Coated tool and cutting tool

Abstract

The coated cutting tool according to the present invention is provided with a base body and a coating layer. The coating layer includes a plurality of crystal grains. The plurality of crystal grains have a plurality of regions having different crystal orientations. The crystal orientations of the plurality of crystal grains in the coating layer are analyzed from the plane direction of the coating layer using a TEM electron diffraction mapping method, a first crystal grain map and a second crystal grain map are created, and the average grain diameter of the crystal grains obtained by weighted averaging based on the area ratio from the first crystal grain map is set as D1. When D2 is the average grain diameter of the crystal grains obtained by weighted averaging on the basis of the area ratio from the second crystal grain map, the value of D2 / D1 is 0.55-0.95.

Description

Technical Field

[0001] The invention relates to a coated tool and a cutting tool. Background Art

[0002] As a tool used for cutting such as turning and milling, there is known a coated tool in which the surface of a base body such as cemented carbide, cermet, or ceramic is coated with a coating layer to improve wear resistance and the like.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2004-50381

[0006] Patent Document 2: Japanese Patent Application Publication No. 2018-30212 Summary of the invention

[0007] A coated tool according to one embodiment of the present invention comprises a substrate and a coating layer located on the substrate. The coating layer comprises a plurality of crystal grains. The plurality of crystal grains comprises a crystal grain having a plurality of regions having mutually different crystal orientations. The average grain sizes D1 and D2 of the crystal grains in the coating layer defined by the following method are D2 / D1=0.55 to 0.95.

[0008] Definition of D1 and D2

[0009] The TEM electron diffraction mapping method was used to analyze the crystal orientation of multiple grains in the coating layer from the plane direction of the coating layer.

[0010] A first grain map is prepared by removing Σ3CSL (coincidence lattice grain boundary) from a region where the orientation difference between adjacent measurement points is 5° or more as a grain boundary, and the average grain size of the grains obtained by taking a weighted average based on the area ratio from the first grain map is set as D1.

[0011] A second grain map is prepared using regions where the orientation difference between adjacent measurement points is 5° or more and Σ3CSL (coincidence lattice grain boundary) as grain boundaries, and the average grain size of the grains obtained by taking a weighted average based on the area ratio from the second grain map is set as D2. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a perspective view showing an example of a coated tool according to the embodiment.

[0013] Figure 2 This is a side sectional view showing an example of a coated tool according to the embodiment.

[0014] Figure 3It is a schematic diagram showing an example of the coating layer according to the embodiment.

[0015] Figure 4 This is a cross-sectional view showing an example of the coating layer according to the first embodiment.

[0016] Figure 5A It is a schematic diagram explaining the Ti / Al ratio in the coating layer of the first embodiment.

[0017] Figure 5B It is a schematic diagram for explaining the Cr / Al ratio in the coating layer of the first embodiment.

[0018] Fig. 6A This is a cross-sectional view showing an example of a first coating layer included in the coating layer of the first embodiment.

[0019] Figure 6B This is a cross-sectional view showing an example of the second coating layer included in the coating layer of the first embodiment.

[0020] Figure 6C This is a cross-sectional view showing an example of a third coating layer included in the coating layer of the first embodiment.

[0021] Figure 7 This is a cross-sectional view showing an example of a coating layer according to the second embodiment.

[0022] Fig. 8A It is a schematic diagram explaining the Ti / Al ratio in the coating layer of the second embodiment.

[0023] Figure 8B It is a schematic diagram for explaining the Cr / Al ratio in the coating layer of the second embodiment.

[0024] Fig. 9 This is a cross-sectional view showing an example of a fourth coating layer included in the coating layer of the second embodiment.

[0025] Fig.10 This is a diagram schematically showing an example of a film forming apparatus for forming a coating layer on a substrate.

[0026] Fig.11 This is a front view showing an example of a cutting tool according to an embodiment. DETAILED DESCRIPTION

[0027] Hereinafter, the method for implementing the coated tool and the cutting tool based on the present invention (hereinafter, recorded as "embodiment") is described in detail with reference to the accompanying drawings. The coated tool and the cutting tool based on the present invention are not limited by this embodiment. The various embodiments can be appropriately combined within the scope that does not cause contradictions in the processing contents. In the following various embodiments, the same reference numerals are marked on the same parts, and repeated descriptions are omitted.

[0028] In the embodiments shown below, there are cases where expressions such as "constant", "orthogonal", "perpendicular" or "parallel" are used, but these expressions are not required to be strictly "constant", "orthogonal", "perpendicular" or "parallel". That is, each of the above expressions allows deviations such as manufacturing accuracy or setting accuracy.

[0029] As a tool used for cutting such as turning and milling, there is known a coated tool in which the surface of a base body such as cemented carbide, cermet, or ceramic is coated with a coating layer to improve wear resistance and the like.

[0030] In the above-mentioned conventional technology, there is room for further improvement in terms of extending the life of the tool.

[0031] Therefore, realization of a technology capable of overcoming the above-mentioned problems and extending the life of a tool is desired.

[0032] <Coated tools>

[0033] Figure 1 This is a perspective view showing an example of a coated tool according to the embodiment. Figure 2 1 is a side sectional view showing an example of a coated tool according to an embodiment. Figure 1 As shown, a coated tool 1 according to the embodiment includes an insert body 2 .

[0034] (Blade body 2)

[0035] The blade body 2 has, for example, an upper surface and a lower surface ( Figure 1 The shape of the surface (the surface intersecting the Z axis shown) is a hexahedron of a parallelogram.

[0036] A corner portion of the blade body 2 functions as a cutting edge portion. The cutting edge portion has a first surface (e.g., an upper surface) and a second surface (e.g., a side surface) connected to the first surface. In an embodiment, the first surface functions as a "front face" for scraping off chips generated by cutting, and the second surface functions as a "flank face". A cutting edge is disposed on at least a portion of the ridgeline where the first surface and the second surface intersect, and the coated tool 1 cuts the cut material by pressing the cutting edge against the cut material.

[0037] A through hole 5 is disposed in the center of the blade body 2, penetrating the blade body 2 from top to bottom. A screw 75 (see FIG. 1 ) for attaching the coated tool 1 to a tool holder 70 described later is inserted into the through hole 5. Fig.11 ).

[0038] like Figure 2 As shown, the insert body 2 has a base body 10 and a coating layer 20 .

[0039] (Base 10)

[0040] The substrate 10 is formed of, for example, cemented carbide. The cemented carbide contains W (tungsten), specifically, WC (tungsten carbide). The cemented carbide may also contain Ni (nickel) or Co (cobalt). Specifically, the substrate 10 is composed of a WC-based cemented carbide having WC particles as a hard phase component and Co as a main component of a binder phase.

[0041] The base 10 may be formed of cermet. The cermet contains, for example, Ti (titanium), specifically, TiC (titanium carbide) or TiN (titanium nitride). The cermet may contain Ni or Co.

[0042] The substrate 10 may also be formed of a cubic boron nitride sintered body containing cubic boron nitride (cBN) particles. The substrate 10 is not limited to cubic boron nitride (cBN) particles, and may also contain particles of hexagonal boron nitride (hBN), rhombohedral boron nitride (rBN), or wurtzite boron nitride (wBN).

[0043] The substrate 10 may also be formed of ceramics. As ceramics, for example, Al2O3 (aluminum oxide) may be cited. As types of Al2O3, for example, there are κ-Al2O3 and α-Al2O3. Ceramics may also contain elements other than aluminum oxide. For example, ceramics may also contain magnesium (Mg), calcium (Ca), strontium (Sr), silicon (Si) and at least one of the third group elements of the periodic table in addition to aluminum oxide.

[0044] (Coating layer 20)

[0045] The coating layer 20 is applied to the substrate 10 for the purpose of improving the wear resistance and heat resistance of the substrate 10, for example. Figure 2 In the example of , the coating layer 20 coats the entire substrate 10. The coating layer 20 only needs to be located at least on the substrate 10. When the coating layer 20 is located on the first surface (here, the upper surface) of the substrate 10, the wear resistance and heat resistance of the first surface are high. When the coating layer 20 is located on the second surface (here, the side surface) of the substrate 10, the wear resistance and heat resistance of the second surface are high.

[0046] Here, refer to Figure 3 The specific structure of the coating layer 20 will be described. Figure 3 2 is a schematic diagram showing an example of a coating layer according to an embodiment. The coating layer 20 according to the embodiment includes a plurality of crystal grains. Figure 3 As shown, the coating layer 20 includes a plurality of crystal grains 20 a , 20 b within the coating layer 20 . Figure 3 The inner portion of the coating layer 20 shown is a surface parallel to the surface of the substrate 10 on which the coating layer 20 is provided.

[0047] For example, by using the analysis of TEM electron diffraction mapping (TEM ED-Map), multiple crystal grains 20a and 20b inside the coating layer 20 can be identified. More specifically, first, using TEM electron diffraction mapping, the electron diffraction pattern of each measurement point is measured while scanning the inside of the coating layer 20 with an electron beam probe, so as to obtain the crystal orientation corresponding to each measurement point in the grain map of the coating layer 20. Next, when the difference in crystal orientation between adjacent measurement points in the grain map of the coating layer 20 is, for example, 5° or more, a boundary line is drawn between adjacent measurement points. And, the area surrounded by the boundary line in the grain map of the coating layer 20 can be identified as a crystal grain. At this time, the crystal grain can be identified by dividing the area after removing Σ3CSL (re-site lattice grain boundary) from the area where the orientation difference between adjacent measurement points is 5° or more as the crystal boundary and the area where the orientation difference between adjacent measurement points is 5° or more and Σ3CSL (re-site lattice grain boundary) as the crystal boundary.

[0048] In the coating layer 20, as Figure 3 As shown, the plurality of grains 20a, 20b include a (single) grain 20a (first grain 20a) inside the coating layer 20, and the grain 20a has a plurality of regions with mutually different crystal orientations. The plurality of grains 20a, 20b include a (single) grain 20b (second grain 20b) with a substantially constant crystal orientation inside the coating layer 20. It is also possible that all of the plurality of grains are grains 20a having a plurality of regions with mutually different crystal orientations. The grain 20a having a plurality of regions with mutually different crystal orientations may also be a single grain 20a having a region with a continuously changing crystal orientation. Figure 3 In the example shown, the plurality of dies include a plurality of first dies 20 a and a plurality of second dies 20 b .

[0049] The first grain map is prepared by removing the region after Σ3CSL (re-site lattice grain boundary) from the region where the orientation difference between adjacent measurement points is 5° or more as the grain boundary, and the average grain size of the grains obtained by taking the weighted average based on the area ratio according to the first grain map is set as D1. Then, the second grain map is prepared by taking the region where the orientation difference between adjacent measurement points is 5° or more and Σ3CSL (re-site lattice grain boundary) as the grain boundary, and the average grain size of the grains obtained by taking the weighted average based on the area ratio according to the second grain map is set as D2. In this case, the value of D2 / D1 can also be 0.55 to 0.95.

[0050] For example, by using the analysis of TEM electron diffraction mapping, a single grain 20a having multiple regions with mutually different crystal orientations and / or a single grain 20a having a region with a continuously changing crystal orientation can be identified. More specifically, by using the TEM electron diffraction mapping, a single grain having multiple regions with mutually different colors in the inverse pole figure orientation mapping inside the coating layer 20 can be identified as a single grain 20a having multiple regions with mutually different crystal orientations. Similarly, by using the TEM electron diffraction mapping, a single grain having a region with continuously changing colors in the inverse pole figure orientation mapping inside the coating layer 20 can be identified as a single grain 20a having a region with a continuously changing crystal orientation.

[0051] By using the TEM electron diffraction mapping method for analysis, the orientation difference of 5° or more is analyzed as the grain boundary, and the grain map is made by dividing it into the case where Σ3CSL (re-site lattice grain boundary) is not used as the grain boundary and the case where Σ3CSL (re-site lattice grain boundary) is used as the grain boundary. Then, the average grain size D1 and D2 can be calculated by taking the weighted average based on the area ratio on each grain map, and the ratio of D2 / D1 can be obtained. In addition, the average KAM (local orientation difference) value of each grain can be output using the above-mentioned grain mapping data and the crystal orientation analysis system. At this time, the adjacent pixels with an orientation difference of 5° or more with the pixel at the measurement center are excluded from the calculation of the KAM value as pixels that exceed the grain boundary from the single crystal where the pixel at the measurement center is located.

[0052] In the case where a plurality of crystal grains 20a, 20b include a single crystal grain 20a having a plurality of regions with mutually different crystal orientations inside the coating layer 20, the progress of cracks in the single crystal grain 20a having a plurality of regions with mutually different crystal orientations can be reduced. In particular, when the value of D2 / D1 is smaller than 0.95, the ratio of the heavy site lattice grain boundary in the crystal becomes higher, the progress of cracks in the coating layer 20 is easily suppressed, and the strength of the coating layer is improved. By making the value of D2 / D1 larger than 0.55, the deviation of the orientation in the crystal does not become too large, the plastic deformation of the coating layer 20 is suppressed, and good wear resistance is shown. The decrease in the fracture resistance is suppressed, and the tool life is improved. As a result, the life of the coated tool 1 can be extended.

[0053] Sometimes, when the average KAM (local orientation difference) value of each grain included in the coating layer 20 is obtained using the above-mentioned grain mapping data and the crystal orientation analysis system, the proportion of grains whose average KAM value is 1 or more is 50% or more and 80% or less. In this case, the progress of cracks at a single grain 20a having multiple regions with different crystal orientations can be further reduced. Therefore, the defect resistance of the coating layer 20 can be further improved. As a result, the life of the coated tool 1 can be further extended.

[0054] Sometimes, multiple crystal grains 20a, 20b include composite nitrides. In this case, a coating layer 20 including a single crystal grain 20a having multiple regions with different crystal orientations can be obtained more easily. Therefore, the defect resistance of the coating layer 20 can be more easily improved. As a result, the life of the coated tool 1 can be more easily extended.

[0055] like Figure 3 As shown in the example, sometimes a plurality of first crystal grains 20a are located at mutually separated positions. In such a case, even if a crack progresses in one of the plurality of first crystal grains 20a, the crack is difficult to propagate to other first crystal grains 20a. Therefore, it is easy to avoid the above-mentioned crack from extending to a large range of the coating layer 20. As a result, the life of the coated tool 1 can be extended.

[0056] At this time, if Figure 3 As shown in the example, sometimes a plurality of second crystal grains 20b are located between a plurality of first crystal grains 20a. In such a case, even if a crack progresses at one of the plurality of first crystal grains 20a, it is easy to prevent the crack from further progressing by using the second crystal grains 20b. Therefore, it is easy to prevent the above-mentioned crack from extending to a large range of the coating layer 20. As a result, the life of the coated tool 1 can be extended.

[0057] like Figure 3 As shown in the example, sometimes at least two of the plurality of second crystal grains 20b are adjacent to each other. In such a case, while the second crystal grains 20b are micronized to achieve homogenization of the coating layer 20, it is easy to use the plurality of second crystal grains 20b to avoid the above-mentioned crack progress. Therefore, it is easy to avoid the above-mentioned crack from extending to a large range of the coating layer 20. As a result, the life of the coated tool 1 can be extended.

[0058] Here, a further specific structure of a coating layer 20 including crystal grains 20a having a plurality of regions with mutually different crystal orientations, the value of the above-mentioned D2 / D1 being 0.55 to 0.95, and the ratio of crystal grains showing the above-mentioned average KAM value being 1 or more being 50% or more and 80% or less is described. That is, the structure of the coating layer 20A of the first embodiment and the structure of the coating layer 20B of the second embodiment for realizing the coating layer 20 including the crystal grains 20a having a plurality of regions with mutually different crystal orientations are described.

[0059] (Coating Layer 20A of First Embodiment)

[0060] Here, refer to Figure 4 , Figure 5A , Figure 5B , Fig. 6A , Figure 6B ,as well as Figure 6C The specific structure of the coating layer 20A according to the first embodiment will be described. Figure 4 This is a cross-sectional view showing an example of the coating layer according to the first embodiment. Figure 5A It is a schematic diagram explaining the Ti / Al ratio in the coating layer of the first embodiment. Figure 5B It is a schematic diagram for explaining the Cr / Al ratio in the coating layer of the first embodiment. Fig. 6A This is a cross-sectional view showing an example of a first coating layer included in the coating layer of the first embodiment. Figure 6B This is a cross-sectional view showing an example of the second coating layer included in the coating layer of the first embodiment. Figure 6C This is a cross-sectional view showing an example of a third coating layer included in the coating layer of the first embodiment.

[0061] like Figure 4 As shown in the figure, the coating layer 20A as the first embodiment of the coating layer 20 includes a first coating layer 21 located on the substrate 10, a second coating layer 22 located on the first coating layer 21, and a third coating layer 23 located on the second coating layer 22. In the case where the blade body 2 includes the intermediate layer 11 in addition to the substrate 10 and the coating layer 20A as the coating layer 20, as shown in the figure, Figure 4 As shown, the intermediate layer 11 is located between the substrate 10 and the first coating layer 21. In this case, the first coating layer 21 is located on the substrate 10 via the intermediate layer 11.

[0062] (First coating layer 21)

[0063] The first coating layer 21 contains Al, Ti, Cr, and N. The first coating layer 21 may be, for example, an AlTiCrN layer containing AlTiCrN, which is a nitride of Al, Ti, and Cr. "AlTiCrN" means that Al, Ti, Cr, and N exist in any ratio, and does not mean that Al, Ti, Cr, and N must exist one-to-one. The thickness of the first coating layer 21 is, for example, not less than 500 nm and not more than 1500 nm.

[0064] The first coating layer 21 located on the substrate 10 can reduce the residual stress between the substrate 10 and the coating layer (in the coating layer 20A, the second coating layer 22 and the third coating layer 23) located on the first coating layer 21. That is, the first coating layer 21 can reduce the residual stress between the substrate 10 and the coating layer 20A. As a result, the peeling or cracking between the substrate 10 and the coating layer 20A can be reduced. In other words, the bonding between the substrate 10 and the coating layer 20A can be improved. As a result, the life of the coated tool 1 can be extended.

[0065] (Second coating layer 22)

[0066] The second coating layer 22 is Figure 4 As shown in the figure, the first film 31 and the second film 32 are included. The first film 31 and the second film 32 each contain Al, Ti, Cr and N. The first film 31 and the second film 32 each may be, for example, an AlTiCrN film containing AlTiCrN which is a nitride of Al, Ti and Cr. The thickness of the first film 31 is, for example, greater than 200 nm and less than 400 nm. The thickness of the second film 32 is, for example, greater than 200 nm and less than 400 nm.

[0067] The first film 31 has a Ti / Al ratio higher than the Ti / Al ratio in the first coating layer 21. Here, the Ti / Al ratio means the ratio of the number of atoms of Ti to the number of atoms of Al. Thus, the wear resistance and the fracture resistance of the coating layer 20A can be improved without significantly increasing the residual stress between the substrate 10 and the coating layer (the third coating layer 23 in the coating layer 20A) located above the second coating layer 22. The first film 31 may also be a film having a Cr / Al ratio lower than the Cr / Al ratio in the first coating layer 21.

[0068] The second film 32 has a Cr / Al ratio higher than the Cr / Al ratio in the first coating layer 21. Here, the Cr / Al ratio means the ratio of the number of Cr atoms to the number of Al atoms. Thus, the lubricity and adhesion resistance of the coating layer 20A can be improved without significantly increasing the residual stress between the substrate 10 and the coating layer (the third coating layer 23 in the coating layer 20A) located above the second coating layer 22. The second film 32 may also be a film having a Ti / Al ratio lower than the Ti / Al ratio in the first coating layer 21.

[0069] The second coating layer 22 can improve the wear resistance and fracture resistance of the coating layer 20A and improve the lubricity and adhesion resistance of the coating layer 20A without significantly increasing the residual stress between the substrate 10 and the coating layer located on the second coating layer 22. As a result, the life of the coated tool 1 can be extended.

[0070] (Third coating layer 23)

[0071] The third coating layer 23 is as follows Figure 4 As shown in the figure, the third film 33 and the fourth film 34 are included. The third film 33 and the fourth film 34 each contain Al, Ti, Cr and N. The third film 33 and the fourth film 34 each may be, for example, an AlTiCrN film containing AlTiCrN which is a nitride of Al, Ti and Cr. The thickness of the third film 33 is, for example, greater than 200 nm and less than 400 nm. The thickness of the fourth film 34 is, for example, greater than 200 nm and less than 400 nm.

[0072] The third film 33 has a Ti / Al ratio higher than the Ti / Al ratio in the first film 31. Here, the Ti / Al ratio means the ratio of the number of Ti atoms to the number of Al atoms. Thus, the wear resistance and fracture resistance of the coating layer 20A can be improved. The third film 33 may also be a film having a Cr / Al ratio lower than the Cr / Al ratio in the first film 31.

[0073] The fourth film 34 has a Cr / Al ratio higher than the Cr / Al ratio in the second film 32. Here, the Cr / Al ratio means the ratio of the number of atoms of Cr to the number of atoms of Al. Thus, the lubricity and adhesion resistance of the coating layer 20A can be improved. The fourth film 34 may also be a film having a Ti / Al ratio lower than the Ti / Al ratio in the second film 32.

[0074] The third coating layer 23 can improve the wear resistance and fracture resistance of the coating layer 20A and improve the lubricity and adhesion resistance of the coating layer 20A. As a result, the life of the coated tool 1 can be extended.

[0075] (Example of Ti / Al Ratio in Coating Layer 20A)

[0076] like Figure 5A As shown, the Ti / Al ratio in the coating layer 20A may also be continuously changed in the direction of the thickness of the coating layer 20A. When the Ti / Al ratio in the region of the coating layer 20A is not constant, the average value of the Ti / Al ratio in the region may be used as the Ti / Al ratio in the region.

[0077] exist Figure 5A In the example shown, the Ti / Al ratio in the coating layer 20A is substantially constant in the first coating layer 21. The Ti / Al ratio in the coating layer 20A is maximum in the first film 31 included in the second coating layer 22 and the third film 33 included in the third coating layer 23. The Ti / Al ratio in the coating layer 20A is extremely small in the second film 32 included in the second coating layer 22 and the fourth film 34 included in the third coating layer 23.

[0078] Here, not only the Ti / Al ratio in the first film 31 is greater than the Ti / Al ratio in the first coating layer 21, but also the maximum value of the Ti / Al ratio in the first film 31 is greater than the Ti / Al ratio in the first coating layer 21. Not only the Ti / Al ratio in the third film 33 is greater than the Ti / Al ratio in the first film 31, but also the maximum value of the Ti / Al ratio in the third film 33 is greater than the maximum value of the Ti / Al ratio in the first film 31.

[0079] It is also possible that not only the Ti / Al ratio in the second film 32 is smaller than the Ti / Al ratio in the first coating layer 21, but also the minimum value of the Ti / Al ratio in the second film 32 is smaller than the Ti / Al ratio in the first coating layer 21. It is also possible that not only the Ti / Al ratio in the fourth film 34 is smaller than the Ti / Al ratio in the second film 32, but also the minimum value of the Ti / Al ratio in the fourth film 34 is smaller than the minimum value of the Ti / Al ratio in the second film 32.

[0080] (Example of Cr / Al Ratio in Coating Layer 20A)

[0081] like Figure 5B As shown, the Cr / Al ratio in the coating layer 20A may also be continuously changed in the direction of the thickness of the coating layer 20A. When the Cr / Al ratio in the region of the coating layer 20A is not constant, the average value of the Cr / Al ratio in the region may be used as the Cr / Al ratio in the region.

[0082] exist Figure 5BIn the example shown, the Cr / Al ratio in the coating layer 20A is substantially constant in the first coating layer 21. The Cr / Al ratio in the coating layer 20A is maximum in the second film 32 included in the second coating layer 22 and the fourth film 34 included in the third coating layer 23. The Cr / Al ratio in the coating layer 20A is extremely small in the first film 31 included in the second coating layer 22 and the third film 33 included in the third coating layer 23.

[0083] Here, not only the Cr / Al ratio in the second film 32 is greater than the Cr / Al ratio in the first coating layer 21, but also the maximum value of the Cr / Al ratio in the second film 32 is greater than the Cr / Al ratio in the first coating layer 21. Not only the Cr / Al ratio in the fourth film 34 is greater than the Cr / Al ratio in the second film 32, but also the maximum value of the Cr / Al ratio in the fourth film 34 is greater than the maximum value of the Cr / Al ratio in the second film 32.

[0084] It is also possible that not only the Cr / Al ratio in the first film 31 is smaller than the Cr / Al ratio in the first coating layer 21, but also the minimum value of the Cr / Al ratio in the first film 31 is smaller than the Cr / Al ratio in the first coating layer 21. It is also possible that not only the Cr / Al ratio in the third film 33 is smaller than the Cr / Al ratio in the first film 31, but also the minimum value of the Cr / Al ratio in the third film 33 is smaller than the minimum value of the Cr / Al ratio in the first film 31.

[0085] The coating layer 20A is shown in which the first coating layer 21, the first film 31, the second film 32, the third film 33 and the fourth film 34 are stacked in sequence on the substrate 10, but the first coating layer 21, the second film 32, the first film 31, the fourth film 34 and the third film 33 may also be stacked in sequence on the substrate 10.

[0086] (Examples of the First Coating Layer 21, the Second Coating Layer 22, and the Third Coating Layer 23)

[0087] like Fig. 6A As shown in FIG. 1 , the first coating layer 21 sometimes includes a region in which a plurality of compound layers 21a and a plurality of compound layers 21b are alternately stacked. Here, the Ti / Al ratio and the Cr / Al ratio in the compound layer 21a are different from the Ti / Al ratio and the Cr / Al ratio in the compound layer 21b, respectively. For example, the Ti / Al ratio in the compound layer 21a is greater than the Ti / Al ratio in the compound layer 21b, and the Cr / Al ratio in the compound layer 21b is greater than the Cr / Al ratio in the compound layer 21a. The average value of the thickness of each of the compound layer 21a and the compound layer 21b is greater than 1 nm and less than 10 nm.

[0088] In this case, the hardness of the first coating layer 21 can be increased. Thus, the strength of the first coating layer 21 can be increased. As a result, the life of the coated tool 1 can be extended.

[0089] like Figure 6B As shown in FIG. 1 , sometimes the first film 31 included in the second coating layer 22 includes a region in which a plurality of compound layers 31a and a plurality of compound layers 31b are alternately stacked. Here, the Ti / Al ratio and the Cr / Al ratio in the compound layer 31a are different from the Ti / Al ratio and the Cr / Al ratio in the compound layer 31b, respectively. For example, the Ti / Al ratio in the compound layer 31a is greater than the Ti / Al ratio in the compound layer 31b, and the Cr / Al ratio in the compound layer 31b is greater than the Cr / Al ratio in the compound layer 31a. The average value of the thickness of each of the compound layer 31a and the compound layer 31b is greater than 1 nm and less than 10 nm.

[0090] In this case, the hardness of the first film 31 can be improved and accordingly the hardness of the second coating layer 22 can be improved. Thus, the strength of the first film 31 can be improved and accordingly the strength of the second coating layer 22 can be improved. As a result, the life of the coated tool 1 can be extended.

[0091] like Figure 6B As shown in FIG. 1 , the second film 32 included in the second coating layer 22 sometimes includes a region in which a plurality of compound layers 32a and a plurality of compound layers 32b are alternately stacked. Here, the Ti / Al ratio and the Cr / Al ratio in the compound layer 32a are different from the Ti / Al ratio and the Cr / Al ratio in the compound layer 32b, respectively. For example, the Cr / Al ratio in the compound layer 32a is greater than the Cr / Al ratio in the compound layer 32b, and the Ti / Al ratio in the compound layer 32b is greater than the Ti / Al ratio in the compound layer 32a. The average value of the thickness of each of the compound layer 32a and the compound layer 32b is greater than 1 nm and less than 10 nm.

[0092] In this case, the hardness of the second film 32 can be improved and accordingly the hardness of the second coating layer 22 can be improved. Thus, the strength of the second film 32 can be improved and accordingly the strength of the second coating layer 22 can be improved. As a result, the life of the coated tool 1 can be extended.

[0093] like Figure 6CAs shown in FIG. 1 , sometimes the third film 33 included in the third coating layer 23 includes a region in which a plurality of compound layers 33a and a plurality of compound layers 33b are alternately stacked. Here, the Ti / Al ratio and the Cr / Al ratio in the compound layer 33a are different from the Ti / Al ratio and the Cr / Al ratio in the compound layer 33b, respectively. For example, the Ti / Al ratio in the compound layer 33a is greater than the Ti / Al ratio in the compound layer 33b, and the Cr / Al ratio in the compound layer 33b is greater than the Cr / Al ratio in the compound layer 33a. The average value of the thickness of each of the compound layer 33a and the compound layer 33b is greater than 1 nm and less than 10 nm.

[0094] In this case, the hardness of the third film 33 can be improved and accordingly the hardness of the third coating layer 23 can be improved. Thus, the strength of the third film 33 can be improved and accordingly the strength of the third coating layer 23 can be improved. As a result, the life of the coated tool 1 can be extended.

[0095] like Figure 6C As shown in FIG. 1 , sometimes the fourth film 34 included in the third coating layer 23 includes a region in which a plurality of compound layers 34a and a plurality of compound layers 34b are alternately stacked. Here, the Ti / Al ratio and the Cr / Al ratio in the compound layer 34a are different from the Ti / Al ratio and the Cr / Al ratio in the compound layer 34b, respectively. For example, the Cr / Al ratio in the compound layer 34a is greater than the Cr / Al ratio in the compound layer 34b, and the Ti / Al ratio in the compound layer 34b is greater than the Ti / Al ratio in the compound layer 34a. The average value of the thickness of each of the compound layer 34a and the compound layer 34b is greater than 1 nm and less than 10 nm.

[0096] In this case, the hardness of the fourth film 34 can be increased and accordingly the hardness of the third coating layer 23 can be increased. Thus, the strength of the fourth film 34 can be increased and accordingly the strength of the third coating layer 23 can be increased. As a result, the life of the coated tool 1 can be extended.

[0097] For example, the ratio of elements in the coating layer or film included in the coating layer 20A can be determined by analysis based on X-ray photoelectron spectroscopy (XPS) or analysis using an energy dispersive X-ray spectrometer (EDS) attached to a scanning transmission electron microscope (STEM). The presence of a plurality of alternately stacked compound layers in the film included in the coating layer 20A can be confirmed by a bright field image or a high-angle scattered annular dark field image obtained by a scanning transmission electron microscope (STEM), or analysis using an energy dispersive X-ray spectrometer (EDS).

[0098] (Middle layer 11)

[0099] like Figure 4As shown, an intermediate layer 11 may be disposed between the substrate 10 and the coating layer 20A serving as the coating layer 20. Specifically, the intermediate layer 11 contacts the upper surface of the substrate 10 at one surface (here, the lower surface), and contacts the lower surface of the coating layer 20A (e.g., the first coating layer 21) at the other surface (here, the upper surface).

[0100] The intermediate layer 11 has a higher bonding property with the substrate 10 than the coating layer 20A. Examples of metal elements having such properties include Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, and Ti. The intermediate layer 11 contains at least one of the above metal elements. For example, the intermediate layer 11 may also contain Ti. Si is a semi-metal element, but in this specification, it is assumed that the semi-metal element is also included in the metal element.

[0101] When the intermediate layer 11 contains Ti, the content of Ti in the intermediate layer 11 may be 1.5 atomic % or more. For example, the content of Ti in the intermediate layer 11 may be 2.0 atomic % or more.

[0102] The intermediate layer 11 may also contain components other than the above-mentioned metal elements (Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, and Ti). However, from the viewpoint of bonding with the substrate 10, the intermediate layer 11 may also contain at least 95 atomic % of the above-mentioned metal elements in total. The intermediate layer 11 may also contain 98 atomic % or more of the above-mentioned metal elements in total. The ratio of the metal components in the intermediate layer 11 can be determined by analysis using an energy dispersive X-ray spectrometer (EDS) attached to a scanning transmission electron microscope (STEM), for example.

[0103] In this way, the bonding of the substrate 10 and the coating layer 20A can be improved by arranging the intermediate layer 11 having higher wettability with the substrate 10 than the coating layer 20A between the substrate 10 and the coating layer 20A. The bonding of the intermediate layer 11 with the coating layer 20A is also high, so the situation that the coating layer 20A peels off from the intermediate layer 11 is also difficult to occur.

[0104] The thickness of the intermediate layer 11 may be, for example, not less than 0.1 nm and less than 20 nm.

[0105] (Coating Layer 20B of Second Embodiment)

[0106] Next, refer to Figure 7 , Fig. 8A , Figure 8B as well as Fig. 9 The specific structure of the coating layer 20B according to the second embodiment will be described. Figure 7This is a cross-sectional view showing an example of a coating layer according to the second embodiment. Fig. 8A It is a schematic diagram explaining the Ti / Al ratio in the coating layer of the second embodiment. Figure 8B It is a schematic diagram for explaining the Cr / Al ratio in the coating layer of the second embodiment. Fig. 9 This is a cross-sectional view showing an example of a fourth coating layer included in the coating layer of the second embodiment.

[0107] like Figure 7 As shown, the coating layer 20B of the second embodiment is different from the coating layer 20A of the first embodiment in that the coating layer 20B of the second embodiment further includes a fourth coating layer 24 located on the third coating layer 23. The description of the structure of the coating layer 20B of the second embodiment that is the same as the structure of the coating layer 20A of the first embodiment is omitted.

[0108] (Fourth coating layer 24)

[0109] The fourth coating layer 24 is as follows Figure 7 As shown, a fifth film 35 and a sixth film 36 are included.

[0110] The fifth film 35 contains Al, Ti, and N. The fifth film 35 may be, for example, an AlTiN film containing AlTiN as nitrides of Al and Ti. Writing such as "AlTiN" means that Al, Ti, and N exist in an arbitrary ratio, and does not mean that Al, Ti, and N must exist one to one. The fifth film 35 may also be a film further containing Cr. In this case, the fifth film 35 may also be, for example, an AlTiCrN film containing AlTiCrN as nitrides of Al, Ti, and Cr. The thickness of the fifth film 35 is, for example, not less than 200 nm and not more than 400 nm.

[0111] The sixth film 36 contains Al, Cr, and N. The sixth film 36 may be, for example, an AlCrN film containing AlCrN as nitrides of Al and Cr. Writing such as "AlCrN" means that Al, Cr, and N exist in an arbitrary ratio, and does not mean that Al, Cr, and N must exist one to one. The sixth film 36 may also be a film further containing Ti. In this case, the sixth film 36 may be, for example, an AlTiCrN film containing AlTiCrN as nitrides of Al, Ti, and Cr. The thickness of the sixth film 36 is, for example, not less than 200 nm and not more than 400 nm.

[0112] The fifth film 35 has a Ti / Al ratio higher than the Ti / Al ratio in the third film 33. Here, the Ti / Al ratio means the ratio of the number of atoms of Ti to the number of atoms of Al. Thus, the wear resistance and fracture resistance of the coating layer 20B can be further improved. The fifth film 35 may also be a film having a Cr / Al ratio lower than the Cr / Al ratio in the third film 33.

[0113] The sixth film 36 has a Cr / Al ratio higher than the Cr / Al ratio in the fourth film 34. Here, the Cr / Al ratio means the ratio of the number of atoms of Cr to the number of atoms of Al. Thus, the lubricity and adhesion resistance of the coating layer 20B can be further improved. The sixth film 36 may also be a film having a Ti / Al ratio lower than the Ti / Al ratio in the fourth film 34.

[0114] The fourth coating layer 24 can further improve the wear resistance and fracture resistance of the coating layer 20B and further improve the lubricity and adhesion resistance of the coating layer 20A. As a result, the life of the coated tool 1 can be further extended.

[0115] In the coating layer 20B, the third coating layer 23 functions so as not to significantly increase the residual stress between the base body 10 and the fourth coating layer 24 which is a coating layer located on the third coating layer 23 .

[0116] Sometimes the Ti / Al ratio in the fifth film 35 is greater than 0.8 and less than 1.2. When the Ti / Al ratio in the fifth film 35 is greater than 0.8, the wear resistance and fracture resistance of the coating layer 20B can be further improved. When the Ti / Al ratio in the fifth film 35 is less than 1.2, the residual stress between the substrate 10 and the coating layer 20B can be prevented from being significantly increased. Thus, the peeling or cracking between the substrate 10 and the coating layer 20B can be reduced. As a result, the life of the coated tool 1 can be further extended.

[0117] Sometimes the Cr / Al ratio in the sixth film 36 is 0.8 or more and 1.2 or less. When the Cr / Al ratio in the sixth film 36 is 0.8 or more, the lubricity and adhesion resistance of the coating layer 20B can be further improved. When the Cr / Al ratio in the sixth film 36 is 0.8 or more and 1.2 or less, the residual stress between the substrate 10 and the coating layer 20B can be prevented from being significantly increased. Thus, the peeling or cracking between the substrate 10 and the coating layer 20B can be reduced. As a result, the life of the coated tool 1 can be further extended.

[0118] (Example of Ti / Al Ratio in Coating Layer 20B)

[0119] like Fig. 8AAs shown, the Ti / Al ratio in the coating layer 20B may also be continuously changed in the direction of the thickness of the coating layer 20B. When the Ti / Al ratio in the region of the coating layer 20B as the object is not constant, the average value of the Ti / Al ratio in the region may be used as the Ti / Al ratio in the region.

[0120] exist Fig. 8A In the example shown, the Ti / Al ratio in the coating layer 20B is also extremely large in the fifth film 35 included in the fourth coating layer 24. The Ti / Al ratio in the coating layer 20B is also extremely small in the sixth film 36 included in the fourth coating layer 24.

[0121] Here, the maximum value of the Ti / Al ratio in the fifth film 35 is larger than the maximum value of the Ti / Al ratio in the third film 33. On the other hand, the minimum value of the Ti / Al ratio in the sixth film 36 is smaller than the minimum value of the Ti / Al ratio in the fourth film 34. The minimum value of the Ti / Al ratio in the sixth film 36 is, for example, substantially 0.

[0122] (Example of Cr / Al Ratio in Coating Layer 20B)

[0123] like Figure 8B As shown, the Cr / Al ratio in the coating layer 20B may also be continuously changed in the direction of the thickness of the coating layer 20B. When the Cr / Al ratio in the region of the coating layer 20B as a target is not constant, the average value of the Cr / Al ratio in the region may also be used as the Cr / Al ratio in the region.

[0124] exist Figure 8B In the example shown, the Cr / Al ratio in the coating layer 20B is also extremely large in the sixth film 36 included in the fourth coating layer 24. The Cr / Al ratio in the coating layer 20B is also extremely small in the fifth film 35 included in the fourth coating layer 24.

[0125] Here, the maximum value of the Cr / Al ratio in the sixth film 36 is larger than the maximum value of the Cr / Al ratio in the fourth film 34. On the other hand, the minimum value of the Cr / Al ratio in the fifth film 35 is smaller than the minimum value of the Cr / Al ratio in the third film 33. The minimum value of the Cr / Al ratio in the fifth film 35 is, for example, substantially 0.

[0126] A coating layer 20B is shown in which a first coating layer 21, a first film 31, a second film 32, a third film 33, a fourth film 34, a fifth film 35 and a sixth film 36 are stacked in sequence on a substrate 10, but a first coating layer 21, a second film 32, a first film 31, a fourth film 34, a third film 33, a sixth film 36 and a fifth film 35 may also be stacked in sequence on the substrate 10.

[0127] (Example of the fourth coating layer 24)

[0128] like Fig. 9 As shown in FIG. 1 , sometimes the fifth film 35 included in the fourth coating layer 24 includes a region in which a plurality of compound layers 35a and a plurality of compound layers 35b are alternately stacked. Here, the Ti / Al ratio in the compound layer 35a is different from the Ti / Al ratio in the compound layer 35b. For example, the Ti / Al ratio in the compound layer 35a is greater than the Ti / Al ratio in the compound layer 35b. The average value of the thickness of each of the compound layer 35a and the compound layer 35b is greater than 1 nm and less than 10 nm.

[0129] In this case, the hardness of the fifth film 35 can be improved and the hardness of the fourth coating layer 24 can be improved accordingly. In particular, the hardness of the fourth coating layer 24 at high temperature can be improved. Thus, the strength of the fifth film 35 can be improved and the strength of the fourth coating layer 24 can be improved accordingly. In particular, the wear resistance of the fourth coating layer 24 can be improved. As a result, the life of the coated tool 1 can be further extended.

[0130] like Fig. 9 As shown in FIG. 1 , sometimes the sixth film 36 included in the fourth coating layer 24 includes a region in which a plurality of compound layers 36a and a plurality of compound layers 36b are alternately stacked. Here, the Cr / Al ratio in the compound layer 36a is different from the Cr / Al ratio in the compound layer 36b. For example, the Cr / Al ratio in the compound layer 36a is greater than the Cr / Al ratio in the compound layer 36b. The average value of the thickness of each of the compound layer 36a and the compound layer 36b is greater than 1 nm and less than 10 nm.

[0131] In this case, the hardness of the sixth film 36 can be improved and the hardness of the fourth coating layer 24 can be improved accordingly. In particular, the hardness of the fourth coating layer 24 at high temperature can be improved. Thus, the strength of the sixth film 36 can be improved and the strength of the fourth coating layer 24 can be improved accordingly. In particular, the wear resistance of the fourth coating layer 24 can be improved. As a result, the life of the coated tool 1 can be further extended.

[0132] <Method for manufacturing coated cutting tools>

[0133] Next, refer to Fig.10 An example of a method for manufacturing the coated tool 1 according to the embodiment will be described. Fig.10 1 is a diagram schematically showing an example of a film forming apparatus for forming a coating layer on a substrate. The method of manufacturing the coated tool 1 is not limited to the method shown below.

[0134] First, a substrate 10 having the shape of the coated tool 1 is prepared by a conventionally known method. Next, a coating layer 20 is formed on the surface of the substrate 10. As a film forming method of the coating layer 20, for example, a physical vapor deposition (PVD) method such as an ion plating method or a sputtering method can be used. As an example, when the coating layer 20 is prepared by the ion plating method, for example, Fig.10 An arc ion plating film forming apparatus (hereinafter referred to as an AIP apparatus) 1000 as shown.

[0135] Fig.10 The AIP device 1000 shown introduces a gas such as N2 or Ar into a vacuum chamber 101 from a gas inlet 102, and applies a high voltage between a cathode electrode 103 and an anode electrode 104 disposed in the AIP device 1000, thereby generating a gas plasma. By utilizing such a plasma, a desired metal or ceramic is evaporated and ionized from a target material 105, thereby generating metal or ceramic ions in a high energy state. The ionized metal or ceramic is attached to the surface of a substrate 10 as a sample, and a coating layer 20 is applied to the surface of the substrate 10.

[0136] like Fig.10 As shown in FIG. 1 , a plurality of substrates 10 may be placed on a tower 107 and placed on a sample support table 106. A plurality of sets (two sets in the figure) of sample support tables 106 may also be placed on a workbench not shown. Fig.10 As shown, a heater 108 for heating the substrate 10 , a gas exhaust port 109 for exhausting gas to the outside of the system, and a bias power supply 110 for applying a bias voltage to the substrate 10 are provided.

[0137] As the target 105, for example, a metal target material independently containing metal aluminum (Al), metal titanium (Ti), or metal chromium (Cr), an alloy target material composited with the above metals, or a mixed target material composed of powder or sintered body of nitrides of the above metals can be used. For example, as the target 105, a first alloy target material composited with Al and Ti and a second alloy target material composited with Al and Cr can be used.

[0138] Then, the metal source is evaporated by arc discharge or glow discharge using the target 105 to ionize the metal of the metal source and react with nitrogen (N 2 ) gas of the nitrogen source to deposit the coating layer 20 on the surface of the substrate 10 .

[0139] At this time, the sample support table 106 is controlled so that the distance from the position of the target 105 to the position of the substrate 10 is 160 mm or more, for example, 260 mm or more. A plurality of highly straight magnetic lines of force are generated from the center of the surface of the target 105 toward the substrate 10, so that the magnetic flux density near the substrate 10 becomes 0.2 to 0.8 mT (milli-Tesla).

[0140] Sometimes nitrogen gas is introduced into the AIP apparatus 1000 as a reaction gas, and the atmosphere pressure is set to 2 to 10 Pa. The temperature of the substrate 10 is maintained at 300 to 500° C. In addition, a bias voltage of −50 to −200 V is applied to the substrate 10 to generate an arc discharge of 30 to 200 A between the target 105 (cathode electrode 103 ) and the anode electrode 104 . Meanwhile, the metal is vapor-deposited on the substrate 10 while the substrate 10 is rotated and revolved.

[0141] Here, when the coating layers 20 are stacked on the substrate 10, the current value of the arc discharge generated between the target 105 as the cathode electrode 103 and the anode electrode 104 is controlled. For example, the current value of the arc discharge generated between the first alloy target composited with Al and Ti or the second alloy target composited with Al and Cr as the cathode electrode 103 and the anode electrode 104 is controlled.

[0142] For example, in order to increase (decrease) the Ti / Al ratio in the coating layer or film included in the coating layer 20 , the current value of the arc discharge generated between the first alloy target composited with Al and Ti as the cathode electrode 103 and the anode electrode 104 is increased (or decreased).

[0143] For example, in order to increase (decrease) the Cr / Al ratio in the coating layer or film included in the coating layer 20 , the current value of the arc discharge generated between the second alloy target composited with Al and Cr as the cathode electrode 103 and the anode electrode 104 is increased (or decreased).

[0144] As a method for controlling the magnetic flux density near the substrate 10, the magnetic field can be controlled by, for example, setting an electromagnetic coil or a permanent magnet as a magnetic field generating source around the target material 105, configuring a permanent magnet inside the AIP device 1000, such as in the center, or adjusting the position of adjacent targets 105.

[0145] The magnetic force is calculated by measuring the magnetic flux density at the position of the substrate 10 using a magnetic flux density meter. The magnetic flux density is expressed in mT (milli-Tesla). Here, the distance from the position of the target 105 to the position of the substrate 10 represents the distance measured at the position of the substrate 10 closest to the target 105 and the distance at which the substrate 10 is farthest from the target 105.

[0146] During film formation, Fig.10 When the period in which each position of the substrate 10 as shown becomes the direction in which the substrate 10 is closest to the target 105 is set as the rotation speed of the sample, by adjusting the rotation speed, the period of the difference in the composition of the heavy metal and the light metal in the direction of the thickness of the coating layer 20 can be adjusted. Specifically, the rotation speed of the substrate 10 and the sample support table 106 is sometimes adjusted in a manner to become a period of 2 to 20 rpm (revolutions per minute).

[0147] During film formation, the sample support tables 106 on which the substrate 10 is placed may each rotate while the tower 107 rotates, and the table may be rotated in a manner that the plurality of sample support tables 106 revolve. By adjusting the timing of such revolution, the thickness of each compound layer constituting the first coating layer 21, the second coating layer 22 (the first film 31 and the second film 32), the third coating layer 23 (the third film 33 and the fourth film 34), and the fourth coating layer 24 (the fifth film 35 and the sixth film 36) can be controlled.

[0148] By applying a pulsed bias voltage, it is possible to adjust the time or distance for metal ions to fly from the target 105 to the substrate 10. This makes it possible to create a difference in the composition of the heavy metal component and the light metal component during film formation.

[0149] For example, when the substrate 10 is arranged so that the substrate 10 is close to the target 105 and faces each other, the heavy metal component from the target 105 flies straight toward the substrate 10, and the heavy metal is deposited on the substrate 10 more than the light metal. On the other hand, when the substrate 10 is arranged so that the substrate 10 is far away from the target 105 and faces each other, it is believed that the light metal component is detoured and deposited on the substrate 10, so the amount of accumulation of the heavy metal component is reduced. At this time, it is believed that by maintaining the distance from the position of the target 105 to the position of the substrate 10 to be long and maintaining a certain degree of magnetic flux density near the substrate 10, the detour of the light metal component is promoted, and the composition difference between the heavy metal component and the light metal component is increased.

[0150] <Cutting tools>

[0151] Next, refer to Fig.11 The structure of a cutting tool including the above-mentioned coated tool 1 will be described. Fig.11 This is a front view showing an example of a cutting tool according to an embodiment.

[0152] like Fig.11 As shown, the cutting tool 100 according to the embodiment includes a coated tool 1 and a tool holder 70 for fixing the coated tool 1 .

[0153] The handle 70 is from the first end ( Fig.11 ) toward the second end ( Fig.11 The handle 70 is a rod-shaped member extending from the lower end of the handle. The handle 70 is made of, for example, steel or cast iron. In particular, steel with higher toughness among these members is sometimes used.

[0154] The tool holder 70 has a tool groove 73 at the end of the first end side. The tool groove 73 is a portion for the coated tool 1 to be assembled, and has a seating surface intersecting with the rotation direction of the cut material and a restraining side surface inclined relative to the seating surface. A threaded hole is provided on the seating surface for screwing a screw 75 described later.

[0155] The coated tool 1 is located in the knife groove 73 of the tool holder 70 and is assembled to the tool holder 70 by means of a screw 75. That is, the screw 75 is inserted into the through hole 5 of the coated tool 1, and the front end of the screw 75 is inserted into the threaded hole formed on the seating surface of the knife groove 73 so that the screw parts are screwed together. Thus, the coated tool 1 is assembled to the tool holder 70 in a manner that the cutting edge part 3 protrudes outward from the tool holder 70.

[0156] In the embodiment, a cutting tool used in so-called turning processing is illustrated. As turning processing, for example, inner diameter processing, outer diameter processing and slotting processing can be cited. As a cutting tool, it is not limited to a cutting tool used in turning processing. For example, the coated tool 1 can also be used for a cutting tool used in milling processing. As a cutting tool used in milling processing, for example, milling cutters such as flat milling cutters, front milling cutters, side milling cutters and slotting milling cutters, and end mills such as single-edge end mills, multi-edge end mills, tapered edge end mills and ball-end end mills can be cited.

[0157] Example

[0158] Hereinafter, examples of the present invention will be described in detail. However, the present invention is not limited to the examples shown below.

[0159] use Fig.10 The AIP device shown in the figure forms a coating layer on a substrate composed of WC-based cemented carbide, thereby producing a coated tool of the embodiment. As targets, a first alloy target material composited with Al and Ti and a second alloy target material composited with Al and Cr are used. The coating layer is deposited on the substrate by reacting metal ions generated from the first alloy target material or the second alloy target material with nitrogen gas.

[0160] Here, when the substrate is rotated and revolved and the coating layer is laminated on the substrate, the current value of the arc discharge generated between the first alloy target or the second alloy target as the cathode electrode and the anode electrode is controlled as follows.

[0161] First, the current value of arc discharge generated between the first alloy target and the anode electrode was set to 190 to 210 A, and the current value of arc discharge generated between the second alloy target and the anode electrode was set to 190 to 210 A, thereby laminating the first coating layer on the substrate.

[0162] Next, the current value of arc discharge generated between the first alloy target and the anode electrode was set to 90 to 110 A and the current value of arc discharge generated between the second alloy target and the anode electrode was set to 40 to 60 A, thereby stacking the first film included in the second coating layer on the first coating layer.

[0163] Next, the current value of arc discharge generated between the first alloy target and the anode electrode was set to 40 to 60 A and the current value of arc discharge generated between the second alloy target and the anode electrode was set to 90 to 110 A, thereby stacking the second film included in the second coating layer on the first film.

[0164] Next, the current value of arc discharge generated between the first alloy target and the anode electrode was set to 110 to 130 A and the current value of arc discharge generated between the second alloy target and the anode electrode was set to 20 to 40 A, thereby stacking the third film included in the third coating layer on the second film.

[0165] Next, the fourth film included in the third coating layer was stacked on the third film by setting the current value of arc discharge generated between the first alloy target and the anode electrode to 20 to 40 A and the current value of arc discharge generated between the second alloy target and the anode electrode to 110 to 130 A.

[0166] Next, the fifth film included in the fourth coating layer was stacked on the fourth film by setting the current value of arc discharge generated between the first alloy target and the anode electrode to 140 to 160 A and the current value of arc discharge generated between the second alloy target and the anode electrode to 0 to 10 A.

[0167] Finally, the current value of arc discharge generated between the first alloy target and the anode electrode was set to 0 to 10 A and the current value of arc discharge generated between the second alloy target and the anode electrode was set to 140 to 160 A, thereby stacking the sixth film included in the third coating layer on the fifth film.

[0168] The coated cutting tool thus produced was analyzed by X-ray photoelectron spectroscopy (XPS) for elements included in the coating layer or film deposited on the substrate.

[0169] It was confirmed that the first film and the second film included in the first coating layer and the second coating layer and the third film and the fourth film included in the third coating layer each contained Al, Ti, Cr and N. It was confirmed that the fifth film included in the fourth coating layer contained Al, Ti and N. It was confirmed that the sixth film included in the fourth coating layer contained Al, Cr and N.

[0170] It can be confirmed that the Ti / Al ratio in the first coating layer, the first film, the second film, the third film, the fourth film, the fifth film, and the sixth film changes continuously with respect to the distance from the surface of the substrate in the direction of the thickness of the coating layer or the film, that is, in the direction perpendicular to the surface of the substrate. It can be confirmed that the Cr / Al ratio in the first coating layer, the first film, the second film, the third film, the fourth film, the fifth film, and the sixth film changes continuously with respect to the distance from the surface of the substrate in the direction of the thickness of the coating layer or the film, that is, in the direction perpendicular to the surface of the substrate.

[0171] It can be confirmed that the Ti / Al ratio in the first film (maximum value 0.8) is higher than the Ti / Al ratio in the first coating layer (0.6). It can be confirmed that the Cr / Al ratio in the second film (maximum value 0.8) is higher than the Cr / Al ratio in the first coating layer (0.6). It can be confirmed that the Ti / Al ratio in the third film (maximum value 1) is higher than the Ti / Al ratio in the first film (maximum value 0.8). It can be confirmed that the Cr / Al ratio in the fourth film (maximum value 1) is higher than the Cr / Al ratio in the second film (maximum value 0.8). It can be confirmed that the Ti / Al ratio in the fifth film (maximum value 1.4) is higher than the Ti / Al ratio in the third film (maximum value 1). It can be confirmed that the Cr / Al ratio in the sixth film (maximum value 1.2) is higher than the Cr / Al ratio in the fourth film (maximum value 1).

[0172] The fifth film and the sixth film were subjected to elemental analysis using an energy dispersive X-ray spectrometer (EDS). The fifth film and the sixth film were subjected to bright field images and high-angle scattered annular dark field images using a scanning transmission electron microscope (STEM).

[0173] It can be confirmed that the fifth film includes a region in which a plurality of first compound layers and a plurality of second compound layers are alternately stacked, and the sixth film includes a region in which a plurality of third compound layers and a plurality of fourth compound layers are alternately stacked. It can be confirmed that the Ti / Al ratio in the first compound layer is different from the Ti / Al ratio in the second compound layer, and the Cr / Al ratio in the third compound layer is different from the Cr / Al ratio in the fourth compound layer.

[0174] By TEM electron diffraction mapping, a grain map and an inverse pole figure orientation map of the coating layer (fourth coating layer) were obtained. By analyzing these maps, it can be confirmed that the coating layer includes a plurality of grains, and the plurality of grains include grains having a region with a continuously changing crystal orientation inside the coating layer. It is possible to confirm a region with a continuously changing crystal orientation included in a plurality of grains.

[0175] By using the TEM electron diffraction mapping method, the orientation difference of 5° or more was analyzed as the grain boundary, and the grain map was produced by dividing it into the case where Σ3CSL (re-site lattice grain boundary) was not used as the grain boundary and the case where Σ3CSL (re-site lattice grain boundary) was used as the grain boundary. Then, the weighted average of the area ratio on the grain map was taken to calculate the average grain size D1 and D2 on each grain map, and it was confirmed that the value of D2 / D1 was 0.55 to 0.95. In addition, the result of outputting the average KAM (local orientation difference) value of each grain using the above-mentioned grain mapping data and the crystal orientation analysis system was that it was confirmed that the proportion of grains with an average KAM value of 1 or more was 50% or more and 80% or less.

[0176] Adjacent pixels with an orientation difference of 5° or more from the pixel at the center of the measurement were excluded from the calculation of the KAM value as pixels beyond the grain boundary of the single crystal where the pixel at the center of the measurement is located. The sample used for the analysis was a sample in which the coating layer was thinned using the FIB method (μ-sampling method) in a direction roughly parallel to the surface of the substrate. The analysis was performed using the following apparatus and conditions.

[0177] ○TEM electron diffraction mapping method

[0178] Transmission electron microscope: JEM-ARM200F manufactured by JEOL Ltd.

[0179] Crystal orientation analysis system: ASTAR manufactured by NanoMegas

[0180] Measurement conditions Accelerating voltage: 200 kV

[0181] Measurement area: 2μm×2μm

[0182] Measurement step: 10nm

[0183] <Cutting test>

[0184] Cutting tests were conducted on the coated cutting tools of the embodiment and the coated cutting tools of the conventional products (conventional product 1 and conventional product 2) as comparative examples. The test conditions of the cutting tests were as follows. A superhard material type for drilling (model: 2ZDK060-HP-OH (internal oil supply type) φ6mm) was used as the substrate, and the cutting test was conducted under the following conditions.

[0185] (1) Cutting method: drilling

[0186] (2) Cutting material: SUS304

[0187] (3) Cutting speed Vc: 80 m / min

[0188] (4) Feed rate per revolution f: 0.07 mm / rev

[0189] (5) Axial cutting depth H: 12 mm

[0190] (6) Processing form: wet

[0191] (7) Evaluation method: The substrate was drilled under the above conditions, and the maximum wear amount (mm) of the coated tool cutting edge after 1232 holes were formed in the cut material was measured. The maximum wear amount of the cutting edge was the maximum value of the depth from the surface of the flank of the cutting edge to the part where the wear was observed.

[0192] Table 1 shows the maximum wear amount of the cutting edge of the coated tool of the example and the coated tool of the conventional product (conventional product 1, conventional product 2) relative to the number of holes formed in the workpiece.

[0193] [Table 1]

[0194]

[0195] As shown in Table 1, the maximum wear amount of the cutting edge of the coated tool of the embodiment relative to the number of holes formed in the cut material is smaller than the maximum wear amount of the cutting edge of the coated tool of the conventional product (conventional product 1, conventional product 2) relative to the same number of holes formed in the cut material. Therefore, when the coated tool of the embodiment is compared with the coated tool of the conventional product (conventional product 1, conventional product 2), it can be confirmed that the wear resistance of the coated tool of the embodiment can be improved.

[0196] Regarding the coated tool of the conventional product 2, a significant defect was generated at the corner of the coated tool when the number of holes reached 1232. On the other hand, regarding the coated tool of the embodiment, no significant defect was generated in the coated tool. Therefore, regarding the coated tool of the embodiment, it can be confirmed that the fracture resistance of the coated tool can be maintained.

[0197] As described above, the coated tool of the embodiment (as an example, the coated tool 1) includes a substrate (as an example, the substrate 10) and a coating layer (as an example, the coating layer 20) located on the substrate. The coating layer includes a plurality of crystal grains (as an example, the crystal grains 20a and 20b). The plurality of crystal grains include the following crystal grains (as an example, the crystal grain 20a), which have a plurality of regions having different crystal orientations. The TEM electron diffraction mapping method is used to analyze the crystal orientation of multiple grains in the coating layer from the planar direction of the coating layer. The first grain map is prepared by removing the area after Σ3CSL (re-site lattice grain boundary) from the area where the orientation difference between adjacent measurement points is more than 5° as the grain boundary. The average grain size of the grains obtained by taking the weighted average based on the area ratio according to the first grain map is set to D1. The second grain map is prepared by taking the area where the orientation difference between adjacent measurement points is more than 5° and Σ3CSL (re-site lattice grain boundary) as the grain boundary. The average grain size of the grains obtained by taking the weighted average based on the area ratio according to the second grain map is set to D2. In this case, the value of D2 / D1 becomes 0.55~0.95.

[0198] Therefore, according to the coated tool of the embodiment, the life of the tool can be extended.

[0199] Figure 1 The shape of the coated tool 1 shown is only an example and does not limit the shape of the coated tool according to the present invention. The coated tool according to the present invention may also have, for example: a rod-shaped body having a rotation axis and extending from a first end to a second end; a cutting edge located at the first end of the body; and a groove extending spirally from the cutting edge toward the second end of the body.

[0200] <Note>

[0201] Note (1):

[0202] A coated tool, wherein:

[0203] The coated tool has:

[0204] a substrate; and

[0205] a coating layer, which is located on the substrate,

[0206] The coating layer includes a plurality of grains,

[0207] The plurality of crystal grains include a crystal grain having a plurality of regions having mutually different crystal orientations,

[0208] Analyzing the crystal orientation of the plurality of grains in the coating layer from the plane direction of the coating layer using TEM electron diffraction mapping method,

[0209] A first grain map is prepared by removing a region where the orientation difference between adjacent measurement points is 5° or more from a region where a Σ3CSL (coincidence lattice grain boundary) is used as a grain boundary, and an average grain size of grains obtained by taking a weighted average based on an area ratio from the first grain map is set as D1.

[0210] A second grain map is prepared with the region where the orientation difference between the adjacent measurement points is 5° or more and the Σ3CSL (coincidence lattice grain boundary) as grain boundaries, and the average grain size of the grains obtained by taking a weighted average based on the area ratio according to the second grain map is set as D2. In this case,

[0211] The value of D2 / D1 is 0.55 to 0.95.

[0212] Note (2):

[0213] The coated tool according to Supplementary Note (1), wherein:

[0214] When the crystal orientation of the plurality of grains in the coating layer is analyzed from the plane direction of the coating layer using TEM electron diffraction mapping, and the region where the orientation difference between the adjacent measurement points is 5° or more and the Σ3CSL (coincidence lattice grain boundary) are used as grain boundaries,

[0215] When the average KAM value is calculated for each crystal grain in the local orientation difference map (KAM map) measured by the crystal orientation analyzer,

[0216] The ratio of the grains having an average KAM value of 1 or more is 50% to 80%.

[0217] Note (3):

[0218] The coated tool according to Supplementary Note (1) or (2), wherein:

[0219] The plurality of grains include complex nitride.

[0220] Note (4):

[0221] The coated tool according to any one of Supplementary Notes (1) to (3), wherein:

[0222] The plurality of dies include:

[0223] a plurality of first crystal grains having a plurality of regions having mutually different crystal orientations; and

[0224] A plurality of second grains having a constant crystal orientation,

[0225] The plurality of first dies are located at positions separated from each other.

[0226] Note (5):

[0227] The coated tool according to Supplementary Note (4), wherein:

[0228] The plurality of second dies are located between the plurality of first dies.

[0229] Note (6):

[0230] The coated tool according to supplementary note (4) or (5), wherein:

[0231] At least two of the plurality of second dies are adjacent to each other.

[0232] Note (7):

[0233] A cutting tool, wherein

[0234] The cutting tool has:

[0235] A rod-shaped handle having a knife groove at the end; and

[0236] Supplementary Notes: The coated cutting tool according to any one of (1) to (6), wherein the coated cutting tool is located in the cutting groove.

[0237] Further effects and / or variations can be easily derived by those skilled in the art. Therefore, the broader scheme of the present invention is not limited to the specific detailed and representative embodiments shown and described above. Therefore, various changes can be made without departing from the spirit or scope of the concept of the general invention defined by the attached technical solutions and their equivalents.

[0238] Description of Reference Numerals

[0239] 1 Coated tools

[0240] 2 Blade body

[0241] 3 Cutting edge

[0242] 5 Through holes

[0243] 10 Matrix

[0244] 11. Middle Layer

[0245] 20, 20A, 20B coating

[0246] 20a, 20b grains

[0247] 21 First coating layer

[0248] 22 Second coating layer

[0249] 23 Third coating layer

[0250] 24 Fourth coating layer

[0251] 31 First Film

[0252] 32 Second Film

[0253] 33 The third membrane

[0254] 34 The fourth membrane

[0255] 35 The Fifth Membrane

[0256] 36 The Sixth Membrane

[0257] 21a, 21b, 31a, 31b, 32a, 32b, 33a, 33b, 34a, 34b, 35a, 35b, 36a, 36b Compound layer

[0258] 70 Handle

[0259] 73 Slot

[0260] 75 Screws

[0261] 100 Cutting tools

[0262] 101 Vacuum Chamber

[0263] 102 Gas inlet

[0264] 103 cathode electrode

[0265] 104 Anode electrode

[0266] 105 Target

[0267] 106 Sample support table

[0268] 107 Tower

[0269] 108 Heater

[0270] 109 Gas Exhaust Port

[0271] 110 Bias power supply

[0272] 1000 AIP units.

Claims

1. A coated tool, wherein: The coated tool has: a substrate; and a coating layer, which is located on the substrate, The coating layer includes a plurality of grains, The plurality of crystal grains include a crystal grain having a plurality of regions having mutually different crystal orientations, Analyzing the crystal orientation of the plurality of grains in the coating layer from the plane direction of the coating layer using TEM electron diffraction mapping method, A first grain map is prepared by removing a region where the orientation difference between adjacent measurement points is 5° or more from a region where a Σ3CSL (coincidence lattice grain boundary) is used as a grain boundary, and an average grain size of grains obtained by taking a weighted average based on an area ratio from the first grain map is set as D1. A second grain map is prepared with the region where the orientation difference between the adjacent measurement points is 5° or more and the Σ3CSL (coincidence lattice grain boundary) as grain boundaries, and the average grain size of the grains obtained by taking a weighted average based on the area ratio according to the second grain map is set as D2. In this case, The value of D2 / D1 is 0.55 to 0.

95.

2. The coated tool according to claim 1, wherein: When the crystal orientation of the plurality of grains in the coating layer is analyzed from the plane direction of the coating layer using TEM electron diffraction mapping, and the region where the orientation difference between the adjacent measurement points is 5° or more and the Σ3CSL (coincidence lattice grain boundary) are used as grain boundaries, When the average KAM value is calculated for each crystal grain in the local orientation difference map (KAM map) measured by the crystal orientation analyzer, The ratio of the grains whose average KAM value is 1 or more is 50% to 80%.

3. The coated tool according to claim 1 or 2, wherein: The plurality of grains include complex nitride.

4. The coated tool according to any one of claims 1 to 3, wherein: The plurality of dies include: a plurality of first crystal grains having a plurality of regions having mutually different crystal orientations; and A plurality of second grains having a constant crystal orientation, The plurality of first dies are located at positions separated from each other.

5. The coated tool according to claim 4, wherein: The plurality of second dies are located between the plurality of first dies.

6. The coated tool according to claim 4 or 5, wherein: At least two of the plurality of second dies are adjacent to each other.

7. A cutting tool, wherein: The cutting tool has: A rod-shaped handle having a knife groove at the end; and The coated cutting tool according to any one of claims 1 to 6, which is located in the cutting groove.

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