Rolling diameter detection assembly and substrate grinding device

Abstract

The invention relates to the technical field of semiconductor substrate grinding. One embodiment of the invention provides a winding diameter detection assembly for a winding tape, which is used for detecting the winding diameter of the winding tape in real time. The swinging part comprises a swinging part which is arranged on one side of the winding tape in a swinging manner; the pressing part is arranged on the swinging part and is used for adaptively pressing on the circumferential surface of the coiled tape; and the angle measurement sensor is used for measuring the swinging angle of the swinging piece. Another embodiment of the invention provides a substrate grinding device which measures the winding diameter of the winding tape in real time when the substrate is ground and adjusts the releasing and / or winding torque according to the winding diameter. The technical problem that the product precision becomes poor due to fluctuation of the wafer grinding control precision is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor substrate grinding, and in particular to a rolling diameter detection component for grinding a substrate and a substrate grinding device. Background Art

[0002] In the manufacturing process of substrate, especially wafer, it is necessary to grind the edge. When using silicon (Si) wafer to manufacture semiconductor devices, the process becomes more and more complicated because the lower surface and periphery of the wafer need to be protected in the step of Cu wiring of the wafer. Due to the complexity of the process, it is difficult to control the particles on the periphery of the wafer between the upper and lower surfaces of the wafer. Therefore, in recent years, in the process of forming semiconductor devices, the periphery of the wafer is also polished, thereby suppressing the possibility of foreign matter on the periphery of the wafer (for example, see Japanese Patent Publication No. 2001-345294).

[0003] Therefore, in the process of manufacturing semiconductor elements, various films are formed on the periphery of the wafer. These films may cause particles, so it is necessary to remove the films from the periphery. Therefore, a grinding device equipped with a grinding piece such as a grinding belt is used to grind the periphery of the wafer to remove the films from the periphery. The grinding device is configured to grind the periphery by rotating the wafer with its axis as the center while the grinding piece is pressed against the periphery of the wafer.

[0004] In the prior art, a grinding device for grinding the peripheral portion of a substrate can grind the peripheral portion of a wafer, specifically by releasing and rewinding a tape to grind the edge of the substrate.

[0005] The tension of the tape in the existing tape transmission device is controlled by the output torque of the reel motor. During the operation of the tape transmission device, the diameter of the tape is in dynamic change, and the output torque of the reel motor is dynamically adjusted with the change of the diameter. In the prior art, the diameter and thickness of the new tape are known, and the stroke of the tape feed motor is used as the consumption of the tape. The real-time diameter of the tape can be reversed using a formula, and the real-time diameter is used as the basic parameter for adjusting the output torque of the reel motor. In an ideal situation, when the tape is compact and the influence of factors such as the initial diameter and thickness of the tape is ignored, the real-time diameter of the tape can be obtained relatively quickly, but there is a large error in actual use.

[0006] The existing tape transmission device is unable to detect the tape diameter in real time. Currently, it can only use a formula to calculate the theoretical diameter. However, there are slight differences in the initial diameter of each tape. During the transmission and operation process, the compactness and thickness of the tape fluctuate to a certain extent, resulting in a large error in the real-time tape diameter calculated by the formula, causing the tape tensioning force to be inconsistent with expectations, which in turn affects the accuracy and working quality of the tape transmission device, and ultimately leads to a deterioration in the control accuracy of wafer grinding. Summary of the invention

[0007] In order to overcome the above-mentioned defects, the embodiments of the present invention provide a roll diameter detection component and a substrate grinding device, which solve the technical problem in the prior art that the wafer grinding control accuracy fluctuates, resulting in poor product accuracy.

[0008] According to one aspect, the present invention provides a coil diameter detection assembly for detecting the coil diameter of a coil in real time, comprising:

[0009] A swinging member, which is swingably disposed on one side of the winding belt;

[0010] A pressing portion, which is arranged on the swinging member and is used to adaptively press on the circumference of the roll;

[0011] The angle sensor is used to measure the swing angle of the swing member.

[0012] As a further technical solution, an elastic member is further included, which acts on the swing member so that the pressing portion is elastically pressed against the peripheral surface of the winding belt.

[0013] As a further technical solution, the pressing portion is a roller, and is rotatably arranged on the swinging member.

[0014] As a further technical solution, the angle sensor is an inclination sensor, which is arranged on the swing member and is used to detect the inclination of the swing member relative to the horizontal plane;

[0015] Alternatively, the angle sensor is a rotary encoder, and the swing shaft of the swing member is connected to the rotary encoder to detect the swing angle of the swing member;

[0016] Alternatively, the angle measuring sensor is a potentiometer angle sensor, a Hall effect sensor, an optical fiber sensor, a laser ranging sensor, or an ultrasonic sensor.

[0017] According to another aspect, the present invention provides a substrate grinding device, comprising:

[0018] a first roller, on which a grinding belt is wound;

[0019] A first swinging member, which is swingably disposed on one side of the first roller;

[0020] A first pressing portion, which is disposed on the first swinging member and is used to adaptively press on the circumference of the winding belt on the first roller;

[0021] The first angle measuring sensor is used to measure the swing angle of the first swing member.

[0022] As a further technical solution, it also includes:

[0023] A second roller for winding the tape;

[0024] a second swinging member, which is swingably disposed on one side of the second roller;

[0025] A second pressing portion, which is disposed on the second swinging member and is used to adaptively press on the circumference of the winding belt on the second roller;

[0026] The second angle measuring sensor is used to measure the swing angle of the second swing member.

[0027] As a further technical solution, it also includes:

[0028] A bottom plate is arranged between the first roller and the second roller, and the first swinging member and the second swinging member are both swingably arranged on the bottom plate;

[0029] A driven roller, the driven roller is arranged on the bottom plate and used for guiding the winding belt;

[0030] A guide roller, the guide roller is arranged on the bottom plate and is used for guiding the coiled tape;

[0031] A belt break sensor is disposed between the driven roller and the guide roller, and is used to detect the belt winding between the driven roller and the guide roller.

[0032] As a further technical solution, it also includes a first elastic member and a second elastic member, which act on the first swinging member and the second swinging member respectively, so that the first pressing portion and the second pressing portion are elastically pressed against the circumferential surface of the winding belt; the swing axes of the first swinging member and the second swinging member are coaxial.

[0033] As a further technical solution, it also includes:

[0034] a third swinging member, which is swingably disposed on one side of the first roller;

[0035] A third pressing portion, which is arranged on the third swinging member and is used to adaptively press on the circumference of the tape on the first roller, the third pressing portion and the first pressing portion are respectively located upstream and downstream of the lead wire of the tape, so that the first pressing portion presses one more layer of the tape than the third pressing portion presses on the tape;

[0036] a third elastic member, which acts on the third swinging member so that the third pressing portion is elastically pressed against the peripheral surface of the belt of the first roller;

[0037] The third angle measuring sensor is used to measure the swing angle of the third swing member.

[0038] As a further technical solution, it also includes a fourth swinging member and a fourth angle measuring sensor. The first swinging member and the second swinging member are both transmission-connected with the fourth swinging member. The fourth swinging member is provided with the fourth angle measuring sensor. The transmission ratio of the first swinging member to the fourth swinging member transmission-connected thereto is 1:4-1:10, and the transmission ratio of the second swinging member to the fourth swinging member transmission-connected thereto is 1:4-1:10.

[0039] Based on the above technical solution, the beneficial effects of the present invention are:

[0040] The accuracy and sensitivity of the roll diameter detection are enhanced, so that the tension in the roll can be adjusted more accurately, ensuring the constant tension in the roll, so that the substrate grinding is consistent. When the roll diameter changes and causes the swinging part to swing, the inclination sensor installed on the swinging part detects the change in its inclination relative to the horizontal plane in real time, converts this change into an electrical signal and transmits it to the control system, realizing real-time monitoring and control of the roll diameter. By using the inclination sensor as an angle sensor, the performance of the roll diameter detection component is significantly improved, and the reliability and stability of the roll transmission device in high-precision processing such as wafer grinding are improved.

[0041] The swing arm is combined with an inclination sensor to detect the inclination of the swing arm, so as to accurately calculate the real-time winding diameter of the tape. This solution uses the swing arm to obtain the inclination of the swing arm in a limited space, and can accurately calculate the real-time winding diameter through geometric relationships, which can effectively improve the stability of the tensioning force of the tape. The device has a simple structure and a large space occupancy rate. The driven roller and guide roller are reasonably arranged, and the broken belt sensor is added to provide real-time feedback on the working status and real-time winding diameter of the tape, ensuring the safe and stable operation of the machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in describing the embodiments of the present invention. Obviously, the drawings described below are only some exemplary embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained based on the contents of the exemplary embodiments of the present invention and these drawings without creative work.

[0043] Figure 1 A schematic diagram of a roller according to an embodiment of the present invention, wherein a portion of the web extends outwardly from the roller;

[0044] Figure 2 Schematic diagram of the structure of a roll diameter detection component in one embodiment of the present invention;

[0045] Figure 3 is a schematic structural diagram of a roll diameter detection assembly in another embodiment of the present invention, wherein a roller structure is shown;

[0046] Figure 4 is a schematic structural diagram of a substrate polishing device in yet another embodiment of the present invention;

[0047] Figure 5 for Figure 4 A schematic structural diagram of a bottom plate in an embodiment of the present invention;

[0048] Figure 6 is a schematic structural diagram of a third swinging member in yet another embodiment of the present invention;

[0049] Figure 7 for Figure 6 A schematic structural diagram of the third swing member in the substrate grinding device;

[0050] Figure 8 is a schematic structural diagram of a fourth swinging member in yet another embodiment of the present invention;

[0051] Fig. 9 It is a schematic structural diagram of a first swinging member in yet another embodiment of the present invention;

[0052] Fig.10 It is a schematic diagram of the coil diameter and calculation principle diagram in another embodiment of the present invention;

[0053] Fig.11 It is a schematic diagram of the calculation principle of the roll diameter when the swing axis of the swing member and the rotation axis of the drum are coplanar on the vertical plane in another embodiment of the present invention;

[0054] Fig.12 It is a schematic diagram of the calculation principle of the roll diameter when the swing axis of the swing member and the rotation axis of the drum are not coplanar in the vertical plane in another embodiment of the present invention;

[0055] In the figure: roller 100, first roller 110, second roller 120, reel 130, reel 140, tape 200, swinging member 300, first swinging member 310, second swinging member 320, third swinging member 330, fourth swinging member 340, pressure part 400, roller 401, first pressure part 410, second pressure part 420, third pressure part 430, elastic member 500, first elastic member 510, second elastic member 520, third elastic member 530, angle sensor 600, first angle sensor 610, second angle sensor 620, third angle sensor 630, fourth angle sensor 640, bottom plate 7, driven roller 8, guide roller 9, broken tape sensor 10, tape fixing disk 11, substrate 12, suction cup 13, rotating shaft 14. DETAILED DESCRIPTION

[0056] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention.

[0057] In order to simplify the drawings, only the parts related to the invention are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically shown, or only one of them is marked. In this article, "one" not only means "only one", but also means "more than one", and "several" includes "two" and "more than two".

[0058] In this document, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0059] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0060] In the description of this embodiment, terms such as "up", "down", "left", and "right" and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0061] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0062] Example 1

[0063] Reference Figure 1-Figure 2 , which respectively show the roller and the roll diameter detection assembly in one embodiment of the present invention. Figure 1 , which shows two symmetrically arranged rollers 100, namely a first roller 110 (e.g., an unwinding roller) and a second roller 120 (e.g., a winding roller). The structures of the unwinding roller and the winding roller may be the same or different. The unwinding roller and / or the winding roller include a reel 130, a reel 140, and a tape fixing disc 11. The tape fixing disc 11 is used to fix the starting end of the tape 200 to prevent the tape 200 from loosening or falling off during the transmission process, and a weight reduction hole may be provided therein. The reel 140 is concentric with the tape fixing disc 11 and axially adjacent to the tape fixing disc 11. Optionally, the reel 140 is a flange extending axially from the tape fixing disc 11. The reel 140 is fixed to the reel 130, or the tape 200 is wound on the flange to form an unwinding roller. Optionally, an unwinding roller wound with a tape 200 can be purchased from the market.

[0064] The tape 200 is drawn out from the unwinding drum and finally introduced into the reel. Driven by a driving device (not shown), the reel pulls the tape 200, thereby driving the unwinding drum to rotate and release the tape 200, and the tape 200 is sequentially released from the unwinding drum and reeled on the reel.

[0065] The tension in the web 200 is controlled by the output torque of the winding drive (eg, a motor). In the case where the unwinding drum is also driven, the tension in the web 200 is controlled by the output torque in both the winding drum drive and the unwinding drive.

[0066] In order to ensure that the tension in the tape 200 is constant, the drive device is usually provided with a tension detection device. When it is detected that the tension in the tape 200 increases, the torque of the winding drive device is reduced and / or the torque of the unwinding drive device is increased, so that the tension in the tape 200 can be reduced. Conversely, when it is detected that the tension in the tape 200 decreases, the torque of the winding drive device is increased and / or the torque of the unwinding drive device is reduced, so that the tension in the tape 200 can be increased. By repeatedly adjusting dynamically in this way, the tension in the tape 200 can be ensured to be constant as much as possible.

[0067] As an alternative to the tension detection device, the tape diameter can also be measured in real time, and the torque of the reel drive device required to maintain constant tension can be calculated based on the tape diameter. Unfortunately, the tape diameter is in dynamic change during the operation of the tape transmission device, and the thickness of the tape is not always uniform, so the current tape diameter cannot be directly deduced from the travel length of the tape.

[0068] refer to Figure 2, which shows a winding diameter detection assembly for detecting the winding diameter of the winding tape 200 on the drum 100. The winding diameter detection assembly includes a bottom plate 7, a swinging member 300 hinged on the bottom plate 7, and a pressing portion 400 is provided at the free end of the swinging member 300. The pressing portion 400 can be designed to be an integral structure or a separate structure with the swinging member 300. The swinging member 300 is swingably arranged on one side of the drum 100, and its swinging plane is the same as the rotation plane of the drum 100, so that the pressing portion 400 presses on the circumferential surface of the winding tape 200 on the drum 100.

[0069] The winding diameter detection assembly further includes an elastic member 500, which acts on the swing member 300, so that the pressing portion 400 is elastically pressed against the circumference of the winding tape 200 on the roller 100. In this way, when the winding diameter of the winding tape 200 changes due to winding and releasing the winding tape, the pressing portion 400 is always in elastic contact with the circumference of the winding tape 200. The elastic member 500 can be a winding spring or a tension spring. The elastic member 500 can also be replaced by a magnetic member.

[0070] The winding diameter detection assembly further includes an angle sensor 600 for measuring the swing angle of the swing member 300. Specifically, the angle sensor 600 may be fixedly mounted on the swing member 300 or may be in a non-contact manner with the swing member 300, for the purpose of measuring the angle and / or angle change of the swing member 300.

[0071] According to the above technical solution, when the winding diameter of the tape 200 on the drum 100 changes due to winding and unwinding, the pressure portion 400 receives the reaction force of the tape 200 to cause the swing member 300 to swing, and the angle sensor 600 reflects the change in the winding diameter by measuring the angle or angle change of the swing member 300. The winding diameter recorded in this embodiment specifically refers to the outer diameter of the tape 200 on the drum 100, which is the radius or diameter.

[0072] In practical applications, for example, the swinging member 300 is first installed at a suitable position on one side of the roller 100 to ensure that it can swing freely. Then the pressing part 400 is installed on the swinging member 300, and the elastic member 500 acts on the swinging member 300 to provide an appropriate deflection preload. Finally, the angle sensor 600 is associated and calibrated with the swinging member 300. The pressing part 400 can be made of any suitable material and shape, such as a material with less friction with the roll 200 and a smooth structure to avoid damage to the roll 200.

[0073] The advantages of this design are: first, it can detect the change of the diameter of the tape 200 in real time and directly, avoiding the error caused by calculating the diameter of the tape by the thickness of the tape and the stroke of the tape feeding motor (as the consumption of the tape); second, the structure is relatively simple, the cost is low, and it is easy to install and maintain. Compared with the direct use of distance sensors and tension force sensors for measurement, the advantage is that the measurement can better realize real-time detection and improve the reliability of the measurement.

[0074] For example, during the grinding process of the wafer periphery, real-time and accurate roll diameter detection can ensure the accuracy and stability of the tape transmission, thereby improving the quality and consistency of wafer grinding. This significantly improves the accuracy and real-time performance of roll diameter detection, providing a reliable basis for the precise control of the tape transmission device.

[0075] As the roll 200 is rolled up or released on the drum 100, the roll diameter increases or decreases, and the reaction force on the pressing portion 400 changes, causing the swing member 300 to swing. The angle sensor 600 measures the angle change of the swing member 300, thereby obtaining real-time data of the roll diameter.

[0076] The design of the roll diameter detection component effectively solves the problem of inaccurate roll diameter detection in the prior art, and improves the performance and reliability of the roll-to-roll transmission device in the substrate, especially wafer manufacturing process.

[0077] Optionally, in the roll diameter detection component, the angle sensor 600 can be designed as a displacement sensor, an azimuth sensor, a light sensor or a grating sensor.

[0078] Optionally, the angle sensor 600 may also be an inclination sensor or a horizontal sensor, which is used to indirectly reflect the change in the diameter of the roll tape 200 by detecting the change in the inclination of the swing member 300 relative to the horizontal plane.

[0079] In the actual installation process, for example, the inclination sensor is firmly installed at a specific position of the swing member 300 to ensure that it can accurately detect the inclination of the swing member 300 .

[0080] The advantages of this design are: first, the inclination sensor can provide high-precision inclination measurement, thereby improving the accuracy of roll diameter detection; second, it is installed on the swing member 300 and is directly associated with the movement of the swing member 300, reducing the transmission of measurement errors.

[0081] For example, when the diameter of the tape 200 changes rapidly, the inclination sensor can quickly respond and accurately detect the inclination change of the swing member 300, and timely reflect the dynamic change of the diameter. Therefore, the accuracy and sensitivity of the diameter detection are further enhanced, and the tape transmission can be controlled more accurately.

[0082] When the winding diameter of the winding tape 200 changes and causes the swinging member 300 to swing, the inclination sensor installed on the swinging member 300 detects the change of its inclination relative to the horizontal plane in real time, converts this change into an electrical signal and transmits it to the control system, thereby realizing real-time monitoring and control of the winding diameter.

[0083] By adopting an inclination sensor as the angle measuring sensor 600, the performance of the roll diameter detection component is significantly improved, and the reliability and stability of the roll-to-roll transmission device in high-precision processing such as wafer grinding are improved.

[0084] Optionally, the angle sensor 600 can also be a rotary encoder, and the swing shaft of the swing member 300 is connected to the rotary encoder to detect the rotation angle of the swing member 300. The rotation angle of the swing shaft of the swing member 300 is directly measured by the rotary encoder, thereby reflecting the change in the winding diameter of the winding tape 200.

[0085] In practical applications, for example, the rotary encoder is precisely installed at a position connected to the swing shaft of the swing member 300 to ensure measurement accuracy.

[0086] The advantage of this design is that the rotary encoder can provide high-precision angle measurement and can detect the rotation angle of the swing member 300 sensitively and accurately.

[0087] Optionally, the angle measuring sensor 600 may also be a potentiometer angle sensor, a Hall effect sensor, a fiber optic sensor, a laser distance measuring sensor or an ultrasonic sensor.

[0088] Taking the potentiometer type angle sensor as an example, its design principle is to measure the angle of the swing member 300 by utilizing the characteristic that the resistance value of the potentiometer changes with the angle.

[0089] During actual installation, for example, a potentiometer-type angle sensor is installed at a position where the angle change of the swing member 300 can be effectively detected, and calibration and debugging are performed.

[0090] The advantages of this design are: the potentiometer angle sensor has a simple structure, low cost, and can meet angle measurements with certain accuracy requirements.

[0091] As for the Hall effect sensor, the optical fiber sensor, the laser ranging sensor and the ultrasonic sensor, they each detect the angle or position change of the swing member 300 through different physical principles.

[0092] Hall effect sensors use the Hall effect to detect changes in magnetic fields to reflect angles; fiber optic sensors measure angles through the transmission and reflection characteristics of light; laser ranging sensors determine distance and angle by measuring the flight time of lasers; and ultrasonic sensors rely on the reflection time of ultrasonic waves to determine angles.

[0093] In practical applications, the appropriate sensor type is selected according to the specific working environment and accuracy requirements.

[0094] The advantages of these different types of sensors are that each has the characteristics of adapting to different working conditions and accuracy requirements, and can provide diversified solutions for roll diameter detection.

[0095] According to specific application scenarios and requirements, different types of angle measuring sensors 600 or a combination of different types of sensors can be used to achieve the best roll diameter detection effect and improve the control accuracy and stability of the roll conveying device.

[0096] When the winding diameter of the web 200 changes, the swing member 300 swings or rotates accordingly. Different types of angle sensors 600 convert the angle or position changes of the swing member 300 into electrical signals or other measurable physical quantities through their own detection principles and methods, thereby realizing real-time monitoring of the winding diameter.

[0097] By providing a variety of options for the angle measuring sensor 600, the roll diameter detection component can better adapt to different working conditions and accuracy requirements, thereby improving the versatility and reliability of the roll-to-roll transmission device in various application scenarios.

[0098] Example 2

[0099] See also Figure 3 This embodiment provides another roll diameter detection component, which is substantially the same as the technical solution of embodiment 1, so only the differences are described.

[0100] like Figure 3 As shown, in the roll diameter detection assembly of this embodiment, the pressing portion 400 can be designed as a roller 401 and rotatably disposed on the free end of the swing member 300, and the swing member 300 is a swing arm.

[0101] When the tape 200 is rolled up or released on the drum 100 , the roll diameter changes. The rolling roller 401 can reduce the friction between the tape 200 and the roll, so that the pressing part 400 responds to the change in the roll diameter more sensitively and accurately.

[0102] In the actual assembly process, for example, the roller 401 is mounted on the swing member 300 in the form of a swing arm through a rotating component such as a bearing to ensure that the roller 401 can rotate smoothly.

[0103] This solution can obtain the real-time winding diameter of the tape in a limited space by means of a swing arm. The roller 401 is tangent to the tape 200, and the working status and real-time winding diameter of the tape are fed back in real time to ensure the safe and stable operation of the machine.

[0104] The advantage of this design is that the rotation of the roller 401 can reduce the friction loss with the surface of the belt 200 and extend the service life of the component.

[0105] For example, during high-speed tape transmission, the roller 401 can quickly respond to changes in the tape diameter while reducing errors and heat generated by friction.

[0106] As the diameter of the tape 200 changes, the roller 401 rolls on the surface of the tape 200, driving the swing member 300 in the form of a swing arm to swing, so that the angle sensor 600 detects the angle change, thereby achieving accurate detection of the diameter.

[0107] By designing the pressing portion 400 as a roller 401 and adopting the swinging member 300 in the form of a swinging arm, the performance of the roll diameter detection assembly is optimized, wear is reduced, and its stability and reliability in practical applications are improved.

[0108] Example 3

[0109] Reference Figure 4-Figure 5 , which shows a substrate polishing device in another embodiment of the present invention. Figure 4 The tape 200 is used to grind the periphery of the substrate 12, which may be a wafer. The substrate 12 is fixed by the suction cup 13 and rotates under the drive of the rotating shaft 14. The continuously moving tape 200 grinds the periphery of the continuously rotating wafer.

[0110] Continue to see Figure 4 In the substrate polishing device of this embodiment, the first roller 110 serves as an unwinding roller for releasing the tape 200. The first swinging member 310 is swingably disposed at one side of the first roller 110, and the first pressing portion 410 is disposed on the first swinging member 310 and presses on the tape 200 on the first roller 110. The first elastic member 510 acts on the first swinging member 310, so that the first pressing portion 410 elastically presses against the circumferential surface of the tape 200 of the first roller 110, and the first angle measuring sensor 610 is associated with the first swinging member 310 to measure its angle.

[0111] Through the coordinated action of the first swinging member 310, the first pressing portion 410, the first elastic member 510 and the first angle measuring sensor 610, the change in the roll diameter of the roll tape 200 on the first roller 110 is detected in real time, thereby providing precise control parameters for the roll tape transmission during the substrate grinding process.

[0112] In actual manufacturing and assembly, for example, the first swinging member 310 is first accurately installed at a fixed position on one side of the first roller 110 to ensure that it can swing flexibly. Then the first pressing portion 410 is firmly installed on the first swinging member 310 and the position is adjusted so that it can effectively press on the web 200. Next, the first elastic member 510 is installed and its deflection preload is adjusted as needed. Finally, the first angle measuring sensor 610 is accurately connected and configured with the first swinging member 310 for calibration and debugging.

[0113] The advantages of this design are: first, it can monitor the roll diameter of the tape 200 on the first roller 110 in real time and accurately, and adjust the speed and tension of the tape transmission in time to ensure the stability and accuracy of the substrate grinding process; second, the structure of each component is relatively simple, easy to maintain and replace, reducing the use cost and maintenance difficulty of the device.

[0114] For example, in the continuous process of substrate grinding, even if the diameter of the tape 200 changes to a certain extent, the device can respond quickly and accurately, so that the drive device can make accurate adjustments in time, ensuring that the output torque makes the tension of the tape 200 the optimal tension and remains constant, ensuring the smoothness of the tape transmission and the consistency of the substrate grinding quality. This significantly improves the accuracy and reliability of the tape transmission during the substrate grinding process, and effectively reduces the grinding error and defective rate caused by the change of the diameter.

[0115] When the substrate grinding device is running, as the web 200 is wound or released on the first roller 110, the diameter of the web changes, the reaction force exerted on the first pressure portion 410 causes the first swinging member 310 to swing, and the first angle sensor 610 measures the angle change of the first swinging member 310 in real time and transmits the data to the control system. The control system adjusts the parameters of the web transmission (such as speed and tension) accordingly, thereby achieving precise control of the web transmission during the substrate grinding process.

[0116] Through the above design, the substrate grinding device can better obtain the roll diameter value in real time, quickly respond and control, improve the grinding accuracy and consistency, and enhance the competitiveness and practicality of the device in the field of substrate grinding and polishing.

[0117] Optionally, in the substrate grinding device of this embodiment, a first roller 110 for releasing the tape 200 and a second roller 120 for winding the tape 200 are provided. The first roller 110 serves as a releasing roller, the second roller 120 serves as a winding roller, and a middle part of the tape 200 serves as a grinding part to grind the wafer. The tape 200 has a tensioning force between the first roller 110 and the second roller 120, so as to elastically abut against the periphery of the wafer, increase the friction force, and perform effective grinding. The second swinging member 320 is swingably arranged on one side of the second roller 120, and the second pressing portion 420 is mounted on the second swinging member 320 and is used to press on the tape 200 on the second roller 120. The second elastic member 520 acts on the second swinging member 320, so that the second pressing portion 420 elastically presses against the peripheral surface of the tape 200 of the second roller 120, and the second angle measuring sensor 620 is associated with the second swinging member 320 for measuring its angle.

[0118] The release and reeling of the tape 200 are realized by the coordinated work of the first roller 110 and the second roller 120. At the same time, the second swinging member 320, the second pressing portion 420, the second elastic member 520 and the second angle measuring sensor 620 are used to monitor the change of the roll diameter of the tape 200 on the second roller 120 in real time, thereby cooperating with the relevant monitoring and control of the first roller 110 to ensure that the tension of the entire tape 200 transmission process is stable and accurate.

[0119] During the actual assembly process, first, install the first roller 110 and the second roller 120 in appropriate positions respectively, and ensure that they can rotate normally. Then, accurately install the second swing member 320 on one side of the second roller 120 so that the second swing member 320 can swing freely and flexibly. Next, install the second pressing portion 420 on the second swing member 320, and adjust its position to ensure that it can effectively press on the roll 200 on the second roller 120. After that, install the second elastic member 520, and adjust its elastic force according to actual needs to provide appropriate deflection pressure. Finally, connect and calibrate the second angle sensor 620 to the second swing member 320 to ensure that the angle change of the second swing member 320 can be accurately measured.

[0120] The advantages of this design are: first, it realizes the synchronous monitoring and control of the release and reeling of the tape 200, thereby improving the overall accuracy and stability of the tape transmission; second, it can timely adjust the release and reeling speed and torque according to the real-time changes in the roll diameter on the first roller 110 and the second roller 120, thereby ensuring the constant tension of the tape 200, avoiding problems such as tape loosening, accumulation or excessive stretching, and ensuring grinding consistency.

[0121] For example, in the continuous process of substrate grinding, when the release speed on the first roller 110 speeds up or slows down, the second roller 120 can quickly make corresponding winding speed adjustments by monitoring the change in the roll diameter, thereby maintaining smooth transmission of the roll 200 and stable quality of substrate grinding.

[0122] When the substrate grinding device is in operation, the first roller 110 releases the tape and the second roller 120 reels it. As the tape 200 is wound on the second roller 120, the diameter of the tape changes, and the reaction force on the second pressing portion 420 causes the second swinging member 320 to swing. The second angle sensor 620 measures the angle change of the second swinging member 320 in real time and transmits the data to the control system. The control system adjusts the rotation speed and output torque of the first roller 110 and the second roller 120 respectively according to the diameter change data of the first roller 110 and the second roller 120, so as to achieve precise control of the tension during the entire tape transmission process, thereby ensuring smooth substrate grinding.

[0123] By adding the second roller 120 and its related monitoring and control components, the monitoring of the tensioning force of the tape of the substrate grinding device is improved, the monitoring is more timely and accurate, and the consistency of the tape grinding on the substrate is improved.

[0124] Alternatively, if Figure 5 As shown, the substrate grinding device of this embodiment is provided with a bottom plate 7, and the first swing member 310 and the second swing member 320 are swingably disposed on the bottom plate 7. The bottom plate 7 provides a stable installation base and calibration base for the entire device.

[0125] A driven roller 8 and a guide roller 9 are also provided on the bottom plate 7, which are used to guide the tape 200 respectively, so that the tape 200 can be transmitted along a predetermined path to avoid confusion or deviation.

[0126] The belt break sensor 10 is arranged between the driven roller 8 and the guide roller 9 to detect whether the belt 200 is broken. When the belt 200 is transmitted normally, the belt break sensor 10 will not send a signal; once the belt 200 is broken, the belt break sensor 10 will immediately send a signal to the control system so that measures such as shutdown can be taken in time to avoid greater losses.

[0127] The broken belt sensor 10 can be designed as a photoelectric sensor. It is mainly composed of a transmitter and a receiver. The transmitter emits light of a specific wavelength, and the light passes through the belt transmission path between the driven roller 8 and the guide roller 9. The receiver receives the light emitted by the transmitter.

[0128] When the tape 200 is transmitting normally, the light will be blocked, and the receiver will not receive the light signal or the received light signal will be weak. When the tape 200 is broken, the light is no longer blocked, and the light signal intensity received by the receiver will suddenly increase, thereby triggering an alarm signal.

[0129] In order to improve the accuracy and reliability of detection, multiple detection points may be set in the detection area of ​​the sensor to form a light curtain to ensure that whether the roll 200 is broken can be fully detected.

[0130] In order to achieve real-time detection of the roll diameter of the tape 200 to maintain constant tension of the tape 200, this solution uses a swing arm combined with an inclination sensor to detect the inclination of the swing arm so as to accurately calculate the real-time roll diameter of the tape. This solution integrates two sets of swing arms and a broken tape sensor 10 on the mounting base plate 7, uses a spring to elastically press the roller on the swing arm against the tape, and uses the inclination sensor to measure the current inclination of the swing arm. The real-time roll diameter can be accurately calculated through geometric relationships, providing a data basis for controlling the torque and speed of the drive device, and effectively improving the stability of the tension of the tape; the driven roller 8 and the guide roller 9 are reasonably arranged, and the driven roller 8 and the guide roller 9 cooperate with each other to keep the tape 200 horizontal, so that the working state of the tape 200 can be stably detected. The broken tape sensor detects the working state of the tape 200 to ensure that the machine can work safely.

[0131] In the actual assembly process, first fix the bottom plate 7 at a suitable position between the first roller 110 and the second roller 120, and ensure that it is horizontal and stable. The first roller 110 and the second roller 120 are both arranged on the same bottom plate 7, and the winding diameter can be measured in real time in a limited space using two swing arms. Then install the first swing member 310 and the second swing member 320 at the specified position on the bottom plate 7, and ensure that they can swing flexibly. Next, install the driven roller 8, the guide roller 9 and the broken belt sensor 10 on the bottom plate 7 according to the design requirements, and make corresponding line connections and debugging. Finally, install the winding belt fixing disk 11 on the first roller 110 and the second roller 120.

[0132] The bottom plate 7 improves the integrity and stability of the device and can fix the initial angle of the swing arm to facilitate subsequent angle changes. The cooperation of the driven roller 8, the guide roller 9 and the broken belt sensor 10 ensures the smooth and safe transmission of the belt 200. The belt fixing disk 11 increases the reliability of fixing the belt 200 on the drum.

[0133] For example, during long-term continuous operation of substrate grinding, even if the tape 200 is subjected to large tension and friction, due to the action of various guiding and fixing components, it can maintain stable horizontal transmission, facilitate the measurement of the roll diameter and the adjustment of the tension, and reduce the probability of failure.

[0134] When the device is running, the tape 200 is released from the first roller 110, guided by the driven roller 8 and the guide roller 9, and grinds the substrate 12. After grinding, it reaches the second roller 120 for winding. During this process, the first swing member 310 and the second swing member 320 monitor the change of the roll diameter in real time, the driven roller 8 and the guide roller 9 guide the tape 200 and keep the tape 200 horizontal, and the broken tape sensor 10 detects whether the tape 200 is broken at any time. If everything is normal, the device continues to operate stably; once the roll diameter is abnormal or the tape 200 is broken, the corresponding sensor will send a signal, and the control system will make corresponding adjustments or shut down operations. The real-time roll diameter detection device can provide real-time feedback on the working status and real-time roll diameter of the tape through the swing arm and the broken tape sensor to ensure the safety and stable operation of the machine.

[0135] Alternatively, if Figure 5 As shown, in the substrate grinding device of this embodiment, the first roller 110 and the second roller 120 are respectively arranged on both sides of the bottom plate 7, and as shown in FIG. Figure 4 As shown, the substrate is placed between the first roller 110 and the second roller 120. This layout makes the device structure more compact and reasonably utilizes the space, and also facilitates the transmission and tension control of the web 200 between the two rollers. The first swing member 310 and the second swing member 320 are coaxially swinging. The coaxial swinging design can reduce the complexity of the components and improve the stability and consistency of the system.

[0136] In the actual installation process, the bottom plate 7 is first placed horizontally and fixed. Then, the first roller 110 and the second roller 120 are respectively installed at the designated positions on both sides of the bottom plate 7 to ensure that they are firmly installed and rotate smoothly. Next, the first swing member 310 and the second swing member 320 are installed to make them coaxial and ensure that they can swing freely on the axis.

[0137] The advantages of this design are: first, it makes the overall layout of the device more reasonable, saves space, and reduces the resistance and interference during the transmission of the tape 200; second, the coaxially swinging first swinging member 310 and the second swinging member 320 can synchronously respond to the changes in the diameter of the tape 200, thereby improving the accuracy of detection.

[0138] For example, during high-speed operation of substrate polishing, this layout and design can ensure that the belt 200 always maintains appropriate tension, thereby improving the quality and efficiency of substrate polishing.

[0139] When the web 200 is transmitted between the first roller 110 and the second roller 120, the change in the roll diameter causes the first swing member 310 and the second swing member 320 to swing coaxially. The swing angle is measured in real time by an angle sensor associated with the swing member, thereby accurately controlling the transmission tension of the web 200.

[0140] Through reasonable layout and coaxial swing design, the performance and stability of the substrate grinding device are further improved, providing a stronger guarantee for high-quality grinding of the substrate.

[0141] Example 4

[0142] like Figure 6-Figure 7 As shown, it shows a substrate polishing device in another embodiment of the present invention, which is generally the same as the technical solution of embodiment 3, so only the differences are described.

[0143] See also Figure 6 The substrate polishing device of this embodiment can also be further designed with a third swinging member 330, a third pressing portion 430, a third elastic member 530 and a third angle measuring sensor 630. Figure 7 The third swinging member 330 is optionally swingably disposed on one side of the first roller 110, and the third pressing portion 430 is mounted on the third swinging member 330 and is used to press the tape 200 on the first roller 110. The third pressing portion 430 and the first pressing portion 410 are respectively located on both sides of the same tape 200, and the first pressing portion 410 presses on the upstream of the tape lead, while the third pressing portion 430 presses on the downstream of the tape lead, so that the number of layers of the tape 200 pressed by the first pressing portion 410 is one more than the number of layers of the tape 200 pressed by the third pressing portion 430.

[0144] By setting two pressing parts on both sides of the first roller 110 to press different layers, the change of the roll diameter of the tape 200 on the first roller 110 can be detected and controlled more comprehensively and accurately. And the difference between the roll diameter measured by the third angle sensor 630 and the roll diameter measured by the first angle sensor 610 should be approximately the thickness of one layer of tape 200. When the difference value exceeds a certain range from the thickness of one layer of tape 200, there is a possibility that the thickness of the tape 200 does not meet the standard, or the tape release is abnormal, and the grinding of the wafer needs to be stopped at this time. Then, the tape 200 is continuously conveyed for a certain distance until the roll diameter measured by the third angle sensor 630 and the roll diameter measured by the first angle sensor 610 differ within a reasonable difference range, and then the wafer can be ground again to avoid the grinding of the wafer being damaged by mismatched grinding force.

[0145] In actual installation and debugging, firstly, the third swinging member 330 is accurately installed at a suitable position on one side of the first roller 110 to ensure that it can swing flexibly. Then, the third pressing portion 430 is firmly installed on the third swinging member 330 and the position is adjusted so that it can effectively press on the web 200. Then, the third elastic member 530 is installed to provide the third pressing portion 430 with a predetermined deflection force to elastically press against the first roller 110. Finally, the third angle measuring sensor 630 is connected and calibrated with the third swinging member 330.

[0146] The advantage of this design is that it can more accurately detect the changes in the roll diameter and tension of the web 200 on the first roller 110, especially when the thickness of the web 200 is unevenly distributed; on the other hand, it can also reliably monitor abnormalities in the release of the web.

[0147] For example, during the substrate grinding process, if the web 200 is piled up or the tension is too large on one side of the first roller 110, the coordinated action of the third pressing portion 430 and the first pressing portion 410 can detect it in time and make corresponding adjustments.

[0148] When the tape 200 is wound or released on the first roller 110, the winding diameter and the tension force change, the reaction force on the third pressing portion 430 causes the third swinging member 330 to swing, and the third angle sensor 630 measures the angle change of the third swinging member 330. Combined with the measurement data of the first pressing portion 410 and the first angle sensor 610, the state of the tape 200 on the first roller 110 is more comprehensively understood, thereby achieving more precise control.

[0149] By adding the third swinging member 330 and other related components, the monitoring and control of the transmission of the tape 200 by the substrate grinding device is further improved, and the adaptability and reliability of the device under complex working conditions are improved.

[0150] Example 5

[0151] Figure 8 FIG. 2 is a schematic diagram of the structure of a fourth swinging member in another embodiment of the present invention. Figure 8 As shown, in the substrate grinding device of this embodiment, a fourth swinging member 340 and a fourth angle measuring sensor 640 can be additionally designed on the basis of Embodiment 4. The first swinging member 310 and the second swinging member 320 are both connected to the fourth swinging member 340 by transmission, for example, by gear transmission connection, and the gear is preferably a helical gear, which can better avoid the measurement error caused by gear clearance. The fourth angle measuring sensor 640 is arranged on the fourth swinging member 340 connected to the first swinging member 310 by transmission. In addition, the transmission ratio of the first swinging member 310 to the fourth swinging member 340 connected to it by transmission is 1:4-1:10, and the transmission ratio of the second swinging member 320 to the fourth swinging member 340 connected to it by transmission is 1:4-1:10.

[0152] By setting the transmission ratio, the smaller swing angles of the first swing member 310 and the second swing member 320 are amplified, thereby improving the measurement accuracy and resolution of the angle measuring sensor and more accurately reflecting the change of the winding diameter.

[0153] In the actual assembly and debugging process, the fourth swing member 340 is firstly accurately connected to the first swing member 310 and the second swing member 320. Then, according to the design requirements, the transmission ratio is adjusted within the range of 1:4-1:10. For example, if the transmission ratio is 1:5, when the first swing member 310 or the second swing member 320 swings 1 degree, the corresponding fourth swing member 340 will swing 5 degrees.

[0154] The advantage of this design is that it can significantly improve the accuracy of the roll diameter detection, and even if the swing angles of the first swing member 310 and the second swing member 320 are small, they can be accurately measured through transmission amplification. The transmission parameters of the roll can be adjusted in time to ensure the quality and stability of substrate grinding.

[0155] For example, during the substrate grinding process, slight changes in the roll diameter can be quickly detected and adjusted through this transmission amplification mechanism, avoiding the impact of the grinding effect due to the roll diameter change not being detected in time. This greatly enhances the detection sensitivity and control accuracy of the substrate grinding device for roll diameter changes, effectively improving the processing quality and production efficiency of the product.

[0156] When the web is wound or released on the first roller 110 or the second roller 120, resulting in a change in the web diameter, the first swing member 310 or the second swing member 320 swings accordingly. Due to the transmission connection, the swing angle is transmitted to the fourth swing member 340 and amplified. The first angle sensor 610 measures the amplified angle of the fourth swing member 340 and transmits the data to the control system to achieve precise control of the web transmission.

[0157] By introducing the fourth swinging member 340 and reasonably setting the transmission ratio, the roll diameter detection and control performance of the substrate grinding device is further optimized, and the overall working efficiency and product quality of the device are improved.

[0158] Example 6

[0159] See also Fig. 9In the substrate polishing device, a first roller 110 for releasing the tape 200 and a second roller 120 for winding the tape 200 are provided. The first pressing portion 410 and the second pressing portion 420 are both rollers 401, which are rotatably arranged on the first swinging member 310, and the first pressing portion 410 is also slidably arranged relative to the first swinging member 310, and the sliding direction is parallel to the length direction of the first swinging member 310. The first pressing portion 410 and the second pressing portion 420 are also slidably arranged on the bottom plate 7 along a horizontal plane, and the wheel axle of the first pressing portion 410 and the rotating shaft of the first roller 110 are located in the same horizontal plane, and the wheel axle of the second pressing portion 420 and the rotating shaft of the second roller 120 are located in the same horizontal plane. The rotating shaft of the first roller 110, the rotating shaft of the second roller 120 and the swing shaft of the first swing member 310 are coplanar in the vertical plane. The rotating shaft of the first roller 110 and the rotating shaft of the second roller 120 are fixed, and the swing shaft of the first swing member 310 is slidable in the vertical direction. Such a structure is simpler and can make the calculation of the roll diameter more concise.

[0160] The elastic member 500 acts on the first swinging member 310, so that the first pressing portion 410 is elastically pressed against the circumferential surface of the roll 200 on the first roller 110, and the second pressing portion 420 is elastically pressed against the circumferential surface of the roll 200 on the second roller 120. The swing angle of the first swinging member 310 is measured by the first angle measuring sensor 610, so as to calculate the roll diameter of the roll 200 on the first roller 110 and the second roller 120. The elastic member 500 can be a spring, which is selected and installed according to the required pressure and elastic coefficient.

[0161] When the device is running, the winding diameter of the tape 200 changes continuously as it is released from the first roller 110 and wound on the second roller 120. When the winding diameter increases, the first swinging member 310 swings outward under the action of the elastic member 500, and the first angle sensor 610 measures the increase in the swing angle; when the winding diameter decreases, the first swinging member 310 swings inward, and the first angle sensor 610 measures the decrease in the swing angle.

[0162] Through calculation, the sum of the roll diameters of the tape 200 on the first roller 110 and the second roller 120 can be obtained based on the swing angle of the first swinging member 310 measured by the first angle sensor 610 only. The sum of the roll diameters of the tape 200 on the first roller 110 and the second roller 120 can provide data support for the release of the tape and meet the specific control of the release speed of the tape 200. Specifically, if the sum of the roll diameters is gradually increasing, it means that at the start of release, the sum of the roll diameters remains unchanged or changes very little, indicating that it is in the middle stage. The calculation formula for the sum of the roll diameters is also very simple, and the sum of the roll diameters of the tape 200 on the first roller 110 and the second roller 120 can be measured on the basis of only one first angle sensor 610.

[0163] See also Fig.10 , which shows a calculation principle diagram for calculating the sum of the rolling diameters of the tape 200 on the first roller 110 and the second roller 120 in this embodiment, in which r is the radius of the first pressing portion 410 and the second pressing portion 420, R1 is the radius of the tape 200 on the first roller 110, R2 is the radius of the tape on the second roller 120, α is the inclination angle of the first swinging member 310 measured by the first angle sensor 610, and d is the distance between the rotating shaft of the first roller 110 and the rotating shaft of the second roller 120. Then, the sum of the rolling diameters of the tape 200 on the first roller 110 and the second roller 120 can be calculated to be R1+R2=d·cotα-2r.

[0164] Example 7

[0165] See also Fig.11 , which shows a schematic diagram of the calculation principle of the winding diameter when the swing axis of the swing member and the rotation axis of the roller are coplanar on the vertical plane in another embodiment of the present invention. According to this embodiment, the winding diameter of the winding tape 200 is measured when the substrate 12 is ground, and the torque for releasing and / or winding is adjusted according to the winding diameter. Among them, taking the roller 401 as an example, when the substrate 12 is ground, the following steps are used to measure the winding diameter of the winding tape 200 and adjust the torque for releasing and / or winding according to the winding diameter.

[0166] Measuring the fixed length step: Press the roller 401 at the end of the swing member 300 onto the web 200 of the drum 100. Ensure that the rotation axes of the drum 100 and the roller 401 are both arranged, for example, in the horizontal direction; measure and record the radius r of the roller 401 (for example, 5 cm), the distance l between the swing axis of the swing member 300 and the rotation axis of the roller 401 (for example, 30 cm), and the distance d between the swing axis of the swing member 300 and the rotation axis of the drum 100 in the same plane on the vertical plane (for example, 20 cm). Fig. 9 shown.

[0167] Angle measurement step: Measure the angle α (for example, 30 degrees) between the swing member 300 and the horizontal plane.

[0168] Steps for calculating the coil diameter: Substitute the measured data into the formula (R+r)2=l2+d2-2·l·d·s inα for calculation.

[0169] That is: (R+5)2=302+202-2×30×20×s in30°

[0170] (R+5)2=900+400-600

[0171] (R+5)2=700

[0172] R+5=√700

[0173] R=√700-5≈22.6 cm.

[0174] Through the above calculation, it is obtained that the roll diameter R of the roll belt 200 at the contact point with the roller 401 is approximately 22.6 cm.

[0175] In the actual substrate grinding process, the above measurement steps are repeated in real time to continuously obtain the change data of the roll diameter. According to the change of the roll diameter, the release and rewinding torque are adjusted in time to ensure the stability of the tape transmission and the consistency of substrate grinding.

[0176] The advantage of this grinding method is that it can measure the roll diameter of the tape in real time and accurately, providing reliable data support for the precise control of the tape transmission during the substrate grinding process. By adjusting the torque in time, it effectively avoids problems such as unstable tape tension and uneven substrate grinding caused by changes in the roll diameter.

[0177] During the substrate grinding process, the roller 401 contacts the tape 200, and as the roll diameter changes, the angle of the swing member 300 changes. By measuring the angle and calculating it in combination with the fixed length parameter, the real-time roll diameter value is obtained. The release and rewinding torque is adjusted according to the roll diameter value to achieve precise control of the tape transmission, thereby ensuring the effect of substrate grinding.

[0178] Example 8

[0179] See also Fig.12 , which shows a schematic diagram of the calculation principle of the roll diameter when the swing axis of the swing member and the rotation axis of the drum are not coplanar in the vertical plane in another embodiment of the present invention. The difference between this embodiment and embodiment 6 is that the swing axis of the swing member 300 and the rotation axis of the drum 100 are not coplanar in the vertical plane, and the distance between them is d on the vertical plane and e on the horizontal plane.

[0180] When the substrate 12 is being polished, the following steps are used to measure the diameter of the tape 200 and adjust the release and / or rewinding torque according to the diameter.

[0181] Measuring fixed length steps: Press the roller 401 at the end of the swing member 300 onto the web 200 of the drum 100. Ensure that the rotation axes of the drum 100 and the roller 401 are both set, for example, in the horizontal direction; measure and record the radius r of the roller 401 (for example, 5 cm), and the distance l between the swing axis of the swing member 300 and the rotation axis of the roller 401 (for example, 30 cm). The swing axis of the swing member 300 and the rotation axis of the drum 100 are not coplanar in the vertical plane, and the distance between them is the vertical distance d on the vertical plane (for example, 20 cm), and the horizontal distance e on the horizontal plane (for example, 10 cm), as shown in FIG. Fig.10 shown.

[0182] Angle measurement step: Measure the angle α (for example, 60 degrees) between the swing member 300 and the horizontal plane.

[0183] Steps to calculate the coil diameter:

[0184] Case 1:

[0185] When the entire swinging part is on one side of the vertical symmetry plane of the drum, the measured data is substituted into the formula (R+r)2=(l+e·secα)2+(d+e·cotα)2-2(l+e·secα)(d+e·cotα)s inα for calculation.

[0186] That is: (R+5)2=(30+10×sec60°)2+(20+10×cot60°)2-2×(30+10×sec60°)×(20+10×cot60°)×s in60°.

[0187] Case 2:

[0188] When the two ends of the swinging member, namely the roller end and the hinged end, are respectively on both sides of the vertical symmetry plane of the drum, the measured data is substituted into the formula (R+r)2=(le·secα)2+(de·cotα)2-2(le·secα)(de·cotα)s inα for calculation.

[0189] That is: (R+5)2=(30-10×sec60°)2+(20-10×cot60°)2-2×(30-10×sec60°)×(20-10×cot60°)×s in60°.

[0190] The value of the winding diameter R of the winding tape 200 at the point where it contacts the roller 401 is obtained through the above calculation.

[0191] In the actual substrate grinding process, the above measurement steps are repeated in real time to continuously obtain the change data of the roll diameter. According to the change of the roll diameter, the release and rewinding torque are adjusted in time to ensure the stability of the tape transmission and the consistency of substrate grinding.

[0192] The advantage of this grinding method is that it can adapt to the situation where the swing member 300 and the rotating axis of the roller 100 are not coplanar in the vertical plane, and can still accurately measure the roll diameter, providing a precise control basis for more complex tape transmission situations during substrate grinding.

[0193] During the substrate grinding process, the roller 401 contacts the tape 200, and as the roll diameter changes, the angle of the swing member 300 changes. By measuring the angle and calculating the projection distance of the fixed length parameter in the non-coplanar state, the real-time roll diameter value is obtained. The release and rewinding torque is adjusted according to the roll diameter value to achieve precise control of the tape transmission, thereby ensuring the effect of substrate grinding.

[0194] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A coil diameter detection component, used for detecting the coil diameter of the coil (200) in real time, characterized in that: include: A swinging member (300) is swingably disposed on one side of the winding belt (200); A pressing portion (400) is arranged on the swinging member (300) and is used to adaptively press on the circumferential surface of the roll tape (200); An angle measuring sensor (600) is used to measure the swing angle of the swing member (300).

2. The coil diameter detection assembly according to claim 1, characterized in that: It also includes an elastic member (500) which acts on the swing member (300) so that the pressing portion (400) is elastically pressed against the peripheral surface of the winding belt (200).

3. The coil diameter detection assembly according to claim 1, characterized in that: The pressing portion (400) is a roller (401) and is rotatably disposed on the swinging member (300).

4. The coil diameter detection assembly according to any one of claims 1 to 3, characterized in that: The angle measuring sensor (600) is an inclination sensor, which is arranged on the swing member (300) and is used to detect the inclination angle of the swing member (300) relative to the horizontal plane; Alternatively, the angle measuring sensor (600) is a rotary encoder, and the swing shaft of the swing member (300) is connected to the rotary encoder, so as to detect the swing angle of the swing member (300); Alternatively, the angle measuring sensor (600) is a potentiometer angle sensor, a Hall effect sensor, an optical fiber sensor, a laser distance measuring sensor, or an ultrasonic sensor.

5. A substrate polishing device, characterized in that: include: A first roller (110), on which a grinding tape (200) is wound; A first swinging member (310) is swingably disposed on one side of the first roller (110); a first pressing portion (410) disposed on the first swinging member (310) and used to adaptively press on the circumferential surface of the coiled belt (200) on the first roller (110); The first angle measuring sensor (610) is used to measure the swing angle of the first swinging member (310).

6. The substrate polishing device according to claim 5, characterized in that: Also includes: A second roller (120) for winding the tape (200); A second swinging member (320) is swingably disposed on one side of the second roller (120); a second pressing portion (420) disposed on the second swinging member (320) and used to adaptively press on the circumferential surface of the coiled belt (200) on the second roller (120); The second angle measuring sensor (620) is used to measure the swing angle of the second swing member (320).

7. The substrate polishing device according to claim 6, characterized in that: Also includes: A bottom plate (7) is arranged between the first roller (110) and the second roller (120), and the first swinging member (310) and the second swinging member (320) are both swingably arranged on the bottom plate (7); A driven roller (8), the driven roller (8) being arranged on the bottom plate (7) and used for guiding the winding belt (200); a guide roller (9), the guide roller (9) being arranged on the bottom plate (7) and being used for guiding the coiled tape (200); A broken belt sensor (10) is arranged between the driven roller (8) and the guide roller (9) and is used to detect the winding belt (200) between the driven roller (8) and the guide roller (9).

8. The substrate polishing device according to claim 7, characterized in that: It also includes a first elastic member (510) and a second elastic member (520), which act on the first swing member (310) and the second swing member (320) respectively, so that the first pressing portion (410) and the second pressing portion (420) are elastically pressed against the circumferential surface of the roll (200); the swing axes of the first swing member (310) and the second swing member (320) are coaxial.

9. The substrate polishing device according to claim 7, characterized in that: Also includes: a third swinging member (330) swingably disposed on one side of the first roller (110); a third pressing portion (430) disposed on the third swinging member (330) and used to adaptively press on the circumference of the tape (200) on the first roller (110); the third pressing portion (430) and the first pressing portion (410) are respectively located upstream and downstream of the lead wire of the tape (200), so that the number of layers of the tape (200) pressed by the first pressing portion (410) is one layer more than the number of layers of the tape (200) pressed by the third pressing portion (430); a third elastic member (530) acting on the third swinging member (330) so that the third pressing portion (430) is elastically pressed against the peripheral surface of the winding belt (200) of the first roller (110); The third angle measuring sensor (630) is used to measure the swing angle of the third swinging member (330).

10. The substrate polishing device according to claim 9, characterized in that: The invention also comprises a fourth swinging member (340) and a fourth angle measuring sensor (640); the first swinging member (310) and the second swinging member (320) are both transmission-connected to the fourth swinging member (340); the fourth angle measuring sensor (640) is arranged on the fourth swinging member (340); and the transmission ratio of the first swinging member (310) to the fourth swinging member (340) transmission-connected thereto is 1:4-1:10; and the transmission ratio of the second swinging member (320) to the fourth swinging member (340) transmission-connected thereto is 1:4-1:10.

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