Color filter, display panel, exposure mask, and method for forming color filter

Abstract

The invention discloses a color filter, a display panel, an exposure mask and a forming method of the color filter. The color filter comprises a substrate; a matrix layer; a color resistance layer; the spacing columns are distributed on the color resistance layer and comprise main spacing columns and auxiliary spacing columns; the auxiliary spacing columns comprise the first auxiliary spacing column and the second auxiliary spacing column, the height of the first auxiliary spacing column is smaller than that of the main spacing column, the height of the second auxiliary spacing column is larger than that of the first auxiliary spacing column, and the height of the second auxiliary spacing column is smaller than that of the main spacing column. When the surface of the liquid crystal display is subjected to large pressure, the second auxiliary spacing columns are higher than the first auxiliary spacing columns, auxiliary supporting of the liquid crystal display can be enhanced, and the compression resistance of the liquid crystal display is improved; moreover, when the temperature changes and the liquid crystal in the liquid crystal display expands with heat and contracts with cold, as the height of the first auxiliary spacing column is lower than that of the second auxiliary spacing column, a larger deformation space can be provided for the liquid crystal layer.

Description

Technical Field

[0001] The present invention relates to a semiconductor manufacturing process, and in particular to a color filter, a display panel, an exposure mask and a method for forming the color filter. Background Art

[0002] Liquid Crystal Display (LCD) has many advantages such as thin body, power saving, and no radiation, and has been widely used, such as LCD TVs, mobile phones, personal digital assistants (PDAs), digital cameras, computer screens or laptop screens, etc., and dominates the field of flat panel displays.

[0003] The liquid crystal display panel usually includes an array substrate, a color filter substrate, and a liquid crystal layer sandwiched between the array substrate and the color filter substrate. For a traditional vertical alignment (VA) type liquid crystal display panel, a thin film transistor (TFT) arranged in a matrix is ​​usually arranged on the array substrate, and a color filter layer for filtering, a black matrix (BM) for shading and preventing different colors of light from mixing, and a columnar spacer (PS) for supporting the cell gap of the liquid crystal layer between the array substrate and the color filter substrate are usually arranged on the color filter substrate. The columnar spacers include main spacers (Main PS) and sub-spacers (Sub PS). The height of the main spacers is higher than that of the sub-spacers. When the array substrate and the color filter substrate of the liquid crystal display panel are attached, the main spacers support the array substrate, and the sub-spacers are spaced apart from the array substrate. The main spacers are columnar spacers that always support the LCD panel under normal working conditions. When the LCD panel is subjected to excessive external pressure, the auxiliary spacers are added to support the array substrate together to increase the supporting strength of the columnar spacers.

[0004] However, current color filters leave much to be desired. Summary of the invention

[0005] The problem solved by the present invention is how to improve the structure of the color filter so as to provide a larger deformation space for the liquid crystal while improving the pressure resistance of the liquid crystal panel.

[0006] To solve the above problems, the present invention provides a color filter, comprising: a substrate; a matrix layer, the matrix layer is located on the substrate; a color resist layer, the color resist layer is located on the matrix layer; spacer columns, the spacer columns are distributed on the color resist layer, the spacer columns include: main spacer columns; sub-spacer columns, the sub-spacer columns include: first sub-spacer columns and second sub-spacer columns, wherein the height of the first sub-spacer columns is less than the height of the main spacer columns, the height of the second sub-spacer columns is greater than the height of the first sub-spacer columns and the height of the second sub-spacer columns is less than the height of the main spacer columns.

[0007] Optionally, the distribution density of the first sub-spacer columns is greater than the distribution density of the second sub-spacer columns; the distribution density of the first sub-spacer columns is greater than the distribution density of the main spacer columns.

[0008] Optionally, the distribution density of the auxiliary spacers is 10 to 100 times the distribution density of the main spacers.

[0009] Optionally, the distribution density of the second sub-spacer columns is 0.02 to 0.2 times the distribution density of the first sub-spacer columns; the distribution density of the second sub-spacer columns is 0.5 to 3 times the distribution density of the main spacer columns.

[0010] Optionally, the width of the second sub-spacer is smaller than the width of the first sub-spacer; and the difference between the width of the second sub-spacer and the width of the first sub-spacer is greater than 2 μm.

[0011] Optionally, the height of the second sub-spacer is greater than the height of the first sub-spacer, and the difference between the height of the second sub-spacer and the height of the first sub-spacer is greater than 0.05 μm.

[0012] Optionally, a projection shape of at least one of the main spacer columns and the auxiliary spacer columns on the substrate surface is circular, rectangular or elliptical.

[0013] Optionally, the sub-spacers on the matrix layer between the color resist layers adjacent to each other in the first direction extend along the second direction, wherein the first direction and the second direction are one and the other of the row direction and the column direction of the color resist layers arranged in the array.

[0014] Correspondingly, the technical solution of the present invention further provides a display panel, which includes the color filter as described in any one of the above items.

[0015] Correspondingly, the technical solution of the present invention also provides an exposure mask, which is suitable for forming a color filter as described in any one of the above items, and the exposure mask comprises: a fully transparent area, a partially transparent area and an opaque area, wherein the transmittance of the partially transparent area is between the transmittance of the fully transparent area and the transmittance of the opaque area; the partially transparent area is suitable for forming the sub-spacer column.

[0016] Optionally, the partial light-transmitting area includes: a first partial light-transmitting area and a second partial light-transmitting area; a size of a pattern of the first partial light-transmitting area is different from a size of a pattern of the second partial light-transmitting area.

[0017] Optionally, the first partial light-transmitting area is suitable for forming the first sub-spacer column, and the second partial light-transmitting area is suitable for forming the second sub-spacer column; and the size of the pattern of the first partial light-transmitting area is greater than the size of the pattern of the second partial light-transmitting area.

[0018] Correspondingly, the technical solution of the present invention also provides a method for forming a color filter, comprising: providing a substrate, the substrate having a matrix layer and a color resist layer located on the matrix layer; using an exposure mask as described in any one of the above items to form spacer columns on the color resist layer, the spacer columns comprising: main spacer columns and sub-spacer columns, the sub-spacer columns comprising first sub-spacer columns and second sub-spacer columns, wherein the height of the first sub-spacer columns is less than the height of the second sub-spacer columns, which is less than the height of the main spacer columns.

[0019] Optionally, the first sub-spacer column and the second sub-spacer column are formed in the same exposure process.

[0020] Compared with the prior art, the technical solution of the present invention has the following advantages:

[0021] In the color filter of the technical solution of the present invention, the sub-spacer includes two types: a first sub-spacer and a second sub-spacer, wherein the height of the second sub-spacer is greater than the height of the first sub-spacer and the height of the second sub-spacer is less than the height of the main spacer. When the surface of the liquid crystal display is subjected to a large pressure, the height of the second sub-spacer is higher than the height of the first sub-spacer, and the second sub-spacer can enhance the auxiliary support function for the liquid crystal display and improve the pressure resistance of the liquid crystal display; and when the temperature changes and the liquid crystal in the liquid crystal display expands and contracts, since the height of the first sub-spacer is lower than that of the second sub-spacer, a larger deformation space can be provided for the liquid crystal layer.

[0022] In an optional solution of the present invention, the sub-spacer columns located on the matrix layer between the color-resistance layers adjacent in the first direction extend along the second direction, wherein the first direction and the second direction are one and the other of the row direction and the column direction of the color-resistance layers arranged in an array. The sub-spacer columns extend along the second direction, and the size of the sub-spacer columns along the second direction is relatively large, which increases the contact area between the sub-spacer columns and the matrix layer, and the sub-spacer columns enhance the auxiliary support function for the liquid crystal display, and improve the pressure resistance of the liquid crystal display; and the sub-spacer columns are located on the matrix layer between the adjacent color-resistance layers, and the extension direction of the sub-spacer columns is perpendicular to the arrangement direction of the adjacent color-resistance layers, and the sub-spacer columns will not occupy the area of ​​the display region of the color-resistance layer, and will not affect the performance of the liquid crystal display. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the cross-sectional structure of a color filter in the prior art;

[0024] Figure 2 is a schematic top view of a color filter according to an embodiment of the present invention;

[0025] Figure 3 is a schematic cross-sectional structure diagram of a color filter according to an embodiment of the present invention;

[0026] Figure 4 is a schematic top view of a second auxiliary spacer column of a color filter according to an embodiment of the present invention;

[0027] Figure 5 is a schematic top view of a color filter according to another embodiment of the present invention;

[0028] Figure 6 is a schematic cross-sectional structure diagram of a color filter according to another embodiment of the present invention;

[0029] Figure 7 is a schematic top view of a second auxiliary spacer column of a color filter according to another embodiment of the present invention;

[0030] Figure 8 is a schematic top view of a color filter according to another embodiment of the present invention;

[0031] Fig. 9 is a schematic cross-sectional structure diagram of a color filter according to another embodiment of the present invention;

[0032] Fig.10 FIG. 4 is a schematic top view of a second sub-spacer of a color filter according to another embodiment of the present invention. DETAILED DESCRIPTION

[0033] As can be seen from the background technology, the optical filters in the prior art still have some shortcomings. The reasons for the problems are analyzed below:

[0034] Please refer to Figure 1 A color filter comprises: a substrate 100; a matrix layer 101, wherein the matrix layer 101 is located on the substrate 100; a color resist layer 102, wherein the color resist layer 102 is located on the matrix layer 101; spacers, wherein the spacers are distributed on the color resist layer 102, and wherein the spacers comprise: a main spacer 103; and a sub-spacer 104, wherein the height of the sub-spacer 104 is less than the height of the main spacer 103.

[0035] The main spacers 103 always play a supporting role, and the auxiliary spacers 104 play an auxiliary supporting role when the surface of the liquid crystal display is subjected to a large pressure. In order to improve the surface pressure performance, the following methods are usually adopted:

[0036] The first method is to increase the distribution density of the main spacers 103 .

[0037] Although the method of increasing the distribution density of the main spacers 103 enhances the pressure resistance of the liquid crystal display, due to the basic property of liquid crystal expansion and contraction, this method will reduce the deformable spatial range of the main spacers 103 and the deformable spatial range of the liquid crystal 106 filled between the color resist layer 102 and the thin film transistor 105.

[0038] The second method is to increase the height of the secondary spacer 104 to reduce the height difference between the main spacer 103 and the secondary spacer 104 .

[0039] Although the method of increasing the height of the sub-spacer 104 to reduce the height difference between the main spacer 103 and the sub-spacer 104 enhances the pressure resistance of the liquid crystal display, due to the basic property of liquid crystal expansion and contraction, this method will reduce the deformable spatial range of the main spacer 103 and the deformable spatial range of the liquid crystal 106 filled between the color resist layer 102 and the thin film transistor 105.

[0040] The third method is to adjust the thickness of the corresponding position of the thin film transistor 105 (TFT) in contact with the spacer column so that the thickness of each position of the thin film transistor 105 is adapted to the height of each spacer column.

[0041] This approach increases the design complexity of the thin film transistor 105 (TFT) and affects the brightness of the liquid crystal display.

[0042] In order to solve the technical problem, the present invention provides a color filter, comprising: a substrate; a matrix layer, the matrix layer is located on the substrate; a color resist layer, the color resist layer is located on the matrix layer; spacer columns, the spacer columns are distributed on the color resist layer, the spacer columns include: main spacer columns; sub-spacer columns, the sub-spacer columns include: first sub-spacer columns and second sub-spacer columns, wherein the height of the first sub-spacer columns is less than the height of the main spacer columns, the height of the second sub-spacer columns is greater than the height of the first sub-spacer columns and the height of the second sub-spacer columns is less than the height of the main spacer columns.

[0043] In the color filter of the technical solution of the present invention, the sub-spacer includes two types: a first sub-spacer and a second sub-spacer, wherein the height of the second sub-spacer is greater than the height of the first sub-spacer and the height of the second sub-spacer is less than the height of the main spacer. When the surface of the liquid crystal display is subjected to a large pressure, the height of the second sub-spacer is higher than the height of the first sub-spacer, and the second sub-spacer can enhance the auxiliary support function for the liquid crystal display and improve the pressure resistance of the liquid crystal display; and when the temperature changes and the liquid crystal in the liquid crystal display expands and contracts, since the height of the first sub-spacer is lower than the height of the second sub-spacer, a larger deformation space can be provided for the liquid crystal.

[0044] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0045] Figures 2 to 4 FIG. 4 is a schematic structural diagram of a color filter according to an embodiment of the present invention.

[0046] Figure 2 yes Figure 3 A top view of Figure 3 yes Figure 2 Schematic diagram of the cross-sectional structure at position Y1Y2. Figure 2 The substrate 200, the matrix layer 201, the array substrate 207 and the liquid crystal layer 208 are not shown.

[0047] Please refer to Figure 3 The color filter comprises: a substrate 200. Specifically, in some embodiments of the present invention, the material of the substrate 200 comprises glass. The substrate 200 is used to support the matrix layer 201, the color resist layer 202 and the spacer.

[0048] Please refer to Figure 3 The color filter includes: a matrix layer 201, and the matrix layer 201 is located on the substrate 200. The matrix layer 201 is used to separate the three primary colors of red, green and blue in the color filter (to prevent color confusion) and prevent light leakage, so as to improve the contrast of each color block.

[0049] Please refer to Figure 3 The color filter includes: a color resist layer 202 , and the color resist layer 202 is located on the matrix layer 201 .

[0050] The color resist layer 202 is used in display technologies, such as liquid crystal display (LCD) and organic light-emitting diode (OLED) displays, and its main function is to filter and generate light of a specific color to achieve color display.

[0051] In a liquid crystal display, the color resist layer is located above or below the liquid crystal layer, and is usually composed of pixels of three colors: red, green, and blue. These pixels adjust the amount of light passing through by controlling the rotation angle of the liquid crystal molecules to produce various colors.

[0052] In organic light-emitting diodes, color resist layers are usually used in evaporation or printing processes to form organic light-emitting materials in red, green and blue. These materials emit light of corresponding colors when powered on, thus achieving color display.

[0053] Specifically, in some embodiments of the present invention, the color resist layer 202 includes a blue color resist layer, a green color resist layer and a red color resist layer.

[0054] Please refer to Figure 3 The color filter includes: spacer columns, and the spacer columns are distributed on the color resist layer 202 .

[0055] The function of the spacer is to support the liquid crystal display, maintain the distance between the color resist layer 202 and the array substrate 207 on which the thin film transistors are arranged, and ensure the uniform thickness of the liquid crystal layer, thereby ensuring the display effect.

[0056] Specifically, in some embodiments of the present invention, the spacer column includes: a main spacer column 203; a sub-spacer column 204, and the sub-spacer column 204 includes: a first sub-spacer column 205 and a second sub-spacer column 206, wherein the height of the first sub-spacer column 205 is less than the height of the main spacer column 203, the height of the second sub-spacer column 206 is greater than the height of the first sub-spacer column 205 and the height of the second sub-spacer column 206 is less than the height of the main spacer column 203.

[0057] The main spacers 203 always play a supporting role; the auxiliary spacers 204 play an auxiliary supporting role when the surface of the liquid crystal display is subjected to a large pressure.

[0058] Specifically, in some embodiments of the present invention, the distribution density of the first sub-spacers 205 is greater than the distribution density of the second sub-spacers 206; the distribution density of the first sub-spacers 205 is greater than the distribution density of the main spacers 203. The distribution density of the first sub-spacers 205 is relatively large, and when the temperature changes and the liquid crystal in the liquid crystal display expands and contracts, the first sub-spacers 205 occupy a smaller volume of space due to the lower height of the first sub-spacers 205, providing a larger deformation space for the liquid crystal.

[0059] Specifically, in some embodiments of the present invention, the distribution density of the auxiliary spacers 204 is 10 to 100 times the distribution density of the main spacers 203 .

[0060] The distribution density of the second sub-spacers 206 is 0.02 to 0.2 times the distribution density of the first sub-spacers 205 .

[0061] The distribution density of the second sub-spacers 206 is 0.5 to 3 times the distribution density of the main spacers 203. The second sub-spacers 206 play an auxiliary supporting role to improve the pressure resistance of the liquid crystal display; and when the temperature changes and the liquid crystal in the liquid crystal display expands and contracts, since the height of the second sub-spacers 206 is lower than that of the main spacers 203, a larger deformation space can be provided for the liquid crystal layer 208.

[0062] Specifically, in some embodiments of the present invention, Figure 3 As shown, the difference between the height H3 of the second sub-spacer 206 and the height H2 of the first sub-spacer 205 is greater than 0.05 μm. That is, the height H3 of the second sub-spacer 206 is at least 0.05 μm higher than the height H2 of the first sub-spacer 205. The height H3 of the second sub-spacer 206 is higher than the height H2 of the first sub-spacer 205, thereby improving the pressure resistance of the liquid crystal display.

[0063] The projection shape of at least one of the main spacer 203 and the auxiliary spacer 204 on the surface of the substrate 200 is circular, rectangular or elliptical. Specifically, in some embodiments of the present invention, Figure 2 and Figure 4 As shown, the projection shapes of the main spacer 203 , the first sub-spacer 205 , and the second sub-spacer 206 on the surface of the substrate 200 are all circular.

[0064] In some embodiments of the present invention, Figure 3 As shown, the width a2 of the second sub-spacer 206 is smaller than the width a1 of the first sub-spacer 205 ; the difference between the width a2 of the second sub-spacer 206 and the width a1 of the first sub-spacer 205 is greater than 2 μm.

[0065] The width of the second sub-spacer 206 is parallel to the surface of the substrate 200, and the size of the second sub-spacer 206; the width of the first sub-spacer 205 is parallel to the surface of the substrate 200, and the size of the first sub-spacer 205. For example, please refer to Figures 2 to 4 When the projection shape of the second sub-spacer 206 on the surface of the substrate 200 is circular, the width a2 of the second sub-spacer 206 is the diameter D of the circular projection of the second sub-spacer 206 parallel to the surface of the substrate 200, that is, a2=D.

[0066] When the projection shapes of the first sub-spacer 205 and the second sub-spacer 206 on the surface of the substrate 200 are both circular, and the width a2 of the second sub-spacer 206 is smaller than the width a1 of the first sub-spacer 205, the diameter D of the second sub-spacer 206 is 第二副间隔柱 smaller than the diameter D of the first secondary spacer column 205 第一副间隔柱 .

[0067] Please continue to refer to Figure 3 , the color filter includes: an array substrate 207.

[0068] Thin film transistors arranged in a matrix are usually disposed on the array substrate 207. A liquid crystal layer 208 is disposed between the array substrate 207 and the color resist layer 202.

[0069] Figures 5 to 7 FIG. 4 is a schematic structural diagram of a color filter according to another embodiment of the present invention. Figure 5 yes Figure 6 A top view of Figure 6 yes Figure 5 Schematic diagram of the cross-sectional structure at position Y1Y2. Figure 5 The substrate 200, the matrix layer 201, the array substrate 207 and the liquid crystal layer 208 are not shown.

[0070] The same as the above embodiment, the present disclosure will not repeat it here. The difference from the above embodiment is that please refer to Figure 5 and Figure 7 , the projection shape of at least one of the main spacer 300 and the sub-spacer 301 on the surface of the substrate 200 is a rectangle. Specifically, in some embodiments of the present invention, the projection shapes of the main spacer 300, the first sub-spacer 302, and the second sub-spacer 303 on the surface of the substrate 200 are all rectangles.

[0071] Specifically, in some embodiments of the present invention, please refer to Figure 5 and Figure 6The sub-spacers 301 on the matrix layer 201 between the color resist layers 202 adjacent to each other in the first direction Y extend along the second direction X, wherein the first direction Y and the second direction X are one and the other of the row direction and the column direction of the color resist layers 202 arranged in the array.

[0072] The sub-spacers 301 on the matrix layer 201 between the color resist layers 202 adjacent to each other in the first direction Y extend along the second direction X. The sub-spacers 301 have a larger size along the second direction X. The contact area between the sub-spacers 301 and the matrix layer 201 between the adjacent color resist layers 202 is larger. The sub-spacers 301 enhance the auxiliary support function for the liquid crystal display and improve the pressure resistance of the liquid crystal display. Furthermore, the extension direction X of the sub-spacers 301 is perpendicular to the arrangement direction Y of the adjacent color resist layers 202. The sub-spacers 301 extending along the second direction X do not occupy the display area of ​​the color resist layer 202 and do not affect the performance of the liquid crystal display.

[0073] Specifically, in some embodiments of the present invention, please refer to Figure 5 , the size of the spacer along the second direction X is greater than one third of the size of the color resist layer 202 along the second direction X, that is:

[0074] In some embodiments of the present invention, Figure 6 As shown, the width a2 of the second sub-spacer 303 is smaller than the width a1 of the first sub-spacer 302 ; the difference between the width a2 of the second sub-spacer 303 and the width a1 of the first sub-spacer 302 is greater than 2 μm.

[0075] The width of the second sub-spacer 303 is the size of the second sub-spacer 303 parallel to the surface of the substrate 200 ; the width of the first sub-spacer 302 is the size of the first sub-spacer 302 parallel to the surface of the substrate 200 .

[0076] For examples, please refer to Figures 5 to 7 When the projection shape of the second sub-spacer 303 on the surface of the substrate 200 is a rectangle, the width a2 of the second sub-spacer 303 is the average value L of the side length of the rectangular projection of the second sub-spacer 303 parallel to the surface of the substrate 200. Where W is the length of the long side of the rectangle, and H is the length of the short side of the rectangle. At this time,

[0077] When the projection shapes of the first sub-spacer 302 and the second sub-spacer 303 on the surface of the substrate 200 are both rectangular, and the width a2 of the second sub-spacer 303 is smaller than the width a1 of the first sub-spacer 302, the average side length L of the rectangular projection of the second sub-spacer 303 parallel to the surface of the substrate 200 is 第二副间隔柱 is smaller than the average side length L of the rectangular projection of the first sub-spacer 302 parallel to the surface of the substrate 200 第一副间隔柱 .

[0078] Figures 8 to 10 FIG. 4 is a schematic structural diagram of a color filter according to another embodiment of the present invention. Figure 8 yes Fig. 9 A top view of Fig. 9 yes Figure 8 Schematic diagram of the cross-sectional structure at position Y1Y2. Figure 8 The substrate 200, the matrix layer 201, the array substrate 207 and the liquid crystal layer 208 are not shown.

[0079] The same as the above embodiment, the present disclosure will not repeat it here. The difference from the above embodiment is that please refer to Figure 8 and Fig.10 , the projection shape of at least one of the main spacer 400 and the sub-spacer 401 on the surface of the substrate 200 is an ellipse. Specifically, in some embodiments of the present invention, the projection shapes of the main spacer 400, the first sub-spacer 402, and the second sub-spacer 403 on the surface of the substrate 200 are all elliptical.

[0080] Specifically, in some embodiments of the present invention, please refer to Figure 8 and Fig. 9 The sub-spacers 401 on the matrix layer 201 between the adjacent color resist layers 202 in the first direction Y extend along the second direction X, wherein the first direction Y and the second direction X are one and the other of the row direction and the column direction of the arrayed color resist layers 202 .

[0081] The sub-spacers 401 on the matrix layer 201 between the color resist layers 202 adjacent to each other in the first direction Y extend along the second direction X. The sub-spacers 401 have a larger size along the second direction X. The contact area between the sub-spacers 401 and the matrix layer 201 between the adjacent color resist layers 202 is larger. The sub-spacers 401 enhance the auxiliary support function for the liquid crystal display and improve the pressure resistance of the liquid crystal display. Furthermore, the extension direction X of the sub-spacers 401 is perpendicular to the arrangement direction Y of the adjacent color resist layers 202. The sub-spacers 401 extending along the second direction X do not occupy the display area of ​​the color resist layer 202 and do not affect the performance of the liquid crystal display.

[0082] Specifically, in some embodiments of the present invention, please refer to Figure 8 , the size of the spacer along the second direction X is greater than one third of the size of the color resist layer 202 along the second direction X, that is:

[0083] In some embodiments of the present invention, Fig. 9 As shown, the width a2 of the second sub-spacer 303 is smaller than the width a1 of the first sub-spacer 302 ; the difference between the width a2 of the second sub-spacer 303 and the width a1 of the first sub-spacer 302 is greater than 2 μm.

[0084] The width of the second sub-spacer 403 is the size of the second sub-spacer 403 parallel to the surface of the substrate 200 ; the width of the first sub-spacer 402 is the size of the first sub-spacer 402 parallel to the surface of the substrate 200 .

[0085] For examples, please refer to Figures 8 to 10 When the projection shape of the second sub-spacer 403 on the surface of the substrate 200 is an ellipse, the width a2 of the second sub-spacer 403 is the average value E of the axis length of the ellipse projection of the second sub-spacer 403 parallel to the surface of the substrate 200. Where 2c is the length of the major axis of the ellipse, and 2d is the length of the minor axis of the ellipse.

[0086] When the projection shapes of the first sub-spacer 402 and the second sub-spacer 403 on the surface of the substrate 200 are both elliptical, and the width a2 of the second sub-spacer 403 is smaller than the width a1 of the first sub-spacer 402, the average side length E of the elliptical projection of the second sub-spacer 403 parallel to the surface of the substrate 200 is 第二副间隔柱 is smaller than the average side length E of the elliptical projection of the first sub-spacer 402 parallel to the surface of the substrate 200 第一副间隔柱 .

[0087] Correspondingly, the present invention further provides a display panel, wherein the display panel comprises the color filter as described in any one of the above items, which will not be described in detail herein.

[0088] Correspondingly, the present invention also provides an exposure mask, which is suitable for forming a color filter as described in any one of the above items, and the exposure mask comprises: a fully transparent area, a partially transparent area and an opaque area, wherein the transmittance of the partially transparent area is between the transmittance of the fully transparent area and the transmittance of the opaque area; the partially transparent area is suitable for forming the sub-spacer column.

[0089] The fully light-transmissive area is suitable for forming the main spacer column.

[0090] The partial light-transmitting area includes: a first partial light-transmitting area and a second partial light-transmitting area; the size of the pattern of the first partial light-transmitting area is different from the size of the pattern of the second partial light-transmitting area.

[0091] Specifically, in some embodiments of the present invention, the first portion of the light-transmitting area is suitable for forming the first sub-spacer column, and the second portion of the light-transmitting area is suitable for forming the second sub-spacer column; the size of the pattern of the first portion of the light-transmitting area is larger than the size of the pattern of the second portion of the light-transmitting area.

[0092] The pattern of the first light-transmitting area defines the size of the first sub-spacer column; the pattern of the second light-transmitting area defines the size of the second sub-spacer column.

[0093] Specifically, in some embodiments of the present invention, the transmittance of the first partial light-transmitting area is the same as the transmittance of the second partial light-transmitting area. The transmittance of the first partial light-transmitting area is the same as the transmittance of the second partial light-transmitting area, and the size of the pattern of the first partial light-transmitting area is larger than the size of the pattern of the second partial light-transmitting area, so that in the spacer formed by the exposure mask, the height of the first sub-spacer is smaller than the height of the second sub-spacer.

[0094] Correspondingly, the present invention also provides a method for forming a color filter, which is suitable for forming a color filter as described in any one of the above items, and the method for forming a color filter includes: providing a substrate, the substrate having a matrix layer and a color resist layer located on the matrix layer; using an exposure mask as described above to form spacer columns on the color resist layer, the spacer columns including: main spacer columns and sub-spacer columns, the sub-spacer columns including first sub-spacer columns and second sub-spacer columns, wherein the height of the first sub-spacer columns is less than the height of the second sub-spacer columns, which is less than the height of the main spacer columns.

[0095] Specifically, in some embodiments of the present invention, the first sub-spacer column and the second sub-spacer column are formed in the same exposure process.

[0096] By using the exposure mask as described above, the first sub-spacer columns and the second sub-spacer columns are formed in the same exposure process, which simplifies the process flow and saves process costs.

[0097] In summary, in the color filter of the technical solution of the present invention, the sub-spacer includes two types, namely, a first sub-spacer and a second sub-spacer, wherein the height of the second sub-spacer is greater than the height of the first sub-spacer and the height of the second sub-spacer is less than the height of the main spacer. When the surface of the liquid crystal display is subjected to a large pressure, the height of the second sub-spacer is higher than the height of the first sub-spacer, and the second sub-spacer can enhance the auxiliary support function for the liquid crystal display and improve the pressure resistance of the liquid crystal display; and when the temperature changes, the liquid crystal in the liquid crystal display expands and contracts due to the heat, because the height of the first sub-spacer is lower than the height of the second sub-spacer, a larger deformation space can be provided for the liquid crystal layer; in addition, the sub-spacer on the matrix layer between the adjacent color resistance layers in the first direction extends along the second direction, wherein the first direction and the second direction are one and the other of the row direction and the column direction of the array-arranged color resistance layers. The sub-spacer extends along the second direction, and the size of the sub-spacer along the second direction is relatively large, which increases the contact area between the sub-spacer and the matrix layer, enhances the auxiliary support function for the liquid crystal display, and improves the pressure resistance of the liquid crystal display; and the sub-spacer is located on the matrix layer between adjacent color resistance layers, and the extension direction of the sub-spacer is perpendicular to the arrangement direction of the adjacent color resistance layers. The sub-spacer has a relatively large size along the second direction and will not occupy the display area of ​​the color resistance layer, and will not affect the performance of the liquid crystal display.

[0098] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A color filter, characterized in that: include: substrate; a matrix layer, wherein the matrix layer is located on the substrate; A color resist layer, the color resist layer being located on the matrix layer; Spacer columns, the spacer columns are distributed on the color resist layer, and the spacer columns include: Main spacer column; A sub-spacer column, the sub-spacer column comprises: a first sub-spacer column and a second sub-spacer column, wherein the height of the first sub-spacer column is less than the height of the main spacer column, the height of the second sub-spacer column is greater than the height of the first sub-spacer column and the height of the second sub-spacer column is less than the height of the main spacer column.

2. The color filter according to claim 1, wherein: The distribution density of the first sub-spacer columns is greater than the distribution density of the second sub-spacer columns; the distribution density of the first sub-spacer columns is greater than the distribution density of the main spacer columns.

3. The color filter according to claim 1, wherein: The distribution density of the auxiliary spacers is 10 to 100 times the distribution density of the main spacers.

4. The color filter according to claim 3, wherein: The distribution density of the second sub-spacer columns is 0.02 to 0.2 times the distribution density of the first sub-spacer columns; the distribution density of the second sub-spacer columns is 0.5 to 3 times the distribution density of the main spacer columns.

5. The color filter according to claim 1, wherein: The width of the second sub-spacer is smaller than the width of the first sub-spacer; and the difference between the width of the second sub-spacer and the width of the first sub-spacer is greater than 2 μm.

6. The color filter according to claim 1, wherein: The height of the second sub-spacer is greater than that of the first sub-spacer, and the difference between the height of the second sub-spacer and the height of the first sub-spacer is greater than 0.05 μm.

7. The color filter according to claim 1, wherein: The projection shape of at least one of the main spacer and the auxiliary spacer on the substrate surface is circular, rectangular or elliptical.

8. The color filter according to claim 7, wherein: The sub-spacers on the matrix layer between the color resist layers adjacent to each other in the first direction extend along the second direction, wherein the first direction and the second direction are one and the other of the row direction and the column direction of the color resist layers arranged in the array.

9. A display panel, characterized in that: The display panel comprises the color filter as claimed in any one of claims 1 to 8.

10. An exposure mask, characterized in that: The exposure mask is suitable for forming the color filter according to any one of claims 1 to 8, and the exposure mask comprises: A fully light-transmitting area, a partially light-transmitting area and an opaque area, wherein the light transmittance of the partially light-transmitting area is between the light transmittance of the fully light-transmitting area and the light transmittance of the opaque area; The partial light-transmitting area is suitable for forming the sub-spacer.

11. The exposure mask according to claim 10, wherein: The partial light-transmitting area includes: a first partial light-transmitting area and a second partial light-transmitting area; the size of the pattern of the first partial light-transmitting area is different from the size of the pattern of the second partial light-transmitting area.

12. The exposure mask according to claim 11, wherein The first part of the light-transmitting area is suitable for forming the first sub-spacer column, and the second part of the light-transmitting area is suitable for forming the second sub-spacer column; The size of the pattern of the first light-transmitting area is greater than the size of the pattern of the second light-transmitting area.

13. A method for forming a color filter, characterized in that: include: Providing a substrate, wherein the substrate has a matrix layer and a color resist layer located on the matrix layer; Using the exposure mask described in claims 10 to 12, spacer columns are formed on the color resist layer, the spacer columns include: main spacer columns and sub-spacer columns, the sub-spacer columns include first sub-spacer columns and second sub-spacer columns, wherein the height of the first sub-spacer columns is less than the height of the second sub-spacer columns, and the height of the main spacer columns is less than the height of the main spacer columns.

14. The method for forming a color filter according to claim 13, wherein: The first sub-spacer and the second sub-spacer are formed in the same exposure process.

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