An exhaust gas treatment device for fluorine gas production

Abstract

The present invention belongs to the technical field of fluorine gas production, and specifically relates to an exhaust gas treatment device for fluorine gas production, which includes a base platform and a working box installed thereon. A liquid changing component and a moving plate are slidably installed inside the working box respectively. The liquid changing component and the moving plate divide the working box into a liquid changing chamber, a treatment chamber, and a liquid discharging chamber. The working box is connected to a gas collecting pipe and a liquid inlet pipe. The liquid changing component includes a lifting ring and a rotating ring rotatably installed therein. By injecting high-concentration alkali solution into the groove of the lifting ring through the liquid inlet pipe, the lifting ring compresses the long spring, and the treatment chamber is communicated with the liquid changing chamber. Then, the lifting ring presses the difluoromonooxide gas in the treatment chamber, and conveys the difluoromonooxide through the gap between the upper top plate and the lower push plate to the liquid changing chamber, so that the difluoromonooxide in the liquid changing chamber reacts with high-concentration calcium hydroxide, realizing the treatment of difluoromonooxide and avoiding the leakage of difluoromonooxide when it is discharged from the working box together with the alkali solution inside the treatment chamber.

Description

Technical Field

[0001] The present invention belongs to the technical field of fluorine gas production, and particularly relates to a tail gas treatment device for fluorine gas production. Background Art

[0002] The main waste gas generated in the fluorine gas production process is fluorine-containing tail gas. The fluorine-containing tail gas has characteristics such as toxicity, corrosiveness, and difficulty in treatment. Therefore, effective measures need to be taken for treatment.

[0003] After the fluorine-containing tail gas generated in fluorine gas production is collected by an air duct, it is introduced into a special alkali solution tank to remove the fluorine in the tail gas. When the tail gas enters the alkali solution tank and contacts the alkali solution, calcium fluoride precipitate will be formed by the reaction of the two. The existing tail gas treatment device has the following problems when in use;

[0004] First, when dealing with the precipitate, it is usually necessary to carry out the treatment when the whole device stops, resulting in the inability of the whole tail gas treatment device to work continuously, reducing the work efficiency.

[0005] Second, since the alkali solution used for tail gas treatment is usually calcium hydroxide, calcium fluoride precipitate is formed by the reaction of calcium hydroxide with fluorine gas in the tail gas. However, as the amount of waste gas introduced into the alkali solution tank increases, the concentration of calcium hydroxide in the solution decreases. The reaction of low-concentration calcium hydroxide with fluorine gas will produce by-product difluoromonoxide. Difluoromonoxide is a colorless, almost odorless highly toxic gas and can react slowly with water. During the process of replacing the alkali solution, difluoromonoxide will be discharged from the alkali solution tank before reacting with water, which is extremely likely to cause the leakage of difluoromonoxide. Summary of the Invention

[0006] The purpose of the present invention is to provide a tail gas treatment device for fluorine gas production in view of the deficiencies of the prior art to solve the technical problems in the prior art.

[0007] The purpose of the present invention can be achieved by the following technical solutions: A tail gas treatment device for fluorine gas production, which includes a base platform and a working box installed thereon. A liquid replacement component and a moving plate are slidably installed inside the working box respectively. The liquid replacement component and the moving plate divide the working box into a liquid replacement cavity, a treatment cavity, and a drainage cavity. The working box is connected to a gas collecting pipe and a liquid inlet pipe. The gas collecting pipe is communicated with the treatment cavity, and the liquid inlet pipe is communicated with the liquid replacement cavity. A drainage pipe is installed at the bottom of the working box, and the drainage pipe is connected to a liquid extraction pump;

[0008] The liquid replacement component includes a lifting ring and a rotating ring rotatably installed therein. The rotating ring is driven by a transmission motor. Upper through holes are formed in the rotating ring, and lower through holes are formed in the lifting ring. When the upper through holes coincide with the lower through holes, the liquid replacement cavity is communicated with the treatment cavity. Guide rods are fixedly installed on the moving plate, and the guide rods penetrate through the lifting ring and are slidably matched with the lifting ring. A long spring is connected between the moving plate and the lifting ring;

[0009] A telescopic rod is installed on the top of the working box. An upper top plate and a lower push plate are respectively installed on the telescopic rod. The lifting ring is located between the upper top plate and the lower push plate.

[0010] As a further optimization or improvement of this solution, a groove is opened on the lifting ring. The rotating ring rotates within the groove, and the nozzle of the liquid inlet pipe faces the groove.

[0011] As a further optimization or improvement of this solution, a screw rod is fixedly installed at the bottom of the working box. A plug column is installed on the screw rod. The plug column seals the moving plate. A short spring is installed between the moving plate and the bottom of the working box, and the short spring is located within the liquid discharge cavity.

[0012] As a further optimization or improvement of this solution, a support platform is installed at the bottom of the working box. An electromagnetic chuck is installed on the support platform. The electromagnetic chuck adsorbs the moving plate, and the support platform is installed within the liquid discharge cavity.

[0013] As a further optimization or improvement of this solution, the liquid replacement assembly further includes a detection groove and a transmission groove installed on the lifting ring. A transmission motor is installed inside the transmission groove. A gear is installed at the output end of the transmission motor. An internal gear ring is installed on the rotating ring, and the gear meshes with the internal gear ring.

[0014] As a further optimization or improvement of this solution, a photosensitive disc is installed inside the moving plate, and an irradiation lamp is installed inside the detection groove.

[0015] As a further optimization or improvement of this solution, sealing rings are installed at both ends of the lifting ring. The lifting ring abuts against the upper top plate and the lower push plate respectively through the sealing rings.

[0016] As a further optimization or improvement of this solution, a guiding strip is vertically installed inside the working box. The lifting ring and the moving plate are both in sliding fit with it.

[0017] Advantages of the present invention:

[0018] (1) When the present invention needs to replace the alkali solution inside the treatment chamber, the high-concentration alkali solution is injected into the groove of the lifting ring through the liquid inlet pipe. As the alkali solution is injected, the weight of the lifting ring gradually increases, and the lifting ring moves downward to disengage from the sealed connection with the upper top plate. The lifting ring compresses the long spring. At this time, the treatment chamber is communicated with the liquid replacement chamber. As the lifting ring moves downward, the space inside the treatment chamber decreases. At the same time, the lifting ring presses the difluoromonoxide gas inside the treatment chamber, and conveys the difluoromonoxide through the gap between the upper top plate and the lower push plate to the liquid replacement chamber. The difluoromonoxide conveyed into the liquid replacement chamber reacts with the high-concentration calcium hydroxide, realizing the treatment of difluoromonoxide, and avoiding the leakage of difluoromonoxide when it is discharged from the working box together with the alkali solution inside the treatment chamber.

[0019] (2)When the lye needs to be replaced in the present invention, the moving plate moves downward and disengages from the plug column. At this time, the lye to be replaced inside the treatment chamber enters the drain chamber through the screw. The lye that enters the drain chamber is pumped away by the liquid extraction pump to achieve the liquid drainage function. At the same time, when the lye passes through the screw, a vortex will be formed near the drain port of the moving plate, stirring the sediment near the drain port, so that the sediment can be completely drained through the screw, avoiding the need to stop the equipment to separately treat the sediment. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below with reference to the drawings.

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0022] Figure 2 It is a schematic diagram of the internal structure of the base.

[0023] Figure 3 It is a cross-sectional view of the overall structure of the present invention.

[0024] Figure 4 It is a schematic diagram of the internal structure of the working box.

[0025] Figure 5 For Figure 4 the enlarged view of the structure of part A of

[0026] Figure 6 It is an exploded view of the internal structure of the working box.

[0027] Figure 7 It is a schematic diagram of the structure of the liquid replacement assembly.

[0028] Figure 8 It is a schematic diagram of the connection structure between the lifting ring and the rotating ring.

[0029] In the figure, the labels are: 1, base; 2, liquid extraction pump; 3, working box; 4, gas collecting pipe; 5, liquid inlet pipe; 6, liquid replacement assembly; 601, lifting ring; 602, detection groove; 603, transmission groove; 604, lower through hole; 605, rotating ring; 606, upper through hole; 607, internal gear ring; 608, sealing ring; 609, transmission motor; 610, gear; 7, liquid replacement chamber; 8, treatment chamber; 9, moving plate; 11, photosensitive disc; 12, irradiation lamp; 13, guide rod; 14, long spring; 15, support platform; 16, electromagnetic chuck; 17, short spring; 18, screw; 19, plug column; 20, telescopic rod; 21, upper top plate; 22, lower push plate; 23, guide strip; 24, drain pipe; 25, drain chamber. SPECIFIC EMBODIMENTS

[0030] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0031] Referring to Figures 1-8 , a tail gas treatment device for fluorine gas production, which includes a base 1 and a working box 3 installed thereon. Inside the working box 3, a liquid changing component 6 and a moving plate 9 are slidably installed respectively. The liquid changing component 6 and the moving plate 9 divide the working box 3 into a liquid changing chamber 7, a treatment chamber 8 and a liquid discharging chamber 25. The working box 3 is connected to a gas collecting pipe 4 and a liquid inlet pipe 5. The gas collecting pipe 4 communicates with the treatment chamber 8, and the liquid inlet pipe 5 communicates with the liquid changing chamber 7. A liquid discharging pipe 24 is installed at the bottom of the working box 3, and the liquid discharging pipe 24 is connected to a liquid pumping pump 2;

[0032] The liquid changing component 6 includes a lifting ring 601 and a rotating ring 605 rotatably installed therein. The rotating ring 605 is driven by a transmission motor 609. An upper through hole 606 is opened on the rotating ring 605, and a lower through hole 604 is opened on the lifting ring 601. When the upper through hole 606 coincides with the lower through hole 604, the liquid changing chamber 7 communicates with the treatment chamber 8. A guide rod 13 is fixedly installed on the moving plate 9. The guide rod 13 penetrates through the lifting ring 601 and is slidably matched with the lifting ring 601. A long spring 14 is connected between the moving plate 9 and the lifting ring 601;

[0033] A telescopic rod 20 is installed at the top of the working box 3. An upper top plate 21 and a lower pushing plate 22 are installed on the telescopic rod 20 respectively. The lifting ring 601 is located between the upper top plate 21 and the lower pushing plate 22.

[0034] Specifically, a groove is opened on the lifting ring 601. The rotating ring 605 rotates in the groove, and the pipe orifice of the liquid inlet pipe 5 faces the groove.

[0035] Specifically, the liquid changing component 6 further includes a detection groove 602 and a transmission groove 603 installed on the lifting ring 601. A transmission motor 609 is installed inside the transmission groove 603. The output end of the transmission motor 609 is installed with a gear 610. An internal gear ring 607 is installed on the rotating ring 605. The gear 610 meshes with the internal gear ring 607.

[0036] Specifically, a photosensitive disc 11 is installed inside the moving plate 9, and an irradiation lamp 12 is installed inside the detection groove 602.

[0037] It should be noted that the gas collecting pipe 4 is specifically used for collecting the tail gas in the process of fluorine gas production. Then, the tail gas inside the gas collecting pipe 4 is introduced into the working box 3 to realize the treatment of the fluorine-containing gas in the tail gas.

[0038] In the initial state, referring toFigure 4 , the space inside the working box 3 is separated into a liquid changing chamber 7, a treatment chamber 8, and a liquid discharging chamber 25 by a lifting ring 601 and a moving plate 9. Alkali liquid is introduced into the treatment chamber 8 to react with the fluorine-containing waste gas. During use, the gas collecting pipe 4 passes the tail gas through the treatment chamber 8, and the fluorine-containing waste gas in the tail gas reacts with the alkali liquid inside the treatment chamber 8 to generate calcium fluoride precipitate. The precipitate sinks and lands on the moving plate 9. During this process, the irradiation lamp 12 irradiates downward. Since the calcium hydroxide solution is a colorless liquid, the light of the irradiation lamp 12 directly irradiates the photosensitive disc 11 inside the moving plate 9. When the precipitate lands on the moving plate 9, the light intensity received by the photosensitive disc 11 decreases, thereby judging the amount of calcium fluoride precipitate generated. When the amount of precipitate generated in the relative time decreases, it indicates that the concentration of calcium hydroxide in the alkali liquid inside the treatment chamber 8 has decreased. At this time, the low-concentration calcium hydroxide will react with the fluorine-containing tail gas in the waste gas to generate toxic difluoromonoxide. Therefore, the present invention needs to treat difluoromonoxide and replace the alkali liquid inside the treatment chamber 8 while avoiding the leakage of difluoromonoxide (Reaction equation of low-concentration calcium hydroxide and fluorine gas: 2F2 + 2Ca(OH)2 → 2CaF2 + 2H2O + OF2↑; Reaction equation of high-concentration calcium hydroxide and fluorine gas: 2F2 + 4Ca(OH)2 → 4CaF2 + O2↑ + 2H2O).

[0039] In the initial state, see Figure 4 , the lifting ring 601 is pushed upward by the long spring 14, so that the lifting ring 601 is hermetically connected to the upper top plate 21 under the action of the sealing ring 608, blocking the liquid changing chamber 7 and the treatment chamber 8, see Figure 8, at this time, the upper through-hole 606 on the swivel ring 605 is separated from the lower through-hole 604 on the lifting ring 601. When it is necessary to replace the lye inside the processing chamber 8, the high-concentration lye is injected into the groove of the lifting ring 601 through the liquid inlet pipe 5. As the lye is injected, the weight of the lifting ring 601 gradually increases, and the lifting ring 601 moves downward and disengages from the sealed connection with the upper top plate 21. The lifting ring 601 compresses the long spring 14. At this time, the processing chamber 8 is communicated with the liquid-changing chamber 7. As the lifting ring 601 moves downward, the space inside the processing chamber 8 decreases. At the same time, the lifting ring 601 presses the difluoromonoxide gas inside the processing chamber 8, and conveys the difluoromonoxide through the gap between the upper top plate 21 and the lower push plate 22 to the liquid-changing chamber 7. The difluoromonoxide conveyed into the liquid-changing chamber 7 reacts with the high-concentration calcium hydroxide to realize the treatment of the difluoromonoxide, and avoid the leakage of the difluoromonoxide when it is discharged from the working box 3 together with the lye to be replaced. As the lye in the groove inside the lifting ring 601 increases, the lifting ring 601 presses the lower push plate 22 and seals with the lower push plate 22 through the sealing ring 608 on the lifting ring 601, blocking the liquid-changing chamber 7 from the processing chamber 8. At this time, the lye injected into the groove of the lifting ring 601 gradually overflows from the groove, causing the lifting ring 601 to drive the lower push plate 22 to move downward synchronously and press the lye to be replaced inside the processing chamber 8. Under the pressing of the lifting ring 601 and the lower push plate 22, the moving plate 9 moves downward, and the short spring 17 is compressed, causing the plug column 19 to disengage from the blockage of the moving plate 9. Under the pressing of the lifting ring 601 and the lower push plate 22, the lye to be replaced inside the processing chamber 8 quickly enters the drainage chamber 25 through the screw 18. Then, the liquid extraction pump 2 is started to extract the lye inside the drainage chamber 25. Then, the electromagnetic chuck 16 is started to adsorb the moving plate 9 and fix the position of the moving plate 9. When the lye passes through the screw 18, a vortex will be formed near the drainage port of the moving plate 9, stirring the precipitate near the drainage port, so that the precipitate can be completely discharged through the screw 18.

[0040] When the lye inside the processing chamber 8 is completely drained, the electromagnetic chuck 16 is turned off, and the short spring 17 rebounds. The short spring 17 drives the moving plate 9 to reset, causing the plug column 19 to block the moving plate 9 again. Then, the drive motor 609 is started. The drive motor 609 drives the swivel ring 605 to rotate through the gear 610, so that the upper through-hole 606 on the swivel ring 605 coincides with the lower through-hole 604 on the lifting ring 601. At this time, the lye inside the liquid-changing chamber 7 is conveyed into the processing chamber 8 through the upper through-hole 606 and the lower through-hole 604. When all the lye inside the liquid-changing chamber 7 enters the processing chamber 8, the lifting ring 601 resets. At this time, the lifting ring 601 is re-sealed with the upper top plate 21, and the drive motor 609 drives the swivel ring 605 to reset, and the lye replacement is completed.

[0041] It should be noted that the height of the lye inside the processing chamber 8 is flush with the bottom of the lower push plate 22, ensuring that all the difluoromonoxide gas inside the processing chamber 8 is discharged into the liquid replacement chamber 7 during the downward movement of the lifting ring 601; the amount of lye injected into the liquid replacement chamber 7 by the liquid inlet pipe 5 is the same as the amount of lye to be replaced in the processing chamber 8, ensuring that after the lye in the processing chamber 8 is drained, the short spring 17 can drive the moving plate 9 to return to its normal position. The rotating ring 605 and the rotating connection of the lifting ring 601, as well as the positions that can be directly contacted by the lye, are all subjected to sealing and anti-corrosion treatment. The moving plate 9 is made of transparent anti-corrosion plastic, enabling the light of the irradiation lamp 12 to directly pass through the moving plate 9 and irradiate the photosensitive disc 11, improving the reception efficiency of the photosensitive disc 11 and the accuracy of the photosensitive disc 11.

[0042] See Figure 4 and Figure 6 , a screw rod 18 is fixedly installed at the bottom of the working box 3, a plug column 19 is installed on the screw rod 18, the plug column 19 blocks the moving plate 9, and a short spring 17 is installed between the moving plate 9 and the bottom of the working box 3. The short spring 17 is located in the liquid drainage chamber 25.

[0043] It should be noted that in the state where the lye does not need to be replaced, the plug column 19 blocks the moving plate 9; when the lye needs to be replaced, the moving plate 9 moves downward and disengages from the plug column 19. At this time, the lye to be replaced inside the processing chamber 8 enters the liquid drainage chamber 25 through the screw rod 18, and the lye entering the liquid drainage chamber 25 is pumped away by the liquid extraction pump 2 to achieve the liquid drainage function. At the same time, when the lye passes through the screw rod 18, a vortex will be formed near the liquid drainage port of the moving plate 9, stirring the sediment near the liquid drainage port, enabling the sediment to be completely drained through the screw rod 18, and avoiding the need for the equipment to stop and separately treat the sediment.

[0044] See Figure 4 and Figure 6 , a support platform 15 is installed at the bottom of the working box 3, an electromagnetic chuck 16 is installed on the support platform 15, the electromagnetic chuck 16 adsorbs the moving plate 9, and the support platform 15 is installed inside the liquid drainage chamber 25.

[0045] It should be noted that the function of the support platform 15 is to limit the displacement of the moving plate 9 to prevent excessive displacement of the moving plate 9. During the liquid drainage process of the lye inside the processing chamber 8, the pressure of the short spring 17 gradually decreases. It is very likely that the lye inside the processing chamber 8 is not completely drained and the short spring 17 returns to its original position. Therefore, the electromagnetic chuck 16 on the support platform 15 adsorbs and fixes the moving plate 9 to avoid the above situation and ensure that the lye inside the processing chamber 8 is completely drained.

[0046] See Figures 4-5 , sealing rings 608 are installed at both ends of the lifting ring 601, and the lifting ring 601 abuts against the upper top plate 21 and the lower push plate 22 respectively through the sealing rings 608.

[0047] It should be noted that sealing rings 608 are installed at both the upper and lower ends of the lifting ring 601. The lifting ring 601 is hermetically connected to the upper top plate 21 and the lower push plate 22 through the sealing rings 608 respectively.

[0048] Refer to Figure 6 , a guide bar 23 is vertically installed inside the working box 3, and the lifting ring 601 and the moving plate 9 are both slidably engaged therewith.

[0049] It should be noted that the moving directions of the liquid changing assembly 6 and the moving plate 9 are vertical lifting movements.

[0050] The implementation principle of the present invention is as follows:

[0051] During use, the gas collecting pipe 4 passes the tail gas through the treatment chamber 8, and the alkali solution inside the treatment chamber 8 reacts with the fluorine-containing waste gas in the tail gas to generate calcium fluoride precipitate. The precipitate sinks and falls on the moving plate 9. During this process, the irradiation lamp 12 irradiates downward. Since the calcium hydroxide solution is a colorless liquid, the light of the irradiation lamp 12 directly irradiates the photosensitive disc 11 inside the moving plate 9. When the precipitate falls on the moving plate 9, the light intensity received by the photosensitive disc 11 decreases, thereby judging the amount of calcium fluoride precipitate generated. When the amount of precipitate generated in the relative time decreases, it indicates that the concentration of calcium hydroxide in the alkali solution inside the treatment chamber 8 has decreased. At this time, the low-concentration calcium hydroxide will react with the fluorine-containing tail gas in the waste gas to generate toxic difluoro monoxide. Therefore, the present invention needs to treat difluoro monoxide to avoid the leakage of difluoro monoxide while replacing the alkali solution inside the treatment chamber 8.

[0052] In the initial state, refer to Figure 4 , the lifting ring 601 is pushed upward by the long spring 14, so that the lifting ring 601 is hermetically connected to the upper top plate 21 under the action of the sealing ring 608, blocking the liquid changing chamber 7 from the treatment chamber 8. Refer to Figure 8, at this time, the upper through hole 606 on the swivel ring 605 is separated from the lower through hole 604 on the lifting ring 601. When it is necessary to replace the lye inside the processing chamber 8, the high-concentration lye is injected into the groove of the lifting ring 601 through the liquid inlet pipe 5. As the lye is injected, the weight of the lifting ring 601 gradually increases, and the lifting ring 601 moves downward to disengage from the sealed connection with the upper top plate 21. The lifting ring 601 compresses the long spring 14. At this time, the processing chamber 8 is communicated with the liquid changing chamber 7. As the lifting ring 601 moves downward, the space inside the processing chamber 8 decreases. At the same time, the lifting ring 601 presses the difluoromonoxide gas inside the processing chamber 8, and conveys the difluoromonoxide through the gap between the upper top plate 21 and the lower push plate 22 to the liquid changing chamber 7. The difluoromonoxide conveyed into the liquid changing chamber 7 reacts with the high-concentration calcium hydroxide to achieve the treatment of the difluoromonoxide, avoiding the leakage of the difluoromonoxide when it is discharged together with the lye to be replaced from the working box 3. As the lye in the groove inside the lifting ring 601 increases, the lifting ring 601 presses the lower push plate 22 and is sealed with the lower push plate 22 through the sealing ring 608 on the lifting ring 601, blocking the liquid changing chamber 7 from the processing chamber 8. At this time, the lye injected into the groove of the lifting ring 601 gradually overflows from the groove, causing the lifting ring 601 to drive the lower push plate 22 to move downward synchronously and press the lye to be replaced inside the processing chamber 8. Under the pressing of the lifting ring 601 and the lower push plate 22, the moving plate 9 moves downward, and the short spring 17 is compressed, causing the plug column 19 to disengage from the blockage of the moving plate 9. Under the pressing of the lifting ring 601 and the lower push plate 22, the lye to be replaced inside the processing chamber 8 quickly enters the drain chamber 25 through the screw 18. Then, the liquid extraction pump 2 is started to extract the lye inside the drain chamber 25. Then, the electromagnetic chuck 16 is started to adsorb the moving plate 9 and fix the position of the moving plate 9. When the lye passes through the screw 18, a vortex will be formed near the drain port of the moving plate 9, stirring the precipitate near the drain port, so that the precipitate can be completely discharged through the screw 18.

[0053] After the lye inside the processing chamber 8 is completely drained, the electromagnetic chuck 16 is turned off, and the short spring 17 rebounds. The short spring 17 drives the moving plate 9 to reset, causing the plug column 19 to re-block the moving plate 9. Then, the drive motor 609 is started. The drive motor 609 drives the swivel ring 605 to rotate through the gear 610, so that the upper through hole 606 on the swivel ring 605 coincides with the lower through hole 604 on the lifting ring 601. At this time, the lye inside the liquid changing chamber 7 is conveyed into the processing chamber 8 through the upper through hole 606 and the lower through hole 604. After all the lye inside the liquid changing chamber 7 enters the processing chamber 8, the lifting ring 601 resets. At this time, the lifting ring 601 is re-sealed with the upper top plate 21, and the drive motor 609 drives the swivel ring 605 to reset, and the lye replacement is completed.

[0054] The foregoing has shown and described the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments, and what is described in the above embodiments and the specification is only to illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements fall within the scope of the present invention claimed.

Claims

1. A tail gas treatment device for fluorine gas production, characterized in that: The invention comprises a base (1) and a working box (3) mounted thereon, wherein a liquid exchange component (6) and a movable plate (9) are slidably mounted inside the working box (3), the liquid exchange component (6) and the movable plate (9) divide the working box (3) into a liquid exchange chamber (7), a processing chamber (8) and a liquid discharge chamber (25), the working box (3) is connected to an air collecting pipe (4) and a liquid inlet pipe (5), the air collecting pipe (4) is connected to the processing chamber (8), the liquid inlet pipe (5) is connected to the liquid exchange chamber (7), a liquid discharge pipe (24) is mounted at the bottom of the working box (3), and the liquid discharge pipe (24) is connected to a liquid pump (2); The liquid exchange component (6) comprises a lifting ring (601) and a rotating ring (605) rotatably mounted therein, the rotating ring (605) being driven by a transmission motor (609), an upper through hole (606) being provided on the rotating ring (605), and a lower through hole (604) being provided on the lifting ring (601); when the upper through hole (606) and the lower through hole (604) are overlapped, the liquid exchange chamber (7) and the processing chamber (8) are connected, a guide rod (13) is fixedly mounted on the movable plate (9), the guide rod (13) passes through the lifting ring (601) and is slidably matched with the lifting ring (601), and a long spring (14) is connected between the movable plate (9) and the lifting ring (601); A telescopic rod (20) is installed on the top of the working box (3), an upper top plate (21) and a lower push plate (22) are respectively installed on the telescopic rod (20), and a lifting ring (601) is located between the upper top plate (21) and the lower push plate (22); The lifting ring (601) is provided with a groove, the rotating ring (605) is located in the groove and rotates, and the pipe mouth of the liquid inlet pipe (5) faces the groove; The liquid replacement assembly (6) further comprises a detection slot (602) and a transmission slot (603) mounted on the lifting ring (601); a transmission motor (609) is mounted inside the transmission slot (603); a gear (610) is mounted on the output end of the transmission motor (609); an inner gear ring (607) is mounted on the rotating ring (605); and the gear (610) meshes with the inner gear ring (607); Sealing rings (608) are installed at both ends of the lifting ring (601), and the lifting ring (601) abuts against the upper top plate (21) and the lower push plate (22) respectively through the sealing ring (608).

2. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: A screw rod (18) is fixedly mounted on the bottom of the working box (3), a plug rod (19) is mounted on the screw rod (18), the plug rod (19) blocks the movable plate (9), a short spring (17) is mounted between the movable plate (9) and the bottom of the working box (3), and the short spring (17) is located in the drainage cavity (25).

3. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: A support platform (15) is installed at the bottom of the working box (3), an electromagnetic suction cup (16) is installed on the support platform (15), the electromagnetic suction cup (16) adsorbs the movable plate (9), and the support platform (15) is installed in the drainage cavity (25).

4. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: The movable plate (9) has a light-sensitive optical disc (11) installed inside, and the detection slot (602) has an irradiation lamp (12) installed inside.

5. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: A guide bar (23) is vertically installed inside the working box (3), and the lifting ring (601) and the movable plate (9) are both slidably matched with the guide bar.

Images