A cableless moving coil magnetic levitation planar motor for a lithography machine wafer stage

Abstract

A kind of wireless coil type magnetic suspension planar motor for photolithography worktable, in order to solve the problem that the moving coil of photolithography worktable needs cable power supply during movement, affects the motion performance of magnetic suspension motion table, the present application includes stator structure and rotor structure, the rotor structure is located in the upper portion of stator structure, the stator structure includes multiple stator units, multiple stator units are arranged in 2*2 matrix, the N pole assembly and S pole assembly of each stator unit are staggered;The rotor structure includes multiple rotor units, and multiple rotor units are arranged in 2*2 matrix.The present application can realize low current fluctuation power supply of rotor winding by Halbach array stator with wireless power transmission transmitting end coil and rotor winding with wireless power transmission receiving end coil, ensure long stroke operation of coil type magnetic suspension planar motor without cable, and further improve the motion performance of photolithography worktable.The present application belongs to the technical field of photolithography equipment.

Description

TECHNICAL FIELD

[0001] The application relates to a cable-free moving-coil magnetic suspension planar motor for a worktable of a photoetching machine and belongs to the technical field of photoetching equipment. BACKGROUND

[0002] The worktable is one of six core components of a photoetching machine and provides vital guarantee for the yield of chips. At present, the worktable of the most advanced EUV photoetching machine of ASML in the Netherlands adopts a moving-coil magnetic suspension planar motor scheme. However, the moving coil needs to be powered by a cable during movement, and the disturbance force caused by the cable affects the movement performance of the magnetic suspension moving table. On the one hand, the irregular cable disturbance force increases the accuracy of the dynamic model of the magnetic suspension planar motor, and on the other hand, the disturbance force increases the difficulty of movement precision compensation. The wireless power supply technology uses the magnetic coupling resonance principle to realize non-contact transmission of electric energy by constructing the same frequency of transmitting and receiving windings. If the moving-coil magnetic suspension planar motor is combined with the wireless power supply technology, it is possible to break through the nanometer process bottleneck of the photoetching machine. SUMMARY

[0003] The application is to solve the problem that the moving coil needs to be powered by a cable during movement of the worktable of the photoetching machine, and the disturbance force caused by the cable affects the movement performance of the magnetic suspension moving table.

[0004] The technical scheme adopted by the application to solve the above problem is:

[0005] The application comprises a stator structure and a moving structure, the moving structure is located on the upper part of the stator structure, the stator structure comprises a plurality of stator units, the plurality of stator units are arranged in a 2*2 matrix, each stator unit comprises a plurality of N-pole assemblies and S-pole assemblies, the N-pole assemblies and the S-pole assemblies are arranged alternately, and the moving structure comprises a plurality of moving units, the plurality of moving units are arranged in a 2*2 matrix.

[0006] Further, each N-pole assembly comprises an N-pole magnet, a second magnet, a third magnet and a wireless power transmission transmitting end coil, the second magnet is sleeved on the N-pole magnet, one third magnet is arranged above and on the left side of the second magnet, and one wireless power transmission transmitting end coil is arranged on the upper part of each third magnet.

[0007] Further, each S-pole assembly comprises an S-pole magnet, a second magnet, a third magnet and a wireless power transmission transmitting end coil, the second magnet is sleeved on the S-pole magnet, one third magnet is arranged above and on the left side of the second magnet, and one wireless power transmission transmitting end coil is arranged on the upper part of each third magnet.

[0008] Further, the second magnet comprises four magnets, which are respectively located on the upper side, lower side, left side and right side of the N-pole magnet or S-pole magnet, and the magnetic field direction of the second magnet is inclined upward or inclined downward.

[0009] Further, each mover unit comprises a magnetic suspension planar motor mover winding and a plurality of wireless power transmission receiving end coils, and the plurality of wireless power transmission receiving end coils are arranged above and on the left side of the magnetic suspension planar motor mover winding.

[0010] Further, the number of the wireless power transmission receiving end coils is four, and two wireless power transmission receiving end coils are arranged above and on the left side of each magnetic suspension planar motor mover winding.

[0011] Further, the height of the N-pole magnet and the second magnet is the same, and the height of the third magnet is lower than that of the N-pole magnet and the second magnet.

[0012] Further, the height of the S-pole magnet and the second magnet is the same, and the height of the third magnet is lower than that of the S-pole magnet and the second magnet.

[0013] The beneficial effects of the present application are:

[0014] 1. The present application can realize low-current fluctuation power supply of the mover winding, ensure long-distance cable-free operation of the moving coil type magnetic suspension planar motor, and further improve the motion performance of the workpiece table for a lithography machine by using the Halbach array stator with wireless power transmission transmitting end coils and the mover winding with wireless power transmission receiving end coils.

[0015] 2. The present application combines the moving coil type magnetic suspension planar motor and wireless power supply technology, so that the workpiece table can realize long-distance cable-free motion, and has the advantages of high motion precision and high speed. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a schematic diagram of the overall structure of the present application;

[0017] Figure 2 is a side view of Figure 1 ;

[0018] Figure 3 is a schematic diagram of the structure of the stator unit;

[0019] Figure 4 is a side view of Figure 3 ;

[0020] Figure 5 is a schematic diagram of the structure of the mover unit;

[0021] Figure 6 is the magnetic field condition of the Halbach array without placing the transmitting end coil,

[0022] Figure 7 This invention proposes a novel structure combining a Hellbeck array with a transmitting coil.

[0023] Figure 8 The mutual inductance between the transmitting coil and the receiving coil of this invention can reflect the fluctuation of the load current at the final receiving end. The simulation result of the mutual inductance fluctuation is shown in the figure.

[0024] In the diagram, 1 is the stator structure of the motor; 1-1 is the N pole magnet; 1-2 is the second magnet; 1-3 is the third magnet; 1-4 is the wireless power transmission transmitter coil; and 1-5 is the S pole magnet.

[0025] 2. Motor mover structure; 2-1. Magnetic levitation planar motor mover winding; 2-2. Wireless power transmission receiver coil. Detailed Implementation

[0026] This embodiment describes a cableless moving-coil magnetic levitation planar motor for a lithography machine workpiece stage, such as... Figure 1 and Figure 2 As shown, this embodiment includes a stator structure 1 and a mover structure 2, wherein the mover structure 2 is located on top of the stator structure 1.

[0027] like Figure 3 As shown, the stator structure 1 includes multiple stator units arranged in a 2x2 matrix. Each stator unit includes several N-pole components and S-pole components.

[0028] Each N-pole assembly includes an N-pole magnet 1-1, a second magnet 1-2, a third magnet 1-3, and a wireless power transmission transmitter coil 1-4. The second magnet 1-2 is mounted on the N-pole magnet 1-1. A third magnet 1-3 is located above and to the left of the second magnet 1-2. A wireless power transmission transmitter coil 1-4 is located on the upper part of each third magnet 1-3.

[0029] Each S-pole assembly includes an S-pole magnet 1-5, a second magnet 1-2, a third magnet 1-3, and a wireless power transmission transmitter coil 1-4. The second magnet 1-2 is mounted on the S-pole magnet 1-5. A third magnet 1-3 is located above and to the left of the second magnet 1-2. A wireless power transmission transmitter coil 1-4 is located on the upper part of each third magnet 1-3.

[0030] The N-pole magnet 1-1 and the S-pole magnet 1-5 are each a magnet and are the main components that form the magnetic field.

[0031] like Figure 4As shown, the N-pole magnet 1-1 and the S-pole magnet 1-5 are in a trapezoidal structure, and the outer periphery is provided with a second magnet 1-2, which includes four magnets located on the upper, lower, left and right sides of the N-pole magnet 1-1 or the S-pole magnet 1-5, respectively, and has a triangular shape; the second magnet 1-2 surrounds the main magnet (i.e. the N / S pole magnet), and the magnetic field direction is upward or obliquely downward, and the second magnet 1-2 is used to improve the sine degree of the Halbach magnetic field distribution, and at the same time, the magnetic field strength can also be increased;

[0032] In order to enhance the Halbach magnetic field, the third magnet 1-3 has a horizontal magnetic field direction, and the height of the third magnet is lower than that of the N-pole magnet 1-1, the second magnet 1-2 and the S-pole magnet 1-5, and the purpose is to arrange the high-frequency transmitting end coil 1-4 required for wireless power transmission on the upper surface of the third magnet 1-3, and there is sufficient distance between the transmitting end coil and the magnet, which can avoid the eddy current effect caused by the too close distance between the wireless power transmission transmitting end coil 1-4 and the magnet, and at the same time, the distribution of the magnetic field will not be affected.

[0033] The stator magnetic field distribution simulation results are shown in Figure 6 and Figure 7 As shown, Figure 6 is the magnetic field without placing the transmitting end coil on the Halbach array, Figure 7 is the new Halbach array structure combined with the transmitting end coil according to the present application, and from the simulation results, it can be seen that the placement of the transmitting end coil has little effect on the magnetic field distribution.

[0034] As shown in Figure 5 , the mover structure 2 includes a plurality of mover units arranged in a 2*2 matrix, each mover unit includes a magnetic levitation planar motor mover winding 2-1 and a plurality of wireless power transmission receiving end coils 2-2, and the plurality of wireless power transmission receiving end coils 2-2 are arranged above and on the left side of the magnetic levitation planar motor mover winding 2-1. The function of the motor mover winding 2-1 is the same as that of the traditional magnetic levitation planar motor, but in order to realize power supply without using any cable, it is necessary to increase the wireless power transmission receiving end coil 2-2,

[0035] Preferably, the number of wireless power transmission receiving end coils 2-2 is four, and each magnetic levitation planar motor mover winding 2-1 is provided with two wireless power transmission receiving end coils 2-2 above and on the left side. According to Figure 5 the coil distribution is to reduce the wireless power supply current fluctuation caused by mutual inductance fluctuation during movement, and the distribution of the four coils around the mover winding 2-1 can provide stable current during the movement of the mover.

[0036] Formula (1) is the voltage expression of the wireless power transmission receiving end, U0 is the receiving end voltage, w sWhere M0 is the frequency of the transmitting current, I is the mutual inductance, and M0 is the frequency of the transmitting current. p This represents the magnitude of the transmitting current. Therefore, the mutual inductance between the transmitting and receiving coils can reflect the fluctuations in the final receiving load current. The simulation results of the mutual inductance fluctuations are as follows: Figure 8 As shown.

[0037]

[0038] When in use, the receiving coil 2-2 on the mover should be aligned with the lower end of the mover winding 2-1. The receiving coil 2-2 should be as close as possible to the transmitting coil 1-4 to increase the mutual inductance value and thus improve the efficiency of power transmission.

[0039] This invention adds a wireless power transmission transmitting coil 1-4 to the stator side and a wireless power transmission receiving coil 2-2 to the mover side. The receiving coil receives electrical energy and provides current to the mover coil. Since the stator of the magnetic levitation planar motor is a Hellbeck array, it possesses a strong magnetic field. When the high-frequency transmitting coil is placed on the Hellbeck stator array, eddy current effects are generated. To avoid the eddy current effect causing the transmitting coil to heat up and affecting the magnetic field distribution of the Hellbeck array, a novel Hellbeck array is designed to reduce the interaction between the high-frequency transmitting coil and the Hellbeck magnetic field, making it suitable for cableless moving-coil magnetic levitation planar motors. Furthermore, the mover winding 2-1 and the receiving coil 2-2 are arranged in a distributed manner. To ensure low ripple in the wireless power transmission current, the receiving coil 2-2 is arranged around the mover winding 2-1. Ultimately, the magnetic levitation planar motor achieves cableless long-stroke motion between the stator and mover through wireless power transmission.

[0040] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments without departing from the scope of the present invention, based on the technical essence of the present invention and within the spirit and principles of the present invention, shall still fall within the protection scope of the present invention.

Claims

1. A cableless moving-coil magnetic levitation planar motor for a lithography machine workpiece stage, comprising a stator structure (1) and a mover structure (2), wherein the mover structure (2) is located above the stator structure (1), the stator structure (1) comprises multiple stator units arranged in a 2*2 matrix, each stator unit comprising several N-pole components and S-pole components, the N-pole components and S-pole components being alternately arranged; the mover structure (2) comprises multiple mover units arranged in a 2*2 matrix; characterized in that: Each of the N-pole components includes an N-pole magnet (1-1), a second magnet (1-2), a third magnet (1-3), and a wireless power transmission transmitter coil (1-4). The second magnet (1-2) is mounted on the N-pole magnet (1-1). A third magnet (1-3) is located above and to the left of the second magnet (1-2). A wireless power transmission transmitter coil (1-4) is located on the upper part of each third magnet (1-3).

2. The cableless moving-coil magnetic levitation planar motor for a lithography machine workpiece stage according to claim 1, characterized in that: Each of the S-pole components includes an S-pole magnet (1-5), a second magnet (1-2), a third magnet (1-3), and a wireless power transmission transmitter coil (1-4). The second magnet (1-2) is mounted on the S-pole magnet (1-5). A third magnet (1-3) is located above and to the left of the second magnet (1-2). A wireless power transmission transmitter coil (1-4) is located on the upper part of each third magnet (1-3).

3. A cableless moving-coil magnetic levitation planar motor for a lithography machine workpiece stage according to claim 2, characterized in that: The second magnet (1-2) includes four magnets, which are located above, below, left, and right of the N pole magnet (1-1) or the S pole magnet (1-5), respectively. The magnetic field direction of the second magnet (1-2) is obliquely upward or obliquely downward.

4. A cableless moving-coil magnetic levitation planar motor for a lithography machine workpiece stage according to claim 1, characterized in that: Each moving unit includes a magnetic levitation planar motor moving winding (2-1) and multiple wireless power transmission receiving coils (2-2), which are arranged above and to the left of the magnetic levitation planar motor moving winding (2-1).

5. A cableless moving-coil magnetic levitation planar motor for a lithography machine workpiece stage according to claim 4, characterized in that: The number of wireless power transmission receiving coils (2-2) is four, with two wireless power transmission receiving coils (2-2) located above and to the left of each magnetic levitation planar motor rotor winding (2-1).

6. A cableless moving-coil magnetic levitation planar motor for a lithography machine workpiece stage according to claim 1, characterized in that: The N-pole magnet (1-1) and the second magnet (1-2) are at the same height, and the third magnet (1-3) is at a lower height than the N-pole magnet (1-1) and the second magnet (1-2).

7. A cableless moving-coil magnetic levitation planar motor for a lithography machine workpiece stage according to claim 2, characterized in that: The S-pole magnet (1-5) and the second magnet (1-2) are at the same height, and the third magnet (1-3) is at a lower height than the S-pole magnet (1-5) and the second magnet (1-2).

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