the remaining proportions and manufacturing method are the same as those in Example 1.

[0062] Comparative Example 7

[0063] No wetting agent was added, and the remaining proportions and manufacturing method were the same as those in Example 1.

[0064] Evaluation: The product roughness, silicon boat surface scratches, and grinding wheel life tests were performed on the embodiments and comparative examples. The results are shown in Table 1.

[0065] Table 1 Examples and Comparative Examples Results

[0066]

[0067]

[0068] Conclusion: When the weight composition of the resin grinding wheel for silicon carbide boat is 40-50 parts of resin powder, 10-20 parts of diamond, 10-20 parts of copper powder, 5-10 parts of microcrystalline corundum, 5-10 parts of reinforcing fiber, and 5-8 parts of wetting agent, there are no obvious wear marks and scratches on the surface of the silicon carbide boat, and the surface roughness is lower than Ra0.2; and the life of the resin grinding wheel for silicon carbide boat is more than 650, and the average grooving time is within 10 minutes. The results of the above embodiments and comparative examples show that modified phenolic resin powder can increase the life of the grinding wheel, and polycrystalline nickel-plated diamond can effectively avoid scratches on the product surface, reduce product roughness, and increase the life of the grinding wheel. Nano copper powder, reinforcing fiber and wetting agent are all beneficial to improving product life, improving product quality and reducing roughness.

[0069] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0070] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A resin grinding wheel for silicon carbide silicon boat, characterized in that: The resin grinding wheel comprises a base and an abrasive layer arranged on an outer circumferential end surface of the base, a through hole is opened in the middle of the base, and the abrasive layer comprises the following raw materials in parts by weight: 40-50 parts of resin powder; Diamond 10-20 parts; 10-20 parts of copper powder; 5-10 parts of microcrystalline corundum; Reinforcement fiber 5-10 parts; 5-8 parts of wetting agent.

2. A resin grinding wheel for silicon carbide boat according to claim 1, characterized in that: The resin powder is polyetherketone toughened modified phenolic resin, and the resin powder includes a curing agent, wherein the curing agent is hexamethylenetetramine, the content of the curing agent is 8-12%, the flow length of the resin powder is 40-60, and the particle size of the resin powder is 5-10 μm.

3. The resin grinding wheel for silicon carbide boat according to claim 1, characterized in that: The diamond is polycrystalline nickel-plated diamond, the diamond particle size is 30-40 μm, and the weight gain rate of the nickel layer of the diamond is 60%.

4. The resin grinding wheel for silicon carbide boat according to claim 1, characterized in that: The copper powder is electrolytic nano copper powder, and the particle size of the copper powder is 100-200nm.

5. The resin grinding wheel for silicon carbide boat according to claim 1, characterized in that: The particle size of the microcrystalline corundum is 100-300nm; the reinforcing fiber is carbon fiber or alumina fiber, the aspect ratio of the reinforcing fiber is not greater than 15 and the diameter is less than 30um.

6. The resin grinding wheel for silicon carbide boat according to claim 1, characterized in that: The wetting agent is any one of furfural and sodium stearate.

7. A method for preparing a resin grinding wheel for a silicon carbide boat, characterized in that: The following steps are involved: The raw materials resin powder, diamond, copper powder, microcrystalline corundum, reinforcing fiber and wetting agent are poured into a medium in proportion, and the silicon carbide resin grinding wheel for silicon boat is obtained through mixing, stirring, drying, dispersing, cold pressing, hot pressing, sintering and curing. The silicon carbide resin grinding wheel for silicon boat includes a substrate and an abrasive layer arranged on an outer circumferential end surface of the substrate, a through hole is opened in the middle of the substrate, and the abrasive layer includes the following raw materials in parts by weight: 40-50 parts of resin powder; Diamond 10-20 parts; 10-20 parts of copper powder; Microcrystalline corundum 5-10 parts; Reinforcement fiber 5-10 parts; 5-8 parts of wetting agent.

8. The method for preparing a resin grinding wheel for a silicon carbide boat according to claim 7, characterized in that: The medium is any one of anhydrous ethanol or pure water or a combination of the two, and the ratio of the amount of the medium to the amount of the raw material is 90-110 ml: 10-20 g.

9. The preparation method according to claim 7, characterized in that: The mixing and stirring is performed by ultrasound, and the ultrasound time is not less than 60 minutes; the drying temperature is 80-110° C., and the dispersion is performed by ultrasonic vibration, and the dispersion time is 1-3 hours.

10. The preparation method according to claim 7, characterized in that: The cold pressing is performed in a cold press for 10-20 minutes; the hot pressing sintering molding has a sintering temperature of 150-200° C., a molding pressure of 5-10 MPa, and a sintering time of 10-15 minutes.

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