Vacuum panel sheet conveying mechanism and sheet conveying method

Abstract

The invention provides a vacuum panel wafer conveying mechanism and a wafer conveying method, and belongs to the technical field of semiconductor production. The shifting fork assembly is arranged on the supporting part, and the shifting fork assembly is provided with a first connecting part; the translation driving assembly is used for driving the shifting fork assembly to move in the first direction, and the translation driving assembly is provided with a second connecting part; the first connecting part and the second connecting part are configured to be of a structure which is clamped in the first direction and matched in a sliding mode in the vertical direction. According to the vacuum panel sheet conveying mechanism, the shifting fork assembly is installed on the supporting part, the supporting part can be used for improving the supporting strength, the application conditions that the panel is large in size and heavy in weight are met accordingly, in combination with cooperation of the first connecting part and the second connecting part, lifting and translation of the shifting fork assembly do not interfere with each other, and the working efficiency is improved. Therefore, the defects of a traditional structure can be effectively overcome, and the wafer conveying requirement of a panel with large size and heavy weight is met.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor production technology, and specifically relates to a vacuum panel film transfer mechanism and a film transfer method. Background Art

[0002] In the semiconductor industry, the requirements for equipment automation are getting higher and higher. In order to meet the automatic wafer conveying, loading and unloading of wafers, vacuum manipulators are used for wafer conveying in the related existing technologies. However, the current structure of vacuum manipulators is mainly aimed at the transmission of small-sized wafers, and is not suitable for applications with larger size and heavier weight. Summary of the invention

[0003] The present application aims to solve at least one of the above technical problems existing in the prior art. To this end, in a first aspect, the present application provides a vacuum panel wafer conveying mechanism, which can solve the problem of conveying wafers with large size and heavy weight.

[0004] In a second aspect, the present application provides a film transfer method using the above-mentioned vacuum panel film transfer mechanism.

[0005] The vacuum panel transmission mechanism according to the first aspect of the present application includes: A support portion, the support portion being arranged to be lifted and lowered; a shift fork assembly, the shift fork assembly being movably disposed at the upper end of the support portion along a first direction, the shift fork assembly being provided with a first connecting portion; a translation drive assembly, the translation drive assembly being connected to the fork assembly and used for driving the fork assembly to move along the first direction, the translation drive assembly being provided with a second connecting portion; The first connecting portion and the second connecting portion are configured as a structure that is snap-fitted along the first direction and slidably matched along the vertical direction, so that when the support portion is raised and lowered, the fork assembly slides up and down relative to the translation drive assembly.

[0006] The vacuum panel transmission mechanism according to the embodiment of the present application has at least the following beneficial effects: The vacuum panel conveying mechanism in the present application can be raised and lowered by adjusting the lifting and lowering of the support portion, and can be moved and adjusted along the first direction by adjusting the translation drive component, so that the panel can be loaded and unloaded by lifting and moving.

[0007] The vacuum panel film transmission mechanism in the present application has a fork assembly installed on a support portion, which can utilize the support portion to improve the support strength, thereby meeting the application conditions of panels with larger size and heavier weight. In combination with the cooperation of the first connecting portion and the second connecting portion, the lifting and translation of the fork assembly do not interfere with each other, thereby effectively solving the shortcomings of the traditional structure and meeting the film transmission needs of panels with larger size and heavier weight.

[0008] According to some embodiments of the present application, at least one of the first connecting portion and the second connecting portion is provided with a block extending in a vertical direction, and the other is provided with rollers rotatably arranged on both sides of the block at least along the first direction, and the rollers abut against the block.

[0009] According to some embodiments of the present application, the card block is arranged on the second connecting portion, and the first connecting portion is provided with two mounting arms, the two mounting arms are located on both sides of the card block and extend to both ends of the card block along the first direction, and the mounting arms are provided with the rollers on both sides of the card block relative to the first direction.

[0010] According to some embodiments of the present application, a slide rail is provided at the upper end of the support portion along the first direction, and the fork assembly is slidably mounted on the slide rail.

[0011] According to some embodiments of the present application, the translation drive assembly includes: A translation driving screw rod, wherein the axial direction of the translation driving screw rod is arranged along the first direction; A translation guide portion, the translation guide portion is arranged along the first direction and distributed on both sides of the translation drive screw rod; A translation driving unit, the translation driving unit is transmission-connected to the translation driving screw and is used to drive the translation driving screw to rotate; The second connecting portion is inserted through the translation guide portion and the translation drive screw rod, and is threadedly connected to the translation drive screw rod.

[0012] According to some embodiments of the present application, the translation drive screw, the translation guide portion, the second connecting portion, and the fork assembly are all arranged in a vacuum chamber, the translation drive portion is arranged outside the vacuum chamber, and the translation drive portion and the translation drive screw are connected by a magnetic fluid seal.

[0013] According to some embodiments of the present application, the vacuum panel transmission mechanism further includes a lifting drive assembly, and the lifting drive assembly includes: A lifting drive screw rod, wherein the lifting drive screw rod is arranged vertically; A lifting guide portion, the lifting guide portion is vertically arranged and distributed at least on two opposite sides of the support portion; A lifting drive unit, the lifting drive unit is transmission-connected to the lifting drive screw and is used to drive the lifting drive screw to rotate; The support portion is disposed through the lifting drive screw rod and the lifting guide portion, and is threadedly connected to the lifting drive screw rod.

[0014] According to some embodiments of the present application, the lifting drive screw, the lifting drive unit and the support unit are all arranged in the vacuum chamber, the lifting drive unit is arranged outside the vacuum chamber, and the lifting drive unit and the lifting drive screw are connected by a magnetic fluid seal.

[0015] According to some embodiments of the present application, the fork assembly includes: A first film-picking finger, wherein the first film-picking finger extends along the first direction, and a first limit block is disposed at an end of the first film-picking finger; A second film-picking finger, the second film-picking finger is arranged on at least one side of the first film-picking finger, the second film-picking finger extends along a second direction, the second direction is horizontally perpendicular to the first direction, and a second limit block is arranged at the end of the second film-picking finger; The first film picking finger and the second film picking finger jointly define a film picking area suitable for supporting the panel.

[0016] According to the vacuum panel film transfer method of the second aspect of the present application, the vacuum panel film transfer mechanism of any of the above embodiments is applied, including the following steps: Install the fork assembly in the film inlet and outlet chamber; First, the support portion is controlled to rise, the fork assembly is lifted, and the fork assembly is moved along the first direction to a retracted state by the translation drive assembly, and then the panel is placed on the fork assembly, and then the fork assembly is moved along the first direction to an extended state by the translation drive assembly, so that the panel moves from the entry and exit chamber to above the substrate stage of the process chamber, the support portion is controlled to fall, so that the fork assembly falls, the panel is placed on the substrate stage and separated from the panel, and then the fork assembly is moved along the first direction to withdraw from the process chamber to a retracted state by the translation drive assembly; After the process is completed, the fork assembly is moved along the first direction to the extended state by the translation drive assembly, and then the support part is controlled to rise, the fork assembly is lifted, and the panel is removed from the substrate table. Then, the translation drive assembly moves the fork assembly along the first direction to the retracted state to complete the removal of the panel.

[0017] The vacuum panel transfer method according to the embodiment of the present application has at least the following beneficial effects: The vacuum panel transfer method in the present application sets the fork assembly in the film entry and exit chamber, and realizes the automatic transfer of the panel in the process chamber by controlling the lifting and translation of the fork assembly. Since the fork assembly is slidably arranged on the support part, the supporting strength of the fork assembly can be effectively improved, thereby effectively solving the shortcomings of the traditional structure and meeting the transfer needs of panels with larger size and heavier weight.

[0018] Additional aspects and advantages of the present application will be partially given in the following description, and some of the additional aspects and advantages will become obvious from the following description, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present application is further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 A schematic diagram of an application structure of a vacuum panel transmission mechanism in this application; Figure 2 A structural cross-sectional view of a translation drive assembly in this application; Figure 3 A structural cross-sectional view of a lifting drive assembly in this application; Figure 4 It is a schematic diagram of the overall structure of the vacuum panel transmission mechanism in this application; Figure 5 A schematic diagram of the structure of a translation drive assembly in this application; Figure 6 This is a schematic diagram of the installation of the fork assembly and the support part in this application; Figure 7 A schematic diagram of the structure of the fork assembly in this application; Figure 8 This is a schematic diagram of a state in which the vacuum panel transmission mechanism in this application supports the panel. DETAILED DESCRIPTION

[0020] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0021] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0022] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0023] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0024] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0025] Reference Figures 1 to 8 The embodiment of the present application proposes a vacuum panel transmission mechanism, including a support portion 200, a fork assembly 100 and a translation drive assembly 300. Specifically, the support portion 200 can be raised and lowered. The fork assembly 100 is arranged at the upper end of the support portion 200, and can be moved and adjusted along a first direction, so that based on the lifting and lowering of the support portion 200, it can be lifted and lowered and translated along the first direction at the same time. The translation drive assembly 300 is connected to the fork assembly 100, and is used to drive the fork assembly 100 to move along the first direction.

[0026] Furthermore, the fork assembly 100 is provided with a first connecting portion 101, and the translation drive assembly 300 is provided with a second connecting portion 301. The first connecting portion 101 and the second connecting portion 301 are configured as a structure that is snap-connected along a first direction and slidably matched along a vertical direction, so that when the support portion 200 is raised or lowered, the fork assembly 100 slides up and down relative to the translation drive assembly 300.

[0027] With the structural arrangement of this embodiment, the fork assembly 100 can be raised and lowered by adjusting the support portion 200, and can be moved and adjusted along a first direction by adjusting the translation drive assembly 300, so that the panel can be loaded and unloaded by lifting and moving.

[0028] In practical applications, the mechanism of this embodiment can be set in the film entry and exit chamber connected to the process chamber. Since the fork assembly 100 is installed on the support part 200, the support part 200 can be used to improve the supporting strength, thereby meeting the application situation of the panel with larger size and heavier weight. In combination with the cooperation of the first connecting part 101 and the second connecting part 301, the lifting and translation of the fork assembly 100 do not interfere with each other, so it can effectively solve the shortcomings of the traditional structure and meet the film transfer needs of panels with larger size and heavier weight.

[0029] Reference Figure 1 In some embodiments of the present application, at least one of the first connecting portion 101 and the second connecting portion 301 is provided with a block 3011, and the block 3011 extends in a vertical direction, and the other is provided with a roller 1011 rotatably arranged on both sides of the block 3011 along at least a first direction, and the roller 1011 abuts against the block 3011.

[0030] In this embodiment, rollers 1011 are arranged on both sides of the clamping block 3011 along the first direction for clamping, so that during the lifting and lowering of the support part 200, the first connecting part 101 and the second connecting part 301 can be lifted and lowered smoothly, taking into account both the translation along the first direction and the lifting and lowering in the vertical direction.

[0031] Reference Figure 1 In some embodiments of the present application, the card block 3011 is arranged on the second connecting portion 301. The first connecting portion 101 is provided with two mounting arms 1013, and the two mounting arms 1013 are located on both sides of the card block 3011 and extend to both ends of the card block 3011 along the first direction. The mounting arms 1013 are provided with rollers 1011 on both sides of the card block 3011 relative to the first direction. As shown in the combined figure, the first direction is defined as the front-to-back direction, the left-to-right direction is horizontally perpendicular to the first direction, and along the front-to-back direction, the card block 3011 includes a front side wall and a rear side wall. The two mounting arms 1013 extend from the left and right sides of the card block 3011 to the front and rear sides of the card block 3011. Each card block 3011 is provided with a roller 1011 abutting against the front side wall and a roller 1011 abutting against the rear side wall.

[0032] The structural setting of this embodiment uses two mounting arms 1013 to set rollers 1011 to clamp the clamping block 3011, which can effectively improve the clamping strength between the first connection part 101 and the second connection part 301, and can meet the transmission requirements of panels with large size and heavy weight. In addition, each mounting arm 1013 is provided with rollers 1011 on the front side wall and the rear side wall of the clamping block 3011 to abut, which can effectively avoid the second connection part 301 from generating a gap in the process of long-term pulling the first connection part 101 to move, which is conducive to improving the translation accuracy.

[0033] Reference Figure 4In some embodiments of the present application, a slide rail 201 is disposed at the upper end of the support portion 200 along the first direction, and the fork assembly 100 is slidably mounted on the slide rail 201 . Thus, the fork assembly 100 is supported by the slide rail 201 .

[0034] Specifically, a slide rail 201 is provided on the left and right sides of the support portion 200. The slide rail 201 extends along the first direction. Two support legs 1012 are provided at the bottom of the first connection portion 101, and the bottoms of the two support legs 1012 are slidably assembled on the slide rail 201. The support legs 1012 and the slide rail 201 are connected by an assembly relationship, so that the two can only slide along the first direction and cannot swing, which can effectively ensure the stability of the fork assembly 100.

[0035] Reference Figures 1 to 5 In some embodiments of the present application, the translation drive assembly 300 includes a translation drive screw 302, a translation guide portion 303 and a translation drive portion 304. The axial direction of the translation drive screw 302 is arranged along the first direction, and the translation drive screw 302 can rotate around its own axis. The translation guide portion 303 is arranged along the first direction and distributed on both sides of the translation drive screw 302. The translation drive portion 304 is transmission-connected to the translation drive screw 302 and is used to drive the translation drive screw 302 to rotate. The second connecting portion 301 is penetrated by the translation guide portion 303 and the translation drive screw 302, and is threadedly connected to the translation drive screw 302. With the structural arrangement of this embodiment, the second connecting portion 301 is supported and guided by the translation guide portion 303, and moves along the first direction by rotating the translation drive screw 302, which can effectively ensure the stability of translation.

[0036] The translation guide portion 303 in this embodiment may be a guide rod, or a guide rail or other structural forms.

[0037] Reference Figure 1 and Figure 2 In some embodiments of the present application, the translation drive screw 302, the translation guide portion 303, the second connecting portion 301, and the fork assembly 100 are all arranged in the vacuum chamber, the translation drive portion 304 is arranged outside the vacuum chamber, and the translation drive portion 304 is connected to the translation drive screw 302 through a magnetic fluid seal.

[0038] With the structural setting of this embodiment, the translation drive unit 304 is arranged outside the vacuum chamber to drive the translation drive screw 302 to rotate, so that the fork assembly 100 can be located as a whole in the vacuum chamber. During the loading and unloading process of the panel, the vacuum chamber can maintain a vacuum environment matching the process chamber. There is no need to worry about the impact of the external environment on the panel, which is conducive to promoting the improvement of production efficiency.

[0039] Reference Figures 2 to 4 , Figure 6 In some embodiments of the present application, the vacuum panel transmission mechanism further includes a lifting drive assembly 400, and the lifting drive assembly 400 includes a lifting drive screw 401, a lifting guide portion 403 and a lifting drive portion 402. The lifting drive screw 401 is vertically arranged and can rotate around its own axis. The lifting guide portion 403 is vertically arranged and distributed at least on two opposite sides of the support portion 200. The lifting drive portion 402 is transmission-connected to the lifting drive screw 401, and is used to drive the lifting drive screw 401 to rotate. The support portion 200 is penetrated by the lifting drive screw 401 and the lifting guide portion 403, and is threadedly connected to the lifting drive screw 401.

[0040] With the structural setting of this embodiment, the gravity of the support part 200 is carried by the lifting drive screw 401. Since the gravity is difficult to act in reverse on the lifting drive screw 401 through the thread, it is conducive to ensuring the lifting stability of the support part 200, thereby improving the lifting adjustment accuracy. Among them, when the support part 200 is a circular structure, the lifting guide part 403 is preferably evenly arranged in its circumferential direction; when the support part 200 is a rectangular structure, the lifting guide part 403 is preferably arranged at the four vertices of the support part 200, so as to ensure the stability of the lifting guide.

[0041] Similar to the aforementioned embodiments, in some implementations of the present application, the lifting drive screw 401, the lifting drive unit 402 and the support unit 200 are all arranged in the vacuum chamber, the lifting drive unit 402 is arranged outside the vacuum chamber, and the lifting drive unit 402 and the lifting drive screw 401 are connected by a magnetic fluid seal.

[0042] In this embodiment, the lifting drive part 402 is arranged outside the vacuum chamber to drive the lifting drive screw 401 to rotate, so that the support part 200 as a whole can be located in the vacuum chamber to support the fork assembly 100, which is beneficial to reduce the eccentric load moment of the fork assembly 100 when the panel is placed on the fork assembly 100, which is beneficial to improve the support strength and the transmission accuracy of loading and unloading the panel.

[0043] Reference Figures 6 to 8In some embodiments of the present application, the fork assembly 100 includes a first film picking finger 102 and a second film picking finger 103. The first film picking finger 102 extends along a first direction, and along the first direction, first limit blocks 1021 are provided at both ends of the first film picking finger 102. The second film picking finger 103 is provided on at least one side of the first film picking finger 102, and the second film picking finger 103 extends along a second direction, and the second direction is horizontally perpendicular to the first direction. Along the second direction, second limit blocks 1031 are provided at both ends of the second film picking finger 103. The first film picking finger 102 and the second film picking finger 103 are used to jointly support the panel, and at the same time, the first limit block 1021 and the second limit block 1031 are used to jointly define a film picking area suitable for supporting the panel at the upper ends of the first film picking finger 102 and the second film picking finger 103.

[0044] It can be understood that the distance between the two first limit blocks 1021 matches the size of the panel along the first direction, so that when the panel is placed on the first film-picking finger 102 and the second film-picking finger 103, they are located on both sides of the panel along the first direction to limit the panel, while the second limit block 1031 limits the outer side of the panel along the second direction.

[0045] Reference Figure 7 In some embodiments of the present application, the fork assembly 100 is provided with a plurality of first film-picking fingers 102 spaced apart along the second direction, and at least one second film-picking finger 103 is respectively provided on the two outermost first film-picking fingers 102 along the second direction, and the second film-picking finger 103 is located on the side away from each other of the two first film-picking fingers 102. The structural setting of this embodiment can improve the support stability of the panel, and at the same time, the gap between the first film-picking fingers 102 can be used to cooperate with the substrate stage of the process chamber, so that the substrate stage can lift the panel upward from the gap to achieve separation of the panel and the fork assembly 100. In addition, the second film-picking fingers 103 on both sides can limit the two sides of the panel along the second direction.

[0046] In some embodiments of the present application, the first film picking finger 102 and the second film picking finger 103 are configured as an integral structure and are detachably connected to the first connecting portion 101, so that film picking finger structures of different shapes and sizes can be replaced according to the film transmission needs of the panel.

[0047] The driving part in the present application may adopt a motor or other structures, which will not be described in detail here.

[0048] The embodiment of the present application further provides a vacuum panel film transfer method, which uses the vacuum panel film transfer mechanism of any of the above embodiments, and includes the following steps: First, install the support part 200, the fork assembly 100, the other structures of the lifting drive assembly 400 except the lifting drive part 402, and the other structures of the translation drive assembly 300 except the translation drive part 304 to the film inlet and outlet chamber; First, the support part 200 is controlled to rise, the fork assembly 100 is lifted, and the fork assembly 100 is moved to a retracted state along the first direction by the translation drive assembly 300, and then the panel is placed on the fork assembly 100, and then the fork assembly 100 is moved to an extended state along the first direction by the translation drive assembly 300, so that the panel moves from the in-and-out chamber to above the substrate stage of the process chamber, and the support part 200 is controlled to descend, so that the fork assembly 100 descends, the panel is placed on the substrate stage and separated from the panel, and then the fork assembly 100 is moved to a retracted state along the first direction by the translation drive assembly 300 to exit the process chamber; After the process is completed, the fork assembly 100 is moved to the extended state along the first direction by the translation drive assembly 300, and then the support part 200 is controlled to rise, the fork assembly 100 is lifted, and the panel is removed from the substrate table. Then, the translation drive assembly 300 moves the fork assembly 100 to the retracted state along the first direction to complete the removal of the panel.

[0049] The vacuum panel transfer method in this embodiment sets the fork assembly 100 in the film entry and exit chamber, and the automatic transfer of the panel in the process chamber can be realized by controlling the lifting and translation of the fork assembly 100. Since the fork assembly 100 is slidably set on the support part 200, the supporting strength of the fork assembly 100 can be effectively improved, thereby effectively solving the shortcomings of the traditional structure and meeting the transfer needs of panels with larger size and heavier weight.

[0050] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A vacuum panel transmission mechanism, characterized in that: include: A support portion, the support portion being arranged to be lifted and lowered; a shift fork assembly, the shift fork assembly being movably disposed at the upper end of the support portion along a first direction, the shift fork assembly being provided with a first connecting portion; a translation drive assembly, the translation drive assembly being connected to the fork assembly and used for driving the fork assembly to move along the first direction, the translation drive assembly being provided with a second connecting portion; The first connecting portion and the second connecting portion are configured as a structure that is snap-fitted along the first direction and slidably matched along the vertical direction, so that when the support portion is raised and lowered, the fork assembly slides up and down relative to the translation drive assembly.

2. The vacuum panel transmission mechanism according to claim 1, characterized in that: At least one of the first connection part and the second connection part is provided with a block, the block extending in a vertical direction, and the other part is provided with rollers rotatably arranged at least along the first direction on both sides of the block, the rollers abutting against the block.

3. The vacuum panel transmission mechanism according to claim 2, characterized in that: The card block is arranged on the second connecting portion, and the first connecting portion is provided with two mounting arms, the two mounting arms are located on both sides of the card block and extend to both ends of the card block along the first direction, and the mounting arms are provided with the rollers on both sides of the card block relative to the first direction.

4. The vacuum panel transmission mechanism according to claim 1, characterized in that: A slide rail is disposed at the upper end of the support portion along the first direction, and the shift fork assembly is slidably mounted on the slide rail.

5. The vacuum panel transmission mechanism according to claim 1, characterized in that: The translation drive assembly comprises: A translation driving screw rod, wherein the axial direction of the translation driving screw rod is arranged along the first direction; A translation guide portion, the translation guide portion is arranged along the first direction and distributed on both sides of the translation drive screw rod; A translation driving unit, the translation driving unit is transmission-connected to the translation driving screw and is used to drive the translation driving screw to rotate; The second connecting portion is inserted through the translation guide portion and the translation drive screw rod, and is threadedly connected to the translation drive screw rod.

6. The vacuum panel transmission mechanism according to claim 5, characterized in that: The translation drive screw, the translation guide part, the second connection part, and the fork assembly are all arranged in the vacuum chamber, the translation drive part is arranged outside the vacuum chamber, and the translation drive part and the translation drive screw are connected by a magnetic fluid seal.

7. The vacuum panel transmission mechanism according to claim 1, characterized in that: The vacuum panel transmission mechanism further includes a lifting drive assembly, and the lifting drive assembly includes: A lifting drive screw rod, wherein the lifting drive screw rod is arranged vertically; A lifting guide portion, the lifting guide portion is vertically arranged and distributed at least on two opposite sides of the support portion; A lifting drive unit, the lifting drive unit is transmission-connected to the lifting drive screw and is used to drive the lifting drive screw to rotate; The support portion is disposed through the lifting drive screw rod and the lifting guide portion, and is threadedly connected to the lifting drive screw rod.

8. The vacuum panel transmission mechanism according to claim 7, characterized in that: The lifting drive screw, the lifting drive unit and the supporting unit are all arranged in the vacuum chamber, the lifting drive unit is arranged outside the vacuum chamber, and the lifting drive unit is connected to the lifting drive screw through a magnetic fluid seal.

9. The vacuum panel transmission mechanism according to claim 1, characterized in that: The fork assembly comprises: A first film-picking finger, wherein the first film-picking finger extends along the first direction, and a first limit block is disposed at an end of the first film-picking finger; A second film-picking finger, the second film-picking finger is arranged on at least one side of the first film-picking finger, the second film-picking finger extends along a second direction, the second direction is horizontally perpendicular to the first direction, and a second limit block is arranged at the end of the second film-picking finger; The first film picking finger and the second film picking finger jointly define a film picking area suitable for supporting the panel.

10. A vacuum panel transfer method, characterized in that: The vacuum panel transmission mechanism according to claim 1 comprises the following steps: Install the fork assembly in the film inlet and outlet chamber; First, the support portion is controlled to rise, the fork assembly is lifted, and the fork assembly is moved along the first direction to a retracted state by the translation drive assembly, and then the panel is placed on the fork assembly, and then the fork assembly is moved along the first direction to an extended state by the translation drive assembly, so that the panel moves from the entry and exit chamber to above the substrate stage of the process chamber, the support portion is controlled to descend, so that the fork assembly descends, the panel is placed on the substrate stage and separated from the panel, and then the fork assembly is moved along the first direction to withdraw from the process chamber to a retracted state by the translation drive assembly; After the process is completed, the fork assembly is moved along the first direction to the extended state by the translation drive assembly, and then the support part is controlled to rise, the fork assembly is lifted, and the panel is removed from the substrate table. Then, the translation drive assembly moves the fork assembly along the first direction to the retracted state to complete the removal of the panel.

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