Cableless moving iron type magnetic suspension planar motor for photoetching machine workpiece table

Abstract

The invention relates to a cableless moving iron type magnetic suspension planar motor for a workpiece table of a photoetching machine, and aims to solve the problem that a load on a moving iron type magnetic suspension structure mover needs a cable to supply power, so that the motion precision of the workpiece table is influenced, and the cableless moving iron type magnetic suspension planar motor comprises a motor stator unit and a motor mover unit, the motor rotor unit is located on the upper portion of the motor stator unit, a wireless electric energy transmission transmitting end coil is additionally arranged on the stator side, a wireless electric energy transmission receiving end coil is additionally arranged on the rotor side, and the receiving end coil receives electric energy and provides electric energy for a load on a rotor. By utilizing the Halbach array stator with the wireless electric energy transmission transmitting end coil and the rotor winding with the wireless electric energy transmission receiving end coil, the low-current fluctuation power supply of the rotor winding can be realized, the cable-free long-stroke operation of the moving coil type magnetic suspension planar motor is ensured, and the motion performance of the workpiece table for the photoetching machine is further improved. The invention belongs to the technical field of photoetching equipment.

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