Screw vacuum pump for semiconductor coating

Abstract

The screw vacuum pump comprises a base, supporting rods are fixedly arranged at the four corners of the upper end of the base, a fixing frame is fixedly arranged at the upper ends of the supporting rods, and a mounting base is fixedly arranged at the upper end of the middle position of the front end and the rear end of the fixing frame; a first fixing plate is arranged above the mounting base, inserting grooves are formed in the two sides of the interior of the first fixing plate, the upper ends of the inserting grooves are of an opening structure, threaded holes are formed in the two sides of the interior of the first fixing plate, one sides of the threaded holes are of an opening structure, the threaded holes communicate with the inserting grooves, and positioning plates are arranged in the inserting grooves. And the upper end of the positioning plate extends to the position above the first fixing plate, the positioning plate is in sliding fit with the inserting groove, a positioning hole is formed in the positioning plate, the positioning hole corresponds to the threaded hole in position, and the problems that the vacuum pump is not convenient to disassemble and assemble, and the driving mechanism is difficult to replace are solved through the structure.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum pumps, in particular to a screw vacuum pump for semiconductor coating. Background Art

[0002] Semiconductor coating technology refers to a technology that coats a layer of thin film material on the surface of semiconductor materials to change the surface properties and functions of the semiconductor. Semiconductor coating mainly forms a thin film with specific functions on the surface of the semiconductor through physical vapor deposition, chemical vapor deposition, ion beam deposition and other technologies. Semiconductor coating is mainly used in the fields of integrated circuit manufacturing, solar cell manufacturing, optical film manufacturing, etc. Among them, the screw vacuum pump for semiconductor coating is an important device in the semiconductor manufacturing process. The screw vacuum pump mainly relies on the rotation of two precision-machined screws in the pump housing. One of the screws is the active screw, which is driven by the motor to rotate; the other is the driven screw, which is connected to the active screw through a synchronous gear to achieve synchronous reverse rotation. When the screw rotates, the space between the screws gradually increases, forming a low-pressure area, and the gas is sucked in from the air inlet.

[0003] For example, the Chinese patent "A Screw Vacuum Pump" with announcement number CN220415691U includes a vacuum pump body, an air inlet pipe is connected to the vacuum pump body, a liquid guide pipe is connected to the side of the air inlet pipe, and a ball valve is installed in the liquid guide pipe, a mixing box is installed on the liquid guide pipe, and a mixing cavity connected to the liquid guide pipe is opened in the mixing box, a material guide box is installed on the side of the mixing box, and a material guide cavity connected to the mixing cavity is opened in the material guide box, a material storage box connected to the material guide cavity is installed on the material guide box, and the mixing cavity A stirring member is installed inside, a material guiding member is installed in the material guiding cavity, a driving member for driving the stirring member and the material guiding member to operate simultaneously is installed on the mixing box, a water inlet end connected with the mixing chamber is installed on the mixing box, the stirring member includes a stirring rod, the stirring rod is arranged in the mixing chamber, one end of the stirring rod is rotatably connected to the top of the mixing box, and the other end of the stirring rod extends into the liquid guiding tube, the stirring rod is installed with a spiral blade located in the mixing chamber, and the stirring blade located in the liquid guiding tube is installed on the stirring rod.

[0004] Although the above-mentioned prior art can realize the use of screw vacuum pumps, in actual use, on the one hand, the vacuum pump is not convenient to disassemble and assemble. Usually, the pump body is fixed on the mounting frame by welding, which requires the operator to operate on the mounting frame when maintaining the pump body, thereby increasing the difficulty of pump body maintenance. On the other hand, the driving mechanism is difficult to replace. Usually, the driving mechanism is fixedly connected to the pump body, which makes it difficult for the pump body to meet the needs of higher or lower speeds, thereby reducing the adaptability of the pump body to different usage scenarios. Therefore, it does not meet existing needs. In this regard, we propose a screw vacuum pump for semiconductor coating. Summary of the invention

[0005] The object of the present invention is to provide a screw vacuum pump for semiconductor coating, so as to solve the problems mentioned in the above background technology that the vacuum pump is not convenient to disassemble and assemble, and the driving mechanism is difficult to replace.

[0006] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a screw vacuum pump for semiconductor coating, comprising a base, support rods are fixedly provided at the four corners of the upper end of the base, a fixing frame is fixedly provided at the upper end of the support rods, a mounting seat is fixedly provided at the upper end of the fixing frame at the middle position between the front and rear ends, a first fixing plate is provided above the mounting seat, slots are provided on both sides of the interior of the first fixing plate, the upper end of the slot is an open structure, threaded holes are provided on both sides of the interior of the first fixing plate, one side of the threaded hole is an open structure, and the threaded hole is connected to the slot, a positioning plate is provided inside the slot, the upper end of the positioning plate extends to the top of the first fixing plate, the positioning plate and the slot are slidably matched, a positioning hole is provided inside the positioning plate, and the position of the positioning hole corresponds to the position of the threaded hole.

[0007] Preferably, first bolts are provided on both sides of the exterior of the first fixing plate, and one end of the first bolt passes through the positioning hole and extends to the interior of the threaded hole.

[0008] Preferably, a second fixing plate is provided on one side of the upper end of the fixing frame, and two third bolts are provided at the front and rear ends inside the fixing frame, the third bolts are symmetrically arranged, and the lower ends of the third bolts extend to the bottom of the fixing frame through the through holes on the fixing frame, and a hydraulic telescopic device is fixedly provided on the upper end of the second fixing plate, and the hydraulic telescopic devices are equidistantly distributed, and a second mounting frame is fixedly provided on the upper end of the telescopic end of the hydraulic telescopic device, and a driving motor is fixedly provided on the upper end of the second mounting frame.

[0009] Preferably, a first mounting bracket is fixedly provided on the upper end of the positioning plate, a pump body is fixedly provided on the upper end of the first mounting bracket, a vacuum chamber is provided at the middle position inside the pump body, a driving chamber is provided on one side inside the pump body, rotating rods are provided at the front and rear ends of the driving chamber, one side of the rotating rods extends into the vacuum chamber, and the other side of the rotating rod located at the rear end of the driving chamber extends to the outside of the pump body, and a sealing ring is fixedly provided on one side of the pump body located outside the rotating rod.

[0010] Preferably, dampers are fixedly provided on both sides of the lower end of the first fixed plate, the lower ends of the dampers are fixedly connected to the mounting seats, and the dampers are symmetrically provided, and a support spring is fixedly provided between the fixed end and the telescopic end of the damper.

[0011] Preferably, a rubber pad is provided at the upper end of the first fixing plate located outside the slot opening, the rubber pad is fixedly connected to the first fixing plate by a polymer adhesive, and the first mounting frame contacts and squeezes the rubber pad.

[0012] Preferably, a flange is fixedly provided on one side of the rotating rod located outside the pump body and on the outside of the output shaft of the driving motor. The flange on the rotating rod and the flange on the output shaft of the driving motor are in contact with each other. A second bolt is provided inside the flange, and the second bolt passes through the flange. Nuts are sleeved on the outside of the second bolt and the third bolt.

[0013] Preferably, a driving gear is fixedly provided on the outside of the rotating rod at the rear end of the driving cavity, and a transmission gear is fixedly provided on the outside of the rotating rod at the front end of the driving cavity, and the transmission gear is meshingly connected with the driving gear.

[0014] Preferably, screws are provided at the front and rear ends of the vacuum chamber, the screws are symmetrically distributed, one side of the screws is rotatably connected to the inner wall of the vacuum chamber, and the other side of the screws is fixedly connected to the rotating rod.

[0015] Preferably, an air outlet pipe is fixedly provided at the middle position of the upper end of the pump body, and the air outlet pipe is connected to the vacuum chamber. The front and rear ends of the lower end of the pump body are fixedly provided with air inlet pipes, and the air inlet pipes are connected to the vacuum chamber.

[0016] Compared with the prior art, the present invention has the following beneficial effects: (1) The present invention can quickly disassemble and assemble the pump body through the positioning plate and the slot. When the pump body is maintained, the first bolt is first rotated to make the first bolt move outward in the threaded hole through the external thread until the first bolt is separated from the first fixing plate. At this time, the operator holds the first mounting bracket and pulls it upward, so that the first mounting bracket and the pump body are separated from the first fixing plate together. When the pump body maintenance is completed, the positioning plate at the lower end of the first mounting bracket is aligned with the opening of the slot and the first mounting bracket is moved downward until the positioning plate enters the slot and the pump body is placed. At the same time, the positioning hole on the positioning plate corresponds to the position of the threaded hole on the first fixing plate. Then the first bolt is aligned with the opening of the threaded hole and the first bolt is rotated. One end of the first bolt passes through the positioning hole and enters the threaded hole to complete the fixed installation of the first mounting bracket. At this time, the lower end of the first mounting bracket squeezes the rubber pad, thereby improving the convenience of pump body maintenance. At the same time, the driving positioning plate and the slot are provided to improve the positioning efficiency before the pump body is installed.

[0017] (2) The present invention can replace the drive motor through the second fixing plate and the hydraulic telescopic device. When a different drive motor is replaced according to actual needs, the nuts on the second bolt and the third bolt are first rotated to separate the nuts from the second bolt and the third bolt. The old drive motor and the second fixing plate are then removed from the fixing frame. The second fixing plate below the new drive motor is then placed on the fixing frame. The third bolt is then aligned with the through holes on the second fixing plate and the fixing frame and inserted into the through holes until the lower end of the third bolt extends to the bottom of the fixing frame. The nut is then sleeved on the lower end of the third bolt and rotated. The second fixing plate is fixed to the fixing frame by the third bolt and the nut. The hydraulic telescopic device is then synchronously turned on to extend the telescopic end of the hydraulic telescopic device. The second mounting frame and the drive motor are moved to a suitable position by the telescopic end of the hydraulic telescopic device. The drive motor is then fixedly connected to the flange on the rotating rod by the second bolt and the nut, thereby improving the adaptability of the pump body to different working scenarios.

[0018] (3) The present invention can absorb the vibration generated when the main body is working through the rubber pad and the damper. When the pump body is working, the rotating screw inside the pump body will generate certain vibrations, which are transmitted to the first fixed plate through the pump body and the first mounting frame. At this time, the rubber pad between the first mounting frame and the first fixed plate will be squeezed first, and the rubber pad will produce a certain deformation after being squeezed. The deformation of the rubber pad absorbs part of the vibration. At the same time, the rubber pad can make a certain buffer space between the first mounting frame and the first fixed plate, so that the first mounting frame is installed more firmly. At this time, the remaining vibration on the first fixed plate will squeeze the damper and the support spring. The damper and the support spring will deform after being squeezed. The vibration on the first fixed plate is absorbed by the deformation of the damper and the support spring until the vibration disappears after the pump body stops working. At this time, the damper and the support spring are reset, thereby improving the stability of the pump body and extending the service life of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a three-dimensional diagram of the overall structure of the present invention; Figure 2 It is a front view of the internal structure of the present invention; Figure 3 It is a side view of the overall structure of the present invention; Figure 4 It is an exploded view of the pump body fixing structure of the present invention; Figure 5 This is an enlarged view of the internal structure of the driving chamber of the present invention; Figure 6 For the present invention Figure 2 A partial enlarged view of area A.

[0020] In the figure: 1. base; 2. support rod; 3. fixing frame; 4. mounting seat; 5. damper; 6. supporting spring; 7. first fixing plate; 8. rubber pad; 9. first bolt; 10. first mounting frame; 11. pump body; 12. air outlet pipe; 13. second fixing plate; 14. hydraulic telescopic device; 15. second mounting frame; 16. driving motor; 17. flange; 18. second bolt; 19. sealing ring; 20. third bolt; 21. nut; 22. air inlet pipe; 23. rotating rod; 24. positioning plate; 25. vacuum chamber; 26. screw rod; 27. slot; 28. positioning hole; 29. ​​driving chamber; 30. driving gear; 31. transmission gear; 32. threaded hole. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0022] See also Figure 1-6 An embodiment of the present invention is as follows: a screw vacuum pump for semiconductor coating, comprising a base 1, support rods 2 are fixedly arranged at the four corners of the upper end of the base 1, a fixing frame 3 is fixedly arranged at the upper end of the support rod 2, a mounting seat 4 is fixedly arranged at the upper end of the fixing frame 3 at the middle position between the front and rear ends, a rotating rod 23 is located on one side of the outside of the pump body 11 and is fixedly arranged with a flange 17 on the outside of the output shaft of the driving motor 16, the flange 17 on the rotating rod 23 is in contact with the flange 17 on the output shaft of the driving motor 16, a second bolt 18 is arranged inside the flange 17, the second bolt 18 passes through the flange 17, and the second bolt 18 and the third bolt 20 are both sleeved with the outside. The nut 21 is fixedly provided with a driving gear 30 on the outside of the rotating rod 23 at the rear end of the driving chamber 29, and a transmission gear 31 is fixedly provided on the outside of the rotating rod 23 at the front end of the driving chamber 29, and the transmission gear 31 is meshed with the driving gear 30. The front and rear ends of the vacuum chamber 25 are both provided with screws 26, and the screws 26 are symmetrically distributed, and one side of the screws 26 is rotatably connected to the inner wall of the vacuum chamber 25, and the other side of the screws 26 is fixedly connected to the rotating rod 23. An air outlet pipe 12 is fixedly provided at the middle position of the upper end of the pump body 11, and the air outlet pipe 12 is connected to the vacuum chamber 25. The front and rear ends of the lower end of the pump body 11 are both fixedly provided with air inlet pipes 22, and the air inlet pipes 22 are connected to the vacuum chamber 25.

[0023] See also Figure 1 , Figure 4 and Figure 6A first fixing plate 7 is arranged above the mounting seat 4, and slots 27 are arranged on both sides of the interior of the first fixing plate 7, and the upper end of the slot 27 is an open structure, and threaded holes 32 are arranged on both sides of the interior of the first fixing plate 7, and one side of the threaded hole 32 is an open structure, and the threaded hole 32 is connected with the slot 27, and a positioning plate 24 is arranged inside the slot 27, and the upper end of the positioning plate 24 extends to the top of the first fixing plate 7, and the positioning plate 24 slides with the slot 27, and a positioning hole 28 is arranged inside the positioning plate 24, and the positioning hole 28 corresponds to the position of the threaded hole 32, and first bolts 9 are arranged on both sides of the outside of the first fixing plate 7, and one end of the first bolt 9 passes through the positioning hole 28 and extends to the inside of the threaded hole 32, so as to improve the convenience of maintaining the pump body 11 through the first bolt 9 and the positioning hole 28.

[0024] See also Figure 1 and Figure 2 A second fixing plate 13 is provided on one side of the upper end of the fixing frame 3, and two third bolts 20 are provided at the front and rear ends of the interior of the fixing frame 3, the third bolts 20 are symmetrically arranged, and the lower ends of the third bolts 20 extend to the bottom of the fixing frame 3 through the through holes on the fixing frame 3, and a hydraulic telescopic device 14 is fixedly provided on the upper end of the second fixing plate 13, and the hydraulic telescopic devices 14 are equidistantly distributed, and a second mounting frame 15 is fixedly provided on the upper end of the telescopic end of the hydraulic telescopic device 14, and a driving motor 16 is fixedly provided on the upper end of the second mounting frame 15, and a first The mounting frame 10 includes a pump body 11 fixedly mounted on the upper end of the first mounting frame 10, a vacuum chamber 25 is arranged at the middle position inside the pump body 11, a driving chamber 29 is arranged on one side inside the pump body 11, a rotating rod 23 is arranged at the front and rear ends inside the driving chamber 29, one side of the rotating rod 23 extends into the vacuum chamber 25, and the other side of the rotating rod 23 located at the rear end of the driving chamber 29 extends to the outside of the pump body 11, and a sealing ring 19 is fixedly mounted on one side of the pump body 11 located outside the rotating rod 23, so that the driving motor 16 can be adjusted to a suitable position through the hydraulic telescopic device 14.

[0025] See also Figure 1 and Figure 2 Dampers 5 are fixedly arranged on both sides of the lower end of the first fixed plate 7, the lower end of the damper 5 is fixedly connected to the mounting seat 4, and the damper 5 is symmetrically arranged, and a support spring 6 is fixedly arranged between the fixed end and the telescopic end of the damper 5, and a rubber pad 8 is arranged on the upper end of the first fixed plate 7 located outside the opening of the slot 27, and the rubber pad 8 is fixedly connected to the first fixed plate 7 by a polymer adhesive, and the first mounting frame 10 contacts and squeezes the rubber pad 8, so that the vibration generated by the pump body 11 during operation is absorbed by the damper 5 and the rubber pad 8.

[0026] Working principle: When in use, the screw 26 rotating inside the pump body 11 will generate a certain vibration, and the vibration is transmitted to the first fixing plate 7 through the pump body 11 and the first mounting frame 10. At this time, the rubber pad 8 between the first mounting frame 10 and the first fixing plate 7 will be squeezed first. After being squeezed, the rubber pad 8 will produce a certain deformation, and part of the vibration is absorbed by the deformation of the rubber pad 8. At the same time, the rubber pad 8 can make a certain buffer space between the first mounting frame 10 and the first fixing plate 7, so that the first mounting frame 10 is installed more firmly. At this time, the remaining vibration on the first fixing plate 7 will squeeze the damper 5 and the support spring 6. After the damper 5 and the support spring 6 are squeezed The vibration on the first fixing plate 7 is absorbed by the deformation of the damper 5 and the support spring 6 until the vibration disappears after the pump body 11 stops working. At this time, the damper 5 and the support spring 6 are reset. When the pump body 11 is maintained, the first bolt 9 is first rotated to move the first bolt 9 outward in the threaded hole 32 through the external thread until the first bolt 9 is separated from the first fixing plate 7. At this time, the operator holds the first mounting frame 10 and pulls it upward, so that the first mounting frame 10 and the pump body 11 are separated from the first fixing plate 7. When the maintenance of the pump body 11 is completed, the positioning plate 24 at the lower end of the first mounting frame 10 is aligned with the opening of the slot 27 and the first mounting frame 10 is moved downward. Until the positioning plate 24 enters the slot 27 and the pump body 11 is placed, and the positioning hole 28 on the positioning plate 24 corresponds to the position of the threaded hole 32 on the first fixing plate 7, then align the first bolt 9 with the opening of the threaded hole 32 and rotate the first bolt 9, one end of the first bolt 9 passes through the positioning hole 28 and enters the threaded hole 32, when a different drive motor 16 is replaced according to actual needs, at this time, the nut 21 on the second bolt 18 and the third bolt 20 is first rotated to separate the nut 21 from the second bolt 18 and the third bolt 20, and then the old drive motor 16 is removed from the fixing frame 3 together with the second fixing plate 13, and the second fixing plate 13 under the new drive motor 16 is placed On the fixed frame 3, align the third bolt 20 with the through holes on the second fixed plate 13 and the fixed frame 3 and insert it into the through hole until the lower end of the third bolt 20 extends to the bottom of the fixed frame 3. At this time, the nut 21 is sleeved on the lower end of the third bolt 20 and rotated. The second fixed plate 13 is fixed to the fixed frame 3 by the third bolt 20 and the nut 21. At this time, the hydraulic telescopic device 14 is synchronously turned on to make the telescopic end of the hydraulic telescopic device 14 telescope. The second mounting frame 15 and the drive motor 16 are moved to appropriate positions by the telescopic end of the hydraulic telescopic device 14. At this time, the drive motor 16 is fixedly connected to the flange 17 on the rotating rod 23 by the second bolt 18 and the nut 21.

[0027] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A screw vacuum pump for semiconductor coating, comprising a base (1), characterized in that: Support rods (2) are fixedly arranged at the four corners of the upper end of the base (1), a fixing frame (3) is fixedly arranged at the upper end of the support rod (2), a mounting seat (4) is fixedly arranged at the upper end of the fixing frame (3) at a position between the front and rear ends, a first fixing plate (7) is arranged above the mounting seat (4), slots (27) are arranged on both sides of the first fixing plate (7), the upper end of the slot (27) is an open structure, threaded holes (32) are arranged on both sides of the first fixing plate (7), one side of the threaded hole (32) is an open structure, and the threaded hole (32) is connected to the slot (27), a positioning plate (24) is arranged inside the slot (27), the upper end of the positioning plate (24) extends to the top of the first fixing plate (7), the positioning plate (24) and the slot (27) are slidably matched, and a positioning hole (28) is arranged inside the positioning plate (24), and the positioning hole (28) corresponds to the position of the threaded hole (32).

2. A screw vacuum pump for semiconductor coating according to claim 1, characterized in that: First bolts (9) are provided on both sides of the exterior of the first fixing plate (7), and one end of the first bolt (9) passes through the positioning hole (28) and extends to the interior of the threaded hole (32).

3. A screw vacuum pump for semiconductor coating according to claim 2, characterized in that: A second fixing plate (13) is provided on one side of the upper end of the fixing frame (3); two third bolts (20) are provided at the front and rear ends of the fixing frame (3); the third bolts (20) are symmetrically arranged, and the lower ends of the third bolts (20) extend to the bottom of the fixing frame (3) through through holes on the fixing frame (3); a hydraulic telescopic device (14) is fixedly provided on the upper end of the second fixing plate (13); the hydraulic telescopic devices (14) are equidistantly distributed; a second mounting frame (15) is fixedly provided on the upper end of the telescopic end of the hydraulic telescopic device (14); and a driving motor (16) is fixedly provided on the upper end of the second mounting frame (15).

4. A screw vacuum pump for semiconductor coating according to claim 3, characterized in that: A first mounting frame (10) is fixedly provided at the upper end of the positioning plate (24), a pump body (11) is fixedly provided at the upper end of the first mounting frame (10), a vacuum chamber (25) is provided at a middle position inside the pump body (11), a driving chamber (29) is provided at one side inside the pump body (11), a rotating rod (23) is provided at the front and rear ends inside the driving chamber (29), one side of the rotating rod (23) extends into the vacuum chamber (25), and the other side of the rotating rod (23) located at the rear end of the driving chamber (29) extends to the outside of the pump body (11), and a sealing ring (19) is fixedly provided on one side of the pump body (11) located outside the rotating rod (23).

5. A screw vacuum pump for semiconductor coating according to claim 4, characterized in that: Dampers (5) are fixedly arranged on both sides of the lower end of the first fixed plate (7), the lower ends of the dampers (5) are fixedly connected to the mounting seats (4), and the dampers (5) are symmetrically arranged, and a support spring (6) is fixedly arranged between the fixed end and the telescopic end of the dampers (5).

6. A screw vacuum pump for semiconductor coating according to claim 5, characterized in that: A rubber pad (8) is provided at the upper end of the first fixing plate (7) located outside the opening of the slot (27); the rubber pad (8) is fixedly connected to the first fixing plate (7) by a polymer adhesive, and the first mounting frame (10) contacts and squeezes the rubber pad (8).

7. A screw vacuum pump for semiconductor coating according to claim 6, characterized in that: A flange (17) is fixedly provided on one side of the rotating rod (23) located outside the pump body (11) and on the outside of the output shaft of the drive motor (16); the flange (17) on the rotating rod (23) and the flange (17) on the output shaft of the drive motor (16) are in contact with each other; a second bolt (18) is provided inside the flange (17); the second bolt (18) passes through the flange (17); nuts (21) are sleeved on the outside of the second bolt (18) and the third bolt (20).

8. A screw vacuum pump for semiconductor coating according to claim 7, characterized in that: A driving gear (30) is fixedly disposed on the outside of the rotating rod (23) at the rear end of the driving cavity (29), and a transmission gear (31) is fixedly disposed on the outside of the rotating rod (23) at the front end of the driving cavity (29), and the transmission gear (31) is meshingly connected with the driving gear (30).

9. A screw vacuum pump for semiconductor coating according to claim 8, characterized in that: The front and rear ends of the vacuum chamber (25) are both provided with screw rods (26), the screw rods (26) are symmetrically distributed, one side of the screw rods (26) is rotatably connected to the inner wall of the vacuum chamber (25), and the other side of the screw rods (26) is fixedly connected to the rotating rod (23).

10. A screw vacuum pump for semiconductor coating according to claim 9, characterized in that: An air outlet pipe (12) is fixedly provided at a middle position of the upper end of the pump body (11), and the air outlet pipe (12) is in communication with the vacuum chamber (25). An air inlet pipe (22) is fixedly provided at the front and rear ends of the lower end of the pump body (11), and the air inlet pipe (22) is in communication with the vacuum chamber (25).

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