Preparation method of flexible pressure sensor and flexible pressure sensor

Abstract

The invention discloses a preparation method of a flexible pressure sensor and the flexible pressure sensor, and the preparation method of the flexible pressure sensor comprises the steps: introducing an anthracene-containing polymer on a flexible substrate as a surface layer, irradiating the surface layer through ultraviolet light with a preset wavelength to generate a surface wrinkle pattern on the surface layer, and obtaining a wrinkle template; weighing a polydimethylsiloxane monomer, a conductive material and a curing agent; stirring the polydimethylsiloxane monomer, the conductive material, a preset organic solution and a curing agent to obtain a target mixed solution; spin-coating a target mixed solution on the fold template, and curing the target mixed solution on the fold template; putting the cured wrinkled template into a dioxane solution for stripping to obtain a conductive thin film; and manufacturing the flexible pressure sensor according to the conductive film, or manufacturing the flexible pressure sensor according to the wrinkled template. According to the embodiment of the invention, by preparing the wrinkle microstructure in the flexible sensor, the measurement range can be increased while the sensitivity of the device is improved.

Description

Technical Field

[0001] The present application belongs to the field of sensor manufacturing technology, and in particular, relates to a method for preparing a flexible pressure sensor and a flexible pressure sensor. Background Art

[0002] In recent years, wearable flexible pressure sensors have become an important research direction of electronic skin, and they have great application prospects in human perception and human physiological signal monitoring. For intelligent robots, people hope that they can automatically perceive information such as pressure in the surrounding environment and make corresponding analysis and operations based on the information obtained. These perception functions are the most important way to realize the intelligence of robots, which are mainly achieved through pressure sensors. However, traditional pressure sensors are mostly rigid and cannot be stretched and bent arbitrarily, which limits their application in robot electronic skin. For example, as the skin of the robot joints, it is easy to lose its sensing function and sensitivity when stretched and bent, so the pressure sensor is required to have a certain flexibility and a high sensitivity and detection range. Summary of the invention

[0003] The present application aims to solve at least one of the technical problems existing in the prior art and provide a method for preparing a flexible pressure sensor and a flexible pressure sensor. The embodiment of the present application can increase the sensitivity of the device and increase the measurement range at the same time by preparing a wrinkled microstructure in the flexible sensor.

[0004] In a first aspect, an embodiment of the present application provides a method for preparing a flexible pressure sensor, the method comprising:

[0005] An anthracene-containing polymer is introduced as a surface layer on a flexible substrate, and ultraviolet light of a preset wavelength is irradiated on the surface layer to generate a surface wrinkle pattern on the surface layer, thereby obtaining a wrinkle template;

[0006] Weighing a first preset gram of polydimethylsiloxane monomer, a second preset gram of conductive material, and a third preset gram of curing agent;

[0007] Stirring the polydimethylsiloxane monomer, the conductive material, the preset organic solution and the curing agent to obtain a target mixed solution;

[0008] Spin coating the target mixed solution on the corrugated template, and solidifying the target mixed solution on the corrugated template;

[0009] The solidified wrinkle template is placed in a dioxane solution for peeling to obtain a conductive film;

[0010] A flexible pressure sensor is manufactured based on the conductive film, or a flexible pressure sensor is manufactured based on the wrinkled template.

[0011] According to some embodiments of the present application, the flexible substrate is manufactured by the following steps:

[0012] The preset glass slides were cleaned with ethyl acetate, water and ethanol;

[0013] Evenly apply polyvinyl alcohol demoulding water on the cleaned glass sheet, and wait for a first preset time to form a polyvinyl alcohol water-soluble film on the cleaned glass sheet;

[0014] Stirring the polydimethylsiloxane, and vacuum-treating the polydimethylsiloxane after the stirring operation by a vacuum pump to obtain a target solution;

[0015] The target solution is covered on the polyvinyl alcohol water-soluble film, and the target solution is scraped by a preset wet film preparation device to obtain a flexible substrate.

[0016] According to some embodiments of the present application, the step of covering the target solution on the polyvinyl alcohol water-soluble film and performing a scraping operation on the target solution through a preset wet film preparation device to obtain a flexible substrate includes:

[0017] Covering the target solution onto the polyvinyl alcohol water-soluble film, and performing a scraping operation on the target solution through a preset wet film preparation device to form a polydimethylsiloxane film on different surfaces of the glass sheet to obtain a thin film glass sheet;

[0018] After a second preset time, the film glass sheet is placed in water for demoulding to obtain a polydimethylsiloxane film, and the polydimethylsiloxane film is used as a flexible substrate.

[0019] According to some embodiments of the present application, the anthracene-containing polymer includes a side chain anthracene-containing copolymer; the anthracene-containing polymer is introduced as a surface layer on a flexible substrate, and the surface layer is irradiated with ultraviolet light of a preset wavelength to generate a surface wrinkle pattern on the surface layer to obtain a wrinkle template, comprising:

[0020] introducing the side chain anthracene-containing copolymer as a surface layer on a flexible substrate;

[0021] Mixing the side chain anthracene-containing copolymer with a preset toluene solution to obtain a mixed solution;

[0022] heating and dissolving the mixed solution, and attaching the polydimethylsiloxane film to a sample glass sheet;

[0023] Taking a first mixed solution of a preset concentration, and applying the first mixed solution on the attached sample glass sheet at a first preset rotation speed to obtain a target sample;

[0024] The target sample is irradiated with ultraviolet light of a preset wavelength and heated at a first preset temperature to obtain a wrinkle template.

[0025] According to some embodiments of the present application, the polydimethylsiloxane monomer, the conductive material, the preset organic solution and the curing agent are stirred to obtain a target mixed solution, including:

[0026] Putting the polydimethylsiloxane monomer, the conductive material and a preset organic solution into a preset glass sample bottle for stirring, and heating the organic solution in a water bath to obtain a first mixture;

[0027] Putting the curing agent into the glass sample bottle to stir the curing agent and the first mixture to obtain a second mixture;

[0028] The second mixture is placed in a vacuum environment for a third preset time to obtain a target mixed solution.

[0029] According to some embodiments of the present application, spin coating the target mixed solution on the corrugated template and solidifying the target mixed solution on the corrugated template includes:

[0030] The target mixed liquid is applied to the pleated template at a second preset rotation speed, and the target mixed liquid is cured at a second preset temperature for a fourth preset time.

[0031] According to some embodiments of the present application, the method of manufacturing a flexible pressure sensor according to the conductive film includes:

[0032] An electrode substrate, an upper substrate and a lower substrate are manufactured based on the polyester film and the interdigital electrodes, and the conductive film is used as a middle substrate;

[0033] Disposing preset thin wires at both ends of the interdigital electrodes, and fixing the thin wires by conductive silver glue;

[0034] The electrode substrate, the upper substrate, the middle substrate and the lower substrate are packaged to obtain a flexible pressure sensor.

[0035] According to some embodiments of the present application, the method of manufacturing a flexible pressure sensor according to the wrinkled template includes:

[0036] Obtaining a first electrode and a second electrode with screen-printed conductive silver paste, and generating a pressure-sensitive material with a wrinkled microstructure according to the wrinkled template, wherein the pressure-sensitive material includes a first surface and a second surface;

[0037] attaching the first electrode to the first surface of the pressure-sensitive material, and attaching the second electrode to the second surface of the pressure-sensitive material;

[0038] The first electrode, the pressure sensitive material and the second electrode are packaged to obtain a flexible pressure sensor.

[0039] According to some embodiments of the present application, the electrode substrate, the upper substrate and the lower substrate are manufactured based on the polyester film and the interdigital electrodes, including:

[0040] preheating the polyester film at a third preset temperature;

[0041] Printing silver electrodes on the preheated polyester film to obtain an electrode substrate;

[0042] The polyester film is used as an upper substrate, and the polyester film with interdigital electrodes is used as a lower substrate.

[0043] In a second aspect, an embodiment of the present application provides a flexible pressure sensor, which is prepared by the method for preparing a flexible pressure sensor as described in the first aspect.

[0044] The method for preparing a flexible pressure sensor and the flexible pressure sensor provided in the embodiments of the present application have at least the following beneficial effects: first, an anthracene-containing polymer is introduced as a surface layer on a flexible substrate, and the surface layer is irradiated with ultraviolet light of a preset wavelength to generate a surface wrinkle pattern on the surface layer to obtain a wrinkle template, thereby realizing the preparation of a wrinkle microstructure template, and being able to produce a double-layer wrinkle template with a significant height. The embodiment of the present application also weighs a first preset gram of polydimethylsiloxane monomer, a second preset gram of conductive material, and a third preset gram of curing agent, and then stirs the polydimethylsiloxane monomer, the conductive material, the preset organic solution, and the curing agent to obtain a target mixed solution, thereby obtaining a conductive material after heating and curing. After that, the target mixed solution is spin-coated on the pleated template to ensure the fluidity of the target mixed solution so that it can fill the pleated template, and the target mixed solution is cured on the pleated template, and the cured pleated template is placed in a dioxane solution for peeling to obtain a conductive film, thereby obtaining a conductive film with a pleated microstructure on the surface, so that the conductive film has good ductility and variability, and finally a flexible pressure sensor is made according to the conductive film, or a flexible pressure sensor is made according to the pleated template, so that the flexible pressure sensor has high linearity while maintaining high sensitivity, and can increase the measurement range while improving the sensitivity of the flexible pressure sensor. The embodiment of the present application can increase the measurement range while improving the sensitivity of the device by preparing the pleated microstructure in the flexible sensor.

[0045] Other features and advantages of the present application will be described in the following description, and partly become apparent from the description, or understood by practicing the present application. The purpose and other advantages of the present application can be realized and obtained through the structures particularly pointed out in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] The accompanying drawings are used to provide further understanding of the technical solution of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the technical solution of the present application and do not constitute a limitation on the technical solution of the present application.

[0047] Figure 1 A specific flow chart of a method for preparing a flexible pressure sensor provided in one embodiment of the present application;

[0048] Figure 2 A specific flow chart for manufacturing a flexible substrate provided in one embodiment of the present application;

[0049] Figure 3 A specific flow chart of covering a target solution onto a polyvinyl alcohol water-soluble film and performing a scraping operation on the target solution through a preset wet film preparation device provided in an embodiment of the present application;

[0050] Figure 4 A specific flow chart of introducing an anthracene-containing polymer as a surface layer on a flexible substrate and irradiating the surface layer with ultraviolet light of a preset wavelength to generate a surface wrinkle pattern on the surface layer provided in an embodiment of the present application;

[0051] Figure 5 A specific flow chart of stirring polydimethylsiloxane monomer, conductive material, a preset organic solution and a curing agent provided in an embodiment of the present application;

[0052] Figure 6 A specific flow chart of spin coating a target mixed liquid on a corrugated template and solidifying the target mixed liquid on the corrugated template provided in one embodiment of the present application;

[0053] Figure 7 A specific flow chart of manufacturing a flexible pressure sensor based on a conductive film according to an embodiment of the present application;

[0054] Figure 8 A specific flow chart of manufacturing a flexible pressure sensor according to a wrinkle template provided in one embodiment of the present application;

[0055] Fig. 9 A specific flow chart for manufacturing an electrode substrate, an upper substrate and a lower substrate based on a polyester film and interdigital electrodes provided in one embodiment of the present application;

[0056] Fig.10The overall framework diagram of the method for preparing the flexible pressure sensor provided in this example;

[0057] Fig.11 Schematic representation of the synthetic route to P(An-BA) provided for this example. DETAILED DESCRIPTION

[0058] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0059] It should be noted that although a logical order is shown in the flowchart, in some cases, the steps shown or described may be performed in a different order than that in the flowchart. The terms "first", "second", etc. in the specification, claims and the above drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0060] In recent years, wearable flexible pressure sensors have become an important research direction of electronic skin, and they have great application prospects in human perception and human physiological signal monitoring. For intelligent robots, people hope that they can automatically perceive information such as pressure in the surrounding environment and make corresponding analysis and operations based on the information obtained. These perception functions are the most important way to realize the intelligence of robots, which are mainly achieved through pressure sensors. However, traditional pressure sensors are mostly rigid and cannot be stretched and bent arbitrarily, which limits their application in robot electronic skin. For example, as the skin of the robot joints, it is easy to lose its sensing function and sensitivity when stretched and bent, so the pressure sensor is required to have a certain flexibility and a high sensitivity and detection range.

[0061] In order to solve the above problems, the present embodiment provides a method for preparing a flexible pressure sensor and a flexible pressure sensor. First, an anthracene-containing polymer is introduced as a surface layer on a flexible substrate, and the surface layer is irradiated with ultraviolet light of a preset wavelength to generate a surface wrinkle pattern on the surface layer to obtain a wrinkle template, thereby realizing the preparation of the wrinkle microstructure template, and being able to produce a double-layer wrinkle template with obvious height. The embodiment of the present application also weighs a first preset gram of polydimethylsiloxane monomer, a second preset gram of conductive material, and a third preset gram of curing agent, and then stirs the polydimethylsiloxane monomer, the conductive material, the preset organic solution, and the curing agent to obtain a target mixed solution, thereby obtaining a conductive material after heating and curing. After that, the target mixed solution is spin-coated on the pleated template to ensure the fluidity of the target mixed solution so that it can fill the pleated template, and the target mixed solution is cured on the pleated template, and the cured pleated template is placed in a dioxane solution for peeling to obtain a conductive film, thereby obtaining a conductive film with a pleated microstructure on the surface, so that the conductive film has good ductility and variability, and finally a flexible pressure sensor is made according to the conductive film, or a flexible pressure sensor is made according to the pleated template, so that the flexible pressure sensor has high linearity while maintaining high sensitivity, and can increase the measurement range while improving the sensitivity of the flexible pressure sensor. The embodiment of the present application can increase the measurement range while improving the sensitivity of the device by preparing the pleated microstructure in the flexible sensor.

[0062] The embodiments of the present application are further described below in conjunction with the accompanying drawings.

[0063] Reference Figure 1 , Figure 1 This is a specific flow chart of a method for preparing a flexible pressure sensor provided in this embodiment. The method for preparing the flexible pressure sensor includes but is not limited to steps S101 to S106.

[0064] Step S101: introducing an anthracene-containing polymer as a surface layer on a flexible substrate, and irradiating the surface layer with ultraviolet light of a preset wavelength to generate a surface wrinkle pattern on the surface layer, thereby obtaining a wrinkle template.

[0065] In step S101 of some embodiments, an anthracene-containing polymer is introduced as a surface layer on a flexible substrate, and the surface layer is irradiated with ultraviolet light of a preset wavelength, so that the dynamic reaction of anthracene dimerization can be regulated by ultraviolet light to generate a surface wrinkle pattern on the surface layer and obtain a wrinkle template, thereby realizing the preparation of a wrinkle microstructure template and being able to produce a double-layer wrinkle template with a significant height.

[0066] It should be noted that the preset wavelength in the embodiment of the present application can be set according to the needs of the user. Specifically, the preset wavelength in the embodiment of the present application is 365nm.

[0067] Step S102: weighing a first preset gram of polydimethylsiloxane monomer, a second preset gram of conductive material, and a third preset gram of curing agent.

[0068] In step S102 of some embodiments, a first preset gram of polydimethylsiloxane monomer, a second preset gram of conductive material, and a third preset gram of curing agent are weighed to facilitate subsequent preparation of the flexible conductive film.

[0069] It should be noted that the conductive materials in the embodiments of the present application include but are not limited to carbon nanotubes, graphene, silver nanowires, etc. The first preset gram weight, the second preset gram weight, and the third preset gram weight in the embodiments of the present application can be set according to the needs of the user. Specifically, the first preset gram weight in the embodiments of the present application is 0.48g, the second preset gram weight is 2.3g, and the third preset gram weight is 0.23g. The embodiments of the present application are not specifically limited.

[0070] Step S103: stirring the polydimethylsiloxane monomer, the conductive material, the preset organic solution and the curing agent to obtain a target mixed solution.

[0071] Step S104: spin-coating the target mixed liquid on the corrugated template, and solidifying the target mixed liquid on the corrugated template.

[0072] Step S105: placing the solidified wrinkle template into a dioxane solution for peeling to obtain a conductive film.

[0073] Step S106: manufacturing a flexible pressure sensor based on the conductive film, or manufacturing a flexible pressure sensor based on the wrinkled template.

[0074] In steps S103 to S106 of some embodiments, polydimethylsiloxane monomer, conductive material, preset organic solution and curing agent are stirred to obtain a target mixed solution, which is convenient for the subsequent preparation of a conductive film. After that, the target mixed solution is spin-coated on the pleated template, and the target mixed solution is cured on the pleated template, thereby improving the curing effect, allowing small molecules generated during the curing process to diffuse out, and improving the curing efficiency. The cured pleated template is then placed in a dioxane solution for peeling to obtain a conductive film. Finally, a flexible pressure sensor is made based on the conductive film, or a flexible pressure sensor is made based on the pleated template. The prepared flexible pressure sensor uses a pleated microstructure to increase the sensitivity of the device while increasing the measurement range.

[0075] Reference Figure 2 , Figure 2 This is a specific flow chart for manufacturing a flexible substrate provided in one embodiment of the present application, and the method includes but is not limited to steps S201 to S204.

[0076] Step S201: cleaning a preset glass sheet with ethyl acetate, water and ethanol.

[0077] Step S202: evenly apply polyvinyl alcohol demoulding water on the cleaned glass sheet, and wait for a first preset time to form a polyvinyl alcohol water-soluble film on the cleaned glass sheet.

[0078] Step S203: stirring the polydimethylsiloxane, and performing vacuum treatment on the polydimethylsiloxane after the stirring operation by a vacuum pump to obtain a target solution.

[0079] Step S204: Cover the target solution onto the polyvinyl alcohol water-soluble film, and perform a scraping operation on the target solution through a preset wet film preparation device to obtain a flexible substrate.

[0080] In steps S201 to S204 of some embodiments, during the process of making the flexible substrate, the embodiments of the present application first clean the preset glass sheet with ethyl acetate, water and ethanol to remove grease, dust and other impurities on the surface of the glass sheet, ensure that the subsequent polyvinyl alcohol (PVA) demolding water can be evenly applied and cured, and provide a clean surface for the uniform spreading and curing of PDMS (Polydimethylsiloxane). Then, polyvinyl alcohol demoulding water is evenly applied to the cleaned glass sheet, and the first preset time is waited for the polyvinyl alcohol water-soluble film to be cured to form a polyvinyl alcohol water-soluble film on the cleaned glass sheet, so as to facilitate the subsequent removal from the formed PDMS, improve production efficiency and improve product quality, and then stir the polydimethylsiloxane, and vacuum-treat the polydimethylsiloxane after the stirring operation by a vacuum pump. Specifically, the polydimethylsiloxane is first fully stirred, and then vacuum-treated with a vacuum pump for at least 30 minutes until the bubbles completely disappear to obtain the target solution, thereby removing the bubbles in the PDMS colloid, preventing the solidified PDMS substrate from having cavities or defects, and ensuring the uniformity and integrity of the PDMS film. Then, the target solution is covered on the polyvinyl alcohol water-soluble film, and the target solution is scraped by a preset wet film preparation device, so that the target solution is spread on the glass sheet to obtain a flexible substrate, and the preparation of the PDMS film is realized.

[0081] It should be noted that the first preset time length in the embodiment of the present application can be set according to the needs of the user. Specifically, the first preset time length in the embodiment of the present application is twenty-four hours.

[0082] Reference Figure 3 , Figure 3A specific flow chart of covering a target solution onto a polyvinyl alcohol water-soluble film and performing a scraping operation on the target solution through a preset wet film preparation device is provided for an embodiment of the present application, and the method includes but is not limited to steps S301 to S302.

[0083] Step S301: Covering the target solution onto the polyvinyl alcohol water-soluble film, and performing a scraping operation on the target solution through a preset wet film preparation device to form a polydimethylsiloxane film on different surfaces of the glass sheet to obtain a thin film glass sheet.

[0084] Step S302: After a second preset time, the thin film glass sheet is placed in water for demoulding to obtain a polydimethylsiloxane film, and the polydimethylsiloxane film is used as a flexible substrate.

[0085] In steps S301 to S302 of some embodiments, in the process of covering the target solution on the polyvinyl alcohol water-soluble film and scraping the target solution through a preset wet film preparation device, the embodiment of the present application first covers the target solution on the polyvinyl alcohol water-soluble film, and scrapes the target solution through a preset wet film preparation device to form a polydimethylsiloxane film on different surfaces of the glass sheet, wherein the thickness of the polydimethylsiloxane film scraped from different surfaces is also different, to obtain a thin film glass sheet, after a second preset time, that is, after waiting for the polydimethylsiloxane film to be cured, the thin film glass sheet is placed in water for demolding, and the water-soluble characteristics of the PVA water-soluble film are utilized to easily separate the polydimethylsiloxane film from the glass sheet, thereby completing the demolding process, obtaining the polydimethylsiloxane film, and using the polydimethylsiloxane film as a flexible substrate, thereby ensuring the completeness and flexibility of the flexible substrate, and improving production efficiency and product quality.

[0086] It should be noted that the second preset time length in the embodiment of the present application can be set according to the needs of the user. Specifically, the second preset time length in the embodiment of the present application is twenty-four hours.

[0087] Reference Figure 4 , Figure 4 A specific flow chart for introducing an anthracene-containing polymer as a surface layer on a flexible substrate and irradiating the surface layer with ultraviolet light of a preset wavelength to generate a surface wrinkle pattern on the surface layer is provided for one embodiment of the present application. The method includes but is not limited to steps S401 to S405.

[0088] It should be noted that the anthracene-containing polymer includes a side chain anthracene-containing copolymer. The specific process of synthesizing the side chain anthracene-containing copolymer will be described below and will not be repeated in the embodiments of the present application.

[0089] Step S401: introducing a side chain anthracene-containing copolymer as a surface layer on a flexible substrate.

[0090] Step S402: mixing the side chain anthracene-containing copolymer and a preset toluene solution to obtain a mixed solution.

[0091] Step S403: heating the mixed solution to dissolve it, and attaching the polydimethylsiloxane film to the sample glass sheet.

[0092] Step S404: taking a first mixed solution of a preset concentration, and applying the first mixed solution on the attached sample glass sheet at a first preset rotation speed to obtain a target sample.

[0093] Step S405: irradiating the target sample with ultraviolet light of a preset wavelength and heating the target sample at a first preset temperature to obtain a wrinkle template.

[0094] In some embodiments, in steps S401 to S405, an anthracene-containing polymer is introduced as a surface layer on a flexible substrate, and the surface layer is irradiated with ultraviolet light of a preset wavelength to generate a surface wrinkle pattern on the surface layer. First, a photoresponsive anthracene-containing polymer is introduced as a surface layer on the flexible substrate, specifically, a side chain anthracene-containing copolymer is used as the surface layer, and then the side chain anthracene-containing copolymer and a preset toluene solution are mixed to obtain a mixed solution, the mixed solution is heated and dissolved so that the side chain anthracene-containing copolymer and the toluene solution are fully mixed to increase the dissolution rate, and a polydimethylsiloxane film is attached to a sample glass sheet, and after the polydimethylsiloxane film is cooled on the sample glass sheet, a first mixed solution of a preset concentration is taken, and the first mixed solution is applied to the attached sample glass sheet at a first preset speed to obtain a target sample, and then the target sample is irradiated with ultraviolet light of a preset wavelength in a nitrogen environment to improve the reaction efficiency and promote the photosensitive chemical reaction, and the target sample is heated at a first preset temperature, so as to further stabilize the structure of the PDMS and obtain a wrinkle template.

[0095] It should be noted that before irradiating the target sample with ultraviolet light of a preset wavelength, the embodiment of the present application will also place the target sample in an oven and bake it at 80 degrees Celsius for 30 minutes to remove residual solvent. Baking can effectively remove residual solvent in the sample, improve the purity of the product, and ensure the stability and safety of the product.

[0096] It can be understood that the preset concentration and preset wavelength in the embodiment of the present application can be set according to the needs of the user. Specifically, the preset concentration in the embodiment of the present application is 0.8 mg / μL, and the preset wavelength is 365 nm.

[0097] Reference Figure 5 , Figure 5 A specific flow chart of stirring polydimethylsiloxane monomer, conductive material, a preset organic solution and a curing agent provided in an embodiment of the present application, wherein the method includes but is not limited to steps S501 to S503.

[0098] Step S501: putting polydimethylsiloxane monomer, conductive material and a preset organic solution into a preset glass sample bottle for stirring, and heating the organic solution in a water bath to obtain a first mixture.

[0099] Step S502: Put a curing agent into a glass sample bottle to stir the curing agent and the first mixture to obtain a second mixture.

[0100] Step S503: placing the second mixture in a vacuum environment for a third preset time to obtain a target mixed solution.

[0101] In steps S501 to S503 of some embodiments, during the process of stirring the polydimethylsiloxane monomer, the conductive material, the preset organic solution and the curing agent, the polydimethylsiloxane monomer, the conductive material and the preset organic solution are first put into a preset glass sample bottle for stirring. Specifically, the polydimethylsiloxane monomer, the conductive material and the preset organic solution are first put into a preset glass sample bottle for ultrasonic treatment, and then magnetically stirred or mechanically stirred for one hour to disperse the polydimethylsiloxane monomer and the conductive material in the cyclohexane solution, and the organic solution is heated in a water bath to volatilize the organic solution to obtain a first mixture, and then the curing agent is put into the glass sample bottle to stir the curing agent and the first mixture to obtain a second mixture, and then the second mixture is placed in a vacuum environment for a third preset time to remove bubbles in the second mixture to obtain a target mixed solution, which is convenient for the subsequent preparation of the conductive film.

[0102] It should be noted that the conductive materials in the embodiment of the present application include but are not limited to carbon nanotubes, graphene, silver nanowires, etc., and the organic solution includes but is not limited to tetrahydrofuran, n-hexane, cyclohexane, etc. The third preset time length can be set according to the needs of the user. The third preset time length in the embodiment of the present application is thirty minutes.

[0103] Reference Figure 6 , Figure 6 A specific flow chart of spin coating a target mixed liquid on a corrugated template and solidifying the target mixed liquid on the corrugated template is provided in one embodiment of the present application. The method includes but is not limited to step S601.

[0104] Step S601: applying the target mixed liquid onto the pleat template at a second preset rotation speed, and curing the target mixed liquid at a second preset temperature for a fourth preset time.

[0105] In step S601 of some embodiments, the embodiments of the present application apply the target mixed liquid on the pleat template at a second preset rotation speed, and cure the target mixed liquid at a second preset temperature for a fourth preset time, thereby improving the curing effect, allowing the small molecules generated during the curing process to diffuse out, and improving the curing efficiency.

[0106] It can be understood that the second preset speed in the embodiment of the present application is 1000 rpm, and the fourth preset time can be set according to the needs of the user, and the embodiment of the present application does not make specific limitations.

[0107] Reference Figure 7 , Figure 7 This is a specific flow chart of manufacturing a flexible pressure sensor based on a conductive film according to an embodiment of the present application. The method includes but is not limited to steps S701 to S703.

[0108] Step S701: manufacturing an electrode substrate, an upper substrate and a lower substrate based on a polyester film and interdigital electrodes, and using a conductive film as a middle substrate.

[0109] Step S702: setting preset thin wires at both ends of the interdigital electrodes and fixing the thin wires with conductive silver glue.

[0110] Step S703: packaging the electrode substrate, the upper substrate, the middle substrate and the lower substrate to obtain a flexible pressure sensor.

[0111] In steps S701 to S703 of some embodiments, in the process of manufacturing a flexible pressure sensor based on a conductive film, an electrode substrate, an upper substrate and a lower substrate are first manufactured based on a polyester film and interdigitated electrodes, and the conductive film is used as a middle substrate so that the surface of the interdigitated electrodes contacts the wrinkled microstructure of the conductive film, and then preset thin wires are set at both ends of the interdigitated electrodes, and then a layer of conductive silver glue is coated to fix the wires. Finally, the electrode substrate, the upper substrate, the middle substrate and the lower substrate are packaged to obtain a flexible pressure sensor, thereby ensuring the sealing and protection of the flexible pressure sensor, ensuring the stability and durability of the sensor in various environments, and the packaging process can prevent external substances such as moisture and dust from interfering with the sensor, thereby improving the reliability and service life of the sensor.

[0112] Reference Figure 8 , Figure 8 A specific flow chart for manufacturing a flexible pressure sensor based on a pleated template is provided for one embodiment of the present application, and the method includes but is not limited to steps S801 to S803.

[0113] Step S801: obtaining a first electrode and a second electrode with screen-printed conductive silver paste, and generating a pressure-sensitive material with a wrinkled microstructure according to a wrinkle template, wherein the pressure-sensitive material includes a first surface and a second surface.

[0114] Step S802: attaching a first electrode to a first surface of the pressure-sensitive material, and attaching a second electrode to a second surface of the pressure-sensitive material.

[0115] Step S803: encapsulating the first electrode, the pressure sensitive material and the second electrode to obtain a flexible pressure sensor.

[0116] In steps S801 to S803 of some embodiments, in the process of manufacturing a flexible pressure sensor according to the corrugated template, the embodiments of the present application first obtain a first electrode and a second electrode with screen-printed conductive silver paste, and generate a pressure-sensitive material with a corrugated microstructure according to the corrugated template. Thereafter, the first electrode is attached to the first side of the pressure-sensitive material, and the second electrode is attached to the second side of the pressure-sensitive material, so that electrodes are attached to both the front and back sides of the pressure-sensitive material. Finally, the first electrode, the pressure-sensitive material and the second electrode are packaged to obtain a flexible pressure sensor, so that the flexible pressure sensor has high linearity while maintaining high sensitivity.

[0117] Reference Fig. 9 , Fig. 9 A specific flow chart for manufacturing an electrode substrate, an upper substrate and a lower substrate based on a polyester film and interdigitated electrodes is provided for one embodiment of the present application. The method includes but is not limited to steps S901 to S903.

[0118] Step S901: preheating the polyester film at a third preset temperature.

[0119] Step S902: printing a silver electrode on the preheated polyester film to obtain an electrode substrate.

[0120] Step S903: Use the polyester film as the upper substrate, and use the polyester film with interdigital electrodes as the lower substrate.

[0121] In steps S901 to S903 of some embodiments, in the process of manufacturing an electrode substrate, an upper substrate and a lower substrate based on a polyester film and interdigitated electrodes, the embodiments of the present application preheat the polyester film at a third preset temperature, print silver electrodes on the preheated polyester film to obtain an electrode substrate, thereby improving the flexibility and processing performance of the flexible pressure sensor, and print silver electrodes on the preheated polyester film to obtain an electrode substrate, thereby accurately controlling the electrode pattern. The embodiments of the present application also use the polyester film as the upper substrate and the polyester film with interdigitated electrodes as the lower substrate, thereby increasing the effective area of ​​the electrode and improving the sensitivity of the sensor.

[0122] It should be noted that the third preset temperature in the embodiment of the present application is 65 degrees Celsius.

[0123] In a second aspect, the present application also provides a flexible pressure sensor, which is prepared by the above method. Its specific beneficial effects are the same as the preparation method of the flexible pressure sensor in the above embodiment, and will not be described in detail here.

[0124] In order to more clearly explain the method for preparing the flexible pressure sensor according to the embodiment of the present application, a specific example is given below for illustration.

[0125] Example 1:

[0126] refer to Fig.10 , Fig.10 The overall framework diagram of the method for preparing the flexible pressure sensor provided in this example.

[0127] First, the embodiment of the present application prepares a wrinkle template. Specifically, dynamic chemistry and responsive materials are introduced into the wrinkle system, and a photoresponsive anthracene-containing polymer P (An-BA) is introduced as the surface layer on the PDMS flexible substrate. When a double-layer wrinkle system is constructed, 365nm ultraviolet light is used to regulate the dynamic reaction of anthracene dimerization, thereby generating a surface wrinkle pattern.

[0128] In some embodiments, the steps for making a PDMS flexible substrate are as follows. Use ethyl acetate, water, and ethanol to clean the glass sheet, and evenly apply PVA demoulding water on the glass sheet. After 24 hours, the PVA water-soluble film is cured. Then weigh the liquid PDMS (mass ratio of main agent and curing agent is 10:1, Sylgard 184), first stir it thoroughly, and then use a vacuum pump to vacuum it for at least 30 minutes until the bubbles disappear completely. Pour the PDMS on the PVA water-soluble film and use a wet film preparation device to scrape it. The thickness of the PDMS film scraped from different surfaces is also different. After 24 hours of PDMS curing, put the glass with a double-layer film into water for demolding to obtain a PDMS film.

[0129] Through organic synthesis of anthracene-containing styrene and side chain anthracene-containing copolymer P(An-BA), P(An-BA) and toluene solution were synthesized into a mixed solution, which was dissolved by heating at 80°C. After the PDMS film was attached to a glass sheet and cooled, a certain concentration of P(An-BA) toluene solution was spin-coated on the surface of a PDMS (100μm-500μm) flexible substrate at a certain spin speed, and then the sample was placed in an oven at 80 degrees Celsius for 30 minutes to remove the residual solvent. After exposing to 365nm ultraviolet light for a certain period of time in a nitrogen environment, it was heated at 80°C for 5 minutes to produce a wrinkled template.

[0130] refer to Fig.11 , Fig.11 Schematic representation of the synthetic route to P(An-BA) provided for this example.

[0131] In some embodiments, the synthesis formula of P(An-BA) is as follows Fig.11As shown. In the present application, n-butyl acrylate (BA) and anthracene-containing styrene monomer (S-AN) were weighed and dissolved in 20 mL of dioxane solution according to a molar feed ratio of 2:1, and then 1 wt% of azobisisobutyl nitrile of the total weight of the monomers was weighed and added to the mixed solution. After bubbling nitrogen for 30 minutes, the mixture was stirred and reacted for 12 hours at 70 degrees Celsius under nitrogen protection. After the reaction was stopped and cooled, the reaction mixture was concentrated and repeatedly precipitated with 100 mL of cold petroleum ether for 3 times, and the solid powder obtained by filtration was placed in a vacuum drying oven and dried at 80 degrees Celsius for 24 hours to obtain the target copolymer P (An-BA) (side chain anthracene-containing copolymer).

[0132] It is worth noting that in order to prepare a wrinkled template, the embodiment of the present application imposes some restrictions on the PDMS thickness, exposure time and mixed solution concentration. First, the PDMS thickness should not be too small, and should not be less than 100 μm, otherwise, during the spin coating process, as toluene evaporates, a uniform P(An-BA) / PDMS film cannot be produced on the surface; secondly, the exposure time should not be too short and the solution concentration should not be too low. If the time is less than 10 s and less than 0.3 g / L, the degree of photocrosslinking is too low, and a double-layer wrinkled template with a significant height cannot be prepared.

[0133] Afterwards, the embodiment of the present application prepares a flexible conductive film. Specifically, the embodiment of the present application selects materials with good biocompatibility, such as polydimethylsiloxane (PDMS), polyurethane elastomer (TPU), polytrimethylene carbonate (PTMC), etc. Since PDMS has the best biocompatibility and thermal stability, PDMS is preferred.

[0134] The conductive material is dispersed in an organic solution. The conductive material can be carbon nanotubes, graphene, silver nanowires, etc. The most commonly used carbon nanotubes are preferred. The organic solution can be tetrahydrofuran, n-hexane, cyclohexane, preferably tetrahydrofuran, and then the PDMS main liquid is added. After the mixture is stirred evenly, it is heated in a water bath to volatilize the organic solvent, and then the curing agent is added and stirred again to mix evenly. Graphene is added to the PDMS monomer, wherein the mass of graphene accounts for more than 5% and less than 20% of the total mass fraction. When the mass fraction of graphene is less than 5%, the electrical transport performance of graphene is reduced, and the formed film is not conductive; when the mass fraction of graphene is greater than 20%, the fluidity of the graphene and PDMS mixed material is poor, and it is difficult to fill the wrinkle mold. In addition, the PDMS main agent and the curing agent are evenly mixed at a ratio of 10:1, and the obtained mixture is degassed and spin-coated on the wrinkle template, and cured at 25-150°C for 0.25-24h. When the curing temperature is less than 25°C, curing takes dozens of hours, which affects the molding efficiency; as the curing temperature increases, the faster the curing speed, the shorter the time; when the curing temperature is greater than 150°C, the reaction is too fast, and the small molecules produced during the curing process have no time to diffuse out, forming a honeycomb structure. The curing time is closely related to the curing temperature. Increasing the curing temperature has the same effect as reducing the curing time. The curing time is determined to be 0.25 to 24 hours according to the curing temperature range. The cured conductive material and the wrinkle template are placed in a dioxane solution for peeling to obtain a conductive film with a wrinkle microstructure on the surface.

[0135] Finally, the embodiment of the present application prepares a flexible pressure sensor. Specifically, the embodiment of the present application can preheat a 25μm PET film at 65°C as an electrode substrate, and then screen-print a silver electrode on its surface, and solidify it at 65°C for 25 minutes. A PET film with interdigital electrodes is used as the lower substrate, and a conductive film with a wrinkled microstructure is used as the middle substrate. The surface of the interdigital electrodes is in contact with the microstructure, and a 25μm PET film is used as the upper substrate. Two thin wires are cut and placed at the two ends of the interdigital electrodes, and then a layer of conductive silver glue is applied to fix the wires, and they are packaged with 3M tape to obtain a flexible stress sensor.

[0136] In addition, in the embodiment of the present application, two electrodes with screen-printed conductive silver paste can be directly attached to the front and back sides of the pressure-sensitive material with a wrinkled microstructure, and the upper and lower electrodes and the sensitive material can be packaged with 3M tape to obtain a flexible stress sensor.

[0137] Example 2:

[0138] Example 2 is a specific embodiment of preparing a conductive film under the conditions of a single scraping of PDMS liquid with a thickness of 200 μm and ultraviolet light exposure for 60 seconds.

[0139] In some embodiments, anthracene-containing styrene and side chain anthracene-containing copolymer P(An-BA) are organically synthesized, 0.24 g P(An-BA) and 300 μL toluene solution are synthesized into a 0.8 mg / μL mixed solution, which is dissolved by heating at 80°C, and a glass slide is placed in a mixed solution of ammonia water: hydrogen peroxide: deionized water = 1:2:6 and heated to 150°C for hydrophilic treatment for 10 minutes, then repeatedly washed with clean water and dried, and PVA demolding water is applied to the hydrophilically treated glass slide with a pipette, and after evenly diffused, it is slowly placed on a horizontal surface, and the PVA water-soluble film is cured after 24 hours. Weigh 1g of polydimethylsiloxane (PDMS) prepolymer into a sample bottle, then measure 0.1g of curing agent into the sample bottle and stir evenly at room temperature, then use a vacuum pump to vacuum for at least 30 minutes until the bubbles disappear completely, pour PDMS on the PVA water-soluble film, use a wet film preparation device to scrape the PDMS liquid once with a parameter of 200μm, and the thickness of the scraped PDMS film is 300μm. After 24 hours, after PDMS is cured, put the glass with the double-layer film into water for demolding to obtain a PDMS film. Attach PDMS to a glass sheet, spin-coat 0.8mg / μL of P(An-BA) toluene solution on the surface of the PDMS flexible substrate at a spin speed of 4000rpm, and then place the sample in an oven and bake at 80℃ for 30min to remove residual solvent. After exposing to 365nm ultraviolet light for 60s in a nitrogen environment, heat the P(An-BA) / PDMS film at 80℃ for 5min.

[0140] After that, 0.48g of graphene powder, 2.3g of polydimethylsiloxane (PDMS) prepolymer and 100ml of cyclohexane solution were weighed in a glass sample bottle, ultrasonicated for 30min, magnetically stirred or mechanically stirred for 1h, and heated in a water bath at 70°C to volatilize the cyclohexane solution, and then 0.23g of curing agent was added to the glass sample bottle and stirred evenly at room temperature, and placed under 0.1Torr vacuum conditions for 30min to remove bubbles. The above-mentioned mixed solution was spin-coated on the prepared glass sheet wrinkle microstructure template at a speed of 1000rpm for 30s, and cured at 120°C, and then placed in 1,4-dioxane solution and peeled off from the template. The conductive film Sa was 1.49-2.08μm and Sz was 45.55-49.51μm.

[0141] Finally, a 25μm PET film was preheated at 65°C as an electrode substrate, and then a silver electrode was screen-printed on its surface and cured at 65°C for 25 minutes. A PET film with interdigital electrodes was used as the lower substrate, and a conductive film with a wrinkled microstructure was used as the middle substrate. The surface of the interdigital electrodes was in contact with the microstructure, and a 25μm PET film was used as the upper substrate. Two thin wires were cut and placed at the two ends of the interdigital electrodes, and then a layer of conductive silver glue was applied to fix the wires, and they were packaged with 3M tape to obtain a flexible stress sensor.

[0142] Alternatively, two electrodes with screen-printed conductive silver paste are respectively attached to the front and back sides of the pressure-sensitive material with a wrinkled microstructure, and the upper and lower electrodes and the sensitive material are packaged with 3M tape to obtain a flexible stress sensor.

[0143] Example 3:

[0144] Example 3 is a specific embodiment of preparing a conductive film under the conditions of single scraping of PDMS liquid with a parameter of 200 μm and ultraviolet light exposure for 5 minutes.

[0145] Firstly, anthracene-containing styrene and side chain anthracene-containing copolymer P(An-BA) were organically synthesized, 0.24 g P(An-BA) and 300 μL toluene solution were synthesized into a 0.8 mg / μL mixed solution, which was dissolved by heating at 80°C. A glass slide was placed in a mixed solution of ammonia water: hydrogen peroxide: deionized water = 1:2:6 and heated to 150°C for hydrophilic treatment for 10 min. The glass slide was then repeatedly washed with clean water and dried. PVA demoulding water was applied to the hydrophilically treated glass slide with a pipette, and after being evenly diffused, it was slowly placed on a horizontal surface. After 24 hours, the PVA water-soluble film was cured. Weigh 1g of polydimethylsiloxane (PDMS) prepolymer into a sample bottle, then measure 0.1g of curing agent into the sample bottle and stir evenly at room temperature, then use a vacuum pump to perform vacuum treatment for at least 30 minutes until the bubbles disappear completely, pour PDMS on the PVA water-soluble film, use a wet film preparation device to perform a scraping operation, and use a parameter of 200μm to scrape the PDMS liquid once. The scraped PDMS film thickness is 200μm. After 24 hours, after PDMS is cured, put the glass with a double-layer film into water for demolding to obtain a PDMS film. Attach PDMS to a glass sheet, spin-coat 0.8mg / μL of P(An-BA) toluene solution on the surface of the PDMS flexible substrate at a spin speed of 4000rpm, and then place the sample in an oven and bake at 80℃ for 30min to remove residual solvent. After exposing to 365nm ultraviolet light for 5min in a nitrogen environment, heat the P(An-BA) / PDMS film at 80℃ for 5min.

[0146] After that, 0.48g of graphene powder, 2.3g of polydimethylsiloxane (PDMS) prepolymer and 100ml of cyclohexane solution were weighed in a glass sample bottle, ultrasonicated for 30min, magnetically stirred or mechanically stirred for 1h, and heated in a water bath at 70°C to volatilize the cyclohexane solution, and then 0.23g of curing agent was added to the glass sample bottle and stirred evenly at room temperature, and placed under 0.1Torr vacuum conditions for 30min to remove bubbles. The above-mentioned mixed solution was spin-coated on the prepared glass sheet wrinkle microstructure template at a speed of 1000rpm for 30s, and cured at 120°C, and then placed in 1,4-dioxane solution to peel off from the template. The conductive film Sa was 1.58-4.62μm and Sz was 44.58-79.24μm.

[0147] Finally, a 25μm PET film was preheated at 65°C as an electrode substrate, and then a silver electrode was screen-printed on its surface and cured at 65°C for 25 minutes. A PET film with interdigital electrodes was used as the lower substrate, and a conductive film with a wrinkled microstructure was used as the middle substrate. The surface of the interdigital electrodes was in contact with the microstructure, and a 25μm PET film was used as the upper substrate. Two thin wires were cut and placed at the two ends of the interdigital electrodes, and then a layer of conductive silver glue was applied to fix the wires, and they were packaged with 3M tape to obtain a flexible stress sensor.

[0148] Alternatively, two electrodes with screen-printed conductive silver paste are respectively attached to the front and back sides of the pressure-sensitive material with a wrinkled microstructure, and the upper and lower electrodes and the sensitive material are packaged with 3M tape to obtain a flexible stress sensor.

[0149] Example 4:

[0150] Example 4 is a specific embodiment of preparing a conductive film under the conditions of single scraping of PDMS liquid with a parameter of 500 μm and ultraviolet light exposure for 15 minutes.

[0151] Firstly, an anthracene-containing styrene and side chain anthracene-containing copolymer P(An-BA) was organically synthesized, 0.24 g P(An-BA) and 300 μL toluene solution were synthesized into a 0.8 mg / μL mixed solution, which was dissolved by heating at 80°C. A glass slide was placed in a mixed solution of ammonia water: hydrogen peroxide: deionized water = 1:2:6 and heated to 150°C for hydrophilic treatment for 10 min. The glass slide was then repeatedly washed with clean water and dried. PVA demoulding water was applied to the hydrophilically treated glass slide with a pipette, and after being evenly diffused, it was slowly placed on a horizontal surface. After 24 hours, the PVA water-soluble film was cured. Weigh 1g of polydimethylsiloxane (PDMS) prepolymer into a sample bottle, then measure 0.1g of curing agent into the sample bottle and stir evenly at room temperature, then use a vacuum pump to vacuum for at least 30 minutes until the bubbles disappear completely, pour PDMS on the PVA water-soluble film, use a wet film preparation device to scrape the PDMS liquid once with a parameter of 500μm, and the thickness of the scraped PDMS film is 500μm. After 24 hours, after PDMS is cured, put the glass with the double-layer film into water for demolding to obtain a PDMS film. Attach PDMS to a glass sheet, spin-coat 0.8mg / μL of P(An-BA) toluene solution on the surface of the PDMS flexible substrate at a spin speed of 4000rpm, and then place the sample in an oven and bake at 80℃ for 30min to remove residual solvent. After exposing to 365nm ultraviolet light for 15min in a nitrogen environment, heat the P(An-BA) / PDMS film at 80℃ for 5min.

[0152] After that, 0.48g of graphene powder, 2.3g of polydimethylsiloxane (PDMS) prepolymer and 100ml of cyclohexane solution were weighed in a glass sample bottle, ultrasonicated for 30min, magnetically stirred or mechanically stirred for 1h, and heated in a water bath at 70°C to volatilize the cyclohexane solution, and then 0.23g of curing agent was added to the glass sample bottle and stirred evenly at room temperature, and placed under 0.1Torr vacuum conditions for 30min to remove bubbles. The above-mentioned mixed solution was spin-coated on the prepared glass sheet wrinkle microstructure template at a speed of 1000rpm for 30s, and cured at 120°C, and then placed in 1,4-dioxane solution to peel off from the template. The conductive film Sa was 2.19-3.81μm and Sz was 46.53-51.46μm.

[0153] Finally, preheat the 25μm PET film at 65℃ as the electrode substrate, then screen-print the silver electrode on its surface and cure it at 65℃ for 25min. Use the PET film with interdigital electrodes as the lower substrate, the conductive film with wrinkled microstructure as the middle substrate, the surface of the interdigital electrodes is in contact with the microstructure, and then use the 25μm PET film as the upper substrate. Cut two thin wires and place them at both ends of the interdigital electrodes, then apply a layer of conductive silver glue to fix the wires, and package them with 3M tape to obtain a flexible stress sensor. Alternatively, two electrodes with screen-printed conductive silver paste are respectively attached to the front and back of the pressure-sensitive material with wrinkled microstructure, and the upper and lower electrodes and sensitive materials are packaged with 3M tape to obtain a flexible stress sensor.

[0154] The embodiments described in the embodiments of the present application are intended to more clearly illustrate the technical solutions of the embodiments of the present application and do not constitute a limitation on the technical solutions provided in the embodiments of the present application. Those skilled in the art will appreciate that with the evolution of technology and the emergence of new application scenarios, the technical solutions provided in the embodiments of the present application are also applicable to similar technical problems.

[0155] It can be understood by those skilled in the art that Figure 1-10 The technical solutions shown in the figure do not constitute a limitation on the embodiments of the present application, and may include more or fewer steps than those shown in the figure, or a combination of certain steps, or different steps.

[0156] The device embodiments described above are merely illustrative, and the units described as separate components may or may not be physically separated, that is, they may be located in one place or distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0157] Those skilled in the art will appreciate that all or some of the steps in the methods disclosed above, and the functional modules / units in the systems and devices may be implemented as software, firmware, hardware, or a suitable combination thereof.

[0158] The terms "first", "second", "third", "fourth", etc. (if any) in the specification of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0159] It should be understood that in the present application, "at least one (item)" means one or more, and "plurality" means two or more. "And / or" is used to describe the association relationship of associated objects, indicating that three relationships may exist. For example, "A and / or B" can mean: only A exists, only B exists, and A and B exist at the same time, where A and B can be singular or plural. The character " / " generally indicates that the objects associated before and after are in an "or" relationship. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b or c can mean: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", where a, b, c can be single or multiple.

[0160] In the several embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the above units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0161] The units described above as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0162] The preferred embodiments of the present invention are described above with reference to the accompanying drawings, but the scope of the rights of the present invention is not limited thereto. Any modification, equivalent substitution and improvement made by a person skilled in the art without departing from the scope and essence of the present invention should be within the scope of the rights of the present invention.

Claims

1. A method for preparing a flexible pressure sensor, characterized in that: The method comprises: An anthracene-containing polymer is introduced as a surface layer on a flexible substrate, and ultraviolet light of a preset wavelength is irradiated on the surface layer to generate a surface wrinkle pattern on the surface layer, thereby obtaining a wrinkle template; Weighing a first preset gram of polydimethylsiloxane monomer, a second preset gram of conductive material, and a third preset gram of curing agent; Stirring the polydimethylsiloxane monomer, the conductive material, the preset organic solution and the curing agent to obtain a target mixed solution; Spin coating the target mixed solution on the corrugated template, and solidifying the target mixed solution on the corrugated template; The solidified wrinkle template is placed in a dioxane solution for peeling to obtain a conductive film; A flexible pressure sensor is manufactured based on the conductive film, or a flexible pressure sensor is manufactured based on the wrinkled template.

2. The method for preparing the flexible pressure sensor according to claim 1, characterized in that: The flexible substrate is manufactured by the following steps: The preset glass slides were cleaned with ethyl acetate, water and ethanol; Evenly apply polyvinyl alcohol demoulding water on the cleaned glass sheet, and wait for a first preset time to form a polyvinyl alcohol water-soluble film on the cleaned glass sheet; Stirring the polydimethylsiloxane, and vacuum-treating the polydimethylsiloxane after the stirring operation by a vacuum pump to obtain a target solution; The target solution is covered on the polyvinyl alcohol water-soluble film, and the target solution is scraped by a preset wet film preparation device to obtain a flexible substrate.

3. The method for preparing the flexible pressure sensor according to claim 2, characterized in that: The step of covering the target solution on the polyvinyl alcohol water-soluble film and performing a scraping operation on the target solution through a preset wet film preparation device to obtain a flexible substrate comprises: Covering the target solution onto the polyvinyl alcohol water-soluble film, and performing a scraping operation on the target solution through a preset wet film preparation device to form a polydimethylsiloxane film on different surfaces of the glass sheet to obtain a thin film glass sheet; After a second preset time, the film glass sheet is placed in water for demoulding to obtain a polydimethylsiloxane film, and the polydimethylsiloxane film is used as a flexible substrate.

4. The method for preparing the flexible pressure sensor according to claim 1, characterized in that: The anthracene-containing polymer includes a side chain anthracene-containing copolymer; the anthracene-containing polymer is introduced as a surface layer on a flexible substrate, and the surface layer is irradiated with ultraviolet light of a preset wavelength to generate a surface wrinkle pattern on the surface layer to obtain a wrinkle template, comprising: introducing the side chain anthracene-containing copolymer as a surface layer on a flexible substrate; Mixing the side chain anthracene-containing copolymer with a preset toluene solution to obtain a mixed solution; heating and dissolving the mixed solution, and attaching the polydimethylsiloxane film to a sample glass sheet; Taking a first mixed solution of a preset concentration, and applying the first mixed solution on the attached sample glass sheet at a first preset rotation speed to obtain a target sample; The target sample is irradiated with ultraviolet light of a preset wavelength and heated at a first preset temperature to obtain a wrinkle template.

5. The method for preparing the flexible pressure sensor according to claim 1, characterized in that: The polydimethylsiloxane monomer, the conductive material, the preset organic solution and the curing agent are stirred to obtain a target mixed solution, comprising: Putting the polydimethylsiloxane monomer, the conductive material and a preset organic solution into a preset glass sample bottle for stirring, and heating the organic solution in a water bath to obtain a first mixture; Putting the curing agent into the glass sample bottle to stir the curing agent and the first mixture to obtain a second mixture; The second mixture is placed in a vacuum environment for a third preset time to obtain a target mixed solution.

6. The method for preparing the flexible pressure sensor according to claim 1, characterized in that: The step of spin coating the target mixed solution on the corrugated template and solidifying the target mixed solution on the corrugated template comprises: The target mixed liquid is applied to the pleated template at a second preset rotation speed, and the target mixed liquid is cured at a second preset temperature for a fourth preset time.

7. The method for preparing a flexible pressure sensor according to claim 1, characterized in that: The method of manufacturing a flexible pressure sensor according to the conductive film comprises: An electrode substrate, an upper substrate and a lower substrate are manufactured based on the polyester film and the interdigital electrodes, and the conductive film is used as a middle substrate; Disposing preset thin wires at both ends of the interdigital electrodes, and fixing the thin wires by conductive silver glue; The electrode substrate, the upper substrate, the middle substrate and the lower substrate are packaged to obtain a flexible pressure sensor.

8. The method for preparing a flexible pressure sensor according to claim 1, characterized in that: The method of manufacturing a flexible pressure sensor according to the wrinkle template comprises: Obtaining a first electrode and a second electrode with screen-printed conductive silver paste, and generating a pressure-sensitive material with a wrinkled microstructure according to the wrinkled template, wherein the pressure-sensitive material includes a first surface and a second surface; attaching the first electrode to the first surface of the pressure-sensitive material, and attaching the second electrode to the second surface of the pressure-sensitive material; The first electrode, the pressure sensitive material and the second electrode are packaged to obtain a flexible pressure sensor.

9. The method for preparing the flexible pressure sensor according to claim 7, characterized in that: The method of manufacturing an electrode substrate, an upper substrate and a lower substrate based on a polyester film and interdigital electrodes comprises: preheating the polyester film at a third preset temperature; Printing silver electrodes on the preheated polyester film to obtain an electrode substrate; The polyester film is used as an upper substrate, and the polyester film with interdigital electrodes is used as a lower substrate.

10. A flexible pressure sensor, characterized in that: The flexible pressure sensor is prepared by the method for preparing a flexible pressure sensor according to any one of claims 1 to 9.

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