Probe with low needle pressure

Abstract

A probe with a low needle pressure includes an elastic structure and a conductor. The elastic structure has a first surface and a second surface, and the first surface and the second surface are located on two opposite sides of the elastic structure. The conductor includes a first conductor and a second conductor. The first surface of the elastic structure corresponds to the first conductor, the second surface of the elastic structure corresponds to the second conductor, and the first conductor and the second conductor are tightly combined and wrap the elastic structure.

Description

Technical Field

[0001] The present invention relates to a probe structure, and more particularly to a probe with low needle pressure. Background Art

[0002] During the manufacturing process of an integrated circuit chip, electrical testing is required. Solder joints (pads) or bumps are formed on the electrode portion of the integrated circuit chip, and the test probe is electrically connected to the electrode portion to detect the electrical characteristics of the chip. When the probe contacts the electrode portion, the end of the probe applies a needle pressure / balance contact force (BCF) to the electrode portion to establish an electrical connection.

[0003] If the needle pressure when the probe contacts the electrode portion is too large, it will leave too deep or too long scratch marks on the electrode portion and affect the bonding strength of the chip in subsequent processes. Therefore, the pressure when the probe contacts the electrode portion must be well controlled. In the prior art, the probe body can be formed by at least two parallel struts, and there is at least one opening between the struts. The parallel struts and the opening form an elastic structure to reduce the needle pressure when the probe contacts the electrode portion.

[0004] The two parallel struts formed on the probe are prone to breakage. In the prior art, the opening can be filled with a polymeric material as a support to increase the strength and solve the problem of breakage of the parallel struts. However, in this way, the needle pressure when the probe contacts the electrode portion also increases, which is not only unfavorable for testing but also cannot solve the problem of increased impedance.

[0005] Furthermore, in high-current testing or high-frequency testing, in addition to controlling the needle pressure, it is also desirable to reduce the impedance of the probe itself. For probes with the same cross-sectional area and the same material, the prior art can reduce the needle pressure by means of an opening, but it also increases the impedance, which is not conducive to high-current or high-frequency testing requirements, and there is also a risk of probe breakage. Existing solutions can, for example, increase the cross-sectional area of the probe by increasing the thickness of the probe, but when the cross-sectional area of the probe increases, the needle pressure also increases. Therefore, a probe that can reduce the needle pressure, reduce the impedance, and is not easily broken is needed to solve the above technical problems and meet the more efficient testing requirements of high-frequency and micro-electromechanical systems. Summary of the Invention

[0006] The object of the present invention is to provide a probe with a low needle pressure, comprising an elastic structure and a conductor. The elastic structure has a first surface of the elastic structure and a second surface of the elastic structure, and the first surface of the elastic structure and the second surface of the elastic structure are located on opposite sides of the elastic structure. The conductor comprises a first conductor and a second conductor. The first surface of the elastic structure corresponds to the first conductor, the second surface of the elastic structure corresponds to the second conductor, and the first conductor and the second conductor are tightly combined and cover at least a part of the elastic structure. The hardness of the elastic structure is greater than the hardness of the conductor.

[0007] In a feasible embodiment, a plurality of ribs comprise a first rib and a second rib, and a connecting section has a first area in a cross-section perpendicular to the central axis and exposed between the first rib and the second rib. The first rib has a first rib cross-section, the second rib has a second rib cross-section, and one side of the first rib cross-section is adjacent to and faces one side of the second rib cross-section. The conductor has a top surface of the conductor and a bottom surface of the conductor, and the top surface of the conductor and the bottom surface of the conductor are opposite sides of the conductor. The top surface of the conductor has a side edge of the top surface of the conductor and another side edge of the top surface of the conductor that are parallel to each other. The side edge of the top surface of the conductor is adjacent to one side of the first rib cross-section, and the other side edge of the top surface of the conductor is adjacent to one side of the second rib cross-section. The distance from one side of the first rib cross-section extending perpendicularly to the side edge of the top surface of the conductor and one side of the first rib cross-section is defined as a second area; the distance from one side of the second rib cross-section extending perpendicularly to the other side edge of the top surface of the conductor and one side of the second rib cross-section is defined as a third area.

[0008] In a feasible embodiment, the distance from the side edge of the top surface of the conductor extending to the other side edge of the top surface of the conductor and one side of the first rib cross-section is defined as a fourth area.

[0009] In a feasible embodiment, the elastic structure further comprises a top surface of the elastic structure and a bottom surface of the elastic structure, and the top surface of the elastic structure and the bottom surface of the elastic structure are respectively located at opposite ends of the central axis of the elastic structure. The first surface of the elastic structure connects the top surface of the elastic structure and the bottom surface of the elastic structure, and the second surface of the elastic structure connects the top surface of the elastic structure and the bottom surface of the elastic structure. When the top surface of the elastic structure is flush with the top surface of the conductor and the bottom surface of the elastic structure is flush with the bottom surface of the conductor, the top surface of the elastic structure and the bottom surface of the elastic structure are not covered by the conductor.

[0010] In a feasible embodiment, when the top surface of the elastic structure is joined to the top surface of the conductor and the bottom surface of the elastic structure is joined to the bottom surface of the conductor, the top surface of the elastic structure and the bottom surface of the elastic structure are covered by the conductor.

[0011] In a feasible embodiment, at least a part of the conductor is disposed in a space.

[0012] In a feasible embodiment, the material of the elastic structure is one of nickel alloy, nickel-cobalt alloy, platinum or platinum alloy.

[0013] In a feasible embodiment, the materials of the first conductor and the second conductor are high-conductivity materials.

[0014] In a feasible embodiment, the first conductor and the second conductor are stacked and formed on the elastic structure by electroplating.

[0015] In a feasible embodiment, the first conductor and the second conductor are tightly joined together by fusion.

[0016] In a feasible embodiment, the first conductor and the second conductor are of the same material.

[0017] To enable a further understanding of the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the provided drawings are only for reference and illustration, and are not used to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of the elastic structure of the first embodiment of the probe with low needle pressure of the present invention;

[0019] Figure 2 Schematic diagram of the first embodiment of the probe with low needle pressure of the present invention;

[0020] Figure 3 Front view of the first embodiment of the probe with low needle pressure of the present invention;

[0021] Figure 4 For the present invention Figure 2 Cross-sectional view in the direction of IV-IV;

[0022] Figure 5 Schematic diagram of the elastic structure of the second embodiment of the probe with low needle pressure of the present invention;

[0023] Figure 6 Schematic diagram of the second embodiment of the probe with low needle pressure of the present invention; and

[0024] Figure 7 Second schematic diagram of the second embodiment of the probe with low needle pressure of the present invention.

[0025] Explanation of the reference numerals: 1: elastic structure; 11: first rib; 12: second rib; 13: first connecting section; 14: second connecting section; 15: first surface of elastic structure; 16: second surface of elastic structure; 17: bottom surface of elastic structure; 18: top surface of elastic structure; 19: side surface of elastic structure; 20: space; 21: conductor; 21a: first conductor; 21b: second conductor; 21c: third conductor; 100: probe with low needle pressure; 211: side edge of the top surface of conductor; 212: other side edge of the top surface of conductor; 181: one side edge of the first rib cross section; 182: one side edge of the second rib cross section; A1: first area; A2: second area; A3: third area; B: bottom surface of conductor; CL: center axis; S1: first rib cross section; S2: second rib cross section; T: top surface of conductor. DETAILED DESCRIPTION

[0026] [First embodiment]

[0027] See also Figure 1 , Figure 2 , Figure 3 and Figure 4 , Figure 1 FIG. 1 is a schematic diagram of an elastic structure 1 of a first embodiment of a probe 100 with low needle pressure according to the present invention. Figure 2 FIG. 1 is a schematic diagram of a first embodiment of a probe 100 with low needle pressure according to the present invention. Figure 3 FIG. 1 is a front view of a first embodiment of a probe 100 with low needle pressure according to the present invention. Figure 4 For the present invention Figure 2 Cross-sectional view along the IV-IV direction.

[0028] The present invention discloses a probe 100 with low needle pressure, comprising an elastic structure 1 and a conductor 21. The elastic structure 1 is a probe, which can be a single probe, can be in various shapes (such as an S-shaped probe), or can be a MEMS pogo pin probe structure, which is not limited by the present invention.

[0029] See also Figure 1, in the first embodiment of the present invention, the elastic structure 1 of the probe 100 with low needle pressure includes two ribs (the first rib 11 and the second rib 12) and two connecting segments (the first connecting segment 13 and the second connecting segment 14). The first connecting segment 13 connects one corresponding end of the first rib 11 and the second rib 12, and the second connecting segment 14 connects the other corresponding end of the first rib 11 and the second rib 12. A space 20 is formed between the first rib 11 and the second rib 12. It should be particularly noted that the present invention does not limit the number of ribs, connecting segments and the space 20. The number of ribs can be two, three or more than four, the number of connecting segments can be two, three or more than four, and the number of spaces 20 can be more than one according to the number of ribs.

[0030] The elastic structure 1 has an elastic structure first surface 15 and an elastic structure second surface 16. The elastic structure first surface 15 and the elastic structure second surface 16 are located on two opposite sides of the elastic structure 1. The elastic structure 1 further includes an elastic structure bottom surface 17 and an elastic structure top surface 18, and the elastic structure bottom surface 17 and the elastic structure top surface 18 are respectively located at two opposite ends of the central axis CL of the elastic structure 1. The elastic structure bottom surface 17 can be a surface of the first connecting segment 13 away from the second connecting segment 14, and the elastic structure top surface 18 can be a surface of the second connecting segment 14 away from the first connecting segment 13. The elastic structure first surface 15 connects the elastic structure top surface 18 and the elastic structure bottom surface 17, and the elastic structure second surface 16 connects the elastic structure top surface 18 and the elastic structure bottom surface 17. The elastic structure 1 further includes two elastic structure side surfaces 19. The two elastic structure side surfaces 19 respectively connect the elastic structure first surface 15, the elastic structure second surface 16, the elastic structure bottom surface 17 and the elastic structure top surface 18.

[0031] Please refer to Figure 2 , the probe 100 with low needle pressure includes a conductor 21, and the conductor 21 includes a first conductor 21a and a second conductor 21b. The elastic structure first surface 15 corresponds to the first conductor 21a, and the elastic structure second surface 16 corresponds to the second conductor 21b. In one embodiment, the first conductor 21a and the second conductor 21b can be formed on the elastic structure 1 by electroplating. In one embodiment, the first conductor 21a and the second conductor 21b can be two separate components, and then tightly combined through high pressure and / or high temperature fusion and coated on the elastic structure 1.

[0032] At least a part of the first conductor 21a and the second conductor 21b can be disposed in the space 20. Specifically, in the space 20, an electroplated layer will also be formed by electroplating, so that at least a part of the first conductor 21a is disposed in a partial space of the space 20, or at least a part of the first conductor 21a is disposed in the entire space of the space 20; at least a part of the second conductor 21b is disposed in a partial space of the space 20, or at least a part of the second conductor 21b is disposed in the entire space of the space 20. Specifically, by using a fusion method, at least a part of the first conductor 21a is disposed in a partial space of the space 20, or at least a part of the first conductor 21a is disposed in the entire space of the space 20; at least a part of the second conductor 21b is disposed in a partial space of the space 20, or at least a part of the second conductor 21b is disposed in the entire space of the space 20. That is to say, the space 20 can be filled with the first conductor 21a or the second conductor 21b, or can not be filled with the first conductor 21a or the second conductor 21b.

[0033] Please also refer to Figure 2 and Figure 3 The conductor 21 includes a conductor bottom surface B and a conductor top surface T. When the first conductor 21a and the second conductor 21b are tightly combined by covering the elastic structure 1, the bottom surface 17 of the elastic structure can be set flush with the conductor bottom surface B, and the top surface 18 of the elastic structure is set flush with the conductor top surface T. And the two elastic structure side surfaces 19 of the elastic structure 1 are covered by the conductor 21. When the top surface 18 of the elastic structure is set flush with the conductor top surface T and the bottom surface 17 of the elastic structure is set flush with the conductor bottom surface B, the top surface 18 and the bottom surface 17 of the elastic structure are not covered by the conductor 21. That is to say, the bottom surface 17 of the elastic structure is coplanar with the conductor bottom surface B, and the top surface 18 of the elastic structure is coplanar with the conductor top surface T. However, the present invention is not limited. Specifically, in an embodiment, when the top surface 18 of the elastic structure is joined to the conductor top surface T and the bottom surface 17 of the elastic structure is joined to the conductor bottom surface B, the bottom surface 17 and the top surface 18 of the elastic structure can be covered by the conductor 21, which does not affect the test. However, generally after several tests, the bottom surface 17 and the top surface 18 of the elastic structure will be exposed and not covered by the conductor 21.

[0034] Please refer to Figure 4 , Figure 4 is Figure 2 a sectional view taken along the IV-IV direction of Figure 4 It can be seen that the conductor 21 can be partially formed on the elastic structure 1 by electroplating first, forming as Figure 4The third conductor 21c shown. Next, the first conductor 21a and the second conductor 21b are tightly combined and coated thereon by high pressure and / or high temperature fusion to form an elastic structure 1 with the third conductor 21c. Optionally, in this embodiment, at least a part of the first conductor 21a and the second conductor 21b may also be disposed in the space 20, and the present invention is not limited. Optionally, in this embodiment, the third conductor 21c that tightly combines and coats the elastic structure 1 may also form the entire conductor 21.

[0035] Optionally, the material of the elastic structure 1 may be one of nickel alloy, nickel-cobalt alloy, platinum or platinum alloy.

[0036] Optionally, the elastic structure 1 may be a conductor, and the conductivity coefficients of the first conductor 21a and the second conductor 21b may be greater than the conductivity coefficient of the elastic structure 1.

[0037] Optionally, the materials of the first conductor 21a and the second conductor 21b may be high conductivity coefficient materials, for example, one of gold, silver or copper.

[0038] Optionally, the materials of the first conductor 21a and the second conductor 21b may be the same material, so that the first conductor 21a and the second conductor 21b have an optional and stable fusion, or it is easier to implement in the electroplating process.

[0039] Optionally, the hardness of the elastic structure 1 is greater than the hardness of the conductor 21. Specifically, using the elastic structure 1 with a higher hardness coated in the conductor 21 as a support will not only not overly increase the needle pressure of the elastic structure 1 contacting the object to be measured, but also can reduce the impedance.

[0040] The setting of the conductor 21 of the present invention increases the overall current path of the probe 100 with low needle pressure, thereby reducing the impedance. However, if the first conductor 21a and the second conductor 21b use materials with the same hardness as the elastic structure 1, or materials with a hardness greater than the elastic structure 1, the needle pressure will increase significantly, resulting in too much contact pressure on the object to be measured, and further affecting the subsequent testing and process of the chip.

[0041] Optionally, after the first conductor 21a and the second conductor 21b are fused by high pressure and / or high temperature, the cross-sectional area (probe size) of the probe can be adjusted by means such as laser, CNC machining or etching. The material around the probe 100 with low needle pressure after fusion shows irregular protrusions, and the appearance of the probe can also be flattened by the above methods.

[0042] [Second Embodiment]

[0043] Please refer to Figures 5 to 7 ,Figure 5 Schematic diagram of the elastic structure 1 of the second embodiment of the probe 100 with low needle pressure according to the present invention. Figure 6 Schematic diagram of the second embodiment of the probe 100 with low needle pressure according to the present invention. Figure 7 Second schematic diagram of the second embodiment of the probe 100 with low needle pressure according to the present invention. The structure of the second embodiment of the present invention is similar to that of the first embodiment, and the same parts will not be described in detail. The difference between the second embodiment and the first embodiment of the present invention is that the elastic structure 1 of the second embodiment has only one connecting section connecting the first rib 11 and the second rib 12. According to the actual situation, the elastic structure 1 of the second embodiment may have only one connecting section (the first connecting section 13) connecting the corresponding ends of the first rib 11 and the second rib 12, and the corresponding other ends of the first rib 11 and the second rib 12 are not connected, so that the first rib 11, the second rib 12 and the first connecting section 13 form an elastic structure 1 similar to a concave shape or a U shape.

[0044] Please refer to Figure 5 , in the second embodiment, the first rib 11 of the elastic structure 1 has a first rib cross-section S1, and the second rib 12 of the elastic structure 1 has a second rib cross-section S2. The bottom surface 17 of the elastic structure may be a surface of the first connecting section 13 away from the first rib cross-section S1 and the second rib cross-section S2.

[0045] Please refer to Figure 6 , the first connecting section 13 has a first area A1 in a cross-section perpendicular to the central axis CL. One side 181 of the first rib cross-section is adjacent to and faces one side 182 of the second rib cross-section. The top surface T of the conductor has a conductor top surface side 211 and another conductor top surface side 212 that are parallel to each other. The conductor top surface side 211 is adjacent to one side 181 of the first rib cross-section, and the other conductor top surface side 212 is adjacent to one side 182 of the second rib cross-section. The distance from one side 181 of the first rib cross-section extending perpendicular to the conductor top surface side 211 and the area defined by one side 181 of the first rib cross-section is the second area A2, and the distance from one side 182 of the second rib cross-section extending perpendicular to the other conductor top surface side 212 and the area defined by one side 182 of the second rib cross-section is the third area A3. The sum of the second area A2 and the third area A3 is greater than or equal to the first area A1.

[0046] Optionally, please refer to Figure 7 , Figure 7 Second schematic diagram of the second embodiment of the probe 100 with low needle pressure according to the present invention, the distance from the conductor top surface side 211 extending to the other conductor top surface side 212 and one side 181 of the first rib cross-section is defined as the fourth area A4. The fourth area A4 is greater than the first area A1.

[0047] Similarly, the conductor 21 includes a conductor bottom surface B and a conductor top surface T. When the first conductor 21a and the second conductor 21b are tightly bonded to the elastic structure 1, when the first rib cross-section S1 of the first rib 11 and the second rib cross-section S2 of the second rib 12 are respectively flush with the conductor top surface T, that is to say, the first rib cross-section S1 and the second rib cross-section S2 are coplanar with the conductor top surface T and are not covered by the conductor 21; when the bottom surface 17 of the elastic structure is flush with the conductor bottom surface B in a cross-section perpendicular to the central axis CL, that is to say, the bottom surface 17 of the elastic structure is coplanar with the conductor bottom surface B and is not covered by the conductor 21. Similarly, the two side surfaces 19 of the elastic structure 1 are covered by the conductor 21. Similarly, in an embodiment, when the top surface 18 of the elastic structure is joined to the conductor top surface T and the bottom surface 17 of the elastic structure is joined to the conductor bottom surface B, the bottom surface 17 of the elastic structure and the top surface 18 of the elastic structure may be covered by the conductor 21, which does not affect the test. However, usually after several tests, the bottom surface 17 of the elastic structure and the top surface 18 of the elastic structure will be exposed and not covered by the conductor 21.

[0048] [Advantages of the Embodiment]

[0049] One of the advantages of the present invention is that the probe with a low needle pressure provided by the present invention can cover the elastic structure with a greater hardness by the conductor with a smaller hardness, so that the overall current path of the probe with a low needle pressure is increased, thereby reducing the impedance, and effectively reducing the risk of the probe breaking when contacting the object to be tested, making the test process more efficient. Another advantage of the present invention is that by arranging a plurality of ribs adjacent to each other, a space is formed between two adjacent ribs, which can achieve the control of the needle pressure, reduce the scratching of the electrode part on the object to be tested, and avoid affecting the subsequent chip soldering process.

[0050] The content disclosed above is only the preferred feasible embodiment of the present invention, and does not limit the protection scope of the claims of the present invention. Therefore, all equivalent technical changes made by using the content of the specification and drawings of the present invention are included in the protection scope of the claims of the present invention.

Claims

1. A probe with low needle pressure, characterized in that, The probe with low needle pressure includes: An elastic structure having a first surface and a second surface of the elastic structure, the first surface and the second surface of the elastic structure being located on opposite sides of the elastic structure, and the elastic structure including: A plurality of ribs; and At least one connecting section connecting two adjacent ribs, wherein two adjacent ribs and the at least one connecting section together define at least one space, A conductor including a first conductor and a second conductor; wherein the first surface of the elastic structure corresponds to the first conductor, the second surface of the elastic structure corresponds to the second conductor, and the first conductor and the second conductor are tightly combined and cover at least a part of the elastic structure, wherein the hardness of the elastic structure is greater than the hardness of the conductor, wherein the plurality of ribs include a first rib and a second rib, and the connecting section has a first area in a cross-section perpendicular to a central axis of the elastic structure and exposed between the first rib and the second rib, wherein the first rib has a first rib cross-section, the second rib has a second rib cross-section, and one side of the first rib cross-section is adjacent to and faces one side of the second rib cross-section, wherein the conductor has a top surface and a bottom surface of the conductor, the top surface and the bottom surface of the conductor being opposite sides of the conductor, the top surface of the conductor having a side edge of the top surface of the conductor and another side edge of the top surface of the conductor that are parallel to each other, the side edge of the top surface of the conductor being adjacent to one side of the first rib cross-section, and the other side edge of the top surface of the conductor being adjacent to one side of the second rib cross-section, wherein the distance from one side of the first rib cross-section perpendicular to the side edge of the top surface of the conductor and one side of the first rib cross-section is defined as a second area; the distance from one side of the second rib cross-section perpendicular to the other side edge of the top surface of the conductor and one side of the second rib cross-section is defined as a third area, and the sum of the second area and the third area is greater than or equal to the first area.

2. The probe with low needle pressure according to claim 1, characterized in that, The distance from the side edge of the top surface of the conductor to the other side edge of the top surface of the conductor and one side of the first rib cross-section is defined as a fourth area, wherein the fourth area is greater than the first area.

3. The probe with low needle pressure according to claim 1, characterized in that, The elastic structure further includes a top surface and a bottom surface of the elastic structure, the top surface and the bottom surface of the elastic structure being located at opposite ends of the central axis of the elastic structure respectively, the first surface of the elastic structure connecting the top surface and the bottom surface of the elastic structure, and the second surface of the elastic structure connecting the top surface and the bottom surface of the elastic structure, wherein when the top surface of the elastic structure is flush with the top surface of the conductor and the bottom surface of the elastic structure is flush with the bottom surface of the conductor, the top surface and the bottom surface of the elastic structure are not covered by the conductor.

4. The probe with low needle pressure according to claim 1, characterized in that, The elastic structure further includes an elastic structure top surface and an elastic structure bottom surface. The elastic structure top surface and the elastic structure bottom surface are respectively located at opposite ends of the central axis of the elastic structure. The first surface of the elastic structure connects the elastic structure top surface and the elastic structure bottom surface, and the second surface of the elastic structure connects the elastic structure top surface and the elastic structure bottom surface. Wherein, when the elastic structure top surface is engaged with the top surface of the conductor and the elastic structure bottom surface is engaged with the bottom surface of the conductor, the elastic structure top surface and the elastic structure bottom surface are covered by the conductor.

5. The probe with low needle pressure according to claim 4, characterized in that At least a part of the conductor is disposed in the space.

6. The probe with a low needle pressure according to claim 1, characterized in that, The material of the elastic structure is one of nickel alloy, nickel-cobalt alloy or platinum alloy.

7. The probe with a low needle pressure according to claim 1, wherein The materials of the first conductor and the second conductor are high-conductivity materials.

8. The probe with low needle pressure according to claim 1, characterized in that The first conductor and the second conductor are stacked and formed on the elastic structure by electroplating.

9. The probe with a low needle pressure according to claim 1, characterized in that The first conductor and the second conductor are tightly combined with each other by fusion.

10. The probe with a low needle pressure according to claim 1, characterized in that The materials of the first conductor and the second conductor are the same.

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