Liquid supply pressure regulating and stabilizing system

Abstract

The invention discloses a liquid supply pressure regulating and stabilizing system which comprises a liquid supply part. One end of the liquid outlet pipeline is communicated with the liquid supply part, and the other end of the liquid outlet pipeline is a liquid outlet; the high-pressure pump is arranged on the liquid outlet pipeline so as to control the pressure of liquid in the liquid outlet pipeline; the pressure stabilizing assembly is arranged on the liquid outlet pipeline so as to stabilize the pressure of the liquid in the liquid outlet pipeline; and the pressure regulating assembly is arranged on the liquid outlet pipeline and is arranged between the liquid outlet and the high-pressure pump, so that liquid can be discharged from the side wall of the liquid outlet pipeline to regulate the pressure of the liquid in the liquid outlet pipeline. On the premise that the liquid outlet is closed, the pressure in the liquid outlet pipeline can be adjusted to be increased or decreased, when the valve needs to be opened for liquid outlet work, the pressure is adjusted, and the purpose of not influencing the productivity is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a liquid supply voltage regulating and stabilizing system. Background Art

[0002] In the semiconductor industry, especially in the process of degumming and stripping, there are usually photoresist and metal films on the surface of wafers or other substrates. High-pressure chemical liquids need to be sprayed onto the surface to strip the photoresist and metal films from the surface of wafers or other substrates without damaging the electronic devices on the surface, and to remove the residual photoresist on the surface. However, with the development of semiconductor technology, the diversification of substrate materials and the differentiation of structural characteristics of electronic devices, higher requirements are placed on the liquid supply system of high-pressure chemical liquids in equipment, such as automatic and rapid pressure regulation function and higher pressure stability.

[0003] The patent with publication number CN215722576U discloses a high-pressure pipeline pressure control system, which includes a liquid supply part and a pressure regulating part. The liquid supply part is composed of a liquid supply tank, a high-pressure pump, and an accumulator, and is responsible for providing high-pressure liquid with stable and constant pressure to the system. The pressure regulating part is composed of an operating system, a high-pressure pressure regulating device, a reflux pipeline diagram, and a plurality of pressure sensors. By forming a closed-loop pressure regulating pipeline, the continuous regulation and stable output of the liquid pressure at the outlet are achieved. In this system, the liquid inlet pipe of the high-pressure pump is connected to the liquid tank, and the liquid outlet pipe of the high-pressure pump is connected to the liquid inlet of the high-pressure pressure regulating device through a pressure stabilizing device and a pressure sensor. A reflux port opening control valve is installed inside the high-pressure pressure regulating device, and the reflux port pipeline is connected to the liquid supply tank. This valve is controlled by the operating system and forms a closed-loop control system with multiple pressure sensors in the system. Pressure sensors are installed on the high-pressure pressure regulating device and at the outlet of the liquid supply pipeline. When the system is working, the operating system obtains the liquid pressure value from the pressure sensor, and outputs a control signal to the reflux opening regulating valve of the high-pressure pressure regulating device according to the liquid pressure value; the valve adjusts the liquid flow rate returning through the valve according to the signal, thereby achieving the purpose of regulating the liquid pressure inside the cavity of the high-pressure pressure regulating device and in the main liquid supply path.

[0004] The existing technology can only automatically increase or decrease the liquid pressure in the high-pressure pipeline system under the premise of spraying liquid at the liquid outlet; increasing or decreasing the pressure by spraying liquid at the nozzle will take up the chip production time, that is, reduce the production capacity of the equipment. The longer the pressure adjustment time, the more the production capacity is reduced.

[0005] Therefore, it is necessary to provide a new liquid supply pressure regulating and stabilizing system to solve the above problems existing in the prior art. Summary of the invention

[0006] The purpose of the present invention is to provide a liquid supply pressure regulating and stabilizing system for semiconductor processing, which can achieve the increase or decrease of the pressure in the liquid outlet pipeline under the premise of closing the liquid outlet. When it is necessary to open the valve to discharge the liquid, the pressure has been adjusted, so as not to affect the production capacity.

[0007] To achieve the above object, the technical solution of the present invention is as follows: A liquid supply, pressure regulating and stabilizing system comprises a liquid supply part; A liquid outlet pipe, one end of which is connected to the liquid supply part and the other end of which is a liquid outlet; A high-pressure pump, disposed in the liquid outlet pipeline, to control the liquid pressure in the liquid outlet pipeline; A pressure stabilizing component, disposed in the liquid outlet pipe, to stabilize the pressure of the liquid in the liquid outlet pipe; The pressure regulating component is arranged in the liquid outlet pipeline and placed between the liquid outlet and the high-pressure pump, so that the side wall of the liquid outlet pipeline can discharge liquid to regulate the liquid pressure in the liquid outlet pipeline.

[0008] By adopting the above technical solution and setting up a pressure stabilizing component and a pressure regulating component, it is possible to increase or decrease the pressure in the liquid outlet pipeline under the premise that the liquid outlet is closed. When liquid discharge is required, the pressure has been adjusted, thereby achieving the purpose of not affecting production capacity.

[0009] Optionally, the voltage regulating component includes: a control system, electrically connected to the high-pressure pump to control the pressure of the high-pressure pump; A pressure regulating pipeline, one end of which is connected to the side wall of the liquid outlet pipeline and is placed between the liquid outlet and the high-pressure pump; A first regulating valve is arranged on the liquid outlet pipeline and placed between the liquid outlet and the pressure regulating pipeline; A second regulating valve is arranged on the pressure regulating pipeline to adjust the opening size of the second regulating valve; The first regulating valve and the second regulating valve are both electrically connected to the control system.

[0010] By adopting the above technical solution, a pressure regulating pipeline is set on the liquid outlet pipeline, and a first regulating valve and a second regulating valve are set to respectively control the on-off of the liquid outlet pipeline and the pressure regulating pipeline, thereby achieving the ability to adjust the pressure of the liquid in the liquid outlet pipeline when the liquid outlet is closed.

[0011] Optionally, a first sensor is provided on the liquid outlet pipe and is electrically connected to the control system. The first sensor is placed between the first regulating valve and the liquid outlet to detect the pressure of the sprayed liquid.

[0012] By adopting the above technical solution, the first sensor detects the pressure of the sprayed liquid and feeds back to the control system, so that the control system can monitor the pressure of the liquid at the liquid outlet in real time.

[0013] Optionally, a second sensor is provided on the liquid outlet pipeline and is electrically connected to the control system. The second sensor is placed between the first regulating valve and the pressure regulating pipeline to detect the pressure of the liquid in the liquid outlet pipeline.

[0014] By adopting the above technical solution, the second sensor detects the pressure in the liquid outlet pipe and feeds back to the control system, so that the control system can adjust the pressure of the liquid in the liquid outlet pipe according to the feedback value.

[0015] Optionally, the pressure stabilizing assembly includes a pressure stabilizing device, which is disposed on a side wall of the liquid outlet pipe and placed between the first regulating valve and the second sensor; When reducing the pressure, the control system adjusts the output pressure of the high-pressure pump. At this time, there is high-pressure liquid in the liquid outlet pipe. The control system reads the detection value of the second sensor, controls the first regulating valve to close, and the second regulating valve to open. After the pressure stabilizes, the second regulating valve is closed to complete the pressure reduction. When boosting the pressure, the control system adjusts the output pressure of the high-pressure pump, reads the detection value of the second sensor, controls the first regulating valve and the second regulating valve to close, and completes the boosting after the required pressure is stabilized.

[0016] By adopting the above technical solution, a pressure stabilizing device is provided, and the pressure stabilizing device cooperates with the high-pressure pump to stabilize the pressure of the liquid in the liquid outlet pipe, thereby improving the stability of the pressure of the liquid in the liquid outlet pipe.

[0017] Optionally, a control pipe is provided on the upper side wall of the liquid outlet pipe, and the pressure stabilizing device is provided at the end of the control pipe.

[0018] By adopting the above technical solution, the pressure stabilizing device is arranged at the end of the control pipeline. During the pressure stabilization process, the on-off of the control pipeline can be controlled to control the connection between the pressure stabilizing device and the liquid outlet pipeline.

[0019] Optionally, the pressure stabilizing assembly includes a plurality of pressure stabilizing devices, which are all disposed on the side wall of the liquid outlet pipe and placed between the first regulating valve and the second sensor, and each of the pressure stabilizing devices has a different pressure control range.

[0020] By adopting the above technical scheme, each voltage stabilizing device has a different pressure control range. Through the design of the segmented voltage stabilizing function, the problem of slow medium-voltage speed in the prior art is solved, and the impact on production capacity is avoided. At the same time, it can cover the use requirements of high-voltage processes such as semiconductor degumming process and stripping process.

[0021] Optionally, a control pipeline is provided on the upper side wall of the liquid outlet pipeline, the pressure stabilizing device is provided at the end of the control pipeline, and a control valve and a sensor element are provided on the control pipeline; When reducing the pressure, the control system adjusts the output pressure of the high-pressure pump, the control valve at the pressure stabilizing device with a higher pressure control range is closed, and the control system reads the detection value of the second sensor; at the same time, the first regulating valve is closed, and the second regulating valve is opened. After the pressure is stabilized, the second regulating valve is closed to complete the pressure reduction; When boosting the pressure, the control system adjusts the output pressure of the high-pressure pump, the control valve at the pressure stabilizing device with a lower pressure control range is closed, and at the same time the first regulating valve and the second regulating valve are closed. When the pressure values ​​of the second sensor and the sensing element at the pressure stabilizing device with a higher pressure control range are the same, the control valve at the pressure stabilizing device with a higher pressure control range is opened to complete the pressure boost.

[0022] By adopting the above technical solution, the control valve is used to control the on-off of the control pipeline, and the sensor element is used to detect the pressure of the liquid at the pressure stabilizing device. When facing different pressure ranges, the control valve is opened or closed to activate the pressure stabilizing device of the corresponding pressure range.

[0023] Optionally, the other end of the pressure regulating pipe can be detachably disposed on the liquid supply part and connected to the liquid supply part.

[0024] By adopting the above technical solution, the pressure regulating pipeline is connected with the liquid supply part, and the liquid discharged during the pressure regulating process can enter the liquid supply part to complete the circulation of the liquid and reduce the waste of the liquid.

[0025] Optionally, a connecting hole is provided on the side wall of the liquid supply portion, a sealing portion and a connecting portion are provided in the connecting hole, and a mounting groove is provided on the inner side wall of the connecting hole; The connecting portion is connected to the pressure regulating pipeline; The sealing portion comprises: A sealing plate, movably disposed in the mounting groove, for sealing the communicating hole; A pushing block, fixedly arranged on the sealing plate and having a pushing guide surface; Wherein, the pressure regulating pipeline is connected to the connecting part, and pushes the pushing block to move, and the sealing plate to move, so that the pressure regulating pipeline is connected to the liquid supply part.

[0026] By adopting the above technical solution, the pressure regulating pipe and the liquid supply part can be connected or separated according to the use requirements, wherein when the liquid outlet pipe is connected, the sealing part is driven to move, so that the sealing part is opened or closed, so that the inside of the liquid supply part can be connected with the outside through the connecting hole or the connecting hole is closed, so as to facilitate the liquid to enter the liquid supply part through the pressure regulating pipe; when the pressure regulating pipe is separated from the liquid supply part, the liquid will not leak from the connecting hole.

[0027] The beneficial effects of the liquid supply pressure regulating and stabilizing system provided by the present invention include at least: 1. Under the premise of closing the outlet, the pressure in the outlet pipe can be increased or decreased. When the valve needs to be opened for outlet work, the pressure has been adjusted, so as not to affect the production capacity; 2. Realize the rapid pressure reduction function of the high-pressure liquid supply pressure regulation and stabilization system. Compared with the existing technology, it improves the pressure reduction regulation efficiency while avoiding the impact on production capacity; 3. The design of the segmented voltage stabilization function solves the problem of slow pressure rise in the existing liquid supply pressure regulation and stabilization system, and also avoids the impact on production capacity; 4. The design of segmented voltage stabilization function solves the problem that a single voltage stabilization device cannot cover the use requirements of high-voltage processes such as semiconductor degumming process and stripping process. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a structural schematic diagram of a single pressure stabilizing device of a liquid supply pressure regulating and stabilizing system according to an embodiment of the present invention; Figure 2 A cross-sectional view of the internal structure of a connecting hole of a liquid supply, pressure regulating and stabilizing system according to an embodiment of the present invention; Figure 3 The present invention is a schematic structural diagram of a plurality of pressure stabilizing devices in a liquid supply pressure regulating and stabilizing system according to an embodiment of the present invention.

[0029] Reference numerals: 100, liquid supply part; 200, liquid outlet pipeline; 210, liquid outlet; 300, high-pressure pump; 410, control system; 420, pressure regulating pipeline; 430, first regulating valve; 440, second regulating valve; 450, first sensor; 460, second sensor; 510, pressure stabilizing device; 520, control pipeline; 530, third pressure stabilizing member; 540, fourth pressure stabilizing member; 550, third valve; 560, fourth valve; 570, third sensor; 580, fourth sensor; 610, connecting hole; 620, sealing part; 621, sealing plate; 622, pushing block; 623, pushing guide surface; 624, spring; 630, connecting part; 640, mounting groove; 700, adjusting member; 800, sealing gasket. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0031] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0032] In the semiconductor industry, especially in the degumming and stripping processes, there are usually photoresist films and metal films on the surface of wafers or other substrates. High-pressure chemical liquids need to be sprayed onto the surface to strip the photoresist films and metal films from the surface of the wafer or other substrates without damaging the electronic devices on the surface, and remove the residual photoresist on the surface. However, with the development of semiconductor technology, the diversification of substrate materials and the differentiation of structural characteristics of electronic devices, higher requirements are placed on the liquid supply system of the equipment's high-pressure chemical liquid, such as automatic and rapid pressure regulation function, higher pressure stability, etc.

[0033] The prior art can only automatically increase or decrease the liquid pressure in the high-pressure pipeline system under the premise of liquid spraying at the liquid outlet 210, and the prior art has the following disadvantages: Disadvantage 1: Increasing or decreasing the pressure by spraying liquid through the nozzle of the liquid outlet 210 will occupy the production time of the chip, that is, reduce the production capacity of the equipment; the longer the pressure adjustment time, the more the production capacity is reduced.

[0034] Disadvantage 2: If the pressure stabilizing device 510 is not installed in the pipeline, the pressure fluctuation will be very large, which usually cannot meet the semiconductor production process requirements. If the pressure stabilizing device 510 is added, when the pressure is reduced through the nozzle, the nozzle outlet aperture is small, resulting in a very slow pressure reduction speed, which may even take tens of minutes, which will greatly reduce the production capacity of the equipment.

[0035] Disadvantage 3: When the prior art adds a voltage stabilizing device 510 for voltage boost regulation, it is necessary to first increase the pressure in the voltage stabilizing device 510 to a predetermined pressure, resulting in a long boost time; and this time takes up production time, thus also reducing the production capacity of the equipment.

[0036] Disadvantage 4: Because the voltage stabilizing devices 510 have an applicable pressure range, but the range of a single accumulator usually cannot cover the use requirements of high-pressure processes such as semiconductor degumming processes and stripping processes.

[0037] Therefore, the liquid supply pressure regulating and stabilizing system in the present application is provided to solve the above problems.

[0038] Embodiment 1: refer to Figure 1 An embodiment of the present invention provides a liquid supply, voltage regulation and stabilization system, wherein the liquid supply, voltage regulation and stabilization system is used for semiconductor equipment, especially for the processing of wafers or substrates, wherein the liquid supply, voltage regulation and stabilization system comprises a liquid supply part 100, a liquid outlet pipe 200, a high-pressure pump 300, a voltage stabilization component and a pressure regulating component, wherein the liquid supply part 100 is a hollow cavity, in which liquid can be stored, and one end of the liquid outlet pipe 200 is fixedly arranged on the side wall of the liquid supply part 100, and the fixing method thereof can be bonding, welding or threaded connection, etc. In the present embodiment In the example, the liquid outlet pipe 200 is selected to be fixedly arranged on the side wall of the liquid supply part 100 by means of threaded connection. At the same time, the liquid outlet pipe 200 is connected with the inside of the liquid supply part 100, so that the liquid inside the liquid supply part 100 can enter the liquid outlet pipe 200. The other end of the liquid outlet pipe 200 is a liquid outlet 210 for discharging liquid. During operation, the liquid discharged from the liquid outlet 210 enters the chamber of the semiconductor device and sprays onto the surface of the wafer or other substrate, thereby completing the processing; at the same time, the high-pressure pump 300 is arranged at The liquid outlet pipe 200 is fixed by bolts, and the high-pressure pump 300 is fixed on the liquid outlet pipe 200. The setting method can be clamping, welding or flange connection. In this embodiment, the two are connected by flange connection, and the high-pressure pump 300 is communicated with the liquid outlet pipe 200 to increase the pressure of the liquid in the liquid outlet pipe 200 after passing through the high-pressure pump 300; the pressure stabilizing component is also arranged on the liquid outlet pipe 200, and the pressure stabilizing component cooperates with the high-pressure pump 300 to stabilize the pressure of the liquid in the liquid outlet pipe 200; the pressure regulating component is arranged on the liquid outlet pipe 200, and the pressure regulating component is arranged between the liquid outlet 210 and the high-pressure pump 300. The pressure regulating component enables the side wall of the liquid outlet pipe 200 to discharge liquid, thereby adjusting the pressure of the liquid in the liquid outlet pipe 200. Therefore, it can be achieved that the pressure of the high-pressure chemical liquid in the liquid supply pressure regulating and stabilizing system is automatically increased or decreased under the premise that the liquid outlet 210 is closed. When the valve needs to be opened to discharge liquid, the pressure has been adjusted, so as to achieve the purpose of not affecting the production capacity.

[0039] Reference Figure 1 and Figure 2The pressure regulating assembly includes a control system 410, a pressure regulating pipeline 420, a first regulating valve 430 and a second regulating valve 440, wherein the control system 410 is selected as a host computer, that is, it can be understood that the control system 410 is selected as a computer control center, so as to facilitate the control of the components in the liquid supply pressure regulating and stabilizing system. The control system 410 is electrically connected to the high-pressure pump 300 to control the output pressure of the high-pressure pump 300. At the same time, the pressure regulating assembly also has a regulating member 700, which is electrically connected to the high-pressure pump 300 and the control system 410, that is, the control system 410 is electrically connected to the high-pressure pump 300 through the regulating member 700. During the working process, the control system 410 regulates the pressure through the regulating member 700. The output pressure of the high-pressure pump 300 is regulated. Specifically, the control system 410 sends a pressure regulation command to the regulating member 700, and the regulating member 700 starts to adjust the input gas source pressure or input current of the high-pressure pump 300, so as to regulate the output pressure of the high-pressure pump 300; wherein the regulating member 700 can be a pneumatic regulating valve or an electric regulating valve or a frequency converter or a servo controller, etc., as long as the output pressure of the high-pressure pump 300 can be regulated. In actual use, different regulating members 700 are selected according to different working conditions; one end of the pressure regulating pipe 420 is fixedly arranged on the side wall of the liquid outlet pipe 200, and the fixing method thereof can be a threaded connection, a flange connection or a connection through a three-way valve, etc. In the present invention, In the embodiment, the side wall of the liquid outlet pipe 200 is integrally formed with a branch pipe, and the pressure regulating pipe 420 is connected to the branch pipe by a threaded connection, thereby connecting to the liquid outlet pipe 200. At the same time, the pressure regulating pipe 420 is communicated with the liquid outlet pipe 200, so that the liquid in the liquid outlet pipe 200 can enter the pressure regulating pipe 420, thereby completing the pressure regulation of the liquid in the liquid outlet pipe 200. The other end of the pressure regulating pipe 420 can be communicated with the liquid supply part 100, and can also be connected with other devices that can receive liquid. In this embodiment, it is preferred that the other end of the pressure regulating pipe 420 is detachably connected to the liquid supply part 100 and communicated with the inside of the liquid supply part 100 to facilitate the liquid. circulation, reducing liquid waste; the second regulating valve 440 is arranged on the pressure regulating pipeline 420 and is connected to the pressure regulating pipeline 420, and is used to control the on-off of the pressure regulating pipeline 420, thereby controlling the opening at the side wall of the liquid outlet pipeline 200, so as to control the liquid flow at the pressure regulating pipeline 420, and facilitate the liquid pressure regulation process in the liquid outlet pipeline 200. At the same time, the inner diameter of the pressure regulating pipeline 420 is much larger than the inner diameter of the liquid outlet 210, so the pressure reduction speed is much greater than the pressure reduction speed in the prior art, which greatly improves the pressure reduction efficiency; in the working process, by adjusting the second regulating valve 440, the pressure of the liquid in the liquid outlet pipeline 200 can be adjusted without opening the liquid outlet 210;The first regulating valve 430 is arranged in the liquid outlet pipeline 200, and the first regulating valve 430 is connected with the liquid outlet pipeline 200, and is used to control the on-off of the inside of the liquid outlet pipeline 200. At the same time, the first regulating valve 430 is arranged in the position of the liquid outlet pipeline 200 close to the liquid outlet 210, so as to control the flow of liquid at the liquid outlet 210. When the first regulating valve 430 is closed, the liquid cannot flow out through the liquid outlet 210, and when the first regulating valve 430 is opened, the liquid can flow out through the liquid outlet 210; in addition, the first regulating valve 430 and the second regulating valve 440 are both electrically connected to the control system 410, and the opening of the pipelines at the first regulating valve 430 and the second regulating valve 440 can be adjusted by operating the control system 410, so as to facilitate the liquid pressure regulation process in the liquid outlet pipeline 200. ;

[0040] In order to facilitate the connection between the pressure regulating pipe 420 and the liquid supply unit 100, refer to Figure 1 and Figure 2A connecting hole 610 is provided on the side wall of the liquid supply part 100, and the connecting hole 610 penetrates the liquid supply part 100 along the thickness direction of the side wall of the liquid supply part 100. At the same time, a sealing part 620 and a connecting part 630 are provided in the connecting hole 610. At the same time, a mounting groove 640 is provided on the inner wall of the connecting hole 610, and the mounting groove 640 is arranged around the inner wall of the connecting hole 610, wherein the connecting part 630 is the part of the connecting hole 610 away from the inside of the liquid supply part 100, and the connecting part 630 has a thread, and the pressure regulating pipe 420 is threadedly connected to the connecting part 630, so that the pressure regulating pipe 420 and the connecting hole 610 are connected. Specifically, the end of the pressure regulating pipe 420 is provided with a thread, and the pressure regulating The end of the pipe 420 is connected to a connecting cylinder by a threaded connection. The outer wall of the connecting cylinder away from the end of the pressure-regulating pipe 420 is also provided with a thread. The thread at this location cooperates with the thread of the connecting part 630, so that the connecting cylinder can be connected to the connecting part 630, so that the pressure-regulating pipe 420 and the liquid supply part 100 are connected. At the same time, the threaded connection is provided with a sealing treatment to reduce the possibility of liquid leakage. In addition, the sealing part 620 includes a sealing plate 621, which is movably arranged in the installation groove 640 to seal the connecting hole 610. Specifically, a sealing gasket 800 is fixedly provided on the inner wall of the installation groove 640 by bonding or bolting. 800 is made of silicone or other materials that will not affect the quality of the liquid, or materials that are less affected by liquid corrosion. There is no restriction here. Different materials can be selected according to actual usage during use. The end of the sealing plate 621 is fixedly provided with a push block 622 by an integral molding method. At the same time, a push guide surface 623 is provided on the push block 622. In addition, a spring 624 is also provided in the installation groove 640. One end of the spring 624 abuts against the inner bottom of the installation groove 640, and the other end abuts against the sealing plate 621, which is used to push the sealing plate 621 to move, thereby closing the connecting hole 610. During the working process, the pressure regulating pipeline 420 and the connecting part 63 are controlled. 0 connection, during this process, the connecting tube at the end of the pressure regulating pipeline 420 contacts the pushing guide surface 623, and pushes the pushing block 622 to move, thereby driving the sealing plate 621 to move in the mounting groove 640, so that the connecting hole 610 is opened. At this time, the pressure regulating pipeline 420 is connected to the inside of the liquid supply part 100, so that the liquid in the pressure regulating pipeline 420 can re-enter the liquid supply part 100; when the pressure regulating pipeline 420 and the liquid supply part 100 need to be separated, under the action of the spring 624, the sealing plate 621 is reset, so that the connecting hole 610 is sealed. At this time, a device for receiving residual liquid can be provided at the bottom of the liquid supply part 100 to receive part of the outflowing liquid.

[0041] Reference Figure 1 and Figure 2A first sensor 450 and a second sensor 460 are provided on the liquid outlet pipeline 200. The first sensor 450 and the second sensor 460 are both electrically connected to the control system 410. At the same time, the first sensor is provided between the first regulating valve 430 and the liquid outlet 210 to detect the pressure of the liquid sprayed from the liquid outlet 210. The second sensor 460 is provided between the first regulating valve 430 and the pressure regulating pipeline 420 to detect the pressure of the liquid in the liquid outlet pipeline 200 after the pressure regulation by the pressure regulating component, so as to facilitate real-time monitoring of the change of the liquid pressure in the liquid outlet pipeline 200.

[0042] Reference Figure 1 and Figure 2 The pressure stabilizing assembly includes a pressure stabilizing device 510, wherein the pressure stabilizing device 510 can be an accumulator or a pressure stabilizer. In the present embodiment, the pressure stabilizing device 510 is preferably selected as a pressure stabilizer, which plays a role in buffering the liquid pressure value output by the high-pressure pump 300, and can also achieve the effect of stabilizing the entire liquid supply pressure regulating and stabilizing system, so as to prevent the pressure of the liquid supply pressure regulating and stabilizing system from rising rapidly in a short period of time, thereby causing damage to components, vibration, noise and other undesirable problems. At the same time, the pressure stabilizing device 510 and the high-pressure pump 300 cooperate to jointly regulate the liquid pressure in the liquid outlet pipe 200, so that the liquid pressure in the liquid outlet pipe 200 is stable; specifically, the side wall of the liquid outlet pipe 200 is solid. A control pipeline 520 is fixedly provided, wherein a branch pipeline is fixedly provided on the side wall of the liquid outlet pipeline 200 by an integral molding manner, the branch pipeline is connected to the liquid outlet pipeline 200, and the control pipeline 520 is connected to the branch pipeline by a threaded connection, so that the control pipeline 520 and the liquid outlet pipeline 200 are connected, and a pressure stabilizing device 510 is provided at the other end of the control pipeline 520, and the pressure stabilizing device 510 is provided between the high-pressure pump 300 and the liquid outlet 210. Specifically, in the present embodiment, the pressure stabilizing device 510 is provided between the first regulating valve 430 and the second sensor 460, so as to facilitate the adjustment of the pressure of the liquid in the liquid outlet pipeline 200, thereby stabilizing the pressure of the liquid in the liquid outlet pipeline 200.

[0043] That is to say, the liquid supply part 100 is connected to the high-pressure pump 300 through the liquid outlet pipe 200, and there are two branches at the high-pressure pump 300, that is, the liquid outlet pipe 200 after passing through the high-pressure pump 300 has two branches, one of which is first connected to the second regulating valve 440, and the second regulating valve 440 is connected to the liquid supply part 100; the other is connected to the second sensor 460, the pressure stabilizing device 510, the first regulating valve 430, the first sensor 450 in sequence, and then connected to the liquid outlet 210, such as a nozzle; the high-pressure pump 300 is controlled by the regulating member 700 and the control system 410; the control system 410 sets the liquid pressure value at the liquid outlet 210, and the detection data of the first sensor 450 and the second sensor 460 are fed back to the control system 410, and the control system 410 compares and judges with the set value and issues the next adjustment instruction, thereby realizing the closed-loop pressure regulation of the liquid supply pressure regulation and stabilization system.

[0044] During the pressure reduction process, when the control system 410 receives an instruction to reduce the liquid supply pressure, the control system 410 first sends a pressure adjustment instruction to the regulating component 700, and the regulating component 700 begins to adjust the input gas source pressure or input current of the high-pressure pump 300 to reduce the output pressure of the high-pressure pump 300, that is, by adjusting the working parameters of the high-pressure pump 300 to reduce the output pressure; and uses the pressure stabilizing device 510 and the special regulating valve to ensure that the high-pressure liquid safely and quickly flows back to the low-pressure state, effectively avoiding the potential risks caused by a sudden drop in pressure.

[0045] In the boost operation, after receiving the boost command, the working state of the high-pressure pump 300 is adjusted to increase the output pressure. During this period, the system ensures the safe replacement of the low-pressure liquid in the pipeline by accurately controlling the state of the regulating valve until the system pressure reaches the predetermined high-pressure value, thereby completing a smooth transition from low pressure to high pressure.

[0046] Among them, during the pressure reduction process, since the liquid in the liquid outlet pipe 200 is reduced from a high-pressure state to a low-pressure state, some high-pressure liquid still exists in the pressure stabilizing device 510 and the liquid outlet pipe 200; the system reads the pressure value of the second sensor 460, and opens the second regulating valve 440, keeping the first regulating valve 430 in a closed state; at this time, the high-pressure liquid flows back to the liquid supply part 100 of atmospheric pressure through the second regulating valve 440, until the value of the second sensor 460 drops to the pressure value set by the host computer, the system controls the second regulating valve 440 to close; at this time, the pressure in the system has completed the pressure reduction pressure regulation process from high pressure to low pressure; since the inner diameter of the pipeline connecting the second regulating valve 440 to the liquid supply part 100 is much larger than the inner diameter of the pressure reduction nozzle in the prior art, that is, the inner diameter of the pressure regulating pipeline 420 is much larger than the inner diameter of the nozzle at the liquid outlet 210, the pressure reduction speed of this scheme is much greater than the pressure reduction speed of the prior art.

[0047] During the pressure boosting process, when the control system 410 receives an instruction to increase the liquid supply pressure, the control system 410 first sends a pressure adjustment instruction to the adjustment component 700, which begins to adjust the input gas source pressure or input current of the high-pressure pump 300 to increase the output pressure of the high-pressure pump 300; but at this time, since the liquid in the liquid outlet pipeline 200 changes from a low-pressure state to a high-pressure state, there is still some low-pressure liquid in the pressure stabilizing device 510 and the liquid outlet pipeline; the system reads the pressure value of the second sensor 460 and keeps the second regulating valve 440 and the first regulating valve 430 closed; the high-pressure pump 300 continuously inputs high-pressure liquid into the pipeline system until the pressure value of the second sensor 460 rises to the set pressure value; the pressure boosting pressure adjustment process from low pressure to high pressure is completed.

[0048] Embodiment 2: The difference between Example 2 of the present application and Example 1 is that, referring to Figure 3 The pressure stabilizing assembly includes a plurality of pressure stabilizing devices 510, where the term "multiple" is interpreted as at least two. The plurality of pressure stabilizing devices 510 are all disposed on the side wall of the liquid outlet pipe 200 and are disposed between the high-pressure pump 300 and the liquid outlet 210. Specifically, in the present embodiment, the plurality of pressure stabilizing devices 510 are all disposed between the first regulating valve 430 and the second sensor 460. Specifically, a control pipe 520 is fixedly disposed on the side wall of the liquid outlet pipe 200, wherein a branch pipeline is fixedly disposed on the side wall of the liquid outlet pipe 200 by an integral molding method, and the branch pipeline is communicated with the liquid outlet pipe 200. The control pipe 520 is connected to the branch pipeline by a threaded connection, so that the control pipe 5 20 is connected to the liquid outlet pipeline 200, and a pressure stabilizing device 510 is arranged at the other end of the control pipeline 520. In addition, each pressure stabilizing device 510 has a different pressure control range to stabilize the pressure of the liquid in the liquid outlet pipeline 200 under different pressure ranges; at the same time, a control valve and a sensor element are arranged on the control pipeline 520, wherein the sensor element is arranged between the control valve and the pressure stabilizing device 510, and is used to detect the pressure of the liquid at the pressure stabilizing device 510, and the sensor element is used to control the on-off of the control pipeline 520, so that different pressure stabilizing devices 510 are selected under different pressure value selection ranges, and at the same time, the control valve and the sensor element are electrically connected to the control system 410.

[0049] When reducing the pressure, the control system 410 controls the regulating member 700 to adjust the output pressure of the high-pressure pump 300, the control valve at the pressure stabilizing device 510 with a higher pressure control range is closed, and the control system 410 reads the detection value of the second sensor 460; at the same time, the first regulating valve 430 is closed, and the second regulating valve 440 is opened. After the pressure is stabilized, the second regulating valve 440 is closed to complete the pressure reduction; When boosting the pressure, the control system 410 controls the regulating component 700 to adjust the output pressure of the high-pressure pump 300, and the control valve at the pressure stabilizing device 510 with a lower pressure control range is closed, and at the same time the first regulating valve 430 and the second regulating valve 440 are closed. When the pressure values ​​of the sensing element of the second sensor 460 and the pressure stabilizing device 510 with a higher pressure control range are the same, the control valve at the pressure stabilizing device 510 with a higher pressure control range is opened to complete the pressure boosting.

[0050] Specifically in this embodiment, the voltage stabilizing assembly includes two groups of voltage stabilizing devices 510 as an example, wherein the control valves are defined as a third valve 550 and a fourth valve 560 along the direction from the high-pressure pump 300 to the liquid outlet 210; the sensor elements are defined as a third sensor 570 and a fourth sensor 580 along the direction from the high-pressure pump 300 to the liquid outlet 210; and the voltage stabilizing device 510 is defined as a third voltage stabilizing component 530 and a fourth voltage stabilizing component 540 along the direction from the high-pressure pump 300 to the liquid outlet 210.

[0051] That is, the liquid supply part 100 is connected to the high-pressure pump 300 through the liquid outlet pipe 200, and the liquid outlet 210 of the high-pressure pump 300 has two branches, that is, the liquid outlet pipe 200 after passing through the high-pressure pump 300 has two branches, one of which is connected to the second regulating valve 440, the second regulating valve 440 is connected to the liquid supply part 100, and the other is connected to the second sensor 460, the third valve 550, the fourth valve 560, and the first regulating valve 430 in sequence; the third valve 550 is connected to the third sensor 570 and the third pressure stabilizer 530 in sequence; the third valve 550 is connected to the third sensor 570 and the third pressure stabilizer 530 in sequence; The four valves 560 are connected to the fourth sensor 580 and the fourth pressure stabilizer 540 in sequence; the first regulating valve 430 is connected to the first sensor 450 and the liquid outlet 210, such as a nozzle, in sequence; the high-pressure pump 300 is controlled by the regulating component 700 and the control system 410; the control system 410 sets the liquid pressure value at the liquid outlet 210, and the detection data of all pressure sensors are fed back to the control system 410. After the control system 410 compares and judges with the set value, the next adjustment instruction is issued, thereby realizing closed-loop pressure regulation of the high-pressure system.

[0052] In order to solve the problem that the voltage stabilizing devices 510 in the prior art all have an applicable pressure range, but the range of a single accumulator usually cannot cover high-pressure processes such as semiconductor degumming processes and stripping processes, this solution connects multiple voltage stabilizing devices 510 with different pressure ranges into the pipeline; in actual use, the third voltage stabilizing component 530 is suitable for pressure segments with relatively low pressures, and the fourth voltage stabilizing component 540 is suitable for pressure segments with relatively high pressures.

[0053] In the pressure reduction process, after receiving the command, the control system 410 first closes the relevant valves to isolate the system, and then sends a command to the regulating member 700 to reduce the output pressure of the high-pressure pump 300. The system opens the second regulating valve 440 to allow the high-pressure liquid in the liquid outlet pipe 200 to quickly flow back to the liquid supply part 100, while maintaining a smooth transition of the system pressure. Due to the use of a pressure regulating pipe 420 with a larger inner diameter, this solution greatly improves the pressure reduction efficiency while ensuring the minimum pressure fluctuation.

[0054] Among them, during the pressure reduction process, when the control system 410 receives an instruction to reduce the pressure of the liquid supply, the control system 410 first closes the fourth valve 560 and sends a pressure adjustment instruction to the regulating member 700, and the regulating member 700 begins to adjust the input gas source pressure or input current of the high-pressure pump 300 to reduce the output pressure of the high-pressure pump 300; but at this time, there is still some high-pressure liquid in the liquid outlet pipeline 200; the system will read the pressure value of the second sensor 460, and open the second regulating valve 440, keeping the third valve 550, the fourth valve 560 and the first regulating valve 430 closed; at this time, the liquid flows back to the atmospheric pressure liquid supply part 100 through the second regulating valve 440 and the pressure regulating pipeline 420 until the pressure value of the second sensor 460 reaches . When the pressure drops to the set pressure value of the control system 410, the system automatically closes the second regulating valve 440 and opens the third valve 550; at this time, the system is still reading the pressure value of the second sensor 460 and the pressure stabilization fine adjustment, and finally quickly stabilizes to the set pressure value; at this time, the pressure in the liquid supply pressure regulation and stabilization system has completed the pressure reduction pressure regulation process from high pressure to low pressure; because this pressure reduction process only discharges the high-pressure liquid in the pipeline, the high-pressure liquid in the pressure stabilizing device 510 is not discharged, and the inner diameter of the pipeline connecting the second regulating valve 440 to the liquid supply part 100 is much larger than the inner diameter of the pressure reduction nozzle in the prior art, that is, the inner diameter of the pressure regulating pipeline 420 is much larger than the inner diameter of the nozzle at the liquid outlet 210, so this solution not only ensures that the system pressure fluctuation is small, but also its pressure reduction speed is much greater than the pressure reduction speed of the prior art.

[0055] In the pressure-increasing process, after receiving the pressure-increasing command, the control system 410 also takes a series of precise operations, including closing a specific valve and issuing a pressure-increasing command to the regulating member 700. The system monitors the pressure value of the sensor to ensure that the fourth valve 560 is opened at an appropriate time to achieve a steady increase in the pressure in the pipeline. The pressure-increasing process of this solution avoids injecting excessive high-pressure liquid into the pressure-stabilizing device 510, thereby significantly increasing the pressure-increasing speed while maintaining the system pressure stable.

[0056] In the process of boosting, when the control system 410 receives an instruction to boost the liquid supply pressure, the control system 410 first closes the third valve 550 and sends a pressure adjustment instruction to the regulating member 700, and the regulating member 700 starts to adjust the input gas source pressure or input current of the high-pressure pump 300 to increase the output pressure of the high-pressure pump 300; at this time, the system reads the pressure value of the second sensor 460, and when the pressure value of the second sensor 460 is the same as the pressure value of the fourth sensor 580, the control system 410 opens the fourth valve 560 and keeps the third valve 550, the first regulating valve 430 and the second regulating valve 440 closed; at this time, the system is still reading the pressure value of the second sensor 460 and the pressure stabilization fine adjustment, and finally quickly stabilizes to the set pressure value; at this time, the pressure in the system has completed the boost pressure adjustment process from low pressure to high pressure; since this boost process only increases the high-pressure liquid in the pipeline, it is not necessary to inject a large amount of high-pressure liquid into the pressure stabilizing device 510, so the patent not only ensures that the system pressure fluctuation is small, but also its boost speed is much greater than the boost speed of the prior art.

[0057] That is to say, in the case of multiple pressure stabilizing devices 510, the pressure stabilizing devices 510 in the corresponding pressure range can be connected to the liquid outlet pipeline 200 according to the change of the liquid pressure in the liquid outlet pipeline 200, while the pressure stabilizing devices 510 in different pressure ranges are not connected to the liquid outlet pipeline 200. By using the boost and buck functions in combination, when the liquid outlet 210 of the liquid supply, pressure regulating and stabilizing system is not discharging liquid, that is, when the equipment is still performing other process steps, the automatic and rapid pressure regulation has been completed in advance in the liquid supply, pressure regulating and stabilizing system, thereby achieving the purpose of not affecting production capacity.

[0058] When the equipment needs maintenance or repair, the control system 410 can be used to stop the pressure output of the high-pressure pump 300 and open the second regulating valve 440. At this time, the high-pressure liquid flows back to the atmospheric pressure liquid supply tank through the second regulating valve 440 and the pressure regulating pipe 420 until the pressure value of the second sensor 460 drops to the pressure value set by the control system 410. The rapid depressurization of the high-pressure pipeline system is completed, and relevant maintenance and repair operations can be carried out.

[0059] The implementation principle of a liquid supply pressure regulating and stabilizing device 510 of the present application is to form a closed-loop pressure feedback regulation system through a high-pressure pump 300, multiple sensors, a control system 410, and an adjusting member 700, thereby realizing a closed-loop regulation function of the pressure in the high-pressure liquid supply system; ensuring the stability of the pressure at the outlet 210 of the pipeline system, connecting one or more pressure stabilizing devices 510, and independently controlling the on-off of each pressure stabilizing device 510 and the outlet pipeline 200, and being able to monitor the pressure in the pressure stabilizing device 510 in real time through the sensor configured for each pressure stabilizing device 510, thereby achieving full coverage of the high-pressure pressure range in processes such as degumming and metal stripping commonly used in the semiconductor industry, and at the same time solving the problem of the pipeline system from low The problem of slow pressure boosting speed to high pressure is solved; by designing an independent pressure reduction branch in the liquid supply pressure regulating and stabilizing system, and the inner diameter of the pressure reduction branch pipeline is much larger than the inner diameter of the nozzle in the prior art, the problem of slow pressure reduction operation speed and long time in the prior art is solved; that is, the problem of reducing equipment production capacity during the normal operation of the equipment and the pressure boost and pressure reduction adjustment operations in the high-pressure liquid supply system is solved; the problem of slow pressure reduction speed through the liquid outlet 210 of the pipeline resulting in extended downtime when the equipment needs to perform maintenance or repair operations on the high-pressure liquid supply pressure regulating and stabilizing system is solved; the problem of a single pressure stabilizing device 510 (such as accumulators and other similar principle voltage stabilizing devices) usually cannot cover the use requirements of high-pressure processes such as semiconductor degumming processes and stripping processes.

[0060] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A liquid supply pressure regulating and stabilizing system, characterized in that: It comprises a liquid supply part (100); A liquid outlet pipe (200), one end of which is connected to the liquid supply portion (100) and the other end of which is a liquid outlet (210); A high-pressure pump (300) is disposed in the liquid outlet pipeline (200) to control the liquid pressure in the liquid outlet pipeline (200); A pressure stabilizing component, arranged in the liquid outlet pipe (200) to stabilize the pressure of the liquid in the liquid outlet pipe (200); A pressure regulating component is arranged in the liquid outlet pipe (200) and placed between the liquid outlet port (210) and the high-pressure pump (300), so that liquid can be discharged from the side wall of the liquid outlet pipe (200) to regulate the liquid pressure in the liquid outlet pipe (200).

2. The liquid supply pressure regulating and stabilizing system according to claim 1, characterized in that: The voltage regulating assembly comprises: A control system (410), electrically connected to the high-pressure pump (300) to control the pressure of the high-pressure pump (300); a pressure regulating pipeline (420), one end of which is connected to the side wall of the liquid outlet pipeline (200) and is placed between the liquid outlet (210) and the high-pressure pump (300); A first regulating valve (430) is arranged on the liquid outlet pipeline (200) and placed between the liquid outlet (210) and the pressure regulating pipeline (420); A second regulating valve (440) is arranged on the pressure regulating pipeline (420) to adjust the opening size of the second regulating valve (440); The first regulating valve (430) and the second regulating valve (440) are both electrically connected to the control system (410).

3. The liquid supply pressure regulating and stabilizing system according to claim 2, characterized in that: The liquid outlet pipe (200) is provided with a first sensor (450) and is electrically connected to the control system (410); the first sensor (450) is placed between the first regulating valve (430) and the liquid outlet (210) to detect the pressure of the sprayed liquid.

4. The liquid supply pressure regulating and stabilizing system according to claim 3, characterized in that: A second sensor (460) is provided on the liquid outlet pipeline (200) and is electrically connected to the control system (410); the second sensor (460) is placed between the first regulating valve (430) and the pressure regulating pipeline (420) to detect the pressure of the liquid in the liquid outlet pipeline (200).

5. The liquid supply pressure regulating and stabilizing system according to claim 4, characterized in that: The pressure stabilizing assembly comprises a pressure stabilizing device (510), wherein the pressure stabilizing device (510) is arranged on a side wall of the liquid outlet pipe (200) and is placed between the first regulating valve (430) and the second sensor (460); When reducing the pressure, the control system (410) adjusts the output pressure of the high-pressure pump (300). At this time, high-pressure liquid exists in the liquid outlet pipe (200). The control system (410) reads the detection value of the second sensor (460), controls the first regulating valve (430) to close, and the second regulating valve (440) to open. After the pressure stabilizes, the second regulating valve (440) is closed, and the pressure reduction is completed. When boosting the pressure, the control system (410) adjusts the output pressure of the high-pressure pump (300), the control system (410) reads the detection value of the second sensor (460), controls the first regulating valve (430) and the second regulating valve (440) to close, and completes the pressure boost after the required pressure is stabilized.

6. The liquid supply pressure regulating and stabilizing system according to claim 5, characterized in that: The upper side wall of the liquid outlet pipe (200) is connected to a control pipe (520), and the pressure stabilizing device (510) is arranged at the end of the control pipe (520).

7. The liquid supply pressure regulating and stabilizing system according to claim 4, characterized in that: The pressure stabilizing assembly comprises a plurality of pressure stabilizing devices (510), each of the plurality of pressure stabilizing devices (510) being arranged on a side wall of the liquid outlet pipe (200) and placed between the first regulating valve (430) and the second sensor (460), and each of the pressure stabilizing devices (510) having a different pressure control range.

8. The liquid supply pressure regulating and stabilizing system according to claim 7, characterized in that: The upper side wall of the liquid outlet pipe (200) is connected to a control pipe (520), the pressure stabilizing device (510) is arranged at the end of the control pipe (520), and a control valve and a sensor element are arranged on the control pipe (520); When reducing the pressure, the control system (410) adjusts the output pressure of the high-pressure pump (300), the control valve at the pressure stabilizing device (510) with a higher pressure control range is closed, and the control system (410) reads the detection value of the second sensor (460); at the same time, the first regulating valve (430) is closed, and the second regulating valve (440) is opened. After the pressure is stabilized, the second regulating valve (440) is closed to complete the pressure reduction; When boosting the pressure, the control system (410) adjusts the output pressure of the high-pressure pump (300), the control valve at the pressure stabilizing device (510) with a lower pressure control range is closed, and at the same time the first regulating valve (430) and the second regulating valve (440) are closed. When the pressure values ​​of the sensing element at the second sensor (460) and the pressure stabilizing device (510) with a higher pressure control range are the same, the control valve at the pressure stabilizing device (510) with a higher pressure control range is opened, and the pressure boost is completed.

9. The liquid supply pressure regulating and stabilizing system according to claim 2, characterized in that: The other end of the pressure regulating pipe (420) is detachably disposed on the liquid supply portion (100) and is connected to the liquid supply portion (100).

10. The liquid supply pressure regulating and stabilizing system according to claim 9, characterized in that: A connecting hole (610) is provided on the side wall of the liquid supply portion (100), a sealing portion (620) and a connecting portion (630) are provided in the connecting hole (610), and a mounting groove (640) is provided on the inner side wall of the connecting hole (610); The connecting portion (630) is connected to the pressure regulating pipeline (420); The sealing portion (620) comprises: A sealing plate (621) movably disposed in the mounting groove (640) and used for sealing the communicating hole (610); A pushing block (622) is fixedly disposed on the sealing plate (621) and has a pushing guide surface (623); The pressure regulating pipe (420) is connected to the connecting portion (630) and pushes the pushing block (622) to move, and the sealing plate (621) to move, so that the pressure regulating pipe (420) is connected to the liquid supply portion (100).

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