Cable-free moving coil type magnetic suspension planar motor for photoetching machine workpiece table

Abstract

The invention relates to a cable-free moving coil type magnetic suspension planar motor for a photoetching machine workpiece table, and aims to solve the problem that the movement performance of a magnetic suspension movement table is affected due to the fact that a cable needs to supply power in the movement process of a rotor coil of the photoetching machine workpiece table, the cable-free moving coil type magnetic suspension planar motor comprises a stator structure and a rotor structure, and the rotor structure is located on the upper portion of the stator structure. The stator structure comprises a plurality of stator units, the plurality of stator units are arranged in a 2 * 2 matrix, and the N-pole assembly and the S-pole assembly of each stator unit are arranged in a staggered manner; the mover structure comprises a plurality of mover units which are arranged in a 2 * 2 matrix. Through the Halbach array stator with the wireless electric energy transmission transmitting end coil and the mover winding with the wireless electric energy transmission receiving end coil, low-current fluctuation power supply of the mover winding can be realized, cable-free long-stroke operation of the moving coil type magnetic suspension planar motor is ensured, and the motion performance of the workpiece table for the photoetching machine is further improved. The invention belongs to the technical field of photoetching equipment.

Description

Technical Field

[0001] The invention relates to a cable-free moving coil type magnetic suspension planar motor for a workpiece stage of a photolithography machine, and belongs to the technical field of photolithography equipment. Background Art

[0002] The workpiece stage is one of the six core components of the lithography machine, providing a vital guarantee for the chip yield rate. At present, the workpiece stage of the most advanced EUV lithography machine of ASML in the Netherlands adopts a moving coil magnetic levitation planar motor solution. However, the moving coil needs to be powered by cables during movement, and the disturbance force caused by the cables affects the motion performance of the magnetic levitation motion stage. On the one hand, the irregular cable gathering force increases the accuracy of the dynamic model of the magnetic levitation planar motor, and on the other hand, the disturbance force increases the difficulty of motion accuracy compensation. Wireless power supply technology uses the principle of magnetic coupling resonance to achieve non-contact transmission of electric energy by constructing transmitting and receiving windings of the same frequency. The introduction of this technology can completely get rid of the constraints of power supply cables. If the moving coil magnetic levitation planar motor and wireless power supply technology are combined, it can provide a possibility for the lithography machine to break through the bottleneck of nano-process. Summary of the invention

[0003] The present invention aims to solve the problem that during the movement of the movable coil of the worktable of the lithography machine, cables are required to supply power, and the disturbance force caused by the cables affects the movement performance of the magnetic levitation motion table. A cable-free moving coil magnetic levitation planar motor for the worktable of the lithography machine is proposed.

[0004] The technical solution adopted by the present invention to solve the above problems is:

[0005] The present invention includes a stator structure and a mover structure, wherein the mover structure is located at the upper part of the stator structure, the stator structure includes a plurality of stator units, the plurality of stator units are arranged in a 2*2 matrix, each stator unit includes a plurality of N-pole components and S-pole components, the N-pole components and the S-pole components are arranged alternately; the mover structure includes a plurality of mover units, the plurality of mover units are arranged in a 2*2 matrix.

[0006] Furthermore, each N-pole component includes an N-pole magnet, a second magnet, a third magnet and a wireless power transmission transmitting end coil, the second magnet is mounted on the N-pole magnet, a third magnet is provided above and on the left side of the second magnet, and a wireless power transmission transmitting end coil is provided on the upper part of each third magnet.

[0007] Furthermore, each S-pole component includes an S-pole magnet, a second magnet, a third magnet and a wireless power transmission transmitting end coil, the second magnet is mounted on the S-pole magnet, a third magnet is provided above and on the left side of the second magnet, and a wireless power transmission transmitting end coil is provided on the upper part of each third magnet.

[0008] Furthermore, the second magnet includes four magnets, which are respectively located on the upper, lower, left and right sides of the N-pole magnet or the S-pole magnet, and the magnetic field direction of the second magnet is obliquely upward or obliquely downward.

[0009] Furthermore, each of the mover units includes a magnetic levitation planar motor mover winding and a plurality of wireless power transmission receiving end coils, and the plurality of wireless power transmission receiving end coils are arranged above and on the left side of the magnetic levitation planar motor mover winding.

[0010] Furthermore, the number of the wireless power transmission receiving end coils is four, and two wireless power transmission receiving end coils are respectively arranged above and on the left side of each magnetic levitation planar motor rotor winding.

[0011] Furthermore, the N-pole magnet and the second magnet have the same height, and the third magnet has a lower height than the N-pole magnet and the second magnet.

[0012] Furthermore, the S-pole magnet and the second magnet have the same height, and the third magnet has a lower height than the S-pole magnet and the second magnet.

[0013] The beneficial effects of the present invention are:

[0014] 1. The present invention utilizes the proposed Halbach array stator with a wireless power transmission transmitting end coil and the mover winding with a wireless power transmission receiving end coil to realize low current fluctuation power supply of the mover winding, ensure the cable-free long-stroke operation of the moving coil magnetic levitation planar motor, and thus improve the motion performance of the workpiece stage for the lithography machine.

[0015] 2. The present invention combines a moving coil magnetic levitation planar motor with wireless power supply technology, so that the workpiece table can achieve cable-free long-stroke motion, with the advantages of high motion accuracy and high speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0017] Figure 2 yes Figure 1 Side view of

[0018] Figure 3 is a schematic diagram of the structure of the stator unit;

[0019] Figure 4 yes Figure 3 Side view of

[0020] Figure 5 Schematic diagram of the structure of the mover unit;

[0021] Figure 6 This is the magnetic field condition when there is no transmitting coil placed on the Halbach array.

[0022] Figure 7 The invention proposes a novel Halbach array combined with a transmitting coil structure;

[0023] Figure 8 The mutual inductance between the transmitting end coil and the receiving end coil of the present invention can reflect the final receiving end load current fluctuation, and the mutual inductance fluctuation simulation result diagram.

[0024] In the figure, 1, motor stator structure; 1-1, N-pole magnet; 1-2, second magnet; 1-3, third magnet; 1-4, wireless power transmission transmitting end coil; 1-5, S-pole magnet;

[0025] 2. Motor rotor structure; 2-1. Magnetic levitation planar motor rotor winding; 2-2 Wireless power transmission receiving end coil. DETAILED DESCRIPTION

[0026] The present embodiment describes a cable-free moving coil magnetic levitation planar motor for a workpiece stage of a lithography machine. Figure 1 and Figure 2 As shown, this embodiment includes a stator structure 1 and a mover structure 2, wherein the mover structure 2 is located on the upper part of the stator structure 1.

[0027] like Figure 3 As shown, the stator structure 1 includes a plurality of stator units, and the plurality of stator units are arranged in a 2*2 matrix. Each stator unit includes a plurality of N-pole components and S-pole components, and the plurality of stator units are arranged in a 2*2 matrix.

[0028] Each N-pole component includes an N-pole magnet 1-1, a second magnet 1-2, a third magnet 1-3 and a wireless power transmission transmitting end coil 1-4. The second magnet 1-2 is mounted on the N-pole magnet 1-1. A third magnet 1-3 is provided above and on the left side of the second magnet 1-2. A wireless power transmission transmitting end coil 1-4 is provided on the upper part of each third magnet 1-3.

[0029] Each S-pole component includes an S-pole magnet 1-5, a second magnet 1-2, a third magnet 1-3 and a wireless power transmission transmitting end coil 1-4. The second magnet 1-2 is mounted on the S-pole magnet 1-5. A third magnet 1-3 is provided above and on the left side of the second magnet 1-2. A wireless power transmission transmitting end coil 1-4 is provided on the upper part of each third magnet 1-3.

[0030] The N-pole magnet 1-1 and the S-pole magnet 1-5 are each a magnet, and are the main components for forming a magnetic field.

[0031] like Figure 4As shown, the N-pole magnet 1-1 and the S-pole magnet 1-5 are in a trapezoidal structure, and a second magnet 1-2 is arranged on the periphery thereof. The second magnet 1-2 includes four magnets, which are respectively located on the upper, lower, left and right sides of the N-pole magnet 1-1 or the S-pole magnet 1-5, and the shape thereof is a triangle; the second magnet 1-2 surrounds the main magnet (i.e., the N / S-pole magnet), and the direction of the magnetic field is upward or obliquely downward. In order to improve the sinusoidality of the Halbach magnetic field distribution, the second magnet 1-2 can also increase the magnetic field strength;

[0032] In order to enhance the Halbach magnetic field, the magnetic field direction of the third magnet 1-3 is horizontal, and the height of the third magnet is lower than the N-pole magnet 1-1, the second magnet 1-2 and the S-pole magnet 1-5. The purpose is to arrange the high-frequency transmitting coil 1-4 required for wireless power transmission on the third magnet 1-3, and leave a sufficient distance between the transmitting coil and the magnet to avoid the eddy current effect caused by the wireless power transmission transmitting coil 1-4 being too close to the magnet, and at the same time will not affect the distribution of the magnetic field.

[0033] The simulation results of stator magnetic field distribution are as follows: Figure 6 and Figure 7 As shown, Figure 6 This is the magnetic field condition when there is no transmitting coil placed on the Halbach array. Figure 7 The new Halbach array proposed in this patent is combined with a transmitting coil. From the simulation results, it can be seen that the placement of the transmitting coil has very little effect on the magnetic field distribution.

[0034] like Figure 5 As shown, the mover structure 2 includes a plurality of mover units, and the plurality of mover units are arranged in a 2*2 matrix, and each mover unit includes a magnetic levitation planar motor mover winding 2-1 and a plurality of wireless power transmission receiving end coils 2-2, and the plurality of wireless power transmission receiving end coils 2-2 are arranged above and on the left side of the magnetic levitation planar motor mover winding 2-1. The function of the motor mover winding 2-1 is the same as that of the traditional magnetic levitation planar motor, but in order to realize power supply without using any cables, it is necessary to add a wireless power transmission receiving end coil 2-2.

[0035] Preferably, the number of the wireless power transmission receiving end coils 2-2 is four, and two wireless power transmission receiving end coils 2-2 are respectively arranged above and on the left side of each magnetic levitation planar motor rotor winding 2-1. Figure 5 The purpose of the coil distribution shown is to reduce the wireless power supply current fluctuation caused by mutual inductance fluctuation during movement. Distributing the four coils around the mover winding 2-1 can provide a stable current during the mover movement.

[0036] Formula (1) is the voltage expression of the wireless power transmission receiving end, U0 is the receiving end voltage, w sis the frequency of the transmitting current, M0 is the mutual inductance, I p is the current size of the transmitting end. It can be seen that the mutual inductance between the transmitting end coil and the receiving end coil can reflect the final receiving end load current fluctuation. The mutual inductance fluctuation simulation results are as follows: Figure 8 shown.

[0037]

[0038] When in use, the receiving end coil 2-2 on the mover is aligned with the lower end of the mover winding 2-1, and the receiving end coil 2-2 is as close to the transmitting end coil 1-4 as possible, which can improve the mutual inductance value and thus improve the efficiency of power transmission.

[0039] The present invention adds a wireless power transmission transmitting end coil 1-4 on the stator side, and adds a wireless power transmission receiving end coil 2-2 on the mover side. The receiving end coil receives electric energy and provides current for the mover coil. Since the stator of the magnetic levitation planar motor is a Halbach array, there is a strong magnetic field. When the high-frequency transmitting end coil is placed on the Halbach stator array, an eddy current effect will be generated. In order to avoid the eddy current effect causing the transmitting coil to heat up and affect the magnetic field distribution of the Halbach array, a new Halbach array is designed to reduce the interaction between the high-frequency transmitting end coil and the Halbach magnetic field, which is suitable for cable-free moving coil magnetic levitation planar motors. In addition, the mover winding 2-1 and the receiving end coil 2-2 are distributed and arranged. In order to ensure that the current ripple of the wireless power transmission is small, the receiving end coil 2-2 is used to surround the mover winding 2-1. Finally, the magnetic levitation planar motor stator and the mover realize cable-free long-stroke motion through wireless power transmission.

[0040] The above is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this profession can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent replacement and improvement made to the above embodiments without departing from the content of the technical solution of the present invention, based on the technical essence of the present invention, within the spirit and principles of the present invention, still fall within the protection scope of the technical solution of the present invention.

Claims

1. A cable-free moving coil magnetic levitation planar motor for a workpiece stage of a photolithography machine, characterized in that: A cable-free moving coil type magnetic levitation planar motor for a workpiece stage of a photolithography machine comprises a stator structure (1) and a mover structure (2), wherein the mover structure (2) is located on the upper part of the stator structure (1), the stator structure (1) comprises a plurality of stator units, the plurality of stator units are arranged in a 2*2 matrix, each stator unit comprises a plurality of N-pole components and S-pole components, the N-pole components and the S-pole components are arranged in an alternating manner; the mover structure (2) comprises a plurality of mover units, the plurality of mover units are arranged in a 2*2 matrix.

2. The cable-free moving coil magnetic levitation planar motor for a workpiece stage of a photolithography machine according to claim 1, characterized in that: Each N-pole component comprises an N-pole magnet (1-1), a second magnet (1-2), a third magnet (1-3) and a wireless power transmission transmitting end coil (1-4); the second magnet (1-2) is mounted on the N-pole magnet (1-1); a third magnet (1-3) is respectively arranged above and on the left side of the second magnet (1-2); and a wireless power transmission transmitting end coil (1-4) is arranged on the upper part of each third magnet (1-3).

3. The cable-free moving coil magnetic levitation planar motor for a workpiece stage of a photolithography machine according to claim 1, characterized in that: Each S-pole component comprises an S-pole magnet (1-5), a second magnet (1-2), a third magnet (1-3) and a wireless power transmission transmitting end coil (1-4); the second magnet (1-2) is mounted on the S-pole magnet (1-5); a third magnet (1-3) is respectively arranged above and on the left side of the second magnet (1-2); and a wireless power transmission transmitting end coil (1-4) is arranged on the upper part of each third magnet (1-3).

4. A cable-free moving coil magnetic levitation planar motor for a workpiece stage of a photolithography machine according to claim 2 or 3, characterized in that: The second magnet (1-2) comprises four magnets, which are respectively located on the upper, lower, left and right sides of the N-pole magnet (1-1) or the S-pole magnet (1-5), and the magnetic field direction of the second magnet (1-2) is obliquely upward or obliquely downward.

5. The cable-free moving coil magnetic levitation planar motor for a workpiece stage of a photolithography machine according to claim 1, characterized in that: Each mover unit comprises a magnetic levitation planar motor mover winding (2-1) and a plurality of wireless power transmission receiving end coils (2-2), wherein the plurality of wireless power transmission receiving end coils (2-2) are arranged above and on the left side of the magnetic levitation planar motor mover winding (2-1).

6. The cable-free moving coil magnetic levitation planar motor for a workpiece stage of a photolithography machine according to claim 5, characterized in that: The number of the wireless power transmission receiving end coils (2-2) is four, and two wireless power transmission receiving end coils (2-2) are respectively arranged above and on the left side of each magnetic suspension planar motor rotor winding (2-1).

7. The cable-free moving coil magnetic levitation planar motor for a workpiece stage of a photolithography machine according to claim 2, characterized in that: The N-pole magnet (1-1) and the second magnet (1-2) have the same height, and the third magnet (1-3) has a lower height than the N-pole magnet (1-1) and the second magnet (1-2).

8. The cable-free moving coil magnetic levitation planar motor for a workpiece stage of a photolithography machine according to claim 3, characterized in that: The S-pole magnet (1-5) and the second magnet (1-2) have the same height, and the third magnet (1-3) has a lower height than the S-pole magnet (1-5) and the second magnet (1-2).

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