Vibration reducing device for transferring vehicle and vehicle transferring system

Abstract

The present invention relates to a shock reducing device for a transfer vehicle and a transfer vehicle system, the shock reducing device for a transfer vehicle reducing shock of a transfer vehicle provided with a driving portion and two pairs of wheels, the shock reducing device comprising: a support shaft for supporting the driving portion and the two pairs of wheels; supporting the transfer vehicle above a floor arranged between the transfer vehicle and a crane; and a first shock reducing unit disposed on the base plate to reduce distortion of the base plate, the first shock reducing unit including: a reinforcing plate disposed above the base plate; and a plurality of first springs spaced apart from each other at an edge of the reinforcing plate, and elastically supporting the reinforcing plate between the reinforcing plate and the bottom plate.

Description

Technical Field

[0001] The present invention relates to a vibration reducing device for transferring a vehicle and a transferring vehicle system including the vibration reducing device. Background Art

[0002] Semiconductor (or display) manufacturing processes are processes for manufacturing semiconductor elements on substrates (e.g., wafers), including, for example, exposure, deposition, etching, ion implantation, cleaning, packaging, etc. A manufacturing plant for manufacturing semiconductor elements is composed of one or more layers of clean rooms, and manufacturing equipment for performing semiconductor manufacturing processes is arranged on each layer.

[0003] In order to maximize the efficiency of the semiconductor manufacturing process, not only methods for improving each semiconductor manufacturing process are introduced, but also techniques for quickly and efficiently transferring items (e.g., substrates) between each manufacturing equipment are introduced. Representatively, an OHT (overhead hoist transport) system is used as a transfer vehicle system for transferring items along a path set on the ceiling of a semiconductor manufacturing plant. The OHT system includes a track constituting a travel path and a transfer vehicle that travels along the track and transfers items. In addition, in the case where items need to be kept during the transfer between semiconductor manufacturing equipment, a storage system for storing the items can be arranged.

[0004] The transfer vehicle loads and unloads the articles in order to perform the assigned operation, and repeats the running action and the stopping action. The transfer vehicle can load and unload the articles by raising and lowering the crane holding the articles.

[0005] On the other hand, when the sliding drive is accelerated or curved driving is performed in order to increase the speed of loading and unloading articles of the transfer vehicle, the vibration of the transfer vehicle is transmitted to the crane, so that the articles may be damaged. Summary of the invention

[0006] Technical issues

[0007] The technical problem to be solved by the present invention is to provide a vibration reducing device for a transfer vehicle and a transfer vehicle system including the vibration reducing device, which can minimize the vibration transmitted from the transfer vehicle to the crane.

[0008] The technical problems of the present invention are not limited to the above-mentioned technical problems, and other technical problems not mentioned can be clearly understood by those skilled in the art from the following contents.

[0009] Technical Solution

[0010] One aspect of the vibration reducing device for a transfer vehicle of the present invention for solving the technical problem relates to a vibration reducing device for a transfer vehicle for reducing the vibration of a transfer vehicle provided with a driving portion and two pairs of wheels, wherein the vibration reducing device includes: a support shaft supporting the transfer vehicle above a bottom plate provided between the transfer vehicle and a crane; and a first vibration reducing unit provided on the bottom plate to reduce the distortion of the bottom plate, the first vibration reducing unit including: a reinforcing plate provided above the bottom plate; and a first spring spaced apart from each other and arranged in plural at an edge of the reinforcing plate, and elastically supporting the reinforcing plate between the reinforcing plate and the bottom plate.

[0011] One aspect of the transfer vehicle system of the present invention for solving the other technical problems includes: a transfer vehicle including a driving portion and two pairs of wheels; and the vibration reducing device for the transfer vehicle.

[0012] Another aspect of the transfer vehicle system of the present invention for solving the technical problem includes: a transfer vehicle, which is provided with a driving part and two pairs of wheels; and a vibration reduction device, including: a bottom plate, which is arranged between the transfer vehicle and the crane and is formed with a first through hole and a second through hole, the first through hole is formed with a step, and the second through hole is positioned to be spaced apart from the first through hole; a support shaft, which supports the transfer vehicle above the bottom plate; a first vibration reduction unit, which is arranged on the bottom plate to reduce the distortion of the bottom plate; and a second vibration reduction unit, which is arranged on the bottom plate to reduce the up and down vibration of the bottom plate, the first vibration reduction unit including: a reinforcement a plate, formed with a first through hole facing the first through hole in the up-down direction, formed with a second through hole spaced apart from the first through hole, and formed with a third through hole spaced apart from the second through hole and facing the second through hole in the up-down direction, and arranged above the bottom plate; a shock absorber, supporting the reinforcing plate so that the bottom plate and the reinforcing plate do not abut and are spaced apart; first springs, spaced apart from each other at the edge of the reinforcing plate and arranged in 4 numbers, elastically supporting the reinforcing plate between the reinforcing plate and the bottom plate, and abutting against the step of the first through hole to be supported; a first vertical shaft, surrounded by the first spring, and passes through each of the first through hole and the first perforation, and is arranged with an enlarged plate having a diameter greater than that of the first through hole; a first cover, covering the upper end of the first vertical shaft, and combined with the first vertical shaft; and a first block, arranged between the first cover and the reinforcing plate and between the enlarged plate and the bottom plate, and provided with a metal material and having a ring shape, the second vibration reducing unit includes: upper and lower vibration reducing springs, elastically supporting the lower part of the supporting shaft; a second vertical shaft, surrounded by the upper and lower vibration reducing springs, and passing through each of the second through hole and the third perforation; and a guide, connected with the The upper and lower vibration reducing springs are abutted and the second vertical shaft is inserted, and the shock absorber includes: a second cover, which is combined with the upper surface of the reinforcing plate at the central part of the reinforcing plate to cover the second through hole; and a second spring, which abuts the second cover to elastically support the reinforcing plate, and the guide includes: a supporting column, which is combined with the second through hole and supports the upper and lower vibration reducing springs, and the lower end portion of the supporting column is expanded; and a second block, which is arranged between the bottom plate and the supporting column, and the second vertical shaft is arranged with an enlarged upper end and elastically supported by the upper end of the upper and lower vibration reducing springs, and can slide up and down in the supporting column.

[0013] Details of other embodiments are included in the detailed description and accompanying drawings.

[0014] Beneficial Effects

[0015] According to the vibration reducing device for a transfer vehicle and the transfer vehicle system including the vibration reducing device of the present invention, four sides of the reinforcing plate arranged above the bottom plate are elastically supported by the first spring, thereby making it possible to reduce vibration caused by twisting.

[0016] Furthermore, since the reinforcing plate elastically supported by the first spring does not make surface contact with the bottom plate, the transfer vehicle and the bottom plate can be provided in an independent form, thereby minimizing the transmission of vibration of the transfer vehicle to the bottom plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 : is a perspective view showing a transfer vehicle system provided with a vibration reducing apparatus according to a first embodiment of the present invention.

[0018] Figure 2 It is shown Figure 1 Figure 1 is a diagram of the I-I' section.

[0019] Figure 3 It is shown Figure 1 FIG. 2 is a diagram of the II-II' section.

[0020] Figure 4 It is shown Figure 3 Figure 3 is a diagram of the III-III' section.

[0021] Figure 5 1 is a diagram showing a portion of a vibration reducing device according to a second embodiment of the present invention.

[0022] Description of Reference Numerals

[0023] 1: Transfer vehicle system

[0024] 100: Transfer vehicle

[0025] 200: Vibration reduction device

[0026] 220: Support shaft

[0027] 250: First vibration reduction unit

[0028] 230: Second vibration reduction unit DETAILED DESCRIPTION

[0029] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Figure 1The advantages, features and methods of achieving the same will become apparent from the detailed description of the embodiments. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various forms. The embodiments are provided only to make the disclosure of the present invention complete and fully explain the scope of the present invention to those skilled in the art to which the present invention belongs, and the present invention is limited only by the scope of the appended claims. Throughout the specification, the same reference numerals refer to the same elements.

[0030] The terms used in this specification are only used to describe the embodiments and do not limit the present invention. In the specification, unless specifically mentioned in a sentence, the singular form includes the plural form. "Comprise" and / or "comprising" used in the specification means the presence of the mentioned constituent elements, steps, operations and / or elements, but does not exclude the presence or addition of more than one other constituent elements, steps, operations and / or elements.

[0031] Figure 1 is a perspective view of a transfer vehicle system provided with a vibration reducing device according to a first embodiment of the present invention. Figure 2 It is shown Figure 1 The I-I' section of Figure 3 It is shown Figure 1 The II-II' section diagram, Figure 4 It is shown Figure 3 Figure 3 is a diagram of the III-III' section.

[0032] refer to Figures 1 to 4 , a transfer vehicle system 1 according to an embodiment of the present invention includes a transfer vehicle 100 and a vibration reducing apparatus 200 for the transfer vehicle.

[0033] A manufacturing device (not shown) for performing a process may be provided in the semiconductor production line, and a ceiling track (not shown) may be arranged around the manufacturing device. The transfer vehicle 100 may travel along the ceiling track to transfer items.

[0034] The transfer vehicle 100 may be provided with a driving portion, two pairs of wheels 113 and guide wheels 115. The driving portion may be provided as a motor 111. The motor 111 may be arranged as two, and the two motors 111 may be driven independently to perform forward travel and backward travel respectively. As an example, the two pairs of wheels 113 may be operated by the two motors 111 respectively.

[0035] The guide wheel 115 may be arranged to be movable in a direction perpendicular to the travel direction. The guide wheel 115 may selectively contact a guide line (not shown). The guide wheel 115 may be movable in the left-right direction, so that the travel direction of the transfer vehicle 100 may be changed according to the movement of the guide wheel 115 by the guidance of the guide line.

[0036] The bottom plate 210 combined with the crane 50 may be disposed at the lower portion of the transfer vehicle 100. That is, the crane 50 may be provided at the transfer vehicle 100 via the bottom plate 210.

[0037] A first through hole 210H1 and a second through hole 210H2 for disposing the first and second vibration reducing units 250 and 230 may be formed in the bottom plate 210 .

[0038] The first through hole 210H1 is a hole for disposing the first spring 255 and the first vertical shaft 256 (see Figure 4 ). The first through hole 210H1 may face the first penetration hole 251H1, and the first vertical shaft 256 may pass through the first through hole 210H1.

[0039] The first spring 255 is inserted into the first through hole 210H1 so that the first spring 255 does not fall out of the set position. The first through hole 210H1 can provide a space with a height greater than the distance between the bottom plate 210 and the reinforcing plate 251 so that the upper and lower lengths of the first spring 255 can have sufficient length to reduce vibration.

[0040] That is, the first through hole 210H1 may be provided so that the length of the first spring 255 has a sufficient length to reduce vibration so as not to make it difficult to dispose the first spring 255 due to a small interval between the reinforcing plate 251 and the bottom plate 210 .

[0041] In addition, a step may be formed in the first through hole 210H1. The first spring 255 may abut against the step of the first through hole 210H1. As another example, the step of the first through hole 210H1 may be omitted, and various deformation examples may be performed such as the first spring 255 may also directly abut against the expansion plate 256A of the first vertical shaft 256.

[0042] The second through hole 210H2 is a hole in which the guide 235 is disposed. The support column 235B of the guide 235 may be coupled to the second through hole 210H2 (see Figure 3 The second through hole 210H2 may face the third through hole 251H3 in the up-down direction, so that the support column 235B inserted into the second through hole 210H2 may support the up-down vibration reducing spring 231 .

[0043] In addition, the second through hole 210H2 forms a step in the same / similar manner as the first through hole 210H1, so that the up and down vibration reducing spring 231 can abut against the step of the second through hole 210H2. Here, the upper end level of the support column 235B forms the same level as the step of the second through hole 210H2, so that the up and down vibration reducing spring 231 can be set to abut against the step of the second through hole 210H2 and the support column 235B.

[0044] The vibration reducing apparatus 200 disposed on the bottom plate 210 includes a support shaft 220 , a first vibration reducing unit 250 , and a second vibration reducing unit 230 , and may minimize or prevent the vibration of the transfer vehicle 100 from being transmitted to the crane 50 .

[0045] The support shaft 220 may support the transfer vehicle 100 above the bottom plate 210. As an example, the support shaft 220 may be coupled to the housing and / or the frame 110 of the transfer vehicle 100, and an enlarging ring 240 may be disposed at a lower portion of the support shaft 220. The frame 110 may be a structure coupled to the structure of the transfer vehicle 100 like the motor 111, and the enlarging ring 240 may enlarge a supporting surface of the support shaft 220 between the support shaft 220 and the reinforcing plate 251.

[0046] Each of the upper and lower ends of the support shaft 220 protrudes into a ring shape or a convex shape, so that it can be press-fitted with the frame 110 or the enlarged ring 240. The support shaft 220 can also be further combined with bolts on the press-fitted combination to improve the fixing force.

[0047] The support shafts 220 are spaced apart from each other in the X-axis direction 10 forming the moving direction of the transfer vehicle 100 to be arranged as two (see Figure 1 and Figure 2 The support shafts 220 are arranged to be spaced apart from each other at equal distances based on the central portion of the transfer vehicle 100. The support shafts 220 may be arranged adjacent to the motor 111, but are not limited thereto. The support shafts 220 may have their up-and-down vibrations reduced by the second vibration reducing unit 230.

[0048] The second vibration reducing unit 230 is a structure for reducing the up-and-down vibration of the support shaft 220 below the support shaft 220 , and may be provided with an up-and-down vibration reducing spring 231 , a second vertical shaft 233 , and a guide 235 .

[0049] The up and down vibration reducing spring 231 may be provided as, for example, a coil spring, and may elastically support the lower portion of the support shaft 220 and / or the enlarged upper end of the second vertical shaft 233. The up and down vibration reducing spring 231 may pass through the third through hole 251H3 to be physically separated from the reinforcing plate 251, and be disposed at the upper end of the support column 235B.

[0050] The second vertical shaft 233 may pass through the bottom plate 210 below the support shaft 220. The second vertical shaft 233 may pass through each of the second through hole 210H2 and the third through hole 251H3. The second vertical shaft 233 may be surrounded by the up and down vibration reducing spring 231, and the enlarged upper end of the second vertical shaft 233 may be arranged to abut against the up and down vibration reducing spring 231.

[0051] The second vertical shaft 233 is arranged in the hollow of the support column 235B to be slidable, so that it can be elastically supported by the up-and-down vibration reducing spring 231 together with the support shaft 220. At this time, with the support column 235B as a reference, the second vertical shaft 233 moves upward by the up-and-down vibration reducing spring 231, or moves downward by the deadweight of the second vertical shaft 233, so that the second vertical shaft 233 and the up-and-down vibration reducing spring 231 can perform the function of reducing the vibration of the transfer vehicle 100.

[0052] However, it is not limited to this. As another example, as the second vertical shaft 233 is fixed to the hollow of the support column 235B, the upper end of the second vertical shaft 233 is not expanded, so the upper and lower vibration reducing springs 231 directly abut against the support shaft 220, thereby elastically supporting the support shaft 220.

[0053] The guide 235 may guide the up and down movement of the second vertical shaft 233. The guide 235 may abut against the up and down vibration reducing spring 231 to prevent the up and down vibration reducing spring 231 from being separated, and may include a supporting column 235B and a second block 235A.

[0054] The support column 235B may be coupled to the second through hole 210H2. For example, the support column 235B may be fixed to the second through hole 210H2 by interference fitting, bonding, welding, etc. The upper end of the support column 235B may abut against the upper and lower vibration reducing springs 231 to support the upper and lower vibration reducing springs 231. The lower end portion of the support column 235B may be enlarged, and the enlarged lower end of the support column 235B may be connected to the second block 235A with bolts and pins, etc.

[0055] The second block 235A may be arranged between the bottom plate 210 and the support column 235B, and may expand the distance between the bottom plate 210 and the support column 235B. The second block 235A may have a ring shape and be provided in a metal material (e.g., aluminum). Alternatively, various modified examples may be performed such as the second block 235A may be provided in a rubber material to reduce vibration.

[0056] Such a second vibration reducing unit 230 may reduce up-and-down vibrations of the transfer vehicle 100 occurring below the support shaft 220. However, the transfer vehicle 100 may experience vibrations due to twisting in addition to the up-and-down vibrations.

[0057] For example, the transfer vehicle 100 can perform curved driving together with straight driving. As an example, when the transfer vehicle 100 performs curved driving to the right, the front right wheel 113 first changes direction to the right, and the area of ​​the bottom plate 210 where the right wheel 113 is located is unbalanced with other areas, so that the bottom plate 210 may be distorted.

[0058] Since the distortion of the bottom plate 210 is the cause of the vibration, it needs to be reduced. The first vibration reducing unit 250 can reduce the vibration caused by the distortion of the bottom plate 210. That is, the first vibration reducing unit 250 can be arranged on the bottom plate 210 to reduce the distortion of the bottom plate 210, thereby reducing the vibration of the bottom plate 210.

[0059] The first vibration reducing unit 250 may include a reinforcing plate 251, a shock absorber 253, a first spring 255, a first vertical shaft 256, and a first cover 257 (see Figure 4 ).

[0060] The reinforcing plate 251 may be disposed above the bottom plate 210 (see Figure 2 The reinforcing plate 251 is provided with a plurality of first springs 255 disposed at the edge of the reinforcing plate 251, and the reinforcing plate 251 is provided with a plurality of first springs 255 disposed at the edge of the reinforcing plate 251, so as not to make surface contact with the bottom plate 210. Therefore, the transmission of vibration caused by the surface contact can be minimized or prevented.

[0061] Therefore, the transfer vehicle 100 and the floor 210 disposed above the reinforcement plate 251 may have independent shapes that minimize vibration transmission.

[0062] A penetration structure for disposing the first spring 255, the second spring 253S, and the upper and lower vibration reducing springs 231 may be formed in the reinforcing plate 251. For example, a first through hole 251H1, a second through hole 251H2, and a third through hole 251H3 may be formed in the reinforcing plate 251.

[0063] The first through hole 251H1 and the second through hole 251H2 may be provided as holes for providing the first spring 255 and the second spring 253S for elastically supporting the reinforcing plate 251 and the bottom plate 210 without surface contact. That is, the first through hole 251H1 may be a hole for providing the first spring 255 and facing the first through hole 210H1 in the up-down direction. The second spring 253S may pass through the second through hole 251H2.

[0064] The third penetration hole 251H3 is provided as a hole for disposing the up-and-down vibration reducing spring 231 for reducing the up-and-down vibration, and may face the second through hole 210H2 in the up-and-down direction.

[0065] The shock absorber 253 may support the reinforcing plate 251 so that the bottom plate 210 and the reinforcing plate 251 do not abut and are spaced apart. The shock absorber 253 may be elastically supported between the reinforcing plate 251 and the bottom plate 210 at a central portion of the reinforcing plate 251.

[0066] The shock absorber 253 may include a second spring 253S and a second cover 253C.

[0067] The second spring 253S may be provided as a coil spring, and may elastically support the reinforcing plate 251. The second cover 253C may cover the second penetration hole 251H2 and the second spring 253S may abut against the second cover 253C. The second cover 253C may be fixed to the reinforcing plate 251.

[0068] Although the third through hole 251H3 is formed in the reinforcing plate 251 and the second cover 253C is provided in the embodiment, this is to simplify the structure of the reinforcing plate 251. That is, it is not limited to providing the reinforcing plate 251 as a flat plate structure and forming the third through hole 251H3 of the hole processing in the reinforcing plate 251.

[0069] As another example, the reinforcing plate 251 may also form a third through hole 251H3 and a second cover 253C as an integrated structure, thereby forming a concave groove structure to replace the third through hole 251H3 and the second cover 253C, and forming a structure in which the second spring 253S is arranged in the concave groove.

[0070] The first springs 255 may be spaced apart from each other to be arranged in plural at the edge of the reinforcing plate 251. The first springs 255 may elastically support the reinforcing plate 251 between the reinforcing plate 251 and the bottom plate 210.

[0071] The first springs 255 may be arranged on the reinforcing plate 251 to be spaced apart from each other at a maximum distance. The first springs 255 may be arranged in two pairs in the front-rear or left-right direction. As an example, the first springs 255 may be arranged in pairs along the Y-axis direction 20 with the support shaft 220 as a reference in the Y-axis direction 20 that forms a right angle with the X-axis direction 10 (see Figure 1 The first spring 255 can reduce pitch and / or roll relative to the Y-axis direction 20 to prevent the bottom plate 210 from twisting.

[0072] However, this is only an example, and the four first springs 255 can prevent distortion not only due to the interaction of the first springs 255 adjacent to each other, but also due to the interaction of the first springs 255 spaced apart from each other by the maximum distance. That is, more than one of the four first springs 255 can interact to minimize the distortion of the bottom plate 210.

[0073] The first spring 255 can be arranged around a first vertical axis 256 (see Figure 4 ). The first vertical shaft 256 may pass through each of the first through hole 210H1 and the first penetration hole 251H1, and is provided with an expansion plate 256A having a diameter greater than that of the first through hole 210H1. That is, the first vertical shaft 256 may be prevented from being separated from the bottom plate 210.

[0074] The first cover 257 may cover the upper end of the first vertical shaft 256. Figure 4 , the first cover 257 and the first vertical shaft 256 are combined with bolts, but it is not limited to this. As other examples, various deformation examples can be performed, such as the first cover 257 and the reinforcing plate 251 can be combined by welding and / or bonding.

[0075] In the following, reference will be made to Figure 5 Modified examples of the present embodiment are described, and repeated description of the same structure that performs the same function will be omitted.

[0076] Figure 5 2 is a diagram showing a portion of a vibration reducing device according to a second embodiment of the present invention. Figure 5 , mainly describes and uses Figures 1 to 4 Describes the different points of the situation.

[0077] refer to Figure 5 , the same as or similar to the first embodiment, the vibration reducing apparatus 200 may include a supporting shaft 220 , a first vibration reducing unit 250 , and a second vibration reducing unit 230 .

[0078] In addition, the first vibration reducing unit 250 of the second embodiment may further include a first block 259. The first block 259 may be provided to ensure a space for the extension of the first spring 255.

[0079] The first block 259 may be disposed between the first cover 257 and the reinforcing plate 251, or between the enlarged plate 256A and the bottom plate 210. Alternatively, the first block 259 may be disposed between the first cover 257 and the reinforcing plate 251, and between the enlarged plate 256A and the bottom plate 210.

[0080] The first block 259 may be provided by a metal material. The first block 259 may include an elastic material, such as a rubber material, and may have a ring shape, but is not limited thereto.

[0081] Although the embodiments of the present invention are described above with reference to the accompanying drawings, it is understood by those skilled in the art that the present invention can be implemented in other specific forms without changing the technical spirit or essential features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.

Claims

1. A vibration reducing device for a transfer vehicle, reducing the vibration of a transfer vehicle provided with a drive portion and two pairs of wheels, in, The vibration reduction device comprises: a support shaft supporting the transfer vehicle above a floor disposed between the transfer vehicle and a crane; and A first vibration reduction unit is arranged on the bottom plate to reduce distortion of the bottom plate, the first vibration reduction unit comprising: a reinforcing plate, arranged above the bottom plate; and A first spring is spaced apart from each other and arranged in plural at an edge of the reinforcing plate, and elastically supports the reinforcing plate between the reinforcing plate and the bottom plate.

2. The vibration reducing device for transferring a vehicle according to claim 1, wherein: The first vibration reduction unit further comprises: A first vertical shaft is surrounded by the first spring.

3. The vibration reducing device for transferring a vehicle according to claim 2, wherein: forming a first through hole in the bottom plate, and forming a first through hole facing the first through hole in the up-down direction in the reinforcing plate, The first vertical shaft passes through each of the first through hole and the first perforation, and is provided with an enlarged plate having a diameter greater than that of the first through hole, The first vibration reducing unit further includes a first cover covering the first vertical shaft and combined with the first vertical shaft or the reinforcing plate.

4. The vibration reducing device for transferring a vehicle according to claim 3, wherein: The first through hole is formed with a step that abuts against the first spring.

5. The vibration reducing device for transferring a vehicle according to claim 3, wherein: The first vibration reduction unit further comprises: The first block is arranged between the first cover and the reinforcing plate, or between the enlarged plate and the bottom plate.

6. The vibration reducing device for transferring a vehicle according to claim 5, wherein: The first block includes a metal material or an elastic material and has a ring shape.

7. The vibration reducing device for transferring a vehicle according to claim 1, wherein: The first vibration reduction unit comprises: A vibration isolator supports the reinforcing plate so that the bottom plate and the reinforcing plate do not abut and are spaced apart.

8. The vibration reducing device for transferring a vehicle according to claim 7, wherein: The shock absorber comprises: A second spring is elastically supported between the reinforcing plate and the bottom plate at a central portion of the reinforcing plate.

9. The vibration reducing device for transferring a vehicle according to claim 8, wherein: forming a second through hole in the reinforcing plate for the second spring to pass through, The shock absorber further includes a second cover covering the second penetration hole and abutting against the second spring.

10. The vibration reducing device for transferring a vehicle according to claim 1, wherein: The first springs are arranged on the reinforcing plate to be spaced apart from each other at a maximum distance.

11. The vibration reducing device for transferring a vehicle according to claim 1, wherein: The first springs are arranged in two pairs.

12. The vibration reducing device for transferring a vehicle according to claim 11, wherein: The support shafts are spaced apart from each other in the X-axis direction forming the moving direction of the transfer vehicle so as to be arranged in two, The first springs are arranged in pairs along the Y-axis direction which forms a right angle with the X-axis direction with reference to the support axis.

13. The vibration reducing device for transferring a vehicle according to claim 1, wherein: The vibration reduction device further comprises: The second vibration reducing unit is provided with upper and lower vibration reducing springs elastically supporting the lower portion of the support shaft.

14. The vibration reducing device for transferring a vehicle according to claim 13, wherein: The second vibration reduction unit further includes: A second vertical shaft is surrounded by the upper and lower vibration reducing springs.

15. The vibration reducing device for transferring a vehicle according to claim 14, wherein: A second through hole is formed in the bottom plate, and a third through hole facing the second through hole in the up-down direction is formed in the reinforcing plate, and the second vertical axis passes through each of the second through hole and the third through hole, The second vibration reducing unit further includes a guide abutting against the upper and lower vibration reducing springs and inserted into the second vertical shaft.

16. The vibration reducing device for transferring a vehicle according to claim 15, wherein: The guide comprises: a supporting column coupled to the second through hole and supporting the upper and lower vibration reducing springs, and a lower end portion of the supporting column is expanded; and The second block is arranged between the base plate and the support column.

17. The vibration reducing device for transferring a vehicle according to claim 16, wherein: The second vertical shaft is arranged such that the upper end is enlarged and elastically supported by the upper end of the upper and lower vibration reducing springs, and is able to slide up and down in the supporting column.

18. A transfer vehicle system comprising: Transfer vehicle, including drive section and two pairs of wheels; as well as A vibration reducing device for transferring a vehicle according to any one of claims 1 to 17.

19. A transfer vehicle system comprising: a transfer vehicle, arranged with a drive section and two pairs of wheels; as well as Vibration reduction device, comprising: a bottom plate disposed between the transfer vehicle and the crane and formed with a first through hole and a second through hole, the first through hole being formed with a step, the second through hole being positioned to be spaced apart from the first through hole; a support shaft supporting the transfer vehicle above the bottom plate; a first vibration reducing unit disposed on the bottom plate to reduce distortion of the bottom plate; and A second vibration reducing unit is arranged on the bottom plate to reduce the up and down vibration of the bottom plate, The first vibration reduction unit comprises: a reinforcing plate formed with a first through hole facing the first through hole in the up-down direction, formed with a second through hole spaced apart from the first through hole, and formed with a third through hole spaced apart from the second through hole and facing the second through hole in the up-down direction, and arranged above the bottom plate; a shock absorber supporting the reinforcing plate so that the bottom plate and the reinforcing plate do not abut and are spaced apart; first springs, which are spaced apart from each other and arranged in four numbers at the edge of the reinforcing plate, elastically support the reinforcing plate between the reinforcing plate and the bottom plate, and abut against the step of the first through hole to be supported; a first vertical shaft, which is surrounded by the first spring and passes through each of the first through hole and the first penetration hole, and is provided with an expansion plate having a diameter larger than that of the first through hole; a first cover covering an upper end of the first vertical shaft and combined with the first vertical shaft; and The first piece is arranged between the first cover and the reinforcing plate and between the enlarged plate and the bottom plate, and is provided with a metal material and has a ring shape. The second vibration reducing unit includes: An up and down vibration reduction spring elastically supports the lower portion of the support shaft; a second vertical shaft surrounded by the upper and lower vibration reducing springs and passing through each of the second through hole and the third through hole; and A guide abuts against the upper and lower vibration reducing springs and is inserted into the second vertical shaft. The shock absorber comprises: a second cover coupled to an upper surface of the reinforcing plate at a central portion of the reinforcing plate to cover the second through hole; and A second spring is in contact with the second cover to elastically support the reinforcing plate, and the guide comprises: a supporting column, which is combined with the second through hole and supports the upper and lower vibration reducing springs, and the lower end portion of the supporting column is expanded; and The second block is arranged between the base plate and the support column, The second vertical shaft is arranged such that the upper end is enlarged and elastically supported by the upper end of the upper and lower vibration reducing springs, and is able to slide up and down in the supporting column.

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