Processing method of ultrathin perfluoroether rubber sealing element

Abstract

The invention provides a processing method of an ultrathin perfluoroether rubber sealing element, which comprises the following steps: S1, preparing N sets of nested combined molds, installing a perfluoroether elastomer rubber compound block in a set of nested combined mold, and then placing the nested combined mold in a lower mold of a molding press mold; s2, the temperature is increased for compression molding, and meanwhile, perfluoroether elastomer rubber compound blocks are installed in the other N-1 nested combined molds correspondingly; s3, after compression molding is completed, the nested combined dies are taken out to be cooled, meanwhile, one of the N-1 nested combined dies is placed in a lower die body of the molding press die, and N is an integer larger than or equal to 2; s4, after the nested combined mold to be taken out is cooled to the temperature close to the environment temperature, the nested combined mold is opened, and a product is taken out; and repeating the steps S2-S4. According to the processing method of the ultrathin perfluoroether rubber sealing element, the problem that the sealing ring is adhered to the mold after the fluoroelastomer is subjected to compression molding is solved, and meanwhile, the production efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of seals, and in particular to a method for processing an ultra-thin perfluoroether rubber seal. Background Art

[0002] Sealing materials play an important role in different semiconductor manufacturing processes.

[0003] An electrostatic chuck (ESC) is a mechatronic device that uses the electrostatic effect on the surface of an object to generate electrostatic force and achieve adsorption. When the electrostatic chuck is close to the surface of the object to be adsorbed, the electrostatic charge on the surface of the object will be adsorbed on the surface of the electrostatic chuck due to the electrostatic effect between the electrostatic chuck and the surface of the object. The electrostatic chuck uses the force of electrostatic charge. The smaller the distance between the electrostatic chuck and the surface of the object, the more concentrated the electrostatic beam of the electrostatic chuck, and the greater the electrostatic force between the electrostatic chuck and the surface of the object. When the object comes into contact with the electrostatic chuck, the static charge is distributed between the two surfaces, forming an electrostatic field. Electrostatic force will be generated in the electrostatic field, adsorbing the object on the electrostatic chuck.

[0004] Electrostatic chucks have many advantages. They are noiseless, pollution-free, and do not generate airflow between the chuck surface and the object being chucked. Electrostatic chucks can also adapt to chuck objects of different materials, and the chuck force is not affected by the ambient temperature.

[0005] Electrostatic chucks are widely used in semiconductor production, electronics industry, glass production, automated transportation and other fields. In the field of automated transportation, electrostatic chucks can be used for robots to adsorb objects. In the field of semiconductor production, electrostatic chucks can be used in chip production, component production and other fields.

[0006] During the chip production process, the substrate is adsorbed to the substrate carrier and electrostatic chuck by using the voltage that causes arc discharge between the bipolar electrodes, which will damage the electrostatic chuck and may release contaminants into the processing environment. Once the electrostatic chuck is damaged, the entire electrostatic chuck must be removed for expensive repairs; the sealing material E-SEAL can effectively protect the electrostatic chuck.

[0007] E-SEAL is only 0.25-0.5mm thick, about 2.5mm wide, and about 290.5mm in inner diameter. After the fluoroelastomer is molded, if the mold is opened to take out the E-SEAL, due to the high temperature, the fluoroelastomer is in a viscous flow state, the E-SEAL adheres to the mold, and the thin seal ring is easily deformed by force during the demolding process; if the seal ring E-SEAL is cooled to ambient temperature before taking it out, the problem of the seal ring adhering to the mold during demolding can be solved, but the cooling process takes a long time and the production efficiency is reduced. Summary of the invention

[0008] The purpose of the present invention is to provide a method for processing an ultra-thin perfluoroether rubber seal to solve the problems existing in the above-mentioned prior art.

[0009] In order to solve the above problems, the first aspect of the present invention provides a method for processing an ultra-thin perfluoroether rubber seal, comprising the following steps:

[0010] S1, prepare N sets of nested combined molds, install a piece of perfluoroether elastomer mixed rubber block in one set of nested combined molds, and then place the nested combined molds in the lower mold of the molding machine;

[0011] S2, heating up for compression molding, and simultaneously installing N-1 perfluoroether elastomer mixed rubber blocks in another N-1 sets of nested combined molds;

[0012] S3, after the molding is completed, the nested combined mold in the lower mold of the molding machine mold is taken out for cooling, and at the same time, one of the N-1 sets of nested combined molds installed with the perfluoroether elastomer mixed rubber blocks is placed in the lower mold of the molding machine mold, wherein, wherein N is an integer greater than or equal to 2;

[0013] S4, after the nested combined mold to be taken out is cooled to a temperature close to the ambient temperature, the nested combined mold is opened to take out the perfluoroether elastomer product; and steps S2-S4 are repeated.

[0014] In one embodiment, the nested combined mold comprises a nested mold upper mold and a nested mold lower mold, and the perfluoroether elastomer compound is installed in the nested mold lower mold.

[0015] In one embodiment, in S2, the molding conditions are 8-12 MPa, the molding temperature is 160-175° C., and the molding time is 5-16 min.

[0016] In one embodiment, N=Ceil(x)+1, x=cooling time / (molding time and installation time).

[0017] In one embodiment, the gap between the nested mold upper mold and the nested mold lower mold is between 0.25-0.5 mm.

[0018] In one embodiment, before molding, a release agent is coated on the surfaces of the upper mold and the lower mold of the nested mold.

[0019] In one embodiment, the release agent includes any one of silicone oil, polyether-modified polyorganosiloxane and reactive silicone polymer.

[0020] In one embodiment, in step S4, the cooling method is any one or a combination of natural cooling, forced cooling or programmed cooling.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. The problem of the sealing ring sticking to the mold after the fluoroelastomer is molded is solved. In the traditional method, due to the high temperature when taking out the sealing ring, the fluoroelastomer is in a viscous flow state, and the sealing ring is easy to stick to the mold, resulting in deformation under force during demolding. The present application replaces the mold while cooling the mold by nesting the mold, so that the sealing ring is separated from the mold after cooling down. Since the fluoroelastomer product is in a highly elastic state at the ambient temperature, the occurrence of adhesion is avoided, and the quality stability of the product is guaranteed.

[0023] 2. Improved production efficiency. The nested mold design of the present application allows the next round of molding to be carried out while the mold is cooling. This saves time waiting for cooling and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a schematic diagram of a molding die in an embodiment of the present application;

[0025] Figure 2 Schematic diagram of the compression mold and the nested assembly mold in the embodiment of the present application;

[0026] Figure 3 It is an exploded schematic diagram of the mold and product assembly in this application;

[0027] Figure 4 This is a mold assembly diagram of a product in a molded state in an embodiment of the present application;

[0028] Figure 5 yes Figure 4 Enlarged view of part B in the middle. DETAILED DESCRIPTION

[0029] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0030] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0031] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0032] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0033] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0034] This embodiment provides a nested replaceable mold, and the perfluoroether elastomer compound is molded in the nested replaceable mold, and a special molding device is used for the molding operation. The molding device is a molding machine produced by Dongyu (Ningbo) Hydraulic Co., Ltd., model TYC-V-18-PCD. The molding device includes a molding machine body and a mold. Figure 1 , Figure 2 , Figure 3 , Figure 4 Figure 5 As shown, the compression mold 10 includes an upper mold 11 and a lower mold 12, and the nested combined mold 20 includes a nested mold upper mold 21, a nested mold lower mold 22 and a positioning pin. The lower mold 12 is provided with an annular groove 121 matching the nested mold lower mold 22, and the perfluoroether elastomer compound is installed in the nested mold lower mold 22, and the nested mold lower mold 22 is arranged in the annular groove 121. Among them, the gap between the nested mold upper mold 21 and the nested mold lower mold 22 is between 0.25-0.5mm. Before molding, a release agent is applied on the surface of the nested mold upper mold 21 and the nested mold lower mold 22, and the release agent includes any one of silicone oil, polyether modified polyorganosiloxane and reactive silicone polymer. After molding, the product cooling method adopts any one or combination of natural cooling, forced cooling or programmed cooling.

[0035] A method for processing an ultra-thin perfluoroether rubber seal comprises the following steps:

[0036] S1, prepare N sets of nested combined molds, install a piece of perfluoroether elastomer mixed rubber block in one set of nested combined molds, and then place the nested combined molds in the lower mold of the molding machine;

[0037] S2, heating up for compression molding, and simultaneously installing N-1 perfluoroether elastomer mixed rubber blocks in another N-1 sets of nested combined molds;

[0038] S3, after the molding is completed, the nested combined mold in the lower mold of the molding machine mold is taken out for cooling, and at the same time, one of the N-1 sets of nested combined molds installed with the perfluoroether elastomer mixed rubber blocks is placed in the lower mold of the molding machine mold, wherein N is an integer greater than or equal to 2;

[0039] S4, after the nested combined mold to be taken out is cooled to a temperature close to the ambient temperature, the nested combined mold is opened to take out the perfluoroether elastomer product; and steps S2-S4 are repeated.

[0040] In one embodiment, in S2, the molding conditions are 8-12 MPa, the molding temperature is 160-175° C., and the molding time is 5-16 min.

[0041] In one embodiment, N=Ceil(x)+1, x=cooling time / (molding time and installation time).

[0042] In the embodiment, the molding condition is 10MPa, the molding temperature is 165℃, and the molding time is 10min; the gap between the nested mold upper mold 21 and the nested mold lower mold 22 is 0.25mm. Before molding, a release agent is applied on the surface of the nested mold upper mold 21 and the nested mold lower mold 22, and the release agent is silicone oil. After molding, the product cooling method adopts one of natural cooling, forced cooling and programmed cooling.

[0043] In the traditional method, after the fluoroelastomer is molded, if the mold is opened to take out the sealing ring product, such as E-SEAL, due to the high temperature, the fluoroelastomer is in a viscous flow state, and the sealing ring is easy to adhere to the mold, resulting in deformation under force during demolding. The present application replaces the mold while cooling the mold by nesting the mold, so that the sealing ring is separated from the mold after cooling down. Since the fluoroelastomer product is in a highly elastic state at the ambient temperature, the occurrence of adhesion is avoided, and the quality stability of the product is guaranteed.

[0044] The design of the nested replaceable molds of this embodiment allows the next round of molding to be performed while the mold is being cooled, which saves time waiting for cooling and improves production efficiency.

[0045] Example 1 Ambient temperature cooling

[0046] Put the perfluoroether elastomer mixed rubber into the nested combined mold; the mold release agent is silicone oil;

[0047] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0048] The nested combined mold is placed in the lower mold of the molding machine, and the temperature is increased for molding, the temperature is 165°C, the molding pressure is 10MPa, and the molding time is 10min. The nested combined mold containing the perfluoroether elastomer product is taken out and cooled to 50°C (detected by an infrared thermometer) at ambient temperature, and the mold is opened, wherein the cooling time of the nested combined mold is about 30min;

[0049] While taking out the nested assembly mold containing the perfluoroether elastomer product, replace it with a new set of nested assembly molds, put the perfluoroether elastomer mixed rubber blocks into the new nested assembly molds, and carry out the next round of molding. The time required to replace the new mold is about 5 minutes.

[0050] That is, 30 / (10+5)+1=3 sets of nested combination molds are needed to complete continuous operation.

[0051] The data of yield rate and so on are listed in Table 1.

[0052] Example 2 Cooling in cold box

[0053] Put the perfluoroether elastomer mixed rubber into the nested combined mold; the mold release agent is silicone oil;

[0054] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0055] The nested combined mold is placed in the lower mold of the molding machine, and the temperature is increased for molding, the temperature is 165°C, the molding pressure is 10MPa, and the molding time is 10min. The nested combined mold containing the perfluoroether elastomer product is taken out and cooled to about 50°C (detected by an infrared thermometer) at a constant temperature of -10°C. The mold is opened, and the cooling time of the nested combined mold is 10min.

[0056] While taking out the nested assembly mold containing the perfluoroether elastomer product, replace it with a new set of nested assembly molds, put the perfluoroether elastomer mixed rubber blocks into the new nested assembly molds, and carry out the next round of molding. The time required to replace the new mold is about 5 minutes.

[0057] That is, Ceil(10 / (10+5))+1=2 sets of nested combination molds are needed to complete continuous operation.

[0058] The data of yield rate and so on are listed in Table 1.

[0059] Example 3 Cooling in a cold box with gradient heating

[0060] Put the perfluoroether elastomer mixed rubber into the nested combined mold; the mold release agent is silicone oil;

[0061] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0062] The nested combined mold is placed in the lower mold of the molding machine mold, and the temperature is increased for molding, the temperature is 165°C, the molding pressure is 10MPa, and the molding time is 10min. The nested combined mold containing the perfluoroether elastomer product is taken out and cooled in a gradient heating cold box, the starting temperature is -20°C, the temperature is increased to 50°C, the heating rate is 15°C / min, the nested combined mold is cooled to about 50°C (detected by an infrared thermometer), and the mold is opened, wherein the cooling time of the nested combined mold is 40min;

[0063] While taking out the nested assembly mold containing the perfluoroether elastomer product, replace it with a new set of nested assembly molds, put the perfluoroether elastomer mixed rubber blocks into the new nested assembly molds, and carry out the next round of molding. The time required to replace the new mold is about 5 minutes.

[0064] That is, Ceil(40 / (10+5))+1=4 sets of nested combination molds are needed to complete continuous operation.

[0065] The data of yield rate and so on are listed in Table 1.

[0066] Comparative Example 1 Conventional method

[0067] Cut the perfluoroether elastomer mixed rubber into pieces and put them into the mold; the mold release agent is silicone oil;

[0068] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0069] The temperature is raised for compression molding, the temperature is 165°C, the molding pressure is 10MPa, the molding time is 10min, the mold is opened, the temperature inside the mold is about 150°C, the sealing component is taken out, and the next round of molding is carried out, which takes 5min.

[0070] The data of yield rate and so on are listed in Table 1.

[0071] Comparative Example 2 In-situ cooling for 40 min

[0072] Cut the perfluoroether elastomer mixed rubber into pieces and put them into the mold; the mold release agent is silicone oil;

[0073] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0074] The temperature was raised for compression molding, the temperature was 165°C, the molding pressure was 10MPa, the molding time was 10min, and the mold was opened after cooling in situ for 40min. The temperature inside the mold was about 85°C. The sealing component was taken out and the next round of molding was carried out, which took 5min.

[0075] Comparative Example 3 In-situ cooling for 80 min

[0076] Cut the perfluoroether elastomer mixed rubber into pieces and put them into the mold; the mold release agent is silicone oil;

[0077] E-SEAL thickness 0.35mm, width 2.5mm, inner diameter 290.5mm;

[0078] The temperature is raised for compression molding, the temperature is 165°C, the molding pressure is 10MPa, the molding time is 10min, and the mold is opened after cooling in situ for 80min. The temperature inside the mold is about 65°C. The sealing component is taken out and the next round of molding is carried out, which takes 5min.

[0079] The data of yield rate and so on are listed in Table 1.

[0080]

[0081] From the above examples and comparative examples, it can be seen that:

[0082] 1. The use of nested combined molds solves the problem of the seal ring adhering to the mold after the fluoroelastomer is molded. The present application replaces the mold while cooling the mold by nesting the mold, so that the seal ring is separated from the mold after cooling down. Since the fluoroelastomer product is in a highly elastic state at the ambient temperature, the adhesion phenomenon is avoided, and the quality stability of the product is ensured.

[0083] 2. Improved production efficiency. The nested mold design of the present application allows the next round of molding to be carried out while the mold is cooling. This saves time waiting for cooling and improves production efficiency.

[0084] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A method for processing an ultra-thin perfluoroether rubber seal, characterized in that: The following steps are involved: S1, prepare N sets of nested combined molds, install a piece of perfluoroether elastomer mixed rubber block in one set of nested combined molds, and then place the nested combined molds in the lower mold of the molding machine; S2, heating up for compression molding, while installing perfluoroether elastomer mixed rubber blocks in another N-1 sets of nested combined molds; S3, after the molding is completed, the nested combined mold in the lower mold of the molding machine mold is taken out for cooling, and at the same time, one of the N-1 sets of nested combined molds installed with the perfluoroether elastomer mixed rubber blocks is placed in the lower mold of the molding machine mold, wherein N is an integer greater than or equal to 2; S4, after the nested combined mold to be taken out is cooled to a temperature close to the ambient temperature, the nested combined mold is opened to take out the perfluoroether elastomer product; and steps S2-S4 are repeated.

2. The processing method of the ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: The nested combined mold comprises a nested mold upper mold and a nested mold lower mold, and the perfluoroether elastomer compound rubber is installed in the nested mold lower mold.

3. The processing method of the ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: In S2, the molding conditions are 8-12 MPa, the molding temperature is 160-175°C, and the molding time is 5-16 min.

4. The processing method of the ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: N = Ceil(x) + 1, x = cooling time / (molding time and installation time).

5. The processing method of the ultra-thin perfluoroether rubber seal according to claim 2, characterized in that: The gap between the upper mold of the nested mold and the lower mold of the nested mold is between 0.25-0.5 mm.

6. The method for processing an ultra-thin perfluoroether rubber seal according to claim 2, characterized in that: Before molding, a release agent is applied on the surfaces of the upper mold of the nested mold and the lower mold of the nested mold.

7. The method for processing an ultra-thin perfluoroether rubber seal according to claim 6, characterized in that: The release agent includes any one of silicone oil, polyether-modified polyorganosiloxane and reactive silicone polymer.

8. The method for processing an ultra-thin perfluoroether rubber seal according to claim 1, characterized in that: In step S4, the cooling method adopts any one or a combination of natural cooling, forced cooling or programmed cooling.

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