focusing device

Abstract

The application relates to a focusing device, comprising a base, a first adjusting device, a second adjusting device, a first piezoelectric deformation mirror and a second piezoelectric deformation mirror, wherein the first adjusting device and the second adjusting device are arranged on the base, the first piezoelectric deformation mirror is arranged on the first adjusting device, the second piezoelectric deformation mirror is arranged on the second adjusting device, and the first piezoelectric deformation mirror and the second piezoelectric deformation mirror are arranged in sequence along the Y direction; the first adjusting device is used for rotating the first piezoelectric deformation mirror around the X direction, the second adjusting device is used for rotating the second piezoelectric deformation mirror around the X direction, rotating the second piezoelectric deformation mirror around the Y direction and moving the second piezoelectric deformation mirror along the Z direction; and the surface type of the first piezoelectric deformation mirror and the second piezoelectric deformation mirror is adjustable. The focusing device can adjust the focal point position and the focal spot size according to requirements, and is suitable for any one of Wolter I, II and III.

Description

Technical Field

[0001] The present invention relates to the field of X-ray optical wavefront correction, and more particularly to a focusing device. Background Art

[0002] In the hard X-ray band, since the refractive index of the material is close to 1, achieving high reflectivity requires the use of reflective elements with very small grazing incidence angles. As an important type of grazing incidence reflective element, the Wolter-type focusing system has been widely used in hard X-ray imaging and focusing fields since it was proposed by Wolter in 1952 because it can eliminate chromatic aberration, reduce coma and increase numerical aperture. The Wolter-type focusing system is an optical system composed of two coaxial and confocal rotating conic surfaces, including three types: Wolter I, II, and III. Each type has its own specific advantages. For example, the Wolter-I type can increase the numerical aperture of the system, the Wolter-II type can provide a wider field of view and better imaging uniformity, and the Wolter-III type can significantly improve the angular stability of the system.

[0003] However, the traditional Wolter focusing system can only achieve one of the three types: Wolter I, II, and III, and cannot change the focus position and focal spot size. Summary of the Invention

[0004] The object of the present invention is to provide a focusing device which can adjust the focal position and focal spot size according to requirements and is applicable to any one of Wolter I, II and III types.

[0005] Based on the above-mentioned purpose, the present invention provides a focusing device, including a base, a first adjustment device, a second adjustment device, a first piezoelectric deformable mirror, and a second piezoelectric deformable mirror, wherein the first adjustment device and the second adjustment device are both arranged on the base, the first piezoelectric deformable mirror is arranged on the first adjustment device, and the second piezoelectric deformable mirror is arranged on the second adjustment device, and the first piezoelectric deformable mirror and the second piezoelectric deformable mirror are arranged in sequence along the Y direction; the first adjustment device is used to rotate the first piezoelectric deformable mirror around the X direction, and the second adjustment device is used to rotate the second piezoelectric deformable mirror around the X direction, around the Y direction, and move along the Z direction; the surface shapes of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror are set to be adjustable.

[0006] Furthermore, the first adjustment device is fixed on the base, and the second adjustment device includes a support platform and an angle adjustment platform, the support platform is arranged on the base and can move relative to the base along the Z direction, the angle adjustment platform is arranged on the support platform, and the second piezoelectric deformable mirror is fixed on the angle adjustment platform; the angle adjustment platform is used to rotate the second piezoelectric deformable mirror around the Y direction and around the X direction, and the support platform is used to make the angle adjustment platform and the second piezoelectric deformable mirror move along the Z direction.

[0007] Furthermore, it also includes a driving mechanism, which is arranged on the base and connected to the support platform, and is used to drive the support platform to move along the Z direction.

[0008] Furthermore, the first piezoelectric deformable mirror includes a first reflector and two first piezoelectric ceramics, the first reflector is fixed on the first adjustment device, the two first piezoelectric ceramics are arranged opposite to each other on the upper surface of the first reflector along the X direction, the area of ​​the first reflector located between the two first piezoelectric ceramics is provided with a first optical reflective film and formed as a first reflective surface, and the first piezoelectric ceramic is provided with a first actuating electrode.

[0009] Furthermore, the second piezoelectric deformable mirror includes a second reflector and two second piezoelectric ceramics, the second reflector is fixed on the second adjustment device, the two second piezoelectric ceramics are arranged opposite to each other on the upper surface of the second reflector along the X direction, the area of ​​the second reflector located between the two second piezoelectric ceramics is provided with a second optical reflective film and formed into a second reflective surface, and a second actuating electrode is provided on the second piezoelectric ceramic.

[0010] Furthermore, the second actuating electrode includes a plurality of separate sub-electrodes, and each sub-electrode is fixed at a different position of the second piezoelectric ceramic.

[0011] Furthermore, the first actuating electrode is connected to a first wire, and the second actuating electrode is connected to a second wire.

[0012] Furthermore, the first adjusting device is provided with a first clamping device, the second adjusting device is provided with a second clamping device, the first piezoelectric deformable mirror is fixed on the first clamping device, and the second piezoelectric deformable mirror is fixed on the second clamping device.

[0013] Furthermore, the first clamping device includes a first housing having a first mounting cavity, and the first housing is provided with a plurality of first flexible clamping elements, each of which clamps the first piezoelectric deformable mirror in the first mounting cavity;

[0014] The second clamping device includes a second shell having a second installation cavity. The second shell is provided with a plurality of second flexible clamping elements, and each second flexible clamping element clamps the second piezoelectric deformable mirror in the second installation cavity.

[0015] Furthermore, the first clamping device further includes two first covers, which are fixedly connected to the first shell and are respectively located above the two first piezoelectric ceramics;

[0016] The second clamping device further includes two second covers, which are fixedly connected to the second shell and are respectively located above the two second piezoelectric ceramics.

[0017] The focusing device of the present invention forms a convex or concave surface shape of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror, and adjusts the posture and position of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror through the first adjustment device and the second adjustment device, thereby achieving adjustment of the focal position and the focal spot size; the first and second reflectors with variable thickness are deformed to form the required surface shape, and the local residual surface shape error is compensated by the linearly arranged sub-electrodes on the second reflector, and the relative position between the two piezoelectric deformable mirrors is adjusted by the movement of the support platform along the Z direction to adjust the focusing system to the required geometric relationship, so that when the grazing incidence angle of the first piezoelectric deformable mirror changes, the position of the second piezoelectric deformable mirror can also change accordingly, so that the focus after the secondary reflection remains unchanged when the numerical aperture changes. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of a focusing device according to an embodiment of the present invention;

[0019] Figure 2 2 is a schematic structural diagram of a first piezoelectric deformable mirror and a second piezoelectric deformable mirror of a focusing device according to an embodiment of the present invention;

[0020] Figure 3 To remove Figure 2 A schematic structural diagram of the first drive plate and the second drive plate;

[0021] Figure 4 This is a schematic structural diagram of a focusing device according to an embodiment of the present invention after removing the first cover and the second cover;

[0022] Figure 5 To remove Figure 4 A schematic structural diagram of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror;

[0023] Figure 6 Schematic diagram of the positional relationship between the first piezoelectric deformable mirror and the second piezoelectric deformable mirror of the Wolter I type;

[0024] Figure 7 Schematic diagram of the positional relationship between the first and second piezoelectric deformable mirrors of the Wolter II type;

[0025] Figure 8 Schematic diagram of the positional relationship between the first and second piezoelectric deformable mirrors of the Wolter III type;

[0026] Figure 9 is the relationship between the curvature of the first piezoelectric deformable mirror and the curvature of the second piezoelectric deformable mirror and the position along the optical axis in the case of Wolter I type. DETAILED DESCRIPTION

[0027] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings and described in detail.

[0028] In the present invention, the X, Y, and Z axes are three coordinate axes in a three-dimensional Cartesian coordinate system, wherein the Y axis direction is a direction parallel to the incident X-ray.

[0029] like Figure 1 、 Figure 2 、 Figure 3 and Figure 4 As shown, an embodiment of the present invention provides a focusing device, including a base 100, a first adjustment device 200, a second adjustment device 300, a first piezoelectric deformable mirror 400 and a second piezoelectric deformable mirror 500. The first adjustment device 200 is fixed on the base 100, the second adjustment device 300 is arranged on the base 100, the first piezoelectric deformable mirror 400 is arranged on the first adjustment device 200, and the second piezoelectric deformable mirror 500 is arranged on the second adjustment device 300. The first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 are arranged in sequence along the Y direction; the first adjustment device 200 is used to make the first piezoelectric deformable mirror 400 move around the X direction, and the second adjustment device 300 is used to make the second piezoelectric deformable mirror 400 rotate around the Y direction, rotate around the X direction and move along the Z direction; the surface shapes of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 are set to be adjustable.

[0030] In some embodiments, the second adjusting device 300 comprises a support table 310 and an angle adjusting table 320, the support table 310 is arranged on the base 100 and is movable along the Z direction relative to the base 100, the angle adjusting table 320 is arranged on the support table 310, the second piezoelectric deformable mirror 500 is arranged on the angle adjusting table 320, the angle adjusting table 320 is used to rotate the second piezoelectric deformable mirror 500 around the Y direction and the X direction, and the support table 310 is used to move the angle adjusting table 320 and the second piezoelectric deformable mirror 500 along the Z direction to adjust the height of the second piezoelectric deformable mirror 500; by adjusting the height of the second piezoelectric deformable mirror 500, the X rays can also be focused to the same point after passing through the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 after the incident angle is changed.

[0031] In some embodiments, the focusing device can further comprise a driving mechanism 330 arranged on the base 100 and connected with the support table 310, and used to drive the support table 310 to move along the Z direction. The driving mechanism 330 can be any suitable driving mechanism, such as a motor, a hydraulic mechanism, an air cylinder, etc., as long as it can drive the support table 310 to move along the Z direction.

[0032] In some embodiments, the first piezoelectric deformable mirror 400 includes a first reflecting mirror 410 and two first piezoelectric ceramics 420. The first reflecting mirror 410 is fixed on the first adjusting device 200. The two first piezoelectric ceramics 420 are arranged opposite to each other on the upper surface of the first reflecting mirror 410 along the X direction. The area of ​​the first reflecting mirror 410 located between the two first piezoelectric ceramics 420 is provided with a first optical reflecting film and formed into a first reflecting surface 430. A first actuating electrode 440 is provided on the first piezoelectric ceramic 420. By applying a voltage to the first actuating electrode 440, the first piezoelectric ceramic 420 can be deformed and mechanical displacement can be generated. Since the first piezoelectric ceramic 420 is fixedly connected to the first reflecting mirror 410 (usually by conductive glue), the first reflecting mirror 410 will also be deformed. By controlling the voltage of the first actuating electrode 440, the deformation amount of the first reflecting mirror 410 can be controlled, so that the first reflecting mirror 410 has different surface shapes. The second piezoelectric deformable mirror 500 includes a second reflecting mirror 510 and two second piezoelectric ceramics 520. The second reflecting mirror 510 is fixed on the second adjusting device 300. The two second piezoelectric ceramics 520 are arranged opposite to each other on the upper surface of the second reflecting mirror 510 along the X direction. The area of ​​the second reflecting mirror 510 located between the two second piezoelectric ceramics 520 is provided with a second optical reflecting film and forms a second reflecting surface 530. A second actuating electrode 540 is provided on the second piezoelectric ceramic 520. By applying a voltage to the second actuating electrode 540, the second piezoelectric ceramic 520 can be deformed and mechanical displacement can be generated. Since the second piezoelectric ceramic 520 is fixedly connected to the second reflecting mirror 510 (usually bonded by conductive glue), the second reflecting mirror 510 will also be deformed. By controlling the voltage of the second actuating electrode 540, the deformation amount of the second reflecting mirror 510 can be controlled, so that the second reflecting mirror 510 has different surface shapes.

[0033] In some embodiments, the curvature of the first reflective mirror 410 and the second reflective mirror 510 may be changed by adjusting the voltage applied to the first actuating electrode 440 and the second actuating electrode 540 , thereby changing the focal position.

[0034] In some embodiments, the two first ceramics 420 can be symmetrically arranged relative to the center line of the first reflector 410 (extending along the Y direction), and the same voltage is applied to the two first actuating electrodes 440, so that the deformation of the positions symmetrical relative to the center line on both sides of the X phase of the first reflector 410 is the same, that is, the shape of the first reflector 410 is symmetrical relative to the center line.

[0035] In some embodiments, the second actuating electrode 540 includes a plurality of separate sub-electrodes 541, each of which is fixed at a different position of the second piezoelectric ceramic 520 and arranged linearly. By applying an actuating voltage to each sub-electrode 541, the curvature of the local area corresponding to the position of each sub-electrode 541 can be adjusted, thereby correcting the slight difference between the overall curvature of the second reflector 510 and the curvature of the actual theoretical design.

[0036] In some embodiments, each sub-electrode 541 can be divided into two groups, namely a first group and a second group, the first group and the second group each include the same number of sub-electrodes, each sub-electrode of the first group corresponds to each sub-electrode of the second group one by one, and each sub-electrode of the first group is symmetrically arranged with respect to the center line of the second reflector 510 (extending along the Y direction); the voltage applied to the two sub-electrodes symmetrical with respect to the center line of the second reflector 510 is set to be the same, so that the deformation of the positions symmetrical with respect to the center line on both sides of the X phase of the second reflector 510 is the same, that is, the shape of the second reflector 510 is symmetrical with respect to the center line.

[0037] In some embodiments, the first actuation electrode 440 is connected to a first wire 450, and the second actuation electrode 450 is connected to a second wire 550. The first and second wires 450, 550 can be connected to an external controller to apply an actuation voltage to the first and second actuation electrodes 440, 540. A first circuit board 460 is disposed above the first piezoelectric ceramic 420. The first wire 450 is electrically connected to the first circuit board 460, which is then electrically connected to the external controller to apply a voltage to the first actuation electrode 440. A second circuit board 560 is disposed above the second piezoelectric ceramic 520. The second wire 550 is electrically connected to the second circuit board 560, which is then electrically connected to the external controller to apply a voltage to the second actuation electrode 540. When the second actuation electrode 540 includes multiple sub-electrodes 541, each sub-electrode 541 is connected to the external controller via a second wire 550 to allow independent application of an actuation voltage to each sub-electrode.

[0038] In some embodiments, the first adjusting device 200 is provided with a first clamping device 700, the second adjusting device 300 is provided with a second clamping device 800, the first piezoelectric deformable mirror 400 is fixed on the first clamping device 700, and the second piezoelectric deformable mirror 500 is fixed on the second clamping device 800. Figure 5As shown, the first clamping device 700 includes a first housing 710 having a first mounting cavity 711. The first piezoelectric deformable mirror 400 is positioned within the first mounting cavity 711. The first housing 710 is provided with a plurality of first flexible clamping elements 720, each of which clamps the first piezoelectric deformable mirror 400 within the first mounting cavity 711. The second clamping device 800 includes a second housing 810 having a second mounting cavity 811. The second piezoelectric deformable mirror 500 is positioned within the second mounting cavity 811. The second housing 810 is provided with a plurality of second flexible clamping elements 820, each of which clamps the second piezoelectric deformable mirror 500 within the second mounting cavity 811. By securing the first and second piezoelectric deformable mirrors 400 and 500 with the flexible clamping elements, additional deformation of the first and second piezoelectric deformable mirrors 400 and 500 can be avoided. The first flexible clamping element 720 and the second flexible clamping element 820 can both include flexible components (such as springs, plastics, rubber or other flexible materials). When clamping the piezoelectric deformable mirror, the flexible component can apply an elastic force to the piezoelectric deformable mirror to achieve flexible clamping and prevent it from producing additional deformation.

[0039] In some embodiments, the first clamping device 700 may further include two first covers 730, which are fixedly connected to the first housing 710 and positioned above the two first piezoelectric ceramics 420 to provide protection. A gap is defined between the two first covers 730, which is located above the first reflective surface 530. Incident X-rays can enter the first reflective surface 430 through this gap and, after being reflected by the first reflective surface 430, exit the gap. The second clamping device 800 may further include two second covers 830, which are fixedly connected to the second housing 810 and positioned above the two second piezoelectric ceramics 520 to provide protection. A gap is defined between the two second covers 830, which is located above the second reflective surface 530. Incident X-rays can enter the second reflective surface 530 through this gap and, after being reflected by the second reflective surface 530, exit the gap.

[0040] In some embodiments, both the first reflector 410 and the second reflector 510 are plane mirrors with variable thickness, and their thicknesses vary along the Y direction. For example, the thickness of the first reflector 410 gradually increases in a direction away from the second reflector 510, and the thickness of the second reflector 510 gradually increases in a direction away from the first reflector 410. Such variable thickness mirrors can, under the action of a voltage, cause the mirror surface to produce a non-cylindrical surface shape such as an ellipse, parabola, or hyperbolic cylinder.

[0041] The method of using the focusing device according to the embodiment of the present invention is as follows:

[0042] When you need to implement a Wolter I type, such as Figure 6 As shown, by applying a voltage to the actuating electrode, the surface shape of the first piezoelectric deformable mirror 400 can be changed into a parabolic cylinder, and the surface shape of the second piezoelectric deformable mirror 500 can be changed into a hyperbolic cylinder, so that the positions of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 are then adjusted by the first adjustment device 200 and the second adjustment device 300 to meet the requirements of the Wolter I focusing system. When a Wolter I focusing system is formed, the first reflecting surface 430 of the first piezoelectric deformable mirror 400 and the second reflecting surface 530 of the second piezoelectric deformable mirror 500 are both facing the same direction, for example, both facing upward; in subsequent use, the curvature of the two piezoelectric deformable mirrors can be changed by changing the magnitude of the voltage, thereby changing the focal position, and the relative positions of the two piezoelectric deformable mirrors can be changed by the first adjustment device 200 and the second adjustment device 300, thereby changing the grazing incidence angle θ of the X-ray and the focal spot size.

[0043] like Figure 7 and Figure 8 As shown in FIG, when it is necessary to implement the Wolter II type and the Wolter III type, the first reflecting surface 430 of the first piezoelectric deformable mirror 400 and the second reflecting surface 530 of the second piezoelectric deformable mirror 500 need to face different directions, for example, one facing upward and the other facing downward. At this time, the first piezoelectric deformable mirror 400 can be fixed on the first adjustment device 20 with the first reflecting surface 430 facing upward, and the second piezoelectric deformable mirror 500 can be fixed on the second adjustment device 300 with the second reflecting surface 530 facing downward. Then, according to the requirements of the Wolter II type, the surface shape of the first piezoelectric deformable mirror 400 is changed to a parabolic cylinder, and the surface shape of the second piezoelectric deformable mirror 500 is changed to a hyperbolic cylinder, or according to the requirements of the Wolter III type, the surface shape of the first piezoelectric deformable mirror 400 is changed to a parabolic cylinder, and the surface shape of the second piezoelectric deformable mirror 500 is changed to an elliptical cylinder. Similar to the Wolter I type, the Wolter II type and the Wolter III type have different shapes. In type III, the curvature of the two piezoelectric deformable mirrors can also be changed by changing the voltage, thereby changing the focal position, and the relative positions of the two piezoelectric deformable mirrors can be changed by the first adjustment device 200 and the second adjustment device 300, thereby changing the grazing incidence angle θ of the X-ray and the focal spot size.

[0044] Figure 6-Figure 8 In FIG. 4 , L1 is the length of the first piezoelectric deformable mirror 400 , and L2 is the length of the second piezoelectric deformable mirror 500 .

[0045] like Figure 9Figure 2 shows the relationship between the curvature of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 as a function of position along the optical axis (i.e., the Y-axis) in the Wolter I configuration. The black line on the left represents the first piezoelectric deformable mirror 400, and the red line on the right represents the second piezoelectric deformable mirror 500. In the Wolter I configuration, to achieve confocality, the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 must satisfy the following equation:

[0046]

[0047] Wherein, f1 is the focal length of the first piezoelectric deformable mirror 400, f2 is the focal length of the second piezoelectric deformable mirror 500, L is the length of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500 along the Y direction, L=L1=L2, and θ is the incident angle.

[0048] The focusing device of an embodiment of the present invention forms a convex or concave surface shape of the first piezoelectric deformable mirror 400 and the second piezoelectric deformable mirror 500, and adjusts the posture and position of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror through the first adjustment device 200 and the second adjustment device 300, thereby achieving adjustment of the focal position and the focal spot size; the first reflecting mirror 410 and the second reflecting mirror 510 with variable thickness are deformed to form the desired surface shape, and the local residual surface error is compensated by the linearly arranged sub-electrodes 541 on the second reflecting mirror 510, and the relative position between the two piezoelectric deformable mirrors is adjusted by the movement of the support platform 310 along the Z direction to adjust the focusing system to the desired geometric relationship, so that when the grazing incidence angle of the first piezoelectric deformable mirror 400 changes, the position of the second piezoelectric deformable mirror 500 can also change accordingly, so that the focus after the secondary reflection remains unchanged when the numerical aperture changes.

[0049] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. Various modifications are possible. In other words, any simple, equivalent changes and modifications made in accordance with the claims and description of the present invention are within the scope of protection of the patent claims. Anything not fully described in this invention constitutes conventional technology.

Claims

1. A focusing device, characterized in that: The device comprises a base, a first adjustment device, a second adjustment device, a first piezoelectric deformable mirror, and a second piezoelectric deformable mirror. The first adjustment device and the second adjustment device are both disposed on the base, the first piezoelectric deformable mirror is disposed on the first adjustment device, and the second piezoelectric deformable mirror is disposed on the second adjustment device. The first piezoelectric deformable mirror and the second piezoelectric deformable mirror are arranged sequentially along the Y direction. The first adjustment device is configured to rotate the first piezoelectric deformable mirror about the X direction, and the second adjustment device is configured to rotate the second piezoelectric deformable mirror about the X direction, about the Y direction, and move along the Z direction. The surface shapes of the first piezoelectric deformable mirror and the second piezoelectric deformable mirror are configured to be adjustable. The first adjustment device is fixed to the base, and the second adjustment device includes a support platform and an angle adjustment platform. The support platform is provided on the base and can move relative to the base in the Z direction. The angle adjustment platform is provided on the support platform, and the second piezoelectric deformable mirror is fixed to the angle adjustment platform. The angle adjustment platform is used to rotate the second piezoelectric deformable mirror about the Y direction and about the X direction, and the support platform is used to move the angle adjustment platform and the second piezoelectric deformable mirror along the Z direction. The first piezoelectric deformable mirror and the second piezoelectric deformable mirror are formed into convex or concave surfaces, the first adjustment device is configured to adjust the posture and position of the first piezoelectric deformable mirror, and the second adjustment device is configured to adjust the posture and position of the second piezoelectric deformable mirror to achieve adjustment of the focal position and focal spot size.

2. The focusing device according to claim 1, characterized in that It also includes a driving mechanism, which is arranged on the base and connected to the supporting platform, and is used to drive the supporting platform to move along the Z direction.

3. The focusing device according to claim 1, characterized in that The first piezoelectric deformable mirror includes a first reflecting mirror and two first piezoelectric ceramics. The first reflecting mirror is fixed on the first adjusting device. The two first piezoelectric ceramics are arranged opposite to each other on the upper surface of the first reflecting mirror along the X direction. The area of ​​the first reflecting mirror located between the two first piezoelectric ceramics is provided with a first optical reflecting film and formed into a first reflecting surface. The first piezoelectric ceramic is provided with a first actuating electrode.

4. The focusing device according to claim 3, characterized in that The second piezoelectric deformable mirror includes a second reflector and two second piezoelectric ceramics. The second reflector is fixed on the second adjustment device. The two second piezoelectric ceramics are arranged opposite to each other on the upper surface of the second reflector along the X direction. The area of ​​the second reflector located between the two second piezoelectric ceramics is provided with a second optical reflective film and forms a second reflective surface. A second actuating electrode is provided on the second piezoelectric ceramic.

5. The focusing device according to claim 4, characterized in that The second actuating electrode includes a plurality of separate sub-electrodes, and each sub-electrode is fixed at a different position of the second piezoelectric ceramic.

6. The focusing device according to claim 4, characterized in that The first actuating electrode is connected to a first wire, and the second actuating electrode is connected to a second wire.

7. The focusing device according to claim 4, characterized in that The first adjusting device is provided with a first clamping device, the second adjusting device is provided with a second clamping device, the first piezoelectric deformable mirror is fixed on the first clamping device, and the second piezoelectric deformable mirror is fixed on the second clamping device.

8. The focusing device according to claim 7, characterized in that The first clamping device includes a first housing having a first mounting cavity, and a plurality of first flexible clamping elements are provided on the first housing, each of the first flexible clamping elements clamping the first piezoelectric deformable mirror in the first mounting cavity; The second clamping device includes a second shell having a second installation cavity. The second shell is provided with a plurality of second flexible clamping elements, and each second flexible clamping element clamps the second piezoelectric deformable mirror in the second installation cavity.

9. The focusing device according to claim 8, characterized in that The first clamping device further includes two first covers, which are fixedly connected to the first shell and are respectively located above the two first piezoelectric ceramics; The second clamping device further includes two second covers, which are fixedly connected to the second shell and are respectively located above the two second piezoelectric ceramics.

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