Multi-grating broadband spectrum detection device

By arranging the three-grating structure and corresponding detection components on the base of the Roland circular structure, a wide-band spectral detection of 130nm-780nm is achieved, which solves the problem of limited spectral detection range in the prior art, expands the application field and improves the detection accuracy.

CN119573882APending Publication Date: 2025-03-07BEIKUANG TESTING TECH CO LTD
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Patent Information

Application Number
CN202411830663.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-12
Publication Date
2025-03-07

AI Technical Summary

Technical Problem

The spectral detection range of existing spectral detectors is limited, resulting in low detection accuracy and cannot meet the industry's demand for wide-band detection.

Method used

A multi-grating wide band spectral detection device is designed. By arranging a three-grating structure on the base of the Roland circular structure, the incident light is classified, and it is divided into continuous distribution of different bands of light, and the corresponding detection components are used for detection, achieving wide band detection of 130nm-780nm.

Benefits of technology

A wide band detection of 130nm-780nm is achieved, covering the wavelength range of halogen and alkali metals, expanding the application field of spectral detection devices, and improving detection accuracy and sensitivity.

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Abstract

The invention relates to the technical field of spectrum detection, and provides a multi-grating broadband spectrum detection device, which is characterized in that a three-grating structure is arranged on a base of a Rowland circle structure, and incident light is graded by using the three-grating structure, so that the incident light is divided into continuously distributed light of different wavebands, and the spectrum detection accuracy is improved. Meanwhile, the corresponding detection assemblies are adopted for detecting the light rays of the corresponding wave bands respectively, so that detection of the broadband of 130-780 nm is achieved, the wavelength covers halogen and alkaline metal, and the application field of the spectrum detection device is greatly expanded.
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Description

Technical Field

[0001] The present invention relates to the technical field of spectrum detection, and in particular to a multi-grating wide-band spectrum detection device. Background Art

[0002] Spectrometer is an important measurement and analysis tool, and one of the core components of various high-end scientific instruments. It is widely used in the field of element content analysis and testing in modern steel, chemical industry, metallurgy, materials and environmental protection. In particular, wide-band spectrometers can more accurately identify the characteristic spectra of elements in substances due to their wider wavelength coverage and higher resolution, so they are used in a wider range of fields. For example, rare earth elements near 400nm have very strict resolution requirements for spectrometers (less than 8ppm), while the sensitive lines of halogen elements (Cl, Br, I) are around 130nm. At the same time, the characteristic sensitive lines of alkaline metals such as sodium, potassium, and lithium are distributed between 500-780nm, while the characteristic spectral lines of conventional metal elements are basically distributed between 200-500nm. With the development of my country's economy, the demand for detection of different materials / substances in various industries has increased dramatically, but the matrix and element content of different materials vary greatly, so the demand for wide-band spectrometers has risen sharply.

[0003] At present, wide-band spectrometers at home and abroad are mainly divided into three types according to the technical methods of implementation:

[0004] 1) A single-channel spectrometer based on grating scanning uses a fixed detector and a rotating grating to achieve full-spectrum scanning. Since this type of spectrometer requires the motor to rotate a certain angle to scan the full spectrum, it is generally used in conjunction with a continuous light source to analyze the element content of a substance, such as inductively coupled plasma spectroscopy. The characteristics of this spectrometer are high resolution, simple structure, and low cost. The disadvantage is that it cannot collect data synchronously across the entire band, and the timeliness is poor. At the same time, the grating needs to be rotated back and forth repeatedly, and the instrument has poor stability.

[0005] 2) The full-spectrum spectrometer based on the mid-step beam splitter grating + planar array detector uses a two-dimensional dispersion method to project light of different wavelengths to different positions of the planar array detector. The advantage of this spectrometer is that it is relatively small in size and can achieve full-band time-sharing acquisition. The disadvantage is that the response of the planar array detector in the ultraviolet band is very poor and it cannot effectively detect the ultraviolet spectrum between 130nm-190nm. In addition, the resolution of this type of spectrometer changes with the wavelength. The longer the wavelength, the worse the resolution. The mid-step spectrometer equipped with ordinary commercial analytical instruments currently has a resolution greater than 15pm at a wavelength of 400nm, which makes it unusable in some industries (such as the rare earth analysis field).

[0006] 3) Spectrometer based on Rowland circle optical structure + linear array CCD detector. The Rowland circle structure is a relatively mature optical solution. Limited by the detector manufacturing process and the coating process of optical devices, the spectral detection range of traditional spectrometers of this type can only reach 160nm-500nm.

[0007] Through the comparative analysis of the above existing technologies, it can be seen that the advantages of the linear array CCD full-spectrum spectrometer based on the Rowland circle optical structure are very obvious. However, the detection band and resolution of the spectrometer developed domestically based on this technology cannot meet the special needs of the industry. Summary of the invention

[0008] The object of the present invention is to provide a multi-grating wide-band spectrum detection device to solve the problem that the existing spectrum detector has a limited spectrum detection range resulting in low detection accuracy.

[0009] The embodiment of the present invention provides a multi-grating wide-band spectrum detection device, comprising: a base, a bracket, a first detection component, a second detection component, a third detection component, a front optical path component, an incident slit, a first beam splitter grating, a second beam splitter grating, a third beam splitter grating, and a cylindrical mirror; the base is a groove-shaped structure in the shape of a Rowland circle, and the bracket is installed at the bottom of the base; the front optical path component is fixed on the outer side wall of the base, and is used to pre-process the incident light; the incident slit is fixed on the inner side wall of the base and is directly opposite to the front optical path component, and is used to divide the incident light into a first incident light and a second incident light; the first beam splitter grating, the second beam splitter grating and the third beam splitter grating are respectively installed on the bracket, the first beam splitter grating is used to receive the first incident light, and divide the first incident light into a first first-order light and a first zero-order light, and the first first-order light passes through the first After being reflected by the spectroscopic grating, it is received by the first detection component, the first 0th order light is reflected by the first spectroscopic grating to the third spectroscopic grating, and is reflected by the third spectroscopic grating and received by the third detection component; the second incident light by the second spectroscopic grating is divided into second 1st order light and second 0th order light, the second 1st order light is reflected by the second spectroscopic grating and is incident on the cylindrical mirror, and then received by the second detection component; the first detection component, the second detection component and the third detection component are arranged along the circumference of the base according to the corresponding spectroscopic diffraction angle of the spectroscopic grating to realize spectral detection of 130nm to 780nm; wherein, the first detection component is used for spectral detection of 103nm to 200nm, the third detection component is used for spectral detection of 201nm to 400nm, and the second detection component is used for spectral detection of 401nm to 780nm.

[0010] Optionally, the bracket includes a cross-beam support structure and an annular support structure; the cross-beam support structure is fixed to the center position of the base through a support member, and the annular support structure is connected to the periphery of the cross-beam support structure, and the shape of the annular support structure is a Rowland circle; the first detection component, the second detection component, the third detection component, the first spectroscopic grating, the second spectroscopic grating, the third spectroscopic grating and the cylindrical mirror are all fixed on the annular support structure.

[0011] Optionally, the multi-grating wide-band spectrum detection device further includes: a light baffle; the light baffle is arranged between the second beam splitter grating and the center of the base, and is used to reflect the second 0th order light reflected by the second beam splitter grating back to the side wall of the base.

[0012] Optionally, the first detection component, the second detection component and the third detection component each include multiple detection chips and multiple acquisition circuit boards, the multiple detection chips are arranged in sequence along the circumference of the base, and the multiple acquisition circuit boards are fixed on the bracket and extend above the detection chips.

[0013] Optionally, every three detection chips correspond to one acquisition circuit board.

[0014] Optionally, the multi-grating wide-band spectrum detection device further includes: a communication circuit board; the communication circuit board is fixed on the base, and the communication circuit board is electrically connected to each of the acquisition circuit boards respectively.

[0015] Optionally, the multi-grating wide-band spectrum detection device further includes: an aperture; the aperture is fixed on the bracket, and is used to limit the field of view angle of the light at the incident slit, and keep matching with the grating field of view and angle of the subsequent light path.

[0016] Optionally, the first and third beam splitter gratings are both 3600-line holographic concave gratings; the grating scale of the second beam splitter grating is a 1800-line holographic concave grating; and / or the focal lengths of the first, second and third beam splitter gratings are 750 mm.

[0017] Optionally, the multi-grating wide-band spectrum detection device further comprises: a cover body; the cover body is installed in a sealing manner with the base to form a closed space, and the closed space is filled with argon gas.

[0018] The embodiments of the present invention have at least the following technical effects:

[0019] The multi-grating wide-band spectral detection device provided by the embodiment of the present invention arranges three grating structures on the base of the Rowland circle structure, and uses the three grating structures to classify the incident light, thereby dividing the incident light into continuously distributed light of different bands, and simultaneously uses corresponding detection components to detect the light of corresponding bands respectively, thereby realizing wide-band detection of 130nm-780nm, and the wavelength covers halogens and alkaline metals, which greatly expands the application field of the spectral detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the internal structure of a multi-grating wide-band spectrum detection device provided by an embodiment of the present invention;

[0022] Figure 2 The embodiment of the present invention provides Figure 2 A top view of

[0023] Figure 3 A schematic diagram of the optical path of a multi-grating wide-band spectrum detection device provided in an embodiment of the present invention.

[0024] Icon: 1-base; 2-bracket; 3-detection chip; 4-light shield; 5-first spectroscopic grating; 6-second spectroscopic grating; 7-third spectroscopic grating; 8-incident slit; 9-front optical path; 10-collection circuit board; 11-communication circuit board; 12-aperture; 13-cylindrical mirror; 14-first detection component; 15-second detection component; 16-third detection component. DETAILED DESCRIPTION

[0025] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as generally understood by those skilled in the art in the art to which the present invention belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as herein.

[0027] Those skilled in the art will appreciate that, unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present invention refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof. The term "and / or" used herein includes all or any unit and all combinations of one or more associated listed items.

[0028] like Figures 1 to 3 As shown, an embodiment of the present invention provides a multi-grating wide-band spectral detection device, including: a base 1, a bracket 2, a first detection component 14, a second detection component 15, a third detection component 16, a front optical path 9 component, an incident slit 8, a first spectroscopic grating 5, a second spectroscopic grating 6, a third spectroscopic grating 7, and a cylindrical mirror 13.

[0029] Specifically, the base 1 is a trough structure in the shape of a Rowland circle, and the trough structure includes a bottom plate and side walls arranged along the periphery of the floor, and the bracket 2 is installed at the bottom of the base 1, that is, the bracket 2 is fixedly connected to the floor of the base 1, so as to facilitate the arrangement of various optical components and detection components. The front optical path 9 component is fixed on the outer side wall of the base 1, and is used to pre-process the incident light, and the incident slit 8 is fixed on the inner side wall of the base 1 and directly opposite to the front optical path 9 component, and is used to divide the incident light into a first incident light and a second incident light.

[0030] Further, the first spectroscopic grating 5, the second spectroscopic grating 6 and the third spectroscopic grating 7 are respectively mounted on the bracket 2, the first spectroscopic grating 5 is used to receive the first incident light, and divide the first incident light into the first first-order light and the first zero-order light, the first first-order light is reflected by the first spectroscopic grating 5 and received by the first detection component 14, the first zero-order light is reflected by the first spectroscopic grating 5 to the third spectroscopic grating 7, and is reflected by the third spectroscopic grating 7 and received by the third detection component 16. After the first incident light is split by the first spectroscopic grating 5, the first first-order light is detected by the detection chip 3, the first zero-order light is reflected by the mirror, and the reflected first zero-order light is used as a complete incident light to be incident on the next grating, so as to realize the secondary utilization of the first zero-order light, which can improve the light utilization rate and is conducive to improving the system integration.

[0031] The second beam splitter grating 6 splits the second incident light into the second first-order light and the second zero-order light. The second first-order light is reflected by the second beam splitter grating 6 and then incident on the cylindrical mirror 13, and then received by the second detection component 15. The first detection component 14, the second detection component 15 and the third detection component 16 are arranged along the circumference of the base 1 according to the corresponding beam splitter diffraction angle of the beam splitter grating to achieve spectral detection of 130nm to 780nm. Among them, the first detection component 14 is used for spectral detection of 103nm to 200nm, the third detection component 16 is used for spectral detection of 201nm to 400nm, and the second detection component 15 is used for spectral detection of 401nm to 780nm. It should be noted that the cylindrical mirror 13 is arranged below the corresponding detection component to reflect the spectrum to the detection chip 3 corresponding to the detection component. In addition Figure 1 and Figure 2 The figure only roughly illustrates the relative positions of the first detection component 14 , the second detection component 15 and the third detection component 16 , and does not indicate the specific number of detection chips 3 in the detection component.

[0032] After the incident slit 8 splits the light, the wavelengths are all full-band. The slit only splits the direction but not the wavelength. After splitting by the grating, the level 1 light is the light with separated spectral lines, while the level 0 light is still the full-spectrum light, which is equivalent to that the level 0 light is only a part of the incident light and has not been split into a spectrum.

[0033] The multi-grating wide-band spectral detection device provided by the embodiment of the present invention arranges three grating structures on the base 1 of the Rowland circle structure, and uses the three grating structures to classify the incident light, thereby dividing the incident light into continuously distributed light of different bands, and simultaneously uses corresponding detection components to detect the light of corresponding bands respectively, thereby realizing wide-band detection of 130nm-780nm, and the wavelength covers halogens and alkaline metals, which greatly expands the application field of the spectral detection device.

[0034] The spectroscopic grating in the embodiment of the present invention adopts a semi-transparent and semi-reflective mirror, which can be used not only as a spectroscopic device but also as a reflector. In addition, a three-grating structure and detection components at corresponding positions are reasonably set according to the slit spectroscopic angle, grating installation angle and light incident angle, which greatly reduces the volume of the optical path and balances the relationship between volume and resolution. Since the size of the volume is also related to the detection band range, within this band range, the volume of the multi-grating wide-band spectral detection device in the embodiment of the present invention can be a small volume structure with a diameter of less than 1 meter, which is conducive to saving space.

[0035] In some embodiments, Figure 1 As shown, the bracket 2 of the multi-grating wide-band spectral detection device includes a cross-beam support structure and an annular support structure; the cross-beam support structure is fixed to the center position of the base 1 through a support member, and the annular support structure is connected to the periphery of the cross-beam support structure. The shape of the annular support structure is a Rowland circle shape and is arranged along the side wall of the base 1.

[0036] The first detection assembly 14, the second detection assembly 15, the third detection assembly 16, the first beam splitter grating 5, the second beam splitter grating 6, the third beam splitter grating 7 and the cylindrical mirror 13 are all fixed on the annular support structure to facilitate spectral detection of the incident light.

[0037] In some embodiments, continue to refer to Figure 1 The multi-grating wide-band spectrum detection device also includes: a light baffle 4; the light baffle 4 is arranged between the second beam splitting grating 6 and the center of the base 1, and is located at the mirror reflection angle of the second beam splitting grating 6, and is used to reflect the second 0th order light reflected by the second beam splitting grating 6 back to the side wall of the base 1 to avoid confusion with other light paths and affect the detection effect.

[0038] In some embodiments, the first detection assembly 14, the second detection assembly 15, and the third detection assembly 16 each include a plurality of detection chips 3 and a plurality of acquisition circuit boards 10, the plurality of detection chips 3 are sequentially arranged along the circumference of the base 1, and the plurality of acquisition circuit boards 10 are fixed on the bracket 2 and extend above the detection chips 3. The height of the light shielding plate 4 is substantially consistent with the angle of the detection chip 3, the cylindrical mirror 13 is located below the corresponding detection chip 3, and the number of the cylindrical mirrors 13 corresponds to the number of the detection chips 3 one by one.

[0039] Optionally, every three detection chips 3 correspond to one acquisition circuit board 10, which can ensure the speed of optical signal processing and solve the number of acquisition circuit boards 10, thereby facilitating the realization of a smaller and more compact spectrum detection device.

[0040] In a specific embodiment, the first detection component 14, the second detection component 15 and the third detection component 16 include a total of 27 detection chips 3, corresponding to which are 9 acquisition circuit boards 10. The 27 detection chips 3 are arranged along the circumference of the annular support structure, and the band can cover 130nm~780nm. The ultraviolet band adopts a customized ultraviolet band-specific CMOS detection chip 3 to enhance the spectral line intensity of the ultraviolet band. Each detection chip 3 is installed on the bracket 2 according to the diffraction angle distribution of the three splitter gratings.

[0041] In some embodiments, the multi-grating wide-band spectrum detection device further includes: a communication circuit board 11; the communication circuit board 11 is fixed on the base 1, and the communication circuit board 11 is electrically connected to each of the acquisition circuit boards 10 respectively.

[0042] In some embodiments, the multi-grating wide-band spectral detection device also includes: an aperture 12; the aperture 12 is fixed on the bracket 2, and is used to limit the field of view angle of the light at the incident slit 8, and keep matching with the grating field of view and angle of the subsequent optical path, which is beneficial to improving the detection accuracy.

[0043] Optionally, the first spectroscopic grating 5 and the third spectroscopic grating 7 are both 3600-line holographic concave gratings; the grating scale of the second spectroscopic grating 6 is a holographic concave grating with 1800 lines, and the markings of the spectroscopic grating are determined by optical design. In the small-volume spectrum detection device of an embodiment of the present invention, the above-mentioned grating markings are obtained by optical path simulation.

[0044] Optionally, the focal lengths of the first spectroscopic grating 5, the second spectroscopic grating 6 and the third spectroscopic grating 7 are 750 mm. In order to measure the spectrum in the wide band range of 130 nm to 780 nm, two different types of concave gratings are used. Considering the requirements of resolution, the focal length of the spectroscopic grating is set to 750 mm, which is conducive to balancing the relationship between the volume and resolution of the detection device, thereby realizing wide-band spectrum detection in the circular light chamber.

[0045] Optionally, the multi-grating wide-band spectral detection device also includes: a cover body; the cover body is sealed and installed with the base 1 to form an enclosed space, the enclosed space is filled with argon gas, and the oxygen inside the enclosed space is discharged, thereby preventing the absorption interference of oxygen molecules and improving the spectral line intensity in the ultraviolet band.

[0046] Those skilled in the art will appreciate that the various operations, methods, steps, measures, and schemes discussed in the present invention may be alternated, modified, combined, or deleted. Further, other steps, measures, and schemes in the various operations, methods, and schemes discussed in the present invention may also be alternated, modified, rearranged, decomposed, combined, or deleted. Further, the steps, measures, and schemes in the prior art that are similar to those disclosed in the present invention may also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0047] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0048] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0049] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific conditions.

[0050] In the description of this specification, specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. It should be understood that although the steps in the flowchart of the accompanying drawings are displayed in sequence as indicated by the arrows, these steps are not necessarily performed in sequence in the order indicated by the arrows. Unless clearly stated herein, there is no strict order restriction on the execution of these steps, and they may be performed in other orders. Moreover, at least a portion of the steps in the flowchart of the accompanying drawings may include multiple sub-steps or multiple stages, and these sub-steps or stages are not necessarily performed at the same time, but may be performed at different times, and their execution order is not necessarily performed in sequence, but may be performed in turn or alternately with other steps or at least a portion of the sub-steps or stages of other steps.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-grating wide-band spectrum detection device, characterized in that: include: Base, bracket, first detection component, second detection component, third detection component, front optical path component, incident slit, first beam splitter grating, second beam splitter grating, third beam splitter grating, cylindrical mirror; The base is a groove structure in the shape of a Rowland circle, and the bracket is installed at the bottom of the base; the front optical path component is fixed on the outer side wall of the base, and is used to pre-process the incident light; the incident slit is fixed on the inner side wall of the base and is directly opposite to the front optical path component, and is used to divide the incident light into a first incident light and a second incident light; The first spectroscopic grating, the second spectroscopic grating and the third spectroscopic grating are respectively mounted on the bracket, the first spectroscopic grating is used to receive the first incident light, and divide the first incident light into a first first-order light and a first zero-order light, the first first-order light is reflected by the first spectroscopic grating and received by the first detection component, the first zero-order light is reflected by the first spectroscopic grating to the third spectroscopic grating, and is reflected by the third spectroscopic grating and received by the third detection component; the second incident light is divided by the second spectroscopic grating into a second first-order light and a second zero-order light, the second first-order light is reflected by the second spectroscopic grating and incident on the cylindrical mirror, and then received by the second detection component; The first detection component, the second detection component and the third detection component are arranged along the circumference of the base according to the corresponding diffraction angle of the spectral grating to achieve spectral detection of 130nm to 780nm; wherein the first detection component is used for spectral detection of 103nm to 200nm, the third detection component is used for spectral detection of 201nm to 400nm, and the second detection component is used for spectral detection of 401nm to 780nm.

2. The multi-grating wide-band spectrum detection device according to claim 1, characterized in that: The bracket includes a crossbeam support structure and an annular support structure; the crossbeam support structure is fixed to the center of the base through a support member, and the annular support structure is connected to the periphery of the crossbeam support structure, and the shape of the annular support structure is a Rowland circle shape; The first detection assembly, the second detection assembly, the third detection assembly, the first beam splitter grating, the second beam splitter grating, the third beam splitter grating and the cylindrical mirror are all fixed on the annular support structure.

3. The multi-grating wide-band spectrum detection device according to claim 1, characterized in that: Also includes: Light blocking plate; the light blocking plate is arranged between the second beam splitter grating and the center of the base, and is used to reflect the second 0th order light reflected by the second beam splitter grating back to the side wall of the base.

4. The multi-grating wide-band spectrum detection device according to claim 1, characterized in that: The first detection component, the second detection component and the third detection component each include a plurality of detection chips and a plurality of acquisition circuit boards, the plurality of detection chips are arranged in sequence along the circumference of the base, and the plurality of acquisition circuit boards are fixed on the bracket and extend above the detection chips.

5. The multi-grating wide-band spectrum detection device according to claim 4, characterized in that: Every three detection chips correspond to one acquisition circuit board.

6. The multi-grating wide-band spectrum detection device according to claim 1, characterized in that: The multi-grating wide-band spectrum detection device also includes: a communication circuit board; the communication circuit board is fixed on the base, and the communication circuit board is electrically connected to each of the acquisition circuit boards.

7. The multi-grating wide-band spectrum detection device according to claim 1, characterized in that: The multi-grating wide-band spectrum detection device also includes: an aperture; the aperture is fixed on the bracket and is used to limit the field angle of light at the incident slit and keep matching with the grating field and angle of the subsequent light path.

8. The multi-grating wide-band spectrum detection device according to claim 1, characterized in that: The first beam splitter grating and the third beam splitter grating are both 3600-line holographic concave gratings; the grating scale of the second beam splitter grating is a 1800-line holographic concave grating; And / or, the focal lengths of the first beam splitter grating, the second beam splitter grating and the third beam splitter grating are 750 mm.

9. The multi-grating wide-band spectrum detection device according to claim 1, characterized in that: Also includes: The cover body is installed in a sealed manner with the base to form a closed space, and the closed space is filled with argon gas.

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