Grating preparation method, imprinting jig and imprinting equipment

Abstract

The invention discloses a grating preparation method, an imprinting jig and imprinting equipment. The method comprises the steps that a first master mask is provided, the first master mask is provided with a first grating structure and a positioning mark, and the first grating structure and the positioning mark are located on the same side of the first master mask; the first grating structure and the positioning mark are imprinted on a first working soft film, and a reverse structure of the first grating structure and the positioning mark is formed on the first working soft film; the first grating structure on the first working soft film and the reverse structure of the positioning mark are imprinted on a first imprinting substrate coated with imprinting glue to form a first substrate structure, and the first grating structure and the positioning mark are formed on the imprinting glue; and segmenting the first substrate structure according to a set size requirement to form a second mother set.

Description

Technical Field

[0001] The present invention relates to the technical field of grating preparation, and more specifically, to a grating preparation method, an imprinting jig and an imprinting device. Background Art

[0002] In the related art, the grating area of ​​the diffraction waveguide mainly includes the coupling-in area, the coupling-out area, or the coupling-in area, the turning area, and the coupling-out area. During the design, the shape and relative position of each partition are determined by simulation software. The processing of the grating usually requires first preparing a master plate with a set grating structure. The grating structure is embossed onto a substrate coated with an embossing glue through the master plate. In actual needs, it is difficult to emboss the grating at a specific position on the substrate.

[0003] Therefore, it is necessary to provide a new technical solution to solve the above technical problems. Summary of the invention

[0004] An object of the present invention is to provide a new technical solution for a grating preparation method.

[0005] According to a first aspect of the present invention, a method for preparing a grating is provided. The method comprises:

[0006] Providing a first master, wherein the first master has a first grating structure and a positioning mark, and the first grating structure and the positioning mark are located on the same side of the first master;

[0007] Imprinting the first grating structure and the positioning mark onto a first working soft film, so that an inverse structure of the first grating structure and the positioning mark is formed on the first working soft film;

[0008] Imprinting the first grating structure and the reverse structure of the positioning mark on the first working soft film on a first imprinting substrate coated with an imprinting adhesive to form a first substrate structure, on which the first grating structure and the positioning mark are formed, and dividing the first substrate structure according to set size requirements to form a second master;

[0009] placing the second master into an imprinting jig, and imprinting the first grating structure and the positioning mark onto the second working soft film by the imprinting jig, so that the inverse structure of the first grating structure and the positioning mark is formed on the second working soft film;

[0010] Imprinting the first grating structure and the reverse structure of the positioning mark on the second working soft film on a second imprinting substrate coated with an imprinting glue to form a second substrate structure;

[0011] A second grating structure is formed on a side of the second base structure away from the first grating structure.

[0012] Optionally, the first working soft film and / or the second working soft film comprises a soft film and a sub-film glue, and the first grating structure and the inverse structure of the positioning mark are formed on the sub-film glue.

[0013] Optionally, the soft film is a polymer material and / or the sub-film glue is a thermosetting material or an ultraviolet curing material.

[0014] Optionally, the step of embossing the first grating structure and the positioning mark on the second master onto a second working soft film, forming an inverse structure of the first grating structure and the positioning mark on the second working soft film, placing the second master into an embossing jig, and embossing the first grating structure and the positioning mark onto the second working soft film by the embossing jig includes:

[0015] The second master is positioned and placed in an imprinting jig, and the imprinting jig is positioned and placed on an imprinting base of the imprinting device.

[0016] Optionally, the method comprises fixing a plurality of the second master plates in an imprinting jig, wherein the imprinting jig is positioned on an imprinting base of the imprinting device.

[0017] Optionally, the step of embossing the grating structure and the reverse structure of the positioning mark on the first working soft film onto a first embossing substrate coated with embossing glue to form a first substrate structure, on which the first grating structure and the positioning mark are formed, and dividing the first substrate structure according to set size requirements to form a second master plate includes: using simulation software to locate the position of the first grating on the first embossing substrate, and dividing the first embossing substrate according to the position located by the simulation software.

[0018] Optionally, the step of embossing the first grating structure and the reverse structure of the positioning mark on the second working soft film on a second embossing substrate coated with embossing glue to form a second substrate structure includes:

[0019] The second imprinting substrate is positioned and placed in an imprinting fixture.

[0020] According to a second aspect of the present invention, an imprinting jig is provided. The imprinting jig is applied to the grating preparation method of the present invention, and comprises a jig body, the jig body is provided with a groove, the groove is configured to accommodate a second imprinting substrate, and a gap is formed between a part of the bottom of the groove and the first grating structure. .

[0021] Optionally, the jig body is provided with an adsorption portion, the adsorption portion is configured to be adsorbed and connected to the imprinting base, and the jig body is provided with a through hole connecting the groove and the adsorption portion.

[0022] Optionally, a support structure and an escape zone are provided at the bottom of the groove, the support structure is used to support the second imprint substrate, and the gap is formed between the escape zone and the first grating structure.

[0023] Optionally, the support structure is arranged around the circumference of the groove, and the area surrounded by the support structure forms an avoidance zone.

[0024] Optionally, a positioning structure is provided on the side of the jig body, and the positioning structure is suitable for forming a positioning match with an imprinting device.

[0025] Optionally, the positioning structure includes a positioning notch.

[0026] According to a third aspect of the present invention, an imprinting device is provided, which comprises the imprinting jig of the present invention and an imprinting base, wherein the imprinting base is adsorbed and connected to the imprinting jig.

[0027] Optionally, the imprinting base is provided with a mounting groove, which is configured to accommodate the jig body, and the bottom of the mounting groove is provided with a hole, a cross-shaped groove and a plurality of circular grooves, the plurality of circular grooves are coaxially arranged from the inside to the outside, and the hole is connected with the plurality of circular grooves through the cross-shaped groove.

[0028] Optionally, the stamping base is provided with a positioning protrusion, the positioning protrusion is movably arranged in the stamping base, and the positioning protrusion is configured to form a positioning match with the stamping jig.

[0029] In an embodiment of the present invention, in addition to forming the first grating structure on the first master, the preparation method also forms a positioning mark, and the second master is placed in an imprinting jig for positioning. The position of the first grating structure can be effectively positioned by jointly positioning the positioning mark and the imprinting jig, thereby effectively improving the processing accuracy of the grating product.

[0030] In addition, the second master is a segmented grating product. Using the second master as a master for preparing other grating products can make the size of other grating products consistent with the size of the second master, thereby improving the preparation efficiency of the grating products.

[0031] In addition, the grating product prepared by the first master is used as the second master to prepare other grating products. Since the preparation process of the second master is very simple and the number of second masters is not limited, the problem of damage to the first grating structure due to long-term use of the first master is effectively avoided, thereby improving the service life of the first master. In addition, the second master can be flexibly cut and divided into shapes through positioning marks, effectively solving the problem of different shape requirements of grating products. This significantly improves the processing efficiency of grating products.

[0032] Further features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0034] Figure 1 is a block diagram of a grating preparation method according to an embodiment of the present application.

[0035] Figure 2 is a flow chart of a grating preparation method according to an embodiment of the present application.

[0036] Figure 3 is a flow chart of another grating preparation method according to an embodiment of the present application.

[0037] Figure 4 is a top view of an imprinting jig according to an embodiment of the present application.

[0038] Figure 5 is a cross-sectional view of an imprinting jig according to an embodiment of the present application.

[0039] Figure 6 It is a partial assembly diagram of the imprinting jig and the second substrate structure according to an embodiment of the present application.

[0040] Figure 7 is a top view of another imprinting jig according to an embodiment of the present application.

[0041] Figure 8 4 is a top view of an imprinting base according to an embodiment of the present application.

[0042] Fig. 9 yes Figure 4 A bottom view of the imprinting fixture is shown.

[0043] Description of reference numerals:

[0044] 1. Positioning mark; 2. First grating structure; 3. Anti-structure; 4. Fixture body; 41. Through hole; 42. Support structure; 43. Avoidance area; 43a. Gap; 44. Positioning notch; 45. Adsorption part; 5. Second imprinting base; 6. Imprinting base; 61. Hole; 62. Circular groove; 63. Cross-shaped groove; 64. Positioning protrusion. DETAILED DESCRIPTION

[0045] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless otherwise specifically stated.

[0046] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

[0047] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0048] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0049] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0050] According to one embodiment of the present invention, a grating preparation method is provided. Figure 1 , Figure 2 As shown, the preparation method comprises:

[0051] S1. Providing a first master, wherein the first master has a first grating structure 2 and a positioning mark 1, and the first grating structure 2 and the positioning mark 1 are located on the same side of the first master;

[0052] S2, imprinting the first grating structure 2 and the positioning mark 1 onto a first working soft film, so that an inverse structure of the first grating structure 2 and the positioning mark 1 is formed on the first working soft film;

[0053] S3, embossing the first grating structure 2 and the reverse structure of the positioning mark 1 on the first working soft film on a first embossing substrate coated with embossing glue to form a first substrate structure, on which the first grating structure 2 and the positioning mark are formed, and dividing the first substrate structure according to set size requirements to form a second master;

[0054] S4, placing the second master into an imprinting jig, and imprinting the first grating structure and the positioning mark onto the second working soft film through the imprinting jig, so that the inverse structure of the first grating structure 2 and the positioning mark 1 is formed on the second working soft film;

[0055] S5, embossing the first grating structure 2 and the reverse structure of the positioning mark 1 on the second working soft film on a second embossing substrate 5 coated with embossing glue to form a second substrate structure;

[0056] S6. Form a second grating structure on a side of the second base structure away from the first grating structure 2.

[0057] Specifically, in step S1, the first master is processed from a wafer. For example, the wafer includes a silicon wafer, a glass wafer, a silicon carbide wafer, a silicon nitride wafer, etc. The first grating structure 2 and the positioning mark 1 are designed by modeling and simulation. The first grating structure 2 is a coupling-in grating, a coupling-out grating or a turning grating. The positioning mark 1 is used to position the first grating structure 2. The positioning mark 1 can be a dot mark, a cross mark, an L-shaped mark, etc. The first grating structure 2 and the positioning mark 1 are formed by photolithography, etching process, etc. For example, the first grating structure 2 and the positioning mark 1 are processed on the wafer by electron beam exposure photolithography process and dry etching process to form the first master. The first grating structure 2 and the positioning mark 1 are located on the same surface of the wafer, such as the first surface. The positioning mark 1 can be one or more. When there are multiple positioning marks 1, multiple positioning marks 1 can be arranged around the first grating structure 2.

[0058] In step S2, the first working soft film includes polymer glue. The polymer glue is coated on the first surface. The polymer glue has fluidity and can form an inverse structure that matches the structure of the first grating structure 2 and the positioning mark 1. For example, the inverse structure of the convex structure of the first grating structure 2 is a concave structure. The concave structure of the first grating structure 2 is a convex structure. After curing, the polymer glue forms an inverse structure that matches the structure of the first grating structure 2 and the positioning mark 1. The polymer glue is a thermosetting glue or a UV curing glue. The polymer glue can be applied to the first surface of the first master plate by spin coating, spot coating, spray coating, dip coating and other processes.

[0059] In order to improve the strength of the first working soft film, the first working soft film also includes a first soft film body. The polymer glue is attached to the first soft film body after curing. For example, the material of the first soft film body is a polymer material. For example, the Young's modulus of the polymer material is greater than or equal to 1GPa, so that the strength of the first soft film body is sufficient. Optionally, the polymer material includes at least one of PET, PVA, PVC, PDMS, etc.

[0060] During preparation, the polymer glue may be first applied to the first surface of the first master. The polymer glue covers the first grating structure 2 and the positioning mark 1. Then, the first master is embossed onto the first soft film body using an embossing device. After curing, the polymer glue having the reverse structure of the first grating structure 2 and the positioning mark 1 is connected to the first soft film body to form a first working soft film.

[0061] Optionally, before coating the polymer glue, the first surface of the first master is subjected to an anti-adhesive treatment. For example, an anti-adhesive solvent is attached to the first surface of the first master by spin coating or evaporation. The anti-adhesive solvent forms a hydrophobic film layer. The hydrophobic film layer can effectively prevent adhesion between the polymer glue and the first master, thereby preventing the first grating structure 2 from being lost or the first master from being damaged when the first working soft film is separated due to adhesion. For example, the anti-adhesive solvent includes alkylchlorosilane, fluorochlorosilane, etc. If the thickness of the hydrophobic film layer is too large, the height of the first grating structure 2 will be reduced, affecting the optical performance of the first grating structure 2. For example, the thickness of the hydrophobic layer is less than or equal to 5 nm. Within this range, the height of the first grating structure 2 is moderate, and the optical performance of the first grating structure 2 is excellent.

[0062] In step S3, a first imprinting substrate coated with an imprinting glue is imprinted on the reverse structure of the first working soft film using an imprinting device. After the imprinting glue is cured, the imprinting glue is connected to the first imprinting substrate, and a first grating structure 2 and a positioning mark 1 are formed on the side of the imprinting glue away from the first imprinting substrate. The first imprinting substrate is glass, silicon, resin, etc. The first imprinting substrate is a flat structure with good flatness. The imprinting glue is applied to the first imprinting substrate using processes such as spin coating, spot coating, spray coating, and dip coating. Imprinting glue is common knowledge in the field and is not described in detail here. Laser cutting is used to divide the first substrate structure into grating products of a set shape. The grating product can be directly assembled into an optical device.

[0063] In this example, the grating product is used as the second master. The second master has the same first grating structure 2 and positioning mark 1 as the first master. Unlike the first master, the first grating structure 2 and positioning mark 1 on the second master are not directly formed on the wafer through processes such as photolithography and etching, but are embossed on the embossing glue of the second master. The second master replaces the first master to prepare other grating products.

[0064] In this step, the first working soft film can be effectively positioned by the positioning mark 1, so that the positioning of the first base structure is more accurate.

[0065] In step S4, the imprinting jig can be positioned with the imprinting device. The imprinting jig has a positioning portion. The positioning portion is, for example, a groove. The groove can position the second master. The positioning mark 1 can be positioned with the imprinting jig, thereby forming a second working soft film that is accurately positioned with the imprinting device. The polymer glue includes a polymer glue. The polymer glue is coated on the surface of the second master provided with the first grating structure 2. The polymer glue has fluidity and can form an inverse structure that matches the structure of the first grating structure 2 and the positioning mark 1. For example, the inverse structure of the convex structure of the first grating structure 2 is a concave structure. The concave structure of the first grating structure 2 is a convex structure. After curing, the polymer glue forms an inverse structure that matches the structure of the first grating structure 2 and the positioning mark 1. The polymer glue is a thermosetting glue or a UV curing glue. The polymer glue can be applied to the surface of the second master provided with the first grating structure 2 by spin coating, spot coating, spray coating, dip coating and other processes.

[0066] In order to improve the strength of the second working soft film, the second working soft film also includes a second soft film body. The polymer glue is attached to the second soft film body after curing. For example, the material of the second soft film body is a polymer material, such as PET, PVA, PVC, PDMS, etc.

[0067] During preparation, the polymer glue may be first applied to the surface of the second master plate provided with the first grating structure 2. The polymer glue covers the first grating structure 2 and the positioning mark 1. Then, the second master plate is embossed onto the second soft film body using an embossing device. After curing, the polymer glue having the reverse structure of the first grating structure 2 and the positioning mark 1 is connected to the second soft film body to form a second working soft film.

[0068] Optionally, before coating the polymer glue, the surface of the second master plate provided with the first grating structure 2 is subjected to an anti-sticking treatment. For example, an anti-sticking solvent is attached to the surface of the second master plate provided with the first grating structure 2 by spin coating or evaporation. The anti-sticking solvent forms a hydrophobic film layer. The hydrophobic film layer can effectively prevent adhesion between the polymer glue and the second master plate, and prevent the loss of the first grating structure 2 or damage to the second master plate when separating the second working soft film due to adhesion. For example, the anti-sticking solvent includes alkylchlorosilane, fluorochlorosilane, etc. If the thickness of the hydrophobic film layer is too large, the polymer glue will not be able to be filled into the grooves of the first grating structure 2 and the positioning mark 1, making the reverse structure of the second working soft film grating incomplete. For example, the thickness of the hydrophobic layer is less than or equal to 5nm. Within this range, the polymer glue can be effectively filled into the grooves of the first grating structure 2 and the positioning mark 1.

[0069] In this step, the positioning mark 1 of the second master is positioned with the imprinting device, which can make the positioning of the second master more accurate.

[0070] In step S5, an imprinting device is used to imprint the reverse structure of the second working soft film onto a second imprinting substrate 5 coated with an imprinting adhesive. After the imprinting adhesive is cured, the imprinting adhesive is connected to the second imprinting substrate 5, and a first grating structure 2 and a positioning mark 1 are formed on the side of the imprinting adhesive facing away from the second imprinting substrate 5. The second imprinting substrate 5 is made of glass, silicon, resin, etc. The second imprinting substrate 5 is a flat structure with good flatness. The imprinting adhesive is applied to the second imprinting substrate 5 by spin coating, spot coating, spray coating, dip coating, etc. The second imprinting substrate 5 and the imprinting adhesive imprinted with the first grating structure 2 and the positioning mark 1 are connected together to form a second substrate structure. The second substrate structure is a grating product.

[0071] In step S6, a second grating structure is formed on the side of the second base structure away from the first grating structure 2. The second grating structure is an in-coupling grating, an out-coupling grating or a turning grating. The second grating structure has a different function from the first grating structure 2. For example, the first grating structure 2 in the processing of the aforementioned steps S2-S5 can be replaced with the second grating structure to form the second grating structure on the side of the second base structure away from the first grating structure 2.

[0072] It should be noted that, since the second grating structure is located on the side of the second base structure away from the first grating structure 2, the first grating structure 2 needs to be protected when preparing the second grating structure to prevent the first grating structure 2 from being damaged during the embossing process. For example, the following embossing jig can be used for protection.

[0073] In an embodiment of the present invention, in addition to forming the first grating structure 2 on the first master, the preparation method also forms a positioning mark 1. The second master is placed in an imprinting jig for positioning. By jointly positioning the positioning mark 1 and the imprinting jig, the position of the first grating structure 2 on the first imprinting substrate can be effectively located, thereby effectively improving the processing accuracy of the grating product.

[0074] In addition, the second master is a segmented grating product. Using the second master as a master for preparing other grating products can make the size of other grating products consistent with the size of the second master, thereby improving the preparation efficiency of the grating products.

[0075] In addition, the grating product prepared by the first master is used as the second master to prepare other grating products. Since the preparation process of the second master is very simple and the number of second masters is not limited, the problem of damage to the first grating structure due to long-term use of the first master is effectively avoided, thereby improving the service life of the first master. In addition, the second master can be flexibly cut and divided into shapes through positioning marks, effectively solving the problem of different shape requirements of grating products. This significantly improves the processing efficiency of grating products.

[0076] In one embodiment of the present invention, the first working soft film and / or the second working soft film comprises a soft film and a sub-film glue, and the sub-film glue is formed with the first grating structure 2 and the inverse structure of the positioning mark 1.

[0077] As mentioned above, the soft film includes the first soft film body and the second soft film body. The sub-film includes the polymer glue. The first grating structure 2 and the reverse structure of the positioning mark 1 are formed on the sub-film glue by using an embossing device. The cured sub-film glue can be fixed together with the soft film.

[0078] Of course, the soft film and sub-film glue are not limited to the above embodiments, and those skilled in the art can make selections according to actual needs.

[0079] In one embodiment of the present invention, the soft film is a polymer material and / or the sub-film glue is a thermosetting material or an ultraviolet curing material.

[0080] In this example, the polymer material may be but is not limited to at least one of PET, PVA, PVC, and PDMS. Thermosetting materials include the aforementioned thermosetting adhesive and UV-curing adhesive. Optionally, the thermosetting adhesive includes acrylic adhesive, styrene-butadiene rubber adhesive, chloroprene rubber adhesive, etc. UV-curing adhesive includes epoxy resin adhesive, polyamide adhesive, silicone adhesive, etc. Of course, the sub-membrane adhesive is not limited to the above embodiments, and those skilled in the art can select according to actual needs.

[0081] In one embodiment of the present invention, the step of imprinting the first grating structure 2 and the positioning mark 1 on the second master onto the second working soft film, forming an inverse structure of the first grating structure 2 and the positioning mark 1 on the second working soft film, and positioning the positioning mark 1 of the second master with the imprinting device includes:

[0082] The second master is positioned and placed in an imprinting jig, and the imprinting jig is positioned and placed on an imprinting base 6 of the imprinting device.

[0083] In this example, the stamping jig is used to position the second master. For example, the stamping jig is provided with a groove for positioning. The shape of the groove matches the shape of the second master. The second master is embedded in the groove, thereby forming a positioning. The stamping jig has a positioning structure, through which the stamping jig and the stamping device are positioned, thereby further improving the processing accuracy of the grating product.

[0084] In one embodiment of the present invention, the preparation method comprises fixing a plurality of the second master plates in an imprinting jig, wherein the imprinting jig is positioned on an imprinting base 6 of the imprinting device.

[0085] In this example, the imprinting jig includes a plurality of positioning areas. Each positioning area positions a second master. For example, Figure 3 As shown, the stamping jig includes four positioning areas, and the four positioning areas are arranged in two rows. In this way, four grating products can be formed simultaneously in one stamping process. In this way, the processing efficiency of grating products can be significantly improved.

[0086] Of course, the number of positioning areas is not limited to 4, and those skilled in the art can set it according to actual needs. For example, it can also be 2, 3, 5, or 6 positioning areas.

[0087] In one embodiment of the present invention, the first grating structure 2 and the reverse structure of the positioning mark 1 are embossed on a first substrate coated with embossing glue to form a first substrate structure, the first grating structure 2 and the positioning mark are formed on the embossing glue, and the first substrate structure is divided according to set size requirements to form a second master plate, including: using simulation software to locate the position of the first grating on the first substrate structure, and dividing the first substrate structure according to the position located by the simulation software.

[0088] In this example, the simulation software is, for example, CAD software, CAXA software, etc. For example, the first substrate structure is drawn using CAD software, and the shape and position of the first grating structure 2 on the first imprinted substrate are consistent with the shape and position of the standard grating product. Then, the drawn first substrate structure is imported into the segmentation device and programmed. In this way, it can be effectively ensured that the shape and position of the first grating structure 2 of the segmented grating product are consistent with the standard grating product. Optionally, the segmentation device can be, but is not limited to, CNC equipment, laser cutting equipment, etc.

[0089] In one embodiment of the present invention, the step of embossing the first grating structure 2 and the reverse structure of the positioning mark 1 on the first substrate coated with embossing glue to form a second substrate structure includes:

[0090] The second imprinting substrate 5 is positioned and placed in an imprinting jig.

[0091] In this example, the second imprint substrate 5 is positioned in the groove of the imprint jig, so that the position of the first grating structure 2 formed on the second substrate can be more accurate.

[0092] According to another embodiment of the present invention, an imprinting jig is provided. The imprinting jig is applied to the grating preparation method of the present invention. The imprinting jig comprises a jig body 4, the jig body 4 is provided with a groove, the groove is configured to accommodate a second imprinting substrate, and a gap 43a is formed between a part of the bottom of the groove and the first grating structure 2. .

[0093] In this embodiment, the second substrate structure includes a second imprint substrate 5, a first grating structure 2 located on one side of the second imprint substrate 5, and a second grating structure located on the side of the second imprint substrate 5 away from the first grating structure 2. When forming the second grating structure on the second imprint substrate 5, the second imprint substrate 5 is positioned on the jig body, the jig body is provided with a groove, and the first grating structure 2 is located in the groove.

[0094] like Figure 4 , Figure 5 As shown, the imprinting jig is used to form the first grating structure 2 and the second grating structure in the second substrate structure on two opposite surfaces of the second imprinting substrate 5. For example, the imprinting device has an imprinting base 6. The imprinting base 6 is connected to a vacuum device.

[0095] The groove of the imprinting base 6 is used to position the second imprinting substrate 5. In the assembled state, the first grating structure 2 faces the bottom of the imprinting base 6, and a gap is formed between the first grating structure 2 and a part of the bottom of the groove to avoid contact between the first grating structure 2 and the bottom of the groove, thereby avoiding squeezing or collision of the first grating structure 2. The side of the second imprinting substrate 5 that is away from the first grating structure 2 is away from the bottom of the imprinting base 6. When preparing the second grating structure, the imprinting base 6 can effectively protect the first grating structure 2 and prevent the first grating structure 2 from being damaged.

[0096] In one embodiment of the present invention, the jig body 4 is provided with an adsorption portion 45 , and the adsorption portion 45 is configured to be adsorbed and connected to the imprinting base 6 , and the jig body 4 is provided with a through hole 41 connecting the groove and the adsorption portion 45 .

[0097] In this example, if Figure 5 , Figure 6 , Fig. 9 As shown, an adsorption portion 45 is formed on the side of the jig body 4 facing away from the groove. For example, the adsorption portion 45 is a plane. A through hole 41 is formed at the bottom of the jig body 4. The through hole 41 connects the groove and the adsorption portion 45. The vacuum equipment of the imprinting base 6 evacuates the groove through the channel formed by the hole 61, the cross groove 63, the circular groove 62, and the through hole 41, so that the second imprinting substrate 5 is positioned in the groove. For example, a circular groove 62 partially close to the center of the cross groove 63 is opposite to the through hole 41 to adsorb the second imprinting substrate 5 in the groove. The shape of the groove matches the shape of the second imprinting substrate 5, such as a rectangle, a circle, etc. The circular groove 62 partially located outside the through hole 41 is used to be opposite to the adsorption portion 45 to facilitate adsorption of the jig body 4.

[0098] Of course, the adsorption portion 45 may also be disposed on other surfaces of the fixture body 4. The adsorption portion 45 may also be a curved surface, a spherical surface, or the like.

[0099] In one embodiment of the present invention, a support structure 42 and an avoidance area 43 are provided in the groove, the support structure 42 is used to support the second imprint substrate 5 , and the avoidance area 43 is used to avoid the first grating structure 2 .

[0100] like Figures 5 to 7 As shown, a support structure 42 is provided in the groove. The support structure 42 is used to support the edge of the second imprint substrate 5. An escape zone 43 is formed between the support structure 42 and the bottom of the second imprint substrate 5. The first grating structure 2 is suspended in the escape zone 43, so that the first grating structure 2 can be effectively prevented from contacting the bottom of the second imprint substrate 5, so that the first grating structure 2 can be effectively protected.

[0101] The support structure 42 may be a ring-shaped structure, which can support the second imprinting substrate 5 as a whole. The support structure 42 may also be a plurality of discrete point-shaped structures, which can also support the second imprinting substrate 5 as a whole.

[0102] Of course, the shape and height of the support structure 42 are not limited here, and those skilled in the art can set them according to actual needs.

[0103] In one embodiment of the present invention, the support structure 42 is arranged around the circumference of the groove, and the area surrounded by the support structure 42 forms an avoidance area 43.

[0104] like Figure 4 As shown, the through hole 41 is a circular hole. The overall shape of the groove is rectangular. A support structure 42 of an annular structure is formed around the four sides of the groove. The height of the support structure 42 is less than the depth of the groove. The area between the support structure 42 and the side wall of the groove is used to support the second imprinting substrate 5 and position the second imprinting substrate 5. The area surrounded by the support structure 42 forms an avoidance area 43. The depth of the avoidance area 43 (i.e., the height of the support structure 42) is greater than the height of the first grating structure 2, so that when the second imprinting substrate 5 is located in the groove, the first grating structure 2 can be suspended.

[0105] The annular support structure 42 contacts the edge of the second imprint substrate 5. The edge of the second imprint substrate 5 is usually a blank area, where no functional structure is arranged. This arrangement can effectively prevent the functional structure of the second imprint substrate 5 from being damaged.

[0106] In one embodiment of the present invention, a positioning structure is provided on the side of the jig body, and the positioning structure is suitable for forming a positioning match with the imprinting equipment.

[0107] In this example, a positioning structure is provided on the side of the jig body 4. The positioning structure can cooperate with the positioning component of the imprinting device to position the jig body 4. There can be one or more positioning structures. The positioning structure can be at least one of a notch, a protrusion, etc.

[0108] In one embodiment of the present invention, the positioning structure includes a positioning notch 44 .

[0109] like Figure 4 As shown, the positioning notch 44 is a triangle, rectangle, semicircle, trapezoid, etc., or other polygonal structures. On the stamping device, for example, the positioning component is a positioning protrusion 64. The stamping base 6 is provided with a positioning protrusion 64, for example, the positioning protrusion 64 is a triangle, arrow shape, rectangle, circle, trapezoid, etc. The positioning protrusion 64 is inserted into the positioning notch 44 to form a positioning fit. The positioning notch 44 makes the processing accuracy of the grating product higher.

[0110] Of course, the shapes of the positioning protrusion and positioning notch 44 are not limited to the above embodiments, and those skilled in the art can configure them according to actual needs.

[0111] In other embodiments, Figure 7 As shown, a plurality of grooves are provided on the jig body 4. For example, four grooves are provided, and two grooves form a row. A support structure 42 and an escape area 43 are provided in each groove. A triangular positioning notch 44 is provided on one side of the jig body 4. The jig body 4 can be used to prepare multiple grating products at the same time.

[0112] Of course, the number of grooves is not limited here, and those skilled in the art can set it according to actual needs.

[0113] According to a third embodiment of the present invention, an imprinting device is provided, which comprises the imprinting jig of the present invention and an imprinting base 6 , wherein the imprinting base 6 is adsorbed and connected to the imprinting jig.

[0114] In this embodiment, the imprinting base 6 is connected to a vacuum device. The imprinting base 6 and the imprinting fixture are adsorbed and connected together by vacuuming. This connection method makes the connection and separation speed between the imprinting base 6 and the imprinting fixture fast. The processing efficiency of the grating product is high.

[0115] In one embodiment of the present invention, the stamping base is provided with a mounting groove, which is used to accommodate the jig body 4. The bottom of the mounting groove is provided with a hole 62 and a plurality of circular grooves 62. The plurality of circular grooves 62 are coaxially arranged from the inside to the outside, and the hole is connected with the plurality of circular grooves 62 through a cross groove 63.

[0116] In this embodiment, if Figure 8 As shown, the stamping base 6 is provided with a mounting groove. The mounting groove is used to accommodate the jig body 4. The bottom of the mounting groove is provided with a hole 61 and a plurality of circular grooves 62. The plurality of circular grooves 62 are coaxially arranged from the inside to the outside. The plurality of holes 61 are connected to the plurality of circular grooves 62 through a cross groove 63. The circular grooves 62 are vacuumed through the hole 61 to adsorb the jig body 4 on the stamping base 6. The arrangement of the plurality of circular grooves 62 makes the adsorption of the jig body 4 on the stamping base 6 more secure.

[0117] In one embodiment of the present invention, the imprinting base is provided with a positioning protrusion, the positioning protrusion is movably arranged in the imprinting base, and the positioning protrusion is configured to form a positioning match with the imprinting jig.

[0118] In this embodiment, the positioning protrusion 64 is movably arranged in the imprinting base 6. The positioning protrusion 64 can extend from the side wall of the mounting groove to enter the mounting groove, and can also be retracted to be received in the side wall of the mounting groove. When the jig body 4 is located in the mounting groove, the positioning protrusion 64 extends from the side wall of the mounting groove and is engaged in the positioning notch 44 to position the jig body 4. When the jig body 4 needs to be taken out, the positioning protrusion 64 is retracted into the side wall of the mounting groove.

[0119] The above embodiments focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0120] Although some specific embodiments of the present invention have been described in detail by way of example, it will be appreciated by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A grating preparation method, characterized in that: include: Providing a first master, wherein the first master has a first grating structure and a positioning mark, and the first grating structure and the positioning mark are located on the same side of the first master; Imprinting the first grating structure and the positioning mark onto a first working soft film, so that an inverse structure of the first grating structure and the positioning mark is formed on the first working soft film; Imprinting the first grating structure and the reverse structure of the positioning mark on the first working soft film on a first imprinting substrate coated with an imprinting adhesive to form a first substrate structure, on which the first grating structure and the positioning mark are formed, and dividing the first substrate structure according to set size requirements to form a second master; placing the second master into an imprinting jig, and imprinting the first grating structure and the positioning mark onto the second working soft film by the imprinting jig, so that the inverse structure of the first grating structure and the positioning mark is formed on the second working soft film; Imprinting the first grating structure and the reverse structure of the positioning mark on the second working soft film on a second imprinting substrate coated with an imprinting glue to form a second substrate structure; A second grating structure is formed on a side of the second base structure away from the first grating structure.

2. The grating preparation method according to claim 1, characterized in that: The first working soft film and / or the second working soft film comprises a soft film and a sub-film glue, and the first grating structure and the inverse structure of the positioning mark are formed on the sub-film glue.

3. The grating preparation method according to claim 2, characterized in that: The soft film is a polymer material and / or the sub-film glue is a thermosetting material or an ultraviolet curing material.

4. The grating preparation method according to claim 2, characterized in that: The step of embossing the first grating structure and the positioning mark on the second master onto the second working soft film, forming the reverse structure of the first grating structure and the positioning mark on the second working soft film, placing the second master into an embossing jig, and embossing the first grating structure and the positioning mark onto the second working soft film by the embossing jig comprises: The second master is positioned and placed in an imprinting jig, and the imprinting jig is positioned and placed on an imprinting base of the imprinting device.

5. The grating preparation method according to claim 4, characterized in that: The method comprises fixing a plurality of the second master plates in an imprinting jig, wherein the imprinting jig is positioned on an imprinting base of the imprinting device.

6. The grating preparation method according to claim 1, characterized in that: The steps of embossing the grating structure and the reverse structure of the positioning mark on the first working soft film on a first embossing substrate coated with embossing glue to form a first substrate structure, on which the first grating structure and the positioning mark are formed, and dividing the first substrate structure according to set size requirements to form a second master plate include: using simulation software to locate the position of the first grating on the first embossing substrate, and dividing the first embossing substrate according to the position located by the simulation software.

7. The grating preparation method according to claim 1, characterized in that: The step of embossing the first grating structure and the reverse structure of the positioning mark on the second working soft film on a second embossing substrate coated with embossing glue to form a second substrate structure includes: The second imprinting substrate is positioned and placed in an imprinting fixture.

8. An imprinting jig, characterized in that: The imprinting jig is applied to the grating preparation method as described in any one of claims 1 to 7, and the imprinting jig includes a jig body, the jig body is provided with a groove, and the groove is configured to accommodate a second imprinting substrate, and a gap is formed between a part of the bottom of the groove and the first grating structure.

9. The stamping jig according to claim 8, characterized in that: The jig body is provided with an adsorption portion, the adsorption portion is configured to be adsorbed and connected to the imprinting base, and the jig body is provided with a through hole connecting the groove and the adsorption portion.

10. The stamping jig according to claim 8, characterized in that: A supporting structure and an escape zone are provided at the bottom of the groove, the supporting structure is used to support the second imprint substrate, and the gap is formed between the escape zone and the first grating structure.

11. The stamping jig according to claim 10, characterized in that: The support structure is arranged around the circumference of the groove, and the area surrounded by the support structure forms an avoidance zone.

12. The stamping jig according to claim 8, characterized in that: A positioning structure is provided on the side of the jig body, and the positioning structure is suitable for forming a positioning match with the imprinting equipment.

13. The stamping jig according to claim 12, characterized in that: The positioning structure includes a positioning notch.

14. An imprinting device, characterized in that: It comprises an imprinting jig and an imprinting base as described in any one of claims 8 to 13, wherein the imprinting base is adsorbed and connected to the imprinting jig.

15. The embossing device according to claim 14, characterized in that The stamping base is provided with a mounting groove, which is configured to accommodate the fixture body. The bottom of the mounting groove is provided with a hole, a cross-shaped groove and multiple circular grooves. The multiple circular grooves are coaxially arranged from the inside to the outside, and the hole is connected with the multiple circular grooves through the cross-shaped groove.

16. The embossing device according to claim 15, characterized in that The stamping base is provided with a positioning protrusion, the positioning protrusion is movably arranged in the stamping base, and the positioning protrusion is configured to form a positioning match with the stamping jig.

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