Evaporation boat control system

Abstract

The invention, which relates to the technical field of evaporation boat temperature control, discloses an evaporation boat control system comprising an evaporation boat temperature real-time monitoring device, a control system, an evaporation boat temperature adjusting system and an operation interface. The evaporation boat temperature real-time monitoring device is used for monitoring the temperature of the evaporation boat in real time; the control system is used for calculating and analyzing the temperature collected by the evaporation boat temperature real-time monitoring device and issuing a temperature adjusting instruction to the evaporation boat temperature adjusting system according to the analysis condition. The evaporation boat temperature adjusting system is used for adjusting the current and the voltage according to the received instruction; and the operation interface is used for performing intervention on system errors by a worker. According to the invention, the situations that the human body is harmed when the evaporation state is observed by naked eyes and the aluminum liquid in the evaporation boat is easy to splash due to too fast temperature change in the prior art can be effectively improved.

Description

Technical Field

[0001] The invention relates to the technical field of evaporation boat temperature control, in particular to an evaporation boat control system. Background Art

[0002] As the application of composite current collectors in the field of battery electrode current collectors is gradually promoted, the improvement of composite aluminum foil evaporation efficiency has become one of the key topics of the industry. The preparation method of composite aluminum foil is: a layer of aluminum layer is compounded on the surface of a polymer substrate through an evaporation process. Specifically, evaporation is to continuously transport aluminum wire into a high-temperature evaporating dish to melt it to form aluminum vapor, and then plate the aluminum vapor on the polymer substrate.

[0003] During the use of existing vapor deposition machines, the temperature and state of the evaporation boat can mostly only be adjusted through visual observation and empirical judgment, which is not intuitive and easy to misjudge. Moreover, observing the evaporation state with the naked eye for a long time is harmful to the human body. In addition, rapid temperature changes can also cause aluminum liquid in the evaporation boat to splash. Summary of the invention

[0004] The object of the present invention is to provide an evaporation boat control system to solve the problems raised in the prior art.

[0005] To achieve the above object, the present invention provides the following technical solutions: an evaporation boat control system, the system comprising an evaporation boat temperature real-time monitoring device, a control system, an evaporation boat temperature adjustment system and an operation interface; The evaporation boat temperature real-time monitoring device is used to monitor the evaporation boat temperature in real time; the control system is used to calculate and analyze the temperature collected by the evaporation boat temperature real-time monitoring device and issue temperature adjustment instructions to the evaporation boat temperature adjustment system according to the analysis results; the evaporation boat temperature adjustment system is used to adjust the current and voltage according to the received instructions; the operation interface is used for the staff to intervene in the system error; The evaporation boat temperature real-time detection device is connected to the control system; the control system is connected to the evaporation boat temperature adjustment system; the evaporation boat temperature adjustment system is connected to the operation interface.

[0006] The evaporation boat temperature real-time monitoring device includes a plurality of temperature sensing TC probes; The temperature sensing TC probe is installed at the bottom of the evaporation boat in a contact manner; the temperature sensing TC probe is connected to the control system; The temperatures collected by the TC probe are expressed as: [T1, T2, ..., T n ]; where n represents the number of TC probes, T1~T n They represent the temperatures collected by the 1st to nth TC probes respectively.

[0007] The control system includes a temperature analysis module and a temperature adjustment module; The temperature analysis module is used to calculate and analyze the temperature collected by the evaporation boat temperature real-time monitoring device; the temperature adjustment module is used to control the system to generate an evaporation boat temperature adjustment instruction according to the temperature analysis situation.

[0008] The specific implementation method of calculating and analyzing the temperature collected by the evaporation boat temperature real-time monitoring device is: for the temperatures T1-T collected by different TC probes n , get the maximum temperature T max and minimum value T min ; Calculate the range ΔT=T max -T min ; Among them, T max ,T min ∈{T1,T2,...,T n}; Set a threshold value A; when ΔT>A, it is considered that the temperature difference is too large, interlocking is performed, and an alarm is issued; When ΔT≤A, calculate the average temperature: T avg =(T1+T2+...+T n ) / n; The threshold value A is determined by: obtaining historical temperature data of the evaporation boat under normal operating conditions for a number of periods of time including multiple cycles or batches; cleaning the historical temperature data; calculating the range of the temperature data at each time point for the cleaned historical temperature data; calculating the mean M and standard deviation S of the range; A=M+k·S; wherein k is an integer representing an error coefficient, which is manually set; Obtain the quality standard data produced under different evaporation temperature settings in the previous production process from the quality inspection report; analyze the relationship between quality and temperature to obtain the evaporation temperature that optimizes the product quality and makes one or more product performances meet fixed conditions; set the evaporation temperature according to demand, expressed as U; Calculate the difference D between the preset evaporation temperature and the real-time temperature: D = T avg -U.

[0009] The specific implementation method of generating the evaporation boat temperature adjustment instruction according to the temperature analysis situation is: collecting the input current I, voltage V corresponding to different evaporation temperatures in the historical operation data and the stable working temperature T actually reached by the evaporation boat; cleaning the data, including removing abnormal points, filling missing values ​​by interpolation, and synchronizing the current, voltage and corresponding temperature data in time; Based on the sorted data, a temperature-current-voltage relationship model is constructed using a mathematical fitting method: using a linear regression analysis model, the current I, voltage V and temperature T satisfy T=k1·I+k2·V+k3; where k1 represents the influence coefficient of current on temperature; k2 represents the influence coefficient of voltage on temperature; k3 is the bias constant; Use the cleaned data for regression analysis and calculate the model parameters: Use the least squares method to minimize the fitting error Σ N i=1 (T i -(k1·I i +k2·V i +k3)) 2 , and solve for k1, k2, and k3; where N represents the total number of collected data points; i∈{1,2,...,N}, T i , I i , V i Respectively represent the temperature, current, and voltage of the i-th data point; Taking into account the thermal inertia of the evaporation boat material, the heat conduction characteristics and the timeliness of the system response, the adjustment sensitivity coefficients α and β are set; α refers to the sensitivity of the current adjustment to the temperature change, indicating the response of the current to the temperature change; β refers to the sensitivity of the voltage adjustment to the temperature change, indicating the response of the voltage to the temperature change; α and β are set by the operator; According to the difference D between the preset evaporation temperature and the real-time temperature average value, combined with the established temperature-current-voltage relationship model and the adjustment sensitivity coefficient, the current ΔI and voltage ΔV required to be adjusted are calculated: According to the difference D, when the temperature change is caused by the change of current, the relationship between current and temperature is determined by k1, and the sensitivity coefficient α is introduced to represent the responsiveness of current to temperature change, and ΔI=(D×α) / k1 is obtained; When the temperature change is caused by the change of voltage, the relationship between voltage and temperature is determined by k2, and the sensitivity coefficient β is introduced to represent the responsiveness of voltage to temperature change, ΔV=(D×β) / k2; The calculated current regulation amount ΔI and voltage regulation amount ΔV are encapsulated into a standard instruction set. The instruction content covers the regulation object, clearly indicating whether it is current or voltage regulation; the regulation direction, increase or decrease; the specific value of the regulation amount and the execution timing; and the instruction is sent to the evaporation boat temperature regulation system.

[0010] The evaporation boat temperature regulation system is used to adjust the current and voltage according to the received instructions.

[0011] The evaporation boat temperature regulation system uses a gradient adjustment scheme to adjust the current and voltage according to the received instructions: The operator sets the gradient adjustment curve in the temperature control system in advance according to the material characteristics and size of the evaporation boat and the requirements of the evaporated substance; the curve describes the change of temperature over time during the temperature adjustment process, and consists of multiple temperature adjustment stages, each stage has a different rate and target temperature; The entire temperature regulation process is divided into several stages, each of which corresponds to a specific temperature range and temperature regulation rate; for each stage, the required current and voltage values ​​are determined according to the curve, and these parameters are stored in the configuration table of the temperature regulation system; during operation, the system automatically obtains the corresponding current and voltage parameters from the configuration table for regulation according to the current temperature value and the temperature regulation stage; When the evaporation boat reaches the preset temperature, the output power is maintained.

[0012] The operation interface is used to intervene in the system in combination with manual observation.

[0013] The operation interface allows the operator to set the extreme difference threshold A, error coefficient k, preset evaporation temperature U, sensitivity coefficients α, β, and gradient adjustment curve; and allows intervention in any abnormal situation in combination with manual observation.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention adopts multiple temperature sensing TC probes to be contact-installed on the bottom of the evaporation boat, which can obtain the temperature information of the evaporation boat in real time and at multiple points, and can more comprehensively and accurately reflect the actual temperature distribution of the evaporation boat compared with the traditional single temperature sensor monitoring; the precise temperature control and rapid adjustment response of the present invention can enable the evaporation boat to reach the predetermined temperature faster and maintain stability, reducing the waiting time and temperature fluctuations during the heating process, thereby improving production efficiency; the present invention can reduce the manual observation time and avoid the damage of thermal radiation to the human eye; the temperature stability can effectively reduce the occurrence of aluminum splashing. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of an evaporation boat control system of the present invention; Figure 2 The figure is a schematic diagram of an operation interface of an evaporation boat control system of the present invention. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] Example: Figure 1-Figure 2 As shown, the present invention provides a technical solution, an evaporation boat control system, which includes an evaporation boat temperature real-time monitoring device, a control system, an evaporation boat temperature adjustment system and an operation interface; The evaporation boat temperature real-time monitoring device is used to monitor the evaporation boat temperature in real time; the control system is used to calculate and analyze the temperature collected by the evaporation boat temperature real-time monitoring device and issue temperature adjustment instructions to the evaporation boat temperature adjustment system according to the analysis results; the evaporation boat temperature adjustment system is used to adjust the current and voltage according to the received instructions; the operation interface is used for the staff to intervene in the system error; The evaporation boat temperature real-time detection device is connected to the control system; the control system is connected to the evaporation boat temperature adjustment system; the evaporation boat temperature adjustment system is connected to the operation interface.

[0018] The evaporation boat temperature real-time monitoring device includes a plurality of temperature sensing TC probes; The temperature sensing TC probe is installed at the bottom of the evaporation boat in a contact manner; the temperature sensing TC probe is connected to the control system; The temperatures collected by the TC probe are expressed as: [T1, T2, ..., T n ]; where n represents the number of TC probes, T1~T n They represent the temperatures collected by the 1st to nth TC probes respectively.

[0019] The control system includes a temperature analysis module and a temperature adjustment module; The temperature analysis module is used to calculate and analyze the temperature collected by the evaporation boat temperature real-time monitoring device; the temperature adjustment module is used to control the system to generate an evaporation boat temperature adjustment instruction according to the temperature analysis situation.

[0020] The specific implementation method of calculating and analyzing the temperature collected by the evaporation boat temperature real-time monitoring device is: for the temperatures T1-T collected by different TC probes n , get the maximum temperature T max and minimum value T min ; Calculate the range ΔT=T max -T min ; Among them, T max ,T min ∈{T1,T2,...,T n}; Set a threshold value A; when ΔT>A, it is considered that the temperature difference is too large, interlocking is performed, and an alarm is issued; When ΔT≤A, calculate the average temperature: T avg =(T1+T2+...+T n ) / n; The threshold value A is determined by: obtaining historical temperature data of the evaporation boat under normal operating conditions for a number of periods of time including multiple cycles or batches; cleaning the historical temperature data; calculating the range of the temperature data at each time point for the cleaned historical temperature data; calculating the mean M and standard deviation S of the range; A=M+k·S; wherein k is an integer representing an error coefficient, which is manually set; Obtain the quality standard data produced under different evaporation temperature settings in the previous production process from the quality inspection report; analyze the relationship between quality and temperature to obtain the evaporation temperature that optimizes the product quality and makes one or more product performances meet fixed conditions; set the evaporation temperature according to demand, expressed as U; Calculate the difference D between the preset evaporation temperature and the real-time temperature: D = T avg -U.

[0021] The specific implementation method of generating the evaporation boat temperature adjustment instruction according to the temperature analysis situation is: collecting the input current I, voltage V corresponding to different evaporation temperatures in the historical operation data and the stable working temperature T actually reached by the evaporation boat; cleaning the data, including removing abnormal points, filling missing values ​​by interpolation, and synchronizing the current, voltage and corresponding temperature data in time; Based on the sorted data, a temperature-current-voltage relationship model is constructed using a mathematical fitting method: using a linear regression analysis model, the current I, voltage V and temperature T satisfy T=k1·I+k2·V+k3; where k1 represents the influence coefficient of current on temperature; k2 represents the influence coefficient of voltage on temperature; k3 is the bias constant; Use the cleaned data for regression analysis and calculate the model parameters: Use the least squares method to minimize the fitting error Σ N i=1 (T i -(k1·I i +k2·V i +k3)) 2 , and solve for k1, k2, and k3; where N represents the total number of collected data points; i∈{1,2,...,N}, T i , I i , V i Respectively represent the temperature, current, and voltage of the i-th data point; Taking into account the thermal inertia of the evaporation boat material, the heat conduction characteristics and the timeliness of the system response, the adjustment sensitivity coefficients α and β are set; α refers to the sensitivity of the current adjustment to the temperature change, indicating the response of the current to the temperature change; β refers to the sensitivity of the voltage adjustment to the temperature change, indicating the response of the voltage to the temperature change; α and β are set by the operator; According to the difference D between the preset evaporation temperature and the real-time temperature average value, combined with the established temperature-current-voltage relationship model and the adjustment sensitivity coefficient, the current ΔI and voltage ΔV required to be adjusted are calculated: According to the difference D, when the temperature change is caused by the change of current, the relationship between current and temperature is determined by k1, and the sensitivity coefficient α is introduced to represent the responsiveness of current to temperature change, and ΔI=(D×α) / k1 is obtained; When the temperature change is caused by the change of voltage, the relationship between voltage and temperature is determined by k2, and the sensitivity coefficient β is introduced to represent the responsiveness of voltage to temperature change, ΔV=(D×β) / k2; The calculated current regulation amount ΔI and voltage regulation amount ΔV are encapsulated into a standard instruction set. The instruction content covers the regulation object, clearly indicating whether it is current or voltage regulation; the regulation direction, increase or decrease; the specific value of the regulation amount and the execution timing; and the instruction is sent to the evaporation boat temperature regulation system.

[0022] The evaporation boat temperature regulation system is used to adjust the current and voltage according to the received instructions.

[0023] The evaporation boat temperature regulation system uses a gradient adjustment scheme to adjust the current and voltage according to the received instructions: The operator sets the gradient adjustment curve in the temperature control system in advance according to the material characteristics and size of the evaporation boat and the requirements of the evaporated substance; the curve describes the change of temperature over time during the temperature adjustment process, and consists of multiple temperature adjustment stages, each stage has a different rate and target temperature; The entire temperature regulation process is divided into several stages, each of which corresponds to a specific temperature range and temperature regulation rate; for each stage, the required current and voltage values ​​are determined according to the curve, and these parameters are stored in the configuration table of the temperature regulation system; during operation, the system automatically obtains the corresponding current and voltage parameters from the configuration table for regulation according to the current temperature value and the temperature regulation stage; When the evaporation boat reaches the preset temperature, the output power is maintained.

[0024] The operation interface is used to intervene in the system in combination with manual observation.

[0025] The operation interface allows the operator to set the extreme difference threshold A, error coefficient k, preset evaporation temperature U, sensitivity coefficients α, β, and gradient adjustment curve; and allows intervention in any abnormal situation in combination with manual observation.

[0026] In this embodiment: An evaporation boat control system, the system comprising an evaporation boat temperature real-time monitoring device, a control system, an evaporation boat temperature adjustment system and an operation interface; The evaporation boat temperature real-time monitoring device is used to monitor the evaporation boat temperature in real time; the control system is used to calculate and analyze the temperature collected by the evaporation boat temperature real-time monitoring device and issue temperature adjustment instructions to the evaporation boat temperature adjustment system according to the analysis results; the evaporation boat temperature adjustment system is used to adjust the current and voltage according to the received instructions; the operation interface is used for the staff to intervene in the system error; The evaporation boat temperature real-time detection device is connected to the control system; the control system is connected to the evaporation boat temperature adjustment system; the evaporation boat temperature adjustment system is connected to the operation interface.

[0027] The evaporation boat temperature real-time monitoring device includes three temperature sensing TC probes; The temperature sensing TC probe is installed at the bottom of the evaporation boat in a contact manner; the temperature sensing TC probe is connected to the control system; The temperatures collected by the TC probe are expressed as: [T1=400℃, T2=410℃, T3=395℃].

[0028] The control system includes a temperature analysis module and a temperature adjustment module; The temperature analysis module is used to calculate and analyze the temperature collected by the evaporation boat temperature real-time monitoring device; the temperature adjustment module is used to control the system to generate an evaporation boat temperature adjustment instruction according to the temperature analysis situation.

[0029] The specific implementation method of calculating and analyzing the temperature collected by the evaporation boat temperature real-time monitoring device is: for the temperatures T1-T3 collected by different TC probes, the maximum temperature T max =410℃ and minimum value T min =395℃; calculated range ΔT=T max -T min =15℃; ΔT≤A, calculate the average temperature: T avg =(T1+T2+T3) / 3=(400+410+395) / 3≈401.67℃; The threshold value A is determined by: obtaining historical temperature data of the evaporation boat under normal operation for a period of time including multiple cycles or batches; cleaning the historical temperature data; calculating the range of the temperature data at each time point for the cleaned historical temperature data; calculating the mean value M=10°C and the standard deviation S=3°C of the range; A=M+k·S=10+2×3=16°C; wherein k is manually set to 2; Obtain the quality standard data produced under different evaporation temperature settings in the previous production process from the quality inspection report; analyze the relationship between quality and temperature to obtain the evaporation temperature that optimizes the product quality and makes one or more product performances meet fixed conditions; set the evaporation temperature as required, expressed as U=600℃; Calculate the difference D between the preset evaporation temperature and the real-time temperature: D = T avg -U=401.67-600=-198.33℃.

[0030] The specific implementation method of generating the evaporation boat temperature adjustment instruction according to the temperature analysis situation is: collecting the input current and voltage corresponding to different evaporation temperatures in the historical operation data and the actual stable working temperature reached by the evaporation boat; cleaning the data; Based on the sorted data, a temperature-current-voltage relationship model was constructed using mathematical fitting methods: through linear regression analysis, based on historical data fitting, it was concluded that current I, voltage V and temperature T satisfy T=5·I+3·V+100; Taking into account the thermal inertia of the evaporation boat material, the heat conduction characteristics and the timeliness of the system response, the adjustment sensitivity coefficients α=2 and β=1.5 are set; α is associated with current regulation, and β is associated with voltage regulation; According to the difference D between the preset evaporation temperature and the real-time temperature average value, combined with the established temperature-current-voltage relationship model and the adjustment sensitivity coefficient, the current ΔI and voltage ΔV required to be adjusted are calculated: According to the difference D, ΔI=(D×α) / k1=-79.33, ΔV=(D×β) / k2=-99.17 are obtained; The calculated current regulation amount ΔI and voltage regulation amount ΔV are encapsulated into a standard instruction set. The instruction content covers the regulation object, clearly indicating whether it is current or voltage regulation; the regulation direction, increase or decrease; the specific value of the regulation amount and the execution timing; and the instruction is sent to the evaporation boat temperature regulation system.

[0031] The evaporation boat temperature regulation system is used to adjust the current and voltage according to the received instructions.

[0032] The evaporation boat temperature regulation system uses a gradient adjustment scheme to adjust the current and voltage according to the received instructions: The operator sets the gradient adjustment curve in the temperature control system in advance according to the material characteristics and size of the evaporation boat and the requirements of the evaporated substance; the curve describes the change of temperature over time during the temperature adjustment process, and consists of multiple temperature adjustment stages, each stage has a different rate and target temperature; The entire temperature regulation process is divided into several stages, each of which corresponds to a specific temperature range and temperature regulation rate; for each stage, the required current and voltage values ​​are determined according to the curve, and these parameters are stored in the configuration table of the temperature regulation system; during operation, the system automatically obtains the corresponding current and voltage parameters from the configuration table for regulation according to the current temperature value and the temperature regulation stage; When the evaporation boat reaches the preset temperature, the output power is maintained.

[0033] The operation interface is used to intervene in the system in combination with manual observation.

[0034] The operation interface allows the operator to set the extreme difference threshold A, error coefficient k, preset evaporation temperature U, sensitivity coefficients α, β, and gradient adjustment curve; and allows intervention in any abnormal situation in combination with manual observation.

[0035] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. An evaporation boat control system, characterized in that: The system includes a real-time monitoring device for the evaporation boat temperature, a control system, an evaporation boat temperature adjustment system and an operation interface; The evaporation boat temperature real-time monitoring device is used to monitor the evaporation boat temperature in real time; the control system is used to calculate and analyze the temperature collected by the evaporation boat temperature real-time monitoring device and issue temperature adjustment instructions to the evaporation boat temperature adjustment system according to the analysis results; the evaporation boat temperature adjustment system is used to adjust the current and voltage according to the received instructions; the operation interface is used for the staff to intervene in the system error; The evaporation boat temperature real-time detection device is connected to the control system; the control system is connected to the evaporation boat temperature adjustment system; the evaporation boat temperature adjustment system is connected to the operation interface.

2. The evaporation boat control system according to claim 1, characterized in that: The evaporation boat temperature real-time monitoring device includes a plurality of temperature sensing TC probes; The temperature sensing TC probe is installed at the bottom of the evaporation boat in a contact manner; the temperature sensing TC probe is connected to the control system; The temperatures collected by the TC probe are expressed as: [T1, T2, ..., T n ]; where n represents the number of TC probes, T1~T n They represent the temperatures collected by the 1st to nth TC probes respectively.

3. The evaporation boat control system according to claim 2, characterized in that: The control system includes a temperature analysis module and a temperature adjustment module; The temperature analysis module is used to calculate and analyze the temperature collected by the evaporation boat temperature real-time monitoring device; the temperature adjustment module is used to control the system to generate an evaporation boat temperature adjustment instruction according to the temperature analysis situation.

4. The evaporation boat control system according to claim 3, characterized in that: The specific implementation method of calculating and analyzing the temperature collected by the evaporation boat temperature real-time monitoring device is: For the temperatures T1~T collected by different TC probes n , get the maximum temperature T max and minimum value T min ; Calculate the range ΔT=T max -T min ; Among them, T max ,T min ∈{T1,T2,...,T n }; Set a threshold value A; when ΔT>A, it is considered that the temperature difference is too large, interlocking is performed, and an alarm is issued; When ΔT≤A, calculate the average temperature: T avg =(T1+T2+...+T n ) / n; The threshold value A is determined by: obtaining historical temperature data of the evaporation boat under normal operating conditions for a number of periods of time including multiple cycles or batches; cleaning the historical temperature data; calculating the range of the temperature data at each time point for the cleaned historical temperature data; calculating the mean M and standard deviation S of the range; A=M+k·S; wherein k is an integer representing an error coefficient, which is manually set; Obtain the quality standard data produced under different evaporation temperature settings in the previous production process from the quality inspection report; analyze the relationship between quality and temperature to obtain the evaporation temperature that optimizes the product quality and makes one or more product performances meet fixed conditions; set the evaporation temperature according to demand, expressed as U; Calculate the difference D between the preset evaporation temperature and the real-time temperature: D = T avg -U.

5. The evaporation boat control system according to claim 4, characterized in that: The specific implementation method of generating the evaporation boat temperature adjustment instruction according to the temperature analysis situation is: collecting the input current I, voltage V corresponding to different evaporation temperatures in the historical operation data and the stable working temperature T actually reached by the evaporation boat; cleaning the data, including removing abnormal points, filling missing values ​​by interpolation, and synchronizing the current, voltage and corresponding temperature data in time; Based on the sorted data, a temperature-current-voltage relationship model is constructed using a mathematical fitting method: using a linear regression analysis model, the current I, voltage V and temperature T satisfy T=k1·I+k2·V+k3; where k1 represents the influence coefficient of current on temperature; k2 represents the influence coefficient of voltage on temperature; k3 is the bias constant; Use the cleaned data for regression analysis and calculate the model parameters: Use the least squares method to minimize the fitting error Σ N i=1 (T i -(k1·I i +k2·V i +k3)) 2 , and solve for k1, k2, and k3; where N represents the total number of collected data points; i∈{1,2,...,N}, T i ,I i 、V i Respectively represent the temperature, current, and voltage of the i-th data point; Taking into account the thermal inertia of the evaporation boat material, the heat conduction characteristics and the timeliness of the system response, the adjustment sensitivity coefficients α and β are set; α refers to the sensitivity of the current adjustment to the temperature change, indicating the response of the current to the temperature change; β refers to the sensitivity of the voltage adjustment to the temperature change, indicating the response of the voltage to the temperature change; α and β are set by the operator; According to the difference D between the preset evaporation temperature and the real-time temperature average value, combined with the established temperature-current-voltage relationship model and the adjustment sensitivity coefficient, the current ΔI and voltage ΔV required to be adjusted are calculated: According to the difference D, when the temperature change is caused by the change of current, the relationship between current and temperature is determined by k1, and the sensitivity coefficient α is introduced to represent the responsiveness of current to temperature change, and ΔI=(D×α) / k1 is obtained; When the temperature change is caused by the change of voltage, the relationship between voltage and temperature is determined by k2, and the sensitivity coefficient β is introduced to represent the responsiveness of voltage to temperature change, ΔV=(D×β) / k2; The calculated current regulation amount ΔI and voltage regulation amount ΔV are packaged into a standard instruction set; and the instructions are sent to the evaporation boat temperature regulation system.

6. The evaporation boat control system according to claim 5, characterized in that: The evaporation boat temperature regulation system is used to adjust the current and voltage according to the received instructions.

7. The evaporation boat control system according to claim 6, characterized in that: The evaporation boat temperature regulation system uses a gradient adjustment scheme to adjust the current and voltage according to the received instructions: The operator sets the gradient adjustment curve in the temperature control system in advance according to the material characteristics and size of the evaporation boat and the requirements of the evaporated substance; the curve describes the change of temperature over time during the temperature adjustment process, and consists of multiple temperature adjustment stages, each stage has a different rate and target temperature; The entire temperature regulation process is divided into several stages, each stage corresponds to a specific temperature range and temperature regulation rate; For each stage, the required current and voltage values ​​are determined according to the curve and these parameters are stored in the configuration table of the temperature regulation system; During operation, the system automatically obtains the corresponding current and voltage parameters from the configuration table for adjustment according to the current temperature value and the temperature adjustment stage; When the evaporation boat reaches the preset temperature, the output power is maintained.

8. The evaporation boat control system according to claim 7, characterized in that: The operation interface is used to intervene in the system in combination with manual observation.

9. The evaporation boat control system according to claim 8, characterized in that: The operation interface allows the operator to set the extreme difference threshold A, error coefficient k, preset evaporation temperature U, sensitivity coefficients α, β, and gradient adjustment curve; and allows intervention in any abnormal situation in combination with manual observation.

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