Electrostatically driven micro-electro-mechanical device and driving method thereof

Abstract

The invention provides an electrostatic driving micro-electro-mechanical device and a driving method thereof, the device comprises at least one electrostatic driving micro-electro-mechanical device, the device comprises a rotating support and at least one one-dimensional direction driving unit, and the first one-dimensional direction driving unit comprises a first electrode and a second electrode which are arranged in the first direction of the rotating support; the electrostatic drive micro-electromechanical device is further provided with a controller, the controller outputs digital signals to the digital-analog converter, the digital-analog converter outputs analog signals to the first electrode and the second electrode through the multi-way change-over switch, the multi-way change-over switch comprises a first selection switch, the first selection switch is a single-pole double-throw change-over switch, and the second selection switch is a single-pole double-throw change-over switch. A static contact of the first selection switch receives an analog signal output by the digital-to-analog converter, and a movable contact of the first selection switch selectively outputs the analog signal to the first electrode or the second electrode. The invention further provides a driving method of the driving device. The electrostatic driving micro-electro-mechanical device is compact in structure and low in production cost.

Description

Technical Field

[0001] The present invention relates to the technical field of optical communication devices, in particular to an electrostatically driven micro-electromechanical device and a driving method of the device. Background Art

[0002] Electrostatically driven micro-electromechanical systems (MEMS) are widely used in optical devices. MEMS can rotate around its own axis to change the inclination angle of the reflection plane, thereby changing the emission angle of the reflected light beam and realizing functions such as optical path switching.

[0003] See also Figure 1 An existing micro-electromechanical device has a rotating bracket, which includes a rectangular outer bracket 11 and a circular inner bracket 12, and the inner bracket 12 is rotatably supported on the outer bracket 11. A first support rod 21 and a second support rod 22 are arranged on the outer bracket 11, and the first support rod 21 and the second support rod 22 are arranged at both ends of the outer bracket 11 along a first direction. A first electrode 31 is arranged on the first support rod 21, and a second electrode 32 is arranged on the second support rod 22. A third support rod 23 and a fourth support rod 24 are arranged on the inner bracket 12, and the third support rod 23 and the fourth support rod 24 are arranged at both ends of the inner bracket 12 along a second direction, wherein the first direction is perpendicular to the second direction, and a third electrode 33 is arranged on the third support rod 23, and a fourth electrode 34 is arranged on the fourth support rod 24. Common electrodes are flat plate electrodes or comb-tooth electrodes. In addition, a reflector is arranged on the inner bracket 12, and the rotation of the reflector is driven by driving the rotation of the outer bracket 11 or the inner bracket 12. A ground electrode 35 is disposed at the center of the inner bracket 12 .

[0004] See also Figure 2, in one-dimensional direction, it is assumed that there are two mutually parallel first substrates 41 and second substrates 42, wherein the second substrate 42 is a fixed substrate and cannot rotate, and the first substrate 41 is a substrate that can rotate clockwise or counterclockwise around a fulcrum 43. A fifth electrode 51 and a sixth electrode 52 are arranged on the surface of the first substrate 41 facing the second substrate 42, and a seventh electrode 53 and an eighth electrode 54 are arranged on the surface of the second substrate 42 facing the first substrate 41. The fifth electrode 51 and the seventh electrode 53 form a pair of electrodes, and the sixth electrode 52 and the eighth electrode 54 form another pair of electrodes. When the voltage between the electrode pairs changes, the first substrate 41 will rotate around the fulcrum 43. For example, when a pressure difference occurs between the fifth electrode 51 and the seventh electrode 53, under the action of electrostatic force, such as when an electrostatic adsorption effect occurs, the first substrate 41 will rotate in the counterclockwise direction; when a pressure difference occurs between the sixth electrode 52 and the eighth electrode 54, under the action of electrostatic force, the first substrate 41 will rotate in the clockwise direction. Therefore, by applying voltages to different electrodes, the first substrate 41 can be rotated clockwise or counterclockwise along a one-dimensional direction.

[0005] Figure 2 The fifth electrode 51 and the sixth electrode 52 in the Figure 1 The first electrode 31 and the second electrode 32, Figure 2 The seventh electrode 53 and the eighth electrode 54 in the Figure 1 The ground electrode 35, that is, the seventh electrode 53 and the eighth electrode 54 are all ground electrodes. In this way, by applying different voltages to the first electrode 31 and the second electrode 32, the inclination angle of the outer bracket 11 in the first direction can be changed. Since the inner bracket 12 can rotate with the outer bracket 11, the inclination angle of the reflector in the first direction is actually changed. Similarly, by applying different voltages to the third electrode 33 and the fourth electrode 34, the inclination angle of the inner bracket 12 in the second direction can be changed. Therefore, by applying different voltages to the first electrode 31, the second electrode 32, the third electrode 33, and the fourth electrode 34, the reflector can be tilted at any angle in the two-dimensional direction.

[0006] However, existing electrostatically driven micro-electromechanical devices all have corresponding driving circuits for the four electrodes. For example, the invention patent application with publication number CN108710203A discloses an electrostatically driven MEMS device. Since the existing MEMS devices are equipped with more driving circuits, the overall structure of the micro-electromechanical device is complicated, which increases the production cost of the micro-electromechanical device on the one hand, and on the other hand, different driving circuits may not be able to work synchronously. For example, voltage is output to two electrodes in the same dimension at the same time, resulting in the tilt angle of the reflector not meeting the expected requirements, or the time of applying voltage to different electrodes in two dimensions is not synchronized, which also causes the tilt angle of the reflector to not meet the expected requirements. Summary of the invention

[0007] The first object of the present invention is to provide an electrostatically driven micro-electromechanical device with a simple structure and low production cost.

[0008] A second object of the present invention is to provide a driving method for an electrostatically driven micro-electromechanical device with low driving cost.

[0009] To achieve the above-mentioned first purpose, the electrostatically driven micro-electromechanical device provided by the present invention includes at least one electrostatically driven micro-electromechanical device, the electrostatically driven micro-electromechanical device includes a rotating bracket and at least one one-dimensional direction driving unit, wherein the first one-dimensional direction driving unit includes a first electrode and a second electrode arranged in a first direction of the rotating bracket, and the first electrode and the second electrode are used to control the rotating bracket to rotate in opposite directions in the first direction; the electrostatically driven micro-electromechanical device is also provided with a controller, the controller outputs a digital signal to the digital-to-analog converter, and the digital-to-analog converter outputs an analog signal to the first electrode and the second electrode through a multi-way switching switch, wherein the multi-way switching switch includes a first selection switch, the first selection switch is a single-pole double-throw switching switch, the stationary contact of the first selection switch receives the analog signal output by the digital-to-analog converter, and the movable contact of the first selection switch can selectively output the analog signal to the first electrode or the second electrode.

[0010] As can be seen from the above scheme, the electrostatically driven micro-electromechanical device only has one controller, and the controller outputs a signal to at least one selection switch of the multi-way switch. One selection switch can select one of the two electrodes in the same dimensional direction, thereby changing the voltage applied to one of the two electrodes in the same dimensional direction, and avoiding the situation where voltage is applied to two electrodes in the same dimensional direction at the same time by mistake. On the one hand, due to the small number of driving circuits, the production cost of the micro-electromechanical device is reduced, and on the other hand, it can also avoid the problem of inaccurate tilt angle of the rotating bracket caused by incorrect voltage applied to the electrode.

[0011] A preferred solution is that the electrostatically driven micro-electromechanical device includes a second one-dimensional direction driving unit, the second one-dimensional direction driving unit includes a third electrode and a fourth electrode arranged in the second direction of the rotating bracket, the third electrode and the fourth electrode are used to control the rotating bracket to rotate in the opposite direction in the second direction; the multi-way switching switch includes a second selection switch, the second selection switch is a single-pole double-throw switching switch, the stationary contact of the second selection switch receives the analog signal output by the digital-to-analog converter, and the movable contact of the second selection switch can selectively output the analog signal to the third electrode or the fourth electrode.

[0012] It can be seen that the two one-dimensional direction driving units share a signal output by a controller, which makes the structure of the driving circuit simpler and reduces the production cost of the micro-electromechanical device.

[0013] A preferred solution is that an operational amplifier group is provided between the multi-way switch and the first electrode, the second electrode, the third electrode and the fourth electrode, and the analog signal output by the multi-way switch is amplified by the operational amplifier group and then output to the first electrode, the second electrode, the third electrode and the fourth electrode.

[0014] It can be seen that after the signal output by the controller is amplified by the operational amplifier group, the voltage output to each electrode can be increased, so that the voltage received by each electrode is larger and the angle of rotation of the rotating bracket is larger, meeting the needs of more usage scenarios.

[0015] A further solution is that the number of one-dimensional directional drive units provided in an electrostatically driven micro-electromechanical device is more than two, and the number of selection switches provided in the multi-way switch is equal to the number of one-dimensional directional drive units.

[0016] A further solution is that the multi-way switch receives a signal output by the controller to change the connection state of the movable contact of the first selection switch and / or the movable contact of the second selection switch.

[0017] It can be seen that the controller can not only output the electrical signal that needs to be loaded to each electrode to each selection switch, but also output the control signal to each selection switch to change the connection state of each selection switch, so that the micro-electromechanical device needs to have fewer components, thereby reducing the production cost of the micro-electromechanical device.

[0018] A further solution is that the rotating bracket is respectively provided with a first support rod and a second support rod along the first direction, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; the rotating bracket is respectively provided with a third support rod and a fourth support rod along the second direction, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod; the first direction is perpendicular to the second direction.

[0019] It can be seen that multiple support rods are arranged in two mutually perpendicular directions, and corresponding electrodes are arranged on each support rod. By applying voltage to different electrodes, the rotating bracket can be driven to rotate in two dimensions, thereby realizing the requirement of reflecting the incident light signal towards different angles.

[0020] A further solution is that a grounding electrode is provided at the center of the rotating bracket.

[0021] To achieve the above-mentioned second purpose, the driving method of the electrostatically driven micro-electromechanical device provided by the present invention is applied to the above-mentioned electrostatically driven micro-electromechanical device, and the method includes: the controller outputs a control signal to the first selection switch and the second selection switch, so that the movable contact of the first selection switch selects the first electrode or the second electrode; the controller outputs a digital signal to the digital-to-analog converter, the digital-to-analog converter converts the digital signal into an analog signal and outputs it to the first selection switch and the second selection switch, and the first selection switch outputs the analog signal to the first electrode or the second electrode to change the inclination angle of the rotating bracket.

[0022] As can be seen from the above scheme, the present invention only uses one controller to output signals to multiple selection switches, thereby applying voltages to multiple electrodes to change the tilt angle of the rotating bracket. Since the number of controllers used is very small, the drive circuit structure is simple, and the production cost of the micro-electromechanical device can be reduced. In addition, since the two electrodes in the same dimensional direction output signals through the same controller switch, it is possible to avoid the situation where the two electrodes in the same dimensional direction are loaded with signals at the same time.

[0023] A preferred solution is that the controller obtains the target tilt angle that the rotating bracket needs to rotate, calculates the tilt angle of the rotating bracket in the first direction based on the target tilt angle, and calculates the target voltage value applied to the first electrode or the second electrode; the controller outputs the corresponding voltage to the digital-to-analog converter according to the target voltage value that needs to be applied to each electrode.

[0024] It can be seen that when controlling the rotation of the rotating bracket, the respective tilt directions in each dimensional direction are obtained according to the angle at which the reflector needs to be tilted, and then the corresponding voltage applied to each electrode is calculated. The controller loads the corresponding voltage to each electrode, thereby ensuring that the rotating bracket can be accurately rotated to the corresponding position.

[0025] A further solution is that the number of electrostatically driven micro-electromechanical devices is more than two, and each electrostatically driven micro-electromechanical device is provided with multiple electrodes; the number of selection switches provided in the multi-way switching switch is equal to the number of one-dimensional direction driving units, and each selection switch outputs a signal to two electrodes of the same electrostatically driven micro-electromechanical device arranged in the same dimensional direction; the controller outputs a control signal to each selection switch respectively to independently control the tilt angle of each electrostatically driven micro-electromechanical device.

[0026] It can be seen that one controller can output signals to multiple electrodes of multiple electrostatically driven micro-electromechanical devices, thereby realizing the function of one controller controlling the angle adjustment of the reflectors of multiple electrostatically driven micro-electromechanical devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural diagram of an existing electrostatically driven micro-electromechanical device.

[0028] Figure 2 It is a schematic diagram of the working principle of an electrostatically driven micro-electromechanical device in one dimension.

[0029] Figure 3 FIG. 4 is a structural block diagram of a first embodiment of an electrostatically driven micro-electromechanical device according to the present invention.

[0030] Figure 4 It is a structural schematic diagram of a digital-to-analog converter and a multi-way switch of the first embodiment of the electrostatically driven micro-electromechanical device of the present invention.

[0031] Figure 5 It is a structural block diagram of the second embodiment of the electrostatically driven micro-electromechanical device of the present invention.

[0032] Figure 6 It is a structural schematic diagram of a digital-to-analog converter and a multi-way switch of a second embodiment of an electrostatically driven micro-electromechanical device of the present invention.

[0033] Figure 7 It is a structural block diagram of the third embodiment of the electrostatically driven micro-electromechanical device of the present invention.

[0034] Figure 8 FIG. 4 is a structural block diagram of a fourth embodiment of an electrostatically driven micro-electromechanical device according to the present invention.

[0035] Fig. 9 FIG. 4 is a structural block diagram of a fifth embodiment of an electrostatically driven micro-electromechanical device according to the present invention.

[0036] Fig.10 4 is a structural block diagram of a sixth embodiment of an electrostatically driven micro-electromechanical device according to the present invention.

[0037] The present invention is further described below in conjunction with the accompanying drawings and embodiments. DETAILED DESCRIPTION

[0038] The electrostatically driven micro-electromechanical device of the present invention is applied to various optical devices, for example, it can be applied to various optical devices such as optical path selectors or optical circulators. The control method of the electrostatically driven micro-electromechanical device of the present invention applies voltage to two electrodes in the same dimensional direction of an electrostatically driven micro-electromechanical device by time-sharing driving, which reduces the production cost of the micro-electromechanical device on the one hand, and improves the accuracy of controlling the tilt angle of the reflector on the other hand.

[0039] First embodiment: The electrostatically driven micro-electromechanical device of this embodiment is provided with a micro-electromechanical device, which has a rotating bracket. Preferably, the rotating bracket has an inner bracket and an outer bracket, the inner bracket is rotatably supported on the outer bracket, and a reflector is provided on the inner bracket. In addition, two support rods are provided on the outer bracket, namely a first support rod and a second support rod, the first support rod and the second support rod are arranged at both ends of the outer bracket along a first direction, the first support rod is provided with a first electrode, and the second support rod is provided with a second electrode. Two support rods are provided on the inner bracket, namely a third support rod and a fourth support rod, the third support rod and the fourth support rod are arranged at both ends of the inner bracket along a second direction, wherein the first direction is perpendicular to the second direction, and the third support rod is provided with a third electrode, and the fourth support rod is provided with a fourth electrode. Therefore, the first electrode and the second electrode are arranged along the first direction, and the third electrode and the fourth electrode are arranged along the second direction. Since the reflector is provided on the inner bracket, the embodiment can drive the reflector to rotate by driving at least one of the outer bracket and the inner bracket to rotate. In addition, a grounding electrode is formed in the middle of the inner bracket.

[0040] It can be understood that the present embodiment sets two one-dimensional direction driving units, wherein the first one-dimensional direction driving unit includes the above-mentioned first electrode and second electrode, and the second one-dimensional direction driving unit includes the above-mentioned third electrode and fourth electrode, wherein the first electrode and the second electrode are used to control the rotating bracket to rotate in opposite directions in the first direction, for example, the first electrode controls the rotating bracket to rotate clockwise in the X direction, and the first electrode controls the rotating bracket to rotate quasi-clockwise in the X direction. The third electrode and the fourth electrode are used to control the rotating bracket to rotate in opposite directions in the second direction. Since the rotating bracket will not rotate in opposite directions in the same dimensional direction at the same time, that is, it will not need to rotate clockwise and counterclockwise in the X direction at the same time, the present invention uses this principle to apply voltages to the two electrodes in the same dimensional direction in a time-division multiplexing manner, thereby reducing the number of driving circuits.

[0041] In addition, the ground electrode and the electrodes for applying voltage (the first electrode, the second electrode, the third electrode and the fourth electrode) are interchangeable, as long as the settings between the electrodes meet the electrical design principles, such as avoiding short circuits or the voltage difference between the plates being always zero.

[0042] See also Figure 3 The present embodiment further comprises a controller 110, which may be a single chip microcomputer. The controller 110 outputs a digital signal to a digital-to-analog converter 120, and the digital signal is used to represent the voltage value to be loaded on each electrode. The digital-to-analog converter 120 converts the digital signal into an analog signal and outputs the analog signal to a multi-way switch 130. Figure 4The multi-way switch 130 is provided with a plurality of selection switches, for example, including a first selection switch 131 and a second selection switch 132. The first selection switch 131 and the second selection switch 132 are both single-pole double-throw switches, and each selection switch has a stationary contact and a movable contact. The stationary contact of the first selection switch 131 receives the analog signal output by the digital-to-analog converter 120, and the movable contact can be selectively connected to the first electrode or the second electrode. Figure 4 In FIG. 1 , X+ represents the first electrode along the X direction, and X- represents the second electrode along the X direction, so X+ and X- represent the first electrode and the second electrode respectively. Similarly, the stationary contact of the second selection switch 132 receives the analog signal output by the digital-to-analog converter 120, and the movable contact can be selectively connected to the third electrode or the fourth electrode. Figure 4 In FIG. 1 , Y+ represents the first electrode along the Y direction, and Y− represents the second electrode along the Y direction. Therefore, Y+ and Y− represent the third electrode and the fourth electrode, respectively.

[0043] The multi-way switch 130 outputs signals to the four electrodes of the electrostatically driven micro-electromechanical device 150. Since the first selection switch 131 and the second selection switch 132 of the multi-way switch 130 receive analog signals, the signals output by the multi-way switch 130 to the four electrodes of the electrostatically driven micro-electromechanical device 150 are analog signals. The four electrodes being loaded with analog signals are equivalent to being loaded with specific voltages, thereby changing the tilt angle of the inner bracket or the outer bracket, and then driving the reflector to rotate, thereby changing the tilt angle of the reflector.

[0044] In addition, the controller 110 also outputs a control signal to the multi-way switch 130 to change the connection state of the movable contacts of the first selection switch 131 and the second selection switch 132, such as Figure 4 In the state shown, the movable contact of the first selection switch 131 is connected to the first electrode X+. When the first selection switch 131 receives an instruction to switch the connection state, the movable contact can be connected to the second electrode X-. At this time, the analog signal output by the digital-to-analog converter 120 can be loaded onto the second electrode X-, and no voltage will be loaded onto the first electrode X+. Similarly, Figure 4 In the state shown, the movable contact of the second selection switch 132 is connected to the third electrode Y+. When the second selection switch 132 receives an instruction to switch the connection state, the movable contact can be connected to the fourth electrode Y-. At this time, the analog signal output by the digital-to-analog converter 120 can be loaded onto the fourth electrode Y-, and no voltage will be loaded onto the third electrode Y+. Therefore, the first selection switch 131 will only apply a voltage to one of the two electrodes in the same dimensional direction, and will not apply a voltage to both electrodes in the same dimensional direction at the same time.

[0045] In the initial state, the digital-to-analog converter 120 does not apply voltage to each electrode. At this time, the rotating bracket is in the initial state, and the reflector does not tilt. When the reflector needs to tilt, the controller needs to obtain the target tilt angle that the rotating bracket needs to rotate, calculate the tilt angle of the rotating bracket in the first direction and the second direction according to the target tilt angle, and then calculate the target voltage value applied to the first electrode or the second electrode, and also calculate the target voltage value applied to the third electrode or the fourth electrode. On the one hand, it is necessary to determine whether to apply voltage to the first electrode or the second electrode to switch the connection state of the first selection switch, and it is necessary to determine whether to apply voltage to the third electrode or the fourth electrode to switch the connection state of the second selection switch; on the other hand, it is also necessary to determine the target voltage value applied to each electrode, and output the corresponding digital signal according to the target voltage value.

[0046] The controller 110 can output a control signal to the multi-way switch 130 to change the connection state of the first selection switch 131 and the second selection switch 132, and output a digital signal to the digital-to-analog converter 120, so that the digital-to-analog converter 120 outputs a corresponding analog signal to the first selection switch 131 and the second selection switch 132, thereby realizing the function of applying a target voltage value to a specific electrode.

[0047] It can be seen that the signals received by the four electrodes of the electrostatically driven micro-electromechanical device 150 are all derived from the same controller 110. The micro-electromechanical device only needs to set up a controller 110, a digital-to-analog converter 120 and a multi-way cut-off switch 130 to realize the control of the four electrodes. Therefore, the driving circuit structure of the micro-electromechanical device is simple, and the number of devices used is small. On the one hand, it can reduce the volume of the micro-electromechanical device and reduce the production cost of the micro-electromechanical device; on the other hand, by setting the first selection switch 131 and the second selection switch 132, the two electrodes in the same dimensional direction will not receive the voltage signal at the same time, avoiding the problem of inaccurate rotation angle of the rotating bracket. Further, by synchronously applying control signals to the first selection switch 131 and the second selection switch 132 by the controller 110, the first selection switch 131 and the second selection switch 132 can be switched synchronously, avoiding the problem of inaccurate tilt angle of the rotating bracket in the two-dimensional direction due to the asynchronous switching operation of the first selection switch 131 and the second selection switch 132.

[0048] It should be noted that two one-dimensional direction drive units are provided on the micro-electromechanical device of the first embodiment, which respectively drive two electrodes of the X-axis and two electrodes of the Y-axis. In practical application, the micro-electromechanical device may be provided with only one one-dimensional direction drive unit, or more than three one-dimensional direction drive units. In addition, the number of selection switches provided by the multi-way switch is equal to the number of one-dimensional direction drive units of the micro-electromechanical device, and each selection switch is used to selectively connect to two electrodes corresponding to one of the one-dimensional direction drive units.

[0049] Second embodiment: See also Figure 5 The micro-electromechanical device of this embodiment has an electrostatically driven micro-electromechanical device 250, a controller 210, a digital-to-analog converter 220, a multi-way switch 230, and an operational amplifier group 240. The controller 210 can be a single-chip microcomputer, and the controller 210 outputs a digital signal to the digital-to-analog converter 220, and the digital signal is used to represent the voltage value to be loaded on each electrode. The digital-to-analog converter 220 converts the digital signal into an analog signal and outputs it to the multi-way switch 230. Figure 6 The multi-way switch 230 is provided with a plurality of selection switches, for example, a first selection switch 231 and a second selection switch 232, each of which has a stationary contact and a movable contact, wherein the stationary contact of the first selection switch 231 receives the analog signal output by the digital-to-analog converter 220, and the movable contact can be selectively connected to the first electrode or the second electrode. The stationary contact of the second selection switch 232 receives the analog signal output by the digital-to-analog converter 220, and the movable contact can be selectively connected to the third electrode or the fourth electrode.

[0050] The electrostatically driven micro-electromechanical device 250 has a rotating bracket, and the rotating bracket is provided with a first support rod and a second support rod respectively along a first direction, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; the rotating bracket is provided with a third support rod and a fourth support rod respectively along a second direction, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod, and the first direction is perpendicular to the second direction. In addition, a reflector is also provided on the rotating bracket, and a grounding electrode is provided at the center position of the rotating bracket. The specific structure of the electrostatically driven micro-electromechanical device 250 is the same as that of the electrostatically driven micro-electromechanical device of the first embodiment, and will not be repeated.

[0051] Compared with the first embodiment, the present embodiment sets an operational amplifier group 240 at the output end of the multi-way switch 230, and a plurality of operational amplifiers are set in the operational amplifier group 240, each operational amplifier is used to amplify the analog signal output by a selection switch, and output the amplified analog signal to the four electrodes of the electrostatically driven micro-electromechanical device 250. In this way, the voltage value loaded to each electrode will be amplified, so that the tilt angle of the rotating bracket in the first direction or the second direction is larger, meeting the use requirements in different scenarios. Furthermore, the amplification factor of each operational amplifier in the operational amplifier group 240 is adjustable, for example, the controller 210 outputs a control signal to each operational amplifier to change the amplification factor of each operational amplifier, so that the voltage range loaded to each electrode is larger, and the tilt angle of the rotating bracket is larger.

[0052] Third embodiment: See also Figure 7 The micro-electromechanical device of this embodiment has two electrostatically driven micro-electromechanical devices, namely, electrostatically driven micro-electromechanical device 351 and electrostatically driven micro-electromechanical device 352, and both electrostatically driven micro-electromechanical device 351 and electrostatically driven micro-electromechanical device 352 are provided with two one-dimensional direction driving units. In addition, the micro-electromechanical device also has a controller 310, a digital-to-analog converter 320, a multi-way switch 330 and an operational amplifier group 341, 342. Among them, the controller 310 can be a single-chip microcomputer, and the controller 310 outputs a digital signal to the digital-to-analog converter 320, and the digital signal is used to characterize the voltage value that needs to be loaded on each electrode. After the digital-to-analog converter 320 converts the digital signal into an analog signal, it outputs it to the multi-way switch 330. Among them, a plurality of selection switches are arranged in the multi-way switching switch 330, for example, including a first selection switch, a second selection switch, a third selection switch and a fourth selection switch, each selection switch is a single-pole double-throw switching switch, having a stationary contact and a movable contact, the stationary contact of each selection switch receives the analog signal output by the digital-to-analog converter 320, and the movable contact can be selectively connected to one of the two electrodes in the same dimensional direction of an electrostatically driven micro-electromechanical device.

[0053] The electrostatically driven micro-electromechanical device 351 has a rotating bracket, and the rotating bracket is provided with a first support rod and a second support rod respectively along a first direction, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; the rotating bracket is provided with a third support rod and a fourth support rod respectively along a second direction, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod, and the first direction is perpendicular to the second direction. In addition, a reflector is also provided on the rotating bracket, and a grounding electrode is provided at the center position of the rotating bracket. The specific structure of the electrostatically driven micro-electromechanical device 351 is the same as that of the electrostatically driven micro-electromechanical device of the first embodiment, and the structure of the electrostatically driven micro-electromechanical device 352 is the same as that of the electrostatically driven micro-electromechanical device 351, which will not be repeated.

[0054] Compared with the second embodiment, the present embodiment is provided with two electrostatically driven micro-electromechanical devices 351 , 352 and two operational amplifier groups 341 , 342 , and each operational amplifier group outputs an amplified voltage to an electrostatically driven micro-electromechanical device.

[0055] It can be seen that the two electrostatically driven MEMS devices of this embodiment share a set of driving circuits, that is, share a controller 310, a digital-to-analog converter 320 and a multi-way switch 330, making the structure of the MEMS device more compact, simple and low in production cost.

[0056] Fourth embodiment: See also Figure 8 The micro-electromechanical device of this embodiment has two electrostatically driven micro-electromechanical devices, namely, electrostatically driven micro-electromechanical device 451 and electrostatically driven micro-electromechanical device 452, and also has a controller 410, a digital-to-analog converter 420 and a multi-way switch 430. Among them, the controller 410 can be a single-chip microcomputer, and the controller 410 outputs a digital signal to the digital-to-analog converter 420, and the digital signal is used to characterize the voltage value that needs to be loaded on each electrode. The digital-to-analog converter 420 converts the digital signal into an analog signal and outputs it to the multi-way switch 430. Among them, a plurality of selection switches are arranged in the multi-way switch 430, for example, including a first selection switch, a second selection switch, a third selection switch and a fourth selection switch, each of which has a stationary contact and a movable contact, and the stationary contact of each selection switch receives the analog signal output by the digital-to-analog converter 420, and the movable contact can be selectively connected to one of the two electrodes in the same dimensional direction of an electrostatically driven micro-electromechanical device.

[0057] Furthermore, the first selection switch, the second selection switch, the third selection switch and the fourth selection switch are all high-voltage analog switches, which can withstand higher voltages. Thus, higher voltages can be output to each electrode, so that the rotation angle of the rotating bracket is larger.

[0058] The electrostatically driven micro-electromechanical device 451 has a rotating bracket, and the rotating bracket is provided with a first support rod and a second support rod respectively along a first direction, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; the rotating bracket is provided with a third support rod and a fourth support rod respectively along a second direction, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod, and the first direction is perpendicular to the second direction. In addition, a reflector is also provided on the rotating bracket, and a grounding electrode is provided at the center position of the rotating bracket. The specific structure of the electrostatically driven micro-electromechanical device 451 is the same as that of the electrostatically driven micro-electromechanical device of the first embodiment, and the structure of the electrostatically driven micro-electromechanical device 452 is the same as that of the electrostatically driven micro-electromechanical device 451, which will not be repeated.

[0059] Compared with the first embodiment, the present embodiment provides two electrostatically driven micro-electromechanical devices 451, 452, and the two electrostatically driven micro-electromechanical devices 451, 452 share a set of driving circuits, that is, they share a controller 410, a digital-to-analog converter 420 and a multi-way switching switch 430, so that the structure of the micro-electromechanical device is more compact, simple in structure, and has a lower production cost.

[0060] Fifth embodiment: See also Fig. 9 The micro-electromechanical device of this embodiment has more than three electrostatically driven micro-electromechanical devices, which are electrostatically driven micro-electromechanical devices 551, 552...553, and also has a controller 510, a digital-to-analog converter 520, a multi-way switch 530, and is also provided with a plurality of operational amplifier groups 541, 542...543. Among them, the controller 510 can be a single-chip microcomputer, and the controller 510 outputs a digital signal to the digital-to-analog converter 520, and the digital signal is used to characterize the voltage value that needs to be loaded on each electrode. The digital-to-analog converter 520 converts the digital signal into an analog signal and outputs it to the multi-way switch 530. A plurality of selection switches are provided in the multi-way switch 530, each of which has a stationary contact and a movable contact. The stationary contact of each selection switch receives the analog signal output by the digital-to-analog converter 520, and the movable contact can be selectively connected to one of the two electrodes in the same dimensional direction of an electrostatically driven micro-electromechanical device.

[0061] The electrostatically driven micro-electromechanical device 551 has a rotating bracket, and the rotating bracket is provided with a first support rod and a second support rod respectively along a first direction, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; the rotating bracket is provided with a third support rod and a fourth support rod respectively along a second direction, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod, and the first direction is perpendicular to the second direction. In addition, a reflector is also provided on the rotating bracket, and a grounding electrode is provided at the center position of the rotating bracket. The specific structure of the electrostatically driven micro-electromechanical device 551 is the same as that of the electrostatically driven micro-electromechanical device of the first embodiment, and the structures of other electrostatically driven micro-electromechanical devices are the same as that of the electrostatically driven micro-electromechanical device 551, and will not be repeated.

[0062] Compared with the second embodiment, the present embodiment is provided with a plurality of electrostatically driven micro-electromechanical devices and a plurality of operational amplifier groups, and the electrostatically driven micro-electromechanical devices and the operational amplifier groups are provided one by one, and each operational amplifier group outputs an amplified voltage to an electrostatically driven micro-electromechanical device. In addition, the plurality of electrostatically driven micro-electromechanical devices of the present embodiment share a set of driving circuits, that is, share a controller 510, a digital-to-analog converter 520 and a multi-way switch 530, so that the structure of the micro-electromechanical device is more compact, simple in structure and low in production cost.

[0063] Sixth embodiment: See also Fig.10 The micro-electromechanical device of this embodiment has a plurality of electrostatically driven micro-electromechanical devices, namely, electrostatically driven micro-electromechanical devices 651, 652 ... 653, and also has a controller 610, a digital-to-analog converter 620, and a multi-way switch 630. Among them, the controller 610 can be a single-chip microcomputer, and the controller 410 outputs a digital signal to the digital-to-analog converter 420, and the digital signal is used to characterize the voltage value that needs to be loaded on each electrode. The digital-to-analog converter 620 converts the digital signal into an analog signal and outputs it to the multi-way switch 630. A plurality of selection switches are arranged in the multi-way switch 630, each of which has a stationary contact and a movable contact. The stationary contact of each selection switch receives the analog signal output by the digital-to-analog converter 620, and the movable contact can be selectively connected to one of the two electrodes in the same dimensional direction of an electrostatically driven micro-electromechanical device.

[0064] The electrostatically driven micro-electromechanical device 651 has a rotating bracket, and the rotating bracket is provided with a first support rod and a second support rod respectively along a first direction, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; the rotating bracket is provided with a third support rod and a fourth support rod respectively along a second direction, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod, and the first direction is perpendicular to the second direction. In addition, a reflector is also provided on the rotating bracket, and a grounding electrode is provided at the center position of the rotating bracket. The specific structure of the electrostatically driven micro-electromechanical device 651 is the same as that of the electrostatically driven micro-electromechanical device of the first embodiment, and the structures of other electrostatically driven micro-electromechanical devices are the same as that of the electrostatically driven micro-electromechanical device 651, which will not be repeated.

[0065] Compared with the first embodiment, the present embodiment provides a plurality of electrostatically driven micro-electromechanical devices 651, 652...653, and the plurality of electrostatically driven micro-electromechanical devices 651, 652...653 share a set of driving circuits, that is, they share a controller 610, a digital-to-analog converter 620 and a multi-way switching switch 630, so that the structure of the micro-electromechanical device is more compact, simple in structure and has a lower production cost.

[0066] Finally, it should be emphasized that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An electrostatically driven micro-electromechanical device, comprising at least one electrostatically driven micro-electromechanical device, wherein the electrostatically driven micro-electromechanical device comprises a rotating bracket and at least one one-dimensional direction driving unit, wherein the first one-dimensional direction driving unit comprises a first electrode and a second electrode arranged in a first direction of the rotating bracket, and the first electrode and the second electrode are used to control the rotating bracket to rotate in opposite directions in the first direction; Features ； The electrostatically driven micro-electromechanical device is also provided with a controller, which outputs a digital signal to a digital-to-analog converter, and the digital-to-analog converter outputs an analog signal to the first electrode and the second electrode through a multi-way switch, wherein the multi-way switch includes a first selection switch, and the first selection switch is a single-pole double-throw switch, and the stationary contact of the first selection switch receives the analog signal output by the digital-to-analog converter, and the movable contact of the first selection switch can selectively output the analog signal to the first electrode or the second electrode.

2. The electrostatically driven micro-electromechanical device according to claim 1, characterized in that: The electrostatically driven micro-electromechanical device comprises a second one-dimensional direction driving unit, the second one-dimensional direction driving unit comprises a third electrode and a fourth electrode arranged in the second direction of the rotating bracket, the third electrode and the fourth electrode are used to control the rotating bracket to rotate in the opposite direction in the second direction; The multi-way switching switch includes a second selection switch, which is a single-pole double-throw switching switch. The stationary contact of the second selection switch receives the analog signal output by the digital-to-analog converter, and the movable contact of the second selection switch can selectively output the analog signal to the third electrode or the fourth electrode.

3. The electrostatically driven micro-electromechanical device according to claim 2, characterized in that: An operational amplifier group is arranged between the multi-way switch and the first electrode, the second electrode, the third electrode and the fourth electrode. The analog signal output by the multi-way switch is amplified by the operational amplifier group and then output to the first electrode, the second electrode, the third electrode and the fourth electrode.

4. The electrostatically driven micro-electromechanical device according to claim 1, characterized in that: The number of the one-dimensional direction driving units provided in one electrostatically driven micro-electromechanical device is more than two, and the number of the selection switches provided in the multi-way switch is equal to the number of the one-dimensional direction driving units.

5. The electrostatically driven micro-electromechanical device according to claim 2 or 3, characterized in that: The multi-way switch receives the signal output by the controller to change the connection state of the movable contact of the first selection switch and / or the movable contact of the second selection switch.

6. The electrostatically driven micro-electromechanical device according to claim 2 or 3, characterized in that: The rotating bracket is provided with a first support rod and a second support rod on both sides along the first direction, respectively, and the first electrode and the second electrode are respectively located on the first support rod and the second support rod; The rotating bracket is provided with a third support rod and a fourth support rod on both sides along the second direction, respectively, and the third electrode and the fourth electrode are respectively located on the third support rod and the fourth support rod; The first direction is perpendicular to the second direction.

7. The electrostatically driven micro-electromechanical device according to any one of claims 1 to 4, characterized in that: A grounding electrode is arranged at the center of the rotating bracket.

8. A driving method for an electrostatically driven micro-electromechanical device, applied to the electrostatically driven micro-electromechanical device according to any one of claims 1 to 3, characterized in that: include: The controller outputs a control signal to the first selection switch so that the movable contact of the first selection switch switches on the first electrode or the second electrode; The controller outputs a digital signal to a digital-to-analog converter, which converts the digital signal into an analog signal and outputs the analog signal to the first selection switch, which outputs the analog signal to the first electrode or the second electrode to change the tilt angle of the rotating bracket.

9. The driving method of the electrostatically driven micro-electromechanical device according to claim 8, characterized in that: The controller acquires a target tilt angle that the rotating bracket needs to rotate, calculates a tilt angle of the rotating bracket in the first direction according to the target tilt angle, and calculates a target voltage value to be applied to the first electrode or the second electrode; The controller outputs a corresponding voltage to the digital-to-analog converter according to a target voltage value to be applied to each electrode.

10. The driving method of the electrostatically driven micro-electromechanical device according to claim 8 or 9, characterized in that: The number of the electrostatically driven micro-electromechanical devices is more than two, and each of the electrostatically driven micro-electromechanical devices is provided with a plurality of electrodes; The number of selection switches provided in the multi-way switch is equal to the number of the one-dimensional direction driving units, and each of the selection switches outputs a signal to two electrodes of the same electrostatically driven micro-electromechanical device arranged in the same one-dimensional direction; The controller outputs control signals to the selection switches respectively to independently control the tilt angle of each electrostatically driven micro-electromechanical device.

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