High-precision pressure detection device for atomized gas pressure control

Abstract

The invention relates to the technical field of ion source atomization pressure detection, in particular to a high-precision atomization gas pressure control pressure detection device which comprises a conveying pipe, a mounting frame seat is fixedly mounted in the middle of the top of the conveying pipe, and the bottom of the mounting frame seat is communicated with the interior of the conveying pipe. The mounting mechanism and the cleaning mechanism of the device cooperate to provide comprehensive guarantee for use and maintenance of the air pressure sensor, the mounting mechanism realizes convenient disassembly and assembly and good sealing performance, equipment maintenance and operation stability are facilitated, the cleaning mechanism realizes automatic cleaning by using flow of atomized gas, and the cleaning efficiency is improved. The problem that the precision of the sensor is influenced by dust and impurities is effectively solved, the device can stably operate and detect for a long time in the application of ion source equipment needing high precision under the combined action of the dust and the impurities, the downtime and error risk caused by maintenance and impurity pollution are reduced, and the production efficiency and the detection accuracy are improved.

Description

Technical Field

[0001] The present application relates to the technical field of ion source atomization pressure detection, and in particular to a pressure detection device for high-precision atomization gas pressure control. Background Art

[0002] In the ion source atomization gas pressure control, the use of a pressure sensor can accurately sense the pressure change of the atomization gas. The pressure sensor is an instrument used to measure the absolute pressure of the gas. Its working principle is usually to use a sensing element that is sensitive to air pressure, such as a film. When the pressure of the measured gas changes, the sensing element produces a corresponding physical change, which in turn causes changes in parameters such as resistance and capacitance in the circuit. This change is converted into an electrical signal output to monitor and measure the gas pressure. In the atomization gas pressure control, the pressure sensor can accurately measure the gas pressure value in real time and provide data support for subsequent pressure control. It has the advantages of fast response speed, high measurement accuracy, small size, etc., and can adapt to a variety of working environments; At present, during the atomization process of the ion source, some tiny solid particles may be generated, such as particles formed after the atomized tiny droplets are dried, dust in the experimental environment, etc. If these solid particles enter the interior of the pressure sensor, they will adhere to the sensitive elements of the sensor, affecting the normal operation and measurement accuracy of the sensor. However, the existing pressure sensors usually lack corresponding protective structures. For example, a Chinese patent with the announcement number "CN221685752U" discloses a new type of air pressure sensor, which uses a detachable filter paddle to filter dust entering the air duct, etc., to ensure the cleanliness of the surface of the integrated temperature and air pressure sensor, and the filter paddle is easy to disassemble and clean. The integrated temperature and air pressure sensor integrates a temperature and air pressure sensor, so that when the air pressure sensor detects the wind pressure, the background processor performs temperature compensation according to the temperature detection information, corrects the measurement result, and improves the air pressure detection accuracy; The above-mentioned sensor for detecting the atomized gas of the ion source equipment has obvious defects in the actual application process, that is, the lack of a corresponding detection end protection structure. During the atomized gas detection work of the ion source equipment, it is necessary to pay special attention to the fact that some tiny particles will inevitably be generated during the atomization process of the ion source, and there may also be impurities such as dust in the experimental environment. When these tiny particles and dust enter the interior of the air pressure sensor, they will adhere to the surface of the sensor element (such as a film, etc.); This adhesion phenomenon is not without influence. As time goes by, its harm gradually becomes apparent. Impurities attached to the surface of the sensor element will interfere with the performance of the sensor. In principle, the normal operation of the sensor depends on the accurate perception and response of the sensor element to pressure changes, and the attached impurities will change the physical properties of the sensor element, such as affecting its elastic coefficient, resistance value and other key parameters related to pressure detection, which in turn affects the accuracy of the sensor's detection of the atomized gas pressure and makes it impossible to accurately measure the actual pressure value. In the operation of ion source equipment, precise control of atomizing gas pressure is crucial. However, due to the decrease in sensor detection accuracy, the atomizing gas pressure control will inevitably deviate in the long run. This deviation may have many adverse effects on the working performance of the ion source, such as affecting the atomization effect, changing the efficiency and quality of ion generation, etc., thereby affecting the accuracy and reliability of the entire experiment or production process. In view of this, in order to ensure the normal operation of the ion source equipment and the accuracy of atomizing gas pressure detection, it is urgent to improve the sensor to make up for its current defects and shortcomings. Summary of the invention

[0003] In order to improve the detection accuracy of the existing pressure detection device for atomizing gas pressure control, the present application provides a high-precision pressure detection device for atomizing gas pressure control.

[0004] The present application provides a high-precision pressure detection device for atomizing gas pressure control, which adopts the following technical solution: comprising a delivery pipe, a mounting frame seat is fixedly installed in the middle of the top of the delivery pipe, the bottom of the mounting frame seat is connected to the inside of the delivery pipe, a mounting mechanism is fixedly installed on the top of the mounting frame seat, a cleaning mechanism is inserted into the inner side of the mounting frame seat, an air pressure sensor is installed on the inner side of the cleaning mechanism by bolts, a dustproof mesh cover is fixedly connected to the detection end port of the air pressure sensor, and the cleaning end of the cleaning mechanism is fitted and connected to the surface of the dustproof mesh cover of the air pressure sensor; The cleaning mechanism includes a filling plate, which is inserted into the inner side of the mounting frame seat, the filling plate and the mounting mechanism are clamped with each other, driving components are fixedly installed on both sides of the bottom of the filling plate, and a cleaning component is movably installed in the middle of the bottom of the filling plate. The cleaning component and the driving component are movably connected, the cleaning end of the cleaning component is fit-connected to the bottom of the dustproof mesh cover, and the air pressure sensor is installed in the middle of the filling plate by bolts.

[0005] Optionally, solenoid valves are fixedly installed at both ends of the delivery pipe, and the inner side of the solenoid valve is connected to the two ends of the delivery pipe.

[0006] Optionally, a connecting flange is fixedly mounted on the outer end of the solenoid valve, and mounting holes are provided at equal intervals on the outer side of the connecting flange, and the mounting holes are configured as countersunk holes.

[0007] Optionally, the mounting mechanism includes side rails and limit grooves, the side rails are fixedly mounted on both sides of the mounting frame seat, elastic limit groups are fixedly mounted on both ends of the inner sides of the side rails, the limit grooves are opened in the middle of the upper ends of both sides of the mounting frame seat, and limit grooves are also opened on both sides of the filling plate, and the ends of the elastic limit groups pass through the limit grooves on the mounting frame seat and are inserted into the limit grooves of the filling plate.

[0008] Optionally, the elastic limiting group includes a limiting spring, the limiting spring is fixedly installed on the inner two ends of the side rail, a slider is fixedly installed on the outer end of the limiting spring, a clamping frame is fixedly installed on the top of the slider, a limiting block is fixedly connected to the inner middle part of the clamping frame, and the end of the limiting block passes through the limiting groove on the mounting frame seat and is inserted into the inner side of the limiting groove of the filling plate.

[0009] Optionally, a push plate is fixedly installed on the top of the clamping frame, the upper end of the push plate is configured to be an arc shape, and the side shape of the slider and the overall cross-sectional shape of the internal cavity of the side rail are both configured to be a convex shape.

[0010] Optionally, the driving assembly includes a turntable, which is rotatably connected to both sides of the bottom of the filling plate, an eccentric shaft is fixedly installed on the bottom of the turntable, the outer surface of the eccentric shaft is rotatably connected to a linkage rod, the end of the linkage rod is movably connected to the cleaning assembly, and the bottom of the eccentric shaft is fixedly connected to a wind wheel.

[0011] Optionally, the cleaning assembly includes an arc-shaped guide rail, which is fixedly installed on the bottom of the filling plate, and the inner side of the arc-shaped guide rail is slidably connected to a guide block, and the bottom of the guide block is rotatably connected to an articulated wheel, the outer side of the articulated wheel and the inner end of the linkage rod are fixedly connected, the arc-shaped guide rail and the air pressure sensor detection end and the dustproof mesh cover are arranged in concentric circles, and the inner side of the guide block is fixedly connected to a brush plate, and the top of the brush plate and the bottom of the dustproof mesh cover are fit-fittingly connected.

[0012] Optionally, the side shape of the guide block is set to be L-shaped, the internal cross-sectional shape of the arc-shaped guide rail is also set to be L-shaped, and the outer surfaces of the slider and the guide block are fixedly connected with wear-resistant gaskets.

[0013] Optionally, a sealing sleeve cover is fixedly installed on the top of the filling plate, the sealing sleeve cover covers the outer surface of the mounting frame seat, and the outer end of the air pressure sensor passes through the sealing sleeve cover and is fixedly connected with an electrical wire.

[0014] In summary, this application includes the following beneficial technical effects: 1. This device is provided with an installation mechanism, so that when cleaning and repairing the air pressure sensor, the solenoid valves at both ends are closed first, which can accurately close the two ends of the conveying pipe and perform a tight seal, creating a safe and reliable environment for subsequent operations, effectively preventing gas leakage, and ensuring operation safety and environmental stability. When disassembling and assembling, the push plate is adjusted to drive the card frame to move outward, and the slider is pushed to slide and squeeze the limit spring, so that the limit block is separated from the limit groove, and the filling plate and the cleaning mechanism can be removed. On the contrary, when installing, after the filling plate is inserted, the limit spring is reset to make the limit block snap into the limit groove to complete the installation, and finally the sealing sleeve is used to cover the top of the installation frame seat to achieve a good seal. This mechanism is not only easy to operate and reduces the difficulty of disassembly and assembly, but also greatly meets the high efficiency requirements of equipment maintenance, provides a stable working environment for the air pressure sensor, and ensures the operation effect and service life of the device; 2. When the cleaning mechanism is in use, the solenoid valve can be opened after the air pressure sensor is installed. The atomized gas circulates at a high speed in the delivery pipe, pushing the wind wheel to rotate in the middle of the pipe, providing power for subsequent movement. The wind wheel drives the eccentric shaft to rotate, thereby causing the turntable and the linkage rod to swing. The outer end of the linkage rod is connected to the articulated wheel of the guide block and is tightly matched. Under the action of the eccentric shaft, the linkage rod reciprocates to push the guide block to swing back and forth along the arc in the circular arc guide rail. During this process, the guide block drives the brush plate to brush and clean the bottom of the dustproof mesh cover, and the dustproof mesh cover can filter and block dust and particulate impurities to prevent them from entering the detection end of the air pressure sensor and affecting the detection element, ensuring the long-term detection accuracy of the sensor, reducing detection errors and equipment failures, and reflecting high practicality and advancement. 3. The installation mechanism and cleaning mechanism of this device work together to provide comprehensive protection for the use and maintenance of the air pressure sensor. The installation mechanism realizes convenient disassembly and assembly and good sealing performance, which is convenient for equipment maintenance and operation stability. The cleaning mechanism uses the flow of atomized gas to achieve automatic cleaning, effectively solving the problem of the influence of dust and impurities on sensor accuracy. The two work together to enable the device to operate stably for a long time in applications requiring high-precision ion source equipment, reducing downtime and error risks caused by maintenance and impurity contamination, and improving production efficiency and detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure in the embodiment of the present application; Figure 2 It is a schematic diagram of a top view structure in an embodiment of the present application; Figure 3 It is a schematic diagram of the rear view structure in the embodiment of the present application; Figure 4 is a schematic diagram of a top view of the air pressure sensor in a disassembled state in an embodiment of the present application; Figure 5 This is a schematic diagram of the structure of the air pressure sensor in a disassembled state as viewed from above in an embodiment of the present application; Figure 6 It is a bottom view structural diagram of a cleaning component and a transmission component in an embodiment of the present application; Figure 7 This is a schematic diagram of the bottom view of the cleaning component in the embodiment of the present application; Figure 8 It is a schematic diagram of the top view structure of the cleaning component in the embodiment of the present application.

[0016] Figure numerals: 1. conveying pipe; 2. mounting frame; 3. mounting mechanism; 31. side rail; 32. limiting groove; 33. elastic limiting group; 331. limiting spring; 332. sliding block; 333. clamping frame; 334. limiting block; 335. pushing plate; 4. air pressure sensor; 5. dustproof mesh cover; 6. cleaning mechanism; 61. filling plate; 62. driving assembly; 621. turntable; 622. eccentric shaft; 623. linkage rod; 624. wind wheel; 63. cleaning assembly; 631. arc guide rail; 632. guide block; 633. articulated wheel; 634. brush plate; 64. sealing sleeve cover; 7. solenoid valve; 8. connecting flange; 9. mounting hole; 10. connecting wire. DETAILED DESCRIPTION

[0017] The following is combined with Figure 1-8 This application is described in further detail.

[0018] The present application discloses a pressure detection device for high-precision atomizing gas pressure control. Figure 1-8 As shown, it includes a delivery pipe 1, a mounting frame seat 2 is fixedly installed in the middle of the top of the delivery pipe 1, the bottom of the mounting frame seat 2 is connected to the inside of the delivery pipe 1, a mounting mechanism 3 is fixedly installed on the top of the mounting frame seat 2, a cleaning mechanism 6 is inserted into the inner side of the mounting frame seat 2, an air pressure sensor 4 is installed on the inner side of the cleaning mechanism 6 by bolts, a dustproof mesh cover 5 is fixedly connected to the detection end port of the air pressure sensor 4, and the cleaning end of the cleaning mechanism 6 is fitted and connected to the surface of the dustproof mesh cover 5 of the air pressure sensor 4;

[0019] The cleaning mechanism 6 includes a filling plate 61, which is inserted into the inner side of the mounting frame 2, and the filling plate 61 and the mounting mechanism 3 are mutually clamped, and driving components 62 are fixedly installed on both sides of the bottom of the filling plate 61, and a cleaning component 63 is movably installed in the middle of the bottom of the filling plate 61, and the cleaning component 63 and the driving component 62 are movably connected. The cleaning end of the cleaning component 63 is fitted and connected with the bottom of the dustproof mesh cover 5, and the air pressure sensor 4 is installed in the middle of the filling plate 61 by bolts. The connection design of the delivery pipe 1 and the mounting frame 2 is reasonable, and the bottom of the mounting frame 2 is connected to the inside of the delivery pipe 1, which provides a direct gas source channel for pressure detection, ensuring the accuracy and timeliness of the detection. The setting of the mounting mechanism 3 facilitates the assembly and maintenance of the entire device, especially for the installation and disassembly of the air pressure sensor 4. The cleaning mechanism 6 is designed with originality, and the clamping mode of the filling plate 61 and the mounting mechanism 3 makes the fixing of the cleaning mechanism 6 in the mounting frame 2 stable and easy to operate. The cooperation of the driving component 62 and the cleaning component 63 can realize the automatic fitting and cleaning of the surface of the dustproof mesh cover 5 of the air pressure sensor 4, and effectively prevent the accumulation of dust and other impurities on the surface of the mesh cover, thereby keeping the detection end of the air pressure sensor 4 clean and ensuring the long-term stability of the detection accuracy. The setting of the dustproof mesh cover 5 further blocks dust and particulate impurities from entering the interior of the air pressure sensor 4, and plays a good protective role in its internal components, thereby improving the reliability and service life of the device as a whole, so that it has significant advantages in the field of atomized gas pressure detection, and can better meet the needs of high-precision detection and long-term stable operation.

[0020] Please refer to Figure 1-Figure 5 , electromagnetic valves 7 are fixedly installed at both ends of the delivery pipe 1, the inner side of the electromagnetic valve 7 is connected to the two ends of the delivery pipe 1, and a connecting flange 8 is fixedly installed on the outer end of the electromagnetic valve 7. Mounting holes 9 are opened at equal intervals on the outer side of the connecting flange 8, and the mounting holes 9 are set as countersunk holes. Electromagnetic valves 7 are fixedly installed at both ends of the delivery pipe 1, and the inner side of the electromagnetic valve 7 is connected to the two ends of the delivery pipe 1 to realize the control of the on-off of the gas in the delivery pipe 1. When the device needs to be maintained or related operations are required, the gas flow can be cut off by closing the electromagnetic valve 7, which provides safety protection for subsequent operations such as cleaning and maintenance of the air pressure sensor 4, and prevents gas The leakage of the solenoid valve affects the operation and the surrounding environment. The connecting flange 8 at the outer end of the solenoid valve 7 and the countersunk holes at equal intervals on the outside are convenient for connection with external pipelines or other equipment. The design of the countersunk holes allows the heads of the connecting bolts to sink into the holes, making the connection surface smoother and reducing the interference that external protrusions may cause to equipment operation and personnel operation. At the same time, the stability and sealing of the connection are improved, ensuring the stability and safety of the gas during the transportation process, which is conducive to the integration and coordinated work of the entire atomizing gas pressure control device with other systems, and ensuring the smooth progress of the entire gas transportation and pressure control process.

[0021] Please refer to Figure 1-Figure 5The mounting mechanism 3 includes a side rail 31 and a limiting groove 32. The side rail 31 is fixedly mounted on both sides of the mounting frame seat 2. Elastic limiting groups 33 are fixedly mounted on both ends of the side rail 31. The limiting groove 32 is opened at the middle of the upper ends of both sides of the mounting frame seat 2. The two sides of the filling plate 61 are also provided with limiting grooves 32. The ends of the elastic limiting group 33 pass through the limiting groove 32 on the mounting frame seat 2 and are inserted into the limiting groove 32 of the filling plate 61. The elastic limiting group 33 includes a limiting spring 331, and the limiting spring 331 is fixedly mounted on the side rail 31. The inner ends of the limit spring 331 are fixedly installed with a slider 332, the top of the slider 332 is fixedly installed with a clamping frame 333, the inner middle part of the clamping frame 333 is fixedly connected to a limit block 334, the end of the limit block 334 passes through the limit groove 32 on the mounting frame seat 2 and is inserted into the inner side of the limit groove 32 of the filling plate 61, and the top of the clamping frame 333 is fixedly installed with a push plate 335, the upper end of the push plate 335 is set to be arc-shaped, and the side shape of the slider 332 and the overall cross-sectional shape of the internal cavity of the side rail 31 are both set to be The side rails 31 are fixed on both sides of the mounting frame 2 to provide installation space and support for the internal components. The limit springs 331 in the elastic limit group 33 can provide elastic force. When the limit block 334 is inserted into the limit groove 32 of the filling plate 61, the filling plate 61 can be stably fixed. At the same time, when disassembly is required, the push plate 335 is pushed to drive the clamping frame 333 and the slider 332 to move, so that the limit block 334 is separated from the limit groove 32, so as to realize convenient disassembly. The convex structure design of the slider 332 and the side rails 31 ensures The slider 332 slides stably in the side rail 31 and will not fall off, thereby improving the stability and reliability of the movement. The limit groove 32 is accurately opened and cooperates with the elastic limit group 33 to ensure the accurate installation and positioning of the filling plate 61 on the mounting frame seat 2. The arc-shaped design of the upper end of the push plate 335 facilitates the application of force during operation, making the disassembly and installation process smoother. The overall structural design is reasonable, and the various components cooperate with each other to achieve rapid installation and disassembly of the filling plate 61, as well as stable fixation, thereby improving the maintainability and use efficiency of the device.

[0022] Please refer to Figure 4-Figure 8The driving assembly 62 includes a rotating disk 621, which is rotatably connected to both sides of the bottom of the filling plate 61. An eccentric shaft 622 is fixedly installed at the bottom of the rotating disk 621. The outer surface of the eccentric shaft 622 is rotatably connected to a linkage rod 623. The end of the linkage rod 623 is movably connected to the cleaning assembly 63. The bottom of the eccentric shaft 622 is fixedly connected to a wind wheel 624. The cleaning assembly 63 includes an arc guide rail 631, which is fixedly installed at the bottom of the filling plate 61. The inner side of the arc guide rail 631 is slidably connected to a guide rail. The guide block 632 is rotatably connected to the bottom of the guide block 632 with an articulated wheel 633, the outer side of the articulated wheel 633 is fixedly connected to the inner end of the linkage rod 623, the arc guide rail 631 and the detection end of the air pressure sensor 4 and the dustproof net cover 5 are arranged in concentric circles, the inner side of the guide block 632 is fixedly connected to a brush plate 634, the top of the brush plate 634 and the bottom of the dustproof net cover 5 are fitted and connected, the turntable 621 in the driving component 62 cooperates with the eccentric shaft 622, and the eccentric shaft 622 rotates to drive the linkage rod 623 to move, so as to clean the component 63 A power source is provided, and the wind wheel 624 is connected to the bottom of the eccentric shaft 622. The flow of atomized gas can be used to drive the wind wheel 624 to rotate, thereby realizing energy conversion without an additional power source. The wind wheel 624 is set in a twisted shape, which can stably drive the wind wheel 624 to rotate when squeezed by the high-speed atomized gas. The sliding connection design between the arc guide rail 631 and the guide block 632 in the cleaning component 63 is reasonable. The guide block 632 is connected to the linkage rod 623 through the hinged wheel 633, and can slide accurately in the arc guide rail 631. The arc guide rail 631 is arranged in a concentric circle with the detection end of the air pressure sensor 4 and the dustproof mesh cover 5, ensuring that the guide block 632 drives the brush plate 634 to move evenly around the bottom of the dustproof mesh cover 5 to achieve comprehensive cleaning. The brush plate 634 is tightly connected to the bottom of the dustproof mesh cover 5, which can effectively clean the impurities on the dustproof mesh cover 5. The overall structure cooperates with each other to make the cleaning work efficient, stable and comprehensive, thereby ensuring the cleanliness of the detection end of the air pressure sensor 4, maintaining its detection accuracy, improving the reliability and stability of the device, and facilitating the accurate detection of the atomized gas pressure.

[0023] Please refer to Figure 5-Figure 8The side shape of the guide block 632 is set to be L-shaped, the internal cross-sectional shape of the arc guide rail 631 is also set to be L-shaped, the outer surfaces of the slider 332 and the guide block 632 are fixedly connected with wear-resistant gaskets, the top of the filling plate 61 is fixedly installed with a sealing cover 64, the sealing cover 64 covers the outer surface of the mounting frame seat 2, the outer end of the air pressure sensor 4 passes through the sealing cover 64 and is fixedly connected with the power connection wire 10, the side of the guide block 632 and the internal cross-sectional shape of the arc guide rail 631 are both L This shape design allows the guide block 632 to slide stably in the arc guide rail 631 and is not easy to get off the track, ensuring the reliability of the operation of the cleaning component 63. The wear-resistant gaskets on the outer surfaces of the slider 332 and the guide block 632 can reduce the friction loss between the components, extend their service life, and reduce maintenance costs. The sealing sleeve cover 64 on the top of the filling plate 61 covers the outer surface of the mounting frame seat 2, plays a good sealing role, prevents dust, impurities, etc. from entering the interior of the device, protects the internal structure, and provides a relatively stable working environment for the air pressure sensor 4. The power connection wire 10 at the outer end of the air pressure sensor 4 passes through the sealing sleeve cover 64, which not only ensures the normal power supply of the sensor, but also does not affect the sealing effect of the sealing sleeve cover 64. The overall structural design is reasonable, and the various components work together to improve the comprehensive performance and stability of the device, which is conducive to the accurate and reliable detection of the atomized gas pressure.

[0024] The implementation principle of a high-precision pressure detection device for atomizing gas pressure control in the embodiment of the present application is as follows: during the actual use of the device, when the air pressure sensor 4 needs to be cleaned and repaired, the solenoid valves 7 at both ends can be operated to close first; at this time, the solenoid valves 7 will play a key role, accurately closing the two ends of the delivery pipe 1, and by performing a strict sealing treatment on the two ends of the delivery pipe 1, a safe and reliable environment is provided for subsequent operations; this sealing measure is very important, and it can effectively prevent gas leakage that may occur during the disassembly and assembly of the air pressure sensor 4, ensure the safety of the operation process and the stability of the surrounding environment, and avoid various potential risks and adverse effects that may be caused by gas leakage; In the specific disassembly and assembly operation, its design embodies the concept of simplicity and efficiency; by adjusting the push plate 335, the clamping frame 333 can be driven to move outward; as the clamping frame 333 moves outward, the slider 332 will be pushed to slide toward both sides; in the process of the slider 332 sliding toward the outside, the limit spring 331 will be squeezed, so that the limit spring 331 is quickly in a compressed state; at the same time, the limit block 334 can also be smoothly separated from the limit groove 32; when the limit block 334 is completely separated from the limit groove 32 on the filling plate 61, the filling plate 61 and the entire cleaning mechanism 6 can be easily removed from the inside of the mounting frame 2; this operation method is simple and clear, easy to execute, and greatly reduces the difficulty and complexity of disassembly and assembly; The installation process is also convenient and efficient. You only need to accurately insert the filling plate 61 into the inner side of the mounting frame 2. At this time, the natural reset characteristics of the limit spring 331 will effectively drive the slider 332 to move inward. As the slider 332 moves inward, the limit block 334 on the clamping frame 333 will be driven to accurately penetrate the limit groove 32 of the mounting frame 2 and be firmly inserted into the inner side of the limit groove 32 of the filling plate 61. Through the close mutual clamping action between the limit block 334 and the limit groove 32, the air pressure sensor 4 can be extremely stably clamped and installed to ensure that it can be installed in the subsequent Firmness and stability during work; after the air pressure sensor 4 is snap-fitted and installed, it can be further covered on the top of the mounting frame 2 by the sealing cover 64; in this way, the device as a whole can have excellent sealing performance, which not only greatly facilitates the rapid disassembly and assembly of the air pressure sensor 4 during actual use, and meets the high efficiency requirements of equipment maintenance, but also provides a stable and reliable working environment for the air pressure sensor 4 with its good sealing performance, effectively guarantees the overall operation effect and service life of the device, and brings great convenience and practical value to users; During the use of the device, the design of the cleaning mechanism 6 demonstrates its unique innovation and powerful functionality; when the air pressure sensor 4 is installed, the solenoid valve 7 can be opened, and at this time, the delivery pipe 1 on the solenoid valve 7 begins to circulate atomized gas; the atomized gas circulates at a high speed inside the delivery pipe 1, and this high-speed flowing atomized gas contains huge energy; then, the high-speed flowing atomized gas can drive the wind wheel 624 to rotate, and the wind wheel 624 rotates stably in the middle of the delivery pipe 1, providing initial power for a series of subsequent mechanical movements; As the wind wheel 624 rotates, the eccentric shaft 622 is driven to rotate together; the rotation of the eccentric shaft 622 further drives the rotating disk 621 and the linkage rod 623 to swing regularly; during the swinging process of the linkage rod 623, the outer end of the linkage rod 623 and the hinge wheel 633 of the guide block 632 are cleverly connected to each other in rotation, and the linkage rod 623 and the guide block 632 are closely matched in an articulated manner; at this time, with the help of the rotating swinging effect of the eccentric shaft 622, the linkage rod 623 can be driven to reciprocate and push the guide block 632 to slide on the inner side of the arc guide rail 631; it is worth noting that the arc guide rail 631 is arranged in a circular shape. This unique design enables the guide block 632 to achieve precise reciprocating swinging along the arc shape under the linkage effect of the linkage rod 623; When the guide block 632 performs reciprocating guiding and swinging along the circular direction inside the arc-shaped guide rail 631, it will drive the brush plate 634 to closely fit the bottom of the dustproof mesh cover 5 for brushing; this brushing action can perform a comprehensive and detailed brushing and cleaning of the bottom of the dustproof mesh cover 5; the setting of the dustproof mesh cover 5 is of great significance, as it can effectively filter, screen and block dust, and prevent dust or particulate impurities in the atomized gas from entering the detection end of the air pressure sensor 4, thereby causing adverse effects on its internal detection elements; through such a design, the detection accuracy of the air pressure sensor 4 can be always maintained, ensuring its long-term use The performance is stable and reliable; and, in the entire detection process, the high-speed circulating atomized gas is cleverly used to drive the wind wheel 624 to rotate, thereby prompting the driving component 62 to drive the cleaning component 63 to automatically clean the bottom of the dustproof mesh cover 5; this design enables the device as a whole to have a strong cleaning function, and can effectively maintain the bottom detection accuracy of the air pressure sensor 4 for a long time, greatly reducing the detection error and equipment failure caused by impurity contamination, providing a strong guarantee for the stable operation and accurate detection of the equipment, fully reflecting its high practicality and advancement in practical applications, and facilitating the long-term use of the device in various complex environments.

[0025] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A pressure detection device for high-precision atomizing gas pressure control, characterized in that; It comprises a delivery pipe (1), a mounting frame seat (2) is fixedly installed in the middle of the top of the delivery pipe (1), the bottom of the mounting frame seat (2) is connected to the inside of the delivery pipe (1), a mounting mechanism (3) is fixedly installed on the top of the mounting frame seat (2), a cleaning mechanism (6) is inserted into the inner side of the mounting frame seat (2), an air pressure sensor (4) is installed on the inner side of the cleaning mechanism (6) by bolts, a dustproof screen cover (5) is fixedly connected to the detection end port of the air pressure sensor (4), and the cleaning end of the cleaning mechanism (6) and the surface of the dustproof screen cover (5) of the air pressure sensor (4) are fitted and connected; The cleaning mechanism (6) comprises a filling plate (61), the filling plate (61) being inserted into the inner side of the mounting frame seat (2), the filling plate (61) and the mounting mechanism (3) being mutually engaged, a driving assembly (62) being fixedly mounted on both sides of the bottom of the filling plate (61), a cleaning assembly (63) being movably mounted in the middle of the bottom of the filling plate (61), the cleaning assembly (63) and the driving assembly (62) being movably connected, a cleaning end of the cleaning assembly (63) being fitted and connected to the bottom of the dustproof mesh cover (5), and the air pressure sensor (4) being mounted on the middle of the filling plate (61) by means of bolts.

2. A high-precision pressure detection device for atomizing gas pressure control according to claim 1, characterized in that: Solenoid valves (7) are fixedly mounted on both ends of the delivery pipe (1), and the inner side of the solenoid valve (7) is connected to both ends of the delivery pipe (1).

3. A high-precision pressure detection device for atomizing gas pressure control according to claim 2, characterized in that: A connecting flange (8) is fixedly mounted on the outer end of the solenoid valve (7), and mounting holes (9) are provided at equal intervals on the outer side of the connecting flange (8), wherein the mounting holes (9) are configured as countersunk holes.

4. A high-precision pressure detection device for atomizing gas pressure control according to claim 1, characterized in that: The mounting mechanism (3) comprises side rails (31) and limiting grooves (32); the side rails (31) are fixedly mounted on both sides of the mounting frame seat (2); elastic limiting groups (33) are fixedly mounted on both ends of the side rails (31); the limiting grooves (32) are arranged in the middle of the upper ends of both sides of the mounting frame seat (2); limiting grooves (32) are also arranged on both sides of the filling plate (61); and the ends of the elastic limiting groups (33) penetrate the limiting grooves (32) on the mounting frame seat (2) and are inserted into the limiting grooves (32) of the filling plate (61).

5. A high-precision pressure detection device for atomizing gas pressure control according to claim 4, characterized in that: The elastic limiting group (33) comprises a limiting spring (331), the limiting spring (331) being fixedly mounted at both ends of the inside of the side rail (31), a slider (332) being fixedly mounted at the outer end of the limiting spring (331), a clamping frame (333) being fixedly mounted on the top of the slider (332), a limiting block (334) being fixedly connected to the inner middle portion of the clamping frame (333), and an end of the limiting block (334) passing through the limiting groove (32) on the mounting frame seat (2) and inserted into the inner side of the limiting groove (32) of the filling plate (61).

6. A high-precision pressure detection device for atomizing gas pressure control according to claim 5, characterized in that: A push plate (335) is fixedly mounted on the top of the clamping frame (333), the upper end of the push plate (335) is arranged in an arc shape, and the side shape of the slider (332) and the overall cross-sectional shape of the internal cavity of the side rail (31) are both arranged in a convex shape.

7. A high-precision pressure detection device for atomizing gas pressure control according to claim 5, characterized in that: The driving assembly (62) comprises a rotating disk (621), the rotating disk (621) being rotatably connected to two sides of the bottom of the filling plate (61), an eccentric shaft (622) being fixedly mounted on the bottom of the rotating disk (621), a linkage rod (623) being rotatably connected to the outer surface of the eccentric shaft (622), an end of the linkage rod (623) being movably connected to the cleaning assembly (63), and a wind wheel (624) being fixedly connected to the bottom of the eccentric shaft (622).

8. A high-precision pressure detection device for atomizing gas pressure control according to claim 7, characterized in that: The cleaning assembly (63) comprises an arc-shaped guide rail (631), wherein the arc-shaped guide rail (631) is fixedly mounted on the bottom of the filling plate (61), the inner side of the arc-shaped guide rail (631) is slidably connected to a guide block (632), the bottom of the guide block (632) is rotatably connected to an articulated wheel (633), the outer side of the articulated wheel (633) is fixedly connected to the inner end of the linkage rod (623), the arc-shaped guide rail (631) and the detection end of the air pressure sensor (4) and the dustproof net cover (5) are arranged in concentric circles, the inner side of the guide block (632) is fixedly connected to a brush plate (634), and the top of the brush plate (634) is fittedly connected to the bottom of the dustproof net cover (5).

9. A high-precision pressure detection device for atomizing gas pressure control according to claim 8, characterized in that: The side shape of the guide block (632) is set to be L-shaped, the internal cross-sectional shape of the arc-shaped guide rail (631) is also set to be L-shaped, and the outer surfaces of the sliding block (332) and the guide block (632) are fixedly connected with wear-resistant gaskets.

10. A high-precision pressure detection device for atomizing gas pressure control according to claim 5, characterized in that: A sealing sleeve (64) is fixedly mounted on the top of the filling plate (61), the sealing sleeve (64) covers the outer surface of the mounting frame (2), and the outer end of the air pressure sensor (4) passes through the sealing sleeve (64) and is fixedly connected to an electrical lead (10).

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