Trichlorosilane synthesis tail gas recovery device

Abstract

The invention relates to the technical field of waste gas treatment, and discloses a trichlorosilane synthesis tail gas recovery device which comprises a recovery bin, the outer wall of the recovery bin is fixedly connected with the end, close to the recovery bin, of an exhaust pipe, and the bottom of the recovery bin is fixedly connected with the outer wall of a gas inlet pipe through a flange. According to the device, the cooling mechanism is arranged, trichlorosilane synthesis tail gas is rapidly cooled after entering through the cooling mechanism, trichlorosilane is rapidly liquefied and separated, waste of trichlorosilane is effectively prevented, the resource recycling rate is increased, and the production cost is reduced; the pressurizing mechanism increases the pressure of the synthetic tail gas, the synthetic tail gas on the inner wall of the gas inlet pipe is cooled through the separating mechanism, the separating mechanism is assisted to separate condensed trichlorosilane liquid, the separating mechanism is arranged, the tail gas is condensed through the separating mechanism, the liquid is separated through a centrifugal mode, and the tail gas enters the cooling mechanism; and the tail gas in the separation mechanism is uniformly cooled by matching with the cooling mechanism.

Description

Technical Field

[0001] The invention relates to the technical field of waste gas treatment, in particular to a trichlorosilane synthesis tail gas recovery device. Background Art

[0002] With the rapid development of the chemical industry, the demand for efficient utilization of resources and environmental protection has become increasingly urgent. Trichlorosilane, as an important chemical raw material, produces tail gas during its synthesis process. If it is directly discharged, it will not only cause waste of resources, but also have adverse effects on the environment. In this context, trichlorosilane synthesis tail gas recovery equipment has been widely used. The device uses advanced technical means such as cooling, separation, adsorption, etc. to recover valuable substances in the tail gas, realize the recycling of resources, and reduce pollution to the environment. It provides strong support for the sustainable development of the chemical industry.

[0003] The patent application with application number CN202321769784.5 discloses a trichlorosilane synthesis tail gas recovery device, including a recovery tank, a support frame is arranged at the lower end of the recovery tank, and a recovery condensation mechanism is arranged in the recovery tank; the recovery condensation mechanism includes: a limit sleeve, a connecting pipe, a connecting pipe, a filter sleeve, an installation sleeve, a filter part and a condensation collection part; the limit sleeve is arranged at the inner top of the recovery tank, the connecting pipe is arranged inside the recovery tank, the connecting pipe is connected to the connecting pipe, the filter sleeve is sleeved on the connecting pipe, the installing sleeve is arranged in the recovery tank, the filter part is arranged inside the installing sleeve, and the condensation collection part is arranged in the recovery tank.

[0004] However, in the existing trichlorosilane synthesis tail gas recovery device, after the trichlorosilane synthesis tail gas enters the recovery device, the cooling link cannot quickly reduce the temperature of the tail gas, so that some substances that should be condensed into liquid for separation and recovery fail to change their state in time, resulting in some residual gas mixed in the tail gas, causing waste and limiting the use of the trichlorosilane synthesis tail gas recovery device. Summary of the invention

[0005] The object of the present invention is to provide a trichlorosilane synthesis tail gas recovery device to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solution: a trichlorosilane synthesis tail gas recovery device, comprising a recovery bin, the outer wall of the recovery bin is fixedly connected to one end of the exhaust pipe close to the recovery bin, the bottom of the recovery bin is fixedly connected to the outer wall of the intake pipe through a flange, the outer wall of the intake pipe is provided with a supercharging mechanism, and further comprising: A cooling mechanism is arranged on the inner wall of a recovery bin, and the cooling mechanism includes a cooling bin, the outer wall of the cooling bin is fixedly connected to the inner wall of the recovery bin by connecting ribs, the top of the cooling bin is fixedly connected to the outer wall of the water inlet pipe by a flange, the bottom of the cooling bin is fixedly connected to an end of the drain pipe near the cooling bin, the bottom of the cooling bin is fixedly connected to the top of the filter bin, the bottom of the filter bin is fixedly connected to an end of the collecting pipe near the filter bin, the inner wall of the cooling bin is fixedly connected to the outer wall of the heat conducting plate, the outer wall of the heat conducting plate is fixedly connected to the outer wall of the baffle, the inner wall of the heat conducting plate is provided with a separation mechanism, the cooling mechanism also includes a precipitation plate, the inner wall of the precipitation plate is fixedly connected to the outer wall of the intake pipe, the trichlorosilane synthesis tail gas is quickly cooled after entering through the cooling mechanism, and the trichlorosilane is quickly liquefied and separated, which can effectively prevent the waste of trichlorosilane, improve the resource recovery rate, reduce the production cost, and enable the trichlorosilane synthesis tail gas recovery device to be used normally.

[0007] According to the above technical solution, the boost mechanism includes a connector, the bottom of the connector is fixedly connected to the top of the intake pipe, the outer wall of the connector is provided with a second snap-in groove, and the boost mechanism also includes a connecting sleeve.

[0008] According to the above technical solution, a snap-in groove is provided on the outer wall of the connecting sleeve, an exhaust groove is provided on the inner wall of the exhaust groove, a sliding groove is provided on the inner wall of the connecting sleeve, the groove wall of the sliding groove is slidably connected to the outer wall of a locking block, a spring is provided inside the sliding groove, one end of the spring is fixedly connected to the groove wall of the sliding groove, and the other end is fixedly connected to the outer wall of a locking block.

[0009] According to the above technical solution, the number of the locking block 1 and the spring 1 is three groups, and the three groups of the locking block 1 and the spring 1 are equidistantly arranged on the inner wall of the connecting sleeve with the center line of the connecting sleeve as the rotation axis. The locking block 1 is squeezed out of the inner wall of the connecting sleeve by the spring 1, and the outer wall of the locking block 1 is clamped with the wall of the clamping groove 2. The pressure of the synthetic tail gas is increased by the boosting mechanism, and the synthetic tail gas on the inner wall of the intake pipe is cooled through the separation mechanism. At the same time, the auxiliary separation mechanism quickly separates the condensed trichlorosilane liquid, so that the trichlorosilane synthetic tail gas recovery device can be used normally.

[0010] According to the above technical solution, the separation mechanism includes a centrifugal cylinder, the outer wall of the centrifugal cylinder is rotatably connected to the inner wall of the heat conducting plate through a bearing, the outer wall of the centrifugal cylinder is provided with a lead-out hole, and the inner wall of the centrifugal cylinder is provided with a guide groove.

[0011] According to the above technical solution, a sliding groove 2 is provided on the inner wall of the centrifugal cylinder, and the groove wall of the sliding groove 2 is slidably connected to the outer wall of the locking block 2. A spring 2 is provided inside the sliding groove 2, and one end of the spring 2 is fixedly connected to the inner wall of the sliding groove 2, and the other end is fixedly connected to the outer wall of the locking block 2.

[0012] According to the above technical solution, there are three groups of locking blocks 2 and springs 2, and the three groups of locking blocks 2 and springs 2 are equidistantly arrayed on the inner wall of the centrifugal cylinder with the center line of the centrifugal cylinder as the rotation axis. The locking block 2 protrudes from the inner wall of the centrifugal cylinder through the squeezing of the spring 2, and the locking block 2 is clamped with the wall of the clamping groove 1.

[0013] According to the above technical solution, there are three groups of guide grooves, and the three groups of guide grooves are equidistantly arranged on the inner wall of the centrifugal cylinder with the center line of the centrifugal cylinder as the rotation axis. The derivation hole penetrates the outer wall of the centrifugal cylinder and is connected with the inner wall of the guide groove. The tail gas is condensed through the separation mechanism, and the liquid is quickly separated by centrifugation and enters the cooling mechanism. The tail gas temperature inside the separation mechanism is evenly cooled in cooperation with the cooling mechanism, so that the condensation effect of the synthetic tail gas is better, and the trichlorosilane synthetic tail gas recovery device can be used normally.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. The trichlorosilane synthesis tail gas recovery device is provided with a cooling mechanism, through which the trichlorosilane synthesis tail gas is quickly cooled after entering, so that the trichlorosilane is quickly liquefied and separated, which can effectively prevent the waste of trichlorosilane, improve the resource recovery rate, reduce the production cost, and enable the trichlorosilane synthesis tail gas recovery device to be used normally.

[0015] 2. The trichlorosilane synthesis tail gas recovery device is provided with a boosting mechanism, which increases the pressure of the synthesis tail gas through the boosting mechanism and cools the synthesis tail gas on the inner wall of the intake pipe through the separation mechanism. At the same time, the auxiliary separation mechanism quickly separates the condensed trichlorosilane liquid, so that the trichlorosilane synthesis tail gas recovery device can be used normally.

[0016] 3. The trichlorosilane synthesis tail gas recovery device is provided with a separation mechanism. The tail gas is condensed through the separation mechanism, and the liquid is quickly separated by centrifugation and enters the cooling mechanism. The tail gas temperature inside the separation mechanism is evenly cooled in cooperation with the cooling mechanism, so that the synthesis tail gas condensation effect is better and the trichlorosilane synthesis tail gas recovery device can be used normally.

[0017] 4. The trichlorosilane synthesis tail gas recovery device is provided with a baffle. When the separation mechanism separates the trichlorosilane liquid by centrifugation, the baffle prevents the liquid from splashing and guides the liquid, thereby increasing the contact area of ​​the synthesis gas flowing through the cooling mechanism. At the same time, the strength of the heat conducting plate is enhanced, so that the heat conducting plate has better heat dissipation effect, so that the trichlorosilane synthesis tail gas recovery device can be used normally. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 is a cross-sectional view of the present invention; Figure 3 is a cross-sectional view of the cooling mechanism of the present invention; Figure 4 is a cross-sectional view of the cooling mechanism of the present invention; Figure 5 is a cross-sectional view of the boosting mechanism of the present invention; Figure 6 For the present invention Figure 5 A is an enlarged schematic diagram; Figure 7 It is a structural schematic diagram of the separation mechanism of the present invention; Figure 8 is a cross-sectional view of the separation mechanism of the present invention; Fig. 9 For the present invention Figure 8 A magnified schematic diagram of B.

[0019] In the figure: 1. recovery bin; 2. air inlet pipe; 3. exhaust pipe; 4. cooling mechanism; 401. cooling bin; 402. drain pipe; 403. heat conducting sheet; 404. baffle; 405. filter bin; 406. collecting pipe; 407. sedimentation plate; 5. water inlet pipe; 6. boost mechanism; 601. connecting sleeve; 602. snap-fit ​​groove one; 603. exhaust groove; 604. connector; 605. snap-fit ​​groove two; 606. sliding groove one; 607. locking block one; 608. spring one; 7. separation mechanism; 701. centrifugal cylinder; 702. lead-out hole; 703. guide groove; 704. sliding groove two; 705. locking block two; 706. spring two. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] For example, see Figure 1-Figure 4 The present invention provides a technical solution: a trichlorosilane synthesis tail gas recovery device, comprising a recovery bin 1, the outer wall of the recovery bin 1 is fixedly connected to the end of the exhaust pipe 3 close to the recovery bin 1, the bottom of the recovery bin 1 is fixedly connected to the outer wall of the intake pipe 2 through a flange, the end of the intake pipe 2 close to the recovery bin 1 passes through the bottom of the recovery bin 1 and is placed inside the recovery bin 1, and is connected to the inside of the recovery bin 1, so that the synthetic gas can be normally discharged into the recovery bin 1 for condensation recovery treatment, the outer wall of the intake pipe 2 is provided with a booster mechanism 6, and also includes: The cooling mechanism 4 is arranged on the inner wall of the recovery bin 1. The cooling mechanism 4 includes a cooling bin 401. The outer wall of the cooling bin 401 is fixedly connected to the inner wall of the recovery bin 1 through a connecting rib. The top of the cooling bin 401 is fixedly connected to the outer wall of the water inlet pipe 5 through a flange. The end of the water inlet pipe 5 close to the cooling bin 401 passes through the top of the cooling bin 401 and is connected to the inside of the cooling bin 401. The end of the water inlet pipe 5 away from the cooling bin 401 passes through the inner wall of the recovery bin 1 and is connected to the outside of the recovery bin 1, so that the coolant is poured into the cooling bin 401 through the water inlet pipe 5 to condense the synthetic gas. The cooling bin 4 The bottom of the cooling tank 401 is fixedly connected to the end of the drain pipe 402 near the cooling tank 401, the end of the drain pipe 402 near the cooling tank 401 is connected to the inside of the cooling tank 401, and the end of the drain pipe 402 away from the cooling tank 401 passes through the inner wall of the recovery tank 1 and is connected to the outside of the recovery tank 1, so that the coolant can be discharged smoothly and connected to the water inlet pipe 5 through the circulation system for circulation cooling. The bottom of the cooling tank 401 is fixedly connected to the top of the filter tank 405, the bottom of the filter tank 405 is fixedly connected to the end of the collection pipe 406 near the filter tank 405, and the inner wall of the cooling tank 401 is fixedly connected to the outer wall of the heat conducting plate 403 The outer wall of the heat conducting sheet 403 is fixedly connected to the outer wall of the baffle 404, and the inner wall of the heat conducting sheet 403 is provided with a separation mechanism 7. The cooling mechanism 4 also includes a precipitation plate 407, and the inner wall of the precipitation plate 407 is fixedly connected to the outer wall of the intake pipe 2. The outer wall of the precipitation plate 407 is provided with a stepped annular protrusion, so that when the condensed liquid flows into the filter chamber 405, the particles remaining in the condensed liquid are precipitated and filtered through the outer wall of the precipitation plate 407, thereby reducing the impurities mixed in the condensed liquid. The baffle 404 can effectively prevent the liquid separated by the separation mechanism 7 through the centrifugal force from splashing, and guide the separated liquid. The synthetic gas after the liquid is separated is guided by the baffle 404 and discharged from the gap between the baffle 404 and the inner wall of the cooling chamber 401, thereby increasing the contact area with the synthetic gas. The inverted space formed by the baffle 404 and the separation mechanism 7 has a reflux deceleration effect on the synthetic gas, so that the synthetic gas is slowly discharged from the cooling mechanism 4. During the discharge of the synthetic gas, the baffle 404 and the heat conductive plate 403 continue to cool down through the cooling chamber 401, so that the baffle 404 and the heat conductive plate 403 continue to cool and capture the residual synthetic gas, thereby increasing the utilization rate of the condensation recovery of the trichlorosilane gas.

[0022] The working principle of this embodiment is as follows: when the trichlorosilane synthesis tail gas recovery device is put into use, the synthesis tail gas is pressurized by the supercharging mechanism 6 through the air inlet pipe 2 and then discharged into the recovery bin 1 for condensation recovery. At the same time, the coolant enters the cooling bin 401 through the water inlet pipe 5, and the synthesis tail gas is condensed by the heat conducting sheet 403. After the synthesis tail gas passes through the separation mechanism 7, the separation mechanism 7 is driven to rotate, and the condensed liquid and tail gas are separated by centrifugation to the inner wall of the cooling bin 401 for condensation collection, and the condensed liquid is guided by the baffle 404. At the same time, the synthesis gas after the liquid is separated passes through the baffle 404. The liquid is guided to be discharged from the gap between the baffle 404 and the inner wall of the cooling bin 401, thereby increasing the contact area with the synthetic gas. The inverted space formed by the baffle 404 and the separation mechanism 7 has a reflux deceleration effect on the synthetic gas, so that the synthetic gas is slowly discharged from the cooling mechanism 4. The condensed liquid is concentrated at the bottom of the inner wall of the cooling bin 401 and enters the filter bin 405. When the liquid flows through the outer wall of the sedimentation plate 407, the particulate impurities mixed with the liquid are precipitated and filtered by the protrusions on the outer wall of the sedimentation plate 407, and then discharged through the collection pipe 406 for recovery. The synthetic tail gas after condensation and separation is discharged through the exhaust pipe 3 and enters the next process.

[0023] For example 2, please refer to Figure 5-Figure 6 The present invention provides a technical solution: the boost mechanism 6 includes a connector 604, the bottom of the connector 604 is fixedly connected to the top of the intake pipe 2, the outer wall of the connector 604 is provided with a second clamping groove 605, and the boost mechanism 6 also includes a connecting sleeve 601; The outer wall of the connecting sleeve 601 is provided with a snap-in groove 602, the inner wall of the exhaust groove 603 is provided with an exhaust groove 603, the inner wall of the connecting sleeve 601 is provided with a sliding groove 606, the groove wall of the sliding groove 606 is slidably connected with the outer wall of the locking block 607, a spring 608 is arranged inside the sliding groove 606, one end of the spring 608 is fixedly connected with the groove wall of the sliding groove 606, and the other end is fixedly connected with the outer wall of the locking block 607; There are three groups of locking blocks 607 and springs 608, and the three groups of locking blocks 607 and springs 608 are equidistantly arranged on the inner wall of the connecting sleeve 601 with the center line of the connecting sleeve 601 as the rotation axis. The locking blocks 607 are squeezed out of the inner wall of the connecting sleeve 601 by the springs 608, and the outer wall of the locking blocks 607 is clamped with the wall of the clamping groove 605, so that the connecting sleeve 601 can be clamped with the wall of the clamping groove 605 by squeezing the locking blocks 607 by the springs 608, so that the connecting sleeve 601 and the connector 604 are fixed by clamping.

[0024] The working principle of this embodiment is as follows: the synthetic gas is discharged from the outlet of the air inlet pipe 2, is pressurized through the connector 604, and then enters the connecting sleeve 601, and is then discharged to the separation mechanism 7 through the exhaust groove 603 opened on the inner wall of the connecting sleeve 601, so that the synthetic tail gas quickly passes through the separation mechanism 7, driving the separation mechanism 7 to rotate, and the condensed liquid is separated and collected.

[0025] For example 3, please refer to Figure 7-Figure 9 The present invention provides a technical solution: the separation mechanism 7 includes a centrifugal cylinder 701, the outer wall of the centrifugal cylinder 701 is rotatably connected to the inner wall of the heat conducting plate 403 through a bearing, the outer wall of the centrifugal cylinder 701 is provided with a lead-out hole 702, the inner wall of the centrifugal cylinder 701 is provided with a guide groove 703, the inner wall of the centrifugal cylinder 701 is rotatably connected to the outer wall of the connecting sleeve 601 through a bearing, so that the centrifugal cylinder 701 is driven by the discharge of synthetic gas to rotate along the inner wall of the heat conducting plate 403 and the outer wall of the guide groove 703, and the condensed liquid is separated from the synthetic gas by a centrifugal method; The inner wall of the centrifugal cylinder 701 is provided with a second sliding groove 704, the groove wall of the second sliding groove 704 is slidably connected to the outer wall of the second locking block 705, and a second spring 706 is arranged inside the second sliding groove 704, one end of the second spring 706 is fixedly connected to the inner wall of the second sliding groove 704, and the other end is fixedly connected to the outer wall of the second locking block 705; The number of the second locking block 705 and the second spring 706 is three groups, and the three groups of second locking blocks 705 and second springs 706 are arranged equidistantly on the inner wall of the centrifugal cylinder 701 with the center line of the centrifugal cylinder 701 as the rotation axis. The second locking block 705 is squeezed by the second spring 706 to protrude from the inner wall of the centrifugal cylinder 701, and the second locking block 705 is clamped with the wall of the clamping groove 1 602; There are three groups of guide grooves 703. The three groups of guide grooves 703 are equidistantly arranged on the inner wall of the centrifugal barrel 701 with the center line of the centrifugal barrel 701 as the rotation axis. The outlet hole 702 penetrates the outer wall of the centrifugal barrel 701 and is connected with the inner wall of the guide groove 703. The guide groove 703 is a spiral groove, so that when the synthetic gas passes through the centrifugal barrel 701, the centrifugal barrel 701 is driven to rotate, and the condensed liquid is concentrated to the inner wall of the guide groove 703 through the centrifugal force generated when the centrifugal barrel 701 rotates, and the condensed liquid is discharged into the cooling mechanism 4 through the outlet hole 702 to guide the liquid and then recover it. When the centrifugal barrel 701 rotates, the cooling mechanism 4 cools the inside of the centrifugal barrel 701, and at the same time, the centrifugal barrel 701 rotates to pre-cool the synthetic gas inside the intake pipe 2, so as to facilitate the condensation treatment of the synthetic gas after it is discharged from the intake pipe 2.

[0026] The working principle of this embodiment is as follows: the synthetic tail gas enters the centrifugal barrel 701 through the connecting sleeve 601, and is driven to rotate on the inner wall of the heat conductive plate 403 through the guide groove 703 provided on the inner wall of the centrifugal barrel 701. The centrifugal barrel 701 condenses the synthetic tail gas through the heat conductive plate 403. At the same time, the centrifugal force generated by the condensed liquid through the centrifugal barrel 701 is concentrated on the groove wall of the guide groove 703, and is discharged through the outlet hole 702, enters the cooling mechanism 4 to guide the liquid for recovery, and at the same time, the centrifugal barrel 701 rotates to pre-cool the synthetic gas inside the intake pipe 2, so as to facilitate the condensation treatment of the synthetic gas after being discharged from the intake pipe 2, and the synthetic gas discharged from the intake pipe 2 rotates along the inner wall of the heat conductive plate 403 through the centrifugal barrel 701, so as to evenly dissipate the heat of the synthetic gas and improve the condensation efficiency.

[0027] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A trichlorosilane synthesis tail gas recovery device, comprising a recovery bin (1), wherein the outer wall of the recovery bin (1) is fixedly connected to an exhaust pipe (3) close to one end of the recovery bin (1), the bottom of the recovery bin (1) is fixedly connected to the outer wall of an intake pipe (2) via a flange, and the outer wall of the intake pipe (2) is provided with a pressurizing mechanism (6), characterized in that: Also includes: A cooling mechanism (4), the cooling mechanism (4) being arranged on the inner wall of the recovery bin (1), the cooling mechanism (4) comprising a cooling bin (401), the outer wall of the cooling bin (401) being fixedly connected to the inner wall of the recovery bin (1) via connecting ribs, the top of the cooling bin (401) being fixedly connected to the outer wall of the water inlet pipe (5) via a flange, the bottom of the cooling bin (401) being fixedly connected to an end of the drain pipe (402) close to the cooling bin (401), and the bottom of the cooling bin (401) being fixedly connected to the filter bin (405). The top is fixedly connected, the bottom of the filter bin (405) is fixedly connected to an end of the collection pipe (406) close to the filter bin (405), the inner wall of the cooling bin (401) is fixedly connected to the outer wall of the heat conducting plate (403), the outer wall of the heat conducting plate (403) is fixedly connected to the outer wall of the baffle (404), the inner wall of the heat conducting plate (403) is provided with a separation mechanism (7), and the cooling mechanism (4) further comprises a precipitation plate (407), the inner wall of the precipitation plate (407) is fixedly connected to the outer wall of the intake pipe (2).

2. A trichlorosilane synthesis tail gas recovery device according to claim 1, characterized in that: The boost mechanism (6) comprises a connecting head (604), the bottom of the connecting head (604) is fixedly connected to the top of the air intake pipe (2), the outer wall of the connecting head (604) is provided with a second clamping groove (605), and the boost mechanism (6) further comprises a connecting sleeve (601).

3. A trichlorosilane synthesis tail gas recovery device according to claim 2, characterized in that: The outer wall of the connecting sleeve (601) is provided with a snap-in groove 1 (602), the inner wall of the exhaust groove (603) is provided with an exhaust groove (603), the inner wall of the connecting sleeve (601) is provided with a sliding groove 1 (606), the groove wall of the sliding groove 1 (606) is slidably connected to the outer wall of the locking block 1 (607), a spring 1 (608) is arranged inside the sliding groove 1 (606), one end of the spring 1 (608) is fixedly connected to the groove wall of the sliding groove 1 (606), and the other end is fixedly connected to the outer wall of the locking block 1 (607).

4. A trichlorosilane synthesis tail gas recovery device according to claim 3, characterized in that: The number of the locking block 1 (607) and the spring 1 (608) is three groups, and the three groups of the locking block 1 (607) and the spring 1 (608) are equidistantly arranged on the inner wall of the connecting sleeve (601) with the center line of the connecting sleeve (601) as the rotation axis. The locking block 1 (607) is squeezed and protrudes from the inner wall of the connecting sleeve (601) by the spring 1 (608), and the outer wall of the locking block 1 (607) is clamped with the groove wall of the clamping groove 2 (605).

5. A trichlorosilane synthesis tail gas recovery device according to claim 1, characterized in that: The separation mechanism (7) comprises a centrifugal cylinder (701), the outer wall of the centrifugal cylinder (701) being rotatably connected to the inner wall of the heat conducting plate (403) via a bearing, the outer wall of the centrifugal cylinder (701) being provided with a lead-out hole (702), and the inner wall of the centrifugal cylinder (701) being provided with a guide groove (703).

6. A trichlorosilane synthesis tail gas recovery device according to claim 5, characterized in that: The inner wall of the centrifugal cylinder (701) is provided with a second sliding groove (704), the groove wall of the second sliding groove (704) is slidably connected to the outer wall of the second locking block (705), and a second spring (706) is arranged inside the second sliding groove (704), one end of the second spring (706) is fixedly connected to the inner wall of the second sliding groove (704), and the other end is fixedly connected to the outer wall of the second locking block (705).

7. A trichlorosilane synthesis tail gas recovery device according to claim 6, characterized in that: The number of the second locking block (705) and the second spring (706) is three groups, and the three groups of the second locking block (705) and the second spring (706) are arranged in an equidistant array on the inner wall of the centrifugal cylinder (701) with the center line of the centrifugal cylinder (701) as the rotation axis. The second locking block (705) is squeezed by the second spring (706) to protrude from the inner wall of the centrifugal cylinder (701), and the second locking block (705) is clamped with the wall of the clamping groove (602).

8. The trichlorosilane synthesis tail gas recovery device according to claim 5, characterized in that: The guide grooves (703) are provided in three groups, and the three groups of guide grooves (703) are equidistantly arranged on the inner wall of the centrifugal cylinder (701) with the center line of the centrifugal cylinder (701) as the rotation axis. The outlet holes (702) penetrate the outer wall of the centrifugal cylinder (701) and communicate with the inner walls of the guide grooves (703).

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