Continuous vacuum coating equipment

Abstract

The invention belongs to the technical field of vacuum coating, and discloses continuous vacuum coating equipment. The equipment comprises a sheet feeding chamber, a sheet discharging chamber, a carrying chamber and a film forming chamber. A first carrying mechanism is arranged in the sheet feeding chamber, the first carrying mechanism is used for placing an uncoated substrate, and the first carrying mechanism can drive the uncoated substrate to ascend and descend; a second carrying mechanism is arranged in the sheet discharging chamber, is used for placing a coated substrate, and can drive the coated substrate to lift; a carrying assembly is arranged in the carrying chamber, the carrying assembly can carry an uncoated substrate from the first carrying mechanism to a mounting position of the umbrella stand or carry a coated substrate on the mounting position from the umbrella stand to the second carrying mechanism, and the carrying chamber is arranged above the sheet inlet chamber and the sheet outlet chamber; an umbrella stand and a coating source are arranged in the film forming chamber, and the umbrella stand is used for bearing a substrate and can rotate. According to the invention, continuous coating production can be realized without destroying a vacuum environment, and the efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating, and in particular to continuous vacuum coating equipment. Background Art

[0002] Vacuum coating is a technology that uses physical or chemical methods under vacuum conditions to deposit a thin film on the surface of an object. Vacuum coating can give the surface of an object unique properties. For example, vacuum coating can greatly improve the optical, electrical and mechanical properties of the material, thereby significantly improving product quality and obtaining significant economic benefits.

[0003] In order to improve the coating efficiency, continuous vacuum coating is generally required.

[0004] However, existing continuous vacuum coating equipment often finds it difficult to switch the coating substrates on the coating umbrella rack in the film forming chamber under vacuum conditions, which results in low coating efficiency, reduces the continuity of coating production, and is not conducive to improving coating quality. Summary of the invention

[0005] The purpose of the present invention is to provide a continuous vacuum coating device, which can continuously switch between upper and lower sheets without destroying the vacuum environment, thereby improving the coating production efficiency.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] Continuous vacuum coating equipment, including:

[0008] A film feeding chamber, wherein a first loading mechanism is provided in the film feeding chamber, an uncoated substrate is placed on the first loading mechanism, and the first loading mechanism can drive the uncoated substrate to rise and fall;

[0009] A film discharge chamber, wherein a second loading mechanism is provided in the film discharge chamber, a coated substrate is placed on the second loading mechanism, and the second loading mechanism can drive the coated substrate to rise and fall;

[0010] A conveying chamber, wherein a conveying assembly and an umbrella frame are provided in the conveying chamber, the umbrella frame can rotate, and the conveying assembly can convey the uncoated substrate from the first loading mechanism to the installation position of the umbrella frame or convey the coated substrate on the installation position from the umbrella frame to the second loading mechanism;

[0011] The film forming chamber is arranged below the conveying chamber. The film forming chamber is provided with a first baffle mechanism, a second baffle mechanism, an electron gun emitter and a crucible table for holding coating materials. The first baffle mechanism and the second baffle mechanism can both rotate and switch working states. The first baffle mechanism is used to prevent the electron beam excited by the electron gun emitter from adhering to the crucible table, and the second baffle mechanism is used to prevent the coating material from evaporating onto the substrate of the umbrella frame.

[0012] As an optional solution for continuous vacuum coating equipment, the first loading mechanism includes multiple first carriers, on which uncoated substrates are arranged, and the first carriers are stacked at an angle, and the inclination angle of the first carriers relative to the horizontal plane is the same as the inclination angle of the umbrella stand.

[0013] As an optional solution for the continuous vacuum coating equipment, the first driving mechanism is drivingly connected to the first loading mechanism, and the first driving mechanism can drive the first loading mechanism to rise and fall in a vertical direction.

[0014] As an optional solution for continuous vacuum coating equipment, the second loading mechanism includes multiple second carriers, on which uncoated substrates are provided, and the second carriers are stacked at an angle, and the inclination angle of the second carriers relative to the horizontal plane is the same as the inclination angle of the umbrella stand.

[0015] As an optional solution for the continuous vacuum coating equipment, the second driving mechanism is drivingly connected to the second loading mechanism, and the second driving mechanism can drive the second loading mechanism to rise and fall in the vertical direction.

[0016] As an optional solution for continuous vacuum coating equipment, the conveying assembly includes a third driving mechanism and a fourth driving mechanism connected to the robot arm, the third driving mechanism drives the robot arm to rotate, and the fourth driving mechanism can drive the robot arm to move in a vertical direction.

[0017] As an optional solution for continuous vacuum coating equipment, the umbrella stand includes a fifth driving mechanism, a sixth driving mechanism and an umbrella stand body, the umbrella stand body is used to place the substrate, the fifth driving mechanism can drive the umbrella stand body to rotate, and the sixth driving mechanism can drive the umbrella stand body to move in a vertical direction.

[0018] As an optional solution of the continuous vacuum coating equipment, a seventh driving mechanism is connected to the crucible table, and the seventh driving mechanism can drive the crucible table to rotate.

[0019] As an optional solution for the continuous vacuum coating equipment, the eighth driving mechanism is drivingly connected to the first baffle mechanism, and the eighth driving mechanism can drive the first baffle mechanism to move in the vertical direction.

[0020] As an optional solution for the continuous vacuum coating equipment, the ninth driving mechanism is drivingly connected to the first baffle mechanism, and the ninth driving mechanism can drive the first baffle mechanism to rotate and is selectively covered on the crucible table.

[0021] As an optional solution for continuous vacuum coating equipment, the tenth driving mechanism is drivingly connected to the second baffle mechanism, and the tenth driving mechanism can drive the second baffle mechanism to rotate and selectively cover the coating material.

[0022] Beneficial effects:

[0023] In the present invention, a substrate is placed on the umbrella frame, and the uniformity of the substrate coating can be improved through the rotation of the umbrella frame. When a substrate on the umbrella frame is coated, the conveying assembly of the conveying chamber removes the coated substrate from the installation position of the umbrella frame, the film discharge chamber and the conveying chamber are connected, and the conveying chamber and the film forming chamber are directly connected or selectively connected, and a high vacuum state is maintained. The second loading mechanism moves upward from the film discharge chamber, and the conveying assembly places the coated substrate on the second loading mechanism, and the second loading mechanism retreats to the film discharge chamber. At this time, the conveying assembly returns to its position, and the first loading mechanism in the film input chamber rises with the uncoated substrate close to the conveying chamber, and the conveying assembly transports the uncoated substrate from the first loading mechanism to the installation position of the umbrella frame, thereby completing the automatic picking and delivering process of the substrate; the device can realize rapid switching between coated substrates and uncoated substrates, and at the same time, during the switching process, the cavity will not be broken, thereby ensuring the continuity of substrate coating production and improving coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of a film input chamber and a film output chamber provided in an embodiment of the present invention;

[0025] Figure 2 It is a schematic diagram of the structure of a transfer chamber and a film forming chamber provided in an embodiment of the present invention.

[0026] In the figure:

[0027] 1. film feeding chamber; 11. first loading mechanism; 111. first loading platform; 12. first driving mechanism;

[0028] 2. film discharge chamber; 21. second loading mechanism; 211. second loading platform; 22. second driving mechanism;

[0029] 3. Transport chamber; 31. Transport assembly; 311. Robotic arm; 312. Third drive mechanism; 313. Fourth drive mechanism; 32. Umbrella frame; 321. Fifth drive mechanism; 322. Sixth drive mechanism; 323. Umbrella frame body;

[0030] 4. Film forming chamber; 41. First baffle mechanism; 42. Second baffle mechanism; 43. Electron gun emitter; 44. Crucible table; 45. Seventh driving mechanism; 46. Eighth driving mechanism; 47. Ninth driving mechanism; 48. Tenth driving mechanism. DETAILED DESCRIPTION

[0031] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0032] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0034] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0035] Please see attached Figure 1 -Attached Figure 2The present embodiment relates to a continuous vacuum coating device (hereinafter referred to as “device”), which includes a film input chamber 1, a film output chamber 2, a conveying chamber 3 and a film forming chamber 4. A first loading mechanism 11 is provided in the film input chamber 1, on which an uncoated substrate is placed, and the first loading mechanism 11 can drive the uncoated substrate to rise and fall; a second loading mechanism 21 is provided in the film output chamber 2, on which a coated substrate is placed, and the second loading mechanism 21 can drive the coated substrate to rise and fall; a conveying assembly 31 and an umbrella frame 32 are provided in the conveying chamber 3, and the umbrella frame 32 can rotate by itself, and the conveying assembly 31 can convey the uncoated substrate from the first loading mechanism 11 to the installation position of the umbrella frame 32 or convey the coated substrate on the installation position by the umbrella frame 32 to the second loading mechanism 21; the conveying chamber 3 is arranged above the film input chamber 1 and the film output chamber 2, and an umbrella frame 32 and a coating source are provided in the film forming chamber 4, and the umbrella frame 32 is used to carry the substrate and can rotate by itself.

[0036] In this embodiment, a substrate is placed on the umbrella frame 32. The uniformity of the substrate coating can be improved by the rotation of the umbrella frame 32. When a substrate on the umbrella frame 32 is coated, the conveying assembly 31 of the conveying chamber 3 removes the coated substrate from the installation position of the umbrella frame 32, and the second loading mechanism 21 moves upward from the film discharge chamber 2. The conveying assembly 31 places the coated substrate on the second loading mechanism 21, and the second loading mechanism 21 retreats to the film discharge chamber 2. At this time, the conveying assembly 31 returns to its position, and the first loading mechanism 11 in the film input chamber 1 rises with the uncoated substrate close to the film discharge chamber 2. The conveying chamber 3 and the conveying assembly 31 convey the uncoated substrate from the first loading mechanism 11 to the installation position of the umbrella frame 32, thereby completing the automatic pick-up and delivery process of the substrate. In this embodiment, the film discharge chamber 2 is connected to the conveying chamber 3, and the conveying chamber 3 and the film forming chamber 4 are directly connected or selectively connected. The selective connection is achieved by setting a controllable switch valve, and a high vacuum state can be maintained. The equipment can realize rapid switching between coated substrates and uncoated substrates. At the same time, during the switching process, the cavity will not be broken, thereby ensuring the continuity of substrate coating production and improving coating efficiency.

[0037] Optionally, the first loading mechanism 11 includes a plurality of first loading platforms 111 , which are used to place uncoated substrates. The first loading platforms 111 are stacked at an angle, and an inclination angle of the first loading platforms 111 relative to a horizontal plane is the same as an inclination angle of the umbrella stand 32 .

[0038] Optionally, the second loading mechanism 21 includes a plurality of second loading platforms 211 , which are used to place the coated substrates. The second loading platforms 211 are stacked at an angle, and the inclination angle of the second loading platforms 211 relative to the horizontal plane is the same as the inclination angle of the umbrella frame 32 .

[0039] In this embodiment, the first carrier 111 is used to stack uncoated substrates, and the second carrier 211 is used to stack coated substrates. In order to adapt to the inclined structure of the umbrella frame 32, the first carrier 111 and the second carrier 211 are placed at the same angle as the inclined angle of the umbrella frame 32 to avoid the need to further adjust the angle through the conveying component 31 during the conveying process. During the conveying process, the first carrier 111 and the second carrier 211 are used as loading jigs for the substrates and are conveyed together with the substrates.

[0040] Furthermore, the first driving mechanism 12 is drivingly connected to the first loading mechanism 11, and the first driving mechanism 12 can drive the first loading mechanism 11 to rise and fall in the vertical direction; the second driving mechanism 22 is drivingly connected to the second loading mechanism 21, and the second driving mechanism 22 can drive the second loading mechanism 21 to rise and fall in the vertical direction.

[0041] In this embodiment, the driving source of the first driving mechanism 12 is arranged on the outside of the film feeding chamber 1 to prevent affecting the vacuum environment inside the film feeding chamber 1. Similarly, the driving source of the second driving mechanism 22 is arranged on the outside of the film discharging chamber 2. At the same time, the first driving mechanism 12 can directly drive the first loading mechanism 11 to rise and fall in the vertical direction; the second driving mechanism 22 can directly drive the second loading mechanism 21 to rise and fall in the vertical direction. The driving sources of the first driving mechanism 12 and the second driving mechanism 22 can use conventional driving motors, and the transmission mechanism can use a worm gear or a screw nut. Of course, the first driving mechanism 12 and the second driving mechanism 22 can also directly use linear motors.

[0042] Optionally, the conveying assembly 31 includes a robot arm 311 and a third driving mechanism 312 and a fourth driving mechanism 313 drivingly connected to the robot arm 311 , the third driving mechanism 312 drives the robot arm 311 to rotate, and the fourth driving mechanism 313 can drive the robot arm 311 to move in a vertical direction.

[0043] In this embodiment, the third driving mechanism 312 is rotatably connected to the robot arm 311 through a transmission shaft. The driving source of the third driving mechanism 312 adopts a rotary motor. The fourth driving mechanism 313 can directly adopt a linear motor or transmit through a rotary motor and a worm gear. The driving sources of the third driving mechanism 312 and the fourth driving mechanism 313 are arranged outside the conveying chamber 3 to prevent affecting the vacuum environment inside the conveying chamber 3.

[0044] Optionally, the umbrella frame 32 includes a fifth driving mechanism 321, a sixth driving mechanism 322 and an umbrella frame body 323, the umbrella frame body 323 is used to place the substrate, the fifth driving mechanism 321 can drive the umbrella frame body 323 to rotate, and the sixth driving mechanism 322 can drive the umbrella frame body 323 to move in the vertical direction.

[0045] In this embodiment, the fifth driving mechanism 321 drives the umbrella frame body 323 to rotate through the transmission shaft. The fifth driving mechanism 321 can adopt a rotating motor, and the sixth driving mechanism 322 can directly adopt a linear motor or transmit through a rotating motor and a worm gear. The driving sources of the fifth driving mechanism 321 and the sixth driving mechanism 322 are placed outside the conveying chamber 3 to prevent affecting the vacuum environment inside the conveying chamber 3.

[0046] Optionally, the film forming chamber 4 includes a crucible table 44 for holding the coating material and a seventh driving mechanism 45, the seventh driving mechanism 45 is connected to the crucible table 44, and the seventh driving mechanism 45 can drive the crucible table 44 to rotate. In some embodiments, the crucible table 44 is disc-shaped as a whole, and circular placement grooves capable of holding the coating material are sequentially arranged on the circumference of the crucible table 44. When the coating material in a placement groove is completely consumed, the crucible table 44 is driven by the seventh driving mechanism 45 to rotate a certain angle so that the next placement groove faces the substrate. The driving source of the seventh driving mechanism 45 is arranged outside the film forming chamber 4 to prevent the vacuum environment inside the film forming chamber 4 from being affected. The seventh driving mechanism 45 is directly connected to the axis of the crucible table 44 through a transmission shaft, thereby driving the crucible table 44 to rotate.

[0047] Optionally, the film forming chamber 4 also includes a first baffle mechanism 41, an eighth driving mechanism 46 and a ninth driving mechanism 47. The first baffle mechanism 41 can rotate to switch the working state. The first baffle mechanism 41 is used to block the electron beam excited by the electron gun emitter 43 from bombarding the crucible table 44; the eighth driving mechanism 46 can drive the first baffle mechanism 41 to move in the vertical direction, and the ninth driving mechanism 47 can drive the first baffle mechanism 41 to rotate and be selectively covered on the crucible table 44.

[0048] Optionally, the film forming chamber 4 further includes a second baffle mechanism 42 and a tenth driving mechanism 48 . The tenth driving mechanism 48 can drive the second baffle mechanism 42 to rotate and selectively cover the coating material on the crucible table 44 .

[0049] In this embodiment, both the first baffle mechanism 41 and the second baffle mechanism 42 can rotate to switch working states. The first baffle mechanism 41 is used to block the electron beam excited by the electron gun emitter 43 from adhering to the crucible table 44, and the second baffle mechanism 42 is used to block the coating material from evaporating onto the substrate of the umbrella stand 32. The material used for coating is located in the film forming chamber 4. The electron beam generated by the electron gun emitter 43 bombards the coating material in the crucible table 44, so that the coating material evaporates and adheres to the surface of the substrate. The first baffle mechanism 41 is located above the electron gun emitter 43. The effective electron beam generated can bombard the coating material through the first baffle mechanism 41, and the invalid electron beam is blocked by the first baffle mechanism 41 to prevent it from adhering to the crucible table 44, which reduces the life of the crucible table 44. After the substrate on the umbrella stand 32 has reached the required coating thickness, in order to quickly cut off the upward evaporation path of the coating material, the second baffle mechanism is moved. 42 is directly arranged between the coating material and the substrate of the umbrella frame 32. During the continuous coating process, when the coating thickness on the substrate reaches the requirement, although the operator can immediately turn off the electron gun emitter 43, the evaporation of the coating material has a certain delay and will still evaporate upward and continue to adhere to the surface of the substrate. In order to avoid the coating thickness of the substrate exceeding the requirement due to the delay in the evaporation of the coating material, the second baffle mechanism 42 can be directly covered on the coating material under the action of the tenth driving mechanism 48, so as to immediately cut off the upward evaporation path of the coating material and improve the quality of the coating.

[0050] The driving source of the eighth driving mechanism 46 can be a linear motor or a rotary motor cooperating with a worm gear to drive the first baffle mechanism 41 to move in the vertical direction; the ninth driving mechanism 47 can be driven by a rotary motor through a transmission shaft. When the first baffle mechanism 41 becomes dirty after working for a long time, it can be rotated and switched and re-covered on the crucible table 44.

[0051] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. Continuous vacuum coating equipment, characterized in that: include: A film feeding chamber (1), wherein a first loading mechanism (11) is provided in the film feeding chamber (1), the first loading mechanism (11) is used to place an uncoated substrate, and the first loading mechanism (11) can drive the uncoated substrate to rise and fall; A film discharge chamber (2), wherein a second loading mechanism (21) is provided in the film discharge chamber (2), the second loading mechanism (21) is used to place the coated substrate, and the second loading mechanism (21) can drive the coated substrate to rise and fall; A conveying chamber (3), wherein a conveying assembly (31) is provided in the conveying chamber (3), and the conveying assembly (3) can convey the uncoated substrate from the first loading mechanism (11) to the mounting position of the umbrella frame (32) or convey the coated substrate on the mounting position from the umbrella frame (32) to the second loading mechanism (21), and the conveying chamber (3) is arranged above the film input chamber (1) and the film output chamber (2); A film forming chamber (4), wherein the umbrella frame (32) and a film coating source are arranged in the film forming chamber (4); the umbrella frame (32) is used to carry a substrate and is capable of self-rotation.

2. The continuous vacuum coating equipment according to claim 1, characterized in that: The first loading mechanism (11) comprises a plurality of first loading platforms (111), wherein the first loading platforms (111) are used to place uncoated substrates, the first loading platforms (111) are stacked at an angle, and the inclination angle of the first loading platforms (111) relative to the horizontal plane is the same as the inclination angle of the umbrella frame (32).

3. The continuous vacuum coating equipment according to claim 2, characterized in that: The first driving mechanism (12) is drivingly connected to the first carrying mechanism (11), and the first driving mechanism (12) can drive the first carrying mechanism (11) to rise and fall in a vertical direction.

4. The continuous vacuum coating equipment according to claim 1, characterized in that: The second loading mechanism (21) comprises a plurality of second loading platforms (211), wherein the second loading platforms (211) are used to place coated substrates, the second loading platforms (211) are stacked at an angle, and the inclination angle of the second loading platforms (211) relative to the horizontal plane is the same as the inclination angle of the umbrella frame (32).

5. The continuous vacuum coating equipment according to claim 4, characterized in that: The second driving mechanism (22) is drivingly connected to the second loading mechanism (21), and the second driving mechanism (22) can drive the second loading mechanism (21) to rise and fall in a vertical direction.

6. The continuous vacuum coating equipment according to claim 1, characterized in that: The conveying assembly (31) comprises a mechanical arm (311) and a third driving mechanism (312) and a fourth driving mechanism (313) which are drivably connected to the mechanical arm (311); the third driving mechanism (312) drives the mechanical arm (311) to rotate, and the fourth driving mechanism (313) can drive the mechanical arm (311) to move in a vertical direction.

7. The continuous vacuum coating equipment according to claim 1, characterized in that: The umbrella frame (32) comprises a fifth driving mechanism (321), a sixth driving mechanism (322) and an umbrella frame body (323); the umbrella frame body (323) is used to place the substrate; the fifth driving mechanism (321) can drive the umbrella frame body (323) to rotate; and the sixth driving mechanism (322) can drive the umbrella frame body (323) to move in a vertical direction.

8. The continuous vacuum coating equipment according to claim 1, characterized in that: The film forming chamber (4) comprises a crucible table (44) for containing coating materials and a seventh driving mechanism (45), wherein the seventh driving mechanism (45) is connected to the crucible table (44), and the seventh driving mechanism (45) can drive the crucible table (44) to rotate.

9. The continuous vacuum coating equipment according to claim 8, characterized in that: The film forming chamber (4) comprises a first baffle mechanism (41), an eighth driving mechanism (46) and a ninth driving mechanism (47); the first baffle mechanism (41) can rotate to switch working states; the first baffle mechanism (41) is used to block the electron beam excited by the electron gun emitter (43) from bombarding the crucible table (44); the eighth driving mechanism (46) can drive the first baffle mechanism (41) to move in a vertical direction; the ninth driving mechanism (47) can drive the first baffle mechanism (41) to rotate and be selectively covered on the crucible table (44).

10. The continuous vacuum coating equipment according to claim 8, characterized in that: The film forming chamber (4) further comprises a second baffle mechanism (42) and a tenth driving mechanism (48), wherein the tenth driving mechanism (48) can drive the second baffle mechanism (42) to rotate and selectively cover the coating material on the crucible table (44).

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