Large-area downward evaporation line source
By designing a downward evaporation line source including crucible body, silo, nozzle and heating components, the problems of traditional line source installation and material removal and the only way to evaporate upward are solved, and the coating method of large-area downward evaporation is realized, simplifying the operation process.
Patent Information
- Application Number
- CN202411926883.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-03-28
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
Due to structural limitations of the wire source of traditional evaporation equipment, it is difficult to load and remove materials and can only achieve upward evaporation, which is cumbersome and difficult.
A large-area downward evaporation line source is designed, including a crucible body, a crucible cover with a cover, an internal silo, a nozzle at the bottom and a conveying channel, as well as heating components and closure components, to realize a downward evaporation coating method.
It solves the difficult problem of filling materials, and realizes the coating method of downward evaporation, simplifies the operation process and reduces the operation difficulty.
Smart Images
Figure CN119710563A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of vapor deposition processing, specifically to a large-area downward vapor deposition line source. Background Technology
[0002] With the advent of global carbon neutrality and the energy revolution, photovoltaic (PV) power generation has been recognized as the only clean energy technology suitable for widespread adoption in the 21st century, and has once again been thrust into the spotlight. In the PV field, the development of perovskite technology is accelerating. Due to its high conversion efficiency, low cost, and ease of fabrication, perovskite is considered one of the most commercially promising next-generation PV technologies. Perovskite solar cells, as a type of solar cell utilizing perovskite-type organometal halide semiconductors as light-absorbing materials, belong to the third generation of solar cells and possess advantages such as high light absorption capacity, low cost and ease of fabrication, good performance in low-light conditions, strong light transmittance, and flexibility. Perovskite technology routes mainly include crystalline silicon / perovskite tandem cells, all-perovskite tandem cells, and thin-film cells (such as copper indium gallium selenide) / perovskite tandem cells. The perovskite solar cell technology routes are diverse, each with its unique advantages and challenges. Evaporation is a core process in the fabrication of perovskite solar cells across various routes, and the evaporation source is the most crucial element of the evaporation equipment. Mass-produced vapor deposition equipment generally uses linear vapor deposition sources (hereinafter referred to as "line sources").
[0003] The existing mass production vapor deposition equipment has its line source installed at the bottom of the equipment. Organic materials are added inside the crucible, and there is a row of horizontally spaced nozzles at the top. When the side wall of the crucible is heated, the organic materials inside are vaporized and sprayed out from the top nozzles to vaporize upwards and eventually deposit as a film on the substrate.
[0004] Although traditional wire sources are widely used, they have some drawbacks due to their structural limitations. These include difficulties in loading and unloading materials, and the limitation to upward evaporation. The former, because it can only be installed at the bottom of a vacuum chamber, requires separating the source from the chamber and moving the source to the side of the chamber before opening the cover to add material each time. After adding material, end-face sealing is required to enclose the inner crucible within the wire source; this process is very cumbersome and difficult to operate. Summary of the Invention
[0005] The purpose of this invention is to provide a large-area downward vapor deposition line source to solve the problems mentioned in the background art.
[0006] To achieve the above objectives, the present invention provides the following technical solution: a large-area downward vapor deposition line source, comprising: a crucible body and a crucible cover covering the top of the crucible body, wherein a material hopper is provided inside the crucible body for holding vapor deposition material, and a plurality of nozzles are provided at the bottom port of the crucible body, and a conveying channel is provided between the nozzles and the crucible body, wherein the conveying channel is used to discharge the vapor deposition material vaporized in the crucible body downward through the nozzles;
[0007] It also includes: a sealing component for providing a secondary sealing function for the crucible body, the sealing component being located at the top of the crucible body;
[0008] A heating element is used to heat the vapor-deposited material inside the crucible.
[0009] Preferably, there are two silos, which are symmetrically distributed.
[0010] Preferably, the conveying channel includes a cavity formed inside the crucible body, and the cavity is located below the two material bins. The input ends of several nozzles are connected to the bottom of the cavity. The interior of the crucible body also has several through holes that are equidistantly distributed in a straight line, and the through holes are distributed on the symmetrical line of the two material bins. Each through hole is connected to the cavity, and the top of the through hole penetrates the crucible body. The material bins are used to hold vapor deposition materials. Before performing vapor deposition, the vapor deposition materials are added to the interior of the material bins.
[0011] Preferably, the crucible lid has a triangular cross-section. When the crucible lid and the crucible body are closed, a through space is formed between the crucible body and the crucible lid. That is, after the crucible lid and the crucible body are closed, the upper end of the hopper and the through hole are connected through the through space.
[0012] Preferably, the sealing component includes an upper cover plate located on top of the crucible body, and the upper cover plate is hinged to the crucible body. The upper cover plate and the crucible body have two states: locked and open. When the upper cover plate and the crucible body are in the open state, it is convenient for the operator to add vapor deposition material into the hopper. When the upper cover plate and the crucible body are in the locked state, the upper cover plate seals the crucible body.
[0013] Preferably, a sealing ring is embedded on the upper end face of the crucible body, and the sealing ring plays a sealing role in locking the upper cover plate and the crucible body.
[0014] Preferably, the heating component includes a top heating wire fixedly embedded in the bottom of the upper cover plate, a bottom heating wire fixedly embedded in the inside of the crucible body, a first heating wire, and a second heating wire. The bottom heating wire is distributed around the cavity, and the first heating wire and the second heating wire are respectively distributed around the two hoppers. The top heating wire can heat the crucible cover, the bottom heating wire can heat the bottom of the crucible body, and the first heating wire and the second heating wire can heat the outside of the crucible body.
[0015] Preferably, a mounting flange is also fixedly provided on the periphery of the crucible body. The mounting flange is used to place the crucible body inside the vapor deposition equipment, and the mounting flange mainly serves the purpose of installation.
[0016] Preferably, a pressure valve is also provided at the connection between the nozzle and the cavity. When the air pressure inside the cavity reaches the threshold of the pressure valve, the material inside the cavity can be ejected through the nozzle.
[0017] Preferably, the pressure relief value of the pressure valve is P0, and the pressure at which the evaporation material is vaporized in the sealed heating state of the crucible body is P1, where P1≥P0.
[0018] Compared with the prior art, the beneficial effects of the present invention are:
[0019] The main feature of this invention is the adoption of a new downward evaporation line source structure, which not only solves the problem of difficult material loading, but also realizes a downward evaporation coating method. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention;
[0021] Figure 2 This is a schematic diagram of the bottom heating wire, the first heating wire, and the second heating wire of the present invention;
[0022] Figure 3 This is a schematic diagram of the crucible lid structure of the present invention;
[0023] Figure 4 This is a schematic diagram of the hopper and through-hole structure of the present invention;
[0024] Figure 5 This is a side sectional view of the present invention.
[0025] In the diagram: 1. Top cover plate; 2. Mounting flange; 3. Top heating wire; 4. Bottom heating wire; 5. First heating wire; 6. Second heating wire; 7. Crucible lid; 8. Crucible body; 9. Nozzle; 10. Hopper; 11. Cavity; 12. Through hole. Detailed Implementation
[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0027] Example: Please refer to Figures 1-5 The large-area downward vapor deposition line source shown in the figure includes: a crucible body 8 and a crucible cover 7 covering the top of the crucible body 8. The crucible body 8 is provided with a material hopper 10, which is used to hold vapor deposition material. The bottom port of the crucible body 8 is provided with a number of nozzles 9, and a conveying channel is provided between the nozzles 9 and the crucible body 8. The conveying channel is used to discharge the vaporized vapor deposition material in the crucible body 8 downward through the nozzles 9.
[0028] It also includes: a sealing component, which provides a secondary sealing function for the crucible body 8, and the sealing component is located at the top of the crucible body 8;
[0029] Heating components are used to heat the vapor-deposited material inside the crucible body 8.
[0030] There are two silos 10, which are symmetrically distributed.
[0031] The conveying channel includes a cavity 11 inside the crucible body 8, and the cavity 11 is located below the two material bins 10. The input ends of several nozzles 9 are connected to the bottom of the cavity 11. The interior of the crucible body 8 is also provided with several through holes 12 that are distributed in a straight line at equal intervals. The through holes 12 are distributed on the symmetrical line of the two material bins 10. Each through hole 12 is connected to the cavity 11, and the top of the through hole 12 penetrates the crucible body 8. The material bins 10 are used to hold the vapor deposition material. Before the vapor deposition operation, the vapor deposition material is added to the interior of the material bins 10.
[0032] The crucible lid 7 has a triangular cross-section. When the crucible lid 7 and the crucible body 8 are closed, a through space is formed between the crucible body 8 and the crucible lid 7. That is, after the crucible lid 7 and the crucible body 8 are closed, the upper ends of the hopper 10 and the through hole 12 are connected through the through space.
[0033] The sealing component includes an upper cover plate 1 located on top of the crucible body 8, and the upper cover plate 1 and the crucible body 8 are hinged together. The upper cover plate 1 and the crucible body 8 have two states: locked and open. When the upper cover plate 1 and the crucible body 8 are in the open state, it is convenient for the staff to add vapor deposition material into the hopper 10. When the upper cover plate 1 and the crucible body 8 are in the locked state, the upper cover plate 1 seals the crucible body 8.
[0034] A sealing ring is installed on the upper end face of the crucible body 8, which plays a sealing role in locking the upper cover plate 1 and the crucible body 8.
[0035] The heating components include a top heating wire 3 fixedly embedded in the bottom of the upper cover plate 1, a bottom heating wire 4 fixedly embedded inside the crucible body 8, a first heating wire 5, and a second heating wire 6. The bottom heating wire 4 is distributed around the cavity 11, and the first heating wire 5 and the second heating wire 6 are respectively distributed around the two hoppers 10. The top heating wire 3 can heat the crucible cover 7, the bottom heating wire 4 heats the bottom of the crucible body 8, and the first heating wire 5 and the second heating wire 6 heat the outside of the crucible body 8.
[0036] A mounting flange 2 is also fixedly installed on the periphery of the crucible body 8. The mounting flange 2 is used to place the crucible body 8 inside the vapor deposition equipment. The mounting flange 2 mainly serves the installation function.
[0037] A pressure valve is also provided at the connection between the nozzle 9 and the cavity 11. When the air pressure inside the cavity 11 reaches the threshold of the pressure valve, the material inside the cavity 11 can be ejected through the nozzle 9.
[0038] The pressure relief value of the pressure valve is P0, and the pressure at which the vaporized material is vaporized in the sealed heating state of the crucible body 8 is P1, where P1≥P0.
[0039] Working principle: After adding the vapor deposition material into the two hoppers 10, the crucible lid 7 is placed on top of the crucible body 8, and then the upper cover plate 1 is placed on top of the crucible body 8 to seal the internal space of the crucible body 8. The top heating wire 3, bottom heating wire 4, first heating wire 5, and second heating wire 6 fully heat the top, bottom, and outer side of the crucible body 8, causing the vapor deposition material placed inside the two hoppers 10 to vaporize under high temperature. The vaporized vapor deposition material will first diffuse towards the top of the crucible lid 7. Since the crucible lid 7 is sealed with the crucible body 8, the vaporized vapor deposition material will then enter the interior of the cavity 11 through several through holes 12. The airflow direction is shown in the attached figure. Figure 5 As shown, when the gas pressure P1 inside the crucible body 8 reaches or exceeds P0, the material inside the crucible body 8 can be sprayed downward through several nozzles 9, which can spray the gaseous vapor deposition material downward and diffuse it, allowing the gas molecules of the vapor deposition material to be deposited on the substrate located below the crucible body 8, thereby achieving downward vapor deposition.
[0040] In this design, the top heating wire 3, the bottom heating wire 4, the first heating wire 5, and the second heating wire 6 are all resistance heating wires, which can generate heat by connecting the power supply, thereby heating the crucible body 8.
[0041] In this scheme, the vaporized material is heated and vaporized, overflowing from the crucible body 8 in the form of steam. It changes direction by impacting the crucible cover 7 and enters the cavity 11 through the through hole 12. Moreover, the heating effect of the top heating wire 3 can compensate for the energy lost by the vaporized material due to the impact.
[0042] In this solution, the filling method for vapor deposition materials is more convenient and simpler compared to existing technologies.
[0043] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0044] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A large-area downward evaporation line source, characterized in that: include: A crucible body (8) and a crucible cover (7) covering the top of the crucible body (8); a material bin (10) is arranged inside the crucible body (8), and the material bin (10) is used to contain evaporation materials; a bottom port of the crucible body (8) is provided with a plurality of nozzles (9), and a conveying channel is provided between the nozzles (9) and the crucible body (8), and the conveying channel is used to discharge the vaporized evaporation materials in the crucible body (8) downward through the nozzles (9); Also includes: A sealing component, used for performing a secondary sealing function on the crucible body (8), the sealing component being located on the top of the crucible body (8); A heating component is used to heat the evaporation material inside the crucible body (8).
2. A large-area downward evaporation line source according to claim 1, characterized in that: The number of the silos (10) is two and they are symmetrically distributed.
3. A large-area downward evaporation line source according to claim 2, characterized in that: The conveying channel comprises a cavity (11) opened inside the crucible body (8), and the cavity (11) is located below the two material bins (10), the input ends of a plurality of the nozzles (9) are connected to the bottom of the cavity (11), and the crucible body (8) is also provided with a plurality of through holes (12) distributed in a straight line and at equal intervals, and the through holes (12) are distributed on the symmetry line of the two material bins (10), each of the through holes (12) is connected to the cavity (11), and the top of the through hole (12) passes through the crucible body (8).
4. A large-area downward evaporation line source according to claim 3, characterized in that: The cross section of the crucible cover (7) is triangular, and when the crucible cover (7) and the crucible body (8) are in a closed state, a through space is formed between the crucible body (8) and the crucible cover (7).
5. A large-area downward evaporation line source according to claim 3, characterized in that: The sealing component comprises an upper cover plate (1) located on the top of the crucible body (8), and the upper cover plate (1) and the crucible body (8) are hingedly assembled, and there are two states between the upper cover plate (1) and the crucible body (8): a locked state and an open state.
6. A large-area downward evaporation line source according to claim 5, characterized in that: A sealing ring is embedded on the upper end surface of the crucible body (8), and the sealing ring plays a sealing role in locking the upper cover plate (1) and the crucible body (8).
7. A large-area downward evaporation line source according to claim 5, characterized in that: The heating component comprises a top heating wire (3) fixedly mounted on the bottom of the upper cover plate (1), a bottom heating wire (4) fixedly mounted inside the crucible body (8), a first heating wire (5), and a second heating wire (6); the bottom heating wire (4) is distributed around the periphery of the cavity (11), and the first heating wire (5) and the second heating wire (6) are respectively distributed around the peripheries of the two silos (10).
8. The large-area downward evaporation line source according to claim 1, characterized in that: A mounting flange (2) is also fixedly arranged on the periphery of the crucible body (8), and the mounting flange (2) is used to arrange the crucible body (8) inside the evaporation equipment.
9. A large-area downward evaporation line source according to claim 3, characterized in that: A pressure valve is also provided at the connection between the nozzle (9) and the cavity (11).
10. A large-area downward evaporation line source according to claim 9, characterized in that: The pressure relief value of the pressure valve is P0, and the pressure at which the crucible body (8) vaporizes the evaporation material in a sealed and heated state is P1, where P1≥P0.