Multi-zone degreasing and sintering integrated furnace

Abstract

The invention relates to the technical field of ceramic material degreasing and sintering, and discloses a multi-area degreasing and sintering integrated furnace which comprises a furnace body, a heating part installed in the furnace body, a heat preservation layer and a material box, the material box is located in the heat preservation layer, and the bottom of the material box is connected with an exhaust device; furnace doors are installed at the two opposite ends of the furnace body, each furnace door is provided with an air inlet pipe, air inlet pipes are arranged on the peripheral side of the furnace body at intervals, and baffle valves are installed on the air inlet pipes; an air guide box is installed in the middle of the material box in the length direction and divides the material box into a front cavity and a rear cavity, air holes are evenly distributed in side plates, close to the front cavity and the rear cavity, of the air guide box, and the bottom of the air guide box is communicated with the exhaust device. Gas in the furnace body can be more uniformly dispersed in the material box under the guidance of the gas guide box.

Description

Technical Field

[0001] The present application relates to the technical field of degreasing and sintering of ceramic materials, and in particular to a multi-zone degreasing and sintering integrated furnace. Background Art

[0002] The vacuum degreasing and sintering integrated furnace is to degrease the green body of advanced ceramic substrates and tube shells such as alumina and aluminum nitride at a certain temperature and atmosphere. It usually includes two stages: chemical and physical: a. As the temperature rises, the binder is heated and decomposed, which is a chemical reaction process; b. The gas decomposed by the binder after heating is transferred to the surface of the green body through the interconnected pores formed after solvent degreasing and then enters the atmosphere. This process belongs to the physical mass transfer and heat transfer process. The purpose of degreasing is to completely remove the binder component in the green body and pre-sinter the degreased green body to a certain strength. After degreasing, the ceramic preform is sintered at high temperature in vacuum or atmosphere to enhance the density and strength of the ceramic, thereby improving all aspects of performance. In these two stages, they are usually carried out in a molybdenum material box, and both require precise control of temperature and atmosphere. At the same time, it is necessary to ensure that the material box has a long life and a stable structure after long-term use to prevent it from deforming greatly under high temperature and positive pressure atmosphere and causing damage to the workpiece.

[0003] Vacuum debinding and sintering integrated furnaces are widely used in high-power electronic devices and semiconductor precision parts, and are developing towards large size, multi-layer number, and high line width ratio. At present, the airflow direction of molybdenum material boxes is mostly a single flow direction such as front and back air intake and middle air outlet, front air intake and rear air outlet, upper air intake and lower air outlet, left air intake and right air outlet of the material box, or simply diffused air from the bottom of the box side panel.

[0004] The comprehensive influence of the internal and external structures of the material box on the direction of the airflow is not taken into account. The airflow cannot be evenly distributed on the surface of the ceramic workpiece, causing process impact; at the same time, it will greatly affect the temperature uniformity in the material box, usually with a difference of ±10°C; during the heating process, in addition to the uneven distribution of airflow, due to factors such as heat capacity, insulation and material swinging methods, in severe cases, the local difference may be as high as ±20°C or more. Summary of the invention In order to further control the direction of airflow inside and outside the material box, the present application provides a multi-zone degreasing and sintering integrated furnace.

[0005] The present application provides a multi-zone degreasing and sintering integrated furnace, which adopts the following technical solution: A multi-zone degreasing and sintering integrated furnace, comprising a furnace body, a heating part installed in the furnace body, a heat preservation layer and a material box, wherein the material box is located in the heat preservation layer, and an exhaust device is connected to the bottom of the material box; Furnace doors are installed at opposite ends of the furnace body, and each of the two furnace doors is provided with an air inlet pipe. Air inlet pipes are also arranged at intervals on the periphery of the furnace body, and the air inlet pipes are installed with baffle valves; An air guide box is installed in the middle position of the material box in the length direction, and the air guide box divides the material box into a front chamber and a rear chamber. The side panels of the air guide box close to the front chamber and the rear chamber are evenly distributed with air holes, and the bottom of the air guide box is connected to the exhaust device.

[0006] By adopting the above technical scheme, there are multiple air inlet pipes in the front and back of the furnace body and around the furnace body, so as to realize multi-directional gas diffusion. The airflow can be evenly distributed to the surfaces of various ceramic workpieces, thereby improving the temperature uniformity in the material box. The gas diffuses in the material box and enters the air guide box. Since the air guide box is connected to the front chamber and the rear chamber, the gas can also return to the front chamber or the rear chamber. The gas in the front chamber and the rear chamber can be exchanged in the air guide box. The gas flow direction of the furnace body can be more evenly diffused in the material box through the guidance of the air guide box. The gas is also uniformly discharged out of the furnace body through the guidance of the air guide box, thereby further ensuring the uniformity of the airflow reaching the workpiece and the temperature uniformity. Since the air inlet is equipped with a baffle valve, the air intake quantity and air intake volume in different directions can also be adjusted.

[0007] Optionally, the exhaust device includes an air guide pipe and a collecting pipe, an exhaust hole is opened at the bottom of the air guide box, the air guide pipe is connected to the exhaust hole of the air guide box, and the air guide pipe and the exhaust hole correspond one to one, and the collecting pipe guides the gas to be discharged out of the furnace body.

[0008] By adopting the above technical solution, the gas can be discharged from the material box more smoothly, thus avoiding the accumulation of gas in the material box and improving the safety of the degreasing and sintering process.

[0009] Optionally, the material box includes a main frame and side panels, a cover plate, a box door and a bottom plate installed on the main frame, the air guide box is installed on the bottom plate, and air inlet holes are distributed on the box door and the side panels.

[0010] By adopting the above technical solution, the setting of the air inlet holes enables the gas to enter the material box more evenly, thereby improving the uniformity of the degreasing and sintering process; at the same time, the structural design of the material box is also convenient for maintenance and replacement of parts.

[0011] Optionally, the side panel includes an inner panel and an outer panel, ribs are installed between the inner panel and the outer panel, and the air inlet holes are distributed on the inner panel.

[0012] By adopting the above technical solution, the setting of the ribs enhances the strength and stability of the side panels, and at the same time the air inlet holes are distributed on the inner panel, so that the gas can enter the material box more evenly through the side panels.

[0013] Optionally, a support structure is installed in the material box, and the support structure includes a row of vertical rods, with a horizontal rod connected between two adjacent vertical rods, the vertical rods close to the main frame are used to support the main frame, the upper ends of the other vertical rods are abutted against the cover plates, and the lower ends of the vertical rods are connected to support seats.

[0014] By adopting the above technical solution, the supporting structure is used to support the main frame and can support the cover plate, thereby reducing the collapse and deformation of the cover plate under high temperature and the difference between the inside and outside of the material box. The setting of the supporting structure also enables the support plate to be stably placed in the material box, avoiding quality problems caused by the shaking of the support plate during the degreasing and sintering process.

[0015] Optionally, support plates for supporting the support plates are installed on both the vertical rods and the main frame, and the support plates are distributed at intervals in the vertical direction.

[0016] By adopting the above technical solution, the setting of the support plate makes it easier to place and remove the setter plate, while also improving the stability of the setter plate.

[0017] Optionally, a supporting structure is installed on the bottom plate, and the supporting structure includes three rows of support rods arranged along the width direction of the material box, and support blocks for supporting the firing plate are installed on the support rods. The support blocks are distributed in multiple rows along the circumference of the support rods, and the support blocks in one row are spaced apart along the vertical direction of the support rods, and the height positions of the support blocks in two adjacent rows are different.

[0018] By adopting the above technical solution, the support rod provides support blocks of various heights. By rotating the support rod, the support plate can be placed at different heights as needed, thereby improving the flexibility of the debinding and sintering process.

[0019] Optionally, the support rod comprises an outer rod and an inner rod, the outer rod is rotatably mounted on the bottom plate, the inner rod is rotatably mounted on the outer rod, the support blocks of the outer rod and the inner rod are both distributed in two rows, the outer rod is provided with a clearance groove for the support block of the inner rod to rotate, and the support block of the inner rod extends out of the outer rod; The inner rod rotates to form a first state and a second state. The first state is that the support block of the inner rod and the support block of the outer rod form a 90° angle. The second state is that the support block of the inner rod and the support block of the outer rod are in the same row and are staggered.

[0020] By adopting the above technical solution, through the rotation of the outer rod and the inner rod, not only can the position and height of the support block be flexibly adjusted, thereby changing the height position of the support plate, but also the number of layers of the support plate can be increased or decreased, thereby improving the adaptability and flexibility of the degreasing and sintering process.

[0021] Optionally, a fixing rod is connected between the support rods in a row, the fixing rod is provided with a slot, and the fixing rod is plugged into the supporting blocks of the support rods.

[0022] By adopting the above technical solution, the design of the fixed rod and the slot makes the supporting structure more stable. A row of support rods restrain each other. The support rods cannot rotate when supporting the support plate. The fixed rods are in contact with the support plate, which can also increase the supporting area of ​​the support plate.

[0023] In summary, the present application includes at least one of the following beneficial effects: 1. Through the design of gas guide box, air inlet and supporting structure, the gas can enter the material box more evenly, and the setter can be placed in the material box more stably, thereby improving the uniformity and efficiency of the debinding and sintering process; 2. Through the rotation of the outer rod and the inner rod, the distribution of the support blocks and the design of the fixed rod, the support plate can be placed at different heights and positions as needed, thereby improving the flexibility and adaptability of the debinding and sintering process. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a schematic diagram of the external structure of the furnace body of Example 1 of the present application; Figure 2 This is a schematic diagram of the structure of Example 1 of the present application after the furnace door is removed; Figure 3 This is a schematic diagram of the external structure of the material box of Example 1 of the present application; Figure 4 It is a schematic diagram of the main frame structure of Example 1 of the present application; Figure 5 yes Figure 3 A magnified schematic diagram of point A; Figure 6 It is a schematic diagram of the overall structure of the upper door of Example 1 of the present application; Figure 7 This is a schematic diagram of the structure of the side plate thickness in Example 1 of the present application; Figure 8 is a schematic diagram of the overall structure of the inner plate of Example 1 of the present application; Fig. 9 is a schematic structural diagram of an air guide box installed on a main frame in Example 1 of the present application; Fig.10 is a schematic diagram of the overall structure of the exhaust device of Example 1 of the present application; Fig.11 is a schematic diagram of the installation position of the support structure of Example 1 of the present application; Fig.12 is a schematic diagram of the overall structure of the support structure of Example 1 of the present application; Fig.13This is a schematic diagram of the structure of the door of Example 1 of the present application without part of the door, side panels and cover plate; Fig.14 is a schematic diagram of the overall structure of the cover plate support assembly of Example 2 of the present application; Fig.15 It is a schematic diagram of the overall structure of the cover plate support assembly of Example 2 of the present application installed on the material box; Fig.16 is a schematic diagram of the distribution of the support structure in Example 3 of the present application in the material box; Fig.17 is a schematic diagram of the overall structure of the support rod of Example 3 of the present application; Fig.18 It is a partial exploded schematic diagram of a row of support rods being fixed by a fixing rod in Example 3 of the present application; Fig.19 is a schematic cross-sectional view of a support rod of Example 3 of the present application; Fig. 20 This is a structural schematic diagram of Example 3 of the present application showing that the height positions of the two rows of support plates are inconsistent.

[0025] Description of reference numerals: 100, furnace body; 110, furnace door; 120, air inlet pipe; 130, support rod; 140, guide bar; 200, insulation layer; 300, material box; 310, main frame; 311, vertical beam; 312, horizontal beam; 313, fixing nail; 320, side plate; 321, inner plate; 322, outer plate; 323, rib; 330, cover plate; 340, box door; 341, hanging groove; 342, baffle; 350, bottom plate; 351, through hole; 400, exhaust device; 410, air guide pipe; 420, collecting pipe; 5 00, air guide box; 600, supporting structure; 610, vertical rod; 611, connecting rod; 620, horizontal rod; 630, supporting seat; 631, first supporting plate; 632, second supporting plate; 601, supporting rod; 602, supporting block; 6021, screw; 6022, screw rod; 603, fixing rod; 6031, slot; 6011, outer rod; 6012, inner rod; 604, giving way groove; 700, supporting plate; 800, supporting plate; 900, cover plate supporting assembly; 910, supporting column; 920, connecting block; 930, rib plate. DETAILED DESCRIPTION

[0026] The following is combined with Figure 1-20 This application is described in further detail.

[0027] Example 1 Example 1 of the present application discloses a multi-zone degreasing and sintering integrated furnace. Figure 1 and Figure 2A multi-zone degreasing and sintering integrated furnace includes a furnace body 100, a heating part installed in the furnace body 100, a thermal insulation layer 200 and a material box 300, and the material box 300 is installed at the center of the thermal insulation layer 200. Furnace doors 110 are installed on opposite ends of the furnace body 100, and both furnace doors 110 are provided with a thermal insulation layer 200 and an auxiliary heating layer. Both furnace doors 110 are provided with an air inlet pipe 120, and two air inlet pipes 120 are provided on the top of the furnace body 100. At the same time, an air inlet pipe 120 is provided on each of the left and right sides of the furnace body 100, and the angle between the left air inlet pipe 120 and the right air inlet pipe 120 and the top of the furnace body 100 is 120°. The air inlet pipes 120 are all installed with baffle valves, and the air inlet pipes 120 at each location can be independently controlled. The gas can enter the furnace body 100 from different directions, and the intake volume is controlled according to the number of intake pipes 120 used. The intake pipe 120 is connected to an air pump, and the exhaust speed can also be controlled to create a pressure difference inside and outside the material box 300, thereby promoting air flow. The heating part, the insulation layer 200 and the auxiliary heating layer in the furnace body 100 are controlled to make the atmosphere and temperature in the material box 300 uniformly distributed. The control of the heating part, the insulation layer 200 and the auxiliary heating layer in the furnace body 100 is all prior art, and this application does not make any improvements, and will not be elaborated.

[0028] Reference Figure 2 A support rod 130 and a guide bar 140 inserted into the support rod 130 are fixedly installed inside the furnace body 100 . The support rod 130 passes through the insulation layer 200 . The guide bar 140 is located in the insulation layer 200 . The material box 300 is installed on the guide bar 140 .

[0029] Reference Figure 3 and Figure 4 The material box 300 includes a main frame 310 and side panels 320, a cover plate 330, a box door 340 and a bottom plate 350 installed on the main frame 310. The main frame 310 is the main supporting structure 600 of the outer periphery of the material box 300. The main frame 310 includes a plurality of vertical beams 311 fixedly installed on the bottom plate 350. A cross beam 312 is connected between the upper ends of adjacent vertical beams 311. The side panels 320 are fixedly installed on the vertical beams 311. The cover plate 330 has two pieces and is fixedly installed on the cross beam 312 respectively. The cover plate 330 is used to prevent the airflow and temperature field from directly impacting the inner wall of the furnace body 100. The upper surface of the cover plate 330 is fixedly installed with ribs 323, which can also prevent the cover plate 330 from expanding at high temperature and contacting the heater, causing a short circuit.

[0030] Reference Figure 3 Specifically, the material box 300 is a structure with openings at both ends, and the box door 340 is used to block the openings. One opening of the material box 300 corresponds to two box doors 340, and the two box doors 340 are spliced ​​up and down, and the two box doors 340 are respectively hung on the vertical beams 311 located at the opening of the material box 300. Two handles are installed on one box door 340, which is convenient for people to take and put with both hands.

[0031] Reference Figure 5 A fixing nail 313 is fixedly installed on the vertical beam 311, and a hanging groove 341 is provided on the box door 340, and the box door 340 is hung on the fixing nail 313. When installing the box door 340, first hang one box door 340 on the lower part of the material box 300, and then hang the other box door 340 on the upper part of the material box 300.

[0032] Reference Figure 6 The lower end of the box door 340 located at the upper part of the material box 300 is fixedly connected with a baffle 342. After the box door 340 at the lower part of the material box 300 is installed, the upper box door 340 is installed. The baffle 342 partially fits on the outer wall of the lower box door 340, so that the baffle 342 also fixes the box door 340 at the lower part of the material box 300.

[0033] Reference Figure 7 and Figure 8 Specifically, the side plate 320 includes an inner plate 321 and an outer plate 322, and the inner plate 321 and the outer plate 322 are fixedly connected by a plurality of ribs 323, and the ribs 323 are arranged at intervals along the length direction of the inner plate 321. The design of the ribs 323 leaves a gap between the inner plate 321 and the outer plate 322. The inner plate 321 is provided with air inlet holes 510. When the gas in the furnace body 100 diffuses around and enters the material box 300, the gas can enter the gap between the inner plate 321 and the outer plate 322 and enter the material box 300 from the air inlet holes 510.

[0034] Reference Fig. 9 and Fig.10 , an air guide box 500 is installed in the middle of the length direction of the bottom plate 350, and the air guide box 500 divides the material box 300 into a front chamber and a rear chamber. The air guide box 500 is a rectangular parallelepiped structure with a hollow interior. The two side plates 320 of the air guide box 500 close to the front chamber and the rear chamber are evenly distributed with air holes 510. An exhaust hole is opened at the bottom of the air guide box 500, and a through hole 351 for connecting with the exhaust hole is also opened on the bottom plate 350. There are four through holes 351, and the through holes 351 correspond to the exhaust holes one by one. After the bottom of the material box 300 is installed on the bottom plate 350, the material box 300 is connected to the exhaust device 400 through the bottom plate 350.

[0035] Reference Fig.10 The exhaust device 400 includes multiple air guide pipes 410 and a collecting pipe 420. The multiple air guide pipes 410 are connected to the same collecting pipe 420. There are four air guide pipes 410. The air guide pipes 410 and the exhaust holes of the air guide box 500 correspond one to one. The collecting pipe 420 is used to lead the gas out of the furnace body 100.

[0036] Reference Fig.11 and Fig.12Furthermore, a support structure 600 is installed in the material box 300, and the support structure 600 includes a row of vertical rods 610, a horizontal rod 620 is connected between the lower ends of two adjacent vertical rods 610, a support seat 630 is connected between the lower ends of the vertical rods 610 and the horizontal rod 620, and the support seat 630 is fixedly connected to the bottom plate 350. The horizontal beam 312 near the opening of the material box 300 abuts against the upper end of a vertical rod 610, so that the vertical rod 610 near the main frame 310 supports the horizontal beam 312 of the main frame 310. The upper ends of the remaining vertical rods 610 abut against the cover plate 330, and the vertical rods 610 also support the cover plate 330. The support seat 630 includes a first support plate 631 and a second support plate 632. The first support plate 631 is a U-shaped plate, and the second support plate 632 is an L-shaped plate. Both ends of the first support plate 631 are fixedly connected to the second support plate 632. The second support plate 632 is partially attached to the bottom plate 350 and is fixedly connected to the bottom plate 350. The air guide box 500 is located between two adjacent vertical rods 610. A connecting rod 611 is fixedly connected between the two vertical rods 610 close to the air guide box 500. The connecting rod 611 abuts against the cover plate 330 to strengthen the supporting effect of the support structure 600 on the entire material box 300.

[0037] Reference Fig.12 and Fig.13 The vertical rod 610 and the vertical beam 311 near the front chamber are both equipped with support plates 700 for supporting the setter 800, and the support plates 700 are spaced apart in the vertical direction. The support plates 700 are L-shaped structures, one side of the support plates 700 is fixedly mounted on the vertical rod 610 or the vertical beam 311, and the other side of the support plates 700 is used to support the support plates 700.

[0038] The implementation principle of a multi-zone degreasing and sintering integrated furnace in Example 1 of the present application is: The heating part provides the required heat, and the insulation layer 200 ensures that the temperature inside the furnace body 100 is stable; the exhaust device 400 connected to the bottom of the material box 300 can make the gas in the furnace body 100 flow, and the design of each air inlet pipe 120 on the furnace body 100 allows the gas to enter the furnace body 100 along a predetermined path and is precisely controlled by the baffle 342 valve; the gas guide box 500 ensures the uniform distribution of the gas in the material box 300 and the directional discharge effect, so that the gas can be evenly distributed and directionally discharged in the furnace body 100 with multiple chambers and relatively large space, ensuring the uniformity of the degreasing and sintering process.

[0039] Example 2 The difference between Example 2 and Example 1 is that a cover plate support assembly 900 is further installed in the material box 300, and the rest of the structure and principle are basically the same. The cover plate support assembly 900 is used to support the cover plate 330 to prevent the cover plate 330 from collapsing and deforming under high temperature and pressure difference between the inside and outside of the material box 300.

[0040] Specifically, refer to Fig.14 The cover support assembly 900 includes a support column 910, a connection block 920 fixedly mounted on the upper end of the support column 910, and a rib plate 930 fixedly mounted on the connection block 920. A set of four rib plates 930 of the cover support assembly 900 is provided, one end of the four rib plates 930 is fixedly connected to the connection block 920, and the other end of the rib plate 930 is fixedly connected to the cross beam 312, and the four rib plates 930 form an X shape. The rib plate 930 fits the lower surface of the cover 330, and the rib plate 930 can also be fixedly connected to the cover 330 by bolts.

[0041] Reference Fig.14 and 15 Since there are two cover plates 330, there are two cover plate support assemblies 900, which are respectively mounted on the front chamber and the rear chamber. The lower end of the support column 910 is fixedly mounted on the bottom plate 350 or directly abuts against the bottom plate 350, and the position of the support column 910 is in the same row as the vertical rod 610 of the support structure 600.

[0042] Example 3 The difference between Example 3 and Example 1 is that the supporting structure 600 is different, and the rest of the structures and principles are basically the same.

[0043] Reference Fig.16 The support structure 600 includes three rows of support rods 601, which are arranged along the width direction of the material box 300. The support rods 601 are rotatably mounted on the bottom plate 350 with their own central axis as the rotation center. The spacing between two adjacent rows of support rods 601 is the same. The upper ends of the support rods 601 in the middle row are rotatably connected to the cover plate 330, and the upper ends of the other two rows of support rods 601 are rotatably connected to the crossbeam 312. The support structure 600 strengthens the stability of the main frame 310.

[0044] Specifically, refer to Fig.17 The support rod 601 is equipped with a support block 602, and the support blocks 602 are arranged in multiple rows along the circumference of the support rod 601, and the support blocks 602 in one row are arranged at intervals along the vertical direction of the support rod 601. The height positions of the support blocks 602 in two adjacent rows are different. If the height positions of the same number of setter plates 800 need to be changed, all the setter plates 800 are removed, and then the support rod 601 is rotated so that the support blocks 602 of different heights in other rows are used to receive the setter plates 800.

[0045] Further, see Fig.18In order to prevent the support rods 601 from rotating at will when supporting the burning plate 800, a fixing rod 603 is connected between the support rods 601 in the same row, and a slot 6031 is provided through the side wall of the fixing rod 603, and the fixing rod 603 and the support block 602 are plugged in. In order to further strengthen the connection between the fixing rod 603 and the support block 602, a threaded hole is provided on the end face of the support block 602, and the support block 602 is threadedly connected with a screw 6021, and the nut of the screw 6021 abuts against the fixing rod 603, so that the support block 602 and the fixing rod 603 are fixedly connected. There are only two supporting rods 601 in a row of the present application. When the slot 6031 of the fixing rod 603 and the corresponding support block 602 are plugged in, the two supporting rods 601 restrict each other, so that the supporting rod 601 can no longer rotate at will. At the same time, the fixing rod 603 can also increase the contact area between the supporting rod 601 and the burning plate 800.

[0046] Further, refer to Fig.19 The support rod 601 includes an outer rod 6011 and an inner rod 6012. The outer rod 6011 is rotatably mounted on the bottom plate 350, and the inner rod 6012 is rotatably mounted on the outer rod 6011. The rotation center of the inner rod 6012 is the same as the rotation center of the outer rod 6011. The upper end of the inner rod 6012 extends out of the outer rod 6011 and is rotatably connected to the crossbeam 312 or the cover plate 330. The support block 602 of the inner rod 6012 extends out of the outer rod 6011, and the outer rod 6011 is provided with a clearance groove 604 for the support block 602 of the inner rod 6012 to rotate.

[0047] Reference Fig.18 and Fig.19 The support blocks 602 of the outer rod 6011 and the inner rod 6012 are both distributed in two rows. The two rows of support blocks 602 on the outer rod 6011 are symmetrically distributed, and the two rows of support blocks 602 on the inner rod 6012 are also symmetrically distributed. The support blocks 602 are inserted into the inner rod 6012 by interference fit. The ends of the support blocks 602 on the outer rod 6011 are fixedly connected with screw rods 6022, and the screw rods 6022 are threadedly connected to the outer rod 6011. The adjacent two support blocks 602 in the two rows of support blocks 602 of the outer rod 6011 have different heights, and the adjacent two support blocks 602 in the two rows of support blocks 602 of the inner rod 6012 also have different heights.

[0048] Specifically, the inner rod 6012 can rotate 90° in the outer rod 6011, and the inner rod 6012 mainly rotates in the outer rod 6011 to form a first state and a second state. In the first state, the support block 602 of the inner rod 6012 and the support block 602 of the outer rod 6011 directly form a 90° angle, and four rows of support blocks 602 are formed on the support rod 601; which row of support blocks 602 is used to support the setter plate 800 can be determined according to needs, thereby changing the spacing between the upper and lower adjacent setter plates 800. Whether the support block 602 of the inner rod 6012 or the support block 602 of the outer rod 6011 is used to support the setter plate 800, the distance between the two adjacent support blocks 602 in the same row of support rods 601 is equal, and the fixed rod 603 can maintain a connection relationship with the support blocks 602 in the same row of support rods 601.

[0049] In the second state, a row of supporting blocks 602 of the inner rod 6012 overlaps with a row of supporting blocks 602 of the outer rod 6011, and two rows of supporting blocks 602 are formed on the support rod 601, and the supporting blocks 602 of the inner rod 6012 and the supporting blocks 602 of the outer rod 6011 are staggered. The number of layers of the setter plates 800 can be increased, and the distance between two adjacent setter plates 800 can also be shortened.

[0050] Reference Fig. 20 The fixed rods 603 of two adjacent rows of support rods 601 are close to each other and are at the same height. Since the heights of the supporting blocks 602 of two adjacent columns of support rods 601 are inconsistent, when three rows of support rods 601 in the same chamber of the material box 300 support the supporting plates 800, the supporting plates 800 are stacked into two rows, and the height positions of the two rows of supporting plates 800 are different, which can also promote the uniformity of gas flow in the material box 300.

[0051] Through the design of the support structure 600 of Example 3, in actual applications, the inner rod 6012 and the outer rod 6011 can be rotated as needed according to the different sizes and quantities of workpieces to change the height position of the support plate 700, and the number of layers of the firing plate 800 can also be increased or decreased.

[0052] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A multi-zone degreasing and sintering integrated furnace, characterized in that: It comprises a furnace body (100), a heating part installed in the furnace body (100), a heat-insulating layer (200), and a material box (300), wherein the material box (300) is located in the heat-insulating layer (200), and the bottom of the material box (300) is connected to an exhaust device (400); Furnace doors (110) are installed at opposite ends of the furnace body (100), each of the two furnace doors (110) is provided with an air intake pipe (120), and air intake pipes (120) are also arranged at intervals on the periphery of the furnace body (100), and the air intake pipes (120) are installed with baffle valves; An air guide box (500) is installed at a middle position in the length direction of the material box (300), the air guide box (500) divides the material box (300) into a front chamber and a rear chamber, the side panels (320) of the air guide box (500) close to the front chamber and the rear chamber are evenly distributed with air holes (510), and the bottom of the air guide box (500) is connected to the exhaust device (400).

2. The multi-zone degreasing and sintering integrated furnace according to claim 1, characterized in that: The exhaust device (400) comprises an air guide pipe (410) and a collecting pipe (420); an exhaust hole (510) is provided at the bottom of the air guide box (500); the air guide pipe (410) is connected to the exhaust hole (510) of the air guide box (500); the air guide pipe (410) and the exhaust hole (510) correspond one to one; and the collecting pipe (420) guides the gas to be discharged outside the furnace body (100).

3. The multi-zone degreasing and sintering integrated furnace according to claim 1, characterized in that: The material box (300) comprises a main frame (310), and side panels (320), a cover plate (330), a box door (340), and a bottom plate (350) mounted on the main frame (310); the air guide box (500) is mounted on the bottom plate (350); and air inlet holes (510) are distributed on the box door (340) and the side panels (320).

4. The multi-zone degreasing and sintering integrated furnace according to claim 3, characterized in that: The side plate (320) comprises an inner plate (321) and an outer plate (322), ribs (323) are installed between the inner plate (321) and the outer plate (322), and the air inlet holes (510) are distributed on the inner plate (321).

5. The multi-zone degreasing and sintering integrated furnace according to claim 3, characterized in that: A support structure (600) is installed in the material box (300), and the support structure (600) comprises a row of vertical rods (610), and a horizontal rod (620) is connected between two adjacent vertical rods (610). The vertical rods (610) close to the main frame (310) are used to support the main frame (310), and the upper ends of the other vertical rods (610) are in contact with the cover plate (330), and the lower ends of the vertical rods (610) are connected to support seats (630).

6. The multi-zone degreasing and sintering integrated furnace according to claim 5, characterized in that: Support plates (700) for supporting the setting plate (800) are installed on both the vertical rod (610) and the main frame (310), and the support plates (700) are distributed at intervals along the vertical direction.

7. The multi-zone degreasing and sintering integrated furnace according to claim 3, characterized in that: A support structure (600) is installed on the bottom plate (350), and the support structure (600) includes three rows of support rods (601) arranged along the width direction of the material box (300). Support blocks (602) for supporting the firing plate (800) are installed on the support rods (601). The support blocks (602) are distributed in multiple rows along the circumference of the support rods (601). The support blocks (602) in one row are arranged at intervals in the vertical direction of the support rods (601), and the support blocks (602) in two adjacent rows have different height positions.

8. The multi-zone degreasing and sintering integrated furnace according to claim 7, characterized in that: The support rod (601) comprises an outer rod (6011) and an inner rod (6012); the outer rod (6011) is rotatably mounted on the bottom plate (350); the inner rod (6012) is rotatably mounted on the outer rod (6011); the support blocks (602) of the outer rod (6011) and the inner rod (6012) are both arranged in two rows; the outer rod (6011) is provided with a clearance groove (604) for the support block (602) of the inner rod (6012) to rotate; and the support block (602) of the inner rod (6012) extends out of the outer rod (6011); The inner rod (6012) rotates to form a first state and a second state. The first state is that the support block (602) of the inner rod (6012) and the support block (602) of the outer rod (6011) form a 90° angle. The second state is that the support block (602) of the inner rod (6012) and the support block (602) of the outer rod (6011) are in the same row and are staggered.

9. The multi-zone degreasing and sintering integrated furnace according to claim 7, characterized in that: A fixing rod (603) is connected between the support rods (601) in a row. The fixing rod (603) is provided with a slot (6031). The fixing rod (603) is plugged into the support block (602) of the support rod (601).

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