Photomask

Abstract

A photomask is disclosed. The photomask includes a transmission portion configured to transmit light and a blocking portion configured to block light; wherein the blocking portion includes a first zigzag portion and a first portion extending from the first zigzag portion, the first portion includes a first vertical portion and a first inclined portion extending obliquely from the first vertical portion, and an entirety of the first portion including the first vertical portion and the first inclined portion has the same constant width, the overall constant width of the first portion includes a width perpendicular to the extending direction of the first vertical portion and the extending direction of the first inclined portion, and the constant width of the first portion is larger than the width of the first zigzag portion.

Description

[0001] This application is a divisional application of the Chinese patent application with application number 202010101689.2 filed on February 19, 2020 and invention name “Display device, photomask and method for manufacturing display device”.

[0002] CROSS-REFERENCE TO RELATED APPLICATIONS

[0003] This application claims priority to and the benefit of Korean Patent Application No. 10-2019-0038044, filed on April 1, 2019, in the Korean Intellectual Property Office, the entire contents of which are incorporated herein by reference. Technical Field

[0004] Some example embodiments of the present disclosure relate to a display device, a photomask, and a method of manufacturing the display device. Background Art

[0005] Display devices such as organic light emitting diode displays and liquid crystal displays have been widely used. Generally, a display device includes a plurality of pixels and a driving unit as a unit for displaying an image. The driving unit includes a data driver for applying a data voltage to the pixels, and a gate driver for applying a gate signal for controlling the transmission of the data voltage.

[0006] The gate driver and the data driver may be mounted on a printed circuit board (PCB) in chip form to be connected to the display panel. Alternatively, in the case where a gate driver with high mobility of the channel of the thin film transistor is not required, it may be integrated on the display panel without forming it as a separate chip.

[0007] The above information disclosed in this Background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not constitute prior art. Summary of the invention

[0008] Aspects of some example embodiments may include a display device and a method of manufacturing the display device, in which dead spots are minimized or reduced and brightness is relatively uniform throughout a display area.

[0009] Aspects of some example embodiments may include a photomask capable of preventing or reducing open defects caused by disconnection of fan-out lines or shorts between adjacent fan-out lines during fan-out wiring patterning.

[0010] According to some example embodiments, a display device includes a substrate, a first wiring layer, a second wiring layer, a data fan-out, and a data flexible printed circuit board, the substrate including a display area and a peripheral area; the first wiring layer is configured to transmit a gate signal in the display area; the second wiring layer is configured to transmit a data voltage in the display area; the data fan-out includes a first data fan-out line connected to the second wiring layer; and the data flexible printed circuit board is electrically connected to the first data fan-out line in the peripheral area, wherein the first data fan-out line includes a first zigzag portion having a zigzag shape and a first straight portion extending from the first zigzag portion, and a width of the first straight portion is greater than a width of the first zigzag portion.

[0011] According to some example embodiments, the data fan-out may further include a second data fan-out line adjacent to the first data fan-out line, the second data fan-out line may include a second zigzag portion having a zigzag shape and a second straight portion extending from the second zigzag portion, each of the first zigzag portion and the second zigzag portion may include a portion extending in a first direction and a portion extending in a second direction intersecting the first direction, and a minimum distance between the first zigzag portion and the second zigzag portion may be greater than a distance between portions extending in the first direction of the first zigzag portion.

[0012] According to some example embodiments, the second data fan-out line may be closer to the center of the data fan-out than the first data fan-out line, and a length of the second zigzag portion may be longer than a length of the first zigzag portion.

[0013] According to some example embodiments, a length of the first straight portion may be longer than a length of the second straight portion.

[0014] According to some example embodiments, a width of the first data fan-out line may be greater than a width of the second data fan-out line.

[0015] According to some example embodiments, the gate flexible printed circuit board may include a data driving integrated circuit.

[0016] According to some example embodiments, the display device may further include a gate driver positioned in the peripheral area.

[0017] According to some example embodiments, the display device may further include a gate fan-out and a gate flexible printed circuit board, the gate fan-out including a first gate fan-out line connected to the first wiring layer, and the gate flexible printed circuit board is electrically connected to the first gate fan-out line in a peripheral area of ​​the substrate, wherein the first gate fan-out line may include a third zigzag portion having a zigzag shape and a third straight portion extending from the third zigzag portion, and a width of the third straight portion may be greater than a width of the third zigzag portion.

[0018] According to some example embodiments, the gate fan-out may further include a second gate fan-out line adjacent to the first gate fan-out line, the second gate fan-out line may include a fourth zigzag portion having a zigzag shape and a fourth straight portion extending from the fourth zigzag portion, each of the third zigzag portion and the fourth zigzag portion may include a portion extending in a first direction and a portion extending in a second direction intersecting the first direction, and a minimum distance between the third zigzag portion and the fourth zigzag portion may be greater than a distance between portions of the second zigzag portion extending in the second direction.

[0019] According to some example embodiments, the second gate fan-out line may be closer to the center of the gate fan-out than the first gate fan-out line, and a length of the fourth zigzag portion may be longer than a length of the third zigzag portion.

[0020] According to some example embodiments, a length of the third straight line portion may be longer than a length of the fourth straight line portion.

[0021] According to some example embodiments, a width of the first gate fan-out line may be greater than a width of the second gate fan-out line.

[0022] According to some example embodiments, a photomask includes a transmitting portion configured to transmit light and a blocking portion configured to block light, wherein the blocking portion may include a first zigzag portion having a zigzag shape and a first straight portion extending from the first zigzag portion, and a width of the first straight portion may be greater than a width of the first zigzag portion.

[0023] According to some example embodiments, the blocking portion may include a first slit, and the first slit may extend from the first zigzag portion to the first straight portion.

[0024] According to some example embodiments, the blocking portion may further include a second zigzag portion, a second straight portion, and a second slit, the second zigzag portion having a zigzag shape, the second straight portion extending from the second zigzag portion, and the second slit extending from the second zigzag portion to the second straight portion, wherein each of the first zigzag portion and the second zigzag portion may include a portion extending in a first direction and a portion extending in a second direction intersecting the first direction, and a minimum distance between the first zigzag portion and the second zigzag portion may be greater than a distance between portions of the first zigzag portion extending in the first direction.

[0025] According to some example embodiments, a length of the second zigzag portion may be longer than a length of the first zigzag portion.

[0026] According to some example embodiments, in a method for manufacturing a display device, the method includes: forming a conductive layer on a substrate; forming a photoresist film on the conductive layer; forming a photoresist pattern by exposing and developing the photoresist film using a photomask; and forming a zigzag portion and a straight portion of a fan-out line by etching the conductive layer, and a width of the straight portion of the fan-out line may be greater than a width of the zigzag portion of the fan-out line.

[0027] According to some example embodiments, a photomask may include a blocking portion having a shape corresponding to a fan-out line and a transmissive portion as an outer region, and the blocking portion may include a slit formed along a direction in which the blocking portion extends.

[0028] According to some example embodiments, a width of the fan-out line formed when forming the zigzag portion and the straight portion of the fan-out line may be smaller than a width of the blocking portion of the photomask.

[0029] According to some example embodiments, the fan-out line may be electrically connected to a data driving integrated circuit or a gate driving integrated circuit.

[0030] According to some example embodiments, even when the distance between the flexible printed circuit board and the display area is narrow, uniform brightness may be obtained throughout the entire display area, and a dead zone may be reduced.

[0031] Furthermore, by adjusting the width of the fan-out lines or the distance between the fan-out lines, open defects caused by disconnection of the fan-out lines or short circuits between adjacent fan-out lines can be prevented or reduced.

[0032] In addition, when forming the fan-out lines, the resolution of the photomask may be increased by using a photomask including slits.

[0033] According to some example embodiments, a photomask includes a transmitting portion configured to transmit light and a blocking portion configured to block light; wherein the blocking portion includes a first zigzag portion and a first portion extending from the first zigzag portion, the first portion includes a first vertical portion and a first inclined portion extending obliquely from the first vertical portion, the first portion including the first vertical portion and the first inclined portion has the same constant width as a whole, the constant width of the first portion as a whole includes a width perpendicular to an extension direction of the first vertical portion and an extension direction of the first inclined portion, and the constant width of the first portion is greater than a width of the first zigzag portion.

[0034] According to some example embodiments, the blocking portion may further include a first slit extending from the first zigzag portion to the first portion.

[0035] According to some example embodiments, the first slit may be disposed along a center of the barrier portion with respect to a width direction.

[0036] According to some example embodiments, the first vertical portion may extend from the first zigzag portion in a vertical direction.

[0037] According to some example embodiments, the blocking portion may further include a second zigzag portion adjacent to the first zigzag portion in the horizontal direction and a second portion extending from the second zigzag portion; wherein each of the first zigzag portion and the second zigzag portion includes a portion extending in the horizontal direction and a portion extending in the vertical direction, and wherein a distance between the first zigzag portion and the second zigzag portion is greater than a distance between portions of the first zigzag portion extending in the horizontal direction.

[0038] According to some example embodiments, a distance between the first zigzag portion and the second zigzag portion may be smaller than a distance between portions of the first zigzag portion extending in a vertical direction.

[0039] According to some example embodiments, wherein the second portion may include a second vertical portion and a second inclined portion extending obliquely from the second vertical portion, the entirety of the second portion including the second vertical portion and the second inclined portion may have the same constant width, the constant width of the entirety of the second portion may include a width perpendicular to an extension direction of the second vertical portion and an extension direction of the second inclined portion, and the constant width of the second portion may be greater than a width of the second zigzag portion.

[0040] According to some example embodiments, the constant width of the first portion may be greater than the width of the second zigzag portion, and the constant width of the second portion may be greater than the width of the first zigzag portion.

[0041] According to some example embodiments, a length of the second zigzag portion may be longer than a length of the first zigzag portion.

[0042] According to some example embodiments, a length of the first portion may be longer than a length of the second portion.

[0043] According to some example embodiments, the blocking portion may further include a second slit extending from the second zigzag portion to the second portion.

[0044] According to some example embodiments, the second slit may be disposed along a center of the barrier portion with respect to a width direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 A schematic block diagram of a display device according to some example embodiments is shown.

[0046] Figure 2 Shows Figure 1 An enlarged plan view of a portion A of a display device shown in FIG.

[0047] Figure 3 A top view of some of the data fan-out lines is shown.

[0048] Figure 4 A block diagram of a display device according to some example embodiments is shown.

[0049] Figure 5 Shows Figure 4 An enlarged plan view of a portion B of the display device shown in FIG.

[0050] Figure 6 A top view of some gate fan-out lines is shown.

[0051] Figure 7 is a flowchart illustrating a method of manufacturing a display device according to some example embodiments.

[0052] Figure 8 A top view of a photomask used in a method of manufacturing a display device according to some example embodiments is illustrated.

[0053] Figures 9 to 12 Cross-sectional views illustrating each process step of a method of manufacturing a display device according to some example embodiments are illustrated. DETAILED DESCRIPTION

[0054] Hereinafter, various aspects of some example embodiments will be described in more detail with reference to the accompanying drawings, wherein the same reference numerals always indicate the same elements. However, the present invention can be implemented in various different forms and should not be interpreted as being limited only to the embodiments shown herein. On the contrary, these embodiments are provided as examples so that this disclosure will be thorough and complete, and the aspects and features of the present invention will be fully conveyed to those skilled in the art. Accordingly, processes, elements and techniques that are not necessary for a person of ordinary skill in the art to fully understand the aspects and features of the present invention may not be described. Unless otherwise stated, the same reference numerals represent the same elements throughout the drawings and written descriptions, and therefore their descriptions may not be repeated. In the drawings, for clarity, the relative sizes of elements, layers and regions may be enlarged.

[0055] It should be understood that although the terms "first", "second", "third", etc. may be used herein to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, the first element, component, region, layer or part described below may be referred to as a second element, component, region, layer or part without departing from the spirit and scope of the present invention.

[0056] Spatially relative terms such as "beneath", "below", "lower", "under", "above", "upper", etc. may be used herein for convenience of explanation to describe the relationship of one element or feature to another element or feature as shown in the accompanying drawings. It should be understood that in addition to the orientation shown in the accompanying drawings, the spatially relative terms are intended to also include different orientations of the device in use or operation. For example, if the device in the accompanying drawings is turned over, the elements described as being "below", "beneath" or "under" other elements or features will subsequently be oriented to be "above" other elements or features. Therefore, the example terms "below" and "under" may include both the orientations of above and below. The device can be oriented in other ways (e.g., rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0057] It should be understood that when an element or layer is referred to as being "on," "connected to," or "coupled to" another element or layer, the element or layer may be directly on, directly connected to, or coupled to the other element or layer, or intervening elements or layers may be present. In addition, it should be understood that when an element or layer is referred to as being "between" two elements or layers, the element or layer may be the only element or layer between the two elements or layers, or one or more intervening elements or layers may be present.

[0058] The terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention. Unless otherwise clearly indicated in the context, the singular forms "a" and "an" as used herein are also intended to include plural forms. It should also be understood that when the terms "comprise", "comprising", "include" and "including" are used in this specification, the existence of the stated features, wholes, steps, operations, elements and / or parts is indicated, but the existence or addition of one or more other features, wholes, steps, operations, elements, parts and / or their clusters is not excluded. As used herein, the term "and / or" includes any and all combinations of one or more of the related listed items. Statements such as "at least one" after a column of elements modify the entire column of elements, rather than modifying the individual elements in the column.

[0059] As used herein, the terms "substantially," "about," and the like are used as terms of approximation rather than terms of degree, and are intended to take into account the inherent deviations of measurements or calculations that one of ordinary skill in the art would recognize. In addition, when describing embodiments of the inventive concept, the use of "may" refers to "one or more embodiments of the present invention." As used herein, the terms "use," "using," and "used" may be considered synonymous with the terms "utilize," "utilizing," and "utilized," respectively. Moreover, the term "exemplary" is intended to indicate an example or illustration.

[0060] The display device and / or any other related device or component according to the embodiment of the present invention described herein can be implemented using any suitable hardware. For example, the display device may include a display panel and at least one data flexible printed circuit board and / or at least one gate flexible printed circuit board. At least one data flexible printed circuit board may include a data drive integrated circuit connected to the display panel by a data fan-out. At least one gate flexible printed circuit board may include a gate drive integrated circuit connected to the display panel by a gate fan-out. The various components of these devices may be formed on an integrated circuit (IC) chip or on a separate IC chip. In addition, the various components of these devices may be implemented on a flexible printed circuit film, a tape carrier package (TCP), a printed circuit board (PCB) or formed on a substrate. Moreover, it should be appreciated by those skilled in the art that the functions of the various components may be combined or integrated into a single component, or the functions of a specific component may be distributed on one or more other components without departing from the spirit and scope of the exemplary embodiments of the present invention.

[0061] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention belongs. It should also be understood that unless explicitly defined as such herein, terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology and / or specification, and should not be interpreted in an idealized or overly formal sense.

[0062] Figure 1 A schematic block diagram of a display device according to some example embodiments is shown. A display device according to some example embodiments includes a display panel 300 and at least one data flexible printed circuit board 500 .

[0063] The display panel 300 may be included in various display devices such as a liquid crystal display (LCD), an organic light emitting diode (OLED) display, or the like.

[0064] The display panel 300 includes a substrate 110 , and the substrate 110 includes a display area DA for displaying an image and a peripheral area PA as a remaining area.

[0065] A plurality of gate lines 121 , a plurality of data lines 171 , and a plurality of pixels PX connected to the gate lines 121 and the data lines 171 are positioned in the display area DA.

[0066] The gate lines 121 may transmit gate signals, may extend substantially in a first direction x, and may be substantially parallel to each other.

[0067] The data lines 171 may transmit data voltages corresponding to image signals, may extend in a second direction y intersecting the first direction x, and may be substantially parallel to each other. The gate lines 121 and the data lines 171 may be referred to as a first wiring layer and a second wiring layer, respectively.

[0068] The pixels PX are arranged in a substantially matrix form. Each of the pixels PX may include at least one switching element electrically connected to the gate line 121 and the data line 171 and at least one pixel electrode connected to the at least one switching element. The switching element is an electronic element such as a thin film transistor integrated on the display panel 300, and may include a gate terminal, an input terminal, and an output terminal. The switching element may be turned on or off according to a gate signal of the gate line 121 to selectively transmit a data voltage from the data line 171 to the pixel electrode. The pixel PX may display a corresponding image depending on the data voltage applied to the pixel electrode. The peripheral area PA may be positioned around (e.g., around) the display area DA, or may be positioned at the edge of the display panel 300.

[0069] The gate driver 400 may be positioned on opposite sides of the peripheral area PA. The gate line 121 and the data line 171 of the display area DA may be positioned in the peripheral area PA and may extend from the display area DA.

[0070] The gate driver 400 may be connected to the gate line 121 to transmit a gate signal to the gate line 121. The gate driver 400 may be directly formed on the peripheral area PA of the display panel 300 together with electronic components such as thin film transistors of the display area DA through the same process.

[0071] The gate driver 400 includes a first gate driver 400a and a second gate driver 400b located at opposite sides of the peripheral area PA relative to the display area DA. In this example embodiment, the first gate driver 400a is located at the left side of the peripheral area PA, and the second gate driver 400b is located at the right side of the peripheral area PA.

[0072] The first gate driver 400a may include a plurality of stages connected in a subordinate manner, and the second gate driver 400b may include a plurality of stages connected in a subordinate manner. The corresponding stages of the first gate driver 400a and the second gate driver 400b may be connected to the same gate line 121 to apply a gate signal. Thus, even when the display panel 300 is enlarged, a display error due to a delay of a gate signal may be prevented or reduced by applying a gate signal to the gate line 121 from opposite sides of the display panel 300.

[0073] Although the first gate driver 400a and the second gate driver 400b are Figure 1 4 and 5. In the peripheral area PA, the first gate driver 400a and the second gate driver 400b are shown as being positioned at the left and right sides of the peripheral area PA, respectively, but the embodiment is not limited thereto, and the first gate driver 400a and the second gate driver 400b may be positioned at any position in the peripheral area PA. According to another exemplary embodiment, one of the first gate driver 400a and the second gate driver 400b may be omitted. A data fan-out 180 connected to the data line 171 positioned in the display area DA is positioned in the peripheral area PA. The data fan-out 180 includes a plurality of data fan-out lines 181. The data fan-out lines 181 are positioned in the peripheral area PA and are positioned between the data flexible printed circuit board 500 and the display area DA. In the peripheral area PA, a first end of each of the data fan-out lines 181 is electrically connected to the data line 171 of the display area DA, and a second end of each of the data fan-out lines 181 is connected to the data drive integrated circuit 550 of the data flexible printed circuit board 500 to be described later.

[0074] The data fan-out line 181 may be positioned at the same layer as the gate line 121 positioned in the display area DA, and may be connected to the data line 171 of the display area DA through the opening. However, the embodiment is not limited thereto, and the data fan-out line 181 may be positioned at the same layer as the data line 171 of the display area DA in the peripheral area PA, or may be positioned at a different layer from the gate line 121 and the data line 171.

[0075] The data flexible printed circuit board 500 may be bent, and one side of the data flexible printed circuit board 500 may be connected to the data fan-out line 181 of the display panel 300 in the peripheral area PA of the display panel 300. The data flexible printed circuit board 500 includes a data driving integrated circuit 550 for generating a data voltage as a grayscale voltage (e.g., a grayscale voltage) corresponding to an input video signal. Figure 1 2 , it is shown that one data flexible printed circuit board 500 includes two data driving integrated circuits 550 , but the embodiment is not limited thereto, and one data flexible printed circuit board 500 may include only one data driving integrated circuit 550 , or may include three or more data driving integrated circuits 550 .

[0076] In the following, reference will be made to Figure 2 and Figure 3 The data fan-out 180 of the display device according to the exemplary embodiment is described. Figure 2 Shows Figure 1 is an enlarged plan view of a portion A of the display device shown in FIG. Figure 3 A top view of some data fan-out lines is shown. For example, Figure 3 Shown in Figure 2 An enlarged top view of two data fan-out lines 181 is shown on the left side of FIG.

[0077] Reference Figure 2 , each of the data fan-out lines 181 includes a zigzag portion 185 and a straight portion 186. The zigzag portion 185 may be positioned with Figure 1 The zigzag portion 185 may be adjacent to the data flexible printed circuit board 500 and may extend substantially in the second direction y. One end of the zigzag portion 185 may be electrically connected to the data flexible printed circuit board 500.

[0078] The zigzag portion 185 is a zigzag portion of the data fan-out line 181. The zigzag portion 185 has a plurality of portions extending along the first direction x and a plurality of portions extending along the second direction y. The portions extending along the first direction x and the portions extending along the second direction y are alternately arranged in the zigzag portion 185.

[0079] As the data fan-out line 181 is positioned closer to the edge of the data fan-out 180, the length of the zigzag portion 185 included in the data fan-out line 181 becomes shorter. In this case, the length of the zigzag portion 185 may include the entire length of the wiring of the zigzag portion 185. In other words, the data fan-out line 181 positioned closer to the edge of the data fan-out 180 has a smaller number of portions extending along the first direction x and portions extending along the second direction y.

[0080] As the distance from the center of the data fan-out 180 increases, the distance from the data driving integrated circuit 550 to the data line to be connected becomes longer. In other words, the data fan-out line 181 positioned at the edge of the data fan-out 180 is longer than the data fan-out line 181 positioned at the center of the data fan-out 180. In this case, the resistance of the long data fan-out line 181 positioned at the edge is greater than the resistance of the data fan-out line 181 positioned at the center. Therefore, different voltage drops of the data voltage may be caused due to the resistance difference according to the length difference of the data fan-out line 181, resulting in uneven brightness of each area.

[0081] In addition, as the data flexible printed circuit board 500 is closer to the display area DA, that is, as the peripheral area PA becomes narrower, the difference in the length of the data fan-out line 181 increases. Therefore, it is difficult to uniformly maintain brightness in the display area DA and reduce the dead zone corresponding to the peripheral area PA.

[0082] However, in the display device according to an exemplary embodiment, the zigzag portion 185 of the data fan-out line 181 is formed to become shorter from the center toward the edge of the data fan-out 180, and thus can offset the difference in resistance caused by the length of the data fan-out line 181 to achieve uniform brightness in all areas of the display device.

[0083] The straight portion 186 may be positioned adjacent to the display area DA. The straight portion 186 linearly extends at the zigzag portion 185 to connect to the display area DA. Figure 1 The data line 171 in the display area DA is shown in FIG. 1. Because the data fan-out line 181 is positioned closer to the edge of the data fan-out 180, the length of its straight portion 186 becomes shorter. The difference in wiring resistance depending on the length of the straight portion 186 can be substantially offset by the length of the zigzag portion 185 described above.

[0084] In addition, the data fan-out line 181 positioned closer to the edge of the data fan-out 180 may have a greater width than the width of the data fan-out line 181 positioned closer to the center of the data fan-out 180. In other words, the zigzag portion 185 positioned at the edge of the data fan-out 180 may have a greater width than the width of the zigzag portion 185 positioned at the center of the data fan-out 180, and the straight portion 186 positioned at the edge of the data fan-out 180 may have a greater width than the width of the straight portion 186 positioned at the center of the data fan-out 180. Therefore, it is possible to compensate for (e.g., more effectively eliminate) the wiring resistance difference depending on the length of the straight portion 186 by adjusting the length of the zigzag portion 185. Refer to Figure 3, the width DW2 of the straight portion 186 is greater than the width DW1 of the zigzag portion 185. In this case, the width DW2 of the straight portion 186 and the width DW1 of the zigzag portion 185 may indicate a width in a direction perpendicular to a direction in which the wiring extends in a plan view.

[0085] The data fan-out line 181 can be patterned using a photomask, and the photomask includes a blocking portion positioned in an area corresponding to an area where each of the data fan-out lines 181 is to be formed. Since the straight portion 186 in the data fan-out 180 is spaced at a smaller density than the zigzag portion 185, the blocking portions of the photomask are spaced at a smaller density at the straight portion 186 than at the zigzag portion 185, and the transmission portions are spaced more widely at the straight portion 186 than at the zigzag portion 185. As a result, the amount of light reaching the straight portion 186 is relatively larger than the amount of light reaching the zigzag portion 185. Therefore, when the width DW2 of the straight portion 186 is made equal to or less than the width DW1 of the zigzag portion 185, the pattern of the straight portion 186 is over-etched, thereby generating a defect in which the straight portion 186 is disconnected.

[0086] However, in the case of the display device according to the exemplary embodiment, the width DW2 of the straight portion 186 may be formed to be greater than the width DW1 of the zigzag portion 185, thereby preventing or reducing the defect that the straight portion 186 is broken and opened. For example, the width DW2 of the straight portion 186 may be in the range of 5 μm to 7 μm, and the width DW1 of the zigzag portion 185 may be 4 μm or more and less than 5 μm. However, the width DW2 of the straight portion 186 and the width DW1 of the zigzag portion 185 are not limited thereto.

[0087] A minimum distance DD2 between the zigzag portions 185 of two adjacent data fan-out lines 181 may be greater than a distance DD1 between portions extending from the zigzag portions 185 of the data fan-out lines 181 in the first direction x. Accordingly, defects due to short circuits between the zigzag portions 185 of adjacent data fan-out lines 181 may be prevented or reduced.

[0088] The end of each of the straight portions 186 adjacent to the display area DA may be connected to an antistatic circuit. The antistatic circuit may include at least one transistor to prevent or reduce circuit damage due to instantaneous overcurrent. The antistatic circuit may be connected to Figure 1 The data line 171 of the display area DA.

[0089] Figure 4 1 shows a block diagram of a display device according to an exemplary embodiment. The display device according to the exemplary embodiment includes a display panel 300, a data flexible printed circuit board 500, and a gate flexible printed circuit board 410. Figure 1 The display device is different, refer to Figure 4, the gate driver is not directly formed on the display panel 300, and a chip-type gate driver integrated circuit 450 is mounted on the gate flexible printed circuit board 410 and connected to the display panel 300. Figure 1 Detailed description of contents that are repeated may be omitted.

[0090] The display panel 300 includes a display area DA for displaying an image and a peripheral area PA as a remaining area. A plurality of gate lines 121, a plurality of data lines 171, and a plurality of pixels PX connected to the gate lines 121 and the data lines 171 are positioned in the display area DA.

[0091] The gate lines 121 may transmit gate signals, may extend substantially in a first direction x, and may be substantially parallel to each other.

[0092] The data lines 171 may transmit data voltages corresponding to image signals, may extend in a second direction y intersecting (eg, crossing) the first direction x, and may be substantially parallel to each other.

[0093] The peripheral area PA may be positioned around (eg, partially surround or surround) the display area DA, or may be positioned at an edge of the display panel 300 .

[0094] The peripheral area PA may include a data fan-out 180 connected to the data line positioned in the display area DA. The data fan-out 180 includes a plurality of data fan-out lines 181. In the peripheral area PA, the data fan-out line 181 is electrically connected to the data line of the display area DA and is electrically connected to the data driving integrated circuit 550 of the data flexible printed circuit board 500. The data fan-out 180 is connected to the data line of the display area DA. Figures 1 to 3 Same as described.

[0095] The peripheral area PA includes a gate fan-out 130 connected to the gate line 121 positioned in the display area DA. The gate fan-out 130 includes a plurality of gate fan-out lines 131. The gate fan-out lines 131 are positioned in the peripheral area PA and are positioned between the gate flexible printed circuit board 410 and the display area DA. A first end of each of the gate fan-out lines 131 in the peripheral area PA is electrically connected to the gate line 121 of the display area DA, and a second end of each of the gate fan-out lines 131 is connected to a gate drive integrated circuit 450 of the gate flexible printed circuit board 410 to be described later.

[0096] The gate flexible printed circuit board 410 may be bent, and one side of the gate flexible printed circuit board 410 in the peripheral area PA of the display panel 300 may be connected to the gate fan-out line 131 of the display panel 300. The gate flexible printed circuit board 410 includes a gate driving integrated circuit 450 for generating a gate signal. Figure 42 , it is shown that one gate flexible printed circuit board 410 includes two gate driving integrated circuits 450 , but the embodiment is not limited thereto, and one gate flexible printed circuit board 410 may include only one gate driving integrated circuit 450 , or may include three or more gate driving integrated circuits 450 .

[0097] In the following, reference will be made to Figure 5 and Figure 6 A gate fan-out 130 of a display device according to some example embodiments is described. Figure 5 Shows Figure 4 An enlarged plan view of a portion B of the display device shown in FIG. Figure 6 A top view of some gate fan-out lines 131 is shown. For example, Figure 6 Shown in Figure 5 An enlarged top view of two gate fan-out lines 131 is shown at the lower side of FIG.

[0098] Reference Figure 5 , each of the gate fan-out lines 131 includes a zigzag portion 135 and a straight portion 136. The zigzag portion 135 may be positioned with Figure 4 The zigzag portion 135 is adjacent to the gate flexible printed circuit board 410 and may extend substantially in the first direction x. One end of the zigzag portion 135 may be electrically connected to the gate flexible printed circuit board 410 .

[0099] The zigzag portion 135 has a plurality of portions extending in the first direction x and a plurality of portions extending in the second direction y. The portions extending in the first direction x and the portions extending in the second direction y are alternately positioned in the zigzag portion 135 .

[0100] As the gate fan-out line 131 is positioned closer to the edge of the gate fan-out 130, the length of the zigzag portion 135 included in the gate fan-out line 131 becomes shorter. In other words, the gate fan-out line 131 positioned closer to the edge of the gate fan-out 130 has a smaller number of portions extending in the first direction x and portions extending in the second direction y.

[0101] As the distance from the center of the gate fan-out 130 increases, the distance from the gate driver integrated circuit 450 to the gate line to be connected becomes longer. In other words, the gate fan-out line 131 positioned at the edge of the gate fan-out 130 is longer than the gate fan-out line 131 positioned at the center of the gate fan-out 130. In this case, the resistance of the long gate fan-out line 131 positioned at the edge is greater than the resistance of the gate fan-out line 131 positioned at the center.

[0102] Accordingly, a resistance difference is generated due to the difference between the lengths of the gate fan-out lines 131. In addition, as the gate flexible printed circuit board 410 is closer to the display area DA, that is, as the peripheral area PA becomes narrower, the difference in the lengths of the gate fan-out lines 131 increases.

[0103] However, the zigzag portion 135 of the gate fan-out line 131 may be shortened from the center of the gate fan-out 130 toward the edge thereof to offset the resistance difference due to the length of the gate fan-out line 131 .

[0104] The straight portion 136 extends linearly at the zigzag portion 135 to be connected to the data line positioned in the display area DA. As the gate fan-out line 131 is positioned closer to the edge of the gate fan-out 130, the length of the straight portion 136 included in the gate fan-out line 131 becomes longer. The difference in wiring resistance depending on the length of the straight portion 136 can be offset by the length of the zigzag portion 135 described above.

[0105] In addition, the gate fan-out line 131 positioned closer to the edge of the gate fan-out 130 may have a greater width than the width of the gate fan-out line 131 positioned closer to the center of the gate fan-out 130. In other words, the zigzag portion 135 positioned at its edge may have a greater width than the width of the zigzag portion 185 positioned at its center, and the straight portion 136 positioned at its edge may have a greater width than the width of the straight portion 186 positioned at its center. Accordingly, the wiring resistance difference depending on the length of the straight portion 136 can be more effectively offset by adjusting the length of the zigzag portion 135 and the width of the straight portion 136.

[0106] Reference Figure 6 , the width GW2 of the straight portion 136 of the gate fan-out line 131 is greater than the width GW1 of the zigzag portion 135 thereof. In this case, the width GW2 of the straight portion 136 and the width GW1 of the zigzag portion 135 may indicate the width in a direction perpendicular to the direction in which the wiring extends in a plan view.

[0107] In the gate fan-out 130, the straight portion 136 is positioned at a smaller density than the zigzag portion 135. Therefore, when the width GW2 of the straight portion 136 is set equal to or smaller than the width GW1 of the zigzag portion 135, the amount of light reaching the straight portion 136 is relatively larger than the amount of light reaching the zigzag portion 135, and during etching using a photomask, the pattern is over-etched to open the wiring of the straight portion 136.

[0108] In the case of the display device according to some example embodiments, the width GW2 of the straight portion 136 may be formed to be greater than the width GW1 of the zigzag portion 135 , thereby preventing or reducing a defect in which the straight portion 136 is broken and opened.

[0109] The minimum distance GD2 between the zigzag portions 135 of two adjacent gate fan-out lines 131 may be greater than the distance GD1 between the portions extending from the zigzag portions 135 of the gate fan-out lines 131 in the second direction y. Accordingly, defects caused by short circuits between the zigzag portions 135 of adjacent gate fan-out lines 131 may be prevented or reduced.

[0110] Now refer to Figures 7 to 12 A method of manufacturing a display device according to some example embodiments is described. Figure 7 is a flowchart illustrating a method of manufacturing a display device according to some example embodiments.

[0111] Reference Figure 7 , a method of manufacturing a display device according to some example embodiments includes forming a conductive layer and a photoresist film on a substrate ( S101 ).

[0112] Next, the photoresist film is exposed and developed by using a photomask to form a photoresist pattern (S102). The photoresist film may be made of a positive resist.

[0113] Next, the conductive layer is etched using the photoresist pattern as a photomask (S103) to form patterns of zigzag and straight portions of the fan-out line, and the photoresist pattern is removed (S104). Herein, the conductive layer may be dry-etched or wet-etched.

[0114] Figure 8 1 is a top view of a photomask 1000 used in a method of manufacturing a display device according to some example embodiments. Figure 8 Shown is the method for forming Figure 3 A portion of photomask 1000 with data fan-out line 181 is shown in FIG.

[0115] The photomask 1000 has blocking portions 1001, and each of the blocking portions 1001 has a shape corresponding to the pattern of each of the data fan-out lines 181. Accordingly, a width MW2 of a straight portion of the blocking portion 1001 is greater than a width MW1 of a zigzag portion of the blocking portion 1001. In addition, a minimum distance MD2 between the zigzag portions of two adjacent blocking portions 1001 may be greater than a distance MD1 between portions extending from the zigzag portions of the blocking portion 1001 in the first direction x.

[0116] Each of the blocking portions 1001 of the photomask 1000 includes a slit 1001a positioned in the blocking portion 1001 along a direction in which the blocking portion 1001 extends. The slit 1001a may be positioned along a center with respect to a width direction of the blocking portion 1001. In addition, the slit 1001a may extend from a zigzag portion of the blocking portion 1001 to a straight portion of the blocking portion 1001. Although it has been described in detail, Figure 8 A photomask 1000 is described for forming Figure 3 The data fan-out line 181 shown in FIG. 1 may be formed using a photomask 1000. Figure 6 The gate fan-out line 131.

[0117] Figures 9 to 12 Cross-sectional views illustrating each process step of a method of manufacturing a display device according to some example embodiments are illustrated. Figures 9 to 12 Shown along Figure 3 A cross-sectional view of the display device taken along line IX-IX.

[0118] Reference Fig. 9 , an insulating layer 120 , a conductive layer 181 a , and a photoresist film PRL are formed (eg, sequentially formed) on a substrate 110 .

[0119] The photomask 1000 is exposed on the photoresist film PRL to expose a portion of the photoresist film PRL. The photomask 1000 includes a transmission portion 1002 through which light is transmitted and a blocking portion 1001 through which light is not transmitted. The width MW2 of the straight portion of the blocking portion 1001 is greater than the width MW1 of the zigzag portion of the blocking portion 1001. Each of the blocking portions 1001 of the photomask 1000 includes a slit 1001a. The blocking portion 1001 may include an opaque material. For example, the blocking portion 1001 may include chrome or the like.

[0120] When the photoresist film PRL is made of a positive resist, the exposed portion of the photoresist film PRL is removed. In this case, the photomask 1000 has a blocking portion 1001 in a region corresponding to a region where the data fan-out line 181 is to be formed. On the other hand, when the photoresist film PRL is made of a negative resist, the exposed portion of the photoresist film PRL remains. In this case, the photomask 1000 has a transmissive portion 1002 in a region corresponding to a region where the data fan-out line 181 is to be formed. Hereinafter, the case where the photoresist film PRL is a positive resist is described as an example.

[0121] Reference Fig.10 , the photoresist film PRL is exposed and developed to form a photoresist pattern PRP by supplying light to the photomask 1000. The exposed portion of the photoresist film PRL is removed so that the photoresist pattern PRP has the same pattern as the blocking portion 1001 of the photomask 1000. The region where the photoresist pattern PRP is formed corresponds to the region where the data fan-out line 181 is to be formed.

[0122] When the photomask 1000 including the slits 1001a is used, a small amount of light also reaches the region on the photoresist film PRL corresponding to the blocking portion 1001. Accordingly, the width or height of the photoresist pattern PRP is formed to be smaller than that in the case of using the photomask 1000 not including the slits 1001a. That is, by using the photomask 1000 having the blocking portion 1001 of the same width, the conductor layer 181a can be patterned with a finer line width.

[0123] Reference Fig.11 , forming a zigzag portion 185 and a straight portion 186 of the data fan-out line 181. The zigzag portion 185 and the straight portion 186 of the data fan-out line 181 are formed by etching the conductive layer 181a using the photoresist pattern PRP as an etching photomask. The conductive layer 181a can be etched using wet etching. However, the embodiment is not limited thereto, and the conductive layer 181a can be etched by dry etching.

[0124] The data fan-out line 181 may be positioned in the gate layer and may be electrically connected to the data line 171 positioned in the data layer of the display area DA through an opening (not shown). However, the embodiment is not limited thereto, and the data fan-out line 181 may be positioned in the data layer, or in a layer different from the gate layer and the data layer.

[0125] Reference Fig.12 , removing the photoresist pattern PRP.

[0126] The width DW2 of the straight portion 186 of the data fan-out line 181 that is finally formed is greater than the width DW1 of the zigzag portion 185 thereof.

[0127] The width DW2 of the straight portion 186 of the data fan-out line 181 may be smaller than the width MW2 of the straight portion of the blocking portion 1001 of the photomask 1000. The width DW1 of the zigzag portion 185 of the data fan-out line 181 may be smaller than the width MW1 of the zigzag portion of the blocking portion 1001 of the photomask 1000. As described above, when the blocking portion 1001 of the photomask 1000 includes the slits 1001a, a pattern of the conductive layer 181a having a width smaller than that of the blocking portion 1001 may be formed. Accordingly, even if the blocking portion 1001 is not densely formed, the resolution of the photomask 1000 including the slits 1001a may be increased, and thus a finer pattern may be easily formed.

[0128] Although referenced Figures 7 to 12 The method of forming the data fan-out line 181 is described, but it can be applied to forming Figure 4 The gate fan-out line 131.

[0129] While the invention has been described in connection with what are presently considered to be practical example embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but on the contrary is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

Claims

1. A photomask comprising: a transmission portion configured to transmit light; as well as a blocking portion configured to block light, Wherein, the blocking portion includes a first zigzag portion and a first portion extending from the first zigzag portion, wherein the first portion includes a first vertical portion and a first inclined portion extending obliquely from the first vertical portion, wherein the entirety of the first portion including the first vertical portion and the first inclined portion has the same constant width, wherein the constant width of the entire first portion includes a width perpendicular to an extension direction of the first vertical portion and an extension direction of the first inclined portion, and Wherein, the constant width of the first portion is greater than a width of the first zigzag portion.

2. The photomask according to claim 1, wherein: The blocking portion further includes a first slit extending from the first zigzag portion to the first portion.

3. The photomask according to claim 2, wherein: The first slit is provided along the center of the barrier portion with respect to the width direction.

4. The photomask according to claim 1, wherein: The first vertical portion extends from the first zigzag portion in a vertical direction.

5. The photomask according to claim 1, wherein: The blocking portion further comprises: a second zigzag portion, the second zigzag portion being adjacent to the first zigzag portion in a horizontal direction; and a second portion, the second portion extending from the second zigzag portion, wherein each of the first zigzag portion and the second zigzag portion includes a portion extending in the horizontal direction and a portion extending in the vertical direction, and Wherein, a distance between the first zigzag portion and the second zigzag portion is greater than a distance between the portions of the first zigzag portion extending in the horizontal direction.

6. The photomask according to claim 5, wherein: The distance between the first zigzag portion and the second zigzag portion is smaller than a distance between the portions of the first zigzag portion extending in the vertical direction.

7. The photomask according to claim 5, in, The second portion includes a second vertical portion and a second inclined portion extending obliquely from the second vertical portion, wherein the entirety of the second portion including the second vertical portion and the second inclined portion has the same constant width, wherein the overall constant width of the second portion includes a width perpendicular to an extension direction of the second vertical portion and an extension direction of the second inclined portion, and Wherein, the constant width of the second portion is greater than a width of the second zigzag portion.

8. The photomask according to claim 7, in, The constant width of the first portion is greater than the width of the second zigzag portion, and Wherein, the constant width of the second portion is greater than the width of the first zigzag portion.

9. The photomask according to claim 5, wherein: The length of the second zigzag portion is longer than the length of the first zigzag portion.

10. The photomask according to claim 9, wherein: The length of the first portion is longer than the length of the second portion.

11. The photomask according to claim 5, wherein: The blocking portion further includes a second slit extending from the second zigzag portion to the second portion.

12. The photomask according to claim 11, wherein The second slit is provided along the center of the barrier portion with respect to the width direction.

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