Novel energy-saving heat exchange system

By designing a new energy-saving and heat exchange system including power circuits and no power circuits, the high energy consumption problem caused by the spraying process in the air conditioning system of the integrated circuit factory is solved, and the annual cooling demand and energy-saving effect are improved.

CN119642283APending Publication Date: 2025-03-18LEAN THERMAL TECH (SUZHOU) CO LTD
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Patent Information

Application Number
CN202411932978.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-26
Publication Date
2025-03-18

AI Technical Summary

Technical Problem

In the air conditioning system of integrated circuit factories, the spraying process causes the air humidity to rise, causing the recooling meter cooler to be refrigerated and dehumidified throughout the year, resulting in high energy consumption. At the same time, the heat transfer temperature difference between heat pipes is small and the heat transfer is limited, making it difficult to achieve energy-saving results throughout the year.

Method used

Design a new energy-saving and heat exchange system, including power circuits and powerless circuits, to achieve effective regulation of gas temperature and heat conversion through pretreatment, purification, heat exchange and heating processes. The system consists of a meter cooler, a power circuit and a power circuit. The two circuits operate independently, and the gas is heat exchanged within the system to reduce the consumption of cooling and heating.

Benefits of technology

It has achieved the annual cooling demand, improved energy saving effect, reduced the cooling capacity of the meter cooler and the heating capacity of the heater, and reduced the energy consumption of the system.

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Abstract

The novel energy-saving heat exchange system comprises a surface air cooler, a power loop and an unpowered loop, the unpowered loop is arranged in front of the power loop, and the surface air cooler is arranged between the power loop and the unpowered loop; the pretreatment device is used for preliminarily regulating and controlling the gas temperature of the air inlet side of the heat exchange system; the purification chamber is used for eliminating particles in the gas and is arranged in front of the surface air cooler; the heater is used for controlling the air supply temperature; gas enters from the air inlet side of the heat exchange system, is subjected to pretreatment, purification, heat exchange and heating, and is discharged from the air supply side of the heat exchange system. Gas enters from the air inlet side, the temperature of the gas is preliminarily adjusted through the pretreatment device, particles in the gas are treated through the purification chamber, the humidity of the gas passing through the purification chamber is large, and the gas passes through the unpowered loop, the surface air cooler and the power loop, so that precooling and reheating after surface cooling are achieved, the heating value of the dehumidified heater is reduced, and the purpose of saving energy is achieved.
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Description

Technical Field

[0001] The invention belongs to the technical field of temperature control, and in particular relates to a novel energy-saving heat exchange system. Background Art

[0002] In integrated circuit factories, in order to remove particles in the air, a water spray room is often designed in the fresh air air conditioning box to spray and purify the air. The air conditioning box usually includes multiple processes such as fresh air preheating, precooling, spraying, recooling, and reheating. Dehumidification and reheating have cold and hot offsets, resulting in high system energy consumption.

[0003] The spraying process is carried out throughout the year. After water washing, the air humidity is high. Therefore, the dehumidification and cooling capacity of the recooling surface cooler is large and refrigeration and dehumidification are required throughout the year, and the refrigeration energy consumption is high. Since the spraying process is an isenthalpic humidification process, the air temperature will decrease after spraying. The heat pipe uses the temperature difference before and after the surface cooler to transfer heat. If the heat pipe precooling and heat pipe reheating heat exchangers are set before and after the recooling surface cooler, the heat transfer temperature difference is small due to the spray cooling, and the heat that the heat pipe can transfer is limited; if the precooling and reheating heat exchangers of the heat pipe are set before the precooling surface cooler and after the recooling surface cooler, it can only play an energy-saving role in summer, the energy-saving operation time is short, and the energy consumption is high. Summary of the invention

[0004] In order to solve the above technical problems, the present invention discloses a novel energy-saving heat exchange system, which can meet the needs of year-round refrigeration and improve the energy-saving effect.

[0005] Specifically, the present invention discloses a novel energy-saving heat exchange system, comprising:

[0006] A surface cooler, a power circuit and a non-power circuit for performing heat exchange on the gas in the heat exchange system, wherein the non-power circuit is arranged in front of the power circuit, and the surface cooler is arranged between the power circuit and the non-power circuit;

[0007] A pre-treatment device placed in front of the purification chamber, which performs preliminary control on the gas temperature on the air inlet side of the heat exchange system;

[0008] A purification chamber for eliminating particles in the gas, the purification chamber being arranged in front of the surface cooler;

[0009] A heater for controlling the supply air temperature;

[0010] The gas enters the air inlet side of the heat exchange system, undergoes pretreatment, purification, heat exchange and heating, and is discharged on the air supply side of the heat exchange system.

[0011] The energy-saving system consists of a power circuit and an unpowered circuit. The two circuits operate independently, allowing the gas to exchange heat in the heat exchange system. The gas enters at the air inlet side, and the temperature of the gas is initially adjusted by the pretreatment device. The particles in the gas are processed in the purification chamber. The gas humidity after the purification chamber is relatively high. After passing through the unpowered circuit, the surface cooler and the power circuit, the heat of the power circuit is transferred backward through the surface cooler. The gas is cooled and releases heat to condense into liquid, realizing heat conversion and saving the cooling capacity of the surface cooler and the heating capacity of the heater.

[0012] Furthermore, the pretreatment device includes a preheating heat exchanger and a precooling surface cooler.

[0013] Furthermore, the unpowered circuit includes an unpowered precooling coil and an unpowered reheat coil, the unpowered precooling coil is arranged in front of the surface cooler, the air outlet of the unpowered precooling coil is connected to the air inlet of the unpowered reheat coil, the first liquid outlet of the unpowered reheat coil is connected to the first liquid inlet of the unpowered precooling coil, and the height of the first liquid outlet is greater than the height of the first liquid inlet.

[0014] Furthermore, the power circuit includes a power reheat coil, a power precooling coil, a vapor-liquid separator, a compressor and an expansion valve. The second liquid outlet of the power reheat coil is connected to the second liquid inlet 91 of the power precooling coil, the third liquid outlet of the power precooling coil is connected to the third liquid inlet of the power reheat coil, the vapor-liquid separator is connected to the compressor between the third liquid outlet and the third liquid inlet, and the vapor-liquid separator is arranged on the air inlet side of the compressor, and the expansion valve is arranged between the second liquid outlet and the second liquid inlet 91.

[0015] Further, the unpowered precooling coil is arranged in front of the preheating heat exchanger;

[0016] Or, the unpowered precooling coil is arranged between the powered precooling coil and the purification chamber;

[0017] Or, the unpowered precooling coil is arranged between the preheating heat exchanger and the precooling surface cooler;

[0018] Alternatively, the unpowered precooling coil is arranged in front of the preheating heat exchanger, and between the powered precooling coil and the purification chamber.

[0019] Furthermore, a spray valve is provided in the purification chamber.

[0020] Furthermore, the inlet side of the expansion valve is connected to a drying filter and a liquid storage tank in sequence.

[0021] Furthermore, multiple groups of the power circuit and the unpowered circuit can be provided.

[0022] Further, the heater is arranged after the unpowered reheat coil;

[0023] Alternatively, the heater is disposed between the unpowered reheat coil and the surface cooler. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of this application.

[0025] Figure 1 It is a schematic diagram of a new energy-saving heat exchange system;

[0026] Figure 2 This is a schematic diagram of the new energy-saving heat exchange system with unpowered preheating coils after the clean room;

[0027] Figure 3 It is a schematic diagram of the new energy-saving heat exchange system with a non-powered preheating coil between the preheating heat exchanger and the precooling surface cooler;

[0028] Figure 4 It is a schematic diagram of a new energy-saving heat exchange system having two sets of unpowered preheating coils;

[0029] Figure 5 is a schematic diagram of an unpowered preheat coil heater in front of an unpowered reheat coil.

[0030] The numbers involved in the accompanying drawings are as follows: air inlet side A, air supply side B, surface cooler 1, purification chamber 2, spray valve 21, heater 3, preheating heat exchanger 4, precooling surface cooler 5, unpowered precooling coil 6, air outlet 61, first liquid inlet 62, unpowered reheat coil 7, air inlet 71, first liquid outlet 72, powered reheat coil 8, second liquid outlet 81, third liquid inlet 82, powered precooling coil 9, second liquid inlet 91, third liquid outlet 92, compressor 10, expansion valve 11, vapor-liquid separator 12. DETAILED DESCRIPTION

[0031] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0032] like Figure 1-5 As shown, the present invention discloses a novel energy-saving heat exchange system, comprising:

[0033] A surface cooler 1, a power circuit and a non-power circuit for performing heat exchange on the gas in the heat exchange system, wherein the non-power circuit is arranged in front of the power circuit, and the surface cooler 1 is arranged between the power circuit and the non-power circuit;

[0034] A pre-treatment device placed in front of the purification chamber 2, which performs preliminary control on the gas temperature at the air inlet side A of the heat exchange system;

[0035] A purification chamber 2 for removing particles in the gas, the purification chamber 2 being arranged in front of the surface cooler 1;

[0036] A heater 3 for controlling the supply air temperature;

[0037] The gas enters the heat exchange system at the air inlet side A, undergoes pretreatment, purification, heat exchange and heating, and is discharged at the air supply side B of the heat exchange system.

[0038] The energy-saving system consists of a power circuit and an unpowered circuit. The two circuits operate independently, allowing the gas to exchange heat in the heat exchange system. The gas enters at the air inlet side A, and the temperature of the gas is preliminarily adjusted by the pretreatment device. The particles in the gas are processed by the purification chamber 2. The gas humidity after the purification chamber 2 is relatively high. After passing through the unpowered circuit, the surface cooler 1 and the power circuit, the heat of the power circuit is transferred backward through the surface cooler 1. The gas is cooled and releases heat to condense into liquid, realizing heat conversion and saving the cooling capacity of the surface cooler 1 and the heating capacity of the heater 3.

[0039] The pretreatment device includes a preheating heat exchanger 4 and a precooling surface cooler 5, which perform preliminary control on the temperature of the gas and are set according to the season.

[0040] In some embodiments, the unpowered circuit includes an unpowered precooling coil 6 and an unpowered reheating coil 7. The unpowered precooling coil 6 is arranged in front of the surface cooler 1. The air outlet 61 of the unpowered precooling coil 6 is connected to the air inlet 71 of the unpowered reheating coil 7. The first liquid outlet 72 of the unpowered reheating coil 7 is connected to the first liquid inlet 62 of the unpowered precooling coil 6, and the height of the first liquid outlet 72 is greater than the height of the first liquid inlet 62. The air outlet 61 is connected to the air inlet 71 through an air pipe. The refrigerant absorbs the heat of the gas A on the air inlet side in the unpowered precooling coil 6 and evaporates into a gaseous state. The gas flows to the unpowered reheating coil 7 through the air pipe. In the unpowered reheating coil 7, it encounters the low-temperature cold air emitted by the surface cooler 1, releases heat and condenses into liquid, and flows back to the unpowered precooling coil 6 through the first liquid outlet 72 and the first liquid inlet 62, forming a cycle.

[0041] In some embodiments, the power circuit includes a power reheat coil 8, a power precooling coil 9, a vapor-liquid separator 12, a compressor 10 and an expansion valve 11, the second liquid outlet 81 of the power reheat coil 8 is connected to the second liquid inlet 91 of the power precooling coil 9, the third liquid outlet 92 of the power precooling coil 9 is connected to the third liquid inlet 82 of the power reheat coil 8, the vapor-liquid separator 12 is connected to the compressor 10 between the third liquid outlet 92 and the third liquid inlet 82, and the vapor-liquid separator 12 is arranged on the air intake side of the compressor 10, and the expansion valve 11 is arranged between the second liquid outlet 81 and the second liquid inlet 91. The gas discharged from the compressor 10 enters the power reheat coil 8, dissipates heat and cools down, becomes liquid, and reheats the gas at the rear end of the surface cooler 1. Then the refrigerant enters the power precooling coil 9 through the expansion valve 11, absorbs heat and condenses there, and precools the gas passing through the purification chamber 2. The compressor drives the refrigerant to complete the cycle, achieving precooling, surface cooling and then reheating, and reducing the amount of heating after dehumidification for energy saving purposes.

[0042] In some embodiments of this solution, Figure 1 As shown, the unpowered precooling coil 6 is arranged in front of the preheating heat exchanger 4. The gas enters at the air inlet side A, passes through the unpowered precooling coil 6 and the precooling surface cooler 5 to reduce the gas temperature, then passes through the purification chamber 2 to process the particles in the gas, passes through the powered precooling coil 9 to reduce the temperature, and the surface cooler 1 processes the moisture contained in the gas to complete the dehumidification, then passes through the unpowered reheating coil 7 for preliminary heating, and finally passes through the heater 3 to make the system's supply air temperature reach the set temperature, realizing precooling, surface cooling and then reheating, reducing the heat generated by the heater 3 after dehumidification, and achieving the purpose of energy saving.

[0043] In some other embodiments, the difference from the above embodiment is that, Figure 2 As shown, the unpowered precooling coil 6 is arranged between the powered precooling coil 9 and the purification chamber 2. The gas enters at the air inlet side A, passes through the precooling surface cooler 5 to reduce the gas temperature, and then passes through the purification chamber 2 to process the particles in the gas, passes through the unpowered precooling coil 6 and the powered precooling coil 9 to cool down, the surface cooler 1 processes the moisture contained in the gas to complete the dehumidification, and then passes through the unpowered reheating coil 7 for preliminary heating, and finally passes through the heater 3 to make the system's supply air temperature reach the set temperature. The unpowered precooling coil 6 is arranged before the powered precooling coil 9, and both cool down the gas at the same time, reducing the cooling capacity of the powered precooling coil 9 and achieving the purpose of energy saving.

[0044] In some other embodiments, the difference from the above embodiment is that, Figure 3As shown, the unpowered precooling coil 6 is arranged between the preheating heat exchanger 4 and the precooling surface cooler 5. The gas enters at the air inlet side A, and the gas temperature is lowered by the unpowered precooling coil 6 and the precooling surface cooler 5, and then the particles in the gas are processed by the purification chamber 2, and the gas is cooled by the unpowered precooling coil 6 and the powered precooling coil 9, and the surface cooler 1 processes the moisture contained in the gas to complete the dehumidification, and then the unpowered reheating coil 7 is preliminarily heated, and finally the heater 3 is passed to make the system's supply air temperature reach the set temperature. The unpowered precooling coil 6 is arranged between the preheating heat exchanger 4 and the precooling surface cooler 5, and the unpowered precooling coil 6 and the precooling surface cooler 5 cool the gas at the same time, reducing the cooling capacity of the precooling surface cooler 5, and achieving the purpose of energy saving.

[0045] In some other embodiments, the difference from the above embodiment is that, Figure 4 As shown, the unpowered precooling coil 6 is arranged in front of the preheating heat exchanger 4, and between the powered precooling coil 9 and the purification chamber 2, that is, two unpowered precooling coils 6 are arranged. The gas enters at the air inlet side A, passes through the unpowered precooling coil 6 and the precooling surface cooler 5 to reduce the gas temperature, and then passes through the purification chamber 2 to process the particles in the gas, and then passes through the unpowered precooling coil 6 and the powered precooling coil 9 to cool down, the surface cooler 1 processes the moisture contained in the gas to complete the dehumidification, and then passes through the unpowered reheating coil 7 for preliminary heating, and finally passes through the heater 3 to make the system's supply air temperature reach the set temperature. The arrangement of two sets of unpowered precooling coils 6 can further reduce the cooling capacity of the powered precooling coil 9, and the energy-saving effect is better.

[0046] In some embodiments of this solution, Figure 1-4 As shown, the heater 3 is arranged after the unpowered reheat coil 7. The gas is dehumidified after passing through the surface cooler 1, and then absorbs heat when passing through the unpowered reheat coil 7 and the powered reheat coil 8. The gas temperature will be increased. At this time, the heater 3 heats the gas again, and the energy consumed will be reduced, thereby saving energy waste.

[0047] In addition, if Figure 5 As shown, the heater 3 is arranged between the unpowered reheat coil 7 and the surface cooler 1. The gas is dehumidified after passing through the surface cooler 1, and then the heater 3, the unpowered reheat coil 7 and the powered reheat coil 8 heat the gas, which can also achieve energy-saving effects.

[0048] In addition, when the temperature of the gas entering the air inlet side A is low, consider whether to place the unpowered precooling coil 6 behind the purification chamber 2 according to actual needs, and then work the preheating heat exchanger 4 to heat the gas on the air inlet side A, and then perform subsequent dust removal and heat exchange.

[0049] In some embodiments, a spray valve 21 is provided in the purification chamber 2. To improve the spraying effect, the spray valve 21 may be provided in multiple layers.

[0050] Furthermore, the inlet of the expansion valve 11 is connected to a drying filter and a liquid storage tank in sequence.

[0051] In order to further improve the energy-saving effect, multiple groups of both the unpowered circuit and the powered circuit can be set up to allow the gas to fully exchange heat in the system and save energy.

[0052] For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, all of which fall within the protection scope of the present invention.

Claims

1. A new energy-saving heat exchange system, characterized in that: include: A surface cooler (1), a power circuit and a non-power circuit for performing heat exchange on the gas in the heat exchange system, wherein the non-power circuit is arranged in front of the power circuit, and the surface cooler (1) is arranged between the power circuit and the non-power circuit; A pre-treatment device is arranged in front of the purification chamber (2), and the pre-treatment device performs preliminary control on the gas temperature at the air inlet side (A) of the heat exchange system; A purification chamber (2) for removing particles in the gas, wherein the purification chamber (2) is arranged in front of the surface cooler (1); A heater (3) for controlling the temperature of the supply air; The gas enters the air inlet side (A) of the heat exchange system, undergoes pretreatment, purification, heat exchange and heating, and is discharged from the air supply side (B) of the heat exchange system.

2. The new energy-saving heat exchange system according to claim 1 is characterized in that: The pretreatment device comprises a preheating heat exchanger (4) and a precooling surface cooler (5).

3. The new energy-saving heat exchange system according to claim 2 is characterized in that: The unpowered circuit comprises an unpowered precooling coil (6) and an unpowered reheating coil (7); the unpowered precooling coil (6) is arranged in front of the surface cooler (1); an air outlet (61) of the unpowered precooling coil (6) is communicated with an air inlet (71) of the unpowered reheating coil (7); a first liquid outlet (72) of the unpowered reheating coil (7) is communicated with a first liquid inlet (62) of the unpowered precooling coil (6); and a height of the first liquid outlet (72) is greater than a height of the first liquid inlet (62).

4. The novel energy-saving heat exchange system according to claim 3 is characterized in that: The power circuit comprises a power reheat coil (8), a power precooling coil (9), a vapor-liquid separator (12), a compressor (10) and an expansion valve (11); the second liquid outlet (81) of the power reheat coil (8) is in communication with the second liquid inlet (91) of the power precooling coil (9); the third liquid outlet (92) of the power precooling coil (9) is in communication with the third liquid inlet (82) of the power reheat coil (8); the vapor-liquid separator (12) and the compressor (10) are connected between the third liquid outlet (92) and the third liquid inlet (82); the vapor-liquid separator (12) is arranged on the air inlet side of the compressor (10); and the expansion valve (11) is arranged between the second liquid outlet (81) and the second liquid inlet (91).

5. The novel energy-saving heat exchange system according to claim 4 is characterized in that: The unpowered precooling coil (6) is arranged in front of the preheating heat exchanger (4); Or, the unpowered precooling coil (6) is arranged between the powered precooling coil (9) and the purification chamber (2); Or, the unpowered precooling coil (6) is arranged between the preheating heat exchanger (4) and the precooling surface cooler (5); Or, the unpowered precooling coil (6) is arranged in front of the preheating heat exchanger (4), and between the powered precooling coil (9) and the purification chamber (2);.

6. The novel energy-saving heat exchange system according to claim 1 is characterized in that: A spray valve (21) is provided in the purification chamber (2).

7. The novel energy-saving heat exchange system according to claim 4 is characterized in that: The inlet side of the expansion valve (11) is connected in sequence to a drying filter and a liquid storage tank.

8. The novel energy-saving heat exchange system according to claim 1 is characterized in that: The power circuit and the non-power circuit can be provided in multiple groups.

9. The novel energy-saving heat exchange system according to claim 4 is characterized in that: The heater (3) is arranged after the unpowered reheat coil (7); Alternatively, the heater (3) is arranged between the unpowered reheat coil (7) and the surface cooler (1).