Water-free waste gas treatment device

Abstract

The invention relates to the field of waste gas purification, in particular to a waste gas anhydrous treatment device which comprises a gas inlet unit, a heat source unit, a reaction unit, a cooling unit, a slag collecting unit and a tail gas discharging unit. The gas inlet unit comprises a gas inlet pipe, and the gas inlet pipe can convey waste gas into the reaction unit; the heat source unit comprises any one of a plasma torch head, an ignition combustion flame gun and a high-temperature heating rod, and the heat source unit is mounted on the reaction unit; according to the designed water-free waste gas treatment device, waste gas is combusted through cooperation of the heat source unit and the reaction unit, products are cooled in the position of the reaction unit in a mixed mode of air cooling and water cooling when being cooled, sufficient combustion of the waste gas is guaranteed, meanwhile, the whole reaction unit can be protected, and the service life of the reaction unit is prolonged. The purposes of reducing the use amount of energy, reducing the generation of waste water and saving water are achieved.

Description

Technical Field

[0001] The invention relates to the field of waste gas purification, in particular to a waste gas anhydrous treatment device. Background Art

[0002] The electronics production industry not only produces solid waste, but also wastewater and waste gas, which need to be purified before being discharged into the natural environment. Among them, the waste gas produced by the electronics industry, especially the special gas waste gas produced in the production links such as vacuum etching, chemical vapor deposition (CVD), and physical vapor deposition (PVD), is generally highly toxic, flammable and explosive, and needs to be treated on-site to be low-toxic and non-combustible and safe.

[0003] At present, the waste gas treatment method produced by the electronics industry generally adopts scrubber equipment. Scrubber is a device that emits gaseous pollutants. It reduces pollutant emissions by passing the waste gas through liquid or solid absorbents. In the electronics industry, toxic or flammable and explosive waste gases produced in the panel, chip semiconductor or photovoltaic cell, perovskite and other industries can be decomposed or oxidized on-site through high temperature. The water-insoluble gas is discharged from the tail exhaust and then enters the centralized waste gas treatment system for further treatment before being discharged after meeting the standards. The water-soluble gas is washed and dissolved in the scrubber and then converted into wastewater, which is purified and discharged.

[0004] This leads to two problems. One is the energy problem. When the scrubber equipment is running, a large amount of industrial water is required. Another is the environmental problem. The generated wastewater cannot be discharged at will. The treatment of this wastewater is also a major problem. This application aims to provide a tail gas treatment device without water treatment, which can solve the above two problems at the same time.

[0005] Therefore, in order to solve the above problems, a waste gas waterless treatment device is proposed. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve the technical problem is: a waste gas waterless treatment device described in the present invention comprises an air intake unit, a heat source unit, a reaction unit, a cooling unit, a slag collection unit and a tail discharge unit; The air intake unit includes an air intake pipe, which can transport the exhaust gas into the reaction unit; The heat source unit includes any one of a plasma torch head, an ignition combustion flame gun and a high-temperature heating rod, and the heat source unit is installed on the reaction unit; The reaction unit comprises a cylinder, which comprises an inner cylinder, an intermediate cylinder and an outer cylinder; the inner cylinder, the intermediate cylinder and the outer cylinder are coaxially arranged; A plurality of connecting pipes are provided at the outer ring position of the upper end of the inner cylinder, the connecting pipes radially penetrate the outside of the cylinder, extend vertically upward, and are connected to the air inlet pipe; The inner cylinder and the middle cylinder form an air supply layer, the upper and lower ports of the air supply layer are in a closed state, the air supply layer is connected to a plurality of air supply pipes, the air supply pipes extend outside the cylinder, and a plurality of exhaust holes are provided on the side wall of the inner cylinder; The outer cylinder and the middle cylinder form a cooling layer, the upper and lower ports of the cooling layer are in a closed state, and the cooling layer is connected with a water inlet pipe and a water outlet pipe; The lower port of the inner cylinder is connected to a cooling unit, and the cooling unit is used to cool the gas after the oxidation reaction in the reaction unit; The cooling unit is also connected to a slag collecting unit, which is used to collect solidified materials generated by the oxidation reaction; The tail exhaust unit is connected to the cooling unit, and is used to exhaust the gas generated by the oxidation reaction.

[0008] Preferably, each of the air inlet pipes is connected to a No. 1 pipe for conveying combustion-supporting gas; A heat source unit is installed on the connection position of the air intake pipe and the connecting pipe; A No. 2 pipe for conveying inert gas is arranged at the bending portion of the connecting pipe, and the No. 2 pipe is arranged along the radial direction of the inner cylinder.

[0009] Preferably, a baffle is provided on the inner wall of the inner cylinder, and the baffle is obliquely arranged at the exhaust hole. The baffle can form a vortex state in the inner cylinder for the air discharged from the exhaust hole.

[0010] Preferably, the cooling unit includes two layers of coaxial pipes, the inner pipe is connected to the inner tube, the inner pipe and the outer pipe form a mezzanine, the mezzanine is connected to a plurality of cooling water pipes, and the cooling water pipes radially penetrate to the outside of the outer pipe; the inner pipe is connected to a plurality of cooling air pipes, and the cooling air pipes radially penetrate to the outside of the outer pipe.

[0011] Preferably, the lower port of the inner layer pipeline is connected with a funnel-shaped connecting pipe, and the connecting pipe is connected to the slag collecting unit; The slag collecting unit comprises a horizontal slag collecting barrel, an observation window is arranged above one end of the slag collecting barrel, a material pushing port is arranged below one end of the slag collecting barrel, a material pushing rod is arranged in the material pushing port; a slag outlet is arranged below the other end of the slag collecting barrel; A tail discharge unit is connected above the outer circle of the other end of the slag collecting barrel; the tail discharge unit includes a tail discharge pipe vertically arranged on the slag collecting barrel.

[0012] Preferably, an air blowing pipe is further provided at one end of the slag collecting barrel, and the air blowing pipe is arranged below the pushing port. An exhaust pipe is also provided above the outer ring of the other end of the slag collecting barrel, and the exhaust pipe is connected to the lower end position of the tail exhaust pipe.

[0013] Preferably, the exhaust holes opened on the side wall of the inner cylinder are arranged horizontally and tilted, and the exhaust direction of the exhaust holes is arranged counterclockwise.

[0014] Preferably, a scraping assembly is provided inside the inner cylinder; the scraping assembly comprises a plurality of support plates, and the support plates are horizontally arranged between the reaction unit and the cooling unit, and between the cooling unit and the connecting pipe; The support plate is rotatably connected to a shaft body, which is coaxially arranged with the cylinder body, and a plurality of cross bars are fixedly connected to the shaft body, and scrapers are fixedly connected to the ends of the cross bars, which can scrape off attachments on the inner cylinder and the inner wall of the inner layer pipe.

[0015] Preferably, a bolt is threadedly connected to the cylinder, one end of the bolt is placed outside the outer cylinder, and the other end of the bolt can penetrate into the inner cylinder.

[0016] Preferably, the push rod includes a rod body and a push plate, the push plate is fan-shaped, the push plate is fixed to the rod body, a rubber capsule is sleeved on the outer ring of the rod body, the capsule is arranged along the length direction of the rod body, and the capsule is squeezed into a ring body arranged on the inner side of the push port.

[0017] The present invention is beneficial in that: 1. In the present invention, a waste gas waterless treatment device is designed, and the waste gas passes through the cooperation of the heat source unit and the reaction unit to realize the combustion of the waste gas. When the product is subjected to the temperature reduction treatment, a mixed method of air cooling and water cooling is adopted at the reaction unit position for cooling, which not only ensures the complete combustion of the waste gas, but also protects the entire reaction unit, thereby reducing the use of energy and the generation of wastewater, and further achieving the purpose of saving water.

[0018] 2. In the present invention, a cooling unit is provided, and a cooling water pipe is connected in the interlayer. A water pump pumps circulating water into the interlayer to perform heat exchange on the inner pipe, thereby cooling the inner pipe. The inner pipe can effectively perform heat exchange with the downwardly moving product. At the same time, the inner pipe is connected to a plurality of cooling air pipes, and room temperature gas is introduced into the cooling air pipe. Here, room temperature gas is used to cool the product, thereby avoiding water cooling, reducing water consumption, and solving the problem of water shortage in existing enterprises.

[0019] 3. In the present invention, the cooling unit is provided to avoid water pollution caused by contact between water and reactants, the generation of industrial wastewater, or the formation of large solid blocks when the product contacts water, causing equipment blockage, greatly increasing the equipment maintenance cost. At the same time, the temperature of the product is high at the beginning, and the direct use of water cooling to cool the ultra-high temperature product is prone to a sudden drop in temperature, resulting in insufficient tolerance of the cooling unit material. However, the introduction of room temperature air can be mixed evenly and the temperature can be effectively reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a stereoscopic diagram from the first perspective of the waste gas waterless treatment device of the present invention; Figure 2 A second perspective stereoscopic diagram of the waste gas waterless treatment device of the present invention; Figure 3 It is a front view of the waste gas waterless treatment device of the present invention; Figure 4 It is a cross-sectional view of the waste gas waterless treatment device of the present invention; Figure 5 is a stereogram of the reaction unit in the present invention; Figure 6 is a three-dimensional diagram of the air intake unit in the present invention; Figure 7 is a schematic cross-sectional view of a reaction unit in the present invention; Figure 8 is a sectional perspective view of a reaction unit in the present invention; Fig. 9 It is a schematic diagram of the cooperation between the cylinder and the bolt in the present invention; Fig.10 It is a three-dimensional diagram of the cooperation between the scraping assembly and the cooling unit in the present invention; Fig.11 A three-dimensional diagram of a scraping assembly in the present invention; Fig.12 It is a stereoscopic view of the push rod in the present invention.

[0021] In the figure: 1, air inlet pipe, 2, ignition flame gun, 3, cylinder, 4, inner cylinder, 5, middle cylinder, 6, outer cylinder, 7, connecting pipe, 8, air supply layer, 9, air supply pipe, 10, exhaust hole, 11, cooling layer, 12, water inlet pipe, 13, water outlet pipe, 14, No. 1 pipe, 15, No. 2 pipe, 16, baffle, 17, inner layer pipe, 18, outer layer pipe, 19, interlayer, 20, cooling water pipe , 21. Cooling air pipe, 22. Connecting pipe, 23. Slag collecting barrel, 24. Observation window, 25. Pushing port, 26. Pushing rod, 27. Slag outlet, 28. Tail exhaust pipe, 29. Air blowing pipe, 30. Exhaust pipe, 31. Support plate, 32. Shaft body, 33. Cross bar, 34. Scraper, 35. Bolt, 36. Rod body, 37. Pushing plate, 38. Capsule body, 39. Ring body, 40. Driving motor. DETAILED DESCRIPTION

[0022] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0023] Reference Figure 1 - Figure 7 , a waste gas waterless treatment device, comprising an air intake unit, a heat source unit, a reaction unit, a cooling unit, a slag collection unit and a tail discharge unit; The air intake unit comprises an air intake pipe 1, which can transport the exhaust gas into the reaction unit; The heat source unit includes any one of a plasma torch head, an ignition combustion flame gun 2 and a high-temperature heating rod, and the heat source unit is installed on the reaction unit; The reaction unit comprises a cylinder 3, which comprises an inner cylinder 4, an intermediate cylinder 5 and an outer cylinder 6; the inner cylinder 4, the intermediate cylinder 5 and the outer cylinder 6 are coaxially arranged; A plurality of connecting pipes 7 are provided at the outer ring position of the upper end of the inner cylinder 4. The connecting pipes 7 radially penetrate the outside of the cylinder body 3, extend vertically upward, and are connected to the air inlet pipe 1; The inner cylinder 4 and the middle cylinder 5 form an air supply layer 8, the upper and lower ports of the air supply layer 8 are in a closed state, the air supply layer 8 is connected to a plurality of air supply pipes 9, the air supply pipes 9 penetrate the outside of the cylinder 3, and a plurality of exhaust holes 10 are provided on the side wall of the inner cylinder 4; The outer cylinder 6 and the middle cylinder 5 form a cooling layer 11, the upper and lower ports of the cooling layer 11 are in a closed state, and the cooling layer 11 is connected to a water inlet pipe 12 and a water outlet pipe 13; The lower port of the inner cylinder 4 is connected to a cooling unit, which is used to cool the gas after the oxidation reaction in the reaction unit; The cooling unit is also connected to a slag collecting unit, which is used to collect solidified materials generated by the oxidation reaction; The tail exhaust unit is connected to the cooling unit, and the tail exhaust unit is used to exhaust the gas generated by the oxidation reaction; The exhaust gas waterless treatment device designed in this embodiment has the following specific working process: Exhaust gas entry: The exhaust gas generated in the electronic production process is sucked into the intake pipe 1 through the exhaust device. The exhaust device can use a centrifugal blower to inject the exhaust gas into the intake pipe 1, and then the exhaust gas flows into the connecting pipe 7 along the intake pipe 1, and then flows into the inner tube 4 to burn the exhaust gas; Waste gas combustion: first, the air is compressed by a high-pressure pump, and then pumped into the air supply pipe 9, and the high-pressure air is discharged into the inner tube 4 from the exhaust hole 10, and the heat source unit is driven at the same time. In this embodiment, an ignition combustion flame gun 2 is used to illustrate the working process of the waste gas waterless treatment device. The ignition combustion flame gun 2 ignites the waste gas, wherein the waste gas includes at least any one or combination of CF4, SiF4, SiH4, NH3, N2O, NO, PH3, and H2, and the waste gas temperature is 10-30°C, for example, it can be 15°C, 17°C, 18°C, 19°C, 20°C, 21°C, 22°C, 23°C, 24°C or 25°C, but is not limited to the listed values, and other values ​​not listed in this range are also applicable; High temperature resistant heat insulation cotton is installed above the interlayer 19 of the middle tube 5 and the inner tube 4. The thickness of the high temperature resistant heat insulation cotton is between 10-60mm. The exhaust gas enters from the connecting pipe 7. The heat source unit provides a large amount of heat to the reaction unit, and the high temperature resistant heat insulation cotton ensures that the heat can be maintained, so that the exhaust gas absorbs heat for redox reaction. The waste gas is ignited and flows into the inner cylinder 4, mixed with compressed air, and further burned. The combustion temperature can reach 1000-1500°C, and the temperature of the decomposed waste gas is 200-1000°C, which can ensure the full ignition and oxidation decomposition of the waste gas. The decomposition products include any one or more combinations of water, silicon dioxide, nitrogen or nitrogen oxides. When the exhaust gas is burning in the inner tube 4, the temperature of the outer wall of the inner tube 4 is at a relatively high state. At this time, compressed air is injected into the air supply layer 8, and the compressed air can play a role in preliminary cooling. If circulating water cooling is directly used, the temperature inside the inner tube 4 will drop sharply, which may cause some gases in the exhaust gas to react incompletely. On the other hand, too much alternation between hot and cold will have a great impact on the material of the reaction unit and reduce the service life of the reaction unit. Therefore, a mixed cooling method of introducing compressed air into the air supply layer 8 and circulating water into the cooling layer 11 is adopted, and this is the first cooling, which not only ensures that the exhaust gas is fully burned, but also protects the entire reaction unit; The circulating water inlet temperature is room temperature, which is generally in the range of 18-25°C. After passing through the cooling layer 11 and being discharged from the outlet pipe 13, the circulating water outlet temperature is between 25-35°C. Cooling: The combustion products flow down to the cooling unit for secondary cooling. The cooling unit uses a combination of air cooling and water cooling. Solidified materials, condensed liquid and purified gas are generated during the cooling process. The solidified materials and condensed liquid fall into the slag collecting unit under their gravity, and the purified gas is discharged along the tail discharge unit. The temperature of the purified gas discharged from the tail discharge unit is ≤100°C. In this embodiment, a waste gas waterless treatment device is designed, in which the waste gas passes through the cooperation of the heat source unit and the reaction unit to realize the combustion of the waste gas and generate any one or more combinations of water, silicon dioxide, nitrogen or nitrogen oxides, and when the product is subjected to temperature reduction treatment, a mixed method of air cooling and water cooling is adopted at the reaction unit position to cool the product, which not only ensures the full combustion of the waste gas, but also protects the entire reaction unit, thereby reducing the use of energy and the generation of waste water, and further achieving the purpose of saving water; the product can be further cooled at the cooling unit position, and the solidified material generated by the cooling falls into the slag collecting unit, which is convenient for subsequent centralized collection.

[0024] Reference Figure 1 - Figure 7 Each of the air inlet pipes 1 is connected to a No. 1 pipe 14 for conveying combustion-supporting gas; the No. 1 pipe 14 is provided with combustion-supporting gas, and the combustion-supporting gas may be oxygen or hydrogen, which can improve the degree of combustion of the exhaust gas and make the exhaust gas fully oxidized, while reducing the degree of secondary pollution; A heat source unit is installed at the connection position of the intake pipe 1 and the connecting pipe 7; the heat source unit provides a heat source axially from the upper surface of the connecting pipe 7, so that the exhaust gas can fully contact the heat source unit, promoting the decomposition of the exhaust gas entering the reaction unit; The bending part of the connecting pipe 7 is provided with a No. 2 pipe 15 for conveying inert gas, and the No. 2 pipe 15 is arranged radially along the inner tube 4; the inert gas is introduced into the connecting part of the air inlet pipe 1 and the connecting pipe 7 for a long blow, and the inert gas can be a mixture of one or more of helium, neon, argon, krypton, xenon, and radon. The introduction of the inert gas can avoid blockage at the connecting pipe 7, and can also ensure that the exhaust gas is in a smooth state from the entry to the discharge of the product.

[0025] Reference Figure 1 - Figure 7 The inner wall of the inner cylinder 4 is provided with a baffle 16, which is obliquely arranged at the exhaust hole 10. The baffle 16 can make the air discharged from the exhaust hole 10 form a vortex state in the inner cylinder 4; The compressed air is discharged from the exhaust hole 10, and the compressed air impacts the baffle 16. The baffle 16 guides the flow direction of the compressed air, so that the compressed air flows along the side wall of the inner cylinder 4 in a counterclockwise or clockwise direction. In this embodiment, Figure 7 As shown, after the compressed air is discharged from the exhaust hole 10, a vortex is formed in the counterclockwise direction, and the compressed air tangentially swirls into the inner tube 4, which is conducive to the mixing of the compressed air and the exhaust gas. At the same time, the compressed air adheres to the wall to protect the inner wall of the inner tube 4, and it is not easy to disrupt the exhaust gas transportation path, thereby increasing the oxygen content of the exhaust gas, enhancing the oxidation reaction ability of the exhaust gas, and improving the exhaust gas treatment efficiency.

[0026] Reference Figure 1 - Figure 7The cooling unit includes two layers of coaxial pipes, the inner pipe 17 is connected to the inner tube 4, the inner pipe 17 and the outer pipe 18 form a sandwich 19, the sandwich 19 is connected to a plurality of cooling water pipes 20, and the cooling water pipes 20 radially penetrate to the outside of the outer pipe 18; the inner pipe 17 is connected to a plurality of cooling air pipes 21, and the cooling air pipes 21 radially penetrate to the outside of the outer pipe 18; The interlayer 19 is connected to the cooling water pipe 20, and the water pump pumps the circulating water into the interlayer 19 to perform heat exchange with the inner pipe 17 to achieve cooling of the inner pipe, and the inner pipe can effectively perform heat exchange with the downward moving product. At the same time, the inner pipe is connected to multiple cooling air pipes 21, and the cooling air pipe 21 is passed through the room temperature gas. Here, the room temperature gas is used to cool the product to avoid water cooling. On the one hand, the amount of water is reduced, which solves the problem of water shortage in existing enterprises. On the other hand, it is to avoid water pollution caused by contact with reactants and the generation of industrial wastewater, or the product contacts with water to form large solids, causing equipment blockage, greatly increasing the equipment maintenance cost. On the other hand, the temperature of the product is high at the beginning, and the direct use of water cooling to cool the ultra-high temperature product is prone to a sudden drop in temperature, resulting in insufficient tolerance of the cooling unit material. The introduction of room temperature air can be mixed evenly and can effectively reduce the temperature. At the same time, circulating water is introduced into the interlayer 19, and the cooling water pipe 20 for entering the circulating water is below the outer pipe 18, and the cooling water pipe 20 for discharging the circulating water is above the outer pipe 18. The circulating water is transported to cool the outer pipe. The interlayer 19 uses circulating water cooling for subsequent cooling, which can reduce the amount of room temperature gas introduced and avoid further introduction of a large amount of air resulting in a large amount of exhaust gas.

[0027] Reference Figure 1 - Figure 7 The lower end of the inner layer pipe 17 is connected with a funnel-shaped connecting pipe 22, and the connecting pipe 22 is connected to the slag collecting unit; The slag collecting unit comprises a horizontal slag collecting barrel 23, an observation window 24 is provided above one end of the slag collecting barrel 23, a material pushing port 25 is provided below one end of the slag collecting barrel 23, a material pushing rod 26 is provided in the material pushing port 25; a slag outlet 27 is provided below the other end of the slag collecting barrel 23; The waste gas is burned to obtain products, which include both gaseous products and solidified products. The solidified products fall into the slag collecting barrel 23 along the connecting pipe 22 under the action of gravity. At the same time, the gaseous products pass through the cooling unit and the temperature is reduced to generate a condensed liquid phase, which will also flow into the slag collecting barrel 23 under the action of gravity. The slag collecting barrel 23 is provided with an observation window 24 to facilitate observation of the accumulation of solidified products generated by the reaction. At the same time, a pushing rod 26 is provided in the pushing port 25. The pushing rod 26 can flatten and spread out the products accumulated in the slag collecting barrel 23, so that the slag collecting barrel 23 can accommodate more products at one time. After the slag collecting barrel 23 is full, the slag outlet 27 is opened to take out the products.

[0028] A tail discharge unit is connected above the outer circle of the other end of the slag collecting barrel 23; the tail discharge unit includes a tail discharge pipe 28 vertically arranged on the slag collecting barrel 23; a temperature monitor is arranged at the outlet position of the tail discharge pipe 28, which can clearly understand the temperature of the discharged gas and feed it back to the cooling unit and the reaction unit, control the pumping amount of circulating water per unit time, and reasonably control the operating power of the water pump, so as to ensure that the gas discharge temperature does not exceed the standard and enable the water pump to operate stably.

[0029] Reference Figure 1 - Figure 7 One end of the slag collecting barrel 23 is also provided with an air blowing pipe 29, which is arranged below the pushing port 25. An exhaust pipe 30 is also provided above the outer ring of the other end of the slag collecting barrel 23, and the exhaust pipe 30 is connected to the lower end of the tail exhaust pipe 28; A blowing pipe 29 is provided on the slag collecting barrel 23, and room temperature gas is blown into the slag collecting barrel 23, and room temperature air is then introduced into the waste gas after complete reaction to mix and cool it. At the same time, the direction of the introduced room temperature gas is along the waste gas transmission direction, which is convenient for blowing up the solidified materials in the slag collecting barrel and discharging them into the tail exhaust pipe 28 along the exhaust pipe 30 to avoid all of them accumulating in the slag collecting unit.

[0030] Reference Figure 8 - Fig. 9 The exhaust hole 10 opened on the side wall of the inner tube 4 is arranged horizontally and tilted, and the exhaust direction of the exhaust hole 10 is arranged counterclockwise; The exhaust direction setting of the exhaust hole 10 can also make the compressed gas form a vortex in the inner tube 4 when it is discharged from the exhaust hole 10. It serves as a second way for the exhaust hole 10 to cooperate with the baffle 16 to make the compressed gas form a vortex. Compared with the first way of setting the baffle 16 to form a compressed gas vortex, the second way does not need to set the baffle 16 in the inner tube 4, and the baffle 16 not only increases the manufacturing cost, but also solidified materials will be attached to the baffle 16 over time, hindering the flow of gas in the inner tube 4, while the second way will not have the above problems.

[0031] Reference Figure 2 , Figure 4 , Fig.10 and Fig.11 , a scraping assembly is provided inside the inner cylinder 4; the scraping assembly includes a plurality of support plates 31, and the support plates 31 are horizontally arranged between the reaction unit and the cooling unit, and between the cooling unit and the connecting pipe 22; The support plate 31 is rotatably connected to a shaft body 32, which is coaxially arranged with the cylinder body 3, and a plurality of cross bars 33 are fixedly connected to the shaft body 32, and a scraper 34 is fixedly connected to the end of the cross bar 33, and the scraper 34 can scrape off the attachments on the inner wall of the inner cylinder 4 and the inner layer pipe 17; Considering that when the waste gas waterless treatment device is in operation, it is necessary to ensure that the temperature in the inner cylinder 4 is high enough to ensure the combustion and oxidation of the waste gas, and also considering that after the inner cylinder 4 has been used for a period of time, there will be thick attachments on the side walls of the inner cylinder 4. These attachments are generally solidified materials generated by the combustion of the waste gas. The solidified materials will affect the heat exchange between the product and the compressed air, and hinder the flow of gas. For this reason, a scraping component is arranged inside the inner cylinder 4. The scraping component force can be driven by the impact force of the compressed air discharged from the exhaust hole 10. A driving motor 40 can also be arranged on the upper end surface of the cylinder 3. The upper end of the shaft 32 extends to the upper end of the cylinder 3 and is connected to the driving motor 40. The driving motor 40 is installed on the cylinder 3 through the heat insulation cotton to ensure the stable movement of the driving motor 40. The driving motor 40 drives the shaft 32 to rotate slowly, and can also be arranged at the same speed as the vortex of the compressed gas in the inner cylinder 4 to assist the rotation of the compressed gas and the waste gas and improve the combustion and oxidation degree of the waste gas. The shaft 32 drives the scraper 34 to rotate through multiple groups of cross bars 33. The scraper 34 scrapes off the solidified material on the side wall of the inner tube 4 and drops it into the slag collecting tube 23, so as to keep the inner wall of the inner tube 4 clean at all times, which is conducive to the heat exchange between the compressed air and the product and the smooth flow of gas. The lower end of the shaft 32 extends to the position of the connecting pipe 22, and the scraper 34 is adapted to the shape of the inner wall of the inner pipe 17 and the connecting pipe 22, so that the scraper 34 can also scrape off the auxiliary solidified material and condensed liquid on the inner pipe and the connecting pipe 22, ensuring that the cooling unit effectively cools the product; The scraping assembly designed in this embodiment is adapted to the second method of compressed gas forming a vortex, and there is no interference of the baffle 16 on the inner wall of the inner cylinder 4.

[0032] Reference Fig. 9 - Fig.11 The cylinder 3 is threadedly connected with a bolt 35, one end of the bolt 35 is placed outside the outer cylinder 6, and the other end of the bolt 35 can penetrate into the inner cylinder 4; When designing the scraping assembly, the cleaning of the scraping assembly itself is also taken into consideration. After the scraping assembly has been running for a period of time, thick solidified materials will also be attached to the scraper 34. The auxiliary solidified materials on the scraper 34 will cause resistance to the rotation of the shaft 32. At the same time, the scraper 34 has a reduced scraping effect on the solidified materials attached to the inner cylinder 4. For this reason, a bolt 35 with a simple structure is provided on the cylinder 3. When the scraper 34 needs to be cleaned, the bolt 35 is rotated so that the inner end of the bolt 35 protrudes from the inner wall of the inner cylinder 4, so that the scraper 34 collides with the end of the bolt 35, so that the scraper 34 vibrates and the solidified materials are vibrated and dropped. Considering the collision damage of the bolt 35 to the scraper 34, a buffer structure, such as a spring or a hemispherical protrusion, can be provided at the inner end of the bolt 35 to reduce the impact damage to the scraper 34. After cleaning the scraper 34, the bolt 35 is rotated in the opposite direction, and the inner end of the bolt 35 no longer protrudes from the inner wall of the inner cylinder 4, and the scraper 34 continues to scrape off the solidified materials attached to the inner cylinder 4.

[0033] The design of the bolt 35 is simple in structure and easy to operate, and can clean the scraper 34 so that the scraper 34 continues to effectively scrape the solidified material. At the same time, the solidified material on the inner wall of the inner tube 4 and the scraper 34 itself can be cleaned without stopping the machine.

[0034] Reference Figure 4 and Fig.12 The push rod 26 includes a rod body 36 and a push plate 37. The push plate 37 is fan-shaped and fixed to the rod body 36. A rubber capsule 38 is sleeved on the outer ring of the rod body 36. The capsule 38 is arranged along the length of the rod body 36, and the capsule 38 is squeezed into a ring 39 arranged on the inner side of the push port 25. When cleaning the solidified material in the slag collecting barrel 23, the pushing rod 26 is pushed, the capsule 38 and the ring body 39 on the rod body 36 are squeezed against each other, and the capsule 38 and the ring body 39 are relatively displaced, and the capsule 38 and the ring body 39 are always kept in a sealed state, and the slag outlet 27 is opened, the rod body 36 is pushed, and the push plate 37 pushes the solidified material to the position of the slag outlet 27. At the same time, the air blowing pipe 29 is always discharged into the room temperature gas. At this time, opening the slag outlet 27 will not affect the operation of the entire waste gas waterless treatment device.

[0035] Working principle: Exhaust gas entry: The exhaust gas generated in the electronic production process is sucked into the intake pipe 1 through the exhaust device. The exhaust device can use a centrifugal blower to inject the exhaust gas into the intake pipe 1, and then the exhaust gas flows into the connecting pipe 7 along the intake pipe 1, and then flows into the inner tube 4 to burn the exhaust gas; Waste gas combustion: First, the air is compressed by a high-pressure pump, and then pumped into the air supply pipe 9. The high-pressure air is discharged into the inner tube 4 from the exhaust hole 10, and the heat source unit is driven at the same time. In this embodiment, an ignition and combustion flame gun 2 is used to illustrate the working process of the waste gas waterless treatment device. The ignition and combustion flame gun 2 ignites the waste gas. Cooling: The combustion product flows down to the cooling unit for secondary cooling. Circulating water is introduced into the interlayer 19. The cooling water pipe 20 for entering the circulating water is below the outer pipe 18. The cooling water pipe 20 for discharging the circulating water is above the outer pipe 18. The circulating water is transported to cool the outer pipe. The interlayer 19 is cooled by circulating water. The inner pipe is connected to multiple cooling air pipes 21. Room temperature gas is introduced into the cooling air pipes 21. Room temperature gas is used to cool the product. Exhaust: The waste gas is burned to obtain products, which include both gaseous products and solidified products. The solidified products fall into the slag collecting barrel 23 along the connecting pipe 22 under the action of gravity. At the same time, the gaseous products pass through the cooling unit, and the temperature is reduced to generate a condensed liquid phase, which will also flow into the slag collecting barrel 23 under the action of gravity; the gaseous products are discharged along the tail exhaust pipe 28.

[0036] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A waste gas anhydrous treatment device, characterized in that: It includes an air intake unit, a heat source unit, a reaction unit, a cooling unit, a slag collection unit and a tail discharge unit; The air intake unit comprises an air intake pipe (1), and the air intake pipe (1) is capable of transporting exhaust gas into the reaction unit; The heat source unit comprises any one of a plasma torch head, an ignition combustion flame gun (2) and a high-temperature heating rod, and the heat source unit is installed on the reaction unit; The reaction unit comprises a cylinder (3), the cylinder (3) comprising an inner cylinder (4), an intermediate cylinder (5) and an outer cylinder (6); the inner cylinder (4), the intermediate cylinder (5) and the outer cylinder (6) are coaxially arranged; A plurality of connecting pipes (7) are provided at the outer ring position of the upper end of the inner cylinder (4), the connecting pipes (7) radially penetrate to the outside of the cylinder (3), extend vertically upward, and are connected to the air inlet pipe (1); The inner cylinder (4) and the middle cylinder (5) form an air supply layer (8), the upper and lower ports of the air supply layer (8) are in a closed state, the air supply layer (8) is connected to a plurality of air supply pipes (9), the air supply pipes (9) penetrate to the outside of the cylinder body (3), and a plurality of exhaust holes (10) are provided on the side wall of the inner cylinder (4); The outer cylinder (6) and the middle cylinder (5) form a cooling layer (11), the upper and lower ports of the cooling layer (11) are in a closed state, and the cooling layer (11) is connected to a water inlet pipe (12) and a water outlet pipe (13); The lower port of the inner cylinder (4) is connected to a cooling unit, and the cooling unit is used to cool the gas after the oxidation reaction in the reaction unit; The cooling unit is also connected to a slag collecting unit, which is used to collect solidified materials generated by the oxidation reaction; The tail exhaust unit is connected to the cooling unit, and is used to exhaust the gas generated by the oxidation reaction.

2. The waste gas waterless treatment device according to claim 1, characterized in that: Each of the air inlet pipes (1) is connected to a first pipe (14) for conveying combustion-supporting gas; A heat source unit is installed on the air intake pipe (1) at a location where it is connected to the connecting pipe (7); A second pipe (15) for conveying inert gas is arranged at the bent portion of the connecting pipe (7), and the second pipe (15) is arranged radially along the inner tube (4).

3. The waste gas waterless treatment device according to claim 2, characterized in that: A baffle (16) is provided on the inner wall of the inner cylinder (4), and the baffle (16) is arranged obliquely on the exhaust hole (10). The baffle (16) can cause the air exhausted from the exhaust hole (10) to form a vortex state in the inner cylinder (4).

4. The waste gas waterless treatment device according to claim 1, characterized in that: The cooling unit comprises two layers of coaxial pipes, the inner pipe (17) being connected to the inner tube (4), the inner pipe (17) and the outer pipe (18) forming a sandwich (19), the sandwich (19) being connected to a plurality of cooling water pipes (20), the cooling water pipes (20) radially extending to the outside of the outer pipe (18); the inner pipe (17) being connected to a plurality of cooling air pipes (21), the cooling air pipes (21) radially extending to the outside of the outer pipe (18).

5. The device for treating waste gas without water according to claim 4, characterized in that: The lower end of the inner layer pipe (17) is connected to a funnel-shaped connecting pipe (22), and the connecting pipe (22) is connected to a slag collecting unit; The slag collecting unit comprises a horizontal slag collecting barrel (23), an observation window (24) is provided above one end of the slag collecting barrel (23), a material pushing port (25) is provided below one end of the slag collecting barrel (23), and a material pushing rod (26) is provided in the material pushing port (25); a slag outlet (27) is provided below the other end of the slag collecting barrel (23); A tail discharge unit is connected above the outer ring of the other end of the slag collecting barrel (23); the tail discharge unit comprises a tail discharge pipe (28) arranged on the slag collecting barrel (23) in a vertical direction.

6. The waste gas waterless treatment device according to claim 5, characterized in that: An air blowing pipe (29) is also provided at one end of the slag collecting barrel (23), and the air blowing pipe (29) is arranged below the material pushing port (25). An exhaust pipe (30) is also provided above the outer ring of the other end of the slag collecting barrel (23), and the exhaust pipe (30) is connected to the lower end of the tail exhaust pipe (28).

7. The device for treating waste gas without water according to claim 1, characterized in that: The exhaust hole (10) provided on the side wall of the inner cylinder (4) is arranged horizontally and tilted, and the exhaust direction of the exhaust hole (10) is arranged in a counterclockwise direction.

8. The waste gas waterless treatment device according to claim 7, characterized in that: A scraping assembly is provided inside the inner cylinder (4); the scraping assembly comprises a plurality of support plates (31), the support plates (31) being horizontally arranged between the reaction unit and the cooling unit, and between the cooling unit and the connecting pipe (22); The support plate (31) is rotatably connected to a shaft body (32), the shaft body (32) and the cylinder body (3) are coaxially arranged, and a plurality of groups of cross bars (33) are fixedly connected to the shaft body (32), and scrapers (34) are fixedly connected to the ends of the cross bars (33), and the scrapers (34) can scrape off attachments on the inner side walls of the inner cylinder (4) and the inner layer pipe (17).

9. The device for treating waste gas without water according to claim 8, characterized in that: A bolt (35) is threadedly connected to the cylinder (3), one end of the bolt (35) is placed outside the outer cylinder (6), and the other end of the bolt (35) can penetrate into the inner cylinder (4).

10. The waste gas waterless treatment device according to claim 5, characterized in that: The push rod (26) comprises a rod body (36) and a push plate (37). The push plate (37) is fan-shaped and fixedly connected to the rod body (36). A rubber capsule (38) is sleeved on the outer ring of the rod body (36). The capsule (38) is arranged along the length of the rod body (36) and is squeezed into a ring body (39) arranged on the inner side of the push port (25).

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