Probe device

Abstract

The probe device includes: a housing having a first surface and a second surface; a conductive probe having a first contact part exposed on the first surface and a second contact part exposed on the second surface; and an elastic part disposed inside the housing. The posture of the probe varies inside the housing such that the position of a contact region of the second contact portion in contact with the electrode pad varies in accordance with the displacement of the first contact portion. The elastic portion includes a first elastic member and a second elastic member integrated with the first elastic member to reinforce an elastic force of the first elastic member. The elastic portion elastically deforms in accordance with a change in the posture of the probe inside the housing, and urges the probe in a direction in which the displacement of the first contact portion is eliminated.

Description

Technical Field

[0001] The present invention relates to a probe device used for inspecting electrical characteristics of a device. Background Art

[0002] In the inspection of the electrical characteristics of a device in which a semiconductor integrated circuit or the like is installed in a package, a probe device that electrically connects the device and an inspection device is used. The probe device electrically connects the electrode terminal of the device to an electrode pad disposed on a substrate such as a printed circuit board (PCB). The electrode pad is electrically connected to the inspection device by means of a wiring pattern formed on the substrate. For example, there is a probe device that includes: a conductive probe that contacts the electrode terminal and the electrode pad at the same time; and an elastic portion that uses elastic force to control the contact load applied to the probe when contacting the electrode terminal and the electrode pad (see Patent Document 1).

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2019-35660 Summary of the invention

[0006] Problem that the invention aims to solve

[0007] In a probe device that utilizes the elastic force of an elastic portion to generate a contact load applied to a probe, in order to stabilize the contact load, it is necessary to stabilize the elastic force of the elastic portion. In addition, in order to prevent the decline of the elastic force of the elastic portion caused by repeated measurements, it is desirable to improve the durability of the elastic force of the elastic portion.

[0008] An object of the present invention is to provide a probe device having improved stability and durability of the elastic force of an elastic portion for generating a contact load applied to the probe.

[0009] Solutions for solving problems

[0010] A probe device according to one technical solution of the present invention includes: a housing having a first surface and a second surface; a conductive probe having a first contact portion exposed on the first surface and a second contact portion exposed on the second surface; and an elastic portion arranged inside the housing. The posture of the probe changes inside the housing in such a way that the position of the contact area of ​​the second contact portion in contact with the electrode pad changes correspondingly to the displacement of the first contact portion. The elastic portion includes a first elastic member and a second elastic member integrated with the first elastic member to strengthen the elastic force of the first elastic member. The elastic portion elastically deforms in accordance with the change in the posture of the probe inside the housing, and applies force to the probe in a direction to eliminate the displacement of the first contact portion.

[0011] Effects of the Invention

[0012] According to the present invention, it is possible to provide a probe device in which the stability and durability of the elastic force of the elastic portion for generating a contact load applied to the probe are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram showing the structure of the probe device according to the first embodiment.

[0014] Figure 2 It is a schematic cross-sectional view showing the elastic portion of the probe device according to the first embodiment.

[0015] Figure 3 It is a schematic diagram showing a change in the posture of the probe of the probe device according to the first embodiment.

[0016] Figure 4 It is a schematic perspective view showing the structure of a second elastic member of a probe device according to a modified example of the first embodiment.

[0017] Figure 5 It is a schematic cross-sectional view showing an elastic portion of a probe device according to a modified example of the first embodiment.

[0018] Figure 6 It is a schematic diagram showing the structure of the probe device according to the second embodiment.

[0019] Figure 7 It is a schematic diagram showing the elastic portion of the probe device according to the second embodiment.

[0020] Figure 8 It is a schematic diagram showing an example of the relationship between the arrangement of the probe and the elastic portion of the probe device according to the second embodiment.

[0021] Fig. 9 It is a schematic diagram showing an example of the structure of the second elastic member of the probe device according to the second embodiment.

[0022] Fig.10 It is a schematic perspective view showing an elastic portion of a probe device according to a modified example of the second embodiment.

[0023] Fig.11 It is a schematic diagram showing the structure of the probe device according to the third embodiment.

[0024] Fig.12 It is a schematic diagram showing the structure of a probe device according to a modified example of the third embodiment.

[0025] Fig.13 It is a schematic diagram showing another structure of the probe device according to a modified example of the third embodiment. DETAILED DESCRIPTION

[0026] Next, the embodiments of the present invention are described with reference to the accompanying drawings. In the description of the following drawings, the same or similar reference numerals are marked for the same or similar parts. However, it should be noted that the drawings are schematic, and the ratio of the thickness of each part is different from the actual. In addition, the drawings also naturally include parts with different dimensional relationships and proportions. The embodiments shown below illustrate the devices and methods for concretizing the technical ideas of the present invention. The embodiments of the invention do not specify the material, shape, structure, configuration, etc. of the structural components as the following contents.

[0027] (First embodiment)

[0028] Figure 1 The probe device 1 of the first embodiment shown is used to inspect the electrical characteristics of a device 100 as an inspection object. The device 100 is an inspection object in which a semiconductor integrated circuit or the like is mounted in a package. The probe device 1 electrically connects an electrode terminal 101 of the device 100 and an electrode pad 201 of a substrate 200 . Figure 1 The case where the electrode terminal 101 is a lead electrode of a package is shown as an example. The electrode pad 201 is electrically connected to an inspection device via a wiring pattern (not shown) formed on the substrate 200 or the like.

[0029] The probe device 1 includes a housing 10 having a first surface 11 and a second surface 12 opposite to the first surface 11, a conductive probe 20 supported by the housing 10 and having a first contact portion 21 and a second contact portion 22, and an elastic portion 30 arranged inside the housing 10. The probe 20 functions as a contact that electrically connects the electrode terminal 101 and the electrode pad 201. The material of the probe 20 uses a metal material such as a beryllium copper (Be-Cu) material or a palladium (Pd) alloy material. The housing 10 uses an insulating ceramic material, for example.

[0030] The elastic portion 30 is disposed on the housing 10 and the probe 20, and is disposed inside the housing 10. The elastic portion 30 includes a first elastic member 31 and a second elastic member 32 that is integrated with the first elastic member 31 and reinforces the elastic force of the first elastic member 31. As described later, the elastic portion 30 elastically deforms in response to a change in the posture of the probe 20 inside the housing 10, and applies force to the probe 20 in a direction to restore the posture of the probe 20 before the change.

[0031] In order to make the description of the operation of the probe device 1 easier to understand, Figure 1 The X direction, Y direction, and Z direction are defined as shown. Figure 1In the above, the X direction is the left-right direction of the paper, the Y direction is the depth direction of the paper, and the Z direction is the up-down direction of the paper. In addition, in the Z direction, the direction in which the device 100 is located when viewed from the probe device 1 is set as the up direction, and the direction in which the probe device 1 is located when viewed from the device 100 is set as the down direction.

[0032] In addition, for the probe 20 of the probe device 1, Figure 1 Although only one probe 20 is shown in FIG. 1 , the probe device 1 may include a plurality of probes 20. For example, the probe device 1 may include a plurality of probes 20 arranged along the Y direction.

[0033] exist Figure 1 , the probe device 1 is arranged in the lower direction of the device 100 when viewed from the Z direction. The first contact portion 21 of the probe 20 is exposed on the first surface 11 of the housing 10, and the second contact portion 22 of the probe 20 is exposed on the second surface 12 of the housing 10. The probe 20 is arranged in the housing 10 in such a manner that the first contact portion 21 contacts the electrode terminal 101 of the device 100 when the interval between the probe device 1 and the device 100 is narrowed along the Z direction. Furthermore, the probe device 1 is arranged in the housing 10 in such a manner that the contact region 220 of the second contact portion 22 contacts the electrode pad 201 of the substrate 200. As described later, when inspecting the device 100, the position of the contact region 220 of the second contact portion 22 that contacts the electrode pad 201 changes due to the change in the position of the first contact portion 21 in the Z direction.

[0034] When viewed from the Y direction, the probe 20 has a curved shape with a recessed portion facing upward. One end of the probe 20 located farther from the outer portion of the probe 20 opposite to the recessed portion (hereinafter referred to as the "curved portion") is the first contact portion 21. The other end of the probe 20 closer to the recessed portion is the second contact portion 22. A part of the arc-shaped area of ​​the outer edge of the curved portion is the contact area 220. When the XY plane defined by the X direction and the Y direction is used as the projection plane, the projection line connecting the first contact portion 21 and the second contact portion 22 (hereinafter referred to as the "extension direction" of the probe 20) extends along the X direction. In other words, when viewed from the Z direction, the probe 20 extends along the X direction.

[0035] The elastic portion 30 is cylindrical in shape and its axial direction extends in the Y direction. That is, the axial direction of the elastic portion 30 is perpendicular to the direction in which the first contact portion 21 of the probe 20 is displaced and perpendicular to the direction in which the probe 20 extends. The elastic portion 30 abuts against the inner side of the recess of the probe 20. In other words, the elastic portion 30 is sandwiched between the surface of the recess of the probe 20 and the inner wall of the housing 10.

[0036] For example, an insulating material such as an elastomer may be used for the first elastic member 31. For example, a resin material such as silicone rubber or polyurethane rubber may be used for the first elastic member 31. Figure 2 As shown, the second elastic member 32 is a cylindrical coil spring extending in the axial direction of the first elastic member 31 . Figure 2 The central axis of the coil spring shown extends in the Y direction in the same manner as the axial direction of the cylindrical first elastic member 31. The second elastic member 32 is entirely embedded in the first elastic member 31. For example, the second elastic member 32 may be a conductive coil spring such as a metal coil spring or an insulating coil spring such as a resin coil spring. The first elastic member 31 and the second elastic member 32 are integrated in such a manner that the elastic force of the first elastic member 31 is reinforced by the elastic force of the second elastic member 32. Specifically, the first elastic member 31 and the second elastic member 32 are integrated in such a manner that when the elastic portion 30 is compressed in a direction perpendicular to the Y-axis direction, the elastic force of the first elastic member 31 and the elastic force of the second elastic member 32 act in the same direction.

[0037] exist Figure 2 In the figure, the second elastic member 32 is an example of a coil spring having a circular cross-sectional shape, but of course the second elastic member 32 may also be in other shapes. For example, the second elastic member 32 in a spiral shape may be formed by winding a strip material having a flat plate with few concave and convex cross-sectional shapes.

[0038] When inspecting the device 100, if Figure 3 As shown, the electrode terminal 101 of the device 100 and the electrode pad 201 of the substrate 200 are electrically connected by using the conductive probe 20. That is, when inspecting the device 100, the device 100 is relatively moved along the Z direction relative to the probe device 1, and the first contact portion 21 of the probe 20 is brought into contact with the electrode terminal 101 of the device 100. At this time, due to the thrust applied to the first contact portion 21 between the first contact portion 21 and the electrode terminal 101, the probe 20 changes its posture inside the housing 10 in a state where the second contact portion 22 is in contact with the surface of the electrode pad 201.

[0039] Specifically, the posture of the probe 20 changes inside the housing 10 while the second contact portion 22 is kept in contact with the electrode pad 201, in response to the displacement of the first contact portion 21 in the Z direction caused by the push applied to the first contact portion 21. As the posture of the probe 20 changes, the position of the contact area 220 of the second contact portion 22 in contact with the electrode pad 201 changes. Figure 3 In FIG. 1 , the posture of the probe 20 and the shape of the elastic portion 30 are shown by solid lines in a state where the first contact portion 21 is in contact with the electrode terminal 101 (hereinafter also referred to as a “contact state”). Figure 3The dotted lines in the figure show the posture of the probe 20 and the shape of the elastic portion 30 in a state where the first contact portion 21 is not in contact with the electrode terminal 101 (hereinafter also referred to as a "non-contact state"). In the contact state when inspecting the device 100, the posture of the probe 20 changes so that the position of the contact region 220 is closer to the first contact portion 21 than in the non-contact state.

[0040] In the contact state, the elastic part 30 is sandwiched and compressed by the probe 20 and the housing 10 in accordance with the change in the posture of the probe 20 inside the housing 10. That is, in the contact state, the elastic part 30 is elastically deformed. The elastically deformed elastic part 30 applies force to the probe 20 in a direction to restore the posture of the probe 20 to the non-contact state. In other words, the elastic part 30 applies force to the probe 20 in a manner that pushes the first contact part 21 against the electrode terminal 101. As described above, the contact load applied to the probe 20 is generated by the elastic force of the elastic part 30.

[0041] The elastic part 30 of the probe device 1 is a structure in which the elastic second elastic member 32 and the first elastic member 31 such as an elastomer are integrated in such a way that elastic force acts in the same direction. Therefore, in the probe device 1, the reduction of the elastic force of the first elastic member 31 can be suppressed, and the durability of the elastic part 30 can be improved.

[0042] During the inspection of the device 100, the elastic force of the elastic portion 30 maintains the first contact portion 21 in contact with the electrode terminal 101 and the second contact portion 22 in contact with the electrode pad 201. Thus, when inspecting the device 100, the probe 20 can ensure electrical connection between the electrode terminal 101 of the device 100 and the electrode pad 201 of the substrate 200.

[0043] In the probe device 1, a part of the arc-shaped region of the outer edge of the curved portion of the probe 20 contacts the electrode pad 201 along a line extending in the Y direction as the contact region 220. Figure 3 As shown in the figure, the position of the contact area 220 in the contact state is closer to the first contact portion 21 than the position of the contact area 220 in the non-contact state. The reason for this is that the position change of the contact area 220 between the contact state and the non-contact state is that the position of the contact area 220 changes along the outer edge of the curved portion in accordance with the change in the posture of the probe 20. Since the contact area 220 is included in the arc-shaped area of ​​the curved portion, the position of the contact area 220 in contact with the electrode pad 201 changes smoothly according to the change in the posture of the probe 20. Therefore, even if the posture of the probe 20 changes, damage to the second contact portion 22 and the electrode pad 201 can be suppressed.

[0044] As described above, when inspecting the device 100, the posture of the probe 20 changes, causing the elastic portion 30 sandwiched between the probe 20 and the housing 10 to be elastically deformed. In addition, the elastic portion 30 applies force to the probe 20 in such a manner that the first contact portion 21 contacts the electrode terminal 101 of the device 100 with a predetermined push. That is, the elastic portion 30 applies force to the probe 20 in a direction that cancels the displacement of the first contact portion 21 caused by the push force applied to the first contact portion 21 when the first contact portion 21 is pressed against the electrode terminal 101. During the inspection of the device 100, that is, during the contact between the first contact portion 21 and the electrode terminal 101, the elastic portion 30 is in a state of compression deformation.

[0045] After the inspection of the device 100 is completed, the relative position of the device 100 in the Z direction with respect to the probe device 1 is changed in such a way that the interval between the device 100 and the probe device 1 is widened. The electrode terminal 101 of the device 100 and the first contact portion 21 of the probe 20 are separated, so that the thrust applied to the first contact portion 21 disappears. As a result, the shape of the elastic portion 30 is restored to the non-contact state, and the posture of the probe 20 is restored to the non-contact state by the elastic force of the elastic portion 30.

[0046] The probe 20 is supported by the housing 10 in such a manner that the posture of the probe 20 can be changed corresponding to the displacement of the position of the first contact portion 21 in the Z direction. The posture of the probe 20 changes inside the housing 10 in such a manner that the position of the contact area 220 of the second contact portion 22 that contacts the electrode pad 201 changes corresponding to the displacement of the first contact portion 21 in the Z direction. For example, although not shown in the figure, a part of the probe 20 may be protruded, and the protruding part of the probe 20 may be embedded in a support hole provided in the housing 10. Alternatively, a part of the probe 20 may be placed on a support portion of the housing 10 provided in the lower direction of the probe 20.

[0047] As described above, the probe device 1 includes the probe 20 that contacts the electrode terminal 101 and the electrode pad 201 at the same time, and the elastic part 30 that applies force to the probe 20 by elastic force when the probe 20 contacts the electrode terminal 101. The contact load applied to the probe 20 when the probe 20 contacts the electrode terminal 101 is controlled by the elastic force of the elastic part 30. The contact load is increased by increasing the elastic force of the elastic part 30, and the contact load is reduced by reducing the elastic force of the elastic part 30.

[0048] In the probe device 1, the elastic force of the elastic portion 30 is used to control the displacement (hereinafter also referred to as "stroke") of the first contact portion 21 caused by contact with the electrode terminal 101. That is, the stroke is reduced by increasing the elastic force of the elastic portion 30, and the stroke is increased by decreasing the elastic force of the elastic portion 30.

[0049] By setting the first elastic member 31 to be a cylindrical shape having a hollow portion inside, it is easy to control the size of the contact load and the stroke. In other words, by increasing the thickness from the outer periphery of the cylindrical first elastic member 31 to the hollow portion inside, the contact load can be increased or the stroke can be reduced. On the other hand, by reducing the thickness of the cylindrical elastic portion 30, the contact load can be reduced or the stroke can be increased.

[0050] For example, in order to set the elastic force of the elastic portion 30 so that the displacement of the first contact portion 21 caused by contact with the electrode terminal 101 is set to a predetermined value, the thickness of the first elastic member 31 from the outer periphery to the inner hollow portion of the first elastic member 31 is adjusted. For example, the predetermined value of the displacement of the first contact portion 21 is set so that the length of the contact mark generated at the electrode terminal 101 when the probe 20 contacts the electrode terminal 101 is less than a preset restriction value.

[0051] As described above, the elastic portion 30 of the probe device 1 of the first embodiment has a structure formed by integrating the first elastic member 31 and the second elastic member 32. The elastic force of the first elastic member 31 such as an elastomer is reinforced by the second elastic member 32. Therefore, compared with the case where the elastic portion 30 is a single material, the stability and durability of the elastic force of the elastic portion 30 can be improved. As a result, according to the probe device 1, the contact between the probe 20 and the electrode terminal 101 and the electrode pad 201 can be stabilized.

[0052] <Modification>

[0053] In the probe device 1 of the first embodiment, as Figure 4 As shown in FIG. 1 , the second elastic member 32 of the elastic portion 30 may also be a mesh-shaped cylindrical body. Figure 5 As shown, the second elastic member 32 is embedded in the first elastic member 31 , and the axial direction of the second elastic member 32 is the axial direction of the first elastic member 31 .

[0054] Even when the second elastic member 32 is a mesh-shaped cylindrical body, the first elastic member 31 and the second elastic member 32 are integrated so that the first elastic member 31 and the second elastic member 32 act in the same direction to suppress the decrease in the elastic force of the first elastic member 31, thereby improving the durability of the elastic portion 30. Figure 4 In the example, the second elastic member 32 is a honeycomb structure, but the second elastic member 32 may be any mesh-shaped cylindrical body as long as the elastic force acts in the same direction as the first elastic member 31 when the elastic portion 30 is compressed and deformed.

[0055] (Second embodiment)

[0056] In the probe device 1 of the second embodiment, as Figure 6 As shown in FIG. 1 , at least a portion of the second elastic member 32 is exposed on the surface of the first elastic member 31. Figure 7 , an example is shown in which the second elastic member 32 as a coil spring is entirely arranged on the surface of the first elastic member 31. Alternatively, the second elastic member 32 may be embedded in the surface of the first elastic member 31, and the first elastic member 31 and the second elastic member 32 may be integrated in such a manner that the surface of the second elastic member 32 is exposed on the surface of the first elastic member 31. The fact that at least part of the second elastic member 32 is exposed on the surface of the first elastic member 31 is a difference between the probe device 1 of the second embodiment and the first embodiment. As for other structures, the probe device 1 of the second embodiment is the same as the first embodiment.

[0057] according to Figure 6 In the probe device 1 shown, the posture of the probe 20 changes when inspecting the device 100, so that the elastic portion 30 sandwiched between the probe 20 and the housing 10 is elastically deformed, and the first contact portion 21 contacts the electrode terminal 101 with a predetermined push. During the inspection of the device 100, the elastic portion 30 is in a state of compression deformation. The elastic portion 30 applies force to the probe 20 in a direction to eliminate the displacement of the first contact portion 21 caused by the thrust applied to the first contact portion 21 when the first contact portion 21 is pressed against the electrode terminal 101.

[0058] Even if the second elastic member 32 is exposed on the surface of the first elastic member 31, the elastic force of the first elastic member 31 is reinforced by the second elastic member 32. Therefore, according to the probe device 1 of the second embodiment, the first elastic member 31 and the second elastic member 32 are integrated to suppress the decrease in the elastic force of the first elastic member 31, and the durability of the elastic portion 30 can be improved.

[0059] In addition, if Figure 8 As shown, when the same elastic portion 30 abuts against a plurality of probes 20, the second elastic member 32 may also be made of an insulating material so that the probes 20 are not short-circuited via the second elastic member 32 exposed on the surface of the first elastic member 31. Alternatively, Fig. 9 As shown, the second elastic member 32 is divided at positions between the probes 20. Even if the second elastic member 32 is a conductive material, short circuits between the probes 20 via the second elastic member 32 can be prevented by dividing the second elastic member 32 into a plurality of regions along the axial direction of the first elastic member 31.

[0060] As described above, according to the probe device 1 of the second embodiment, the elastic force of the first elastic member 31 is strengthened by the second elastic member 32 integrated with the first elastic member 31. Therefore, according to the probe device 1, the stability and durability of the elastic force of the elastic portion 30 can be improved. In other respects, the probe device 1 of the second embodiment is substantially the same as the first embodiment, and repeated descriptions are omitted.

[0061] <Modification>

[0062] In the probe device 1 of the second embodiment, as Fig.10 As shown in FIG. 1 , the second elastic member 32 disposed on the surface of the first elastic member 31 in an exposed manner may be a mesh-shaped cylindrical body. Fig.10 The honeycomb structure shown may also be a cylinder with meshes of other shapes. The second elastic member 32 may be disposed on the surface of the first elastic member 31 as a whole, or may be embedded in the surface of the first elastic member 31 and exposed on the surface of the first elastic member 31. Even in the case where the second elastic member 32 is a mesh-shaped cylinder, the first elastic member 31 and the second elastic member 32 are integrated to suppress the decrease in the elastic force of the first elastic member 31, thereby improving the durability of the elastic portion 30.

[0063] In the probe device 1 of the second embodiment, Figure 8 Similarly, when the same elastic portion 30 contacts a plurality of probes 20, the second elastic member 32 may be made of an insulating material so that the probes 20 do not short-circuit via the second elastic member 32. Alternatively, the second elastic member 32 of a conductive material may be divided between the probes 20 to prevent short-circuiting between the probes 20.

[0064] (Third embodiment)

[0065] The probe device 1 of the third embodiment includes a plurality of elastic parts 30 formed by integrating the first elastic member 31 and the second elastic member 32 inside the housing 10. Fig.11 As shown in the probe device 1, the first elastic portion 30A and the second elastic portion 30B, which are in contact with the probe 20, are arranged inside the housing 10. The first elastic portion 30A and the second elastic portion 30B are Figure 1The elastic part 30 of the probe device 1 shown is also arranged inside the recess of the probe 20, and is sandwiched between the surface of the recess of the probe 20 and the inner wall of the housing 10. The second elastic part 30B contacts the probe 20 at a position away from the position where the probe 20 contacts the first elastic part 30A. More specifically, the second elastic part 30B contacts the probe 20 at a position closer to the first contact part 21 than the contact area 220. The second elastic part 30B is arranged between the probe 20 and the substrate 200 in the lower direction of the first contact part 21. Therefore, when inspecting the device 100, the second elastic part 30B is elastically deformed between the probe 20 and the substrate 200 in accordance with the change in the posture of the probe 20. Moreover, the second elastic part 30B applies force to the probe 20 in the direction of restoring the posture of the probe 20 before the change, similarly to the first elastic part 30A. Hereinafter, the first elastic part 30A and the second elastic part 30B are described as the elastic part 30 without separately limiting them.

[0066] As described above, the probe device 1 of the third embodiment is different from the first embodiment in that a plurality of elastic portions 30 are provided inside the housing 10. The probe device 1 of the third embodiment is the same as the first embodiment in terms of other structures. Fig.11 In the probe device 1 shown, the posture of the probe 20 changes when inspecting the device 100, so that the plurality of elastic parts 30 are elastically deformed, and the first contact part 21 contacts the electrode terminal 101 with a predetermined push. During the inspection of the device 100, the plurality of elastic parts 30 are respectively in a state of compression deformation. The plurality of elastic parts 30 apply force to the probe 20 in a direction to eliminate the displacement of the first contact part 21 caused by the thrust applied to the first contact part 21 when the first contact part 21 is pressed against the electrode terminal 101.

[0067] In addition, Fig.11 In the embodiment, the elastic portion 30 is shown as an example in which the second elastic member 32 is embedded in the first elastic member 31. However, as in the probe device 1 of the second embodiment, the first elastic member 31 and the second elastic member 32 may be integrated in such a manner that at least a portion of the second elastic member 32 is exposed on the surface of the first elastic member 31. For example, the second elastic member 32 may be entirely disposed on the surface of the first elastic member 31, or a portion of the second elastic member 32 may be embedded in the surface of the first elastic member 31.

[0068] According to the probe device 1 of the third embodiment, the elastic force applied to the probe 20 is increased by having a plurality of elastic parts 30. In addition, the elastic part 30 formed by integrating the first elastic member 31 and the second elastic member 32 suppresses the decrease in the elastic force of the first elastic member 31, thereby improving the durability of the elastic part 30. In other respects, the probe device 1 of the third embodiment is substantially the same as the first and second embodiments, and repeated descriptions are omitted.

[0069] <Modification>

[0070] In the probe device 1 of the third embodiment, the second elastic portion 30B may be disposed between the probe 20 and the housing 10. Fig.12 As shown, the second elastic portion 30B is disposed on the base portion 15 of the housing 10 provided below the first contact portion 21 of the probe 20 , so that the second elastic portion 30B is elastically deformed between the probe 20 and the base portion 15 .

[0071] In addition, if Fig.13 As shown in the figure, the outer edge of the first elastic member 31 of the second elastic portion 30B viewed from the Y direction may be set to a rectangular shape. For example, the first elastic member 31 of the second elastic portion 30B may be a tube shape having a hollow portion. When the outer edge of the first elastic member 31 is set to a rectangular shape, for example, the spiral second elastic member 32 may be formed by winding a strip material having a flat plate shape with few concave and convex cross-sections.

[0072] (Other Embodiments)

[0073] As described above, the present invention is described through the embodiments, but it should not be understood that the description and drawings constituting a part of the present disclosure limit the present invention. Based on the present disclosure, a person skilled in the art will be able to clearly understand various alternative embodiments, examples, and application techniques.

[0074] For example, in the above content, the elastic part 30 is illustrated as a cylindrical shape, but the shape of the elastic part 30 is not limited to the cylindrical shape. For example, the elastic part 30 may also be a cylindrical shape without a hollow part, and the outer edge of the elastic part 30 observed from the Y direction may not be a circular shape but a polygonal shape. In addition, the second elastic member 32 may also be a plate-shaped elastic member. In addition, the electrode terminal 101 of the device 100 is illustrated as a lead electrode, but the electrode terminal 101 may also be a pad electrode or a bump electrode, or an electrode of a shape other than these.

[0075] When a conductive material such as a metal spring is used for the second elastic member 32, since the distance between the second elastic member 32 and the probe 20 is relatively close, the measured value of the high-frequency characteristic of the device 100 may be affected by the electricity of the second elastic member 32. Therefore, this problem can be solved by connecting the end of the second elastic member 32 made of a conductive material to a ground potential (GND) or the like.

[0076] As described above, the present invention naturally includes various embodiments and the like that are not described here.

[0077] Description of Reference Numerals

[0078] 1. Probe device; 10. Shell; 11. First surface; 12. Second surface; 20. Probe; 21. First contact portion; 22. Second contact portion; 30. Elastic portion; 31. First elastic member; 32. Second elastic member; 100. Device; 101. Electrode terminal; 200. Substrate; 201. Electrode pad.

Claims

1. A probe device that electrically connects an electrode terminal of a device to be inspected and an electrode pad connected to an inspection device, wherein: The probe device comprises: A housing having a first surface and a second surface opposite to the first surface; a conductive probe, which is supported by the housing and has a first contact portion exposed on the first surface and a second contact portion exposed on the second surface, wherein a posture of the probe changes inside the housing in such a manner that a position of a contact area of ​​the second contact portion that contacts the electrode pad changes in accordance with a displacement of the first contact portion; and The elastic portion is arranged inside the shell, and has a first elastic member and a second elastic member integrated with the first elastic member to strengthen the elastic force of the first elastic member. The elastic portion is elastically deformed in response to the change in the posture of the probe inside the shell, and applies force to the probe in a direction to eliminate the displacement of the first contact portion.

2. The probe device according to claim 1, wherein: The first elastic member is an elastic body.

3. The probe device according to claim 1, wherein: The second elastic member is embedded in the first elastic member.

4. The probe device according to claim 1, wherein: At least a portion of the second elastic member is exposed on the surface of the first elastic member.

5. The probe device according to claim 3 or 4, wherein: The second elastic member is a cylindrical coil spring.

6. The probe device according to claim 3 or 4, wherein: The second elastic member is a mesh-shaped cylindrical body.

7. The probe device according to claim 3 or 4, wherein: The first elastic member has a hollow portion inside.

8. The probe device according to claim 7, wherein: By adjusting the thickness of the first elastic member from the outer periphery of the first elastic member to the hollow portion, the elastic force of the elastic portion is set so that the displacement of the first contact portion caused by contact with the electrode terminal is set to a predetermined value, The predetermined value of the displacement amount is set so that the length of a contact mark generated at the electrode terminal when the probe contacts the electrode terminal is equal to or less than a preset restriction value.

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