Automatic needling system

Abstract

The invention relates to the field of wafer testing, in particular to an automatic needling system. The invention provides an automatic needle planting system which comprises a vertical needle arranging mechanism at least comprising a vertical needle arranging disc; the vertical needle placing disc is used for automatically arraying the probes, so that the probes are kept in a vertical state and are transferred to the automatic needle taking mechanism; the vertical adsorption mechanism is used for vertically adsorbing the probe in a vacuum adsorption manner so as to realize vertical probe taking or probe planting operation; the automatic needle taking mechanism is used for installing a vertical needle placing disc and cooperatively works with the vertical adsorption mechanism to complete vertical needle taking operation; the automatic needling mechanism is used for providing a needling plate and cooperating with the vertical adsorption mechanism to complete vertical needling operation at different needling positions of the needling plate; and the probe is a symmetric POGOPIN probe. According to the invention, the high-speed automatic needle planting process is realized by accurately controlling the vertical needle taking and vertical needle planting modes, the equipment cost is reduced, and the needle planting efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of wafer testing, and more particularly to an automatic needle implantation system for a symmetrical POGOPIN probe. Background Art

[0002] In the semiconductor manufacturing process, the wafer testing phase is a crucial step. At this stage, in order to ensure the quality and function of the wafer, the test engineer will use a special tool - a probe card. The role of the probe card is to connect the wafer to the PCB (Printed Circuit Board) through a technology called MLC (Multi-Layer Ceramic) to conduct functional testing.

[0003] With the advancement of chip manufacturing technology, the size of MLC has gradually increased. This size change has brought new challenges to wafer testing. Traditional welding methods can no longer guarantee stable conduction between MLC and PCB, which directly affects the accuracy and reliability of testing.

[0004] To solve this problem, the newly developed probe card uses POGOPIN probes to achieve the conduction of the circuit between MLC and PCB. POGOPIN probes are small in size, but they are also fragile and their surfaces are easily scratched or damaged. Therefore, in the process of making probe cards, these probes need to be accurately installed in the pin implantation plate. However, this installation process is quite complicated and requires a high degree of precision and delicate operation.

[0005] At present, the automated implantation process for POGOPIN probes mainly relies on horizontal loading with a flexible vibration plate. These probes are handed over by a robot and need to undergo multiple posture detections and compensations before a single needle can be implanted. However, this implantation method is inefficient, the equipment cost is high, and it is difficult and inflexible to adapt to multiple different types of probes.

[0006] In view of the above problems, there is an urgent need to optimize the existing POGOPIN probe automated implantation process. Summary of the invention

[0007] The purpose of the present invention is to provide an automatic needle implantation system to solve the problems of low efficiency and high cost of automatic needle implantation for POGOPIN probes in the prior art.

[0008] Another object of the present invention is to provide an automatic needle implantation system to solve the problems of the prior art in adapting a variety of different types of POGOPIN probes during the automated needle implantation process, which is difficult and lacks flexibility.

[0009] In order to achieve the above-mentioned object, the present invention provides an automatic needle implantation system, including a vertical needle swinging mechanism, a vertical adsorption mechanism, an automatic needle removal mechanism and an automatic needle implantation mechanism:

[0010] The vertical oscillating needle mechanism at least comprises a vertical oscillating needle disk;

[0011] The vertical oscillating needle disk is used to automatically align the probes so that the probes remain in a vertical state, and transfer the probes to the automatic needle removal mechanism in a vertical state;

[0012] The probe is a symmetrical POGOPIN probe;

[0013] The vertical adsorption mechanism vertically absorbs the probe by vacuum adsorption and performs linear reciprocating movement along the X-axis and Z-axis directions to achieve vertical needle removal or needle implantation operations;

[0014] The automatic needle removal mechanism is used to install the vertical oscillating needle disk and perform linear reciprocating movement along the Y-axis direction, working in conjunction with the vertical adsorption mechanism to complete the vertical needle removal operation;

[0015] The automatic needle implanting mechanism is used to provide a needle implanting plate and move the needle implanting plate back and forth in a straight line along the Y-axis direction, working in coordination with the vertical adsorption mechanism to complete the vertical needle implanting operation at different needle implanting positions of the needle implanting plate.

[0016] In some embodiments, the vertical needle swing mechanism further includes a rotary aligning machine:

[0017] The vertical oscillating needle disk is installed on a rotary aligning machine;

[0018] The rotary aligning machine maintains the probe in a vertical state in the vertical pendulum disk by means of vibration screening.

[0019] In some embodiments, the vertical pendulum disk is provided with a plurality of positioning holes arranged in a certain arrangement:

[0020] The positioning holes are used to align and fix the positions of the probes to keep the probes in a vertical state;

[0021] The positioning hole comprises a guiding inclined surface and a positioning channel;

[0022] The guide slope is arranged at the upper part of the positioning hole and extends downward at a specific inclination angle to guide the probe into the positioning hole;

[0023] The positioning channel is connected to the lower side of the guiding inclined surface and is a vertical channel structure for receiving the probe and ensuring that the probe is in a vertical state.

[0024] In some embodiments, the guiding slope is composed of a slope with an inclination angle of 70 to 90 degrees and a rounded corner of R2 to R4;

[0025] The difference between the inner diameter of the positioning channel and the outer diameter of the probe is 0.01 to 0.03 mm.

[0026] In some embodiments, the guiding slope is composed of a 75-degree slope and an R3 fillet;

[0027] The inner diameter of the positioning channel is 0.01 mm larger than the outer diameter of the probe.

[0028] In some embodiments, the automatic needle implantation system further comprises a device base:

[0029] The equipment base is a frame structure for installing a vertical adsorption mechanism, an automatic needle removal mechanism, and an automatic needle implantation mechanism;

[0030] Among them, the automatic needle removal mechanism and the automatic needle implantation mechanism are arranged side by side.

[0031] In some embodiments, the vertical adsorption mechanism includes a vertical adsorption component and a Z-axis motion stage:

[0032] The vertical adsorption assembly is mounted on the Z-axis motion table and vertically adsorbs and places the probe by vacuum adsorption;

[0033] The Z-axis motion table is used to realize the linear reciprocating movement of the vertical adsorption component along the Z-axis direction.

[0034] In some embodiments, the vertical adsorption mechanism further includes an X-axis motion platform and an equal height seat:

[0035] The X-axis motion table is used to install the Z-axis motion table to achieve linear reciprocating movement of the vertical adsorption component in the X-axis direction;

[0036] The iso-height seat is used to fix the X-axis motion table to provide support.

[0037] In some embodiments, the vertical adsorption assembly includes a suction nozzle, a quick-change part, and a quick-change base;

[0038] The suction nozzle is used to vertically absorb and fix the probe so that the probe remains in a vertical state during the absorption and movement process;

[0039] The suction nozzle is installed on the quick-change base through a quick-change part;

[0040] The quick-change part is used to install and replace different suction nozzles;

[0041] The quick-change base is used to fix the quick-change parts.

[0042] In some embodiments, the vertical adsorption assembly further includes an angle adjustment member:

[0043] The angle adjustment member is mounted on the Z-axis motion table and is used to be mounted and connected to the quick-change base to adjust the posture of the suction nozzle.

[0044] In some embodiments, the vertical adsorption assembly further includes a first positioning camera and a first camera mount:

[0045] The first positioning camera is mounted on the first camera mount and is used to detect and compensate for position errors during probe suction and implantation;

[0046] The first camera holder is mounted on the Z-axis motion table.

[0047] In some embodiments, the automatic needle implantation mechanism includes a needle implantation motion platform, a needle implantation plate, and a needle implantation plate quick-change seat:

[0048] The needle implanting plate is installed on the needle implanting plate quick-change seat;

[0049] The needle implanting plate quick-change seat is installed on the needle implanting motion platform and is used to fix the needle implanting plate and realize the replacement of the needle implanting plate;

[0050] The needle implanting motion platform is used to realize linear reciprocating movement of the needle implanting plate along the Y-axis direction.

[0051] In some embodiments, the automatic needle implantation mechanism includes a second positioning camera and a second camera mount:

[0052] The second positioning camera is mounted on the second camera holder and is used to detect and compensate for the position deviation of the needle tip relative to the center of the nozzle after the probe is adsorbed.

[0053] In some embodiments, the automatic needle removal mechanism comprises a needle removal motion platform:

[0054] The needle-taking motion platform is used to place the vertical oscillating needle disk, so as to realize the linear reciprocating movement of the vertical oscillating needle disk along the Y-axis direction.

[0055] In some embodiments, the vertical adsorption mechanism uses an electric servo cylinder as an actuator to achieve linear reciprocating movement along the X-axis and Z-axis directions;

[0056] The automatic needle removal mechanism uses an electric servo cylinder as an actuator to achieve linear reciprocating movement along the Y-axis direction;

[0057] The automatic needle implantation mechanism uses an electric servo cylinder as an actuator to achieve linear reciprocating movement along the Y-axis direction.

[0058] The present invention provides an automatic needle implantation system, which realizes a high-speed automated needle implantation process for symmetrical POGOPIN probes by precisely controlling vertical needle extraction and vertical needle implantation, effectively avoids the problem of robot handover, reduces the difficulty of probe posture compensation, and provides a structure that is easy to quickly replace and adjust, thereby reducing equipment costs and improving needle implantation efficiency and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which the same reference numerals always represent the same features.

[0060] in:

[0061] Figure 1 The overall structure diagram of the automatic needle implantation system according to one embodiment of the present invention is disclosed;

[0062] Figure 2a A three-dimensional structural diagram of a vertical oscillating needle disk according to an embodiment of the present invention is disclosed;

[0063] Figure 2b A schematic cross-sectional view of a vertical oscillating needle disk according to an embodiment of the present invention is disclosed;

[0064] Figure 3 A schematic structural diagram of a vertical adsorption assembly according to an embodiment of the present invention is disclosed;

[0065] Figure 4 A partial schematic diagram of a nozzle according to an embodiment of the present invention is disclosed;

[0066] Figure 5a A front view of a nozzle quick-change structure according to an embodiment of the present invention is disclosed;

[0067] Figure 5b A cross-sectional view of a nozzle quick-change structure according to an embodiment of the present invention is disclosed;

[0068] Figure 6a A schematic structural diagram of a needle removal motion platform according to an embodiment of the present invention is disclosed;

[0069] Figure 6b A schematic structural diagram of a needle implantation motion platform according to an embodiment of the present invention is disclosed;

[0070] Figure 7 A schematic diagram of the working process of an automatic needle implantation system according to an embodiment of the present invention is disclosed.

[0071] The meanings of the reference numerals in the figures are as follows:

[0072] 1Vertical swing needle mechanism;

[0073] 11 Rotary aligner;

[0074] 12 vertical pendulum needle disc;

[0075] 120 positioning holes

[0076] 121 guiding slope;

[0077] 122 positioning channel;

[0078] 2Vertical adsorption mechanism;

[0079] 21X axis motion table;

[0080] 22nd level high seats;

[0081] 23Z-axis motion table;

[0082] 24 vertical adsorption components;

[0083] 241 nozzle;

[0084] 242 quick-change parts;

[0085] 243 quick change base;

[0086] 244 Angle adjustment member;

[0087] 245 first positioning camera;

[0088] 246 First Camera Mount;

[0089] 3 needle removal exercise table;

[0090] 4 needle implantation exercise platform;

[0091] 41 needle implantation plate;

[0092] 42 Needle plate quick change seat;

[0093] 43 second positioning camera;

[0094] 44 second camera mount;

[0095] 5. Equipment base. DETAILED DESCRIPTION

[0096] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and are not used to limit the invention.

[0097] In response to the above technical problems, the present invention provides an automatic needle implantation system applied to a symmetrical POGOPIN probe, which optimizes the process for the symmetrical POGOPIN probe and achieves high-speed automatic needle implantation by vertical needle removal and vertical needle implantation, thereby avoiding robot handover, reducing the difficulty of probe posture compensation, reducing equipment costs and improving needle implantation efficiency.

[0098] The present invention proposes an automatic needle implantation system, comprising a vertical needle swinging mechanism, a vertical adsorption mechanism, an automatic needle removal mechanism and an automatic needle implantation mechanism:

[0099] The vertical oscillating needle mechanism at least comprises a vertical oscillating needle disk;

[0100] The vertical oscillating needle disk is used to automatically align the probes so that the probes remain in a vertical state, and transfer the probes to the automatic needle removal mechanism in a vertical state;

[0101] The probe is a symmetrical POGOPIN probe;

[0102] The vertical adsorption mechanism vertically absorbs the probe by vacuum adsorption and performs linear reciprocating movement along the X-axis and Z-axis directions to achieve vertical needle removal or needle implantation operations;

[0103] The automatic needle removal mechanism is used to install the vertical oscillating needle disk and perform linear reciprocating movement along the Y-axis direction, working in conjunction with the vertical adsorption mechanism to complete the vertical needle removal operation;

[0104] The automatic needle implanting mechanism is used to provide a needle implanting plate and move the needle implanting plate back and forth in a straight line along the Y-axis direction, working in coordination with the vertical adsorption mechanism to complete the vertical needle implanting operation at different needle implanting positions of the needle implanting plate.

[0105] POGOPIN probe is a type of probe used for testing electronic components or circuits, especially in applications involving fine contact and precise positioning. For symmetrical POGOPIN probes, it means that the shape, size, angle, etc. of the needle tip on both sides of the probe are the same. For asymmetrical POGOPIN probes, there is a difference in shape, function or size on both sides of the probe.

[0106] In the present invention, the probe is a symmetrical POGOPIN probe, and does not involve an asymmetrical POGOPIN probe.

[0107] Figure 1 The overall structure diagram of the automatic needle implantation system according to one embodiment of the present invention is disclosed. Figure 1 As shown, the present invention provides an automatic needle implantation system for a symmetrical POGOPIN probe, comprising a vertical needle swinging mechanism 1, a vertical adsorption mechanism 2, an automatic needle removal mechanism and an automatic needle implantation mechanism:

[0108] Furthermore, the automatic needle removal mechanism at least comprises a needle removal motion platform 3;

[0109] Furthermore, the automatic needle implantation mechanism at least includes a needle implantation movement platform 4.

[0110] Furthermore, the automatic needle implantation system further comprises a device base 5:

[0111] The equipment base 5 is a frame structure for installing the vertical adsorption mechanism 2, the automatic needle removal mechanism and the automatic needle implantation mechanism;

[0112] Among them, the automatic needle removal mechanism and the automatic needle implantation mechanism are arranged side by side.

[0113] like Figure 1 As shown, the distribution direction of the needle removal motion platform 3 and the needle implantation motion platform 4 is the X-axis direction, the horizontal direction perpendicular to the X-axis direction is the Y-axis direction, and the vertical direction is the Z-axis direction. The vertical direction of vertical needle removal or vertical needle implantation in this embodiment refers to the Z-axis direction.

[0114] Next, we will combine Figure 1 and Figure 2a , Figure 2b To explain the vertical swing needle mechanism proposed by the present invention.

[0115] Furthermore, the vertical needle swing mechanism 1 includes a vertical needle swing disk 12 and a rotary aligning machine 11:

[0116] The vertical pendulum needle disk 12 is installed on the rotary aligning machine 11 to automatically align the POGOPIN probes;

[0117] The rotary aligning machine 11 maintains the probe in a vertical state in the vertical pendulum disk 12 by means of vibration screening.

[0118] Among them, the rotary arranging machine 11 can adopt existing technical equipment, such as equipment that can be purchased on the market, which is mainly composed of a base, a vibration motor, a turning mechanism, a loading plate, a controller and other components, which will not be described in detail here.

[0119] Figure 2a The three-dimensional structure diagram of the vertical oscillating needle disk according to an embodiment of the present invention is disclosed. Figure 2b A cross-sectional schematic diagram of a vertical oscillating needle disk according to an embodiment of the present invention is disclosed, as shown in FIG. Figure 2a and Figure 2b As shown, the vertical pendulum needle disk 12 is provided with a plurality of arranged positioning holes 120, which are used to keep the probes in a straight line and to constrain the positions of the probes to prevent position deviation. The design of these positioning holes ensures that only one probe in each hole is in a vertical state:

[0120] Furthermore, the positioning holes 120 are used to align and fix the positions of the probes to keep the probes in a vertical state;

[0121] The positioning hole 120 includes a guiding inclined surface 121 and a positioning channel 122;

[0122] The guide slope 121 is disposed at the upper portion of the positioning hole 120 and extends downward at a specific inclination angle to guide the probe into the positioning hole 120;

[0123] The positioning channel 122 is connected to the lower side of the guiding inclined surface 121 and is a vertical channel structure for receiving the probe and ensuring that the probe is in a vertical state.

[0124] Furthermore, the guide slope 121 is a specially designed curved surface that can better guide the probe to enter the positioning hole 120 along a predetermined path and guide excess probe to slide out when the inclination angle is too large.

[0125] The guide slope consists of a slope with an angle of 70 to 90 degrees and a radius of R2 to R4, ensuring that the probe has a penetration rate of more than 95% while minimizing the space occupied. Once the probe enters the positioning hole, this slope design also ensures that the probe can automatically leave the slope and return to the storage area after experiencing vibration during the cleaning process, thus avoiding the need for manual cleaning.

[0126] Among them, fillets R2, R3 and R4 in mechanical drawing and engineering drawing respectively indicate that the radius of the circle tangent to the two sides of a corner is 2mm, 3mm and 4mm.

[0127] Preferably, the guiding slope is composed of a 75-degree slope and an R3 fillet.

[0128] Furthermore, the inner wall of the positioning channel 122 is processed by precision machining technology to ensure the accuracy of its size and shape, so that the vertical deflection angle of the probe meets the requirements.

[0129] The difference between the inner diameter of the positioning channel and the outer diameter of the probe is 0.01 to 0.03 mm, which can ensure that the vertical deviation angle of the probe after entering the hole is less than 0.8°, meeting the accuracy requirement of vertical adsorption.

[0130] Preferably, the inner diameter of the positioning channel 122 is 0.01 mm larger than the outer diameter of the probe.

[0131] Since the incoming POGOPINs are usually in a disordered mixed packaging form, in order to realize the automation of the needle implantation process, it is first necessary to screen and arrange these disordered POGOPINs through a vertical needle swing mechanism to meet the needs of equipment automation.

[0132] The working mechanism of the vertical swing needle mechanism is:

[0133] 1) Probe alignment: When the rotary aligner 11 starts vibrating and screening, the probe enters the positioning hole 120 through the guide slope 121 of the vertical pendulum disk 12 under the action of vibration.

[0134] The design of the guide slope 121 greatly increases the efficiency and accuracy of the probe entering the hole. The penetration rate of the probe in a single cycle is greater than 97%, which significantly improves the automation efficiency of the system and reduces the risk of misalignment of the probe.

[0135] 2) Cleaning procedure: When the rotary aligner 11 performs the cleaning procedure, the inclination angle of the vertical needle plate 12 is greater than 20°. At this time, the redundant probes in the positioning holes 120 will slide out along the guide slope 121, thereby ensuring that there is only one probe in each positioning hole 120 that maintains a vertical posture, avoiding repeated accumulation of probes. This design can achieve automatic cleaning without manual intervention.

[0136] The positioning channel 122 can further maintain the vertical state of the probe to avoid tilting during subsequent operations. The positioning channel 122 is designed to make the vertical deflection angle of the probe less than 0.8°, thereby reducing the difficulty of visual compensation when the system clamps the needle tip, and positioning compensation can be completed using only one camera.

[0137] After being arranged in a vertical oscillating needle mechanism, the positioning posture of the POGOPIN probe is consistent with the implantation posture, thereby omitting the step of adjusting the probe posture. Therefore, the use of multiple adjustment motion tables and corresponding detection cameras can be avoided, thereby reducing the overall cost of the equipment and improving the efficiency of the implantation operation.

[0138] Next, we will combine Figure 1 and Figure 3 To illustrate the vertical adsorption mechanism proposed by the present invention.

[0139] like Figure 1 As shown, the vertical adsorption mechanism 2 includes a vertical adsorption component 24 and a Z-axis motion table 23:

[0140] The vertical adsorption assembly 24 is mounted on the Z-axis motion table 23 and vertically adsorbs and places the probe by vacuum adsorption;

[0141] The Z-axis motion platform 23 is used to realize the linear reciprocating movement of the vertical adsorption component 24 along the Z-axis direction.

[0142] Furthermore, the vertical adsorption mechanism 2 further includes an X-axis motion table 21 and a height-adjusting seat 22:

[0143] The X-axis motion table 21 is used to install the Z-axis motion table 23 to achieve linear reciprocating movement of the vertical adsorption component 24 in the X-axis direction;

[0144] The contour seat 22 is used to fix the X-axis motion table 21 to provide support.

[0145] The equal height seat 22 is installed on the equipment base 5.

[0146] Figure 3 A schematic diagram of a vertical adsorption assembly according to an embodiment of the present invention is disclosed. Figure 1 and Figure 3 As shown, the vertical adsorption assembly 24 at least includes a suction nozzle 241, a quick-change component 242 and a quick-change base 243:

[0147] The suction nozzle 241 is used to vertically absorb and fix the probe, so that the probe maintains a vertical posture during the absorption, movement and implantation process, and the probe is tightly fixed by the absorption force to ensure the stability of the probe;

[0148] The quick-change member 242 is used to realize the quick installation and replacement of the suction nozzle 241. As an intermediate interface, the suction nozzle 241 can be quickly and accurately positioned during installation through a snap-on or locking structure.

[0149] The quick-change base 243 is used to fix the quick-change component 242, provide stable support, and is responsible for maintaining the position of the quick-change component 242. At the same time, it provides a stable foundation so that the quick-change component 242 does not shift when the suction nozzle is replaced.

[0150] The suction nozzle 241, the quick-change part 242 and the quick-change base 243 serve as a quick-change structure for the suction nozzle, which realizes rapid replacement and precise positioning of the suction nozzle. The suction nozzle 241 is used to vertically adsorb the probe, and the function of rapid replacement of the suction nozzle is realized through the connection structure of the quick-change part 242 and the quick-change base 243.

[0151] The nozzle quick-change structure can adapt to a variety of different types of probes, quickly respond to the needs of different needle implantation tasks, and improve needle implantation efficiency and accuracy.

[0152] Figure 4 A partial schematic diagram of a nozzle according to an embodiment of the present invention is disclosed. Figure 5a A front view of a nozzle quick-change structure according to an embodiment of the present invention is disclosed. Figure 5b Revealed Figure 5a The cross-sectional view of the nozzle quick change structure along the AA section is shown in the figure. Figure 4 , Figure 5a and Figure 5b As shown, the suction nozzle 241 is used to vertically absorb and fix the probe so that the probe remains in a vertical state during the absorption and movement process;

[0153] The suction nozzle 241 is mounted on a quick-change component 242 and is mounted on a quick-change base 243 through the quick-change component 242;

[0154] The quick-change member 242 is mounted on the quick-change base 243 to realize the quick installation and replacement of different suction nozzles;

[0155] The quick-change base 243 is used to fix the quick-change component 242 .

[0156] More specifically, the suction nozzle 241 is conical, with a sharp lower end for precise contact with the probe, and has suction holes for applying vacuum. The upper part of the suction nozzle 241 is wider, which is convenient for connecting with the quick-change part 242.

[0157] When the probe model needs to be changed, variant production can be achieved by simply replacing the suction nozzle 241 and the vertical pendulum needle disk 12, thereby avoiding complicated adjustment steps and improving production efficiency and equipment application range.

[0158] More specifically, the quick-change component 242 is located above the suction nozzle 241 , is sleeve-shaped, and has a matching groove or a locking structure to facilitate the fixation of the suction nozzle 241 .

[0159] The quick-change component 242 is designed with a center hole inside, which is aligned with the suction nozzle 241 to achieve self-centering installation and meet the position accuracy requirements.

[0160] The self-centering design of the quick-change part 242 ensures that the suction nozzle 241 can quickly return to the precise center position after replacement, thereby ensuring the stability of the suction nozzle position and meeting the precise needle removal and implantation requirements.

[0161] More specifically, the quick-change base 243 is cylindrical and has a cavity inside for accommodating the quick-change component 242 .

[0162] After the quick-change member 242 is inserted into the quick-change base 243, the entire nozzle quick-change structure is fixed by the structural features of the base (such as a slot or a bolt), ensuring that the positioning accuracy of the nozzle will not be affected by vibration during operation of the system.

[0163] The quick-change base 243 is provided with a fixing hole or a positioning structure so as to be connected to the angle adjustment member 244 .

[0164] Furthermore, the vertical adsorption assembly 24 further includes an angle adjustment member 244:

[0165] The angle adjustment member 244 is mounted on the Z-axis motion table 23 and is used to be mounted and connected to the quick-change base 243 to adjust the posture of the suction nozzle 241 .

[0166] The angle adjustment member 244 of the present invention can adjust the posture of the suction nozzle to ensure that the suction nozzle remains vertical or at a required specific angle during needle removal and needle implantation, so that the suction nozzle can adapt to slight position deviations of the probe, further ensuring the vertical positioning of the probe.

[0167] Furthermore, the vertical adsorption assembly 24 further includes a first positioning camera 245 and a first camera seat 246:

[0168] The first positioning camera 245 is mounted on the first camera mount 246 and is used to detect and compensate for position errors during probe suction and implantation;

[0169] The compensated coordinates ensure that the nozzle can be accurately aligned with the tip of each probe, reducing adsorption deviation.

[0170] The first camera mount 246 is mounted on the Z-axis motion table 23 .

[0171] The vertical adsorption mechanism 2 clamps and moves the POGOPIN probe by vacuum adsorption. This method can ensure that the probe clamping force is stable and controllable, and avoid scratches on the outer surface of the probe.

[0172] By precisely controlling the dimensional accuracy of the matching parts of the suction nozzle and the probe, after the suction nozzle 241 vertically adsorbs the probe, the vertical deflection angle of the probe is less than 0.6°, and the maximum deviation of the needle body is less than 10μm.

[0173] Figure 6a The structure diagram of the needle removal motion platform according to one embodiment of the present invention is disclosed. Figure 6a As shown, the automatic needle removal mechanism includes a needle removal motion platform 3:

[0174] The needle removal motion platform 3 supports the stable movement of the vertical needle disk 12 and provides an accurate Y-axis positioning function.

[0175] The vertical oscillating needle disk 12 is installed on the needle removal motion platform 3;

[0176] The needle-taking motion platform 3 is used to realize the reciprocating motion of the vertical needle-oscillating disk 12 along the Y-axis direction.

[0177] The needle removal motion platform 3 is mounted on the equipment base 5 through its bottom to ensure stability.

[0178] Furthermore, the needle removal motion platform 3 is a rectangular platform structure, and is equipped with a linear guide rail and an electric servo cylinder assembly.

[0179] A fixing device for the vertically swinging needle disk 12 is installed above the needle-removing motion platform 3;

[0180] The needle-taking motion platform 3 has two parallel guide rails on its surface, which are used to support the Y-axis movement of the vertical needle-swinging disk 12. The arrangement of the guide rails ensures smooth movement with high precision.

[0181] In this embodiment, the needle removal motion platform 3 uses an electric servo cylinder as an actuator, and realizes Y-axis reciprocating motion through precise displacement control, so that the vertical oscillating needle disk 12 can accurately reach each needle removal position.

[0182] Figure 6b The structure diagram of the needle implantation motion platform according to one embodiment of the present invention is disclosed. Figure 6b As shown, the automatic needle implantation mechanism includes a needle implantation motion platform 4, a needle implantation plate 41 and a needle implantation plate quick-change seat 42:

[0183] The needle implantation plate 41 is mounted on the needle implantation plate quick-change seat 42 and is used for probe implantation;

[0184] The needle implantation plate 41 is provided with probe implantation holes to ensure that the probe is implanted at a set position and angle.

[0185] The needle implanting plate 41 is installed through the needle implanting plate quick-change seat 42, which is convenient for quickly replacing the needle implanting plate when different models or specifications of probes are required to be implanted.

[0186] The needle implanting plate quick-change seat 42 is installed on the needle implanting motion platform 4, and is used to fix the needle implanting plate 41 and realize the quick replacement of the needle implanting plate 41;

[0187] The needle implanting plate quick-change seat 42 can not only firmly fix the needle implanting plate 41, but also has the function of quick changeover, so that the needle implanting plate 41 can be efficiently replaced when replacing the probe or switching the working mode, thereby improving the overall operating efficiency.

[0188] The needle implanting motion platform 4 is used to realize the linear reciprocating movement of the needle implanting plate 41 along the Y-axis direction.

[0189] The needle implant movement platform 4 is installed on the equipment base 5 .

[0190] The structure of the needle implanting motion platform 4 is similar to that of the needle removing motion platform 3, except that a fixed installation position for a needle implanting plate quick-change seat 42 is provided on the top thereof.

[0191] Furthermore, the automatic needle implantation mechanism includes a second positioning camera 43 and a second camera holder 44:

[0192] The second positioning camera 43 is mounted on the second camera holder 44 and is used to detect and compensate for the position deviation of the needle tip relative to the center of the nozzle after the probe is adsorbed. This process is to ensure the accuracy of the probe position during the adsorption process and reduce the position error in the subsequent needle implantation process.

[0193] The second camera mount 44 is installed on the device base 5 .

[0194] The present invention uses the first positioning camera 245 and the second positioning camera 43 for position compensation during the needle removal and needle implantation process. The two cameras detect the position deviation of the probe tip and perform position compensation before needle removal and needle implantation, thereby ensuring the position accuracy of the probe during the entire process.

[0195] In particular, the first positioning camera 245 performs initial compensation on the needle tip position to ensure that the nozzle is accurately aligned with the probe, while the second positioning camera 43 performs secondary correction on the position of the adsorbed probe after the needle is removed to ensure that the probe can maintain an ideal positioning before entering the needle implantation step.

[0196] The X-axis motion table 21, Z-axis motion table 23, needle removal motion table 3 and needle implantation motion table 4 in the present invention cover operations in three directions of X, Y and Z, realizing precise movement from needle removal to needle implantation. Combined with the vertical state of the probe throughout the process, it can realize the automatic vertical arrangement, vertical placement and vertical implantation of POGOPIN probes, which is suitable for high-precision and high-efficiency probe implantation needs.

[0197] The X-axis motion table 21, Z-axis motion table 23, needle removal motion table 3 and needle implantation motion table 4 in the present invention use electric servo cylinders as actuators to ensure that the system can maintain a high repeatability accuracy (less than 5 μm), so that the probe position error does not exceed 15 μm after compensation, thereby meeting the precision requirement of the needle implantation hole (within 20 μm). Therefore, it can be directly implanted into the target hole without posture adjustment.

[0198] Figure 7 The schematic diagram of the working process of the automatic needle implantation system according to an embodiment of the present invention is disclosed. Next, the above contents and Figure 7 , the working process of the automatic needle implantation system proposed in the present invention is elaborated in detail.

[0199] Step S1, aligning the probes.

[0200] The POGOPIN probes arrive at the device in an out-of-order state.

[0201] The vertical oscillating needle disk 12 is installed on the rotary aligning machine 11 , and a batch of probes are placed in the vertical oscillating needle disk 12 .

[0202] The rotary aligning machine 11 starts to vibrate, and the probe enters the positioning channel 122 through the guiding inclined surface 121 of the positioning hole, and the probe is gradually automatically aligned to a vertical state.

[0203] The guide slope 121 can increase the probability of the probe entering the positioning hole 120, ensuring that the penetration rate is greater than 97%. At the same time, when the vertical pendulum needle plate 12 is tilted more than 20 degrees, the redundant probe will automatically slide out to achieve the vertical effect of a single probe in the positioning hole.

[0204] Step S2, transferring the vertical oscillating needle disk to the needle removal motion platform.

[0205] After the alignment is completed, the vertical needle disc 12 is removed from the rotary alignment machine 11 and installed and fixed on the needle removal motion platform 3.

[0206] The needle removal motion platform 3 reciprocates in the Y-axis direction, so that different areas of the vertical needle disk 12 enter the needle removal position in sequence, ready for the next needle removal operation.

[0207] Step S3: Probe position detection and coordinate compensation

[0208] The X-axis motion table 21 , the Z-axis motion table 23 and the needle removal motion table 3 move in coordination, driving the first positioning camera 245 to move above the vertical needle-oscillating disk 12 .

[0209] The first positioning camera 245 is moved according to the pre-input coordinate hole position, and the first positioning camera 245 visually detects the positions of the probe tips in all vertical pendulum needle disks 12 in sequence, and calculates the deviation of the probe tip positions relative to the center of the field of view.

[0210] By calculating the position deviation of the probe tip and superimposing it on the preset coordinates, compensation is performed to obtain the actual needle coordinates of each probe. These coordinate data will be used in subsequent suction operations to ensure that each adsorption is directly above the needle tip position.

[0211] Step S4, remove the needle.

[0212] According to the actual needle removal coordinates after compensation, the X-axis motion table 21 and the Z-axis motion table 23 accurately move the suction nozzle 241 to the position directly above the probe tip.

[0213] The vacuum adsorption function of the suction nozzle is activated, and the suction nozzle adsorbs the probe in a vertical manner, so that the probe tip remains in a vertical position and is separated from the vertical pendulum needle disk 12. The design of the suction nozzle ensures that the vertical deflection angle of the probe is less than 0.6° and the maximum deviation of the needle body is less than 10 μm.

[0214] Step S5: secondary positioning compensation.

[0215] After the probe is adsorbed, the X-axis motion stage 21 moves the probe carried by the suction nozzle to directly above the second positioning camera 43 .

[0216] The second positioning camera 43 detects the position deviation of the probe relative to the center of the nozzle after adsorption to ensure the verticality and position accuracy of the probe.

[0217] According to the detection result of the second positioning camera 43, the position of the probe is fine-tuned and compensated to further reduce the position error and ensure that the probe is accurate in the subsequent implantation step.

[0218] Step S6, needle position detection and compensation.

[0219] After the probe position compensation is completed, the X-axis motion table 21 and the Z-axis motion table 23 move the first positioning camera 245 to the top of the needle implantation plate 41 to detect the position of the needle implantation hole. The first positioning camera 245 obtains the coordinate deviation of the needle implantation hole so as to perform corresponding coordinate compensation during the needle implantation process.

[0220] By superimposing the compensation of the probe tip position and the compensation of the implant hole position, the actual implant position coordinates of the probe are obtained. This step ensures that the probe is aligned with the hole position during implantation, improving the implantation accuracy.

[0221] Step S7, needle implantation.

[0222] According to the compensated coordinates, move the probe to the position directly above the pin hole.

[0223] The Z-axis motion table 23 moves down slowly, driving the suction nozzle to implant the probe into the hole of the needle implantation plate, ensuring that the probe is inserted vertically and meets the hole matching accuracy (20 μm).

[0224] After the probe is inserted into place, the nozzle separates the probe by blowing air, so that it is firmly implanted in the bottom of the hole.

[0225] Step S8, needle implantation cycle.

[0226] After the needle implantation is completed, the Z-axis motion table 23 moves upward to the standby position.

[0227] The system returns to the needle removal position for the next probe and repeats the above process until all probes are implanted.

[0228] Although the above methods are illustrated and described as a series of actions for simplicity of explanation, it should be understood and appreciated that these methods are not limited by the order of the actions, because according to one or more embodiments, some actions may occur in a different order and / or concurrently with other actions from those illustrated and described herein or not illustrated and described herein but understandable to those skilled in the art.

[0229] The automatic needle implantation system proposed in the present invention ensures that the probe remains in a vertical state throughout the entire process from alignment, needle removal, compensation, implantation to separation through the coordinated work of multiple motion platforms, suction nozzles, cameras and alignment equipment. Through precise visual inspection and displacement compensation, high accuracy and high stability of the probe implantation position are guaranteed.

[0230] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0231] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Persons familiar with the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. An automatic needle implantation system, characterized in that: Including vertical needle swing mechanism, vertical adsorption mechanism, automatic needle removal mechanism and automatic needle implantation mechanism: The vertical oscillating needle mechanism at least comprises a vertical oscillating needle disk; The vertical oscillating needle disk is used to automatically align the probes so that the probes remain in a vertical state, and transfer the probes to the automatic needle removal mechanism in a vertical state; The probe is a symmetrical POGOPIN probe; The vertical adsorption mechanism vertically absorbs the probe by vacuum adsorption and performs linear reciprocating movement along the X-axis and Z-axis directions to achieve vertical needle removal or needle implantation operations; The automatic needle removal mechanism is used to install the vertical oscillating needle disk and perform linear reciprocating movement along the Y-axis direction, working in conjunction with the vertical adsorption mechanism to complete the vertical needle removal operation; The automatic needle implanting mechanism is used to provide a needle implanting plate and move the needle implanting plate back and forth in a straight line along the Y-axis direction, working in coordination with the vertical adsorption mechanism to complete the vertical needle implanting operation at different needle implanting positions of the needle implanting plate.

2. The automatic needle implantation system according to claim 1, characterized in that: The vertical needle swing mechanism also includes a rotary aligning machine: The vertical oscillating needle disk is installed on a rotary aligning machine; The rotary aligning machine maintains the probe in a vertical state in the vertical pendulum disk by means of vibration screening.

3. The automatic needle implantation system according to claim 1, characterized in that: The vertical oscillating needle disk is provided with a plurality of positioning holes arranged in a distributed manner: The positioning holes are used to align and fix the positions of the probes to keep the probes in a vertical state; The positioning hole comprises a guiding inclined surface and a positioning channel; The guide slope is arranged at the upper part of the positioning hole and extends downward at a specific inclination angle to guide the probe into the positioning hole; The positioning channel is connected to the lower side of the guiding inclined surface and is a vertical channel structure for receiving the probe and ensuring that the probe is in a vertical state.

4. The automatic needle implantation system according to claim 3, characterized in that: The guide slope is composed of a slope with an inclination angle of 70 to 90 degrees and a rounded corner of R2 to R4; The difference between the inner diameter of the positioning channel and the outer diameter of the probe is 0.01 to 0.03 mm.

5. The automatic needle implantation system according to claim 1, characterized in that: The vertical adsorption mechanism includes a vertical adsorption component and a Z-axis motion table: The vertical adsorption assembly is mounted on the Z-axis motion table and vertically adsorbs and places the probe by vacuum adsorption; The Z-axis motion table is used to realize the linear reciprocating movement of the vertical adsorption component along the Z-axis direction.

6. The automatic needle implantation system according to claim 5, characterized in that: The vertical adsorption mechanism also includes an X-axis motion platform and an equal height seat: The X-axis motion table is used to install the Z-axis motion table to achieve linear reciprocating movement of the vertical adsorption component in the X-axis direction; The iso-height seat is used to fix the X-axis motion table to provide support.

7. The automatic needle implantation system according to claim 5, characterized in that: The vertical adsorption assembly includes a suction nozzle, a quick-change part and a quick-change base; The suction nozzle is used to vertically absorb and fix the probe so that the probe remains in a vertical state during the absorption and movement process; The suction nozzle is installed on the quick-change base through a quick-change part; The quick-change part is used to install and replace different suction nozzles; The quick-change base is used to fix the quick-change parts.

8. The automatic needle implantation system according to claim 7, characterized in that: The vertical adsorption assembly also includes an angle adjustment member: The angle adjustment member is mounted on the Z-axis motion table and is used to be mounted and connected to the quick-change base to adjust the posture of the suction nozzle.

9. The automatic needle implantation system according to claim 5, characterized in that: The vertical adsorption assembly also includes a first positioning camera and a first camera mount: The first positioning camera is mounted on the first camera mount and is used to detect and compensate for position errors during probe suction and implantation; The first camera holder is mounted on the Z-axis motion table.

10. The automatic needle implantation system according to claim 1, characterized in that: The automatic needle implantation mechanism comprises a second positioning camera and a second camera seat: The second positioning camera is mounted on the second camera holder and is used to detect and compensate for the position deviation of the needle tip relative to the center of the nozzle after the probe is adsorbed.

11. The automatic needle implantation system according to claim 1, characterized in that: The automatic needle implantation mechanism comprises a needle implantation motion platform, a needle implantation plate and a needle implantation plate quick-change seat: The needle implanting plate is installed on the needle implanting plate quick-change seat; The needle implanting plate quick-change seat is installed on the needle implanting motion platform and is used to fix the needle implanting plate and realize the replacement of the needle implanting plate; The needle implanting motion platform is used to realize linear reciprocating movement of the needle implanting plate along the Y-axis direction.

12. The automatic needle implantation system according to claim 1, characterized in that: The automatic needle removal mechanism comprises a needle removal motion platform: The needle-taking motion platform is used to place the vertical oscillating needle disk, so as to realize the linear reciprocating movement of the vertical oscillating needle disk along the Y-axis direction.

13. The automatic needle implantation system according to claim 1, characterized in that: The vertical adsorption mechanism uses an electric servo cylinder as an actuator to achieve linear reciprocating movement along the X-axis and Z-axis directions; The automatic needle removal mechanism uses an electric servo cylinder as an actuator to achieve linear reciprocating movement along the Y-axis direction; The automatic needle implantation mechanism uses an electric servo cylinder as an actuator to achieve linear reciprocating movement along the Y-axis direction.

14. The automatic needle implantation system according to claim 1, characterized in that: Also includes device dock: The equipment base is a frame structure for installing a vertical adsorption mechanism, an automatic needle removal mechanism, and an automatic needle implantation mechanism; Among them, the automatic needle removal mechanism and the automatic needle implantation mechanism are arranged side by side.

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