Cooperative dry plasma decontamination method and device based on visual guidance

Abstract

The invention discloses a cooperative dry plasma decontamination method and device based on visual guidance. The method comprises the following steps that S1, an object to be decontaminated is fixed to a workbench; s2, scanning an object to be decontaminated through a visual guidance system, and obtaining a depth image and three-dimensional point cloud data of the object to be decontaminated; s3, processing the three-dimensional point cloud data, wherein the three-dimensional point cloud data comprises noise reduction, filtering and isolated point removal; s4, processing the three-dimensional point cloud data, and extracting geometric features of the surface of the object to be decontaminated; s5, generating a dynamic path for the fitted surface contour; and S6, the cooperation device drives the plasma reactor to move along the path. The visual guidance system is combined with the intelligent path planning method, the three-dimensional point cloud data of the to-be-decontaminated object is acquired in real time, and the precise decontamination path is generated based on the surface contour of the object, so that compared with the prior art, precise decontamination of a complex and irregular surface can be dealt with, omission of a specific area is avoided, and the decontamination efficiency is improved. The comprehensiveness and thoroughness of the decontamination effect are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of disinfection equipment, and in particular to a collaborative dry plasma decontamination method and equipment based on vision guidance. Background Art

[0002] Decontamination is a disinfection measure that disinfects items contaminated with chemical toxins so that they can be used normally.

[0003] Conventional "wet" chemical disinfectants have good disinfection performance against chemical poisons, but at the same time they are highly corrosive and irritating, causing serious damage to the surface of vulnerable sensitive materials. Conventional "wet" chemical disinfectants use liquid media to participate in the disinfection process. Currently, active chlorine disinfectants such as hypochlorite and chloramine are commonly used. Among them, the most difficult to replace is the three-in-two disinfectant, which is composed of 3Ca(CIO)2-2Ca(OH)2. It degrades chemical poisons through chlorination oxidation, nucleophilic substitution, etc. It has the advantages of high efficiency, broad spectrum, dual use for military and civilian purposes, and good economy. However, its great disadvantages are high corrosiveness and pollution caused by excessive use. Other traditional chemical poison disinfection methods such as pyrolysis, hydrolysis, physical or chemical adsorption materials, etc., also have many shortcomings. These methods usually have low degradation efficiency and are prone to secondary environmental pollution, which makes it difficult to meet the high efficiency and environmental protection requirements in practical applications.

[0004] Patent No. CN117600177A discloses an atmospheric plasma cleaning device for large-area cleaning of semiconductors. The device relies on the rotation and spacing adjustment of two nozzles to expand the cleaning area. However, this method has poor adaptability to complex and irregular surfaces. It only relies on a magnetic levitation motor to drive the nozzle to rotate, which limits the freedom of movement of the nozzle. The patented solution lacks real-time monitoring during operation and cannot be adjusted according to surface changes. The cleaning effect is not flexible and accurate enough.

[0005] In addition, patent number CN114308907A discloses a plasma cleaning device for precision analytical instruments. This patent does not introduce an intelligent path planning method and cannot achieve accurate cleaning of different surface contours. In addition, for instrument surfaces with irregular or complex shapes, this method is prone to missing specific areas, resulting in insufficient cleaning efficiency and effect, and it is difficult to make adaptive adjustments to complex cleaning needs, affecting the flexibility and automation level of cleaning.

[0006] In summary, it can be seen that plasma technology can be applied to the decontamination of various objects. Conventional plasma decontamination technology has problems such as incomplete decontamination effect, lack of intelligent path planning, simple control system, etc. It is difficult to adapt to the decontamination needs of complex-shaped instrument surfaces, especially in terms of automation, precision and flexibility. Therefore, it is urgent to develop an intelligent plasma decontamination device. Summary of the invention

[0007] In order to solve the current technical problems, the main purpose of the present invention is to provide a collaborative dry plasma decontamination method and equipment based on vision guidance to achieve automatic and flexible decontamination.

[0008] In order to overcome the problems existing in the prior art, the technical solution adopted by the present invention is: a collaborative dry plasma decontamination method based on visual guidance, comprising the following steps: S1: Fix the object to be disinfected on the workbench; S2: Scan the object to be disinfected through the visual guidance system to obtain the depth image and three-dimensional point cloud data of the object to be disinfected; S3: Processing the 3D point cloud data, including noise reduction, filtering and removal of isolated points; S4: Process the three-dimensional point cloud data to extract the geometric features of the surface of the object to be disinfected; S5: Generate the optimal dynamic path for the fitted surface profile; S6: The collaborative device drives the plasma reactor to move along the path, while the visual guidance system reads the data of the depth camera in real time and transmits the updated surface information to the collaborative device to dynamically adjust the path of the plasma reactor.

[0009] For different objects to be disinfected, the plasma reactor adopts corresponding power, moving speed and distance between the objects to be disinfected; When the object to be disinfected is butyl rubber, the power of the plasma reactor is 1100-1300W, the moving speed is 15-25 mm / s, and the distance between the plasma reactor and the object to be disinfected is 10-20 mm. When the object to be disinfected is ABS plastic, the power of the plasma reactor is 1000~1200W, the moving speed is 25~35mm / s, and the distance between the plasma reactor and the object to be disinfected is 10~20mm; When the object to be disinfected is PC plastic, the power of the plasma reactor is 1000-1200W, the moving speed is 15-25 mm / s, and the distance between the plasma reactor and the object to be disinfected is 10-20mm; When the object to be disinfected is aramid fabric, the power of the plasma reactor is 1100~1300W, the moving speed is 15-25mm / s, and the distance between the object to be disinfected is 10~20mm.

[0010] A collaborative dry plasma decontamination device based on vision guidance is used to implement the collaborative dry plasma decontamination method based on vision guidance. The collaborative dry plasma decontamination device based on vision guidance includes a collaborative device, a control system, a plasma reactor, a pulse power supply, a visual guidance system and a workbench. The plasma reactor is installed on the collaborative device, and the collaborative device carries the plasma reactor to move in a three-dimensional space. The pulse power supply is connected to the plasma reactor through wires and pipelines; the visual guidance system is electrically connected to the control system, and the control system is electrically connected to the collaborative device; the workbench is used to place objects to be decontaminated; the visual guidance system includes multiple depth cameras, and the multiple depth cameras are installed on the collaborative device.

[0011] The workbench has an adsorption structure.

[0012] The workbench comprises a hollow workbench body, the upper side of which is provided with adsorption holes, and the workbench body is also provided with a negative pressure interface. When in use, the negative pressure interface is connected to the suction port of the vacuum pump through a pipeline.

[0013] The cooperation device is a robot arm, the plasma reactor is installed at the movable end of the robot arm, and three depth cameras are provided, which are installed and fixed at intervals around the movable end of the robot arm.

[0014] The workbench is installed at the movable end of another mechanical arm.

[0015] The cooperative device includes a base, an X-axis linear module, an X-axis slide, a Y-axis linear module, a Y-axis slide, a Z-axis linear module and a Z-axis slide. At least one set of X-axis linear modules is installed on the base along the X-axis direction. The X-axis slide is installed on the slider of the X-axis linear module. At least one set of Y-axis linear modules is installed on the X-axis slide along the Y-axis direction. The Y-axis slide is installed on the slider of the Y-axis linear module. At least one set of Z-axis linear modules is installed on the Y-axis slide along the Z-axis direction. The Z-axis slide is installed on the slider of the Z-axis linear module. The plasma reactor is installed at the lower end of the Z-axis slide, and the workbench is installed on the base, and the workbench is located below the plasma reactor. Three depth cameras are provided, two of which are respectively installed on the base on both sides of the workbench, and the other is installed on the Z-axis slide.

[0016] The base is a groove-shaped structure with a top and a side away from the Z-axis slide open, and the workbench is installed in the groove-shaped structure.

[0017] A swing arm is installed in the groove-shaped structure of the base, one end or both ends of the swing arm are rotatably connected to the base through bearings, a drive motor is fixedly installed on the outer side of the base through a support, and the output shaft of the drive motor is transmission-connected to the swing arm; the workbench has an adsorption structure. The present invention has the following beneficial effects: 1. The present invention adopts a visual guidance system combined with an intelligent path planning method to obtain the three-dimensional point cloud data of the object to be disinfected in real time and generate an accurate disinfection path based on the surface contour of the object. Compared with the existing technology, the present invention can handle the precise disinfection of complex and irregular surfaces, avoid missing specific areas, and ensure the comprehensiveness and thoroughness of the disinfection effect.

[0018] 2. The device of the present invention is equipped with a real-time monitoring and feedback mechanism, which can automatically adjust the path according to surface changes and decontamination progress. Through the collaboration of the control system and the visual guidance system, dynamic adaptation to different surface contours can be achieved, ensuring that the plasma reactor is always in the best position, improving the flexibility and accuracy of decontamination.

[0019] 3. By combining the visual guidance system with the control system, the present invention greatly improves the automation of the disinfection process, reduces the need for manual intervention, and improves the disinfection efficiency. The path optimization algorithm can generate the shortest disinfection path, ensuring that each movement of the nozzle can cover the area to be disinfected to the maximum extent, thereby improving the overall disinfection efficiency.

[0020] 4. The present invention combines visual guidance to perform adaptive path planning and parameter adjustment on the objects to be disinfected, and can achieve full coverage disinfection of complex curved surfaces and other shapes in surface disinfection, overcoming the shortcomings of traditional plasma disinfection technology in adapting to complex surfaces, disinfection effects and intelligent control, and has obvious technical advantages and practical application value. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 Flow chart of the method of the present invention.

[0023] Figure 2 It is a schematic diagram of the three-dimensional structure of one embodiment of the present invention.

[0024] Figure 3 It is a schematic diagram of the main structure of one embodiment of the present invention.

[0025] Figure 4 It is a schematic diagram of the three-dimensional structure of the workbench of the present invention.

[0026] Reference numerals: Collaboration device 100, base 110, X-axis linear module 120, X-axis slide 130, Y-axis linear module 140, Y-axis slide 150, Z-axis linear module 160, Z-axis slide 170, swing arm 180, drive motor 181, support 182; Plasma reactor 200, pulse power supply 210; Visual guidance system 300, first depth camera 310, second depth camera 320, third depth camera 330; Compressed air source 400; Workbench 500, workbench body 501, adsorption hole 502, negative pressure interface 503; DETAILED DESCRIPTION The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] Embodiment 1: See also Figure 1 The present invention provides a collaborative dry plasma decontamination method based on visual guidance, comprising the following steps: S1: Fix the object to be disinfected on the workbench 500; S2: Scanning the object to be disinfected by the visual guidance system 300 to obtain a depth image and three-dimensional point cloud data of the object to be disinfected; S3: Processing the 3D point cloud data, including noise reduction, filtering and removal of isolated points; S4: Process the three-dimensional point cloud data to extract the geometric features of the surface of the object to be disinfected; S5: Generate the optimal dynamic path for the fitted surface profile; S6: The collaborative device 100 drives the plasma reactor 200 to move along the path, and at the same time, the visual guidance system reads the data of the depth camera in real time, and transmits the updated surface information to the collaborative device 100 to dynamically adjust the path of the plasma reactor 200.

[0028] In this embodiment, the visual guidance system 300 includes a depth camera, an image processing and data preprocessing module, an object recognition and feature extraction module, a path planning module, and a real-time feedback and control module. The depth camera captures the surface features, positions, and three-dimensional information of objects in the environment in real time through comprehensive scanning at multiple angles; the image processing and data preprocessing module processes the collected raw data, including denoising, filtering, edge detection, and image enhancement, to improve the accuracy and reliability of the data. This module converts the processed image or depth data into point cloud data; the object recognition and feature extraction module identifies the objects to be disinfected or processed and extracts their key features; the path planning module generates the optimal working path based on the extracted object features; the real-time feedback and control module monitors the equipment operation process in real time to determine whether the path or parameters need to be adjusted.

[0029] Specifically, the depth camera of the vision guidance system 300 is used to scan the object to be disinfected to obtain a depth image and three-dimensional point cloud data of the object to be disinfected, and the original point cloud is further processed by PointNet++, including noise reduction, filtering and removal of isolated points to improve the quality of the point cloud. It is further preferred to use PointCNN to perform advanced processing on the point cloud to extract geometric features of complex surfaces, and it is further preferred to use the Robot Operating System (ROS) in conjunction with MoveIt! to generate a dynamic path for the fitted surface contour, and MoveIt! is used to control the motion of the collaborative device 100. At the same time, the data of the depth camera is read in real time, and the updated surface information is transmitted to the collaborative device 100 to dynamically adjust the path of the plasma reactor 200 to ensure that there are no omissions in disinfection.

[0030] Furthermore, for different objects to be disinfected, the plasma reactor 200 adopts corresponding power, moving speed, and distance between the objects to be disinfected; When the object to be disinfected is butyl rubber, the power of the plasma reactor 200 is 1100-1300W, the moving speed is 15-25 mm / s, and the distance between the plasma reactor 200 and the object to be disinfected is 10-20 mm; When the object to be disinfected is ABS plastic, the power of the plasma reactor 200 is 1000~1200W, the moving speed is 25~35mm / s, and the distance between the plasma reactor 200 and the object to be disinfected is 10~20mm; When the object to be disinfected is PC plastic, the power of the plasma reactor 200 is 1000-1200W, the moving speed is 15-25mm / s, and the distance between the plasma reactor 200 and the object to be disinfected is 10-20mm; When the object to be disinfected is aramid fabric, the power of the plasma reactor 200 is 1100-1300W, the moving speed is 15-25 mm / s, and the distance between the plasma reactor 200 and the object to be disinfected is 10-20 mm.

[0031] In one embodiment, the plasma reactor 200 is 15 mm away from the object to be decontaminated, the gas pressure is 60 kPa, and the frequency is 25 kHz.

[0032] The power of butyl rubber was 1200 W, and the moving speed of the plasma reactor was 20 mm / s; The power of ABS plastic is 1100 W, and the moving speed of plasma reactor is 30 mm / s; PC plastic takes 1100 W, and the moving speed of the plasma reactor is 20 mm / s; The power of the aramid fabric was 1200 W, and the moving speed of the plasma reactor was 20 mm / s.

[0033] Embodiment 2: A collaborative dry plasma decontamination device based on vision guidance is used to implement the collaborative dry plasma decontamination method based on vision guidance. The collaborative dry plasma decontamination device based on vision guidance includes a collaborative device 100, a control system 190, a plasma reactor 200, a pulse power supply 210, a visual guidance system 300 and a workbench 500. The plasma reactor 200 is installed on the collaborative device 100, and the collaborative device 100 carries the plasma reactor 200 to move in a three-dimensional space. The pulse power supply 210 is connected to the plasma reactor 200 through wires and pipelines; the visual guidance system 300 is electrically connected to the control system 190, and the control system 190 is electrically connected to the collaborative device 100; the workbench 500 is used to place objects to be decontaminated; the visual guidance system 300 includes multiple depth cameras, and the multiple depth cameras are installed on the collaborative device 100.

[0034] In this embodiment, the plasma reactor 200 uses a plasma spray gun, and the pulse power supply 210 is a power supply that matches the plasma spray gun. When in use, the pulse power supply 210 is connected to the power supply for power supply, and is also connected to the compressed air source 400 through a pipeline. The compressed air source 400 can be a gas tank or an air compressor.

[0035] During disinfection, the high-energy electrons and active free radicals in the plasma interact with chemical agent molecules and pathogenic microorganisms, thereby achieving efficient disinfection.

[0036] There are three depth cameras, namely a first depth camera 310 , a second depth camera 320 , and a third depth camera 330 .

[0037] The control system 190 controls the movement of the collaborative device 100 to achieve precise multi-axis linkage to ensure that the plasma reactor 200 performs the decontamination operation according to the optimal path. It also detects the position and speed parameters of each axis of the collaborative device 100 in real time to ensure that the equipment operates within a safe range and can issue an alarm or shut down for protection in the event of an abnormality.

[0038] Based on the recognition of the objects to be decontaminated by the visual guidance system 300, the control system 190 intelligently adjusts the power of the pulse power supply 210 to optimize the plasma energy, and adjusts the moving speed of the plasma reactor 200 to meet different decontamination requirements, and realizes human-computer interaction through the control system 190. The control system 190 is equipped with a display screen and an operation panel, through which the user can view the decontamination progress, adjust parameters, and start / pause the equipment in real time; the control system 190 can also display real-time information on path planning and equipment status, and provide feedback on the decontamination results, which is convenient for the operator's overall control and management.

[0039] Embodiment 3: On the basis of Embodiment 2, the workbench 300 has an adsorption structure.

[0040] In this embodiment, see Figure 4 The workbench 300 includes a hollow workbench body 301, an adsorption hole 302 is provided on the upper side of the workbench body 301, and a negative pressure interface 303 is also provided on the workbench body 301. In the use state, the negative pressure interface 303 is connected to the suction port of the vacuum pump through a pipeline. The adsorption hole 302 is a plurality of microporous structures, and the above structure ensures that the items to be disinfected are stably placed on the workbench 300.

[0041] Of course, when the items to be disinfected are made of carbon steel, the workbench 300 can also be a magnetic suction structure, such as a permanent magnetic suction cup structure or an electromagnetic suction cup structure.

[0042] Embodiment 4: In one embodiment, the cooperation device 100 is a robot arm, and the plasma reactor 200 is installed at the movable end of the robot arm. The robot arm is an existing technology and can be purchased on the market.

[0043] Specifically, a clamp structure is installed at the movable end of the robot arm through a flange structure, and the plasma reactor 200 is installed in the clamp structure.

[0044] Embodiment 5: On the basis of Embodiments 3 and 4, in order to perform more comprehensive decontamination on the objects to be decontaminated, the workbench 300 is installed at the movable end of another mechanical arm. In this way, the objects to be decontaminated on the workbench 300 can also swing to adjust the angle, thereby achieving more comprehensive decontamination.

[0045] In one of the solutions, an internal threaded hole flange structure is provided at the bottom of the workbench 300, and the mounting flange at the movable end of the robot arm is connected and fixed to the internal threaded hole flange at the bottom of the workbench 300 by screws.

[0046] Embodiment 6: In one embodiment, see Figure 2 , 3 The collaborative device 100 includes a base 110, an X-axis linear module 120, an X-axis slide 130, a Y-axis linear module 140, a Y-axis slide 150, a Z-axis linear module 160 and a Z-axis slide 170. At least one set of X-axis linear modules 120 is installed on the base 110 along the X-axis direction. The X-axis slide 130 is installed on the slider of the X-axis linear module 120. At least one set of Y-axis linear modules 140 is installed on the X-axis slide 130 along the Y-axis direction. The Y-axis slide 150 is installed on the slider of the Y-axis linear module 140. At least one set of Z-axis linear modules 160 is installed on the Y-axis slide 150 along the Z-axis direction. The Z-axis slide 170 is installed on the slider of the Z-axis linear module 160. The plasma reactor 200 is installed at the lower end of the Z-axis slide 170.

[0047] The X-axis linear module 120 drives the X-axis slide 130 to reciprocate along the X-axis, the Y-axis linear module 140 drives the Y-axis slide 150 to reciprocate along the Y-axis, and the Z-axis linear module 160 drives the Z-axis slide 170 to reciprocate along the Z-axis, thereby moving the plasma reactor 200 in a three-dimensional space.

[0048] Specifically, the X-axis linear module 120 , the Y-axis linear module 140 , and the Z-axis linear module all adopt existing technologies, and each module includes a linear guide rail, a slider, a ball screw, and a servo motor.

[0049] A clamp structure is disposed at the lower end of the Z-axis slide 170 , and the plasma reactor 200 is mounted and fixed on the lower end of the Z-axis slide 170 through the clamp structure.

[0050] Embodiment 7: Based on Example 6, see Figure 2 , 3 The base 110 is a groove-shaped structure with the top and one side away from the Z-axis slide 170 open, and the workbench 300 is installed in the groove-shaped structure. Through the above structure, the height of the workbench 300 is reduced, which is convenient for placing the items to be cleaned.

[0051] Embodiment 8: Based on Example 7, see Figure 2 , 3A swing arm 180 is installed in the groove structure of the base 110, one end or both ends of the swing arm 180 are rotatably connected to the base 110 through bearings, a drive motor 181 is fixedly installed on the outer side of the base 110 through a support 182, and the output shaft of the drive motor 181 is transmission-connected to the swing arm 180; the workbench 300 has an adsorption structure.

[0052] Specifically, the swing arm 180 is provided with an axial hole at one end of the driving motor 181, and the output shaft of the driving motor 181 is connected to the axial hole through a spline pair or a flat key pair structure. When the output shaft of the driving motor 181 rotates, the driving swing arm 180 swings along the Y axis, so that the workbench 300 can swing an angle, thereby achieving more comprehensive decontamination.

[0053] In this embodiment, the driving motor 181 is a servo motor.

[0054] The workbench 300 may adopt the aforementioned negative pressure adsorption or magnetic adsorption structure.

[0055] When the structure of Example 4 is used for disinfection, the path of the robot arm is set, and the robot arm drives the plasma reactor 200 to move, thereby disinfecting the items to be disinfected on the workbench 300.

[0056] When the structure of Example 8 is used for disinfection, the moving path of the plasma reactor 200 at the lower end of the Z-axis slide 170 is planned according to the objects to be disinfected on the workbench 300, and the swing angle of the workbench 300 is planned at the same time, so as to achieve comprehensive disinfection.

[0057] The present invention combines visual guidance to perform adaptive path planning and parameter adjustment on the objects to be disinfected, and can achieve full coverage disinfection of shapes such as complex curved surfaces in surface disinfection. It overcomes the shortcomings of traditional plasma disinfection technology in adapting to complex surfaces, disinfection effects and intelligent control, and has obvious technical advantages and practical application value.

Claims

1. A collaborative dry plasma decontamination method based on visual guidance, characterized in that: The following steps are involved: S1: Fix the object to be disinfected on the workbench (500); S2: Scanning the object to be disinfected by the visual guidance system (300) to obtain a depth image and three-dimensional point cloud data of the object to be disinfected; S3: Processing the 3D point cloud data, including noise reduction, filtering and removal of isolated points; S4: Process the three-dimensional point cloud data to extract the geometric features of the surface of the object to be disinfected; S5: Generate the optimal dynamic path for the fitted surface profile; S6: The collaborative device (100) drives the plasma reactor (200) to move along the path, while the visual guidance system reads the data of the depth camera in real time and transmits the updated surface information to the collaborative device (100) to dynamically adjust the path of the plasma reactor (200).

2. A collaborative dry plasma decontamination method based on vision guidance according to claim 1, characterized in that: For different objects to be disinfected, the plasma reactor (200) adopts corresponding power, moving speed, and distance between the plasma reactor (200) and the objects to be disinfected; When the object to be disinfected is butyl rubber, the power of the plasma reactor (200) is 1100-1300 W, the moving speed is 15-25 mm / s, and the distance between the plasma reactor (200) and the object to be disinfected is 10-20 mm; When the object to be disinfected is ABS plastic, the power of the plasma reactor (200) is 1000-1200 W, the moving speed is 25-35 mm / s, and the distance between the plasma reactor (200) and the object to be disinfected is 10-20 mm; When the object to be disinfected is PC plastic, the power of the plasma reactor (200) is 1000-1200W, the moving speed is 15-25mm / s, and the distance between the plasma reactor (200) and the object to be disinfected is 10-20mm; When the object to be disinfected is aramid fabric, the power of the plasma reactor (200) is 1100-1300 W, the moving speed is 15-25 mm / s, and the distance between the plasma reactor (200) and the object to be disinfected is 10-20 mm.

3. A vision-guided collaborative dry plasma decontamination device, used to implement the vision-guided collaborative dry plasma decontamination method according to claim 1, characterized in that: The collaborative dry plasma decontamination equipment based on visual guidance comprises a collaborative device (100), a control system (190), a plasma reactor (200), a pulse power supply (210), a visual guidance system (300) and a workbench (500); the plasma reactor (200) is installed on the collaborative device (100); the collaborative device (100) carries the plasma reactor (200) to move in a three-dimensional space; the pulse power supply (210) is connected to the plasma reactor (200) via a wire and a pipeline; the visual guidance system (300) is electrically connected to the control system (190); the control system (190) is electrically connected to the collaborative device (100); the workbench (500) is used to place objects to be decontaminated; the visual guidance system (300) comprises a plurality of depth cameras, and the plurality of depth cameras are installed on the collaborative device (100).

4. The visually guided collaborative dry plasma decontamination equipment according to claim 3 is characterized in that: The workbench (500) has an adsorption structure.

5. The visually guided collaborative dry plasma decontamination equipment according to claim 4, characterized in that: The workbench (500) comprises a hollow workbench body (501), the upper side of the workbench body (501) is provided with adsorption holes (502), and the workbench body (501) is also provided with a negative pressure interface (503). When in use, the negative pressure interface (503) is connected to the suction port of a vacuum pump through a pipeline.

6. The visually guided collaborative dry plasma decontamination equipment according to claim 3, characterized in that: The cooperation device (100) is a mechanical arm, the plasma reactor (200) is installed at the movable end of the mechanical arm, and three depth cameras are provided, which are respectively installed and fixed at intervals around the movable end of the mechanical arm.

7. A visually guided collaborative dry plasma decontamination device according to any one of claims 3 to 6, characterized in that: The workbench (500) is installed at the movable end of another mechanical arm.

8. A visually guided collaborative dry plasma decontamination device according to any one of claims 3 to 5, characterized in that: The cooperation device (100) comprises a base (110), an X-axis linear module (120), an X-axis slide (130), a Y-axis linear module (140), a Y-axis slide (150), a Z-axis linear module (160) and a Z-axis slide (170); at least one set of X-axis linear modules (120) is installed on the base (110) along the X-axis direction; the X-axis slide (130) is installed on a slider of the X-axis linear module (120); at least one set of Y-axis linear modules (140) is installed on the X-axis slide (130) along the Y-axis direction; the Y-axis slide (150) is installed on the Y-axis linear module (140) The invention relates to a plasma reactor (200) and a plasma control device (200). The plasma reactor (200) is mounted on a slider of the Y-axis slide (150), at least one set of Z-axis linear modules (160) is mounted on the Y-axis slide (150) along the Z-axis direction, and the Z-axis slide (170) is mounted on the slider of the Z-axis linear module (160); the plasma reactor (200) is mounted on the lower end of the Z-axis slide (170), the workbench (500) is mounted on the base (110), and the workbench (500) is located below the plasma reactor (200); and three depth cameras are provided, two of which are respectively mounted on the base (110) and located on both sides of the workbench (500), and the other is mounted on the Z-axis slide (170).

9. The visually guided collaborative dry plasma decontamination equipment according to claim 8, characterized in that: The base (110) is a groove-shaped structure with an open top and a side away from the Z-axis slide (170), and the workbench (500) is installed in the groove-shaped structure.

10. The vision-guided collaborative dry plasma decontamination equipment according to claim 9, characterized in that: A swing arm (180) is installed in the groove-shaped structure of the base (110); one end or both ends of the swing arm (180) are rotatably connected to the base (110) via bearings; a drive motor (181) is fixedly installed on the outer side of the base (110) via a support (182); and an output shaft of the drive motor (181) is transmission-connected to the swing arm (180); and the workbench (500) has an adsorption structure.

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