Gas path applied to semiconductor vapor deposition

Abstract

According to the gas circuit applied to semiconductor vapor deposition, an interlocking system is additionally arranged on hardware, so that dangerous gases are isolated from one another, and the production safety is greatly improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductors, and in particular to the field of semiconductor vapor deposition. Background Art

[0002] In the current market environment, interlocking mechanisms for hazardous gases in semiconductor vapor deposition gas circuits are often only set up at the software level, but there are obvious deficiencies in the hardware, and there is no corresponding interlocking function.

[0003] In view of this, this application is proposed.

[0004] The present invention has specially created a gas interlock circuit specifically used at the hardware level. Through this innovative measure, a crucial protective barrier has been successfully built on the hardware architecture. This barrier can still function effectively in the event of human error or when the software interlock function fails for some reason, thereby effectively avoiding a series of serious consequences that may be caused by gas-related operational errors, greatly reducing the risk of casualties and the possibility of property losses, and providing more reliable safety protection for related production operations and other activities. Summary of the invention

[0005] The present application provides a gas circuit applied to semiconductor vapor deposition. The present invention designs a gas circuit interlocking system for dangerous gases, which greatly improves safety.

[0006] The present application provides a gas circuit for semiconductor vapor deposition, comprising:

[0007] It includes a gas source, an interlock system and a valve island connected in sequence;

[0008] The gas source includes a first O2 branch, a second O2 branch, a C3H6 branch, a C2H2 branch and a NF3 branch;

[0009] The first O2 branch includes a first O2 source and a first switch valve;

[0010] The second O2 branch includes a second O2 source and a second switch valve;

[0011] The C3H6 branch includes a C3H6 source and a third switch valve;

[0012] The C2H2 branch includes a C2H2 source and a fourth switch valve;

[0013] The NF3 branch includes a NF3 source and a fifth switch valve;

[0014] Wherein, the first switch valve, the second switch valve, the third switch valve, the fourth switch valve and the fifth switch valve are two-way pneumatic diaphragm valves; the two-way pneumatic diaphragm valves include a control position, an input port and an output port;

[0015] The interlocking system includes twelve control modules, namely a first control module, a second control module, a third control module, a fourth control module, a fifth control module, a sixth control module, a seventh control module, an eighth control module, a ninth control module, a tenth control module, an eleventh control module and a twelfth control module;

[0016] The first control module includes a first air-controlled valve and a first three-way pipe;

[0017] The second control module includes a second gas-controlled valve;

[0018] The third control module includes a third air-controlled valve and a second three-way pipe;

[0019] The fourth control module comprises a fourth gas-controlled valve;

[0020] The fifth control module comprises a fifth air control valve and a third three-way pipe;

[0021] The sixth control module comprises a sixth gas control valve;

[0022] The seventh control module comprises a seventh air control valve and a fourth three-way pipe;

[0023] The eighth control module comprises an eighth gas control valve and a fifth three-way pipe;

[0024] The ninth control module comprises a ninth air control valve and a sixth three-way pipe;

[0025] The tenth control module comprises a tenth gas control valve and a seventh three-way pipe;

[0026] The eleventh control module comprises an eleventh air control valve and an eighth three-way pipe;

[0027] The twelfth control module includes a twelfth air control valve and a ninth three-way pipe;

[0028] The first air-controlled valve, the second air-controlled valve, the third air-controlled valve, the fourth air-controlled valve, the fifth air-controlled valve, the sixth air-controlled valve, the seventh air-controlled valve, the eighth air-controlled valve, the ninth air-controlled valve, the tenth air-controlled valve, the eleventh air-controlled valve and the twelfth air-controlled valve are normally open pilot air-controlled valves; the normally open pilot air-controlled valves include an input end, an air control end and an output end;

[0029] The input ends of the first three-way pipe, the second three-way pipe, the third three-way pipe, the fourth three-way pipe and the fifth three-way pipe are respectively connected to the valve island;

[0030] One output end of the first three-way pipe is connected to the air control ends of the eleventh air control valve and the twelfth air control valve respectively; the other output end is connected to the input end of the first air control valve;

[0031] One output end of the second three-way pipe is connected to the air control ends of the seventh air control valve and the eighth air control valve respectively; the other output end is connected to the input end of the third air control valve;

[0032] One output end of the third three-way pipe is connected to the air control ends of the ninth air control valve and the tenth air control valve respectively; the other output end is connected to the input end of the fifth air control valve;

[0033] One output end of the fourth three-way pipe is connected to the air control end of the third air control valve; the other output end is connected to the input end of the seventh air control valve;

[0034] One output end of the fifth three-way pipe is connected to the air control end of the fourth air control valve; the other output end is connected to the input end of the eighth air control valve;

[0035] One output end of the sixth three-way pipe is connected to the air control end of the fifth air control valve; the other output end is connected to the output end of the seventh air control valve; and the input end is connected to the input end of the ninth air control valve;

[0036] One output end of the seventh three-way pipe is connected to the air control end of the sixth air control valve; the other output end is connected to the input end of the tenth air control valve; and the input end is connected to the output end of the eighth air control valve;

[0037] One output end of the eighth three-way pipe is connected to the air control end of the first air control valve; the other output end is connected to the input end of the eleventh air control valve; and the input end is connected to the output end of the ninth air control valve;

[0038] One output end of the ninth three-way pipe is connected to the air control end of the second air control valve; the other output end is connected to the input end of the twelfth air control valve; and the input end is connected to the output end of the tenth air control valve;

[0039] The output end of the second gas-controlled valve is connected to the second switch valve of the second O2 branch;

[0040] The output end of the fourth gas control valve is connected to the first switch valve of the first O2 path;

[0041] The output end of the sixth gas-controlled valve is connected to the fifth switch valve of the NF3 branch;

[0042] The output end of the eleventh gas-controlled valve is connected to the third switch valve of the C2H2 branch;

[0043] The output end of the twelfth air-controlled valve is connected to the fourth switch valve of the C3H6 branch;

[0044] The output end of the first air-controlled valve is connected to the input end of the second air-controlled valve;

[0045] The output end of the third air-controlled valve is connected to the input end of the fourth air-controlled valve;

[0046] The output end of the fifth air-controlled valve is connected to the input end of the sixth air-controlled valve;

[0047] The output end of the seventh air-controlled valve is connected to the input end of the ninth air-controlled valve.

[0048] Further, the output end of the second gas-controlled valve is connected to the control position of the second switch valve of the second O2 branch;

[0049] The output end of the fourth gas control valve is connected to the control position of the first switch valve of the first O2 path;

[0050] The output end of the sixth gas-controlled valve is connected to the control position of the fifth switch valve of the NF3 branch;

[0051] The output end of the eleventh gas-controlled valve is connected to the control position of the third switch valve of the C2H2 branch;

[0052] The output end of the twelfth air-controlled valve is connected to the control position of the fourth switch valve of the C3H6 branch.

[0053] Furthermore, the first O2 branch also includes a three-way pneumatic diaphragm valve, a filter element, a two-way pneumatic diaphragm valve, and a mass flow controller connected in sequence;

[0054] The second O2 branch also includes a three-way pneumatic diaphragm valve, a filter, a two-way pneumatic diaphragm valve, and a mass flow controller connected in sequence;

[0055] The C3H6 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve and a mass flow controller;

[0056] The C2H2 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve and a mass flow controller;

[0057] The NF3 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve and a mass flow controller.

[0058] Further, the first O2 source is connected to the input port of the first switch valve;

[0059] The second O2 source is connected to the input port of the second switch valve;

[0060] The C3H6 source is connected to the input port of the third switch valve;

[0061] The C2H2 source is connected to the input port of the fourth switch valve;

[0062] The NF3 source is connected to the input port of the fifth switching valve.

[0063] Furthermore, it also includes at least one inert gas branch.

[0064] Furthermore, the inert gas is one or more of N2, Ar and He.

[0065] Further, it also includes the thirteenth-way takeover, the eleventh-way takeover and the twelfth-way takeover;

[0066] One output end of the first three-way pipe is connected to the air control ends of the eleventh air-controlled valve and the twelfth air-controlled valve respectively through the thirteenth three-way pipe; one output end of the second three-way pipe is connected to the air control ends of the seventh air-controlled valve and the eighth air-controlled valve respectively through the eleventh three-way pipe; one output end of the third three-way pipe is connected to the air control ends of the ninth air-controlled valve and the tenth air-controlled valve respectively through the twelfth three-way pipe.

[0067] Compared with the prior art, the present invention has the following advantages:

[0068] The gas circuit of the present application has a gas circuit interlocking function in hardware, which greatly improves production safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0069] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0070] Figure 1 Schematic diagram of the gas path structure of this embodiment. DETAILED DESCRIPTION

[0071] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0072] Figure 1 FIG. 2 shows a schematic diagram of the gas path structure of this embodiment. Figure 1As shown, the gas circuit is applied to semiconductor vapor deposition, including: a gas source 01, an interlocking system 02 and a valve island 03; wherein, the gas source 01 includes a first O2 branch (the 13th branch), a second O2 branch (the 4th branch), a NF3 branch (the 2nd branch), a C2H2 branch (the 9th branch), a C3H6 branch (the 7th branch) and multiple inert gas branches (the 1st branch, the 3rd branch, the 5th-6th branch, the 8th branch, the 10th-12th branch) (not shown in the figure).

[0073] Optionally, the inert gas is one or more of nitrogen, argon and helium.

[0074] like Figure 1 As shown, the gas source 01 also includes five switch valves 05, which are respectively denoted as a first switch valve, a second switch valve, a third switch valve, a fourth switch valve and a fifth switch valve.

[0075] The interlocking system 02 includes twelve gas-controlled valves 06, which are respectively denoted as: the first gas-controlled valve ( Figure 1 The second air control valve (G1305-2), the second air control valve (G1305-1), the third air control valve (G0405-2), the fourth air control valve (G0405-1), the fifth air control valve (G0205-2), the sixth air control valve (G0205-2), the seventh air control valve (G0905-3), the eighth air control valve (G0705-3), the ninth air control valve (G0905-2), the tenth air control valve (G0705-2), the eleventh air control valve (G0905-1) and the twelfth air control valve (G0705-1);

[0076] The interlocking system 02 also includes twelve three-way pipes ( Figure 1 ), which are respectively recorded as: the first three-way pipe 021, the second three-way pipe 022, the third three-way pipe 023, the fourth three-way pipe 024, the fifth three-way pipe 025, the sixth three-way pipe 026, the seventh three-way pipe 027, the eighth three-way pipe 028, the ninth three-way pipe 029, the thirteenth three-way pipe 0210, the eleventh three-way pipe 0211 and the twelfth three-way pipe 0212.

[0077] Optionally, the switch valve is a two-way pneumatic diaphragm valve; the two-way pneumatic diaphragm valve includes a control position, an input port and an output port.

[0078] Optionally, the air-controlled valve is a normally open pilot air-controlled valve; the normally open pilot air-controlled valve includes an input end, an air-controlled end and an output end.

[0079] Optionally, the first O2 branch further includes a three-way pneumatic diaphragm valve, a filter element, a two-way pneumatic diaphragm valve, and a mass flow controller connected in sequence;

[0080] The second O2 branch also includes a three-way pneumatic diaphragm valve, a filter, a two-way pneumatic diaphragm valve, and a mass flow controller connected in sequence;

[0081] The C3H6 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve, and a mass flow controller;

[0082] The C2H2 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve, and a mass flow controller;

[0083] The NF3 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve and a mass flow controller.

[0084] Optionally, the first O2 source is connected to the input port of the first switch valve; the second O2 source is connected to the input port of the second switch valve; the C3H6 source is connected to the input port of the third switch valve; the C2H2 source is connected to the input port of the fourth switch valve; and the NF3 source is connected to the input port of the fifth switch valve.

[0085] See again Figure 1 , the connection relationship between the air control valve 06, the three-way pipe, the switch valve 05 and the valve island 03 is:

[0086] The input ends of the first three-way pipe 021, the second three-way pipe 022, the third three-way pipe 023, the fourth three-way pipe 024 and the fifth three-way pipe 025 are respectively connected to the valve island;

[0087] One output end of the first three-way pipe 021 is connected to the air control ends of the eleventh air control valve and the twelfth air control valve respectively; the other output end is connected to the input end of the first air control valve;

[0088] One output end of the second three-way pipe 022 is connected to the air control ends of the seventh air control valve and the eighth air control valve respectively; the other output end is connected to the input end of the third air control valve;

[0089] One output end of the third three-way pipe 023 is connected to the air control ends of the ninth air control valve and the tenth air control valve respectively; the other output end is connected to the input end of the fifth air control valve;

[0090] One output end of the fourth three-way pipe 024 is connected to the air control end of the third air control valve; the other output end is connected to the input end of the seventh air control valve;

[0091] One output end of the fifth three-way pipe 025 is connected to the air control end of the fourth air control valve; the other output end is connected to the input end of the eighth air control valve;

[0092] One output end of the sixth three-way pipe 026 is connected to the air control end of the fifth air control valve; the other output end is connected to the output end of the seventh air control valve; and the input end is connected to the input end of the ninth air control valve;

[0093] One output end of the seventh three-way pipe 027 is connected to the air control end of the sixth air control valve; the other output end is connected to the input end of the tenth air control valve; and the input end is connected to the output end of the eighth air control valve;

[0094] One output end of the eighth three-way pipe 028 is connected to the air control end of the first air control valve; the other output end is connected to the input end of the eleventh air control valve; and the input end is connected to the output end of the ninth air control valve;

[0095] One output end of the ninth three-way pipe 029 is connected to the air control end of the second air control valve; the other output end is connected to the input end of the twelfth air control valve; and the input end is connected to the output end of the tenth air control valve;

[0096] The output end of the second gas-controlled valve is connected to the second switch valve of the second O2 branch;

[0097] The output end of the fourth gas control valve is connected to the first switch valve of the first O2 path;

[0098] The output end of the sixth gas-controlled valve is connected to the fifth switch valve of the NF3 branch;

[0099] The output end of the eleventh gas-controlled valve is connected to the third switch valve of the C2H2 branch;

[0100] The output end of the twelfth air-controlled valve is connected to the fourth switch valve of the C3H6 branch;

[0101] The output end of the first air-controlled valve is connected to the input end of the second air-controlled valve;

[0102] The output end of the third air-controlled valve is connected to the input end of the fourth air-controlled valve;

[0103] The output end of the fifth air-controlled valve is connected to the input end of the sixth air-controlled valve;

[0104] The output end of the seventh air-controlled valve is connected to the input end of the ninth air-controlled valve.

[0105] Optionally, the output end of the second gas-controlled valve is connected to the control position of the second switch valve of the second O2 branch;

[0106] The output end of the fourth gas control valve is connected to the control position of the first switch valve of the first O2 path;

[0107] The output end of the sixth gas-controlled valve is connected to the control position of the fifth switch valve of the NF3 branch;

[0108] The output end of the eleventh gas-controlled valve is connected to the control position of the third switch valve of the C2H2 branch;

[0109] The output end of the twelfth air-controlled valve is connected to the control position of the fourth switch valve of the C3H6 branch.

[0110] The workflow of this embodiment is:

[0111] 1) When the 4th line O2 is to be opened (i.e., the second switch valve is to be opened), first the compressed air comes out from the valve island valve plate through the second three-way pipe 022, and a part of it enters the third air-controlled valve (G0405-2), and then reaches the control position of the second switch valve through the fourth air-controlled valve (G0405-1), thereby opening the second switch valve; the other part enters the air-controlled ends of the seventh air-controlled valve (G0905-3) and the eighth air-controlled valve (G0705-3) through the eleventh three-way pipe 0211, thereby closing the seventh air-controlled valve (G0905-3) and the eighth air-controlled valve (G0705-3), and finally prevents the 4th line O2 and (C3H6\C2H2) from meeting each other, realizes interlocking in hardware, and avoids the risk of explosion.

[0112] 2) When the 13th line O2 is to be opened (i.e., the first switch valve is opened), first the compressed air comes out from the valve island valve plate through the first three-way pipe 021, and a part of it enters the first air-controlled valve (G1305-2), and then reaches the control position of the first switch valve through the second air-controlled valve (G1305-1), thereby opening the first switch valve; the other part enters the air-controlled ends of the 11th air-controlled valve (G0905-1) and the 12th air-controlled valve (G0705-1) through the 13th pipe 0210, thereby closing the 11th air-controlled valve (G0905-1) and the 12th air-controlled valve (G0705-1), and finally prevents the 13th line O2 and (C3H6\C2H2) from meeting each other, realizes interlocking in hardware, and avoids the risk of explosion.

[0113] 3) When the second NF3 is to be opened (i.e., the third switch valve is to be opened), first, the compressed air comes out from the valve island valve plate and passes through the third three-way pipe 023, and then a part of it enters the fifth air-controlled valve (G0205-2), and then passes through the sixth air-controlled valve (G0205-1) to reach the control position of the third switch valve, thereby opening the third switch valve; the other part passes through the twelfth three-way pipe 0212 to reach the control positions of the ninth air-controlled valve (G0905-2) and the tenth air-controlled valve (G0705-2), thereby closing the ninth air-controlled valve (G0905-2) and the tenth air-controlled valve (G0705-2), and finally prevents the second NF3 and (C3H6\C2H2) from meeting each other, realizes interlocking in hardware, and avoids the risk of explosion.

[0114] 4) When the 7th line C3H6 is to be opened (i.e., the 5th switch valve is to be opened), firstly, the compressed air comes out from the valve island valve plate through the 5th three-way pipe 025, and then a part of it enters the 8th air control valve (G0705-3), and then passes through the 7th three-way pipe 027, the 10th air control valve (G0705-2), the 9th three-way pipe 029 and the 12th air control valve (G0705-1) to reach the control position of the 5th switch valve, thereby opening the 5th switch valve. Among them, there is also the 7th three-way pipe 027 and the 12th three-way pipe 029. Part of the compressed gas from the nine-way pipe 029 reaches the gas control ends of the sixth gas control valve (G0205-1) and the second gas control valve (G1305-1), thereby closing the sixth gas control valve (G0205-1) and the second gas control valve (G1305-1); the other part enters the gas control end of the fourth gas control valve (G0405-1), thereby closing the fourth gas control valve, ultimately preventing C3H6 and (O2\NF3) from meeting each other, achieving interlocking in hardware, and avoiding the risk of explosion.

[0115] 5) When the 9th line C2H2 is to be opened (i.e., the fourth switch valve is to be opened), firstly, the compressed air comes out from the valve island valve plate and passes through the fourth three-way pipe 024, and then a part of it enters the seventh air control valve (G0905-3), and then passes through the sixth three-way pipe 026, the ninth air control valve (G0905-2), the eighth three-way pipe 028, and the eleventh air control valve (G0905-1) to reach the control position of the fourth switch valve, thereby opening the fourth switch valve. Among them, there is also the sixth three-way pipe 026 and the eighth three-way pipe 028. Part of the compressed air from pipe 028 enters the air control ends of the fifth air control valve (G0205-2) and the first air control valve (G1305-2), thereby closing the fifth air control valve (G0205-2) and the first air control valve (G1305-2); the other part enters the air control end of the third air control valve (G0405-2), thereby closing the third air control valve (G0405-2), ultimately preventing C2H2 and (O2\NF3) from meeting each other, achieving interlocking in hardware, and avoiding the risk of explosion.

[0116] The "equal" or "same" or "equal" disclosed in the present invention must take into account the distribution of engineering parameters, and the error distribution is within ±30%; the definition of "parallel" of two line segments or two straight lines is that the angle between the two line segments or two straight lines is less than or equal to 45 degrees; the definition of "perpendicular" of two line segments or two straight lines is that the angle between the two line segments or two straight lines is within the range of [60, 120] degrees; the definition of "phase mismatch" also needs to take into account the distribution of engineering parameters, and the error distribution of the degree of mismatch is within ±30%. In addition, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. Without more constraints, an element defined by the phrase "comprising a ..." does not exclude the existence of other identical elements in the process, method, article or apparatus comprising the element.

[0117] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0118] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A gas path for semiconductor vapor deposition, characterized in that: include: It includes a gas source, an interlock system and a valve island connected in sequence; The gas source includes a first O2 branch, a second O2 branch, a C3H6 branch, a C2H2 branch and a NF3 branch; The first O2 branch includes a first O2 source and a first switch valve; The second O2 branch includes a second O2 source and a second switch valve; The C3H6 branch includes a C3H6 source and a third switch valve; The C2H2 branch includes a C2H2 source and a fourth switch valve; The NF3 branch includes a NF3 source and a fifth switch valve; Wherein, the first switch valve, the second switch valve, the third switch valve, the fourth switch valve and the fifth switch valve are two-way pneumatic diaphragm valves; the two-way pneumatic diaphragm valves include a control position, an input port and an output port; The interlocking system includes twelve control modules, namely a first control module, a second control module, a third control module, a fourth control module, a fifth control module, a sixth control module, a seventh control module, an eighth control module, a ninth control module, a tenth control module, an eleventh control module and a twelfth control module; The first control module includes a first air-controlled valve and a first three-way pipe; The second control module includes a second gas-controlled valve; The third control module includes a third air-controlled valve and a second three-way pipe; The fourth control module comprises a fourth gas-controlled valve; The fifth control module comprises a fifth air control valve and a third three-way pipe; The sixth control module comprises a sixth gas control valve; The seventh control module comprises a seventh air control valve and a fourth three-way pipe; The eighth control module comprises an eighth gas control valve and a fifth three-way pipe; The ninth control module comprises a ninth air control valve and a sixth three-way pipe; The tenth control module comprises a tenth gas control valve and a seventh three-way pipe; The eleventh control module comprises an eleventh air control valve and an eighth three-way pipe; The twelfth control module includes a twelfth air control valve and a ninth three-way pipe; The first air-controlled valve, the second air-controlled valve, the third air-controlled valve, the fourth air-controlled valve, the fifth air-controlled valve, the sixth air-controlled valve, the seventh air-controlled valve, the eighth air-controlled valve, the ninth air-controlled valve, the tenth air-controlled valve, the eleventh air-controlled valve and the twelfth air-controlled valve are normally open pilot air-controlled valves; the normally open pilot air-controlled valves include an input end, an air control end and an output end; The input ends of the first three-way pipe, the second three-way pipe, the third three-way pipe, the fourth three-way pipe and the fifth three-way pipe are respectively connected to the valve island; One output end of the first three-way pipe is connected to the air control ends of the eleventh air control valve and the twelfth air control valve respectively; the other output end is connected to the input end of the first air control valve; One output end of the second three-way pipe is connected to the air control ends of the seventh air control valve and the eighth air control valve respectively; the other output end is connected to the input end of the third air control valve; One output end of the third three-way pipe is connected to the air control ends of the ninth air control valve and the tenth air control valve respectively; the other output end is connected to the input end of the fifth air control valve; One output end of the fourth three-way pipe is connected to the air control end of the third air control valve; the other output end is connected to the input end of the seventh air control valve; One output end of the fifth three-way pipe is connected to the air control end of the fourth air control valve; the other output end is connected to the input end of the eighth air control valve; One output end of the sixth three-way pipe is connected to the air control end of the fifth air control valve; the other output end is connected to the output end of the seventh air control valve; and the input end is connected to the input end of the ninth air control valve; One output end of the seventh three-way pipe is connected to the air control end of the sixth air control valve; the other output end is connected to the input end of the tenth air control valve; and the input end is connected to the output end of the eighth air control valve; One output end of the eighth three-way pipe is connected to the air control end of the first air control valve; the other output end is connected to the input end of the eleventh air control valve; and the input end is connected to the output end of the ninth air control valve; One output end of the ninth three-way pipe is connected to the air control end of the second air control valve; the other output end is connected to the input end of the twelfth air control valve; and the input end is connected to the output end of the tenth air control valve; The output end of the second gas-controlled valve is connected to the second switch valve of the second O2 branch; The output end of the fourth gas control valve is connected to the first switch valve of the first O2 path; The output end of the sixth gas-controlled valve is connected to the fifth switch valve of the NF3 branch; The output end of the eleventh gas-controlled valve is connected to the third switch valve of the C2H2 branch; The output end of the twelfth air-controlled valve is connected to the fourth switch valve of the C3H6 branch; The output end of the first air-controlled valve is connected to the input end of the second air-controlled valve; The output end of the third air-controlled valve is connected to the input end of the fourth air-controlled valve; The output end of the fifth air-controlled valve is connected to the input end of the sixth air-controlled valve; The output end of the seventh air-controlled valve is connected to the input end of the ninth air-controlled valve.

2. The gas circuit according to claim 1, characterized in that: The output end of the second gas-controlled valve is connected to the control position of the second switch valve of the second O2 branch; The output end of the fourth gas control valve is connected to the control position of the first switch valve of the first O2 path; The output end of the sixth gas-controlled valve is connected to the control position of the fifth switch valve of the NF3 branch; The output end of the eleventh gas-controlled valve is connected to the control position of the third switch valve of the C2H2 branch; The output end of the twelfth air-controlled valve is connected to the control position of the fourth switch valve of the C3H6 branch.

3. The gas circuit according to claim 1, characterized in that: The first O2 branch also includes a three-way pneumatic diaphragm valve, a filter, a two-way pneumatic diaphragm valve, and a mass flow controller connected in sequence; The second O2 branch also includes a three-way pneumatic diaphragm valve, a filter, a two-way pneumatic diaphragm valve, and a mass flow controller connected in sequence; The C3H6 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve and a mass flow controller; The C2H2 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve and a mass flow controller; The NF3 branch also includes a manual diaphragm valve, a filter element, a two-way pneumatic diaphragm valve and a mass flow controller.

4. The gas circuit according to claim 1, characterized in that: The first O2 source is connected to the input port of the first switch valve; The second O2 source is connected to the input port of the second switch valve; The C3H6 source is connected to the input port of the third switch valve; The C2H2 source is connected to the input port of the fourth switch valve; The NF3 source is connected to the input port of the fifth switching valve.

5. The gas circuit according to claim 1, characterized in that: Also included is at least one inert gas branch.

6. The gas circuit according to claim 5, characterized in that: The inert gas is one or more of N2, Ar and He.

7. The gas circuit according to claim 1, characterized in that: It also includes the 13th pass takeover, the 11th pass takeover and the 12th pass takeover; One output end of the first three-way pipe is connected to the air control ends of the eleventh air control valve and the twelfth air control valve respectively through the thirteenth pipe; One output end of the second three-way pipe is connected to the gas control ends of the seventh gas control valve and the eighth gas control valve respectively through the eleventh three-way pipe; An output end of the third three-way connecting pipe is respectively connected to the gas control ends of the ninth gas control valve and the tenth gas control valve through the twelfth three-way connecting pipe.

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