Moving mirror scanning device and spectrograph

Through the coordination of the shaft body, the shaft sleeve, the guide rod and the guide hole, the problem of error in the moving mirror scanning device during movement is solved, and the spectrometer is miniaturized and high-precision translation is achieved.

CN119595103APending Publication Date: 2025-03-11BEIJING BEIFEN RUILI ANALYTICAL INSTR GROUP
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Patent Information

Application Number
CN202411653123.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-18
Publication Date
2025-03-11

AI Technical Summary

Technical Problem

The moving mirror scanning device may undergo radial offset or rotation during movement, affecting the signal-to-noise ratio and repeatability of the Fourier infrared spectrometer, and it is difficult for the prior art to miniaturize the spectrometer.

Method used

Through the coordination of the shaft body and the sleeve and the coordination of the guide rod and the guide hole, the error during translation of the moving mirror is limited, the stability and accuracy of the moving mirror are ensured, and the spectrometer is miniaturized.

Benefits of technology

It improves the translation accuracy and stability of the moving mirror scanning device, reduces the volume of the spectrometer, and meets the miniaturization needs of the spectrometer.

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Abstract

The invention relates to a moving mirror scanning device and a spectrometer. The moving mirror scanning device comprises: a support member comprising: a support table provided with at least two guide holes; the shaft body is arranged on one end face of the supporting table; the movable mirror is arranged on the other end face of the supporting table; the at least two guide rods respectively penetrate into the guide holes; the shaft body penetrates through the shaft sleeve; and the driver is connected with the shaft body and can drive the supporting piece to translate. According to the moving mirror scanning device, through the cooperation of the shaft body and the shaft sleeve and the cooperation of the guide rod and the guide hole, the error during the translation of the moving mirror is limited, the stability is good, the precision is high, and the miniaturization of a spectrograph is convenient to realize.
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Description

Technical Field

[0001] The present application relates to the field of detection equipment, and in particular to a moving mirror scanning device and a spectrometer. Background Art

[0002] The moving mirror scanning device is the core component of the Fourier infrared spectrometer. The Fourier infrared spectrometer uses the continuous reciprocating scanning of the moving mirror scanning device to obtain the spectrum. The accuracy of the moving mirror scanning device's movement and the alignment of the direction determine the performance of the Fourier infrared spectrometer, such as the signal-to-noise ratio and repeatability. When the moving mirror is a plane mirror, the moving mirror may deviate or rotate radially during movement, which will affect the interference signal and thus affect the performance of the spectrometer.

[0003] In order to improve the performance of the spectrometer, there are currently two commonly used methods:

[0004] One method is to use a cubic corner mirror to replace the plane mirror, and use the optical properties of the cubic corner mirror to optically compensate for the tilt, lateral shift and other errors of the reflector, thereby ensuring that the optical path of the spectrometer is always aligned. However, the cubic corner mirror is large in size, making it difficult to miniaturize the spectrometer.

[0005] The other is to use a dynamic collimation optical system to achieve real-time calibration of the posture of the moving mirror or the fixed mirror to always ensure the collimation of the optical path. The dynamic collimation optical system increases the size of the spectrometer, making it difficult to miniaturize the spectrometer. Summary of the invention

[0006] Based on the above problems, the present application provides a moving mirror scanning device and a spectrometer, which have a simple structure and are easy to miniaturize the spectrometer.

[0007] In a first aspect, the present application provides a moving mirror scanning device, comprising:

[0008] Support parts, including:

[0009] The support platform is provided with at least two guide holes;

[0010] A shaft body, arranged on an end surface of the support platform;

[0011] A moving mirror, arranged on the other end surface of the support platform;

[0012] At least two guide rods are respectively inserted into the guide holes;

[0013] A shaft sleeve, through which the shaft body passes;

[0014] A driver is connected to the shaft, and the driver can drive the support member to translate.

[0015] According to some embodiments of the present application, the travel of the moving mirror is 2 to 4 mm.

[0016] According to some embodiments of the present application, when the moving mirror is translated to the maximum stroke, the radial displacement of the moving mirror is ≤1 micron, and the rotation of the moving mirror is ≤20 arc seconds.

[0017] According to some embodiments of the present application, the surfaces of the shaft body and the sleeve are polished during the processing to ensure the smoothness of the contact surface between the shaft body and the sleeve.

[0018] According to some embodiments of the present application, lubricant is provided between the shaft body and the sleeve and between the guide rod and the hole wall of the guide hole.

[0019] According to some embodiments of the present application, the guide hole extends to the edge of the support platform.

[0020] According to some embodiments of the present application, the contact length between the guide hole and the guide rod is less than 0.5 mm.

[0021] According to some embodiments of the present application, the end surface of the support platform on which the moving mirror is mounted is provided with a groove that is compatible with the moving mirror.

[0022] In a second aspect, the present application provides a spectrometer, comprising:

[0023] A moving mirror scanning device as described above;

[0024] A base, wherein the moving mirror scanning device is arranged on the base.

[0025] According to some embodiments of the present application, the base includes:

[0026] A beam splitter mounting portion, used for mounting a beam splitter, wherein the guide rod of the moving mirror scanning device is arranged on the beam splitter mounting portion;

[0027] A sleeve mounting portion, wherein the sleeve of the moving mirror scanning device is arranged on the sleeve mounting portion;

[0028] A driver mounting portion, wherein the driver of the moving mirror scanning device is arranged on the driver mounting portion.

[0029] According to some embodiments of the present application, the bushing mounting portion is provided with a guide rod groove adapted to the guide rod.

[0030] According to some embodiments of the present application, the spectrometer further includes a housing, the length of the housing is 75 to 90 mm, and the width of the housing is 65 to 80 mm.

[0031] The moving mirror scanning device of the present application limits the error of the moving mirror during translation through the cooperation between the shaft body and the shaft sleeve and the cooperation between the guide rod and the guide hole. It has good stability and high precision, and is easy to realize the miniaturization of the spectrometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without exceeding the scope of protection required by the present application.

[0033] Figure 1 is a schematic diagram of a moving mirror scanning device according to an embodiment of the present application;

[0034] Figure 2 is a cross-sectional view of a moving mirror scanning device according to an embodiment of the present application;

[0035] Figure 3 is a schematic diagram of a support member according to an embodiment of the present application;

[0036] Figure 4 is a schematic diagram of a shaft sleeve according to an embodiment of the present application;

[0037] Figure 5 is a schematic diagram of radial displacement of a moving mirror in an embodiment of the present application;

[0038] Figure 6 is a schematic diagram of a groove for installing a moving mirror in an embodiment of the present application;

[0039] Figure 7 is a schematic diagram of a spectrometer according to an embodiment of the present application;

[0040] Figure 8 is a schematic diagram of a base according to an embodiment of the present application;

[0041] Fig. 9 It is a schematic diagram of the housing of an embodiment of the present application. DETAILED DESCRIPTION

[0042] The following is a clear and complete description of the technical solution of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0043] like Figure 1 and Figure 2As shown, an embodiment of the present application provides a moving mirror scanning device 100, which includes a support 1, a moving mirror 2, at least two guide rods 3, a sleeve 4, and a driver 5. The moving mirror scanning device 100 can be applied to a spectrometer, for example, the spectrometer is a Fourier infrared spectrometer.

[0044] like Figure 3 As shown, the support member 1 includes: a support platform 11 and a shaft body 12. The outer diameter of the shaft body 12 is smaller than the outer diameter of the support platform 11. The shaft body 12 is arranged on an end surface of the support platform 11, for example, the top end of the shaft body 12 is arranged on the bottom surface of the support platform 11, and the axis of the shaft body 12 is colinear with the axis of the support platform 11. At least two guide holes 13 are arranged on the support platform 11, and the guide holes 13 extend from the top surface of the support platform 11 to the bottom surface of the support platform 11. Optionally, the support platform 11 and the shaft body 12 are integrally formed.

[0045] The moving mirror 2 is arranged on the other end surface of the support platform 11, for example, the moving mirror 2 is arranged on the top surface of the support platform 11. The moving mirror 2 is a plane mirror, and optionally, the moving mirror 2 is circular, and the moving mirror 2 is bonded to the support platform 11 by glue. The support member 1 can drive the moving mirror 2 to move.

[0046] The number of guide rods 3 is the same as the number of guide holes 13, and each guide rod 3 is inserted into a guide hole 13. The guide rods 3 are arranged on the base of the spectrometer to provide guidance for the translation of the support member 1 and to limit the rotation of the support member 1 during the translation process.

[0047] like Figure 4 As shown, a sliding hole 41 is provided at the center of the sleeve 4, and the sliding hole 41 is adapted to the shaft body 12, and the bottom end of the shaft body 12 passes through the sliding hole 41. The sleeve 4 is arranged on the base. Optionally, the support member 1, the guide rod 3 and the sleeve 4 are made of the same material, for example, they are all made of non-metallic materials such as ceramics or glass.

[0048] The driver 5 is connected to the bottom end of the shaft 12, and the driver 5 can drive the support 1 to translate. For example, the driver 5 is a linear motor. The driver 5 is arranged on the base. The translation of the support 1 drives the moving mirror 2 to follow the translation, and the translation error of the support 1 is the same as the translation error of the moving mirror 2.

[0049] The support member 1, guide rod 3 and sleeve 4 of this embodiment are all processed by precision machinery, and polished after machining, so that the matching accuracy between the shaft body 12 and the sleeve 4 and between the guide rod 3 and the hole wall of the guide hole 13 reaches the micron level, and the friction between the shaft body 12 and the sleeve 4 and between the guide rod 3 and the hole wall of the guide hole 13 is uniform and stable, providing accurate guidance for the translation of the moving mirror 2, ensuring the linearity of the translation, and greatly reducing the error of the moving mirror during translation. For example, the matching accuracy between the shaft body 12 and the sleeve 4 is 1 micron, and the matching accuracy between the guide rod 3 and the hole wall of the guide hole 13 is 1 micron.

[0050] The moving mirror scanning device 100 of this embodiment has a simple structure. The shaft body 12 and the shaft sleeve 4 and the guide rod 3 and the support platform 11 form at least three high-precision axial motion mechanisms, which improve the translation accuracy of the moving mirror and meet the demand for miniaturization of the spectrometer for hand-held use.

[0051] In some embodiments, the stroke of the moving mirror 2 is 2 to 4 mm, and the stroke of the moving mirror 2 is the same as the stroke of the support 1. For example, the stroke of the moving mirror 2 is 3 mm. The stroke of the moving mirror 2 is too large and the volume is too large to meet the requirements of miniaturization of the spectrometer for hand-held use. The stroke of the moving mirror 2 is too small to meet the requirements of moving mirror scanning.

[0052] like Figure 5 As shown, in some embodiments, the translation error of the moving mirror 2 includes radial offset. For example, L1 is the ideal translation trajectory of the moving mirror 2, L2 is the actual translation trajectory of the moving mirror 2, and when the moving mirror 2 is translated to the maximum stroke, the radial offset D of the moving mirror 2 is ≤ 1 micron.

[0053] Due to the influence of structural stress, temperature, vibration, etc., the moving mirror 2 may rotate around its own axis when axially translating, and the rotation of the moving mirror 2 will affect the optical path collimation of the spectrometer. In this embodiment, at least two guide rods 3 are provided to limit the rotation of the moving mirror 2. When the moving mirror 2 translates to the maximum stroke, the rotation of the moving mirror 2 is ≤20 arc seconds.

[0054] In some embodiments, lubricants are provided between the shaft body 12 and the sleeve 4 and between the guide rod 3 and the hole wall of the guide hole 13. For example, the lubricant is lubricating oil or vaseline to reduce the friction between the moving mechanisms. Optionally, the support member 1, the guide rod 3 and the sleeve 4 are all made of ceramics. After the ceramic surface is polished, the lubricant is applied to the surface of the ceramic, the friction is extremely small, and the moving mechanism is almost wear-free.

[0055] Optionally, the contact length between the guide hole 13 and the guide rod 3 along the axial direction is less than 0.5 mm, which is beneficial to reducing the volume of the moving mirror scanning device 100.

[0056] like Figure 6 As shown, in some embodiments, the guide hole 13 extends to the edge of the support platform 11. The guide hole 13 is generally a U-shaped hole, which is convenient for installing the guide rod 3 into the corresponding guide hole 13.

[0057] In some embodiments, a groove 111 is provided on the end surface of the support platform 11 where the moving mirror 2 is mounted. The groove 111 is adapted to the moving mirror 2 , and the bottom of the moving mirror 2 is embedded in the groove 111 , so as to facilitate fixing the moving mirror 2 to the support platform 11 .

[0058] like Figure 7As shown, an embodiment of the present application provides a spectrometer 200 , for example, the spectrometer 200 is a Fourier infrared spectrometer. The spectrometer 200 includes the moving mirror scanning device 100 and a base 210 as described above. The moving mirror scanning device 100 is disposed on the base 210 .

[0059] Optionally, the spectrometer 200 further includes a housing 220 , a laser collimation module 230 , an infrared light source 240 , a beam splitter 250 , a fixed mirror 260 , a measurement module 270 and a detector module 280 .

[0060] The interior of the housing 220 is a cavity, and the base 210 is arranged in the cavity of the housing 220. The laser alignment module 230, the infrared light source 240, the beam splitter 250, and the fixed mirror 260 are all arranged on the base 210. The measuring module 270 is arranged on the outer wall of the housing 220, and the measuring module 270 is used to carry the sample. The laser alignment module 230, the infrared light source 240, the beam splitter 250, the fixed mirror 260, the measuring module 270 and the detector module 280 can all use existing components. The guide rod 3, the shaft sleeve 4 and the driver 5 of the moving mirror scanning device 100 are all arranged on the base 210.

[0061] like Figure 8 As shown, in some embodiments, the base 210 includes: a beam splitter mounting portion 212, a sleeve mounting portion 213, and a driver mounting portion 214. The base 210 also includes a bottom plate 211, which is disposed on the inner wall of the housing 220, and the beam splitter mounting portion 212, the sleeve mounting portion 213, and the driver mounting portion 214 are all disposed on the bottom plate 211.

[0062] The beam splitter mounting portion 212 is used to mount the beam splitter 250, and the end of the guide rod 3 is arranged on the side wall of the beam splitter mounting portion 212. The shaft sleeve 4 is arranged on the shaft sleeve mounting portion 213, and the shaft sleeve mounting portion 213 is provided with a groove adapted to the shaft sleeve 4. The driver 5 is arranged on the driver mounting portion 214.

[0063] In some embodiments, the sleeve mounting portion 213 is provided with a guide rod groove 215 adapted to the guide rod 3 , and the sleeve mounting portion 213 supports the end of the guide rod 3 away from the beam splitter mounting portion 212 , thereby improving the stability of the guide rod 3 .

[0064] like Fig. 9 As shown, in some embodiments, the length of the housing 220 is 75 to 90 mm, for example, 85 mm. The width D2 of the housing 220 is 65 to 80 mm, for example, 75 mm. The size of the housing 220 is convenient for an operator to hold the spectrometer 200 in one hand.

[0065] The embodiments of the present application are described in detail above. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solution and core ideas of the present application. Therefore, changes or deformations made by those skilled in the art based on the ideas of the present application, the specific implementation methods and the scope of application of the present application, all belong to the scope of protection of the present application. In summary, the contents of this specification should not be construed as limiting the present application.

Claims

1. A moving mirror scanning device, characterized in that: include: Support parts, including: The support platform is provided with at least two guide holes; A shaft body, arranged on an end surface of the support platform; A moving mirror, arranged on the other end surface of the support platform; At least two guide rods are respectively inserted into the guide holes; A shaft sleeve, through which the shaft body passes; A driver is connected to the shaft, and the driver can drive the support member to translate.

2. The moving mirror scanning device according to claim 1, characterized in that: The travel of the moving mirror is 2 to 4 mm.

3. The moving mirror scanning device according to claim 2, characterized in that: When the moving mirror is translated to the maximum stroke, the radial displacement of the moving mirror is ≤1 micron, and the rotation of the moving mirror is ≤20 arc seconds.

4. The moving mirror scanning device according to claim 1, characterized in that: Lubricant is provided between the shaft body and the shaft sleeve and between the guide rod and the hole wall of the guide hole.

5. The moving mirror scanning device according to claim 1, characterized in that: The guide hole extends to the edge of the support platform.

6. The moving mirror scanning device according to claim 1, characterized in that: The end surface of the support platform on which the moving mirror is mounted is provided with a groove matched with the moving mirror.

7. A spectrometer, characterized in that: include: The moving mirror scanning device according to any one of claims 1 to 6; A base, wherein the moving mirror scanning device is arranged on the base.

8. The spectrometer according to claim 7, characterized in that The base comprises: A beam splitter mounting portion, used for mounting a beam splitter, wherein the guide rod of the moving mirror scanning device is arranged on the beam splitter mounting portion; A sleeve mounting portion, wherein the sleeve of the moving mirror scanning device is arranged on the sleeve mounting portion; A driver mounting portion, wherein the driver of the moving mirror scanning device is arranged on the driver mounting portion.

9. The spectrometer according to claim 8, characterized in that The shaft sleeve mounting portion is provided with a guide rod groove matched with the guide rod.

10. The spectrometer according to claim 7, characterized in that: It also includes a shell, wherein the length of the shell is 75 to 90 mm, and the width of the shell is 65 to 80 mm.