Clean room dust particle detection equipment

Abstract

The invention relates to the technical field of air detection, in particular to clean room dust particle detection equipment which comprises a supporting frame. The hollow detection box is connected to the supporting frame, an air outlet is formed in the detection box, and a laser dust particle counter is installed in the detection box; the mounting frame is connected with the detection box, at least two air inlet cylinders are connected to the mounting frame, and air inlet hoses are connected between the air inlet cylinders and the detection box; the driving unit is used for changing the elevation of the air inlet cylinder and is connected with the mounting frame and the air inlet cylinder; the device has the advantages that mixing of air in different height intervals in the clean room is achieved at the same time, the elevation of the air inlet cylinder can be changed through the driving unit, then extraction selection of the air in the different height intervals in the clean room is achieved, and therefore multiple sets of cleanliness data in the different height intervals in the clean room are obtained after detection; therefore, the accuracy of cleanliness data detection in the clean room is improved.

Description

Technical Field

[0001] The present application relates to the technical field of air detection, and in particular to a clean room dust particle detection device. Background Art

[0002] A clean room is a specially designed space used to remove pollutants such as microparticles, harmful air, and bacteria in the air within a certain space to control the indoor air quality. According to their uses, clean rooms can be divided into industrial clean rooms, biological clean rooms, and microbiological safety laboratories. Industrial clean rooms focus on the impact of dust particles on the production process and are mainly used in the precision machinery industry, semiconductor industry, etc.; biological clean rooms focus more on controlling the content of indoor bacteria and other microorganisms, and are often used in the fields of pharmaceuticals, biotechnology, etc.

[0003] The prior art discloses a clean room dust-free detection device, which includes a shell, a fan is installed on the inner wall of the shell, a laser dust particle counter is provided on one side of the fan, and the laser dust particle counter is detachably connected to the inner wall of the shell, a filter is provided on one side of the laser dust particle counter, and the filter is detachably connected to the inner wall of the shell, a hand lever is fixedly connected to the lower end surface of the shell, and the hand lever consists of a lower rod, a slider, an upper rod, a locking bolt and an anti-slip sleeve, the slider is slidably connected to the inside of the lower rod, the upper end of the slider is fixedly connected to the upper rod, the upper end of the upper rod passes through the top of the lower rod, a locking bolt is threadedly connected to one side of the lower rod, one end of the locking bolt is tightly attached to the outer side of the upper rod, and the outer side of the lower end of the lower rod is fixedly connected to the anti-slip sleeve.

[0004] With respect to the above-mentioned related technologies, when detecting the air cleanliness in a clean room, the air in the clean room is drawn into the inner cavity of the shell by a fan, and then the drawn air is detected by a laser dust particle counter. However, due to the different particle sizes of the dust particles and the air flow conditions in the clean room, the spatial distribution of the dust particles in the clean room is uneven, and therefore the accuracy of the air cleanliness detection in the clean room in the prior art is insufficient. Summary of the invention

[0005] In order to improve the accuracy of air cleanliness detection in a clean room, the present application provides a clean room dust particle detection device.

[0006] The clean room dust particle detection device provided in this application adopts the following technical solution: A clean room dust particle detection device, comprising: Support frame; A hollow detection box connected to the support frame, an air outlet is provided on the detection box, and a laser dust particle counter is installed in the detection box; A mounting frame, the mounting frame is connected to the detection box, and at least two air inlet cylinders are connected to the mounting frame, and an air inlet hose is connected between the air inlet cylinder and the detection box; A driving unit for changing the elevation of the air intake cylinder is connected to the mounting frame, and the driving unit is connected to the air intake cylinder.

[0007] By adopting the above technical scheme, when the cleanliness of the air in the clean room is tested, force is applied to the support frame, and the test box, the mounting frame and the driving unit are driven into the clean room by the support frame, and then force is applied to the air inlet cylinder by the driving unit to change the elevation of the air inlet cylinder, and then the gas in different height intervals in the clean room is drawn into the test box through the air inlet hose, and the cleanliness data is obtained after the detection by the laser dust particle counter, and the elevation of the air inlet cylinder is changed again by the driving unit, and the above operation is repeated until multiple groups of cleanliness data in different height intervals in the clean room are obtained, and the final cleanliness data is obtained after comparing and analyzing the multiple groups of data, thereby improving the accuracy of the cleanliness data detection in the clean room. Accuracy; the clean room dust particle detection equipment designed by the invention is convenient for installing the detection box through the support frame, and provides the detection box with an initial height from the ground; a detection cavity for the laser dust particle counter to work can be formed through the detection box; an air intake cylinder can be installed through the mounting frame; the air in different height intervals in the clean room can be drawn into the inner cavity of the detection box through the air intake cylinder and the air intake hose, and the mixing of the air in different height intervals in the clean room can be achieved at the same time; the elevation of the air intake cylinder can be changed through the driving unit, and then the extraction and selection of the air in different height intervals in the clean room can be achieved, so that after the detection, multiple groups of cleanliness data in different height intervals in the clean room can be obtained, so as to improve the accuracy of the cleanliness data detection in the clean room.

[0008] In a specific embodiment, the drive unit includes A driving motor, the driving motor is connected to the detection box, and a driving sprocket is coaxially connected to the output shaft of the driving motor; The driven sprocket is rotatably connected to the mounting frame and the detection box, the driven sprocket is sleeved on the mounting frame, and the driven sprocket is connected to the driving sprocket through a chain.

[0009] By adopting the above technical solution, a driving unit is designed, which can drive the driving sprocket to rotate through the driving motor, and the driving sprocket can cooperate with the driven sprocket through a chain to realize the rotation of the mounting frame, thereby realizing the rotation of the air intake cylinder with the output shaft of the driving motor as the rotation axis, thereby changing the elevation of the air intake cylinder.

[0010] In a specific possible implementation scheme, the driving unit also includes a plurality of elastic reset members, one end of each reset member is connected to the mounting frame, and the other end is connected to the air intake cylinder, the air intake cylinder is slidably connected to the mounting frame, and the opening direction of the air intake cylinder is perpendicular to the axial direction of the output shaft of the driving motor.

[0011] By adopting the above technical solution, a driving unit is designed, which can use the mechanical relationship between centrifugal force and the reset member to expand the elevation motion range of the air intake cylinder when changing the rotation speed of the driving motor, thereby expanding the air extraction within the height range of the clean room that the air intake cylinder can cover. At the same time, the mounting frame can also drive the air flow in the clean room during rotation, further improving the gas mixing uniformity in each height range in the clean room.

[0012] In a specific possible implementation scheme, a mixing plate is installed in the detection box, a plurality of ventilation holes are opened on the mixing plate, and the air intake hose is connected to a mixing chamber on a side of the mixing plate away from the laser dust particle counter.

[0013] By adopting the above technical solution, the designed mixing plate can fully mix the gas to be detected sent into the inner cavity of the detection box through the air intake hose and pass it into the detection cavity more evenly, thereby reducing the laminar flow phenomenon of air flowing through the detection area of ​​the laser dust particle counter and improving the accuracy of dust particle detection.

[0014] In a specific feasible implementation scheme, the mixing plate is slidably connected to the detection box, and a plurality of adjustment springs are connected between the mixing plate and the detection box. A linkage unit is provided on the mounting frame, and the linkage unit is connected to the air intake hose and the mixing plate, and is used to cooperate with the adjustment spring to drive the mixing plate to slide axially along the output shaft of the drive motor.

[0015] By adopting the above technical solution, the designed linkage unit and adjustment spring can adjust the distance between the mixing plate and the air outlet of the air intake hose according to the sliding situation of the air intake cylinder when the rotation speed of the driving motor changes so that the air intake cylinder slides relative to the mounting frame, thereby ensuring the uniformity of gas mixing entering the detection chamber and reducing the influence of laminar flow on the accuracy of dust particle detection.

[0016] In a specific implementation scheme, the linkage unit includes A hard hollow tube, wherein the hard hollow tube is slidably connected to the mounting frame and slides along the axial direction of the output shaft of the driving motor, one end of the hard hollow tube is connected to the air intake hose, and the other end extends into the mixing chamber; A linkage mechanism is connected to the hard hollow tube, and the linkage mechanism is connected to the mixing plate. When the hard hollow tube slides, the mixing plate is driven to slide through the linkage mechanism.

[0017] By adopting the above technical solution, the designed linkage unit can achieve the connection between the air intake hose and the inner cavity of the detection box through the hard hollow tube, and the sliding operation of the mixing plate along the axial direction of the output shaft of the drive motor can be realized through the sliding cooperation with the hard hollow tube through the linkage mechanism.

[0018] In a specific embodiment, the linkage mechanism includes A plurality of support rods, wherein the support rods are rotatably connected to the hard hollow tubes, and the ends of the support rods away from the hard hollow tubes have a counterweight portion for abutting against the mixing plate; A plurality of centripetal springs, one end of each of the centripetal springs is connected to the hard hollow tube, and the other end of each of the centripetal springs is connected to the support rod, so that the support rod rotates toward one side of the hard hollow tube.

[0019] By adopting the above technical solution, a linkage mechanism is designed, in which a support rod with a counterweight portion can cooperate with the centrifugal force generated when the hard hollow tube rotates to change the stretching state of the centripetal spring, thereby changing the angle between the support rod and the hard hollow tube, thereby changing the force applied by the support rod to the mixing plate. When the speed of the output shaft of the driving motor increases, the mixing plate can slide toward the side of the air inlet cylinder, shortening the distance between the mixing plate and the air outlet of the hard hollow tube, thereby achieving the mixing of the gas to be detected as much as possible.

[0020] In a specific embodiment, the linkage mechanism includes A rotating collar, the rotating collar is rotatably connected to the hard hollow tube, and the rotating collar is located in the mixing chamber; A plurality of traction ropes, one end of each traction rope is connected to the rotating ring, and the other end of each traction rope is connected to the mixing plate.

[0021] By adopting the above technical solution, a linkage mechanism is designed, which can realize relative rotation between the rotating ring and the hard hollow tube by cooperating with the traction rope when the hard hollow tube rotates through the rotating ring, and can synchronize the axial sliding action of the hard hollow tube along the output shaft of the driving motor, so that the mixing plate is pulled to slide by the traction rope, the distance between the mixing plate and the air outlet of the hard hollow tube is shortened, and the mixing of the gas to be detected is achieved as much as possible.

[0022] In a specific embodiment, the support frame comprises Support base; A fixing rod connected to the supporting base; A lifting rod is slidably connected to the fixed rod, and the detection box is connected to the lifting rod. A fixing bolt is threadedly connected to the fixed rod, and a plurality of fixing holes for the fixing bolts to extend into are opened on the lifting rod along the vertical direction.

[0023] By adopting the above technical solution, the designed support frame can provide stable support for the fixed rod through the support base. The elevation of the detection box can be changed through the cooperation of the fixed rod and the lifting rod, thereby cooperating with the air intake cylinder to expand the detection coverage of the air cleanliness in the clean room.

[0024] In a specific possible implementation manner, a mounting seat is rotatably connected to the lifting rod, a rotation axis of the mounting seat is vertically arranged, and the detection box is connected to the mounting seat.

[0025] By adopting the above technical solution and designing the mounting seat, the detection box can be oriented in different directions in the horizontal direction, thereby realizing dust particle detection operations in different direction areas in the clean room.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. The designed clean room dust particle detection equipment facilitates the installation of the detection box through the support frame and provides an initial ground height for the detection box. The detection box can form a detection cavity for the laser dust particle counter to work. The mounting frame can be used to install an air intake cylinder. The air in different height intervals in the clean room can be drawn into the inner cavity of the detection box through the air intake cylinder and the air intake hose, and the mixing of the air in different height intervals in the clean room can be achieved at the same time. The elevation of the air intake cylinder can be changed through the driving unit, thereby realizing the extraction and selection of air in different height intervals in the clean room, so as to obtain multiple groups of cleanliness data in different height intervals in the clean room after detection, so as to improve the accuracy of cleanliness data detection in the clean room.

[0027] 2. The designed clean room dust particle detection equipment can use the mechanical relationship between centrifugal force and the reset member to expand the elevation motion range of the air intake cylinder when changing the rotation speed of the driving motor, thereby expanding the air extraction within the height range of the clean room that the air intake cylinder can involve. At the same time, the mounting frame can also drive the air flow in the clean room during the rotation process, further improving the gas mixing uniformity in each height range in the clean room.

[0028] 3. The clean room dust particle detection equipment designed can realize the relative rotation between the rotating ring and the hard hollow tube by cooperating with the traction rope when the hard hollow tube rotates, and can synchronize the axial sliding action of the hard hollow tube along the output shaft of the driving motor, so that the mixing plate is pulled to slide by the traction rope, the distance between the mixing plate and the air outlet of the hard hollow tube is shortened, and the mixing of the gas to be detected is realized as much as possible. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the structure of a clean room dust particle detection device according to an embodiment of the present application.

[0030] Figure 2 yes Figure 1 Schematic diagram of some structures in .

[0031] Figure 3 yes Figure 2 Sectional view in .

[0032] Figure 4 is Figure 3 Schematic diagram of the structure after adding a linkage unit on the basis.

[0033] Figure 5 is Figure 4 The schematic diagram of the structure after the linkage mechanism is replaced with a rotating ring and a traction rope.

[0034] Explanation of the accompanying drawings: 1. Support frame; 11. Support base; 12. Fixed rod; 13. Lifting rod; 2. Detection box; 3. Laser dust particle counter; 4. Mounting frame; 41. Air intake cylinder; 42. Air intake hose; 5. Driving unit; 51. Driving motor; 52. Driving sprocket; 53. Driven sprocket; 54. Resetting member; 6. Mixing plate; 7. Adjusting spring; 8. Linkage unit; 81. Hard hollow tube; 82. Linkage mechanism; 821. Support rod; 822. Centripetal spring; 823. Rotating ring; 824. Traction rope; 9. Mounting seat. DETAILED DESCRIPTION

[0035] The following is combined with Figure 1-5 This application is described in further detail.

[0036] The embodiment of the present application discloses a clean room dust particle detection device.

[0037] Reference Figure 1 and Figure 2 A clean room dust particle detection device includes a support frame 1 and a detection box 2. The support frame 1 includes a support base 11, a fixed rod 12 and a lifting rod 13. The fixed rod 12 is welded and fixed to the support base 11, the lifting rod 13 is slidably connected to the fixed rod 12, and the detection box 2 is connected to the lifting rod 13. An air outlet is provided on one side of the detection box 2. A fixing bolt is threadedly connected to the fixed rod 12. A plurality of fixing holes are provided on the lifting rod 13. The plurality of fixing holes are distributed in a vertical direction. The fixing bolts pass through the fixed rod 12 and extend into the fixing holes to fix the lifting rod 13. In order to realize air extraction in different directions in the clean room, a mounting seat 9 is rotatably connected to the lifting rod 13. The rotation axis of the mounting seat 9 is vertically arranged, and the detection box 2 is bolted to the mounting seat 9.

[0038] Reference Figure 2 and Figure 3 In order to deliver gas in different height intervals in the clean room into the detection box 2, the clean room dust particle detection equipment also includes a mounting frame 4 and multiple air inlet cylinders 41. The mounting frame 4 is connected to the detection box 2, and the air inlet cylinder 41 is connected to the mounting frame 4. An air inlet hose 42 is connected between the air inlet cylinder 41 and the detection box 2. The gas in the clean room enters the inner cavity of the detection box 2 through the air inlet cylinder 41 and the air inlet hose 42, and then flows through the detection area above the laser dust particle counter 3 and is discharged from the air outlet; in order to detect dust particles in the gas delivered to the inner cavity of the detection box 2, the clean room dust particle detection equipment also includes a laser dust particle counter 3, and the laser dust particle counter 3 is bolted to the inner cavity of the detection box 2.

[0039] Reference Figure 3 In order to change the elevation of the air intake cylinder 41, the clean room dust particle detection equipment also includes a driving unit 5, which is connected to the mounting frame 4, and the driving unit 5 is connected to the air intake cylinder 41; specifically, the driving unit 5 includes a driving motor 51, a driving sprocket 52, a driven sprocket 53 and a chain, the driving motor 51 is bolted to the detection box 2, and the output shaft of the driving motor 51 is coaxially keyed with the driving sprocket 52, the output shaft of the driving motor 51 is horizontally arranged, the driven sprocket 53 is sleeved on the mounting frame 4, and the mounting frame 4 is rotatably connected to the detection box 2 through a sealed bearing, and the driving sprocket 52 and the driven sprocket 53 are rotated through a chain; the driving motor 51 can drive the driving sprocket 52 to rotate, and the driving sprocket 52 can cooperate with the chain to drive the driven sprocket 53 to rotate, thereby realizing the rotation of the mounting frame 4, and then realizing the rotation of the air intake cylinder 41 with the output shaft of the driving motor 51 as the rotation axis, thereby changing the elevation of the air intake cylinder 41.

[0040] Reference Figure 3 Furthermore, the driving unit 5 includes a plurality of elastic reset members 54, one end of the reset member 54 is connected to the mounting frame 4, and the other end is connected to the air intake cylinder 41, and the air intake cylinder 41 is slidably connected to the mounting frame 4, and the sliding direction of the air intake cylinder 41 is arranged along the radial direction of the output shaft of the driving motor 51, and the opening direction of the air intake cylinder 41 is arranged perpendicular to the axial direction of the output shaft of the driving motor 51. In the present application, the reset member 54 can be a spring or an elastic rope. In the present embodiment, the reset member 54 is preferably a spring; through the reset member 54, when the rotation speed of the driving motor 51 is changed, the mechanical relationship between the centrifugal force and the reset member 54 can be utilized to realize the expansion of the elevation motion range of the air intake cylinder 41, thereby expanding the air extraction within the height range of the clean room that the air intake cylinder 41 can cover. At the same time, the mounting frame 4 can also drive the air flow in the clean room during the rotation process, further improving the gas mixing uniformity in each height range in the clean room.

[0041] Reference Figure 3 A mixing plate 6 is installed in the detection box 2. The mixing plate 6 divides the inner cavity of the detection box 2 into a mixing cavity and a detection cavity. The laser dust particle counter 3 is located in the detection cavity. A plurality of vents are provided on the mixing plate 6. The vents realize the connection between the mixing cavity and the detection cavity. The air intake hose 42 is connected to the mixing cavity. The gas to be detected sent into the inner cavity of the detection box 2 through the air intake hose 42 can be fully mixed through the mixing plate 6 and then more evenly introduced into the detection cavity, thereby reducing the phenomenon of laminar flow of air flowing through the detection area of ​​the laser dust particle counter 3 and improving the accuracy of dust particle detection.

[0042] Reference Figure 3 and Figure 4 Furthermore, the mixing plate 6 is slidably connected to the detection box 2, and the sliding direction of the mixing plate 6 is arranged along the radial direction of the output shaft of the driving motor 51. The inner wall of the detection box 2 has a plurality of protrusions, and a plurality of adjusting springs 7 are welded between the mixing plate 6 and the protrusions. A linkage unit 8 is arranged on the mounting frame 4, and the linkage unit 8 is connected to the air intake hose 42 and the mixing plate 6, and is used to cooperate with the adjusting spring 7 to drive the mixing plate 6 to slide along the axial direction of the output shaft of the driving motor 51; when the rotation speed of the driving motor 51 changes so that the air intake cylinder 41 slides relative to the mounting frame 4, the distance between the mixing plate 6 and the air outlet of the air intake hose 42 can be changed according to the sliding condition of the air intake cylinder 41, thereby ensuring the uniformity of the gas mixing entering the detection chamber and reducing the influence of the laminar flow phenomenon on the accuracy of dust particle detection.

[0043] Reference Figure 4 Specifically, the linkage unit 8 includes a hard hollow tube 81 and a linkage mechanism 82. The hard hollow tube 81 is slidably connected to the mounting frame 4, and the hard hollow tube 81 slides along the axial direction of the output shaft of the driving motor 51. One end of the hard hollow tube 81 is flange-connected to one end of the intake hose 42 away from the intake cylinder 41, and the other end extends into the mixing chamber; the linkage mechanism 82 is connected to the hard hollow tube 81, and the linkage mechanism 82 is connected to the mixing plate 6. When the hard hollow tube 81 slides, the mixing plate 6 is driven to slide through the linkage mechanism 82.

[0044] Reference Figure 4In some embodiments of the present application, the linkage mechanism 82 includes a support rod 821 and a centripetal spring 822. The number of the support rod 821 and the centripetal spring 822 is the same and both are multiple. The support rod 821 is hinged to the hard hollow tube 81, and the end of the support rod 821 away from the hard hollow tube 81 has a counterweight portion. The support rod 821 abuts against the mixing plate 6 through the counterweight portion. One end of the centripetal spring 822 is welded and fixed to the hard hollow tube 81, and the other end is welded and fixed to the support rod 821, so that the support rod 821 faces the hard hollow tube 81. One side rotates; the support rod 821 with a counterweight portion can cooperate with the centrifugal force generated when the hard hollow tube 81 rotates to change the stretching state of the centripetal spring 822, thereby changing the angle between the support rod 821 and the hard hollow tube 81, thereby changing the force applied by the support rod 821 to the mixing plate 6, so that when the output shaft speed of the drive motor 51 increases, the mixing plate 6 can slide toward the side of the air inlet cylinder 41, shortening the distance between the mixing plate 6 and the air outlet of the hard hollow tube 81, and achieving the mixing of the gas to be detected as much as possible.

[0045] Reference Figure 5 In some other embodiments of the present application, the linkage mechanism 82 includes a rotating ring 823 and a plurality of traction ropes 824, the rotating ring 823 is rotatably connected to the hard hollow tube 81, and the rotating ring 823 and the hard hollow tube 81 are in a relatively static state along the axial direction of the hard hollow tube 81, one end of the traction rope 824 is connected to the rotating ring 823, and the other end is connected to the mixing plate 6; through the rotating ring 823, the traction rope 824 can cooperate with the rotating ring 823 to realize the relative rotation between the rotating ring 823 and the hard hollow tube 81 when the hard hollow tube 81 rotates, and the axial sliding action of the hard hollow tube 81 along the output shaft of the driving motor 51 can be synchronized, so that the mixing plate 6 is pulled to slide by the traction rope 824, the distance between the mixing plate 6 and the air outlet of the hard hollow tube 81 is shortened, and the mixing of the gas to be detected is achieved as much as possible.

[0046] The implementation principle of a clean room dust particle detection device according to an embodiment of the present application is as follows: when detecting the cleanliness of the air in the clean room, force is applied to the support frame 1, and the detection box 2, the mounting frame 4 and the driving unit 5 are driven into the clean room through the support frame 1, and then force is applied to the air inlet cylinder 41 through the driving unit 5 to change the elevation of the air inlet cylinder 41, and then the gas in different height intervals in the clean room is drawn into the detection box 2 through the air inlet hose 42, and the cleanliness data is obtained after detection by the laser dust particle counter 3, and the elevation of the air inlet cylinder 41 is changed again through the driving unit 5, and the above-mentioned operation is repeated until multiple groups of cleanliness data in different height intervals in the clean room are obtained, and the final cleanliness data is obtained after comparing and analyzing the multiple groups of data. Improve the accuracy of cleanliness data detection in the clean room; the support frame 1 facilitates the installation of the detection box 2 and provides an initial height from the ground for the detection box 2. The detection box 2 can form a detection cavity for the laser dust particle counter 3 to work. The mounting frame 4 can be used to install an air intake cylinder 41. The air in different height intervals in the clean room can be drawn into the inner cavity of the detection box 2 through the air intake cylinder 41 and the air intake hose 42, and the air in different height intervals in the clean room can be mixed at the same time. The elevation of the air intake cylinder 41 can be changed through the driving unit 5, thereby realizing the extraction and selection of air in different height intervals in the clean room, so that after the detection, multiple groups of cleanliness data in different height intervals in the clean room can be obtained, so as to improve the accuracy of cleanliness data detection in the clean room.

[0047] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A clean room dust particle detection device, characterized in that: include: Support frame (1); A hollow detection box (2), the detection box (2) being connected to the support frame (1), the detection box (2) being provided with an air outlet, and a laser dust particle counter (3) being installed in the detection box (2); A mounting frame (4), the mounting frame (4) being connected to the detection box (2), and at least two air inlet cylinders (41) being connected to the mounting frame (4), and an air inlet hose (42) being connected between the air inlet cylinder (41) and the detection box (2); A driving unit (5) for changing the elevation of an air intake cylinder (41), wherein the driving unit (5) is connected to the mounting frame (4), and the driving unit (5) is connected to the air intake cylinder (41).

2. The clean room dust particle detection device according to claim 1, characterized in that: The driving unit (5) comprises A driving motor (51), the driving motor (51) being connected to the detection box (2), and a driving sprocket (52) being coaxially connected to an output shaft of the driving motor (51); A driven sprocket (53), the mounting frame (4) is rotatably connected to the detection box (2), the driven sprocket (53) is sleeved on the mounting frame (4), and the driven sprocket (53) is connected to the driving sprocket (52) through a chain.

3. The clean room dust particle detection device according to claim 2, characterized in that: The driving unit (5) further comprises a plurality of elastic reset members (54), one end of the reset members (54) being connected to the mounting frame (4) and the other end being connected to the air intake cylinder (41), the air intake cylinder (41) being slidably connected to the mounting frame (4), and the opening direction of the air intake cylinder (41) being arranged perpendicular to the axial direction of the output shaft of the driving motor (51).

4. The clean room dust particle detection device according to claim 3, characterized in that: A mixing plate (6) is installed in the detection box (2), a plurality of ventilation holes are provided on the mixing plate (6), and the air intake hose (42) is connected to a mixing chamber on a side of the mixing plate (6) away from the laser dust particle counter (3).

5. The clean room dust particle detection device according to claim 4, characterized in that: The mixing plate (6) is slidably connected to the detection box (2), and a plurality of adjustment springs (7) are connected between the mixing plate (6) and the detection box (2). A linkage unit (8) is provided on the mounting frame (4), and the linkage unit (8) is connected to the air intake hose (42) and the mixing plate (6) and is used to cooperate with the adjustment spring (7) to drive the mixing plate (6) to slide along the axial direction of the output shaft of the drive motor (51).

6. The clean room dust particle detection device according to claim 5, characterized in that: The linkage unit (8) comprises a hard hollow tube (81), the hard hollow tube (81) being slidably connected to the mounting frame (4), and the hard hollow tube (81) slidingly sliding along the axial direction of the output shaft of the driving motor (51), one end of the hard hollow tube (81) being connected to the air intake hose (42), and the other end extending into the mixing chamber; A linkage mechanism (82), wherein the linkage mechanism (82) is connected to the hard hollow tube (81), and the linkage mechanism (82) is connected to the mixing plate (6), and when the hard hollow tube (81) slides, the mixing plate (6) is driven to slide through the linkage mechanism (82).

7. The clean room dust particle detection device according to claim 6, characterized in that: The linkage mechanism (82) comprises A plurality of support rods (821), wherein the support rods (821) are rotatably connected to the hard hollow tube (81), and the support rods (821) have a counterweight portion at one end away from the hard hollow tube (81) for abutting against the mixing plate (6); A plurality of centripetal springs (822), one end of each of the centripetal springs (822) being connected to the hard hollow tube (81), and the other end of each of the centripetal springs (822) being connected to the support rod (821), so that the support rod (821) can rotate toward one side of the hard hollow tube (81).

8. The clean room dust particle detection device according to claim 6, characterized in that: The linkage mechanism (82) comprises A rotating collar (823), the rotating collar (823) being rotatably connected to the hard hollow tube (81), and the rotating collar (823) being located in the mixing chamber; A plurality of traction ropes (824), one end of each traction rope (824) is connected to the rotating ring (823), and the other end of each traction rope (824) is connected to the mixing plate (6).

9. The clean room dust particle detection device according to any one of claims 1 to 8, characterized in that: The support frame (1) comprises Support base (11); A fixing rod (12), wherein the fixing rod (12) is connected to the supporting base (11); A lifting rod (13), the lifting rod (13) is slidably connected to the fixing rod (12), and the detection box (2) is connected to the lifting rod (13), a fixing bolt is threadedly connected to the fixing rod (12), and the lifting rod (13) is provided with a plurality of fixing holes for the fixing bolts to extend into in a vertical direction.

10. The clean room dust particle detection device according to claim 9, characterized in that: A mounting seat (9) is rotatably connected to the lifting rod (13), the rotation axis of the mounting seat (9) is vertically arranged, and the detection box (2) is connected to the mounting seat (9).

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