Molybdenum-niobium target material and preparation method thereof

Abstract

The invention belongs to the field of semiconductor materials, and discloses a molybdenum-niobium target material which comprises 40-60 wt% of molybdenum element and the balance of niobium element and inevitable impurities. According to the molybdenum-niobium target material prepared by matching molybdenum and niobium, various properties such as specific impedance, stress and corrosion resistance of a sputtered film after sputtering can be balanced, and the performance of a sputter coating film is improved. In addition, the invention further discloses a preparation method of the molybdenum-niobium target material.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor materials and relates to a method for preparing a target material, in particular to a molybdenum-niobium target material and a method for preparing the target material. Background Art

[0002] Both molybdenum and niobium are rare refractory metals, but compared with molybdenum, niobium has better room temperature plasticity, lower ductile-brittle transition temperature, good oxidation resistance and excellent corrosion resistance. Therefore, in many specific application fields, a certain amount of niobium metal is added to molybdenum metal to form a molybdenum-niobium alloy to improve certain properties of molybdenum.

[0003] One of the uses of molybdenum-niobium alloy is as a sputtering target for flat panel displays, where electrodes and wiring materials are formed by sputtering. Studies have shown that the specific impedance and film stress of molybdenum are only 1 / 2 of that of chromium, and it does not pollute the environment, so it has become one of the preferred materials for sputtering targets for flat panel displays. In the prior art, the target material obtained by roasting is prone to cracking, and the target material grains are large, which affects the effect of target coating. Summary of the invention

[0004] In view of the defects and shortcomings of the prior art, in a first aspect, the present invention provides a molybdenum-niobium target; in a second aspect, the present invention provides a method for preparing the molybdenum-niobium target.

[0005] In a first aspect, the molybdenum content of the molybdenum-niobium target is 40wt%-60wt%, and the remainder is niobium and unavoidable impurities.

[0006] In a second aspect, the present invention provides a method for preparing a molybdenum-niobium target, comprising the following steps: Step 1, mixing molybdenum powder and niobium powder by ball milling under a protective atmosphere to obtain a mixed powder; Step 2, putting the mixed powder into a mold, pre-pressing it, and then releasing the pressure to obtain a rough blank; Step 3, roasting the rough blank in a vacuum atmosphere, keeping the temperature and pressure for a certain period of time after roasting, and then cooling and demolding with the furnace to obtain the molybdenum-niobium target.

[0007] The molybdenum powder accounts for 40% to 60% of the total mass of the mixed powder, and the remainder is niobium powder and inevitable impurities.

[0008] Preferably, in step 1, during ball milling mixing, the ball to material ratio is 1:1.5-3.

[0009] Preferably, in step 1, the D50 of the molybdenum powder used is 5-8 μm; and the D50 of the niobium powder used is 30-45 μm.

[0010] Preferably, in step 1, the D50 of the molybdenum powder is 5-8 μm; and the D50 of the niobium powder is 30-45 μm.

[0011] Preferably, in step 1, the purity of the molybdenum powder is greater than 99.95%; the purity of the niobium powder is greater than 99.95%.

[0012] Preferably, in step 1, during ball milling mixing, the ball milling speed is 300-400 r / min; and the ball milling time is 10-18 h.

[0013] Preferably, in step 2, the pressure increase rate during pre-pressing is 0.1-0.3 MPa / min, the pre-pressing pressure is 6-10 MPa, and the pre-pressing time is 10-15 min.

[0014] Preferably, in step 3, the hot pressing sintering includes a heating stage and a heat preservation stage; in the heating stage, the heating rate is 8-10°C / min and the temperature is raised to 600-800°C before entering the heat preservation stage; the heat preservation stage includes the following five stages: In the first stage, the heating rate is 5-8℃ / min to 1050-1200℃, and then the temperature is kept constant; In the second stage, the temperature is raised to 1250~1350℃ at a rate of 5~6℃ / min and kept warm; In the third stage, the heating rate is 3-5℃ / min, the temperature is raised to 1400-1500℃, and the temperature is kept constant; In the fourth stage, the heating rate is 2-3℃ / min, the temperature is raised to 1550-1650℃, and the temperature is kept constant; In the fifth stage, the heating rate is 1~2℃ / min, the temperature is raised to 1700~1900℃, and then kept warm.

[0015] Preferably, step 3 also includes a pressure relief process, in which the rough blank is roasted and the pressure relief is carried out simultaneously, specifically: when the roasting temperature is lower than 1250°C, the expansion pressure in the mold reaches 6~10MPa, and the first stage of pressure relief begins, the pressure relief rate is 1.5~3MPa / min, and the duration of each pressure relief is 4~6min; when the roasting temperature is 1250°C~1600°C, the expansion pressure in the mold reaches 5~8MPa, and the second stage of pressure relief begins, the pressure relief rate is 1~2MPa / min, and the duration of each pressure relief is 3~5min; when the roasting temperature is 1650~1900°C, the expansion pressure in the mold reaches 3~5MPa, the pressure relief rate is 0.5~1MPa / min, and the duration of each pressure relief is 3~6min.

[0016] Preferably, in step 3, during the heat and pressure maintenance, the pressure is maintained at 1700-1900° C. with a pressurization rate of 0.25-0.35 MPa / min, a pressurization pressure of 35-40 MPa, and a pressurization time of 90-150 min.

[0017] Compared with the prior art, the present invention has the following obvious beneficial effects: (1) The molybdenum-niobium target prepared by combining molybdenum and niobium can balance the various properties of the sputtered film after sputtering, such as specific impedance, stress, and corrosion resistance, and improve the sputtering coating performance.

[0018] (2) The molybdenum-niobium target material prepared by the preparation method provided by the present invention has high density, is not easy to crack, has high purity, and has uniform and fine grain structure, good performance, and excellent sputtering performance. DETAILED DESCRIPTION

[0019] The present invention provides the following specific technical solutions.

[0020] In a first aspect, the molybdenum content of the molybdenum-niobium target is 40wt%-60wt%, and the remainder is niobium and unavoidable impurities.

[0021] The molybdenum-niobium target prepared by combining molybdenum and niobium can balance the various properties of the sputtered film after sputtering, such as specific impedance, stress, and corrosion resistance, and improve the sputtering coating performance.

[0022] In a second aspect, the present invention provides a method for preparing a molybdenum-niobium target, comprising the following steps: Step 1, mixing molybdenum powder and niobium powder by ball milling under a protective atmosphere to obtain a mixed powder; Step 2, putting the mixed powder into a mold, pre-pressing it, and then releasing the pressure to obtain a rough blank; Step 3, roasting the rough blank in a vacuum atmosphere, keeping the temperature and pressure for a certain period of time after roasting, and then cooling and demolding with the furnace to obtain the molybdenum-niobium target.

[0023] The molybdenum powder accounts for 40% to 60% of the total mass of the mixed powder, and the remainder is niobium powder and inevitable impurities.

[0024] Preferably, in step 1, during ball milling mixing, the ball to material ratio is 1:1.5-3.

[0025] Preferably, in step 1, the D50 of the molybdenum powder is 5-8 μm; and the D50 of the niobium powder is 30-45 μm.

[0026] Preferably, in step 1, the purity of the molybdenum powder is greater than 99.95%; the purity of the niobium powder is greater than 99.95%.

[0027] Preferably, in step 1, during ball milling mixing, the ball milling speed is 300-400 r / min; and the ball milling time is 10-18 h.

[0028] Preferably, in step 2, the pressure increase rate during pre-pressing is 0.1-0.3 MPa / min, the pre-pressing pressure is 6-10 MPa, and the pre-pressing time is 10-15 min.

[0029] Preferably, in step 3, the hot pressing sintering includes a heating stage and a heat preservation stage; in the heating stage, the heating rate is 8-10°C / min and the temperature is raised to 600-800°C before entering the heat preservation stage; the heat preservation stage includes the following five stages: In the first stage, the heating rate is 5-8℃ / min to 1050-1200℃, and then the temperature is kept constant; In the second stage, the temperature is raised to 1250~1350℃ at a rate of 5~6℃ / min and kept warm; In the third stage, the heating rate is 3-5℃ / min, the temperature is raised to 1400-1500℃, and the temperature is kept constant; In the fourth stage, the heating rate is 2-3℃ / min, the temperature is raised to 1550-1650℃, and the temperature is kept constant; In the fifth stage, the heating rate is 1~2℃ / min, the temperature is raised to 1700~1900℃, and then kept warm.

[0030] After research, the inventors found that during the roasting process of molybdenum powder and niobium powder, the density of the prepared molybdenum-niobium target material can be improved by regulating the heating rate of the roasting process, the roasting temperature and the roasting time in different stages. The target material is not easy to crack, has high purity, and has uniform and fine grain structure, good performance, and excellent sputtering performance.

[0031] Preferably, step 3 also includes a pressure relief process, in which the rough blank is roasted and the pressure relief is carried out simultaneously, specifically: when the roasting temperature is lower than 1250°C, the expansion pressure in the mold reaches 6~10MPa, and the first stage of pressure relief begins, the pressure relief rate is 1.5~3MPa / min, and the duration of each pressure relief is 4~6min; when the roasting temperature is 1250°C~1600°C, the expansion pressure in the mold reaches 5~8MPa, and the second stage of pressure relief begins, the pressure relief rate is 1~2MPa / min, and the duration of each pressure relief is 3~5min; when the roasting temperature is 1650~1900°C, the expansion pressure in the mold reaches 3~5MPa, the pressure relief rate is 0.5~1MPa / min, and the duration of each pressure relief is 3~6min.

[0032] In the actual production application process, pressure relief is achieved by adjusting the position of the pressure head. When the expansion pressure in the mold rises to the preset value, the pressure head is slowly raised to slowly release the expansion pressure in the mold, providing a certain reaction space for the expansion of the rough blank, which is beneficial to improving the quality of the target material, and is beneficial to the discharge of impurity gases generated during the sintering process, further improving the quality of the target material. Segmented pressure relief is beneficial to maintaining the shape of the rough blank and avoiding cracking of the rough blank. In the three stages of pressure relief, pressure relief is carried out when the expansion pressure in the mold reaches the preset value, and pressure relief is carried out multiple times in each stage. After many studies, the inventor found that if the pressure relief rate is fast, the pressure head and the mold may be separated, and the mold may shift in the furnace, which may cause danger; if the pressure relief rate is slow, the expansion force of the rough blank and the discharge of gas impurities may be incomplete, affecting the quality of the target material.

[0033] Preferably, in step 3, during the heat and pressure maintenance, the pressure is maintained at 1700-1900° C. with a pressurization rate of 0.25-0.35 MPa / min, a pressurization pressure of 35-40 MPa, and a pressurization time of 90-150 min.

[0034] In order to make the technical problems, technical solutions and technical advantages to be solved by the present invention more clear, they will be described in detail below with reference to specific examples, but the protection scope of the present invention is not limited to the following specific embodiments.

[0035] Unless otherwise defined, all professional terms used below have the same meanings as those generally understood by those skilled in the art. The professional terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the scope of protection of the present invention.

[0036] Unless otherwise specified, various raw materials, reagents, instruments and equipment used in the present invention can be purchased from the market or prepared by existing methods.

[0037] Embodiment 1: A method for preparing a molybdenum-niobium target comprises the following steps: Step 1, add 49wt% molybdenum powder with D50 of 7μm and 51wt% niobium powder with D50 of 38μm into a ball mill, ball mill under argon atmosphere, with a ball-to-material ratio of 1:2, a ball milling speed of 350r / min, and a ball milling time of 14h to obtain a mixed powder.

[0038] Step 2: Pour the mixed powder into a mold for pre-pressing, increase the pressure to 8 MPa at a rate of 0.2 MPa / min for 15 minutes, and release the pressure to obtain a rough blank.

[0039] Step 3, transfer the rough blank and the mold to the hot pressing furnace, maintain the vacuum pressure in the hot pressing furnace below 5Pa, enter the heating stage, and heat up to 600℃ at a heating rate of 10℃ / min before entering the roasting stage. Adjust the heating rate to 7℃ / min to heat up to 1200℃, and keep it warm for 30min; adjust the heating rate to 5℃ / min to heat up to 1350℃, and keep it warm for 30min; adjust the heating rate to 3℃ / min to heat up to 1500℃, and keep it warm for 30min; adjust the heating rate to 2℃ / min to heat up to 1650℃, and keep it warm for 30min; adjust the heating rate to 1℃ / min to heat up to 1850℃, and keep it warm for 30min. After the insulation is completed, adjust the pressurization rate to 0.35MPa / min, and start pressurizing to 40MPa; after the pressure reaches the set value, keep it warm and pressurized at 1850℃ for 150min.

[0040] The heating stage and the roasting stage are also accompanied by a pressure relief process. The first stage of pressure relief is carried out when the roasting temperature is lower than 1250°C. If the expansion pressure in the mold reaches 8MPa, the pressure relief begins, and the pressure relief rate is 2MPa / min for 4min; the second stage of pressure relief is carried out at a roasting temperature of 1250-1600°C. If the expansion pressure in the mold reaches 6MPa, the pressure relief begins, and the pressure relief rate is 1.5MPa for 4min; the third stage of pressure relief is carried out at a roasting temperature of 1650-1850°C. If the expansion pressure in the mold reaches 4MPa, the pressure relief begins, and the pressure relief rate is 1MPa for 4min.

[0041] Step 4: After the heat preservation and pressure preservation are completed, the temperature is lowered to 200° C. with the furnace, and the molybdenum-niobium target blank is obtained by demolding.

[0042] Embodiment 2: A method for preparing a molybdenum-niobium target comprises the following steps: Step 1, add 40wt% molybdenum powder with a D50 of 5μm and 60wt% niobium powder with a D50 of 30μm into a ball mill, and ball mill them under argon atmosphere with a ball-to-material ratio of 1:2, a ball milling speed of 300r / min, and a ball milling time of 10h to obtain a mixed powder.

[0043] Step 2: Pour the mixed powder into a mold for pre-pressing, increase the pressure to 6 MPa at a pressure increase rate of 0.1 MPa / min for 10 minutes, and release the pressure to obtain a rough blank.

[0044] Step 3, transfer the rough blank and the mold to the hot pressing furnace, maintain the vacuum pressure in the hot pressing furnace below 5Pa, enter the heating stage, and heat up to 700℃ at a heating rate of 8℃ / min before entering the roasting stage. Adjust the heating rate to 5℃ / min to heat up to 1050℃, and keep it warm for 45min; adjust the heating rate to 5℃ / min to heat up to 1250℃, and keep it warm for 45min; adjust the heating rate to 3℃ / min to heat up to 1400℃, and keep it warm for 45min; adjust the heating rate to 2℃ / min to heat up to 1550℃, and keep it warm for 45min; adjust the heating rate to 1℃ / min to heat up to 1700℃, and keep it warm for 45min. After the insulation is completed, adjust the pressurization rate to 0.25MPa / min, and start pressurizing to 35MPa; after the pressure reaches the set value, keep it warm and pressurized at 1700℃ for 90min.

[0045] The heating stage and the roasting stage are also accompanied by a pressure relief process. The first stage of pressure relief is carried out when the roasting temperature is lower than 1250°C. If the expansion pressure in the mold reaches 6MPa, the pressure relief begins, and the pressure relief rate is 1.5MPa / min for 4min; the second stage of pressure relief is carried out at a roasting temperature of 1250~1600°C. If the expansion pressure in the mold reaches 5MPa, the pressure relief begins, and the pressure relief rate is 1MPa for 5min; the third stage of pressure relief is carried out at a roasting temperature of 1650~1700°C. If the expansion pressure in the mold reaches 3MPa, the pressure relief begins, and the pressure relief rate is 0.5MPa for 6min.

[0046] Step 4: After the heat preservation and pressure preservation are completed, the temperature is lowered to 200° C. with the furnace, and the molybdenum-niobium target blank is obtained by demolding.

[0047] Embodiment 3: A method for preparing a molybdenum-niobium target comprises the following steps: Step 1: Add 60wt% molybdenum powder with a D50 of 8μm and 40wt% niobium powder with a D50 of 45μm into a ball mill, and ball mill them under argon atmosphere with a ball-to-material ratio of 1:2, a ball milling speed of 400r / min, and a ball milling time of 18h to obtain a mixed powder.

[0048] Step 2: Pour the mixed powder into a mold for pre-pressing, increase the pressure to 8 MPa at a rate of 0.3 MPa / min for 12 minutes, and release the pressure to obtain a rough blank.

[0049] Step 3, transfer the rough blank and the mold to the hot pressing furnace, maintain the vacuum pressure in the hot pressing furnace below 5Pa, enter the heating stage, and heat up to 800℃ at a heating rate of 9℃ / min before entering the roasting stage. Adjust the heating rate to 8℃ / min to heat up to 1200℃ and keep it warm for 60min; adjust the heating rate to 6℃ / min to heat up to 1350℃ and keep it warm for 60min; adjust the heating rate to 5℃ / min to heat up to 1500℃ and keep it warm for 60min; adjust the heating rate to 3℃ / min to heat up to 1650℃ and keep it warm for 60min; adjust the heating rate to 2℃ / min to heat up to 1900℃ and keep it warm for 60min. After the insulation is completed, adjust the pressurization rate to 0.35MPa / min and start pressurizing to 40MPa; after the pressure reaches the set value, keep it warm and pressurized at 1900℃ for 90min.

[0050] The heating stage and the roasting stage are also accompanied by a pressure relief process. The first stage of pressure relief is carried out when the roasting temperature is lower than 1250°C. If the expansion pressure in the mold reaches 6MPa, the pressure relief begins, and the pressure relief rate is 1.5MPa / min for 4min; the second stage of pressure relief is carried out at a roasting temperature of 1250~1600°C. If the expansion pressure in the mold reaches 5MPa, the pressure relief begins, and the pressure relief rate is 1MPa for 5min; the third stage of pressure relief is carried out at a roasting temperature of 1650~1700°C. If the expansion pressure in the mold reaches 3MPa, the pressure relief begins, and the pressure relief rate is 0.5MPa for 6min.

[0051] Step 4: After the heat preservation and pressure preservation are completed, the temperature is lowered to 200° C. with the furnace, and the molybdenum-niobium target blank is obtained by demolding.

[0052] Embodiment 4: The difference from Example 1 is that in step 3, no pressure relief is performed during the heating stage and the roasting stage.

[0053] Embodiment 5: The difference from Example 1 is that in step 3, the heating stage and the roasting stage are accompanied by a pressure relief process. In the first stage, if the expansion pressure in the mold reaches 8MPa, the pressure relief will start; in the second stage, if the expansion pressure in the mold reaches 6MPa, the pressure relief will start; in the third stage, if the expansion pressure in the mold reaches 6MPa, the pressure relief will start.

[0054] Comparative Example 1: A method for preparing a molybdenum-niobium target comprises the following steps: Step 1, add 49wt% molybdenum powder with D50 of 7μm and 51wt% niobium powder with D50 of 38μm into a ball mill, ball mill under argon atmosphere, with a ball-to-material ratio of 1:2, a ball milling speed of 350r / min, and a ball milling time of 14h to obtain a mixed powder.

[0055] Step 2: Pour the mixed powder into a mold for pre-pressing, increase the pressure to 8 MPa at a pressure increase rate of 0.2 MPa / min for 15 minutes, and release the pressure to obtain a rough blank.

[0056] Step 3: Transfer the rough blank and the mold to the hot pressing furnace, maintain the vacuum pressure in the hot pressing furnace below 5Pa, and enter the heating stage. The heating rate is 8℃ / min and the temperature is raised to 1700℃, and the temperature is kept for 45 minutes. After the insulation is completed, the pressure rate is adjusted to 0.25MPa / min, and the pressure is increased to 35MPa; after the pressure reaches the set value, it is kept at 1700℃ for 90 minutes.

[0057] Step 4: After the heat preservation and pressure preservation are completed, the temperature is lowered to 200° C. with the furnace, and the molybdenum-niobium target blank is obtained by demolding.

[0058] The target materials prepared in Examples 1 to 7 and Comparative Example 1 were subjected to relative density tests, wherein the relative density was directly tested using the traditional Archimedean method, the purity was tested using GDMS (glow discharge mass spectrometry), the microscopic grains were observed using SEM, and then analyzed using the intercept method.

[0059] Table 1 Test data of the targets prepared in Examples 1 to 7 and Comparative Example 1 It can be seen from Table 1 that the density of the molybdenum-niobium target prepared by the preparation method provided by the present invention is greater than 98%, and the purity is greater than 99.95%.

[0060] By comparing the target materials prepared in Example 1 and Example 4, it can be seen that the target material prepared in Example 1 has a higher density and finer grains, which proves that the quality of the target material can be further improved by the pressure relief process.

[0061] By comparing the targets prepared in Example 1 and Example 5, it can be seen that if the pressure release critical point is too high, waste gas accumulates in the mold, which can easily affect the agglomeration degree of the target material sintering process, thereby affecting the density of the finished target material.

[0062] By comparing the test data of the target materials prepared in Example 1 and Comparative Example 1, it can be proved that multi-stage calcination can improve the density of the target material, reduce the grain size of the target material, and improve the quality of the target material.

[0063] The embodiments described above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and concepts of the present invention within the technical scope of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A molybdenum-niobium target, characterized in that: The molybdenum content of the molybdenum-niobium target is 40wt%-60wt%, and the remainder is niobium and inevitable impurities.

2. A method for preparing a molybdenum-niobium target, characterized in that: The steps include: Step 1, mixing molybdenum powder and niobium powder by ball milling under a protective atmosphere to obtain a mixed powder; Step 2, putting the mixed powder into a mold, pre-pressing it, and then releasing the pressure to obtain a rough blank; Step 3, roasting the rough blank in a vacuum atmosphere, keeping the temperature and pressure for a certain period of time after roasting, and then cooling and demolding with the furnace to obtain the molybdenum-niobium target. Among them, molybdenum powder accounts for 40% to 60% of the total mass of the mixed powder.

3. The method for preparing a molybdenum-niobium target according to claim 2, characterized in that: In step 3, the hot pressing sintering includes a heating stage and a heat preservation stage; in the heating stage, the heating rate is 8-10°C / min, and the temperature is raised to 600-800°C before entering the heat preservation stage; The insulation stage includes the following five stages: In the first stage, the heating rate is 5-8℃ / min to 1050-1200℃, and then the temperature is kept constant; In the second stage, the temperature is raised to 1250~1350℃ at a rate of 5~6℃ / min and kept warm; In the third stage, the heating rate is 3-5℃ / min, the temperature is raised to 1400-1500℃, and the temperature is kept constant; In the fourth stage, the heating rate is 2-3℃ / min, the temperature is raised to 1550-1650℃, and the temperature is kept constant; In the fifth stage, the heating rate is 1~2℃ / min, the temperature is raised to 1700~1900℃, and then kept warm.

4. The method for preparing a molybdenum-niobium target according to claim 3, characterized in that: Step 3 also includes a pressure relief process, in which the rough blank is roasted and the pressure relief is carried out simultaneously, specifically: when the roasting temperature is lower than 1250°C, the expansion pressure in the mold reaches 6~10MPa, and the first stage of pressure relief begins, the pressure relief rate is 1.5~3MPa / min, and the duration of each pressure relief is 4~6min; when the roasting temperature is 1250°C~1600°C, the expansion pressure in the mold reaches 5~8MPa, and the second stage of pressure relief begins, the pressure relief rate is 1~2MPa / min, and the duration of each pressure relief is 3~5min; when the roasting temperature is 1650~1900°C, the expansion pressure in the mold reaches 3~5MPa, the pressure relief rate is 0.5~1MPa / min, and the duration of each pressure relief is 3~6min.

5. The method for preparing a molybdenum-niobium target according to claim 2, characterized in that: In step 3, during the heat and pressure maintenance, the pressure is maintained at 1700-1900° C. with a pressurization rate of 0.25-0.35 MPa / min, a pressurization pressure of 35-40 MPa, and a pressurization time of 90-150 min.

6. The method for preparing a molybdenum-niobium target according to claim 2, characterized in that: In step 2, the pressure increase rate during pre-pressing is 0.1-0.3 MPa / min, the pre-pressing pressure is 6-10 MPa, and the pre-pressing time is 10-15 min.

7. The method for preparing a molybdenum-niobium target according to claim 2, characterized in that: In step 1, during ball milling mixing, the ball to material ratio is 1:1.5-3.

8. The method for preparing a molybdenum-niobium target according to claim 2, characterized in that: In step 1, the D50 of the molybdenum powder is 5-8 μm; the D50 of the niobium powder is 30-45 μm.

9. The method for preparing a molybdenum-niobium target according to claim 2, characterized in that: In step 1, the purity of the molybdenum powder is greater than 99.95%; the purity of the niobium powder is greater than 99.95%.

10. The method for preparing a molybdenum-niobium target according to claim 2, characterized in that: In step 1, during ball milling mixing, the ball milling speed is 300-400 r / min; and the ball milling time is 10-18 h.

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