Surface defect indentation marking and rapid indentation response testing apparatus and method

Abstract

The application discloses a surface defect indentation mark and rapid indentation response testing device and method, relates to the field of precision instruments and industrial automation detection technology, and comprises a supporting unit, a macro movement unit, a rapid switching unit and a precision testing unit. The macro movement unit is arranged on the supporting unit, the rapid switching unit is connected with the macro movement unit, the precision testing unit is arranged on the macro movement unit, the precision testing unit comprises a scanning structure and an indentation mark structure, the macro movement unit can drive the precision testing unit to move, and the rapid switching unit is used for switching the positions of the scanning structure and the indentation mark structure. The surface defect indentation mark and rapid indentation response testing device and method can quickly switch the positions of the scanning structure and the indentation mark structure.

Description

Technical Field

[0001] The present invention relates to the field of precision instruments and industrial automation detection technology, and in particular to a surface defect indentation marking and rapid indentation response testing device and method. Background Art

[0002] Indentation testing, with its advantages of high precision, minimal damage, rich information capture, and minimal impact area, is currently one of the most mainstream surface mechanical testing technologies in the world. It is widely used in testing materials such as thin film coatings, semiconductors, and micro-machined structures, measuring mechanical properties such as hardness and elastic modulus on the surface of materials and marking the location of material defects.

[0003] Limited by the structure of the existing indentation device, switching the sample from the optical microscope to the bottom of the indenter through a motor is not only time-consuming but also greatly increases the difficulty of control. Summary of the Invention

[0004] The purpose of the present invention is to provide a surface defect indentation marking and rapid indentation response testing device and method to solve the problems existing in the above-mentioned prior art and to be able to quickly switch the positions of the scanning structure and the indentation marking structure.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a surface defect indentation marking and rapid indentation response testing device, comprising: a supporting unit, a macro-moving unit, a rapid switching unit and a precision testing unit, wherein the macro-moving unit is arranged on the supporting unit, the rapid switching unit is connected to the macro-moving unit, the precision testing unit is arranged on the macro-moving unit, the precision testing unit includes a scanning structure and an indentation marking structure, the macro-moving unit can drive the precision testing unit to move, and the rapid switching unit is used to switch the positions of the scanning structure and the indentation marking structure.

[0007] Preferably, it further comprises a picking and positioning unit, which is located at the front side of the supporting unit and is used to pick up the sample.

[0008] Preferably, the picking and positioning unit includes a positioning platform, a positioning telescopic structure, a guide seat, an adsorption platform and an air pipe, the guide seat is arranged on the positioning platform, the adsorption platform is slidably connected to the guide seat, the adsorption platform is located above the positioning platform, one end of the positioning telescopic structure is connected to the positioning platform, the other end of the positioning telescopic structure is connected to the adsorption platform, the air pipe is fixedly connected to the adsorption platform, the air pipe is slidably connected to the positioning platform, one end of the air pipe is used to connect to the negative pressure structure, and the other end of the air pipe is used to adsorb the sample.

[0009] Preferably, a first through hole is provided on the adsorption platform, a second through hole is provided on the positioning platform, a center line of the first through hole coincides with a center line of the second through hole, and a size of the second through hole is smaller than a size of the sample.

[0010] Preferably, the macro-moving unit includes an X-direction moving unit, a Y-direction moving unit and a Z-direction moving unit, the X-direction moving unit is arranged on the supporting unit, the X-direction moving unit realizes the movement of the precision testing unit in the X-direction, the Z-direction moving unit is arranged on the X-direction moving unit, the Z-direction moving unit realizes the movement of the precision testing unit in the Z-direction, the Y-direction moving unit is arranged on the Z-direction moving unit, and the Y-direction moving unit realizes the movement of the precision testing unit in the Y-direction.

[0011] Preferably, the fast switching unit is located between the X-direction moving unit and the Z-direction moving unit; or, the fast switching unit is located between the Z-direction moving unit and the Y-direction moving unit.

[0012] Preferably, the fast switching unit includes a switching structure, the stroke of the switching structure is equal to the distance between the scanning structure and the indentation marking structure; one end of the switching structure is connected to the X-direction moving unit, and the other end of the switching structure is connected to the Z-direction moving unit; or, one end of the switching structure is connected to the Z-direction moving unit, and the other end of the switching structure is connected to the Y-direction moving unit.

[0013] Preferably, the scanning structure is an objective lens;

[0014] The indentation marking structure includes a hinge, an actuator, a force sensor and an indenter. The actuator is installed in the hinge, the force sensor is arranged at the lower end of the hinge, and the indenter is located at the lower end of the force sensor. When the actuator works, it drives the hinge to move, thereby realizing the movement of the indenter.

[0015] Preferably, it further comprises a conveying structure for conveying the sample.

[0016] The present invention also provides a surface defect indentation marking method, comprising the following steps:

[0017] Step 1: determine whether the macro moving unit, the fast switching unit, the precision testing unit and the picking and positioning unit are at the zero position;

[0018] Step 2: evacuate the air through the trachea to adsorb the sample;

[0019] Step 3: The positioning telescopic structure drives the sample to move so that the upper surface of the sample fits into the lower surface of the positioning platform;

[0020] Step 4: The macro-displacement unit drives the scanning structure to scan the sample, and compares the scanned image with the standard image through image recognition technology: if the scanned image and the standard image are consistent, the macro-displacement unit drives the scanning structure to continue scanning the sample; if the scanned image and the standard image are inconsistent, it is the defect location, and the fast switching unit is used to switch the positions of the scanning structure and the indentation marking structure, so that the position of the indentation marking structure is switched to the defect location;

[0021] Step 5: The macro-displacement unit drives the indentation marking structure to move and mark the defect position. After marking, the macro-displacement unit drives the indentation marking structure to move and calculate the surface mechanical parameters.

[0022] Step 6: The macro moving unit, fast switching unit and precision test unit return to the zero position and the test ends.

[0023] Compared with the prior art, the present invention has achieved the following technical effects:

[0024] The present invention realizes the rapid picking and positioning of the sample through the picking and positioning unit, eliminating the pre-contact step; the macro-moving unit can drive the scanning structure to realize the full-area scanning detection of the sample and drive the indentation marking structure to mark the defect position of the sample; the rapid switching unit realizes the rapid switching of the scanning structure and the indentation marking structure position; the precision switching unit realizes the visual scanning observation and marking of the defect position of the sample, and the indentation marking structure quickly marks the defect position of the sample and collects signals during the process. The present invention can solve the problems of the existing indentation testing device that requires pre-contact to judge the test position of the sample, slow test response and long single test time, thereby improving the efficiency of indentation testing; solves the problems of slow sample replacement and difficulty in integration with production lines such as chips and optical components, thereby broadening the application scenarios of such equipment. The surface defect indentation marking and rapid indentation response testing device of the present invention can be integrated with the production lines of optomechanical products such as chips and optical components, and efficiently and high-quality complete the whole process of rapid sample transmission, installation and positioning, visual inspection, defect point indentation marking, micro-area mechanical property characterization, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 This is an axonometric diagram of the surface defect indentation marking and rapid indentation response testing device of the present invention;

[0027] Figure 2 It is an axonometric diagram of the pick-up and positioning unit of the present invention;

[0028] Figure 3 A top view of the pick-up and positioning unit of the present invention;

[0029] Figure 4 It is an axonometric diagram of the macro-moving unit and the fast switching unit of the present invention;

[0030] Figure 5 This is an axonometric diagram of the X-axis moving unit and the fast switching unit of the present invention;

[0031] Figure 6 This is an axonometric diagram of the precision test unit of the present invention;

[0032] Figure 7 This is a schematic diagram of the working process of the surface defect indentation marking and rapid indentation response testing device of the present invention;

[0033] Figure 8 This is a working diagram of the surface defect indentation marking method of the present invention;

[0034] In the figure: 100-surface defect indentation marking and rapid indentation response testing device, 1-picking and positioning unit, 2-support unit, 3-macro moving unit, 4-rapid switching unit, 5-precision testing unit, 6-transmission structure, 7-sample, 8-positioning table, 9-positioning telescopic structure, 10-guide seat, 11-adsorption table, 12-air pipe, 13-first through hole, 14-second through hole, 15-X-moving unit, 16-Y-moving unit, 17-Z-moving unit, 18-switching structure, 19-objective lens, 20-hinge, 21-actuator, 22-force sensor, 23-indenter. DETAILED DESCRIPTION

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0036] The purpose of the present invention is to provide a surface defect indentation marking and rapid indentation response testing device and method to solve the problems existing in the above-mentioned prior art and to be able to quickly switch the positions of the scanning structure and the indentation marking structure.

[0037] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0038] Example 1

[0039] like Figures 1 to 7 As shown, this embodiment provides a surface defect indentation marking and rapid indentation response testing device 100, including: a picking and positioning unit 1, a support unit 2, a macro-moving unit 3, a rapid switching unit 4, a precision testing unit 5 and a conveying structure 6, the conveying structure 6 is used to convey the sample 7, the picking and positioning unit 1 is located on the front side of the support unit 2, the picking and positioning unit 1 is used to pick up the sample 7, the macro-moving unit 3 is arranged on the support unit 2, the rapid switching unit 4 is connected to the macro-moving unit, the precision testing unit 5 is arranged on the macro-moving unit 3, the precision testing unit 5 includes a scanning structure and an indentation marking structure, the macro-moving unit 3 can drive the precision testing unit 5 to move, and the rapid switching unit 4 is used to switch the positions of the scanning structure and the indentation marking structure.

[0040] Specifically, in this embodiment, the conveying structure 6 includes a conveyor belt, and the sample 7 is located on the conveyor belt.

[0041] In this embodiment, the picking and positioning unit 1 includes a positioning platform 8, a positioning telescopic structure 9, a guide seat 10, an adsorption platform 11 and an air pipe 12. The positioning platform 8 is located on the front side of the support unit 2, and the guide seat 10 is arranged on the upper surface of the positioning platform 8. The adsorption platform 11 is located between the two guide seats 10. The adsorption platform 11 is slidably connected to the guide seat 10 in a direction perpendicular to the surface of the sample 7. The distance between the two guide seats 10 is large enough and the height is small enough to avoid interference with the precision testing unit 5. The adsorption platform 11 is located above the positioning platform 8. The positioning telescopic structure 9 is a cylinder. One end of the positioning telescopic structure 9 is connected to the front side of the positioning platform 8, and the other end of the positioning telescopic structure 9 is connected to the front side of the adsorption platform 11. Four air pipes 12 are located at the four corners of the adsorption platform 11 and are fixedly connected to the adsorption platform 11. The air pipes 12 pass through the circular holes on the positioning platform 8 and are slidably connected to the positioning platform 8. One end of the air pipe 12 is used to connect to the negative pressure structure, and the other end of the air pipe 12 is used to adsorb the sample 7. The lower surface of the positioning platform 8 is the positioning surface of the sample 7.

[0042] In this embodiment, a first through hole 13 is formed on the adsorption platform 11, and a second through hole 14 is formed on the positioning platform 8. The first through hole 13 and the second through hole 14 are both rectangular. The center lines of the first through hole 13 and the second through hole 14 coincide and are perpendicular to the surface of the specimen 7. The size of the first through hole 13 is larger than the size of the second through hole 14, and the size of the second through hole 14 is smaller than the size of the specimen 7. The provision of the first through hole 13 and the second through hole 14 ensures that the precision test unit 5 is unobstructed during scanning and marking.

[0043] When the conveying structure 6 conveys the sample 7 to the bottom of the positioning table 8, when the centers of the first through hole 13, the second through hole 14 and the sample 7 are on the same vertical line, the positioning telescopic structure 9 drives the adsorption table 11 and the air tube 12 downward, and the other end of the air tube 12 contacts the surface of the sample 7. The four air tubes 12 are located at the four corners of the sample 7. The negative pressure structure works, and the air tube 12 adsorbs the sample 7. After the adsorption is completed, the positioning telescopic structure 9 drives the adsorption table 11 and the air tube 12 upward until the upper surface of the sample 7 contacts the lower surface of the positioning table 8, thereby realizing the positioning of the sample 7. By picking up the positioning unit 1, the upper surface position of the sample 7 is guaranteed to be consistent each time, eliminating the step of pre-contact judgment.

[0044] In this embodiment, the support unit 2 maintains a certain distance from the positioning platform 8 to ensure that when the macro-displacement unit is at the zero position, the macro-displacement unit is located above the center of the sample 7 .

[0045] In this embodiment, the macro moving unit 3 includes an X-direction moving unit 15, a Y-direction moving unit 16 and a Z-direction moving unit 17. The X-direction moving unit 15 realizes the movement of the precision test unit 5 in the X direction, the Y-direction moving unit 16 realizes the movement of the precision test unit 5 in the Y direction, and the Z-direction moving unit 17 realizes the movement of the precision test unit 5 in the Z direction; the X-direction moving unit 15 includes an X-direction base plate, an X-direction driving structure and an L-shaped plate. The X-direction base plate is arranged on the support unit 2. The X-direction driving structure includes an X-direction motor, an X-direction lead screw and an X-direction nut. The X-direction motor is connected to the X-direction lead screw in a transmission manner. The X-direction lead screw and the X-direction nut are threadedly connected. The L-shaped plate is arranged on the X-direction nut. The L-shaped plate is used to reduce the Z direction. The Z-direction moving unit 17 brings about an increase in the overall Z-direction size of the equipment; the Z-direction moving unit 17 includes a Z-direction base plate, a Z-direction drive structure and a Z-direction carrier plate, the Z-direction drive structure includes a Z-direction motor, a Z-direction screw and a Z-direction nut, the Z-direction motor is connected to the Z-direction screw, the Z-direction screw and the Z-direction nut are threadedly connected, and the Z-direction carrier plate is arranged on the Z-direction nut; the Y-direction moving unit 16 includes a Y-direction base plate, a Y-direction drive structure and a Y-direction carrier plate, the Y-direction drive structure includes a Y-direction motor, a Y-direction screw and a Y-direction nut, the Y-direction motor is connected to the Y-direction screw, the Y-direction screw and the Y-direction nut are threadedly connected, the Y-direction carrier plate is arranged on the Y-direction nut, and the Y-direction carrier plate is used to carry the precision test unit 5.

[0046] In this embodiment, the fast switching unit 4 includes a switching structure 18, the stroke of the switching structure 18 is equal to the distance between the center line of the scanning structure and the center line of the indentation marking structure, and the center line of the scanning structure and the center line of the indentation marking structure are located in the same vertical plane, ensuring that after the switching structure 18 is working, the center line of the scanning structure and the center line of the indentation marking structure coincide with each other.

[0047] In this embodiment, the switching structure 18 is a cylinder (fast cylinder), and the position of the fast switching unit 4 includes two situations: 1. The fast switching unit 4 is located between the X-direction moving unit 15 and the Z-direction moving unit 17, the fixed end of the switching structure 18 is connected to the L-shaped plate, and the telescopic end of the switching structure 18 is connected to the Z-direction bottom plate; 2. The fast switching unit 4 is located between the Z-direction moving unit 17 and the Y-direction moving unit 16, the Z-direction bottom plate is connected to the L-shaped plate, the fixed end of the switching structure 18 is connected to the Z-direction loading plate, and the telescopic end of the switching structure 18 is connected to the Y-direction bottom plate.

[0048] In this embodiment, the scanning structure is an objective lens 19, which is fixed to the Y-axis loading plate. The indentation marking structure includes a hinge 20, an actuator 21, a force sensor 22, and an indenter 23. The hinge 20 is a flexible hinge known in the prior art and is mounted on the Y-axis loading plate. The actuator 21 is mounted within the hinge 20 and is a piezoelectric ceramic structure. The force sensor 22 is located at the lower end of the hinge 20, and the indenter 23 is located at the lower end of the force sensor 22. A displacement sensor within the actuator 21 records the extension of the actuator 21. The actual indentation displacement is calculated by subtracting the flexibility of the force sensor 22 from the displacement sensor's recorded value. When the actuator 21 operates, it drives the hinge 20 to move, thereby achieving the movement of the indenter 23. After the upper surface position of the sample 7 is fixed, the scanning structure performs white light scanning on the sample 7 under the drive of the macro-displacement unit. When the defect position is determined, the switching structure 18 is started. The switching structure 18 brings the precision test unit 5 to the left limit position quickly, so that the central axis of the indenter 23 of the indentation marking structure coincides with the central axis of the scanning structure before the position switching, thereby reducing the movement and positioning time of the sample 7 from the observation position to the test position. Then, the Z-direction moving unit 17 brings the indenter 23 to the lower surface of the positioning platform 8 quickly, and then the actuator 21 and the hinge 20 immediately perform a tight pressing-in and pressing-out indentation test under the joint action, without the need for contact judgment.

[0049] This embodiment uses negative pressure to pick up specimen 7. Driven by positioning telescopic structure 9, the upper surface of specimen 7 quickly reaches and secures itself to the lower surface of positioning platform 8, ensuring the top surface of specimen 7 is always positioned accurately and eliminating pre-contact judgment. The two extreme positions of switching structure 18 enable rapid pneumatic switching between the scanning and indentation marking mechanisms, improving indentation testing efficiency.

[0050] The surface defect indentation marking and rapid indentation response testing device 100 of the embodiment can be integrated with the production line of optoelectromechanical products such as chips and optical components, and can efficiently and high-quality complete the whole process work such as sample rapid conveying, installation positioning, visual detection, defect point indentation marking, and micro area mechanical property characterization. The embodiment realizes rapid picking and positioning of the sample 7 through the picking and positioning unit 1, ensures the upper surface position of the sample 7, and saves the pre-contact step; the macro moving unit 3 can drive the scanning structure to realize global scanning detection of the sample 7 and drive the indentation marking structure to mark the defect position of the sample 7; the rapid switching unit 4 realizes rapid switching of the positions of the scanning structure and the indentation marking structure; the precise switching unit realizes visual scanning observation and defect position marking of the sample 7, rapid indentation marking of the sample 7 by the indentation marking structure, and signal acquisition in the process. The embodiment can solve the problems of pre-contact judgment of the sample 7 test position, slow test response, and long single test time of the existing indentation testing device, improve the indentation test efficiency, solve the problems of slow sample replacement and difficulty in integrated use with the production line of chips, optical components and the like, and broaden the application scenarios of such equipment.

[0051] Embodiment two

[0052] As shown in Figure 8 , the embodiment provides a surface defect indentation marking method, including the following steps:

[0053] Step one, judge whether the macro moving unit 3, the rapid switching unit 4, the precise testing unit 5 and the picking and positioning unit 1 are located at the zero position, especially whether the center of the sample 7 on the conveying structure 6 and the center of the second through hole 14 of the positioning table 8 are located on the same vertical line, if not, drive the sample 7 to move by the conveying structure 6 until the center of the sample 7 and the center of the second through hole 14 of the positioning table 8 are located on the same vertical line, and execute step two;

[0054] Step two, the positioning telescopic structure 9 drives the adsorption table 11 and the air pipe 12 to descend, the other end of the air pipe 12 contacts with the surface of the sample 7, the four air pipes 12 are located at the four corners of the sample 7, the negative pressure structure works, and the air pipe 12 adsorbs the sample 7;

[0055] Step three, after adsorption is completed, the positioning telescopic structure 9 drives the adsorption table 11 and the air pipe 12 to ascend until the upper surface of the sample 7 is attached to the lower surface of the positioning table 8, and the positioning of the sample 7 is realized;

[0056] Step 4: The macro-displacement unit drives the scanning structure to scan the sample 7, and compares the scanned image with the standard image through image recognition technology: if the scanned image and the standard image are consistent, the macro-displacement unit drives the scanning structure to continue scanning the sample 7; if the scanned image and the standard image are inconsistent, it is a defect location, and the switching structure 18 is used to switch the positions of the scanning structure and the indentation marking structure, so that the position of the indentation marking structure is switched to the defect location, and the central axis of the indenter 23 of the indentation marking structure coincides with the central axis of the scanning structure before the position switching;

[0057] Step 5: The Z-axis moving unit 17 drives the indentation marking structure to move to the lower surface of the positioning table 8. The actuator 21 drives the indenter 23 to press in and out relative to the sample 7 to mark the defect position. The readings of the force sensor 22 and the displacement sensor in the actuator 21 are recorded during this process. According to the Oliver & Pharr model, P = α (hh f ) m 、S=dP / dh、A=f(h c ), H=P max / A, The corresponding surface mechanical parameters are calculated using the following formulas. After the marking is completed, the Z-direction moving unit 17 drives the indentation marking structure to rise;

[0058] Where P is the indentation load, α and m are power function fitting parameters, h is the indentation depth, and h f is the residual indentation depth, S is the contact stiffness, A is the contact area between the indenter 23 and the specimen 7, h c is the contact depth between the indenter 23 and the sample 7, H is the indentation hardness, P max The maximum indentation load, β is a constant related to the shape of the indenter 23, E r is the reduced modulus;

[0059] Step 6: The macro-moving unit 3, the fast switching unit 4 and the precision testing unit 5 return to the zero position, the air pipe 12 stops pumping air, the sample 7 is put down, and it is determined whether the test is over; if so, the device is powered off; if not, step 1 is executed.

[0060] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims

1. A surface defect indentation marking and rapid indentation response testing device, characterized by: include: A support unit, a macro-mobile unit, a fast switching unit and a precision testing unit, wherein the macro-mobile unit is arranged on the support unit, the fast switching unit is connected to the macro-mobile unit, the precision testing unit is arranged on the macro-mobile unit, the precision testing unit includes a scanning structure and an indentation marking structure, the macro-mobile unit can drive the precision testing unit to move, and the fast switching unit is used to switch the positions of the scanning structure and the indentation marking structure; The macro moving unit includes an X-direction moving unit, a Y-direction moving unit and a Z-direction moving unit. The X-direction moving unit is arranged on the supporting unit, and the X-direction moving unit realizes the movement of the precision test unit in the X direction. The Z-direction moving unit is arranged on the X-direction moving unit, and the Z-direction moving unit realizes the movement of the precision test unit in the Z direction. The Y-direction moving unit is arranged on the Z-direction moving unit, and the Y-direction moving unit realizes the movement of the precision test unit in the Y direction. The fast switching unit is located between the X-direction moving unit and the Z-direction moving unit; or, the fast switching unit is located between the Z-direction moving unit and the Y-direction moving unit; The fast switching unit includes a switching structure, the stroke of which is equal to the distance between the scanning structure and the indentation marking structure; one end of the switching structure is connected to the X-direction moving unit, and the other end of the switching structure is connected to the Z-direction moving unit; or one end of the switching structure is connected to the Z-direction moving unit, and the other end of the switching structure is connected to the Y-direction moving unit.

2. The surface defect indentation marking and rapid indentation response testing device according to claim 1, characterized in that: It also includes a picking and positioning unit, which is located at the front side of the supporting unit and is used to pick up the sample.

3. The surface defect indentation marking and rapid indentation response testing device according to claim 2, characterized in that: The picking and positioning unit includes a positioning platform, a positioning telescopic structure, a guide seat, an adsorption platform and an air pipe. The guide seat is arranged on the positioning platform, the adsorption platform is slidably connected to the guide seat, the adsorption platform is located above the positioning platform, one end of the positioning telescopic structure is connected to the positioning platform, the other end of the positioning telescopic structure is connected to the adsorption platform, the air pipe is fixedly connected to the adsorption platform, the air pipe is slidably connected to the positioning platform, one end of the air pipe is used to connect to the negative pressure structure, and the other end of the air pipe is used to adsorb the sample.

4. The surface defect indentation marking and rapid indentation response testing device according to claim 3, characterized in that: A first through hole is formed on the adsorption platform, and a second through hole is formed on the positioning platform. The center lines of the first through hole and the second through hole coincide with each other, and the size of the second through hole is smaller than that of the sample.

5. The surface defect indentation marking and rapid indentation response testing device according to claim 1, characterized in that: The scanning structure is an objective lens; The indentation marking structure includes a hinge, an actuator, a force sensor and an indenter. The actuator is installed in the hinge, the force sensor is arranged at the lower end of the hinge, and the indenter is located at the lower end of the force sensor. When the actuator works, it drives the hinge to move, thereby realizing the movement of the indenter.

6. The surface defect indentation marking and rapid indentation response testing device according to claim 1, characterized in that: Also included is a conveying structure for conveying the sample.

7. A surface defect indentation marking method using the surface defect indentation marking and rapid indentation response testing device according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step 1: determine whether the macro moving unit, the fast switching unit, the precision testing unit and the picking and positioning unit are at the zero position; Step 2: evacuate the air through the trachea to adsorb the sample; Step 3: The positioning telescopic structure drives the sample to move so that the upper surface of the sample fits into the lower surface of the positioning platform; Step 4: The macro-displacement unit drives the scanning structure to scan the sample, and compares the scanned image with the standard image through image recognition technology: if the scanned image and the standard image are consistent, the macro-displacement unit drives the scanning structure to continue scanning the sample; if the scanned image and the standard image are inconsistent, it is the defect location, and the fast switching unit is used to switch the positions of the scanning structure and the indentation marking structure, so that the position of the indentation marking structure is switched to the defect location; Step 5: The macro-displacement unit drives the indentation marking structure to move and mark the defect position. After marking, the macro-displacement unit drives the indentation marking structure to move and calculate the surface mechanical parameters. Step 6: The macro moving unit, fast switching unit and precision test unit return to the zero position and the test ends.

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