Vibration damper and vibration damping system

Abstract

The invention relates to a shock absorber and a shock absorption system, and belongs to the technical field of precise shock absorption. The shock absorber comprises a base, a top plate, a piston and a supporting piece, a cavity is formed in the side, facing the top plate, of the base, the piston is connected with the base in the cavity in the mode that the piston can move in the depth direction of the cavity, the piston and the cavity are sealed to form a sealed cavity, the piston is connected with the top plate through the supporting piece, and therefore the pneumatic assembly with the vertical vibration reduction function is integrated in the vibration damper. The air cavity and the piston of the pneumatic assembly are both arranged at the bottom of the shock absorber, so that the air cavity and the piston are prevented from occupying the space between the base and the top plate in the shock absorber, and due to the fact that the area of the area, where the air cavity can be arranged, of the shock absorber base is larger, the shock absorber base can be more compact under the condition that the thickness of the base is not increased or slightly increased. The air cavity and the piston are arranged in the shock absorber base, so that the device integration density can be improved, the space can be compact, and miniaturization and multi-functionalization of the shock absorber are facilitated.

Description

Technical Field

[0001] The present application relates to the technical field of precision vibration reduction, and in particular to a vibration reduction device and a vibration reduction system. Background Art

[0002] With the continuous improvement of the precision of ultra-precision processing equipment and measuring instruments, the vibration of their working environment tends to be micro-amplitude and low-frequency, which puts forward more stringent requirements on the vibration reduction performance of the vibration reduction table. The traditional passive vibration isolation technology consists of mass-spring-damper. Due to the inherent contradiction between the low-frequency vibration transmission rate and the high-frequency vibration attenuation rate, it cannot meet the vibration reduction needs of ultra-precision equipment. Therefore, some new technologies and new methods are urgently needed to improve this situation.

[0003] Active vibration reduction is an important technology to solve the above problems. Active vibration reduction systems are generally composed of passive vibration isolation elements and active actuators, such as active vibration reduction devices with air springs and voice coil motors in parallel, active vibration reduction devices composed of vibration isolation rubber and piezoelectric ceramics, and active vibration reduction devices with air springs and pneumatic actuators. These active vibration reduction devices can achieve the functions of low-frequency suppression and high-frequency isolation.

[0004] However, the device integration density in the above-mentioned active vibration absorber is low, which is not conducive to the miniaturization and multifunctionality of the vibration absorber. Summary of the invention

[0005] The purpose of the present application is to provide a vibration damper and a vibration damping system to improve the integration density of components in the existing active vibration damper, thereby facilitating the miniaturization and multifunctionality of the vibration damper.

[0006] An embodiment of the present application provides a shock absorber, which includes: a base and a top plate arranged relatively spaced apart, wherein a cavity is formed on the side of the base facing the top plate; a piston and a support member, wherein the piston is connected to the base in a manner movable along the depth direction of the cavity within the cavity and is sealed with the cavity to form a sealed cavity, and the piston is connected to the top plate via the support member.

[0007] The shock absorber further comprises: a bearing plate, a motor assembly and a motor fixing seat; wherein the bearing plate is arranged between the base and the top plate, and the bearing plate and the top plate are arranged relatively spaced apart and connected to the base; the motor fixing seat is arranged between the bearing plate and the top plate, and connected to the bearing plate; the motor assembly is arranged between the bearing plate and the top plate, and comprises a stator and a mover, wherein one of the stator and the mover is connected to the motor fixing seat, and the other is connected to the top plate.

[0008] Among them, the shock absorber also includes a motor fixing seat reinforcement plate, which is arranged between the bearing plate and the top plate, and is connected to the bearing plate and the motor fixing seat; the shock absorber has a working state and a non-working state; and when the shock absorber is in the non-working state, the motor fixing seat reinforcement plate provides support for the top plate; when the shock absorber is in the working state, the top plate is separated from the motor fixing seat reinforcement plate.

[0009] Among them, the support member is a support rod, which is arranged vertically, and a through hole is opened in the area of ​​the support plate corresponding to the support rod, the top end of the support rod is connected to the top plate, and the bottom end of the support rod passes through the through hole and is connected to the piston; and the part of the support rod located in the through hole is spaced apart from the inner side wall of the through hole, and the motor fixing seat is arranged around the support rod and is spaced apart from the support rod.

[0010] Among them, the top end of the motor fixing seat is opposite to the top end of the support rod; the shock absorber also includes: a damping member, which is connected between the top end of the motor fixing seat and the top end of the support rod and is arranged around the top end of the support rod.

[0011] The damping member is a rubber block, and the rubber block is bonded between the top end of the motor fixing seat and the top end of the support rod by glue.

[0012] The shock absorber further comprises an elastic member, one end of the elastic member along the horizontal direction is connected to the base, and the other end of the elastic member along the horizontal direction is connected to the piston.

[0013] Wherein, the elastic member is located between the piston and the inner bottom wall surface of the sealing cavity in the sealing cavity.

[0014] The elastic member includes a plurality of leaf springs stacked vertically, and two adjacent leaf springs are separated by a gasket.

[0015] An embodiment of the present application also provides a vibration reduction system, which includes any one of the above-mentioned vibration reducers.

[0016] The beneficial effects of the present application are as follows: the shock absorber and the shock absorber system provided by the present application are applied to the shock absorber system, and include a base and a top plate arranged relatively at intervals, as well as a piston and a support member, wherein a cavity is opened on the side of the base facing the top plate, the piston is connected to the base in the cavity in a manner that it can move along the depth direction of the cavity, and is sealed with the cavity to form a sealed cavity, and the piston is connected to the top plate through the support member, thereby realizing the integration of a pneumatic component with a vertical vibration reduction function in the shock absorber, and the air cavity and the piston included in the pneumatic component are both arranged at the bottom of the shock absorber, thereby avoiding the occupation of the space between the base and the top plate in the shock absorber by the air cavity and the piston, so that the space between the base and the top plate in the shock absorber can allow more devices to be arranged, and because the area of ​​the shock absorber base where the air cavity can be arranged is larger, the air cavity and the piston can be arranged inside the shock absorber base without increasing or slightly increasing the thickness of the base, thereby improving the integration density of the devices in the shock absorber, and making the space of the shock absorber compact, which is conducive to the miniaturization and multifunctionality of the shock absorber. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The technical solution and other beneficial effects of the present application will be made apparent by describing in detail the specific implementation methods of the present application in conjunction with the accompanying drawings.

[0018] Figure 1 is a schematic diagram of the three-dimensional structure of the shock absorber provided in an embodiment of the present application; Figure 2 is along Figure 1 A schematic diagram of the three-dimensional structure after cutting along the line A-A' in FIG. Figure 3 is along Figure 1 A schematic diagram of the cross-sectional structure after being cut along the line B-B' in FIG. Figure 4 is a schematic diagram of a top view of the structure of the shock absorber provided in an embodiment of the present application after the top plate is removed; Reference numerals: 10- shock absorber; 11- base; 111- cavity; 111A- sealing cavity; 12- top plate; 13- piston; 131- protrusion; 14- support member / support rod; 15- bearing plate; 151- first through hole; 16- motor fixing seat / annular wall; 16A- connecting plate; 161 / 162- semi-annular wall; 17- first motor assembly; 171- first stator; 172- first mover; 18- second motor assembly; 181- second stator; 182- The second mover; 19-motor fixing seat reinforcement plate; 20-damping element / rubber block; 21-elastic element; 211-leaf spring; 212-gasket; 22-leaf spring inner pressure ring; 221-connecting plate; 23-first locking screw; 24-second locking screw; 25-leaf spring lower pressure ring; 26-leaf spring upper pressure ring; 27-third locking screw; 28-sealing end cover; 31-sealing membrane; 32-sealing membrane inner pressure ring; 33-sealing membrane outer pressure ring; 41-screw; 42-stop plate. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and should not be construed as limiting the present application. In addition, it should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application.

[0020] In the following description, a second component is connected to a first component, which may include an embodiment in which the second component is directly connected to the first component, and may also include an embodiment in which the second component is connected to the first component through an additional component so that the second component is not directly connected to the first component.

[0021] In the following description, the second component being connected to the first component may include an embodiment in which the second component is directly connected to the first component, and may also include an embodiment in which the second component is connected to the first component through an additional component so that the second component is not directly connected to the first component.

[0022] When describing the structure of a component, when a layer or a region is referred to as being "on" or "above" another layer or another region, it may mean being directly above the other layer or another region, or having other layers or regions between it and the other layer or another region. Also, if the component is turned over, the layer or the region will be "under" or "below" the other layer or another region. In addition, the features, structures, or characteristics described below may be combined in any suitable manner in one or more embodiments.

[0023] In addition, the directional terms mentioned in the embodiments of the present application, such as [up], [down], [front], [back], [left], [right], [inside], [outside], [side], etc., are only referenced to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the embodiments of the present application, rather than to limit the embodiments of the present application. In each of the accompanying drawings, units with similar structures are represented by the same figure numbers. For clarity, the various parts in the drawings are not drawn to scale. In addition, certain related parts may not be shown in the drawings.

[0024] The following is a detailed description with reference to specific embodiments. It should be noted that the serial numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0025] See also Figures 1 to 3 , Figure 1 is a schematic diagram of the three-dimensional structure of the shock absorber provided in the embodiment of the present application, Figure 2 is along Figure 1 Schematic diagram of the three-dimensional structure after cutting along the line A-A' in FIG. Figure 3 is along Figure 1 The schematic diagram of the cross-sectional structure after the line B-B' is cut. Figures 1 to 3 As shown, the shock absorber 10 includes a base 11 and a top plate 12, a piston 13 and a support member 14 that are relatively spaced apart, wherein a cavity 111 is provided on a side of the base 11 facing the top plate 12, the piston 13 is connected to the base 11 in the cavity 111 in a manner that it can move along the depth direction of the cavity 111, and is sealed with the cavity 111 to form a sealed cavity 111A, and the piston 13 is connected to the top plate 12 through the support member 14, so that when the piston 13 moves along the depth direction of the cavity 111, it can drive the top plate 12 to move in a direction away from the base 11, or can drive the top plate 12 to move in a direction close to the base 11.

[0026] Specifically, the air pressure in the sealed cavity 111A can be adjustable, and the shock absorber 10 can have a working state and a non-working state. Moreover, when the shock absorber 10 is in the working state, the sealed cavity 111A is filled with gas, so that the piston 13 floats under the action of the air pressure in the sealed cavity 111A, so that the piston 13 drives the support member 14 to support the top plate 12 and the load on the top plate 12, so that the top plate 12 is in a suspended state, and because the pneumatic assembly composed of the sealed cavity 111A and the piston 13 has a small vertical stiffness, the pneumatic assembly can play a role in vertical vibration reduction for the top plate 12 when the top plate 12 is in a suspended state.

[0027] When the shock absorber 10 is in a non-operating state, the air pressure in the sealed cavity 111A is insufficient to cause the piston 13 to float. At this time, the piston 13 and the top plate 12 are both in a descending state and are supported by other device structures in the shock absorber 10 .

[0028] In some embodiments, Figures 1 to 3 As shown, the support member 14 may be specifically a support rod 14, and the support rod 14 is used for horizontal upward vibration reduction, so that the shock absorber 10 has both vertical and horizontal upward vibration reduction functions.

[0029] Furthermore, it should be noted that the vertical direction in the embodiment of the present application may refer to any direction perpendicular to the horizontal plane, and the horizontal direction in the embodiment of the present application may refer to any direction parallel to the horizontal plane. Specifically, the depth direction of the cavity 111 may be parallel to the vertical direction.

[0030] Specifically, Figures 1 to 3 As shown, the support rod 14 can be arranged vertically, and the opposite ends (i.e., the top end and the bottom end) of the support rod 14 can be connected to the top plate 12 and the piston 13 respectively, so that the piston 13 is connected to the top plate 12 through the support rod 14, and the bottom end of the support rod 14 is fixed to the piston 13. Moreover, since the support rod 14 has a small horizontal stiffness, the top end of the support rod 14 can drive the top plate 12 to swing horizontally within a certain range when the top plate 12 is in a suspended state, so as to achieve the purpose of horizontally reducing the vibration of the top plate 12, thereby realizing that the above-mentioned shock absorber 10 has both vertical and horizontal vibration reduction functions.

[0031] For example, Figure 2 and Figure 3 As shown, the top end of the support rod 14 can be connected to the top plate 12 by a screw 41. Specifically, a groove can be provided in the middle area of ​​the top end surface of the support rod 14, and the screw 41 can pass through the top plate 12 from the side of the top plate 12 away from the base 11 and then be fixedly connected to the groove provided on the top end surface of the support rod 14 by a thread.

[0032] In some examples, the support rod 14 may be specifically a flexible rod.

[0033] In other examples, the support rod 14 may be made of an elastic material, which may be elastically deformed when subjected to horizontal force, thereby achieving horizontal upward vibration reduction of the top plate 12 .

[0034] Furthermore, it should be noted that, compared with the solution in the related art that the air cavity and the piston included in the pneumatic component of the shock absorber are arranged between the base and the top plate, in the embodiment of the present application, the air cavity (i.e., the sealed cavity 111A) and the piston 13 included in the pneumatic component of the shock absorber 10 are arranged inside the base 11 of the shock absorber 10, thereby avoiding the occupation of the space between the base 11 and the top plate 12 in the shock absorber 10 by the sealed cavity 111A and the piston 13, so that more devices can be arranged in the space between the base 11 and the top plate 12 in the shock absorber 10, and because the area of ​​the base 11 of the shock absorber 10 where the chamber 111 can be arranged is larger, the sealed cavity 111A and the piston 13 can be arranged inside the base 11 of the shock absorber 10 without increasing or slightly increasing the thickness of the base 11, thereby improving the integration density of the devices in the shock absorber 10, and making the space of the shock absorber 10 compact, which is conducive to the miniaturization and multifunctionality of the shock absorber 10.

[0035] In addition, in the embodiment of the present application, by arranging the air cavity (i.e., the sealed cavity 111A) and the piston 13 included in the pneumatic component of the shock absorber 10 inside the base 11 of the shock absorber 10, the sealed cavity 111A can have a larger internal space, the support rod 14 can have a longer length, and a larger number of motors can be arranged in the shock absorber 10, thereby achieving a large output and effectively improving the vibration reduction effect of the above-mentioned shock absorber 10.

[0036] In some embodiments, Figures 1 to 3 As shown, in order to achieve sealing between the piston 13 and the cavity 111 to form a sealed cavity 111A, the shock absorber 10 may further include a sealing film 31, a sealing film inner pressure ring 32 and a sealing film outer pressure ring 33. The sealing film 31 may be arranged on the side of the piston 13 and the base 11 facing the top plate 12, and cover the interval area between the inner wall of the cavity 111 and the piston 13. The sealing film inner pressure ring 32 may be arranged on the side of the piston 13 facing the top plate 12, and the portion of the sealing film 31 located directly above the piston 13 is sealed to the piston 13. The sealing film outer pressure ring 33 may be arranged on the side of the base 11 facing the top plate 12, and the portion of the sealing film 31 located directly above the base 11 is sealed to the base 11, thereby achieving the sealing of the piston 13 and the cavity 111 through the sealing film 31 to form a sealed cavity 111A.

[0037] The sealing film 31 may be made of a flexible material to ensure that the piston 13 can move in the cavity 111 along the depth direction of the cavity 111 .

[0038] In some embodiments, Figures 1 to 3As shown, the shock absorber 10 may further include a bearing plate 15, which is disposed between the base 11 and the top plate 12, and the bearing plate 15 is disposed relatively spaced from the top plate 12 and connected to the base 11. Specifically, the base 11 may include a middle area and an edge area surrounding the middle area, and the cavity 111 may be specifically disposed in the middle area of ​​the base 11, and the bearing plate 15 may be connected to the edge area of ​​the base 11 by screws. In this way, by arranging the bearing plate 15 between the base 11 and the top plate 12, not only can the sealed cavity 111A in the base 11 be separated from the space between the base 11 and the top plate 12 by the bearing plate 15, but also the bearing plate 15 can be used to support other devices disposed between the base 11 and the top plate 12, thereby improving the structural stability of the shock absorber 10.

[0039] And, in specific implementation, Figures 1 to 3 As shown, a first through hole 151 may be provided in the region of the bearing plate 15 corresponding to the support rod 14, and one end (i.e., the top end) of the support rod 14 may be connected to the top plate 12, and the other end (i.e., the bottom end) of the support rod 14 may pass through the first through hole 151 and be connected to the piston 13. In addition, the portion of the support rod 14 located in the first through hole 151 is spaced apart from the inner side wall of the first through hole 151 to ensure that the support rod 14 does not touch the inner side wall of the first through hole 151 during its horizontal swing, thereby ensuring the vibration reduction effect of the support rod 14 in the horizontal direction.

[0040] In some embodiments, Figures 1 to 4 As shown, the shock absorber 10 may further include a motor fixing seat 16 and a first motor assembly 17. The motor fixing seat 16 is disposed between the base 11 and the top plate 12, and is connected to the base 11. The first motor assembly 17 is disposed between the base 11 and the top plate 12, and includes a first stator 171 and a first mover 172. One of the first stator 171 and the first mover 172 is connected to the motor fixing seat 16, and the other is connected to the top plate 12, so that the first stator 171 or the first mover 172 is locked on the base 11 through the motor fixing seat 16. In addition, the first mover 172 may be configured to move in a first horizontal direction relative to the first stator 171, wherein the first horizontal direction refers to a direction parallel to the horizontal plane, for example, it may be a horizontal transverse direction or a horizontal longitudinal direction, and the horizontal transverse direction is perpendicular to the horizontal longitudinal direction.

[0041] For example, Figures 1 to 4As shown, the first stator 171 included in the above-mentioned first motor assembly 17 can be connected to the motor fixing seat 16, for example, it can be connected to the motor fixing seat 16 through an adapter, and the first mover 172 included in the above-mentioned first motor assembly 17 can be connected to the top plate 12, for example, it can be connected to the top plate 12 through screws, so that the first stator 171 included in the above-mentioned first motor assembly 17 is locked on the base 11 through the motor fixing seat 16.

[0042] Specifically, in the above embodiment where the shock absorber 10 further includes a bearing plate 15, as shown in FIG. Figures 1 to 3 As shown, the motor fixing seat 16 can be specifically arranged between the bearing plate 15 and the top plate 12, and connected to the bearing plate 15, for example, it can be connected to the bearing plate 15 by screws, so that the motor fixing seat 16 is connected to the base 11 through the bearing plate 15.

[0043] Specifically, in the above embodiment where the shock absorber 10 further includes a bearing plate 15, as shown in FIG. Figures 1 to 4 As shown, the shock absorber 10 may further include a second motor assembly 18, which is disposed between the bearing plate 15 and the top plate 12 and includes a second stator 181 and a second mover 182. One of the second stator 181 and the second mover 182 is connected to the bearing plate 15, and the other is connected to the top plate 12. In addition, the second mover 182 may be configured to move in a second horizontal direction relative to the second stator 181, wherein the second horizontal direction refers to a direction parallel to the horizontal plane and perpendicular to the first horizontal direction, for example, the second horizontal direction and the first horizontal direction may be specifically a horizontal horizontal direction and a horizontal longitudinal direction, respectively.

[0044] For example, Figures 1 to 4 As shown, the second stator 181 included in the second motor assembly 18 can be connected to the motor fixing seat 16, for example, it can be connected to the supporting plate 15 through an adapter, and the second mover 182 included in the second motor assembly 18 can be connected to the top plate 12, for example, it can be connected to the top plate 12 through screws, so that the second stator 181 included in the second motor assembly 18 is locked on the base 11 through the supporting plate 15.

[0045] Furthermore, in a specific implementation, in the above-mentioned shock absorber 10, the number of the first motor assemblies 17 can be multiple, and the number of the second motor assemblies 18 can also be multiple. Specifically, the multiple first motor assemblies 17 can be divided into two groups, and the two groups of first motor assemblies 17 can be respectively arranged in the edge areas on both sides of the space between the bearing plate 15 and the top plate 12 in the above-mentioned shock absorber 10 along the first direction. The multiple second motor assemblies 18 can be divided into two groups, and the two groups of second motor assemblies 18 can be respectively arranged in the edge areas on both sides of the space between the bearing plate 15 and the top plate 12 in the above-mentioned shock absorber 10 along the second direction. The second direction is perpendicular to the first direction, and both are directions parallel to the horizontal plane.

[0046] It should be noted that, in the above-mentioned shock absorber 10, the number and location of the first motor assembly 17 and the second motor assembly 18 can be set according to actual needs, and this case does not limit this.

[0047] For example, Figures 1 to 4 As shown, in the above-mentioned shock absorber 10, the number of the first motor components 17 can be four, and the four first motor components 17 can be divided into two groups, and the two groups of first motor components 17 can be respectively arranged in the space between the bearing plate 15 and the top plate 12 in the above-mentioned shock absorber 10 along the first direction (for example, Figure 4 In the left and right directions (in the left and right directions), the edge areas on both sides are opposite to each other, wherein each group of first motor components 17 may include two first motor components 17.

[0048] For example, Figures 1 to 4 As shown, in the above-mentioned shock absorber 10, the number of the second motor components 18 can be specifically two, and the two second motor components 18 can be respectively arranged in the space between the bearing plate 15 and the top plate 12 in the above-mentioned shock absorber 10 along the second direction (for example, Figure 4 In the opposite side edge areas (in the front-to-back direction).

[0049] In some specific embodiments, Figures 1 to 4 As shown, the motor mounting base 16 can be arranged around the support rod 14 and spaced apart from the support rod 14 to ensure that the support rod 14 does not touch the motor mounting base 16 during its horizontal swing, thereby ensuring the horizontal upward vibration reduction effect of the support rod 14.

[0050] Specifically, Figures 1 to 3 As shown, the top end of the motor fixing base 16 and the top end of the support rod 14 may be opposite to each other, and the shock absorber 10 may further include a damping member 20, which is connected between the top end of the motor fixing base 16 and the top end of the support rod 14, and may be arranged around the top end of the support rod 14. In addition, the damping member 20 may provide only damping, or may provide both damping and stiffness.

[0051] Furthermore, in a specific implementation, the damping member 20 may adopt a damping member having both small vertical stiffness and small horizontal stiffness to ensure that when the damping member 20 is subjected to horizontal force, the damping member 20 will undergo elastic deformation, and when the damping member 20 is subjected to vertical force, the damping member 20 will also undergo elastic deformation.

[0052] Exemplarily, the material of the damping member 20 may be an elastic material such as rubber. For example, the damping member 20 may be a rubber block 20 , which can provide both damping and resistance.

[0053] Furthermore, in a specific implementation, the damping member 20 (or the rubber block 20 ) can be bonded between the top end of the motor fixing base 16 and the top end of the support rod 14 by glue, and completely fill the gap between the top end of the motor fixing base 16 and the top end of the support rod 14 .

[0054] In this way, by making the top end of the motor fixing seat 16 face the top end of the support rod 14, and filling the damping member 20 in the gap between the top end of the motor fixing seat 16 and the top end of the support rod 14 to increase the damping, on the one hand, the vibration can be quickly attenuated, and on the other hand, the stiffness of the shock absorber 10 can be adjusted by the damping member 20, so that when other structural parts remain unchanged, only the material of the damping member 20 is changed, different stiffness can be obtained within a certain range, thereby meeting the vibration reduction requirements in different scenarios to a certain extent. For example, if the impact resistance requirement is high, the damping member 20 can be replaced with a material with high stiffness, and vice versa, thereby greatly improving the applicability of the shock absorber 10.

[0055] Specifically, Figure 4 As shown, the motor fixing seat 16 may be an annular wall 16 arranged around the support member 14 (or the support rod 14 ), and the annular wall 16 may be specifically formed by splicing two semi-annular walls 161 / 162 .

[0056] And, in specific implementation, Figure 4 As shown, the cross section of the inner side wall of the annular wall 16 may be circular, and the cross section of the outer side wall of the annular wall 16 may be square.

[0057] For example, Figure 4 As shown, the cross section of the outer wall of the annular wall 16 may be square, and the four corners of the outer wall of the annular wall 16 may be provided with square openings. In addition, in the shock absorber 10, the number of the first motor components 17 may be four, and the first stators 171 of the four first motor components 17 may be mounted one by one on the inner wall surfaces of the square openings at the four corners of the outer wall of the annular wall 16.

[0058] For example, Figures 1 to 3 As shown, the bottom end of the motor fixing seat 16 may be provided with a connecting plate 16A protruding laterally, and the connecting plate 16A may be fixedly connected to the supporting plate 15 by screws, thereby achieving a fixed connection between the bottom end of the motor fixing seat 16 and the supporting plate 15 .

[0059] For example, Figures 1 to 3 As shown, the shock absorber 10 may further include a stop plate 42, which is located between the top plate 12 and the motor fixing seat 16 and connected to the top end of the motor fixing seat 16, for example, it may be connected to the top end of the motor fixing seat 16 by screws. The stop plate 42 is arranged around the support rod 14 and is spaced apart from the support rod 14. Moreover, the spacing distance between the stop plate 42 and the support rod 14 may be smaller than the spacing distance between the top end of the motor fixing seat 16 and the support rod 14. In this way, the maximum amplitude of the horizontal swing of the support rod 14 can be controlled by replacing the stop plate 42.

[0060] In some specific embodiments, Figures 1 to 4 As shown, the shock absorber 10 may further include a motor fixing seat reinforcement plate 19 , which is disposed between the bearing plate 15 and the top plate 12 , and connected to the bearing plate 15 and the motor fixing seat 16 , thereby increasing the strength of the motor fixing seat 16 .

[0061] Specifically, the motor fixing seat reinforcement plate 19 can also be configured to provide support for the top plate 12 when the shock absorber 10 is in a non-working state. In a specific implementation, one end (i.e., the bottom end) of the motor fixing seat reinforcement plate 19 in the vertical direction can be connected to the bearing plate 15, for example, it can be connected to the bearing plate 15 by screws, and the other end (i.e., the top end) of the motor fixing seat reinforcement plate 19 in the vertical direction can be arranged toward the top plate 12. In addition, when the shock absorber 10 is in a non-working state, the top plate 12 can contact with the top end of the motor fixing seat reinforcement plate 19, so that the weight of the top plate 12 and the load on the top plate 12 is carried by the motor fixing seat reinforcement plate 19; when the shock absorber 10 is in a working state, the top plate 12 can be separated from the top end of the motor fixing seat reinforcement plate 19 to achieve vibration reduction of the top plate 12.

[0062] Furthermore, in the above-mentioned embodiment where the motor fixing seat 16 is an annular wall 16 formed by splicing two semi-annular walls 161 / 162, as Figures 1 to 4 As shown, the motor fixing seat reinforcement plate 19 can be connected to both of the two semi-annular walls 161 / 162 to lock the two semi-annular walls 161 / 162 together, thereby improving the strength of the motor fixing seat 16 .

[0063] For example, Figures 1 to 4 As shown, in the shock absorber 10, the number of the motor fixing seats 16 can be two, and the two motor fixing seats 16 can be respectively arranged at the joints on the opposite sides of the annular wall 16, and each motor fixing seat 16 can connect the two semi-annular walls 161 / 162 at the corresponding joints together.

[0064] In the above embodiment, if Figures 1 to 3 As shown, the shock absorber 10 may further include an elastic member 21, which is used to provide horizontal rigidity, and one end of the elastic member 21 along the horizontal direction may be connected to the base 11, and the other end of the elastic member 21 along the horizontal direction may be connected to the piston 13. In addition, during specific implementation, the elastic member 21 may be an elastic member with small vertical rigidity and large horizontal rigidity, so that not only the horizontal movement of the piston 13 can be limited by the elastic member 21, but also the piston 13 can move vertically up and down within a specific range, thereby improving the impact resistance of the shock absorber 10.

[0065] Specifically, Figures 1 to 3 As shown, the elastic member 21 may be located between the piston 13 and the inner bottom wall of the sealing cavity 111A in the sealing cavity 111A. In addition, one end of the elastic member 21 along the horizontal direction may be connected to the inner bottom wall of the sealing cavity 111A in the sealing cavity 111A, and the other end of the elastic member 21 along the horizontal direction may be connected to the piston 13 in the sealing cavity 111A.

[0066] In some embodiments, the elastic member 21 may include a leaf spring 211, for example, the leaf spring 211 provides stiffness but does not provide damping. Specifically, the leaf spring 211 may be arranged parallel to the horizontal plane, and the shape of the leaf spring 211 may be a strip or a ring.

[0067] Exemplarily, the shape of the leaf spring 211 may be a long strip, and one end of the leaf spring 211 along its length direction may be connected to the base 11 , and the other end of the leaf spring 211 along its length direction may be connected to the piston 13 .

[0068] Exemplarily, the shape of the leaf spring 211 may be specifically annular, and the outer end of the leaf spring 211 may be connected to the base 11 , and the inner end of the leaf spring 211 may be connected to the piston 13 .

[0069] In some specific embodiments, Figures 1 to 3As shown, the elastic member 21 may include a plurality of leaf springs 211 stacked vertically, and two adjacent leaf springs 212 are separated by a gasket 212. In addition, in a specific implementation, during the use of the shock absorber 10, the number of leaf springs 211 included in the elastic member 21 may be adjusted according to actual needs to achieve the purpose of changing the stiffness.

[0070] Specifically, Figures 1 to 3 As shown, the elastic member 21 may be annular and include a plurality of annular leaf springs 211 stacked vertically, and two adjacent annular leaf springs 212 are separated by a gasket 212 .

[0071] And, in specific implementation, Figures 1 to 3 As shown, the piston 13 may have a first surface (i.e., an upper surface) facing the top plate 12 and a second surface (i.e., a lower surface) facing away from the top plate 12. Specifically, the piston 13 may further include a protrusion 131, which may be provided on the middle area of ​​the lower surface of the piston 13, and the inner end of the elastic member 21 may be located directly below the protrusion 131, so as to facilitate connecting the protrusion 131 of the piston 13 with the inner end of the elastic member 21.

[0072] For example, Figures 1 to 3 As shown, the shock absorber 10 may further include a leaf spring inner pressure ring 22 and a first locking screw 23. The leaf spring inner pressure ring 22 is located in the sealing cavity 111A. The elastic member 21 may be sleeved on the side wall of the leaf spring inner pressure ring 22. The end (i.e., the bottom end) of the leaf spring inner pressure ring 22 facing the inner bottom wall of the sealing cavity 111A may be laterally protruding and provided with a connecting plate 221. At least a portion of the connecting plate 221 is located between the inner end of the elastic member 21 and the inner bottom wall of the sealing cavity 111A. The first locking screw 23 may pass through the connecting plate 221 and the inner end of the elastic member 21 in sequence from the side of the connecting plate 221 away from the elastic member 21, and then be connected to the raised portion 131 of the piston 13 through a thread, thereby realizing the connection between the inner end of the elastic member 21 and the raised portion 131 of the piston 13.

[0073] Specifically, Figures 1 to 3 As shown, the shock absorber 10 may further include a second locking screw 24. The second locking screw 24 may pass through the middle region of the leaf spring inner pressure ring 22 and the middle region of the piston 13 in sequence from the side of the leaf spring inner pressure ring 22 away from the piston 13, and then be connected to the bottom end of the support member 14 (or the support rod 14) through a thread, thereby connecting the piston 13 to the support member 14 (or the support rod 14).

[0074] And, in specific implementation, Figures 1 to 3As shown, a window may be provided on the lower surface of the base 11 in an area corresponding to the inner bottom wall of the sealing cavity 111A, and the window is connected to the space in the sealing cavity 111A to expose the leaf spring inner pressure ring 22, the first locking screw 23 and the second locking screw 24 in the sealing cavity 111A, so as to facilitate the disassembly and assembly of the elastic member 21 in the sealing cavity 111A.

[0075] Specifically, Figures 1 to 3 As shown, the shock absorber 10 may further include a sealing end cover 28, and the sealing end cover 28 is used to cover the window opened on the lower surface of the base 11 to ensure the sealing performance of the sealing cavity 111A.

[0076] For example, Figures 1 to 3 As shown, the shock absorber 10 may further include a leaf spring lower pressure ring 25, a leaf spring upper pressure ring 26 and a third locking screw 27, wherein the leaf spring lower pressure ring 25 and the leaf spring upper pressure ring 26 are respectively on opposite sides of the elastic member 21 in the vertical direction in the sealing cavity 111A, and the leaf spring lower pressure ring 25 can be connected to the inner bottom wall of the sealing cavity 111A by screws, the outer end of the elastic member 21 can be clamped between the leaf spring lower pressure ring 25 and the leaf spring upper pressure ring 26, and the third locking screw 27 can pass through the leaf spring upper pressure ring 26 and the first end of the elastic member 21 in the horizontal direction from the side of the leaf spring upper pressure ring 26 away from the elastic member 21, and then be connected to the leaf spring lower pressure ring 25 through a thread, thereby realizing the connection of the outer end of the elastic member 21 with the inner bottom wall of the sealing cavity 111A.

[0077] In the above embodiment, the shock absorber 10 may further include a sensor assembly and a controller disposed between the base 11 (or the bearing plate 15) and the top plate 12. The sensor assembly is used to detect the movement of the top plate 12. The controller is used to: control the operation of the first motor assembly 17 and / or the second motor assembly 18 according to the detection result of the sensor assembly; and / or control the air intake or air outlet of the sealed cavity 111A according to the detection result of the sensor assembly. In this way, by controlling the output of the motor assembly and the air intake and outlet of the sealed cavity 111A, the vibration state of the top plate 12 can be changed, thereby achieving the vibration reduction effect of the shock absorber 10.

[0078] In the above embodiment, the vibration damper 10 can be used as a vibration damping platform for damping the vibration of precision equipment such as semiconductor equipment and / or precision machine tools.

[0079] As can be seen from the above, the shock absorber provided in this embodiment includes a base and a top plate arranged relatively at an interval, as well as a piston and a support member, wherein a cavity is opened on the side of the base facing the top plate, and the piston is connected to the base in the cavity in a manner that it can move along the depth direction of the cavity, and is sealed with the cavity to form a sealed cavity, and the piston is connected to the top plate through the support member, thereby realizing the integration of a pneumatic component with a vertical vibration reduction function in the shock absorber, and the air cavity and the piston included in the pneumatic component are both arranged at the bottom of the shock absorber, thereby avoiding the occupation of the space between the base and the top plate in the shock absorber by the air cavity and the piston, so that the space between the base and the top plate in the shock absorber can allow more devices to be arranged, and because the area of ​​the shock absorber base where the air cavity can be arranged is larger, the air cavity and the piston can be arranged inside the shock absorber base without increasing or slightly increasing the thickness of the base, thereby improving the integration density of the devices in the shock absorber, and making the space of the shock absorber compact, which is conducive to the miniaturization and multifunctionality of the shock absorber.

[0080] An embodiment of the present application further provides a vibration reduction system, which includes the vibration reduction device of any of the above embodiments.

[0081] Specifically, in the vibration reduction system, the shock absorber includes a base and a top plate that are relatively spaced apart, a piston and a support member, wherein a cavity is opened on the side of the base facing the top plate, the piston is connected to the base in the cavity in a manner that it can move along the depth direction of the cavity, and is sealed with the cavity to form a sealed cavity, and the piston is connected to the top plate through the support member.

[0082] Specifically, the vibration reduction system may further include a load, and the load may be fixed above the top plate of the vibration reducer, thereby achieving vibration reduction of the load.

[0083] Illustratively, the load may be a semiconductor device, a precision machine tool, or other precision equipment.

[0084] In some embodiments, the vibration reduction system may include multiple shock absorbers (for example, at least three), and the vibration reduction system may further include a workbench installed above the multiple shock absorbers, so that the height of the workbench at the location of each shock absorber can be detected by a sensor, and based on the detection result of the sensor, the output of the motor in the shock absorber and / or the air inlet and outlet of the sealed cavity can be controlled to ensure that the workbench is always in a horizontal state.

[0085] It should be noted that the vibration reduction system provided in the embodiment of the present application, since the vibration reduction device provided in the embodiment of the present application is provided, can achieve the beneficial effects that can be achieved by any vibration reduction device provided in the embodiment of the present application. Please refer to the previous embodiment for details, which will not be repeated here.

[0086] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A shock absorber, characterized in that: include: A base and a top plate are arranged relatively spaced apart, wherein a cavity is formed on a side of the base facing the top plate; A piston and a support member, wherein the piston is connected to the base in the cavity in a manner that it can move along the depth direction of the cavity, and is sealed with the cavity to form a sealed cavity, and the piston is connected to the top plate through the support member.

2. The shock absorber according to claim 1, characterized in that: The vibration absorber further comprises: A bearing plate, a motor assembly and a motor fixing seat; wherein the bearing plate is arranged between the base and the top plate, and the bearing plate and the top plate are relatively spaced and connected to the base; the motor fixing seat is arranged between the bearing plate and the top plate, and connected to the bearing plate; the motor assembly is arranged between the bearing plate and the top plate, and includes a stator and a mover, wherein one of the stator and the mover is connected to the motor fixing seat, and the other is connected to the top plate.

3. The shock absorber according to claim 2, characterized in that: The vibration absorber further comprises a motor fixing seat reinforcement plate, wherein the motor fixing seat reinforcement plate is arranged between the bearing plate and the top plate, and is connected to the bearing plate and the motor fixing seat; The shock absorber has a working state and a non-working state; Furthermore, when the shock absorber is in a non-working state, the motor fixing seat reinforcement plate provides support for the top plate; When the vibration absorber is in working state, the top plate is separated from the reinforcing plate of the motor fixing seat.

4. The vibration absorber according to claim 2, characterized in that: The support member is a support rod, which is arranged vertically, and a through hole is opened in the area of ​​the bearing plate corresponding to the support rod, the top end of the support rod is connected to the top plate, and the bottom end of the support rod passes through the through hole and is connected to the piston; and the part of the support rod located in the through hole is spaced apart from the inner side wall of the through hole, and the motor fixing seat is arranged around the support rod and spaced apart from the support rod.

5. The shock absorber according to claim 4, characterized in that The top end of the motor fixing seat is opposite to the top end of the support rod; the shock absorber further comprises: A damping member is connected between the top end of the motor fixing seat and the top end of the support rod, and is arranged around the top end of the support rod.

6. The shock absorber according to claim 5, characterized in that The damping member is a rubber block, and the rubber block is bonded between the top end of the motor fixing seat and the top end of the support rod by glue.

7. The vibration absorber according to claim 1, characterized in that: The vibration absorber further comprises: An elastic member, wherein one end of the elastic member along the horizontal direction is connected to the base, and the other end of the elastic member along the horizontal direction is connected to the piston.

8. The shock absorber according to claim 7, characterized in that The elastic member is located in the sealing cavity between the piston and the inner bottom wall surface of the sealing cavity.

9. The vibration absorber according to claim 7, characterized in that: The elastic member comprises a plurality of leaf springs stacked vertically, and two adjacent leaf springs are separated by a gasket.

10. A vibration reduction system, characterized in that: A vibration absorber comprising the vibration absorber according to any one of claims 1 to 9.

Images