Switching device, vacuum interconnection sample transfer system and use method

Abstract

The invention provides a switching device, a vacuum interconnection sample transfer system and a use method, and relates to the technical field of vacuum analysis instruments.The switching device comprises a first flange, a second flange, a locking assembly and a telescopic piece, the first end of the first flange is suitable for being communicated with first vacuum equipment, and the second end of the second flange is suitable for being communicated with second vacuum equipment; the first end of the second flange is provided with a first position communicating with the second end of the first flange and a second position spaced from the second end of the first flange. The locking assembly can lock the second flange and the first flange when the first end of the second flange is located at the first position. The second end of the second flange is connected with the telescopic piece, and the end, deviating from the second flange, of the telescopic piece is suitable for communicating with second vacuum equipment. By adjusting the length of the telescopic piece, the on-off states of the first flange and the second flange can be conveniently switched, so that the first vacuum equipment and the second vacuum equipment are controlled to be communicated to transmit samples or separated to isolate noise, the overall structure is simple, and the vibration isolation effect is good.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum analysis instruments, and in particular to a switching device, a vacuum interconnected sample transfer system and a use method. Background Art

[0002] The vacuum interconnection system uses ultra-high vacuum pipes to interconnect the instruments and equipment for material growth, processing, and characterization, so that when samples are transferred between different devices, the sample surface will not be oxidized and will not be affected by the external atmospheric environment. However, the connection between the pipes of the sub-equipment of the vacuum interconnection system also brings new problems, that is, the noise between the sub-equipment will affect each other through the interconnected pipes, and most characterization equipment and micro-nano processing equipment have relatively high requirements for the isolation of vibration noise.

[0003] In the related technology, the methods commonly used to isolate noise include pneumatic legs, springs, etc., which are relatively effective in isolating high-frequency noise from the ground, but low-frequency noise and noise transmitted through vacuum pipes are difficult to isolate. In particular, the noise from mechanical pumps, water cooling, etc. during the operation of material growth equipment is relatively large. These noises are transmitted to material characterization and processing equipment through vacuum pipes, which can easily affect the data quality and processing accuracy of the equipment. At the same time, because the equipment is directly connected through vacuum pipes, the complexity and difficulty of the noise isolation problem are increased. Summary of the invention

[0004] The present invention aims to solve one of the technical problems in the related art at least to a certain extent.

[0005] To this end, an embodiment of one aspect of the present invention proposes a switching device, which can realize convenient switching of the on and off states of the first flange and the second flange by adjusting the length of the retractable part, so as to control the connection between the first vacuum equipment and the second vacuum equipment to transfer samples or phase separate and isolate noise. The overall structure is simple and the vibration isolation effect is good.

[0006] Another aspect of the present invention provides a vacuum interconnected sample transfer system.

[0007] Another aspect of the present invention provides a method for using a vacuum interconnected sample transfer system.

[0008] According to an embodiment of the present invention, a transition device includes a first flange, a second flange, a locking assembly and a retractable part, wherein the first flange and the second flange both have a first end and a second end opposite to each other along a first direction, the first end of the first flange is suitable for communicating with a first vacuum device, the first end of the second flange has a first position connected to the second end of the first flange and a second position spaced apart from the second end of the first flange, the locking assembly can lock the second flange and the first flange when the first end of the second flange is located at the first position; the second end of the second flange is connected to the retractable part, the retractable part has a sample passage cavity connected to the second flange, the end of the retractable part facing away from the second flange is suitable for communicating with a second vacuum device, and the length of the retractable part is greater than the length of the retractable part when the first end of the second flange is in the first position.

[0009] According to the adapter device of the embodiment of the present invention, the distance between the second flange and the first flange is adjusted by the telescopic part, so that when the first end of the second flange is pressed against the second end of the first flange, the two are locked by the locking assembly to ensure that the two are reliably connected. At this time, the first end of the second flange is in the first position, and when the first end of the second flange is spaced apart from the second end of the first flange, the first end of the second flange switches to the second position. Since the first end of the first flange is used to connect with the first vacuum equipment and the telescopic part is used to connect with the second vacuum equipment, the on-off state between the first vacuum equipment and the second vacuum equipment can be controlled by the adapter device to achieve sample transfer and noise interference isolation. Compared with the related art, the present invention can achieve convenient switching of the on-off state of the first flange and the second flange by adjusting the length of the telescopic part, so as to control the connection between the first vacuum equipment and the second vacuum equipment to transfer samples or phase separation to isolate noise. The overall structure is simple and the vibration isolation effect is good.

[0010] In some embodiments, the retractable member includes a third flange, a bellows and a fourth flange connected in sequence, any one of the third flange and the fourth flange is connected to the second end of the second flange, and the end of the other facing away from the bellows is suitable for connecting to the second vacuum device, and the inner circumferential wall of the third flange, the inner circumferential wall of the bellows and the inner circumferential wall of the fourth flange jointly define the sample passage chamber.

[0011] In some embodiments, the adapter device also includes an adjustment component, which is movably connected to at least one of the third flange and the fourth flange, and the adjustment component can lock the third flange and the fourth flange when the distance between them is adjusted to any position to change the length of the bellows.

[0012] In some embodiments, there are multiple adjustment components and they are arranged at intervals along the circumferential direction of the third flange.

[0013] In some embodiments, the adjustment assembly includes a first screw and a first locking nut, the first screw having a first head and a first screw portion connected to each other, the first head being connected to the third flange, the first screw portion being movably connected to the fourth flange, and the first screw portion being suitable for being fastened to the fourth flange through the first locking nut so as to lock the third flange and the fourth flange.

[0014] In some embodiments, the adjustment assembly also includes a universal ball head, which is mounted on the third flange, and the first head is pivotally connected to the third flange through the universal ball head to adjust the angle of the first screw portion relative to the third flange.

[0015] In some embodiments, any one of the first flange and the second flange is provided with a mounting portion, and the other is provided with a slot;

[0016] The locking assembly includes a second screw and a second lock nut, the second screw having a second head and a second screw portion connected thereto, the second head being pivotally connected to the mounting portion, and the second lock nut being capable of locking the second screw portion in the slot when the second screw portion is pivoted into the slot relative to the mounting portion, so as to fasten the first flange and the second flange.

[0017] In some embodiments, there are multiple locking assemblies and they are arranged at intervals along the circumferential direction of the first flange.

[0018] In some embodiments, the transition device further includes a first sealing ring, which is clamped between the second end of the first flange and the first end of the second flange to seal a connection gap between the first flange and the second flange.

[0019] In some embodiments, the second end of the second flange is connected to the third flange, and the adapter device also includes a second sealing ring, which is clamped between the second end of the second flange and the third flange to seal the connecting gap between the second flange and the third flange.

[0020] In some embodiments, the adapter device also includes a vacuum pipe and a vacuum pump group, and a gate valve is installed on the end of the retractable part away from the second flange and the first end of the vacuum pipe, so that the gate valve can control the on and off of the retractable part or the vacuum pipe. The first end of the vacuum pipe is suitable for connecting with the first vacuum equipment, and the second end of the vacuum pipe is connected to the first end of the first flange. The vacuum pipe has a connecting cavity and is provided with a vacuum gauge, and the vacuum gauge is used to detect the vacuum degree in the connecting cavity; the vacuum pump group is installed on the vacuum pipe and is connected to the connecting cavity so as to evacuate the connecting cavity.

[0021] According to an embodiment of the present invention, a vacuum interconnected sample transfer system includes a first vacuum device, a second vacuum device and a switching device, wherein the first vacuum device and the second vacuum device both have a sample inlet and outlet, wherein the first vacuum device has greater vibration noise than the second vacuum device, and the second vacuum device has high requirements for vibration noise isolation; the switching device is the switching device described in any of the above embodiments, wherein the first end of the first flange in the switching device is connected to the sample inlet and outlet of the first vacuum device, and the retractable part in the switching device is connected to the sample inlet and outlet of the second vacuum device.

[0022] According to the vacuum interconnected sample transfer system of the embodiment of the present invention, by adopting a switching device, it is possible to achieve convenient connection or separation between the first vacuum equipment and the second vacuum equipment, which is beneficial to the rapid switching between the sample transfer operation and the independent operation of each device, and ensures the data quality and processing accuracy of the equipment. Therefore, compared with the related art, the present invention can fundamentally solve the noise interference problem between vacuum interconnected devices, reduce the complexity and difficulty of noise isolation, and has strong operability.

[0023] A method for using a vacuum interconnected sample transfer system according to an embodiment of the present invention comprises the following steps:

[0024] Pressing the first end of the second flange against the second end of the first flange, and locking the two by using a locking assembly, so as to transfer the sample between the first vacuum device, the transfer device, and the second vacuum device;

[0025] The first flange and the second flange are unlocked, and the second flange is pulled by the retractable member until the first end of the second flange is spaced apart from the second end of the first flange, and the first vacuum device and the second vacuum device are separated and run independently without interfering with each other.

[0026] The technical advantages of the method for using the vacuum interconnected sample transfer system according to the embodiment of the present invention are the same as the technical advantages of the above-mentioned vacuum interconnected sample transfer system, which will not be repeated here.

[0027] In some embodiments, the unlocking of the first flange and the second flange, pulling the second flange by the retractable member until the first end of the second flange is spaced apart from the second end of the first flange, and the first vacuum device and the second vacuum device are separated and run independently without interfering with each other, comprises:

[0028] Close the gate valve and vacuum gauge, and screw the second lock nut to unlock the second screw in the slot;

[0029] Turn off the vacuum pump group and pass gas into the vacuum pipeline until the air pressure in the connecting cavity is equal to the atmospheric pressure;

[0030] The first lock nut is screwed to unlock the third flange and the fourth flange, and the bellows is compressed. The bellows moves with the second flange until the second flange is spaced apart from the first flange. The first lock nut is screwed in the reverse direction to lock the third flange and the fourth flange. The first vacuum device is separated from the second vacuum device.

[0031] The first vacuum device and the second vacuum device are started to operate without interfering with each other.

[0032] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic structural diagram when the second flange in the adapter device according to an embodiment of the present invention is in the first position.

[0034] Figure 2 yes Figure 1 Schematic diagram of the main structure.

[0035] Figure 3 yes Figure 2 Schematic diagram of the local enlarged structure in.

[0036] Figure 4 It is a schematic structural diagram of a second flange in a switching device according to an embodiment of the present invention when the second flange is in a second position.

[0037] Figure 5 yes Figure 4 Schematic diagram of the local enlarged structure in.

[0038] Figure 6 is a schematic structural diagram of a vacuum interconnected sample transfer system according to an embodiment of the present invention.

[0039] Figure 7 4 is a flow chart of a method for using a vacuum interconnected sample transfer system according to an embodiment of the present invention.

[0040] Figure numerals: 1. first flange, 11. slot, 2. second flange, 21. mounting portion, 3. locking assembly, 31. second screw, 311. second head, 312. second screw portion, 32. second lock nut, 4. retractable member, 41. third flange, 42. bellows, 43. fourth flange, 5. first vacuum equipment, 51. sample inlet and outlet, 6. second vacuum equipment, 7. adjustment assembly, 71. first screw, 711. first head, 712. first screw portion, 72. first lock nut, 73. universal ball head, 8. vacuum pipe, 81. gate valve, 82. vacuum gauge, 9. vacuum pump group. DETAILED DESCRIPTION

[0041] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0042] like Figures 1 to 5 As shown, a switching device according to an embodiment of the present invention comprises a first flange 1, a second flange 2, a locking assembly 3 and a retractable member 4, wherein the first flange 1 and the second flange 2 both have a first end and a second end opposite to each other along a first direction, the first end of the first flange 1 is suitable for being connected to a first vacuum device 5, the first end of the second flange 2 has a first position connected to the second end of the first flange 1 and a second position spaced apart from the second end of the first flange 1, the locking assembly 3 can lock the second flange 2 and the first flange 1 when the first end of the second flange 2 is located at the first position; the second end of the second flange 2 is connected to the retractable member 4, the retractable member 4 has a sample passage cavity connected to the second flange 2, the end of the retractable member 4 facing away from the second flange 2 is suitable for being connected to a second vacuum device 6, and the length of the retractable member 4 when the first end of the second flange 2 is in the first position is greater than the length of the retractable member 4 when the second position is.

[0043] It can be understood that according to the adapter device of the embodiment of the present invention, the telescopic part 4 adjusts the distance between the second flange 2 and the first flange 1, so that when the first end of the second flange 2 is pressed against the second end of the first flange 1, the two are locked by the locking assembly 3 to ensure that the two are reliably connected. At this time, the first end of the second flange 2 is in the first position, and when the first end of the second flange 2 is spaced apart from the second end of the first flange 1, the first end of the second flange 2 is switched to the second position. Since the first end of the first flange 1 is used to communicate with the first vacuum equipment 5 and the telescopic part 4 is used to communicate with the second vacuum equipment 6, the on-off state between the first vacuum equipment 5 and the second vacuum equipment 6 can be controlled by the adapter device to achieve sample transfer and noise interference isolation. Compared with the related art, the present invention can achieve convenient switching of the on-off state of the first flange 1 and the second flange 2 by adjusting the length of the telescopic part 4, so as to control the connection between the first vacuum equipment 5 and the second vacuum equipment 6 to transfer samples or phase separation to isolate noise. The overall structure is simple and the vibration isolation effect is good.

[0044] Specifically, the first direction can be the left-right direction in the figure. The first end of the first flange 1 corresponds to the left end of the first flange 1 in the figure, and the second end of the first flange 1 corresponds to the right end of the first flange 1 in the figure. The first end of the second flange 2 corresponds to the left end of the second flange 2 in the figure, and the second end of the second flange 2 corresponds to the right end of the second flange 2 in the figure. The first end of the second flange 2 is pressed against the second end of the first flange 1 at a first position. The left end of the telescopic member 4 is connected to the second end of the second flange 2, and the right end of the telescopic member 4 is suitable for being connected to the second vacuum pump.

[0045] It should be noted that, when the adapter is applied between the first vacuum equipment 5 and the second vacuum equipment 6, if the first end of the second flange 2 is in the first position, that is, the first flange 1 and the second flange 2 are connected, the sample can be transferred between the first vacuum equipment 5 and the second vacuum equipment 6, and if the first end of the second flange 2 is in the second position, that is, the first flange 1 and the second flange 2 are separated, the first vacuum equipment 5 and the second vacuum equipment 6 are separated. Then, when the two are operated independently, the vibrations generated during the operation of each device will not be transmitted to each other, thereby achieving isolation of noise interference between the two, and the vibration isolation effect is good, and the vibration isolation method is simple and reliable.

[0046] like Figure 3 and Figure 5 As shown, in some embodiments, the retractable member 4 includes a third flange 41, a bellows 42 and a fourth flange 43 which are connected in sequence, any one of the third flange 41 and the fourth flange 43 is connected to the second end of the second flange 2, and the end of the other one facing away from the bellows 42 is suitable for being connected to the second vacuum device 6, and the inner circumferential wall of the third flange 41, the inner circumferential wall of the bellows 42 and the inner circumferential wall of the fourth flange 43 jointly define a sample chamber.

[0047] It can be understood that the retractable part 4 is designed as a structure that cooperates with the third flange 41, the bellows 42 and the fourth flange 43, which can achieve convenient disassembly and assembly with the second flange 2 or the second vacuum equipment 6, further simplifying the overall structure of the transfer device, facilitating processing and low cost. In addition, the use of the bellows 42 can also ensure a good vacuum environment when the transfer device is used in the first vacuum equipment 5 and the second vacuum equipment 6.

[0048] Specifically, the bellows 42 can be replaced by other flexible members of similar structures (ie, flexible members with telescopic functions) in the art, which will not be elaborated here. The second flange 2, the sample chamber of the bellows 42 and the second vacuum device 6 are connected in sequence.

[0049] like Figure 3 and Figure 5 As shown, in some embodiments, the adapter device also includes an adjustment component 7, which is movably connected to at least one of the third flange 41 and the fourth flange 43. The adjustment component 7 can lock the third flange 41 and the fourth flange 43 when the distance between them is adjusted to any position to change the length of the bellows 42.

[0050] It can be understood that the length of the bellows 42 can be adjusted and locked by adjusting the assembly 7, and the operation is convenient and quick.

[0051] Specifically, the adjustment component 7 is movably connected to the third flange 41 ; or, the adjustment component 7 is movably connected to the fourth flange 43 ; or, the adjustment component 7 is movably connected to both the third flange 41 and the fourth flange 43 .

[0052] like Figure 1 As shown, further, there are multiple adjustment components 7 and they are arranged at intervals along the circumferential direction of the third flange 41 to ensure the fastening effect between the third flange 41 and the fourth flange 43, and to achieve reliable adjustment of the length of the bellows 42. For example, there may be three adjustment components 7 and they may be arranged at equal intervals along the circumferential direction of the third flange 41.

[0053] like Figure 3 and Figure 5 As shown, in some embodiments, the adjustment assembly 7 includes a first screw 71 and a first locking nut 72, the first screw 71 having a first head 711 and a first screw portion 712 connected to each other, the first head 711 being connected to the third flange 41, the first screw portion 712 being movably connected to the fourth flange 43, and the first screw portion 712 being suitable for being fastened to the fourth flange 43 through the first locking nut 72 so as to lock the third flange 41 and the fourth flange 43.

[0054] It is understandable that the first screw rod 71 and the first lock nut 72 can be used to quickly disassemble and assemble the bellows 42 during the length adjustment process, thereby improving operating efficiency and being simple and practical.

[0055] Specifically, the first screw portion 712 may extend in a direction from the third flange 41 toward the fourth flange 43. The outer peripheral wall of the fourth flange 43 may be provided with a connecting ear. At least part of the first screw portion 712 may be slidably fitted in the connecting ear, so that by pushing and pulling the fourth flange 43, the spacing between the third flange 41 and the fourth flange 43 is changed, thereby realizing rapid adjustment of the length of the bellows 42. The first lock nut 72 may be a butterfly nut, which may further facilitate the screwing operation of the first lock nut 72 when adjusting the length of the bellows 42. There are two first lock nuts 72, which are respectively arranged on both sides of the connecting ear along the thickness direction thereof, so as to cooperate with each other to limit and lock the first screw portion 712 on the fourth flange 43, thereby further ensuring reliable adjustment of the length of the bellows 42.

[0056] It should be noted that the first head 711 can also be hinged on the outer peripheral wall of the third flange 41, and the first screw portion 712 can rotate relative to the outer peripheral wall of the third flange 41 toward the outer peripheral wall of the fourth flange 43, and the outer peripheral wall of the fourth flange 43 is provided with a U-shaped groove, so that when at least part of the first screw portion 712 is fitted in the U-shaped groove, the first screw portion 712 is locked in the U-shaped groove by the first lock nut 72. Alternatively, the outer peripheral walls of the third flange 41 and the outer peripheral walls of the fourth flange 43 are both provided with connecting ears, and at least part of the first screw 71 is sequentially fitted in the connecting ears of the third flange 41 and the connecting ears of the fourth flange 43, and is locked on the connecting ears by the first lock nut 72.

[0057] like Figure 3 and Figure 5 As shown, in some embodiments, the adjustment component 7 also includes a universal ball head 73, which is installed on the third flange 41. The first head 711 is pivotally connected to the third flange 41 through the universal ball head 73 to adjust the angle of the first screw portion 712 relative to the third flange 41, and to pull the fourth flange 43 and the bellows 42 to deflect relative to the third flange 41. Since one of the third flange 41 and the fourth flange 43 is connected to the second flange 2, the second flange 2 will be deflected to adjust the angle of the second flange 2 relative to the first flange 1.

[0058] It can be understood that, by cooperating with the universal ball head 73, the first screw rod 71, the first lock nut 72 and the bellows 42, not only can the length of the bellows 42 be adjusted without special tools, but also because the universal ball head 73 can pivot with the first screw rod 71, the angle of the bellows 42 relative to the first flange 1 can be adjusted to ensure a reliable connection between the first flange 1 and the second flange 2 and avoid interference from external factors.

[0059] Specifically, the first head 711 is sleeved on the universal ball head 73 .

[0060] like Figures 1 to 5 As shown, in some embodiments, any one of the first flange 1 and the second flange 2 is provided with a mounting portion 21 , and the other is provided with a slot 11 .

[0061] The locking assembly 3 includes a second screw 31 and a second lock nut 32. The second screw 31 has a second head 311 and a second screw portion 312 connected to each other. The second head 311 is pivotally connected to the mounting portion 21. The second lock nut 32 can lock the second screw portion 312 in the slot 11 when the second screw portion 312 is pivoted into the slot 11 relative to the mounting portion 21, so as to fasten the first flange 1 and the second flange 2.

[0062] It can be understood that since the second screw 31 is pivotally connected to the first flange 1 or the second flange 2 through the mounting portion 21, the first flange 1 and the second flange 2 can be quickly disassembled and assembled by simply rotating the second screw 31 until the second screw portion 312 is limited in the slot 11 and locked by the second lock nut 32. At the same time, the second screw 31 is hinged on the mounting portion 21, which further improves the integration of the various components in the adapter and reduces the risk of component loss.

[0063] Specifically, a mounting portion 21 may be provided on any one of the outer peripheral wall of the first flange 1 and the outer peripheral wall of the second flange 2, and a clamping groove 11 may be provided on the other. The second head portion 311 may be hinged on the mounting portion 21, and the second screw portion 312 may be rotated relative to the mounting portion 21 toward the clamping groove 11, so that when at least a portion of the second screw portion 312 is engaged in the clamping groove 11, the second screw portion 312 is locked in the clamping groove 11 by the second lock nut 32. The clamping groove 11 may be a U-shaped groove. The second lock nut 32 may be a butterfly nut to facilitate the screwing operation.

[0064] like Figure 1 As shown, further, there are multiple locking components 3 and they are arranged at intervals along the circumferential direction of the first flange 1 to ensure the fastening effect between the first flange 1 and the second flange 2. For example, there may be three locking components 3 and they are arranged at equal intervals along the circumferential direction of the first flange 1.

[0065] like Figure 2 and Figure 3 As shown, in some embodiments, the adapter device also includes a first sealing ring (not shown in the figure), which is clamped between the second end of the first flange 1 and the first end of the second flange 2 to seal the connecting gap between the first flange 1 and the second flange 2.

[0066] like Figure 2 and Figure 3As shown, in some embodiments, the second end of the second flange 2 is connected to the third flange 41, and the adapter device also includes a second sealing ring (not shown in the figure), which is clamped between the second end of the second flange 2 and the third flange 41 to seal the connecting gap between the second flange 2 and the third flange 41.

[0067] Specifically, in order to ensure the sealing and ease of operation at the connection between the first flange 1 and the second flange 2, and between the second flange 2 and the third flange 41, the first flange 1 can adopt a rubber ring flange structure, and the second flange 2 can use a double-sided flange, that is, the first end of the second flange 2 adopts a rubber ring flange structure, and the second end of the second flange 2 adopts a CF flange structure (oxygen-free copper gasket (or other soft metal) flange structure), and the third flange 41 can adopt a CF flange structure. At this time, the first sealing ring is a rubber ring between the first ends of the first flange 1 and the second flange 2, and the second sealing ring is a copper gasket between the second end of the second flange 2 and the third flange 41.

[0068] like Figure 1 , Figure 2 and Figure 4 As shown, in some embodiments, the adapter device also includes a vacuum pipe 8 and a vacuum pump group 9, and a gate valve 81 is installed at the end of the telescopic member 4 facing away from the second flange 2 and the first end of the vacuum pipe 8, so that the gate valve 81 controls the on and off of the telescopic member 4 or the vacuum pipe 8, the first end of the vacuum pipe 8 is suitable for connecting with the first vacuum equipment 5, the second end of the vacuum pipe 8 is connected to the first end of the first flange 1, the vacuum pipe 8 has a connecting cavity and is provided with a vacuum gauge 82, the vacuum gauge 82 is used to detect the vacuum degree in the connecting cavity; the vacuum pump group 9 is installed on the vacuum pipe 8 and is connected to the connecting cavity so as to evacuate the connecting cavity.

[0069] It can be understood that after the adapter is connected between the first vacuum equipment 5 and the second vacuum equipment 6, when it is necessary to transfer the sample, the second flange 2 is connected to the first flange 1, the vacuum pump group 9 is started to evacuate the connecting cavity until the vacuum gauge 82 detects that the vacuum degree of the connecting cavity meets the requirements, and the gate valve 81 is opened to realize the transfer of the sample in a vacuum environment. When each device (i.e., the first vacuum equipment 5 and the second vacuum equipment 6) needs to operate independently, the gate valve 81, the vacuum gauge 82 and the vacuum pump group 9 are closed in turn, and then the locking component 3 is opened, and the length of the bellows 42 is adjusted by the adjustment component 7 to separate the second flange 2 from the first flange 1, so that the first vacuum equipment 5 and the second vacuum equipment 6 can operate in vibration isolation.

[0070] Specifically, the end of the retractable member 4 facing away from the second flange 2 is the right end of the third flange 41 in the figure. The first end of the vacuum pipe 8 corresponds to the left end of the vacuum pipe 8 in the figure, and the second end of the vacuum pipe 8 corresponds to the right end of the vacuum pipe 8 in the figure. The vacuum pipe 8 can adopt a four-way structure. The connecting cavity is a rigid inner cavity of the four-way structure. A vacuum gauge 82 can be installed at the upper end of the vacuum pipe 8, and a vacuum pump group 9 can be connected to the lower end of the vacuum pipe 8.

[0071] like Figure 6 As shown, a vacuum interconnected sample transfer system according to an embodiment of the present invention comprises a first vacuum device 5, a second vacuum device 6 and a transfer device, wherein both the first vacuum device 5 and the second vacuum device 6 have a sample inlet and outlet 51, wherein the first vacuum device 5 has a greater vibration noise than the second vacuum device 6, and the second vacuum device 6 has a high requirement for the isolation of vibration noise, that is, the first vacuum device 5 is a device with a large vibration noise and is not sensitive to noise, while the second vacuum pump is a device that is relatively sensitive to noise; the transfer device is a transfer device according to any of the above embodiments, wherein the first end of the first flange 1 in the transfer device is connected to the sample inlet and outlet 51 of the first vacuum device 5, that is, the first flange 1 is connected to the first vacuum device 5 through a vacuum pipe 8. The retractable member 4 in the transfer device is connected to the sample inlet and outlet 51 of the second vacuum device 6, that is, the third flange 41 is connected to the second vacuum device 6.

[0072] It can be understood that the vacuum interconnected sample transfer system according to the embodiment of the present invention can realize convenient connection or separation between the first vacuum equipment 5 and the second vacuum equipment 6 by adopting a switching device, which is conducive to the rapid switching between the sample transfer operation and the independent operation of each device, and ensures the data quality and processing accuracy of the equipment. Therefore, compared with the related technology, the present invention can fundamentally solve the noise interference problem between vacuum interconnected devices, reduce the complexity and difficulty of noise isolation, and has strong operability.

[0073] Specifically, the sample inlet and outlet 51 of the first vacuum equipment 5, the vacuum pipeline 8, and the first flange 1 are connected in sequence. The second flange 2, the fourth flange 43, the bellows 42, the third flange 41, and the sample inlet and outlet 51 of the second vacuum equipment 6 are connected in sequence. Among them, a gate valve 81 is arranged between the sample inlet and outlet 51 of the first vacuum equipment 5 and the vacuum pipeline 8, and a gate valve 81 is arranged between the third flange 41 and the sample inlet and outlet 51 of the second vacuum equipment 6.

[0074] It should be noted that when the first vacuum equipment 5 and the second vacuum equipment 6 are operating separately, the first flange 1 and the second flange 2 are spaced apart, so that the first vacuum equipment 5 and the second vacuum equipment 6 are separated, and the noise generated during the operation of the two will not be transmitted and affected by each other through the vacuum pipe 8, so the noise interference problem between vacuum interconnected equipment can be fundamentally solved.

[0075] like Figure 7 As shown, a method for using a vacuum interconnected sample transfer system according to an embodiment of the present invention comprises the following steps:

[0076] Step S1, pressing the first end of the second flange 2 against the second end of the first flange 1, and locking the two by using the locking assembly 3, so as to transfer the sample between the first vacuum equipment 5, the transfer device and the second vacuum equipment 6;

[0077] Step S2, unlocking the first flange 1 and the second flange 2, pulling the second flange 2 by the retractable member 4 until the first end of the second flange 2 is spaced apart from the second end of the first flange 1, and the first vacuum equipment 5 and the second vacuum equipment 6 are separated and operate independently without interfering with each other, so as to avoid the problem of noise between the two being transmitted by the vacuum pipe 8 by disconnecting the connection between the first vacuum equipment 5 and the second vacuum equipment 6, and realize vibration isolation between the two, thereby effectively reducing the complexity and difficulty of noise isolation, and compared with the related technology, also improving the vibration isolation effect.

[0078] The technical advantages of the method for using the vacuum interconnected sample transfer system according to the embodiment of the present invention are the same as the technical advantages of the above-mentioned vacuum interconnected sample transfer system, which will not be repeated here.

[0079] In some embodiments, step S1 includes:

[0080] Step S11, screw the first lock nut 72 to unlock the third flange 41 and the fourth flange 43, stretch the bellows 42, and move the second flange 2 with the bellows 42 until the second flange 2 is pressed against the first flange 1, and screw the first lock nut 72 in the opposite direction to lock the third flange 41 and the fourth flange 43;

[0081] Step S12, the second screw portion 312 is rotated around the mounting portion 21, the second screw portion 312 is matched in the slot 11, the second lock nut 32 is screwed, the second screw portion 312 is locked in the slot 11, and the first flange 1 and the second flange 2 are connected;

[0082] Step S13, start the vacuum pump group 9 and the vacuum gauge 82 until the vacuum degree of the connection chamber meets the requirements, and open the gate valve 81 to transfer the sample between the first vacuum equipment 5, the transfer device and the second vacuum equipment 6.

[0083] In some embodiments, step S2 includes:

[0084] Step S21, close the gate valve 81 and the vacuum gauge 82, screw the second lock nut 32, and unlock the second screw portion 312 in the slot 11;

[0085] Step S22, turn off the vacuum pump group 9, and introduce gas (generally nitrogen or dry air) into the vacuum pipe 8 until the air pressure in the connecting cavity is equal to the atmospheric pressure. The operation of introducing gas into the vacuum pipe 8 can be achieved by adding a gas path on the vacuum pump group 9 or directly adding a gas path on the vacuum pipe 8. The existing technology in the art can be used and will not be described in detail.

[0086] Step S23, screw the first lock nut 72 to unlock the third flange 41 and the fourth flange 43, compress the bellows 42, and move the second flange 2 with the bellows 42 until the second flange 2 is separated from the first flange 1, screw the first lock nut 72 in the opposite direction to lock the third flange 41 and the fourth flange 43, and separate the first vacuum device 5 from the second vacuum device 6;

[0087] Step S24, start the first vacuum equipment 5 and the second vacuum equipment 6 to operate without interfering with each other.

[0088] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0089] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0090] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0091] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0092] In the present invention, the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0093] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A switching device, characterized in that: include: A first flange, a second flange and a locking assembly, wherein the first flange and the second flange each have a first end and a second end opposite to each other in a first direction, the first end of the first flange being adapted to communicate with a first vacuum device, the first end of the second flange having a first position communicating with the second end of the first flange and a second position spaced apart from the second end of the first flange, and the locking assembly being capable of locking the second flange and the first flange when the first end of the second flange is located at the first position; as well as A retractable member, the second end of the second flange is connected to the retractable member, the retractable member has a sample chamber connected to the second flange, the end of the retractable member away from the second flange is suitable for connecting to a second vacuum device, and when the first end of the second flange is in the first position, the length of the retractable member is greater than the length of the retractable member in the second position.

2. The switching device according to claim 1, characterized in that: The retractable member includes a third flange, a bellows and a fourth flange which are connected in sequence, any one of the third flange and the fourth flange is connected to the second end of the second flange, and the end of the other one facing away from the bellows is suitable for being connected to the second vacuum equipment, and the inner circumferential wall of the third flange, the inner circumferential wall of the bellows and the inner circumferential wall of the fourth flange jointly define the sample passage chamber.

3. The switching device according to claim 2, characterized in that: Also included is an adjustment assembly, the adjustment assembly is movably connected to at least one of the third flange and the fourth flange, the adjustment assembly can lock the third flange and the fourth flange when the spacing between them is adjusted to any position, so as to change the length of the bellows; And / or, there are multiple adjustment components and they are arranged at intervals along the circumferential direction of the third flange.

4. The switching device according to claim 3, characterized in that: The adjustment assembly includes a first screw and a first locking nut, the first screw having a first head and a first screw portion connected to each other, the first head being connected to the third flange, the first screw portion being movably connected to the fourth flange, and the first screw portion being suitable for being fastened to the fourth flange through the first locking nut so as to lock the third flange and the fourth flange.

5. The switching device according to claim 4, characterized in that: The adjustment assembly also includes a universal ball head, which is mounted on the third flange. The first head is pivotally connected to the third flange via the universal ball head so as to adjust the angle of the first screw portion relative to the third flange.

6. The switching device according to any one of claims 2 to 5, characterized in that: Any one of the first flange and the second flange is provided with a mounting portion, and the other is provided with a slot; The locking assembly includes a second screw and a second lock nut, the second screw having a second head and a second screw portion connected to each other, the second head being pivotally connected to the mounting portion, and the second lock nut being capable of locking the second screw portion in the slot when the second screw portion is pivoted relative to the mounting portion into the slot, so as to fasten the first flange and the second flange; And / or, there are multiple locking assemblies and they are arranged at intervals along the circumferential direction of the first flange.

7. The switching device according to claim 6, characterized in that: It also includes a first sealing ring, which is sandwiched between the second end of the first flange and the first end of the second flange to seal a connection gap between the first flange and the second flange; And / or, the second end of the second flange is connected to the third flange, and the adapter device also includes a second sealing ring, which is clamped between the second end of the second flange and the third flange to seal the connecting gap between the second flange and the third flange.

8. The switching device according to claim 1, characterized in that: Also includes: A vacuum pipeline, wherein a gate valve is installed at the end of the retractable member away from the second flange and the first end of the vacuum pipeline, so that the gate valve controls the on and off of the retractable member or the vacuum pipeline, the first end of the vacuum pipeline is suitable for communicating with the first vacuum device, the second end of the vacuum pipeline is connected to the first end of the first flange, the vacuum pipeline has a connecting cavity and is provided with a vacuum gauge, and the vacuum gauge is used to detect the vacuum degree in the connecting cavity; and A vacuum pump group is installed on the vacuum pipeline and communicated with the connecting cavity so as to evacuate the connecting cavity.

9. A vacuum interconnected sample transfer system, characterized in that: include: A first vacuum device and a second vacuum device, wherein both the first vacuum device and the second vacuum device have a sample inlet and outlet, wherein the first vacuum device has a greater vibration noise than the second vacuum device, and the second vacuum device has a high requirement for vibration noise isolation; as well as The adapter device is the adapter device described in any one of claims 1-8, the first end of the first flange in the adapter device is connected to the sample inlet and outlet of the first vacuum equipment, and the retractable part in the adapter device is connected to the sample inlet and outlet of the second vacuum equipment.

10. A method for using a vacuum interconnected sample transfer system, characterized in that: The following steps are involved: Pressing the first end of the second flange against the second end of the first flange, and locking the two by using a locking assembly, so as to transfer the sample between the first vacuum device, the transfer device, and the second vacuum device; The first flange and the second flange are unlocked, and the second flange is pulled by the retractable member until the first end of the second flange is spaced apart from the second end of the first flange, and the first vacuum device and the second vacuum device are separated and run independently without interfering with each other.

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