Image quality correction system and method for optical waveguide of near-to-eye display system, and near-to-eye display module

Abstract

The invention relates to the technical field of near-to-eye display systems. The invention provides an image quality correction system and method for an optical waveguide of a near-eye display system. The method comprises the following steps: acquiring a first display image at a first side eye point position and a second display image at a second side eye point position of the optical waveguide module; obtaining first and second display target gray scale brightness data; performing image quality correction pre-processing to generate first and second pre-correction data; performing image quality correction processing to generate first and image quality correction compensation data; lightening the optical waveguide module according to the first image quality correction compensation data and the second image quality correction compensation data, and performing image quality compensation evaluation; and optimizing an image quality correction algorithm according to a result of the image quality compensation evaluation, and performing image quality correction on the optical waveguide module according to the optimized image quality correction algorithm. According to the method, the corrected image is evaluated, and the image quality correction algorithm is iteratively optimized according to the evaluation result, so that the correction effect can be improved.

Description

Technical Field

[0001] The present invention generally relates to the technical field of near-eye display systems, and in particular to a system and method for correcting image quality of an optical waveguide for a near-eye display system, and a near-eye display module. Background Art

[0002] Near-eye display systems, such as AR / VR glasses, have developed rapidly in recent years. As a new display technology, optical waveguides are widely used in near-eye display systems due to their advantages such as lightness, thinness, and high light transmittance. However, in actual applications, optical waveguide modules often have problems such as uneven image quality and color deviation, which seriously affect the user experience.

[0003] To address this problem, prior art usually requires demura processing of near-eye display modules during the production process of near-eye display systems. However, existing demura methods often calibrate single pixels or small areas, and cannot effectively solve the problem of global uneven image quality. In addition, these methods usually lack objective evaluation of the correction effect, resulting in unstable correction results. Summary of the invention

[0004] In order to at least partially solve the above problems in the prior art, the present invention provides a method for calibrating the image quality of an optical waveguide for a near-eye display system, comprising the following steps:

[0005] Acquiring a display image of the optical waveguide module;

[0006] Acquire display target grayscale brightness data according to the display image;

[0007] Performing pre-image quality correction processing on the grayscale brightness data to generate pre-correction data; and

[0008] Image quality correction processing is performed according to the pre-correction data to generate image quality correction compensation data.

[0009] In one embodiment of the present invention, the optical waveguide module is a monocular waveguide module or a binocular waveguide module, wherein obtaining a display image of the binocular waveguide module comprises:

[0010] A first display image at a first side eye point position and a second display image at a second side eye point position of the optical waveguide module are acquired.

[0011] In one embodiment of the present invention, obtaining a first display image at a first side eye point position of the optical waveguide module comprises the following steps:

[0012] Placing the optical waveguide module on a fixture carrier and lighting the optical waveguide module;

[0013] moving the optical measuring instrument to the first side eye point position of the optical waveguide module; and

[0014] The near-eye display lens of the optical measuring instrument is adjusted so that the near-eye display lens is focused and aligned with the optical waveguide module to obtain the first display image.

[0015] In one embodiment of the present invention, obtaining a second display image at a second side eye point position of the optical waveguide module comprises the following steps:

[0016] moving the optical measuring instrument to the second side eye point position of the optical waveguide module; and

[0017] The near-eye display lens of the optical measuring instrument is adjusted so that the near-eye display lens is focused and aligned with the optical waveguide module to obtain the second display image.

[0018] In one embodiment of the present invention, it is provided that the relative position between the optical measuring instrument and the waveguide module is adjusted by a position adjustment device to move the optical measuring instrument to a first side eye point position or a second side eye point position of the optical waveguide module.

[0019] In one embodiment of the present invention, obtaining display target grayscale brightness data according to the display image includes:

[0020] First display target grayscale brightness data is acquired according to the first display image, and second display target grayscale brightness data is acquired according to the second display image.

[0021] In one embodiment of the present invention, performing pre-image quality correction processing on the grayscale brightness data to generate pre-correction data includes:

[0022] The first display target grayscale brightness data is processed before image quality correction to generate first pre-correction data, and the second display target grayscale brightness data is processed before image quality correction to generate second pre-correction data.

[0023] In one embodiment of the present invention, performing image quality correction processing according to the pre-correction data to generate image quality correction compensation data includes:

[0024] An image quality correction process is performed based on the first pre-correction data to generate first image quality correction compensation data, and an image quality correction process is performed based on the second pre-correction data to generate second image quality correction compensation data.

[0025] In one embodiment of the present invention, it is provided that a computer system performs pre-image quality correction processing on the first display target grayscale brightness data to generate first pre-correction data, and performs pre-image quality correction processing on the second display target grayscale brightness data to generate second pre-correction data,

[0026] The computer system performs image quality correction processing on the first pre-correction data to generate first image quality correction compensation data, and performs image quality correction processing on the second pre-correction data to generate second image quality correction compensation data.

[0027] In one embodiment of the present invention, it is provided that the image quality correction method of the optical waveguide for the near-eye display system further comprises:

[0028] The optical waveguide module is illuminated according to the image quality correction compensation data, and image quality compensation evaluation is performed on the optical waveguide module.

[0029] In one embodiment of the present invention, lighting up the optical waveguide module according to the image quality correction compensation data includes:

[0030] The optical waveguide module is illuminated according to the first image quality correction compensation data and the second image quality correction compensation data.

[0031] In one embodiment of the present invention, lighting up the optical waveguide module according to the first image quality correction compensation data and the second image quality correction compensation data comprises the following steps:

[0032] The signal generator loads the first image quality correction compensation data and the second image quality correction compensation data into the non-volatile memory of the driving circuit of the optical waveguide module;

[0033] The first image quality correction compensation data and the second image quality correction compensation data are called to light up the optical waveguide module.

[0034] In one embodiment of the present invention, performing image quality compensation evaluation on the optical waveguide module includes the following steps:

[0035] Moving the optical measuring instrument to the first side eye point position of the optical waveguide module;

[0036] adjusting a near-eye display lens of the optical measuring instrument so that the near-eye display lens is focused and aligned with the optical waveguide module to obtain a first display target evaluation image;

[0037] The computer system acquires first display target grayscale brightness evaluation data according to the first display target evaluation image;

[0038] Moving the optical measuring instrument to the second side eye point position of the optical waveguide module;

[0039] adjusting a near-eye display lens of the optical measuring instrument so that the near-eye display lens is focused and aligned with the optical waveguide module to obtain a second display target evaluation image;

[0040] The computer system acquires second display target grayscale brightness evaluation data according to the second display target evaluation image;

[0041] The computer system fuses the first display target grayscale brightness evaluation data and the second display target grayscale brightness evaluation data, and performs image quality compensation evaluation.

[0042] In one embodiment of the present invention, it is provided that performing image quality compensation evaluation includes evaluating high-frequency dispersion and global brightness average of the image.

[0043] The present invention also provides an image quality correction system for an optical waveguide of a near-eye display system, comprising:

[0044] Optical waveguide module;

[0045] an optical measurement system configured to acquire a display image of the optical waveguide module; and

[0046] A control system configured to perform the following actions:

[0047] Acquire display target grayscale brightness data according to the display image;

[0048] Performing pre-image quality correction processing on the grayscale brightness data to generate pre-correction data; and

[0049] Image quality correction processing is performed according to the pre-correction data to generate image quality correction compensation data.

[0050] In one embodiment of the present invention, it is provided that the image quality correction system for the optical waveguide of the near-eye display system further includes:

[0051] A fixture carrier is configured to carry the optical waveguide module.

[0052] In one embodiment of the present invention, it is provided that the optical measurement system comprises:

[0053] an optical measuring instrument, located at a light coupling-out side of the optical waveguide module, the optical measuring instrument being configured to acquire a display image of the optical waveguide module; and

[0054] The position adjustment device is configured to support the optical measuring instrument and to adjust the distance and deflection angle of the optical measuring instrument relative to the optical waveguide module.

[0055] In one embodiment of the present invention, it is provided that the position adjustment device comprises a six-axis movement device, wherein the six-axis movement device is configured to move the optical measuring instrument in six degrees of freedom.

[0056] In one embodiment of the present invention, movement in six degrees of freedom includes:

[0057] Translation along the x-axis;

[0058] Translation along the y-axis;

[0059] Translation along the z-axis;

[0060] Rotation along the x-axis;

[0061] rotation along the y-axis; and

[0062] Rotation along the z-axis, where the x, y, and z axes are the coordinate axes of the spatial rectangular coordinate system.

[0063] In one embodiment of the present invention, it is provided that the control system comprises:

[0064] a signal generator configured to control the opening and closing of the optical waveguide module, and to read and write data into a non-volatile memory of the optical waveguide module; and

[0065] A computer system is configured to control the signal generator and the optical measurement system and perform data processing.

[0066] In one embodiment of the present invention, it is provided that the near-eye display system comprises:

[0067] Virtual reality glasses, augmented reality glasses, and smart glasses.

[0068] The present invention also proposes a near-eye display module, characterized in that the near-eye display module is configured to perform image quality correction according to the image quality correction method for the optical waveguide used in the near-eye display system.

[0069] In one embodiment of the present invention, it is provided that the near-eye display module includes a micro light emitting diode chip, and the micro light emitting diode chip is used for luminous imaging.

[0070] In one embodiment of the present invention, the micro light emitting diode chip comprises:

[0071] Pixel driver backplane;

[0072] A light-emitting semiconductor module is arranged on the pixel driving backplane, and comprises a light-emitting layer, a first epitaxial layer closer to the pixel driving backplane than the light-emitting layer, and a second epitaxial layer farther from the pixel driving backplane than the light-emitting layer;

[0073] An insulating layer, which is arranged on the light-emitting semiconductor module, and the insulating layer is provided with an opening at a position located on the second epitaxial layer;

[0074] a transparent conductive layer, which is arranged on the insulating layer, and the transparent conductive layer is electrically connected to the light-emitting semiconductor module through the opening; and

[0075] The microlens is arranged on the insulating layer and the transparent conductive layer at a position above the light emitting semiconductor module.

[0076] In one embodiment of the present invention, the micro light emitting diode chip further comprises:

[0077] A metal bonding layer is arranged between the pixel driving backplane and the light emitting semiconductor module to bond the pixel driving backplane and the light emitting semiconductor module together.

[0078] In one embodiment of the present invention, the micro light emitting diode chip further comprises:

[0079] A first electrode electrically connected to the integrated circuit backplane; and

[0080] The second electrode is arranged on the transparent conductive layer connection surface and is electrically connected to the light emitting semiconductor module through the transparent conductive layer.

[0081] The pixel driving backplane is provided with a plurality of integrated circuit copper pillars, wherein the light emitting semiconductor module is located above the integrated circuit copper pillars, and the first electrode is electrically connected to the pixel driving backplane through the integrated circuit copper pillars.

[0082] The present invention has at least the following beneficial effects:

[0083] (1) Image data is obtained for the left and right eyes respectively, and independent correction processing is performed to adapt to the characteristics of binocular parallax of the human eye and improve the accuracy of correction.

[0084] (2) The calibration process is divided into multiple steps, including data acquisition, preprocessing, calibration calculation and evaluation. Each step has a clear function, ensuring the integrity and reliability of the calibration.

[0085] (3) Make full use of computer systems for data processing and analysis to improve correction efficiency and accuracy.

[0086] (4) By evaluating the corrected image, the image quality correction algorithm is iteratively optimized according to the evaluation results to achieve the best correction effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0087] To further illustrate the advantages and features of various embodiments of the present invention, a more detailed description of various embodiments of the present invention will be presented with reference to the accompanying drawings. It will be understood that these drawings only depict typical embodiments of the present invention and are therefore not to be considered as limiting the scope thereof. In the accompanying drawings, for clarity, identical or corresponding parts will be represented by identical or similar reference numerals.

[0088] Figure 1 A schematic structural diagram of an image quality correction system for an optical waveguide used in a near-eye display system in an embodiment of the present invention is shown.

[0089] Figure 2 A schematic flow chart of a method for correcting image quality of an optical waveguide for a near-eye display system in an embodiment of the present invention is shown.

[0090] Figure 3 A schematic diagram of a process for evaluating image quality compensation for an optical waveguide module in an embodiment of the present invention is shown.

[0091] Figure 4 A schematic diagram of a process of image quality compensation in a near-eye display system in an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0092] It should be noted that the components in the figures may be shown exaggeratedly for the sake of illustration and are not necessarily true to scale. In the figures, identical or functionally identical components are provided with the same reference numerals.

[0093] In the present invention, unless otherwise specified, "arranged on...", "arranged above..." and "arranged above..." do not exclude the existence of an intermediate between the two. In addition, "arranged on or above..." merely indicates the relative positional relationship between two components, and in certain cases, such as after reversing the product direction, it can also be converted into "arranged below or below...", and vice versa.

[0094] In the present invention, each embodiment is only intended to illustrate the aspects of the present invention and should not be construed as limiting.

[0095] In the present invention, unless otherwise specified, the quantifiers "a", "an" and "an" do not exclude the presence of a plurality of elements.

[0096] It should also be noted that in the embodiments of the present invention, for the sake of clarity and simplicity, only a portion of the parts or components may be shown, but those of ordinary skill in the art will understand that under the teachings of the present invention, the required parts or components may be added according to the needs of the specific scenario. In addition, unless otherwise specified, the features in different embodiments of the present invention may be combined with each other. For example, a feature in the second embodiment may be used to replace a corresponding or functionally identical or similar feature in the first embodiment, and the resulting embodiment also falls within the disclosure scope or recorded scope of the present application.

[0097] It should also be noted that within the scope of the present invention, the terms "same", "equal", "equal to" and the like do not mean that the values ​​of the two are absolutely equal, but allow a certain reasonable error, that is, the terms also cover "substantially the same", "substantially equal", "substantially equal to". By analogy, in the present invention, the terms "perpendicular to", "parallel to" and the like indicating directions also cover the meanings of "substantially perpendicular to" and "substantially parallel to".

[0098] In the present application, the term "configuration" refers to the setting of the shape, structure, material and / or function of the target object to achieve the desired technical effect, wherein "configuration" includes a variety of alternative technical means for achieving the technical effect, which become obvious under the teaching of the present application.

[0099] In addition, the numbering of the steps of the methods of the present invention does not limit the execution order of the method steps. Unless otherwise specified, the method steps can be executed in different orders.

[0100] The present invention will be further described below in conjunction with specific embodiments with reference to the accompanying drawings.

[0101] Figure 1 FIG. 1 is a schematic diagram showing a structure of an image quality correction system for an optical waveguide used in a near-eye display system in an embodiment of the present invention. Figure 1 As shown, the image quality correction system includes an optical waveguide module 101 , a fixture carrier 102 , an optical measurement system (which includes a position adjustment device 103 and an optical measurement instrument 104 ), a signal generator 105 and a computer system 106 .

[0102] In some embodiments, the near-eye display system may be virtual reality glasses, augmented reality glasses, and smart glasses.

[0103] In some embodiments, the optical waveguide module 101 is a monocular waveguide module or a binocular waveguide module.

[0104] In some embodiments, the fixture carrier 102 is configured to carry the optical waveguide module 101 .

[0105] In some embodiments, the optical instrument 104 is disposed on the optical coupling-out side of the optical waveguide module 101, and the optical measuring instrument 104 is used to obtain the display image of the optical waveguide module 101. The optical measuring instrument 104 can perform pixel-level brightness and color extraction on the optical waveguide module 101, and has high resolution, pixel density (PPD), image resolution and low noise. In some embodiments, the optical instrument measuring device is a camera with a NED (Near Eye Display) lens.

[0106] The optical measuring instrument 104 is electrically connected to the computer system 106 via an optical instrument communication line. The optical instrument communication line may be a USB line, an Ethernet line, a Camera Link line, a CXP line, etc., depending on the interface type of the optical measuring instrument 104. Through the optical instrument communication line, the optical measuring instrument 104 can transmit the acquired image information to the computer system 106, and the computer system 106 can process the image information acquired by the optical measuring instrument 104.

[0107] In some embodiments, the position adjustment device 103 is configured to support the optical measuring instrument 104 and is configured to adjust the distance and deflection angle of the optical measuring instrument 104 relative to the optical waveguide module 101. In some embodiments, the position adjustment device 103 includes a six-axis moving device, wherein the six-axis moving device is configured to move the optical measuring instrument in six degrees of freedom. In some embodiments, the movement in six degrees of freedom includes: translation along the x-axis, translation along the y-axis, translation along the z-axis, rotation along the x-axis, rotation along the y-axis, and rotation along the z-axis, wherein the x, y, and z axes are coordinate axes of a spatial rectangular coordinate system.

[0108] In some embodiments, the signal generator 105 is electrically connected to the optical waveguide module 101 and the computer system 106. The signal generator 105 is configured to control the opening and closing of the optical waveguide module 101, and read and write data to the non-volatile memory of the optical waveguide module 101. The computer system 106 is configured to control the signal generator 105 and the optical measuring instrument 104, and perform data processing.

[0109] Figure 2 FIG. 1 is a flow chart showing a method for correcting image quality of an optical waveguide for a near-eye display system in accordance with an embodiment of the present invention. Figure 2 As shown, the method comprises the following steps:

[0110] Step 201 : placing the optical waveguide module 101 on the fixture carrier 102 , and lighting the optical waveguide module 101 through the signal generator 105 .

[0111] Step 202 : The position adjustment device 103 drives the optical measuring instrument 104 to move to the first side eye point position of the optical waveguide module 101 , and adjusts the near-eye display (NED) lens of the optical measuring instrument 104 to focus the image.

[0112] Step 203 : The computer system 106 obtains first target grayscale brightness data displayed by the optical waveguide module 101 at the first side eye point position, and performs demura pre-processing to generate first data.

[0113] Step 204 : The position adjustment device 103 drives the optical measuring instrument 104 to move to the second side eye point position of the optical waveguide module 101 , and adjusts the near-eye display lens of the optical measuring instrument 104 to focus the image.

[0114] Step 205 : The computer system 106 obtains second target grayscale brightness data displayed by the optical waveguide module 101 at the second side eye point position, and performs pre-image quality correction processing to generate second data.

[0115] Step 206 : The computer system 106 performs image quality correction post-processing according to the first data and the second data to generate first image quality correction compensation data and second image quality correction compensation data.

[0116] Step 207: The signal generator 105 loads the first image quality correction compensation data and the second image quality correction compensation data into the driving circuit non-volatile memory (ICF l ash) of the optical waveguide module.

[0117] Step 208 : Light up the optical waveguide module 101 according to the first image quality correction compensation data and the second image quality correction compensation data, and perform image quality compensation evaluation on the optical waveguide module 101 .

[0118] Figure 3 FIG. 1 is a schematic diagram showing a flow chart of image quality compensation evaluation for an optical waveguide module in one embodiment of the present invention. Figure 3 shown, including:

[0119] Step 301 : Light up the optical waveguide module 101 according to the first image quality correction compensation data and the second image quality correction compensation data.

[0120] Step 302 : The position adjustment device 103 drives the optical measuring instrument 104 to move to the first side eye point position of the optical waveguide module 101 , and adjusts the near-eye display lens of the optical measuring instrument 104 to focus the image.

[0121] Step 303 : The computer system 106 obtains first display target grayscale brightness evaluation data of the optical waveguide module 101 at a first side eye point position.

[0122] Step 304 : The position adjustment device 103 drives the optical measuring instrument 104 to move to the second side eye point position of the optical waveguide module 101 , and adjusts the near-eye display lens of the optical measuring instrument 104 to focus the image.

[0123] Step 305 : The computer system 106 obtains second display target grayscale brightness evaluation data of the optical waveguide module 101 at the second side eye point position.

[0124] Step 306 : The computer system 106 fuses the first display target grayscale brightness evaluation data and the second display target grayscale brightness evaluation data, and performs image quality compensation evaluation.

[0125] In one embodiment of the present invention, a near-eye display module is further provided, which is configured to perform image quality correction according to the image quality correction method for an optical waveguide used in a near-eye display system. Figure 4 FIG. 1 is a schematic diagram showing a process flow of image quality correction for a near-eye display module in one embodiment of the present invention. Figure 4 As shown, it includes the following steps:

[0126] S1. Burn and store the compensation data in the non-volatile memory (Flash) of the optical engine.

[0127] S2. Decompress the compensation data by the compensation data memory (Demura RAM).

[0128] S3. The algorithm IP module (Demura IP ctl) performs parameter mapping on the compensation data.

[0129] After the compensation data memory decompresses the compensation data, the algorithm IP module performs parameter mapping on the decompressed compensation data. The algorithm IP module is a customized circuit module that performs algorithm tasks, which is used to generate an image based on parameter mapping after decompression. In some embodiments, the parameter mapping includes spatial mapping, grayscale mapping, and feature mapping. Among them, spatial mapping refers to mapping pixels in an image from one coordinate system to another coordinate system. Grayscale mapping refers to adjusting the brightness or contrast of an image and mapping the grayscale value of a pixel to a new grayscale value. Feature mapping refers to mapping the features of an image (such as edges, textures, etc.) to a new feature space.

[0130] The near-eye display module has a micro-LED chip for emitting light. The size of the micro-LED chip does not exceed 1 cm, preferably does not exceed 20 microns. The micro-LED structure is formed in the micro-LED chip 102 in an array form, with a resolution of, for example, 720*480, 640*480, 1920*1080, 1280*720, 2K or 4K. The diameter of the micro-LED structure is at the nanometer level, for example, 20nm to 100nm.

[0131] The micro-LED chip includes a pixel driving backplane (e.g., an IC backplane) and an active area arranged on the pixel driving backplane, wherein the active area includes a pixel array formed by micro-LEDs, and the pixel array includes a plurality of micro-LED pixels. Each pixel may include one or more micro-LEDs. That is, each micro-LED may form at least a portion of a pixel element on the micro-LED chip. For example, each pixel may include a micro-LED of one color, whereby the active area of ​​the micro-LED chip is a monochrome pixel array. Alternatively, each pixel may include micro-LEDs of two or more colors, whereby the active area of ​​the micro-LED chip is a color pixel array.

[0132] In some embodiments, the IC backplane can be electrically connected to each micro-LED in the micro-LED array via separate metal interconnects. In some embodiments, each micro-LED can be electrically controlled individually by the IC backplane. In some embodiments, the IC backplane can be electrically connected to the electrodes of the micro-LED chip via metal interconnects. In some embodiments, a dielectric layer can be formed in the gaps between the micro-LEDs. In some embodiments, a dielectric layer can also be formed in the gaps between the interconnects.

[0133] In some embodiments, the IC backplane is provided with an array of drive circuits. Each drive circuit is a pixel driver. In some cases, the drive circuit is a thin film transistor pixel driver or a silicon CMOS pixel driver. The drive circuits form individual pixel drivers to control the operation of individual multi-color Micro-LED pixels.

[0134] The micro LED chip includes a plurality of micro LED arrays, each of which includes a plurality of micro LEDs. The driving mode of the micro LEDs is, for example, passive matrix (PM) driving, wherein the cathodes of all the micro LEDs in each array are connected to the cathode line NL, and the micro LEDs with the same number in each array are connected to the corresponding anode line PL. Thus, the on / off and the light emitting brightness of each LED can be individually controlled by controlling the model numbers on the corresponding cathode line and anode line.

[0135] In some embodiments, each micro-light emitting diode in the micro-light emitting diode array may include a micron-scale light-emitting mesa structure. In some embodiments, the micron-scale light-emitting mesa structure may include a first type epitaxial layer (or first epitaxial layer), a light-emitting layer, and a second type epitaxial layer (or second epitaxial layer) from bottom to top. That is, in the three-layer structure, the first type epitaxial layer is closest to the IC backplane; the light-emitting layer is located above the first type epitaxial layer and is further away from the IC backplane; the second type epitaxial layer is located above the light-emitting layer and is farthest away from the IC backplane. In some embodiments, the light-emitting layer is formed by a plurality of stacked quantum well layers, in particular, quantum well layers stacked in a superlattice. Preferably, the quantum well layers stacked in a superlattice include a plurality of pairs of quantum well layers stacked with quantum barrier layers. In one embodiment of the present invention, the quantum well layer is an InGaN / GaN multi-quantum well layer or an InGaN / Al GaN multi-quantum well layer or an InGaAs / Al GaAs multi-quantum well layer. In one embodiment of the present invention, the light-emitting layer further comprises an electron blocking layer, and the electron blocking layer is disposed on a first side of the light-emitting layer, where the first side refers to a side along which electrons migrate out of the light-emitting layer.

[0136] In some embodiments, the first type epitaxial layer is a semiconductor material having a first conductivity type and includes a plurality of semiconductor layers. The main matrix material of the first type epitaxial layer may be, but is not limited to, Ga, N, As, P, In, or Al. In addition, the first type epitaxial layer may include, from top to bottom, but is not limited to, a waveguide layer, a confinement layer, a transition layer, and a window layer; in addition, an ohmic contact layer may be formed below the window layer. In some embodiments, the second type epitaxial layer is a semiconductor material having a second conductivity type and includes a plurality of semiconductor layers. The main matrix material of the second type epitaxial layer may be, but is not limited to, Ga, N, As, P, In, or Al. In addition, the first type epitaxial layer may include, from top to bottom, but is not limited to, a confinement layer and a waveguide layer; in addition, in some embodiments, an ohmic contact layer may be formed on the confinement layer. In one embodiment of the present invention, the first type epitaxial layer is an N-type GaN layer or an N-type Al GaN layer, and the second type epitaxial layer is a P-type GaN layer or a P-type Al GaN layer. In another embodiment of the present invention, the first type epitaxial layer may also be a P-type GaN layer or a P-type AlGaN layer, and the second type epitaxial layer may be an N-type GaN layer or an N-type AlGaN layer. In an embodiment of the present invention, the semiconductor light-emitting mesa 501 is stepped or trapezoidal. In some embodiments, the micron-scale light-emitting mesa structure may emit red light, blue light, green light, or light of any other color.

[0137] In some embodiments, a top conductive layer can be formed on the top surface of the micro light emitting diode array. In some embodiments, the top conductive layer can be shared by all micro light emitting diodes in the micro light emitting diode array.

[0138] In one embodiment of the present invention, the top conductive layer can be shared by all micro-LEDs in the micro-LED array. In one embodiment of the present invention, the top conductive layer is disposed above the micro-LED array, and contacts and covers the top of each light-emitting mesa, and is in electrical contact with the second epitaxial layer of the light-emitting mesa, so as to connect the second epitaxial layers of each semiconductor light-emitting mesa 1 in series, and is a transparent conductive layer.

[0139] In one embodiment of the present invention, the micro-LED array further comprises a passivation insulating layer. The passivation insulating layer covers the surface and side of the light-emitting mesa, but exposes at least part of the surface of the second epitaxial layer, and the top conductive layer is arranged on the surface of the passivation insulating layer. In one embodiment of the present invention, the passivation insulating layer can be formed by CVD deposition of SiO2 or ALD deposition of Al2O3 film layer to effectively reduce the chip leakage rate. In some embodiments of the present invention, the passivation insulating layer only covers the side of the light-emitting mesa, but not the top surface of the light-emitting mesa, and the highest point of the passivation insulating layer is flush with the top surface of the light-emitting mesa. In these embodiments, the continuous top conductive layer covering the top of the light-emitting mesa is in a horizontal or substantially horizontal plane. In some embodiments of the present invention, the passivation insulating layer not only covers the side of the light-emitting mesa, but also covers the edge of the top surface of the light-emitting mesa, so that there is a bulge at the top edge of the light-emitting mesa, so that the continuous top conductive layer covering it also forms a bulge at the top edge of the light-emitting mesa.

[0140] As mentioned above, there are partitions between the pixels formed by each light-emitting mesa, and a second electrode is arranged at the partition, and the second electrode is arranged on the surface of the top conductive layer. In one embodiment of the present invention, the second electrode is a ring-shaped reflective electrode, which is arranged around the light-emitting mesa, and is formed by magnetron sputtering or evaporation, and its material, for example, can use Al or Al alloy metal as a side wall reflector, and the electrode stack metal can be Ni, Al, Ti, Ni, Pt, Au and other metal materials. In one embodiment of the present invention, each second electrode is connected to each other. In some embodiments of the present invention, a deep groove is arranged at the partition between two adjacent light-emitting mesas, and the deep groove runs through the micro-light-emitting diode array, and the second electrode is arranged at the deep groove. In some embodiments of the present invention, a deep groove is not provided at the partition between two adjacent light-emitting mesas, but a passivation isolation layer and a top conductive layer are directly formed, so that the surface of the top conductive layer between two adjacent light-emitting mesas is a horizontal or substantially horizontal plane, the second electrode is formed here, and its morphological interface is a trapezoid or approximately a trapezoid, and the surface of the second electrode is not higher than the highest point of the continuous top conductive layer.

[0141] In one embodiment of the present invention, the micro-LED array is bonded to the driving backplane through a metal bonding layer and is electrically connected to the IC copper pillar on the driving backplane. In one embodiment of the present invention, the IC copper pillar includes a first IC copper pillar and a second IC copper pillar, wherein the first IC copper pillar is electrically connected to the first epitaxial layer of the semiconductor light-emitting module in a one-to-one correspondence. The second IC copper pillar is electrically connected to the first electrode 6. In one embodiment of the present invention, the polarity of the first electrode is opposite to that of the second electrode. In one embodiment of the present invention, each semiconductor light-emitting module has a common first electrode. The first electrode may be, for example, a P electrode or an anode electrode, and the second electrode is an electrode with an opposite polarity to the first electrode 506, such as an N electrode or a cathode electrode. In one embodiment of the present invention, the first and second electrodes and their connecting parts may be made of materials such as graphene, ITO, aluminum-doped zinc oxide (AZO) or fluorine-doped tin oxide (FTO) or any combination of the above materials. In another embodiment of the present invention, the first and second electrodes and their connecting parts may be made of non-transparent or transparent conductive materials, such as indium tin oxide (ITO).

[0142] In some embodiments, the light emitting layer may include at least one quantum well layer. In some embodiments, the micro-LED array may include a single-layer micro-LED structure. In some embodiments, the micro-LED array may include multiple layers of vertically stacked micro-LED structures.

[0143] In some embodiments, the micro-LED array may include micro-LEDs of one or more colors. In some embodiments, the pitch of the micro-LED array, i.e., the minimum center-to-center distance between the micro-LEDs, may be between about 2 microns and about 50 microns. In some embodiments, the number of pixels on a micro-LED chip may be between thousands and millions.

[0144] In some embodiments, the microlens is disposed on the micro-LED array, and the lateral dimension of the bottom of the microlens is larger than the lateral dimension of the light-emitting area of ​​the micro-LED, or the lateral dimension of the bottom of the microlens can be less than or equal to the lateral dimension of the light-emitting area of ​​the micro-LED.

[0145] In some embodiments, a microlens can cover one or more lens-free micro-LEDs. A plurality of microlenses constitute a microlens array. The microlenses in the microlens array are usually the same. Examples of microlenses include spherical microlenses, aspherical microlenses, Fresnel microlenses, and cylindrical microlenses. The individual microlenses in the microlens array of the micro-LED chip 102 can be the same or different in shape, curvature, optical power, size, base, spacing, etc.

[0146] In some embodiments, the microlens can be made of various materials that are transparent to the wavelengths of light emitted by the micro-LED. Exemplary transparent materials for the microlens include polymers, dielectric materials. In some embodiments, the dielectric material includes one or more materials such as silicon oxide, silicon nitride, silicon carbide, titanium oxide, zirconium oxide, aluminum oxide, etc. In some embodiments, the microlens is made of photoresist. In some embodiments, the microlens is directly deposited on the surface of the micro-LED by chemical vapor deposition (CVD) technology.

[0147] Although various embodiments of the present invention are described above, it should be understood that they are presented as examples only and not as limitations. It is obvious to those skilled in the relevant art that various combinations, modifications and changes can be made thereto without departing from the spirit and scope of the present invention. Therefore, the breadth and scope of the present invention disclosed herein should not be limited by the exemplary embodiments disclosed above, but should only be defined according to the attached claims and their equivalents.

Claims

1. A method for correcting image quality of an optical waveguide for a near-eye display system, characterized in that: The following steps are involved: Acquiring a display image of the optical waveguide module; Acquire display target grayscale brightness data according to the display image; Performing pre-image quality correction processing on the grayscale brightness data to generate pre-correction data; as well as Image quality correction processing is performed according to the pre-correction data to generate image quality correction compensation data.

2. The image quality correction method of the optical waveguide for the near-eye display system according to claim 1, characterized in that: The optical waveguide module is a monocular waveguide module or a binocular waveguide module, wherein obtaining a display image of the binocular waveguide module comprises: A first display image at a first side eye point position and a second display image at a second side eye point position of the optical waveguide module are acquired.

3. The image quality correction method of the optical waveguide for the near-eye display system according to claim 2, characterized in that: Acquiring a first display image at a first side eye point position of the optical waveguide module comprises the following steps: Placing the optical waveguide module on a fixture carrier and lighting the optical waveguide module; Moving the optical measuring instrument to the first side eye point position of the optical waveguide module; as well as The near-eye display lens of the optical measuring instrument is adjusted so that the near-eye display lens is focused and aligned with the optical waveguide module to obtain the first display image.

4. The image quality correction method of the optical waveguide for the near-eye display system according to claim 3, characterized in that: Acquiring a second display image at a second side eye point position of the optical waveguide module comprises the following steps: moving the optical measuring instrument to the second side eye point position of the optical waveguide module; and The near-eye display lens of the optical measuring instrument is adjusted so that the near-eye display lens is focused and aligned with the optical waveguide module to obtain the second display image.

5. The image quality correction method of the optical waveguide for the near-eye display system according to claim 3 or 4, characterized in that: The relative position between the optical measuring instrument and the waveguide module is adjusted by a position adjusting device to move the optical measuring instrument to a first side eye point position or a second side eye point position of the optical waveguide module.

6. The image quality correction method of the optical waveguide for the near-eye display system according to claim 2, characterized in that: Acquiring display target grayscale brightness data according to the display image includes: First display target grayscale brightness data is acquired according to the first display image, and second display target grayscale brightness data is acquired according to the second display image.

7. The image quality correction method of the optical waveguide for the near-eye display system according to claim 6, characterized in that: Performing pre-image quality correction processing on the grayscale brightness data to generate pre-correction data includes: The first display target grayscale brightness data is processed before image quality correction to generate first pre-correction data, and the second display target grayscale brightness data is processed before image quality correction to generate second pre-correction data.

8. The image quality correction method of the optical waveguide for the near-eye display system according to claim 7, characterized in that: Performing image quality correction processing according to the pre-correction data to generate image quality correction compensation data includes: An image quality correction process is performed based on the first pre-correction data to generate first image quality correction compensation data, and an image quality correction process is performed based on the second pre-correction data to generate second image quality correction compensation data.

9. The image quality correction method of the optical waveguide for the near-eye display system according to claim 8, characterized in that: The computer system performs image quality pre-correction processing on the first display target grayscale brightness data to generate first pre-correction data, and performs image quality pre-correction processing on the second display target grayscale brightness data to generate second pre-correction data, The computer system performs image quality correction processing on the first pre-correction data to generate first image quality correction compensation data, and performs image quality correction processing on the second pre-correction data to generate second image quality correction compensation data.

10. The image quality correction method of the optical waveguide for the near-eye display system according to claim 8, characterized in that: Also includes: The optical waveguide module is illuminated according to the image quality correction compensation data, and image quality compensation evaluation is performed on the optical waveguide module.

11. The image quality correction method of the optical waveguide for the near-eye display system according to claim 10, characterized in that: Lighting up the optical waveguide module according to the image quality correction compensation data comprises: The optical waveguide module is illuminated according to the first image quality correction compensation data and the second image quality correction compensation data.

12. The image quality correction method of the optical waveguide for the near-eye display system according to claim 11, characterized in that: Lighting up the optical waveguide module according to the first image quality correction compensation data and the second image quality correction compensation data comprises the following steps: The signal generator loads the first image quality correction compensation data and the second image quality correction compensation data into the non-volatile memory of the driving circuit of the optical waveguide module; The first image quality correction compensation data and the second image quality correction compensation data are called to light up the optical waveguide module.

13. The image quality correction method of the optical waveguide for the near-eye display system according to claim 12, characterized in that: The image quality compensation evaluation of the optical waveguide module includes the following steps: Moving the optical measuring instrument to the first side eye point position of the optical waveguide module; adjusting a near-eye display lens of the optical measuring instrument so that the near-eye display lens is focused and aligned with the optical waveguide module to obtain a first display target evaluation image; The computer system acquires first display target grayscale brightness evaluation data according to the first display target evaluation image; Moving the optical measuring instrument to the second side eye point position of the optical waveguide module; adjusting a near-eye display lens of the optical measuring instrument so that the near-eye display lens is focused and aligned with the optical waveguide module to obtain a second display target evaluation image; The computer system acquires second display target grayscale brightness evaluation data according to the second display target evaluation image; The computer system fuses the first display target grayscale brightness evaluation data and the second display target grayscale brightness evaluation data, and performs image quality compensation evaluation.

14. The image quality correction method of the optical waveguide for the near-eye display system according to claim 13, characterized in that: Image quality compensation evaluation includes evaluating the high-frequency discreteness and global brightness of the image.

15. An image quality correction system for an optical waveguide used in a near-eye display system, characterized in that: include: Optical waveguide module; an optical measurement system configured to acquire a display image of the optical waveguide module; as well as A control system configured to perform the following actions: Acquire display target grayscale brightness data according to the display image; Performing pre-image quality correction processing on the grayscale brightness data to generate pre-correction data; and Image quality correction processing is performed according to the pre-correction data to generate image quality correction compensation data.

16. The image quality correction system for the optical waveguide of the near-eye display system according to claim 15, characterized in that: Also includes: A fixture carrier is configured to carry the optical waveguide module.

17. The image quality correction system of the optical waveguide for the near-eye display system according to claim 15, characterized in that: The optical measurement system comprises: an optical measuring instrument, located at a light coupling-out side of the optical waveguide module, the optical measuring instrument being configured to acquire a display image of the optical waveguide module; and The position adjustment device is configured to support the optical measuring instrument and to adjust the distance and deflection angle of the optical measuring instrument relative to the optical waveguide module.

18. The image quality correction method of the optical waveguide for the near-eye display system according to claim 17, characterized in that: The position adjustment device includes a six-axis moving device, wherein the six-axis moving device is configured to move the optical measuring instrument in six degrees of freedom.

19. The image quality correction method of the optical waveguide for the near-eye display system according to claim 18, characterized in that: Movement in six degrees of freedom includes: Translation along the x-axis; Translation along the y-axis; Translation along the z-axis; Rotation along the x-axis; rotation along the y-axis; and Rotation along the z-axis, where the x, y, and z axes are the coordinate axes of the spatial rectangular coordinate system.

20. The image quality correction system for a near-eye display system optical waveguide according to claim 15, characterized in that: The control system comprises: a signal generator configured to control the opening and closing of the optical waveguide module, and to read and write data into a non-volatile memory of the optical waveguide module; as well as A computer system is configured to control the signal generator and the optical measurement system and perform data processing.

21. The image quality correction system for a near-eye display system optical waveguide according to any one of claims 15 to 20, characterized in that: The near-eye display system comprises: Virtual reality glasses, augmented reality glasses, and smart glasses.

22. A near-eye display module, characterized in that: The near-eye display module is configured to perform image quality correction according to the image quality correction method for an optical waveguide of a near-eye display system according to one of claims 1-14.

23. The near-eye display module according to claim 22, characterized in that: The near-eye display module includes a micro light emitting diode chip, and the micro light emitting diode chip is used for luminous imaging.

24. The near-eye display module according to claim 23, characterized in that: The micro light emitting diode chip comprises: Pixel driver backplane; A light-emitting semiconductor module is arranged on the pixel driving backplane, and comprises a light-emitting layer, a first epitaxial layer closer to the pixel driving backplane than the light-emitting layer, and a second epitaxial layer farther from the pixel driving backplane than the light-emitting layer; An insulating layer, which is arranged on the light-emitting semiconductor module, and the insulating layer is provided with an opening at a position located on the second epitaxial layer; a transparent conductive layer, which is arranged on the insulating layer, and the transparent conductive layer is electrically connected to the light-emitting semiconductor module through the opening; and The microlens is arranged on the insulating layer and the transparent conductive layer at a position above the light emitting semiconductor module.

25. The near-eye display module according to claim 24, characterized in that: The micro light emitting diode chip further comprises: A metal bonding layer is arranged between the pixel driving backplane and the light emitting semiconductor module to bond the pixel driving backplane and the light emitting semiconductor module together.

26. The near-eye display module according to claim 24, characterized in that: The micro light emitting diode chip further comprises: A first electrode electrically connected to the integrated circuit backplane; and The second electrode is arranged on the transparent conductive layer connection surface and is electrically connected to the light emitting semiconductor module through the transparent conductive layer. The pixel driving backplane is provided with a plurality of integrated circuit copper pillars, wherein the light emitting semiconductor module is located above the integrated circuit copper pillars, and the first electrode is electrically connected to the pixel driving backplane through the integrated circuit copper pillars.

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