Laser scribing method and device with cleaning function

Abstract

The invention discloses a laser scribing method and device with a cleaning function, and the method comprises the steps: providing a light path shaping part, carrying out the shaping and stray light filtering of a laser beam through the light path shaping part, and splitting the laser beam into a first light spot and a second light spot; the first light spot and the second light spot are focused on the photovoltaic cell through a focusing lens; and cleaning an etching area formed after scribing the photovoltaic cell based on the second light spot while scribing the photovoltaic cell based on the first light spot. The scribing method effectively and quickly solves the problems that subsequent cleaning is difficult and the conductivity of the material is damaged due to residues.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic cell preparation, and in particular to a laser scribing method and device with cleaning function. Background Art

[0002] Photovoltaic cell scribing is a technical method used to improve the conversion efficiency and power generation capacity of photovoltaic cells. Simply put, it is to use laser and other technologies to form one or more precise lines on the surface of photovoltaic cells. These lines divide the cell surface into small areas, making the current more concentrated and reducing current loss, thereby improving the conversion efficiency of photovoltaic cells.

[0003] Laser scribing technology faces a problem that cannot be ignored in practical applications: after scribing, some metal oxides that are not completely vaporized often remain inside the scribing grooves, or some molten materials caused by setting the laser power too high. The presence of these residues brings trouble to the subsequent process flow, requiring more complex and time-consuming deep cleaning operations in the downstream process. However, for materials that are preferentially evaporated with a hole transport layer or an electron transport layer on TCO (transparent conductive oxide) glass, the cleaning process may cause serious damage to its conductive properties. As a key component of photovoltaic cells, the conductivity of TCO glass is directly related to the overall efficiency and performance of the cell. Therefore, how to effectively remove these residues without damaging the conductivity of TCO glass has become a major problem that needs to be solved urgently. Summary of the invention

[0004] The object of the present invention is to provide a laser scribing method and device having a cleaning function, which can clean the residues left after scribing of photovoltaic cells without damaging the conductivity of the material.

[0005] To achieve the above object, the present invention discloses a laser scribing method with cleaning function, which comprises:

[0006] Providing an optical path shaping member, through which the laser beam is shaped and stray light is filtered, and the laser beam is split into a first light spot and a second light spot;

[0007] Focusing the first light spot and the second light spot on the photovoltaic cell through a focusing lens;

[0008] The photovoltaic cell is scribed based on the first light spot, and an etched area formed after the photovoltaic cell is scribed based on the second light spot is cleaned.

[0009] Specifically, before performing the scribing operation based on the first light spot, the laser beam is split by the optical path shaping member to form a third light spot, the third light spot is focused on the photovoltaic cell by the focusing lens, and the surface of the photovoltaic cell is cleaned based on the third light spot.

[0010] Specifically, the scribing method further includes adjusting the power and density of the second light spot and the third light spot by a light spot processing device.

[0011] Specifically, the marking method further comprises:

[0012] Adjusting the positions where the second light spot and the third light spot fall on the photovoltaic cell by means of a mechanical motion structure;

[0013] The sizes of the second light spot and the third light spot are adjusted by a light spot size conversion structure.

[0014] Specifically, the optical path shaping component includes:

[0015] A first optical path shaping component is used to shape the laser beam and filter stray light in the laser beam. The first optical path shaping component includes at least one of a beam converter, a shape shaping device, a divergence angle control device, and a spatial light modulator.

[0016] The second optical path shaping component includes a diffraction element, and the laser beam is split by the diffraction element to form the first light spot, the second light spot and the third light spot.

[0017] The present invention also discloses a laser scribing device with a cleaning function, comprising:

[0018] a light source for emitting a laser beam;

[0019] An optical path shaping member, which is used to shape the laser beam and filter stray light, and split the laser beam after shaping and stray light filtering to form a first light spot and a second light spot, wherein the first light spot is used to scribing the photovoltaic cell, and the second light spot is used to clean the etched area formed after the photovoltaic cell is scribed;

[0020] A focusing lens is used to focus the first light spot and the second light spot onto the photovoltaic cell.

[0021] Specifically, the optical path shaping member is also used to split the laser beam to form a third light spot; the third light spot is focused onto the photovoltaic cell through the focusing lens, and is used to clean the surface of the photovoltaic cell before the photovoltaic cell is scribing.

[0022] Specifically, the scribing device further includes a light spot processing device, which is used to adjust the power and density of the second light spot and the third light spot.

[0023] Specifically, the marking device further includes:

[0024] A mechanical motion structure, used for adjusting the positions where the second light spot and the third light spot fall on the photovoltaic cell;

[0025] The light spot size conversion structure is used to adjust the sizes of the second light spot and the third light spot.

[0026] Specifically, the optical path shaping component includes:

[0027] A first optical path shaping component, which is used to shape the laser beam and filter stray light in the laser beam, the first optical path shaping component comprising at least one of a beam converter, a shape shaping device, a divergence angle control device, and a spatial light modulator;

[0028] The second optical path shaping component is used to split the laser beam into the first light spot, the second light spot and the third light spot, and the second optical path shaping component includes a diffraction element.

[0029] Compared with the prior art, the scribing method provided by the above technical solution of the present invention firstly shapes the laser beam used for cleaning and scribing and filters the stray light through the optical path shaping member. The shaped and filtered laser beam can better adapt to the scribing requirements of photovoltaic cells and has better beam quality. The processed laser beam is split into a first light spot and a second light spot. The first light spot is used for scribing operation, and the second light spot is used to clean the residue left in the etched area after the first light spot is scribing. While the first light spot is scribing, the second light spot cleans the etched area of ​​the scribing, thereby achieving high-speed cleaning. In summary, the scribing method with cleaning function successfully reduces the residue of metal oxides and molten materials inside the scribing groove, and effectively solves the problems of subsequent cleaning difficulties and impaired glass conductivity caused by residues. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 4 is a flow chart of a marking method in an embodiment of the present invention.

[0031] Figure 2 FIG. 4 is a flow chart of a marking method in another embodiment of the present invention.

[0032] Figure 3 Schematic diagram of the structure of a scribing device in another embodiment of the present invention. DETAILED DESCRIPTION

[0033] In order to explain the technical content, structural features, achieved objectives and effects of the present invention in detail, the following is a detailed description in conjunction with the implementation methods and the accompanying drawings.

[0034] The embodiments of the present invention disclose a laser scribing method and device with cleaning function, so as to scribing photovoltaic cells and clean the residues in the etched area after scribing, so as to achieve the purpose of high-speed cleaning without damaging the conductivity of the material. Figure 1 and Figure 3 As shown, the marking method specifically includes the following steps:

[0035] S11: providing an optical path shaping component, shaping the laser beam and filtering stray light through the optical path shaping component, and splitting the laser beam into a first light spot and a second light spot.

[0036] Among them, the laser beam is emitted by a preset light source, and the light source can be a laser, which is the direct energy source of the laser. The application is not limited to the wavelength, and can be infrared light, green light, ultraviolet light or blue light, etc. In this embodiment, one or more combinations of the above wavelengths are used.

[0037] S12: focusing the first light spot and the second light spot on the photovoltaic cell through a focusing lens.

[0038] The focusing lens may be a flat field lens, a telecentric lens or a special reflection focusing lens, and one of the above is used in this embodiment.

[0039] S13: The photovoltaic cell is scribed based on the first light spot, and the etched area formed after the photovoltaic cell is scribed based on the second light spot is cleaned.

[0040] The scribing method provided by the present invention first uses an optical path shaping member to precisely shape and filter stray light on the laser beam used for cleaning and scribing. This step ensures that the laser beam can better adapt to the scribing and cleaning needs of photovoltaic cells after being processed. Through shaping and filtering, the quality of the laser beam is improved, not only the beam is purer, but also its energy distribution is more uniform. Furthermore, the method also innovatively splits the processed laser beam to form a first light spot and a second light spot. The first light spot undertakes the core task of the scribing operation and can quickly and accurately form the required scribing groove on the surface of the photovoltaic cell. The second light spot plays an important role in cleaning, and it is specifically used to remove residues such as metal oxides and molten materials that may be left when the first light spot is scribing. This scribing method with a cleaning function not only successfully reduces the residue inside the scribing etching area, but also effectively and quickly solves the problems of subsequent cleaning difficulties and damaged glass conductivity caused by residues, and has an excellent improvement effect.

[0041] See also Figure 2As shown, in another embodiment of the present invention, the marking method further comprises:

[0042] S21: providing an optical path shaping component, shaping the laser beam and filtering stray light through the optical path shaping component, and splitting the laser beam into a first light spot, a second light spot, and a third light spot.

[0043] S22: focusing the first light spot, the second light spot and the third light spot on the photovoltaic cell through a focusing lens.

[0044] S23: Cleaning the surface of the photovoltaic cell based on the third light spot.

[0045] S24: The photovoltaic cell is scribed based on the first light spot, and the etched area formed after the photovoltaic cell is scribed based on the second light spot is cleaned.

[0046] In this embodiment, the third light spot formed by beam splitting can clean dust on the surface of the photovoltaic cell before scribing. This cleaning step can improve the light transmittance of the glass, thereby improving the scribing quality of the subsequent first light spot and the cleaning quality of the second light spot.

[0047] Furthermore, the embodiment of the present invention further includes a light spot processing device, and the scribing method of this embodiment further includes: adjusting the power and density of the second light spot and the third light spot by the light spot processing device. Figure 3 As shown, in this embodiment, the second optical path shaping member divides the laser beam into a first light spot, a second light spot and a third light spot, and a light spot processing device is provided between the focusing lens and the photovoltaic cell to be scribed and cleaned, and the second light spot and the third light spot are processed by a light spot processing device respectively. The function of the light spot processing device is to regulate the power and density of the second light spot and the third light spot, so as to achieve the effect of not damaging the photovoltaic cell on the basis of cleaning the stains, dust on the surface of the photovoltaic cell or the residues or dust that have not been completely volatilized in the etching area without damaging the photovoltaic cell. The power and density of the second light spot and the third light spot can be increased or decreased.

[0048] Specifically, in this embodiment, refer to Figure 3 As shown, it also includes a mechanical motion structure and a spot size transformation structure. The scribing method of this embodiment also includes:

[0049] The positions where the second light spot and the third light spot fall on the photovoltaic cell are adjusted by a mechanical motion structure;

[0050] The sizes of the second light spot and the third light spot are adjusted by the light spot size conversion structure.

[0051] In this embodiment, the mechanical motion structure can control the second light spot to fall directly behind the first light spot in the direction of scribing according to the scribing direction of the first light spot, so as to clean the residue in the etched area formed by the scribing of the first light spot synchronously when the first light spot is scribing. Since the surface cleaning work based on the third light spot is before the scribing operation, the mechanical motion structure can freely control the third light spot to fall directly in front of or directly behind the scribing direction of the first light spot. When the cleaning or scribing directions of the third light spot, the first light spot and the second light spot are all consistent, the photovoltaic cell surface can be cleaned based on the third light spot, and the photovoltaic cell in the cleaned area of ​​the surface can be scribed based on the first light spot and the second light spot can be controlled to clean the etched area that has been scribed.

[0052] The spot size conversion structure can adjust the shape and size of the second spot and the third spot. The size of the second spot and the third spot can be larger or smaller than the first spot. The operator can adjust the size of the second spot and the third spot according to the actual situation to meet the needs of cleaning the surface and etching area. The spot size conversion structure can use other optical processing structures such as focusing mirrors and telescopes.

[0053] Specifically, in this embodiment, the optical path shaping element includes:

[0054] The first optical path shaping component is used to shape the laser beam and filter stray light in the laser beam. The first optical path shaping component includes at least one of a beam converter, a shape shaping device, a divergence angle control device, and a spatial light modulator.

[0055] The second optical path shaping component includes a diffraction element, which divides the laser beam into a first light spot, a second light spot and a third light spot through the diffraction element.

[0056] In another preferred embodiment of the present invention, a laser scribing device with a cleaning function is also disclosed. Figure 3 As shown, the laser scribing device comprises:

[0057] The light source is used to emit a laser beam. The light source may be a laser, which is a direct energy source of the laser. The application is not limited to wavelengths, and may be infrared light, green light, ultraviolet light or blue light, etc. In this embodiment, one or a combination of the above wavelengths is used.

[0058] The optical path shaping component is used to shape the laser beam and filter stray light, and split the shaped and stray light filtered laser beam to form a first light spot and a second light spot. The first light spot is used to scribing the photovoltaic cell, and the second light spot is used to clean the etched area formed after the photovoltaic cell is scribed.

[0059] A focusing lens is used to focus the first light spot and the second light spot onto the photovoltaic cell. The focusing lens can be a flat field lens, a telecentric lens or a special reflection focus, and one of the above is used in this embodiment.

[0060] Specifically, in this embodiment, the optical path shaping member is also used to split the laser beam to form a third light spot, which is focused onto the photovoltaic cell through a focusing lens and is used to clean the surface of the photovoltaic cell before the photovoltaic cell is scribed.

[0061] Specifically, the scribing device further includes a light spot processing device, which is used to adjust the power and density of the second light spot and the third light spot.

[0062] Specifically, the marking device also includes:

[0063] A mechanical motion structure, which is used to adjust the positions where the second light spot and the third light spot fall on the photovoltaic cell;

[0064] The spot size conversion structure is used to adjust the size of the second spot and the third spot to clean the scribed photovoltaic cell. The specific contents of the spot processing device, the mechanical motion structure and the spot size conversion structure are consistent with those in the above embodiment and will not be repeated here.

[0065] Specifically, the optical path shaping component includes:

[0066] A first optical path shaping component, which is used to shape the laser beam and filter stray light in the laser beam, and the first optical path shaping component includes at least one of a beam converter, a shape shaping device, a divergence angle control device, and a spatial light modulator;

[0067] The second optical path shaping component is used to divide the laser beam into a first light spot, a second light spot and a third light spot, and the second optical path shaping component includes a diffraction element.

[0068] The scribing device can simultaneously realize the scribing of photovoltaic cells and high-speed cleaning of the etched area after scribing. The application of the scribing device in the production of photovoltaic cells not only successfully reduces the residue inside the scribing groove, but also effectively and quickly solves the problems such as the subsequent cleaning difficulties and the damage to the conductivity of the glass caused by the residue.

[0069] The scribing method and scribing device of this embodiment can be used to process photovoltaic cells, welding materials, or other materials that require high-quality processing and are suitable for the scribing method and scribing device. As long as the material is suitable for laser scribing and cleaning, it can be processed using the scribing method and scribing device of this embodiment.

[0070] The above disclosure is only the preferred embodiment of the present invention, which certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made according to the scope of the patent application of the present invention are still within the scope covered by the present invention.

Claims

1. A laser scribing method with cleaning function, characterized in that: The marking method comprises: Providing an optical path shaping member, through which the laser beam is shaped and stray light is filtered, and the laser beam is split into a first light spot and a second light spot; Focusing the first light spot and the second light spot on the photovoltaic cell through a focusing lens; The photovoltaic cell is scribed based on the first light spot, and an etched area formed after the photovoltaic cell is scribed based on the second light spot is cleaned.

2. The laser scribing method with cleaning function according to claim 1, characterized in that: Before performing the scribing operation based on the first light spot, the laser beam is split by the light path shaping member to form a third light spot, the third light spot is focused on the photovoltaic cell by the focusing lens, and the surface of the photovoltaic cell is cleaned based on the third light spot.

3. The laser scribing method with cleaning function according to claim 2, characterized in that: The power and density of the second light spot and the third light spot are adjusted by a light spot processing device.

4. The laser scribing method with cleaning function according to claim 2, characterized in that: Adjusting the positions where the second light spot and the third light spot fall on the photovoltaic cell by means of a mechanical motion structure; The sizes of the second light spot and the third light spot are adjusted by a light spot size conversion structure.

5. The laser scribing method with cleaning function according to claim 2, characterized in that: The optical path shaping component comprises: A first optical path shaping component is used to shape the laser beam and filter stray light in the laser beam. The first optical path shaping component includes at least one of a beam converter, a shape shaping device, a divergence angle control device, and a spatial light modulator. The second optical path shaping component includes a diffraction element, and the laser beam is split by the diffraction element to form the first light spot, the second light spot and the third light spot.

6. A laser scribing device with cleaning function, characterized in that: include: a light source for emitting a laser beam; An optical path shaping member, which is used to shape the laser beam and filter stray light, and split the laser beam after shaping and stray light filtering to form a first light spot and a second light spot, wherein the first light spot is used to scribing the photovoltaic cell, and the second light spot is used to clean the etched area formed after the photovoltaic cell is scribed; A focusing lens is used to focus the first light spot and the second light spot onto the photovoltaic cell.

7. The laser scribing device with cleaning function according to claim 6, characterized in that: The optical path shaping member is also used to split the laser beam to form a third light spot; the third light spot is focused onto the photovoltaic cell through the focusing lens and is used to clean the surface of the photovoltaic cell before the photovoltaic cell is scribing.

8. The laser scribing device with cleaning function according to claim 7, characterized in that: It also includes a light spot processing device, which is used to adjust the power and density of the second light spot and the third light spot.

9. The laser scribing device with cleaning function according to claim 7, characterized in that: The marking device also includes: A mechanical motion structure, used for adjusting the positions where the second light spot and the third light spot fall on the photovoltaic cell; The light spot size conversion structure is used to adjust the sizes of the second light spot and the third light spot.

10. The laser scribing device with cleaning function according to claim 7, characterized in that: The optical path shaping component comprises: A first optical path shaping component, which is used to shape the laser beam and filter stray light in the laser beam, the first optical path shaping component comprising at least one of a beam converter, a shape shaping device, a divergence angle control device, and a spatial light modulator; The second optical path shaping component is used to split the laser beam into the first light spot, the second light spot and the third light spot, and the second optical path shaping component includes a diffraction element.

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