Nozzle device and vapor deposition equipment

Abstract

The present application provides a nozzle device and a vapor deposition apparatus, relating to the technical field of vapor deposition, to solve the problem in the related art that the installation position of the nozzle is fixed and it is not easy to replace according to actual needs. The nozzle device includes a mounting base and a nozzle assembly; both the nozzle assembly and the mounting base are movable and detachably connected, so that the positions of multiple nozzle assemblies relative to the mounting base are adjustable. The nozzle assembly of the present application can be installed at any position of the mounting base according to actual needs, with higher flexibility, and can meet the coating requirements for different products. At the same time, only the corresponding nozzle assembly needs to be replaced, without replacing the entire nozzle device, which is beneficial to improving the replacement efficiency and saving the replacement cost.

Description

Technical Field

[0001] The present application relates to the field of evaporation technology, and in particular to a nozzle device and evaporation equipment. Background Art

[0002] In the field of display technology, vacuum coating is a relatively mature film-forming method in the display manufacturing process. The base material used for film formation is heated and evaporated onto the substrate through an evaporation device.

[0003] The vacuum evaporation process is as follows: the required coating material is placed in a container, a nozzle with a through hole is placed on top of the container, and the container is heated. When the temperature reaches the evaporation temperature of the internal material, the material will vaporize and spray upward through the through hole of the nozzle, and adhere to the substrate to form a thin film. In related technologies, the nozzle is generally installed above the container through a base.

[0004] However, the installation position of the existing nozzle is fixed, and it is not easy to replace it according to actual needs. The replacement cost is high, the replacement efficiency is low, and the evaporation effect is single. Summary of the invention

[0005] The embodiments of the present application provide a nozzle device and an evaporation device, and the nozzle assembly can be installed at any position of a mounting base according to actual needs. It is more flexible and can meet the coating requirements of different products. At the same time, only the corresponding nozzle assembly needs to be replaced, and there is no need to replace the entire nozzle device, which is beneficial to improving replacement efficiency and saving replacement costs. In addition, the installation method of the present application is beneficial to avoiding the occurrence of leakage, thereby maximizing the evaporation effect.

[0006] In order to achieve the above objectives, this application provides the following technical solutions:

[0007] In a first aspect, an embodiment of the present application provides a nozzle device, which is used in an evaporation device and is connected to a material chamber of the evaporation device; the nozzle device comprises a mounting base and a nozzle assembly; the mounting base is used to buckle the cavity opening of the material chamber, the nozzle assembly is located on a side of the mounting base away from the material chamber, and the nozzle assembly is connected to the material chamber through the mounting base;

[0008] Wherein, the number of the nozzle assemblies includes a plurality, and the plurality of nozzle assemblies are arranged at intervals along the length direction of the mounting base;

[0009] Furthermore, the plurality of nozzle assemblies and the mounting base are movably and detachably connected, so that the positions of the plurality of nozzle assemblies relative to the mounting base are adjustable.

[0010] In a possible implementation, along the length direction of the mounting base, the disassembly directions of the plurality of nozzle assemblies relative to the mounting base are consistent.

[0011] In a possible implementation, the mounting base and the nozzle assembly are slidably and detachably connected.

[0012] In a possible implementation, one of the mounting base and the nozzle assembly is provided with a slide groove, and one of the mounting base and the nozzle assembly is provided with a slider;

[0013] The sliding block slides in the sliding groove correspondingly, forming a sliding state of the nozzle assembly on the mounting base.

[0014] In a possible implementation manner, a magnetic member is provided between the mounting base and the nozzle assembly, and the nozzle assembly is adsorbed to the mounting base through the magnetic member.

[0015] In a possible implementation, one of the mounting base and the nozzle assembly is provided with a plug-in component, and the other of the mounting base and the nozzle assembly is provided with a slot, and the plug-in component is correspondingly plugged into the slot;

[0016] And / or, one of the mounting base and the nozzle assembly is provided with a connecting portion, and the other of the mounting base and the nozzle assembly is provided with a connecting hole, the outer wall surface of the connecting portion has an external thread, the inner wall surface of the connecting hole has an internal thread, and the connecting portion is fitted and connected in the connecting hole.

[0017] In one possible implementation, the nozzle assembly includes a nozzle base and a nozzle arranged on the nozzle base, and the nozzle is located on a side of the nozzle base facing away from the mounting base; the nozzle base has the nozzle mounting portion, and the mounting base has a base mounting portion, and the nozzle base and the mounting base are slidably and detachably connected through the nozzle mounting portion and the base mounting portion.

[0018] In one possible implementation, the number of the nozzle assemblies includes multiple, the nozzle is provided on at least a part of the nozzle bases, and the nozzle assembly provided with the nozzle is connected to the material chamber; the nozzle mounting part is respectively provided on each of the nozzle bases, and the multiple nozzle bases are embedded in the base mounting part through the multiple nozzle mounting parts in a one-to-one correspondence.

[0019] In one possible implementation, the base mounting portion includes a base mounting body and a base mounting groove provided on the base mounting body; the base mounting groove extends along the length direction of the mounting base, and the base mounting groove forms a slide groove; the nozzle base includes a nozzle mounting body, and the nozzle mounting portion is arranged on the nozzle mounting body; the nozzle mounting body slides in the base mounting groove.

[0020] In a possible implementation, a plurality of mounting bosses are provided on one of the base mounting body and the nozzle mounting portion, and a base assembly groove is provided on the other of the base mounting body and the nozzle mounting portion. The base assembly groove extends along the length direction of the mounting base, and the base assembly groove forms a chute. When the nozzle mounting portion is embedded in the base mounting body, the mounting bosses slide in the base assembly groove.

[0021] In a possible implementation, the mounting base further includes a first mounting table and a second mounting table, and the base mounting portion is provided on the first mounting table. When the nozzle mounting portion is embedded in the base mounting body, the surface of the base mounting body is flush with the surface of the nozzle mounting body.

[0022] In a possible implementation, a step portion is formed between the first mounting table and the second mounting table. The nozzle device further includes a stopper, and along the moving direction of the nozzle assembly, the stopper is provided at the edge of the step portion, and the stopper stops the nozzle assembly.

[0023] In a possible implementation, the mounting base is provided with a first through hole, and the first through hole communicates with the material cavity of the evaporation device. At least a part of the nozzle assemblies are provided with second through holes. When the nozzle assemblies are embedded in the base mounting portion, the second through holes and the first through hole correspond to each other and are communicated with each other, and the second through holes are communicated with the material cavity through the first through hole.

[0024] In a possible implementation, at least a part of the nozzles are rotatably connected to the nozzle base, and the rotation direction of the nozzles intersects with the length direction of the mounting base.

[0025] In a possible implementation, at least a part of the nozzles are detachably connected to the nozzle base.

[0026] In a possible implementation, the nozzle has a spray hole on the side facing away from the material cavity, and the shape of the longitudinal section of the spray hole includes a circular hole, a square hole or a fan-shaped hole.

[0027] In a possible implementation, the nozzle base is a heat-conducting metal part; and / or, the nozzle is a heat-conducting metal part; and / or, the mounting base is a heat-conducting metal part.

[0028] In a second aspect, an embodiment of the present application provides an evaporation device, including an evaporation crucible and a nozzle device. The evaporation crucible has a material cavity, the mounting base of the nozzle device is buckled on the cavity opening of the material cavity, and the nozzle assembly of the nozzle device is communicated with the material cavity through the mounting base.

[0029] In a possible implementation, a heating device is further included, and the heating device is configured to heat the evaporation crucible;

[0030] And / or, the evaporation equipment includes a heat preservation device, and the heat preservation device is arranged outside the evaporation crucible.

[0031] For the nozzle device and the evaporation equipment provided by the present application, the nozzle assembly and the mounting base are movably and detachably connected. In this way, the mounting base is a universal base, and the nozzle assembly can be installed at any position of the mounting base according to actual needs, with higher flexibility, and can meet the coating requirements for different products. At the same time, only the corresponding nozzle assembly needs to be replaced, without replacing the entire nozzle device, which is beneficial to improving the replacement efficiency and saving the replacement cost; at the same time, it is beneficial to avoid the occurrence of material leakage during the evaporation process, thereby maximizing the evaporation effect.

[0032] The structure of the present application and its other application purposes and beneficial effects will become more obvious and understandable through the description of the preferred embodiments in conjunction with the drawings. Description of the Drawings

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0034] Figure 1 It is a schematic structural diagram of the evaporation equipment provided by the embodiment of the present application;

[0035] Figure 2 It is a schematic structural diagram of the nozzle device and the mounting base after installation provided by the embodiment of the present application;

[0036] Figure 3 It is a schematic assembly structural diagram of the nozzle device and the mounting base provided by the present application;

[0037] Figure 4 It is a schematic structural diagram of the mounting base of the nozzle device provided by the embodiment of the present application;

[0038] Figure 5 For Figure 4 The partial enlarged schematic diagram of part I;

[0039] Figure 6 It is a schematic structural diagram of the nozzle assembly of the nozzle device provided by the embodiment of the present application;

[0040] Figure 7Schematic diagram of the nozzle base of the nozzle device provided by the embodiment of the present application;

[0041] Figure 8 Schematic diagram of the working principle of the nozzle device provided by the embodiment of the present application Figure 1 ;

[0042] Figure 9 Schematic diagram of the working principle of the nozzle device provided by the embodiment of the present application Figure 2 ;

[0043] Figure 10 Schematic diagram of the working principle of the nozzle device provided by the embodiment of the present application Figure 3 ;

[0044] Figure 11 Schematic diagram of the structure of the nozzle in the nozzle device provided by the embodiment of the present application Figure 1 ;

[0045] Figure 12 Schematic diagram of the structure of the nozzle in the nozzle device provided by the embodiment of the present application Figure 2 。

[0046] Description of reference numerals:

[0047] 100 - nozzle device;

[0048] 110 - mounting base; 111 - first mounting table; 112 - second mounting table;

[0049] 113 - base mounting part; 1131 - base mounting body; 1132 - base mounting groove;

[0050] 1133 - base mounting boss; 1134 - base assembly groove; 114 - step part;

[0051] 115 - first through hole; 120 - nozzle assembly; 121 - nozzle base;

[0052] 1211 - nozzle mounting body; 1212 - nozzle mounting part; 1213 - mounting boss;

[0053] 1214 - mounting groove; 122 - nozzle; 123 - second through hole;

[0054] 124 - spray hole;

[0055] 130 - stop member;

[0056] 200 - evaporation equipment; 210 - evaporation crucible; 211 - material cavity;

[0057] 212 - cavity opening; 220 - target substrate. Detailed implementation manners

[0058] The vacuum evaporation coating process is as follows: Place the coating material to be used in a container, cover the container with a nozzle having through holes above it, heat the container, and when the temperature reaches the evaporation temperature of the internal material, the material will vaporize and spray upward through the through holes of the nozzle, and adhere to the substrate to form a thin film.

[0059] In the related art, the nozzle is generally installed above the container through a base, the nozzle is fixed on the base, the nozzle and the base are designed in an integrated manner, and the nozzle and the base are an integral body. In this way, the installation position of the nozzle is fixed during the manufacturing process and cannot be changed later. The aperture, size, and angle of the nozzle cannot be changed well either. If the coating requirements for different products are to be met, a whole new set of nozzles needs to be replaced, resulting in a relatively high manufacturing cost, a large amount of material consumption, a low replacement efficiency of the nozzle, and an extended product development cycle. In addition, for different product requirements, the nozzle needs to be replaced and re-prepared, which will consume a large amount of time and funds and greatly reduce the work efficiency.

[0060] Based on the above technical problems, the embodiments of the present application provide a nozzle device and a vapor deposition apparatus. The mounting base is a universal base, and the nozzle assembly can be installed at any position of the mounting base according to actual needs, with higher flexibility, capable of meeting the coating requirements for different products. At the same time, only the corresponding nozzle assembly needs to be replaced, and there is no need to replace the entire nozzle device, which is beneficial to improving the replacement efficiency and saving the replacement cost.

[0061] In order to make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0062] Refer to Figure 1 As shown, the embodiments of the present application provide a vapor deposition apparatus 200. Among them, the vapor deposition apparatus 200 in this embodiment is an apparatus for vapor deposition coating to form an organic coating on a target substrate 220 through a vacuum evaporation coating process.

[0063] The vacuum evaporation coating process can be understood as: Place the evaporation coating material to be used in an evaporation crucible 210, cover the evaporation crucible 210 with a nozzle 122 having through holes above it, heat the evaporation crucible 210, and when the temperature reaches the evaporation temperature of the internal material, the evaporation coating material converted into a vapor state can spray upward through the through holes of the nozzle 122 and adhere to the target substrate 220 to form a thin film.

[0064] Exemplarily, the evaporation material may include various metals, alloys, oxides, and other compounds. Exemplarily, the metal materials may include aluminum, gold, silver, and copper; the alloy materials may include nickel-chromium or titanium-aluminum; the oxides may include indium tin oxide, zinc oxide, and silicon oxide. This embodiment does not limit this.

[0065] Exemplarily, the ejection path may refer to Figure 1 the direction shown by the arrow in

[0066] It should be noted that in this embodiment, the application scenario of the evaporation device 200 is not limited. Exemplarily, it can be used to manufacture a display panel (Organic Light-Emitting Diode, abbreviated as OLED), and this embodiment does not limit this. Additionally, the target substrate 220 in this embodiment may be a glass substrate, and this embodiment does not limit this.

[0067] It should be noted that in this embodiment, the heating type in the vacuum evaporation process is not limited. Exemplarily, it can be through resistance heating, electron beam heating, high-frequency induction heating, etc. This embodiment does not limit this.

[0068] In the embodiment of the present application, specifically, referring to Figure 1 as shown, the evaporation device 200 may include an evaporation crucible 210 and a nozzle device 100. The evaporation crucible 210 has a material cavity 211, the nozzle device 100 is buckled to the cavity opening 212 of the material cavity 211, and the nozzle device 100 is communicated with the material cavity 211.

[0069] In the embodiment of the present application, the material and shape of the evaporation crucible 210 are not limited. It can be understood that the material cavity 211 of the evaporation crucible 210 is used to accommodate the evaporation material. The evaporation crucible 210 may be in a cuboid shape, and multiple mutually connected troughs may be designed inside for loading materials. This embodiment does not limit this.

[0070] In the embodiment of the present application, the evaporation device 200 may further include a heating device, and the heating device heats the evaporation material in the evaporation crucible 210. Exemplarily, the heating device may be composed of high-temperature resistant electric heating tubes, and the heating tubes are powered by the power supply unit of the evaporator; or, the heating device may be an induction heater, which uses the principle of electromagnetic heating to heat the evaporation material by generating an alternating magnetic field around the crucible. This embodiment does not limit this.

[0071] In the embodiment of the present application, the evaporation device 200 may further include a heat preservation device, and the heat preservation device is arranged outside the evaporation crucible. Exemplarily, the heat preservation device may be composed of multiple heat preservation plates. For example, the heat preservation device may include a top heat preservation plate, a side heat preservation plate, and a bottom heat preservation plate.

[0072] Specifically, the top insulation plate can be a metal plate with a through hole for use with the nozzle, so that the nozzle and the top insulation plate are used in combination to allow the material to spray upward; the side insulation plates and the bottom insulation plates are not in direct contact with the heating device, which can play a role in insulation and thus reduce heat loss.

[0073] The structure of the nozzle device provided in the embodiment of the present application is described in detail below.

[0074] In the embodiment of the present application, the nozzle device 100 may include a mounting base 110 and a nozzle assembly 120. The evaporation crucible 210 has a material cavity 211. The mounting base 110 is snapped into the cavity opening of the material cavity 211. The nozzle assembly 120 is located on the side of the mounting base 110 away from the material cavity 211. The nozzle assembly 120 is connected to the material cavity 211 through the mounting base 110.

[0075] In the embodiment of the present application, the evaporation crucible 210 is used to load the evaporation material to be evaporated, wherein the evaporation crucible 210 has a material cavity 211, and the evaporation material is located in the material cavity 211. The material cavity 211 can provide a stable and high-purity vacuum environment for the evaporation material, so that the evaporation material can be freely diffused in the vacuum after being vaporized and attached to the target substrate 220. It should be noted that the evaporation material can include metals such as silver, magnesium, aluminum, etc.; or the evaporation material can include compounds, etc. This embodiment does not limit this.

[0076] In the embodiment of the present application, the mounting base 110 is buckled with the cavity opening 212 of the material cavity 211. This helps to ensure the sealing of the material cavity 211, thereby ensuring that the material cavity 211 provides a stable and high-purity vacuum environment for the evaporation material, thereby ensuring the evaporation effect to the greatest extent.

[0077] It should be noted that there is no limitation on the snap-fitting method of the mounting base 110 and the material cavity 211. For example, the mounting base 110 can be a flat structure, and the mounting base 110 directly covers the cavity opening 212 of the material cavity 211, or the mounting base 110 can be provided with an extended flange, which is engaged with the edge of the cavity opening 212.

[0078] This helps to increase the connection area between the mounting base 110 and the evaporation crucible 210, thereby improving the connection stability between the nozzle device 100 and the evaporation crucible 210 and helping to ensure the sealing effect. This embodiment does not limit this, and can be specifically set according to actual needs.

[0079] In the embodiment of the present application, the nozzle assembly 120 is located on the side of the mounting base 110 away from the material cavity 211. It can be understood that the nozzle assembly 120 is located on the side of the mounting base 110 close to the target substrate 220. In this way, the evaporation material converted into the vapor state can be ejected through the nozzle assembly 120. When the target substrate 220 to be evaporated passes above the nozzle assembly 120, the vapor can adhere to the evaporation area on the target substrate 220 to form a coating on the target substrate 220.

[0080] In the embodiment of the present application, there is no limitation on the materials of the nozzle assembly 120 and the mounting base 110. Exemplarily, both the nozzle assembly 120 and the mounting base 110 can be made of metal materials. Among them, the metal material has excellent heat conduction performance, making the heat of the evaporation crucible 210 easier to transfer to the mounting base 110 and the nozzle assembly 120, so that the mounting base 110 and the nozzle assembly 120 can maintain a relatively high temperature, avoiding the re-liquefaction of the organic vapor when it reaches the positions of the mounting base 110 and the nozzle assembly 120 due to the low temperature.

[0081] Exemplarily, the heat-conducting materials used for the nozzle assembly 120 can include graphene, heat-conducting adhesives, heat-conducting silica gel sheets, heat-conducting insulating materials, heat-conducting interface materials, heat-conducting tapes, heat-conducting silicone greases, heat-conducting pastes, heat-dissipating pastes, heat-dissipating silicone greases, heat-dissipating oils, heat-dissipating films, heat-conducting films, etc.; the heat-conducting materials used for the mounting base 110 can also include graphene, heat-conducting adhesives, heat-conducting silica gel sheets, heat-conducting insulating materials, heat-conducting interface materials, heat-conducting tapes, heat-conducting silicone greases, heat-conducting pastes, heat-dissipating pastes, heat-dissipating silicone greases, heat-dissipating oils, heat-dissipating films, heat-conducting films, etc. This embodiment does not make any limitations in this regard.

[0082] In the embodiment of the present application, the heat-conducting materials of the nozzle assembly 120 and the mounting base 110 can be the same, or they can be different. In this embodiment, the case where the heat-conducting materials of the nozzle assembly 120 and the mounting base 110 are the same is mainly taken as an example for illustration. In this way, it helps to ensure that the nozzle assembly 120 and the mounting base 110 absorb the same amount of heat.

[0083] In the embodiment of the present application, a heat-conducting layer can also be provided between the nozzle assembly 120 and the mounting base 110. In this way, the heat of the evaporation crucible 210 can be transferred to the nozzle assembly 120 more quickly and in a larger amount, ensuring the high temperature of the nozzle assembly 120, helping to avoid minimizing heat loss during the heat transfer process, and having better heat transfer performance.

[0084] Among them, in order to improve the installation flexibility of the nozzle assembly 120 and avoid the problem in the related art that the coating requirements of different products cannot be well met due to the fixed installation position of the nozzle 122. In the embodiment of the present application, with reference to Figure 2 and Figure 3As shown, the number of nozzle assemblies 120 may include multiple ones, and along the length direction of the mounting base 110, the multiple nozzle assemblies 120 are arranged at intervals. Among them, the number of the nozzle assemblies 120 is not limited and can be specifically set according to actual needs. In this way, the design of the multiple nozzle assemblies 120 can expand the spraying coverage range.

[0085] In order to facilitate the disassembly of the nozzle assembly 120, in the embodiments of the present application, the multiple nozzle assemblies 120 and the mounting base 110 are both movable and detachably connected, so that the positions of the multiple nozzle assemblies 120 relative to the mounting base 110 are adjustable.

[0086] It should be noted that the nozzle assembly 120 is movably arranged with respect to the mounting base 110. In this way, the nozzle assembly 120 can move on the mounting base 110. By moving the nozzle assembly 120, it helps to expand the spraying coverage range of the nozzle assembly 120, improve the spraying efficiency, and reduce the adjustment difficulty.

[0087] In the embodiments of the present application, the manner of detachably connecting the nozzle assembly 120 and the mounting base 110 is not limited. Exemplarily, the nozzle assembly 120 and the mounting base 110 can be slidably detachable or rotatably detachable. This embodiment does not limit this and can be specifically set according to actual needs.

[0088] In the embodiments of the present application, since the nozzle assembly 120 and the mounting base 110 are movably and detachably connected, the user can adjust the position and spacing of the nozzle assembly 120 according to specific process requirements. This flexibility allows the device to adapt to substrates or products of different sizes and shapes, enhancing the versatility of the device.

[0089] In addition, by adjusting the position of the nozzle assembly 120, the distribution and deposition process of the material can be optimized to ensure a uniform coating layer or deposition layer on the target substrate 220; moreover, the detachable design makes the maintenance and replacement of the nozzle assembly 120 more convenient, reduces the equipment downtime, and improves the production efficiency. In addition, the user can replace the nozzle assembly 120 with different specifications or types according to needs to adapt to different process requirements.

[0090] In addition, this design allows increasing or decreasing the number of nozzles when needed, thereby adjusting the production capacity of the device or adapting to new process flows. And by optimizing the layout and number of nozzles, material waste and energy consumption can be reduced, thereby reducing production costs.

[0091] In a possible implementation manner, along the length direction of the mounting base 110, the disassembly directions of the multiple nozzle assemblies 120 with respect to the mounting base 110 are the same.

[0092] Exemplarily, the disassembly direction of the nozzle assembly 120 can refer toFigure 3 as shown by the arrow A in the figure.

[0093] In this way, with a consistent disassembly direction, operators can more easily understand and perform installation or disassembly operations, which helps reduce complexity, reduce the time for adjustment and repositioning, simplify the operation process, and improve efficiency and safety.

[0094] The following describes the movable connection method between the mounting base and the nozzle assembly provided in the embodiments of the present application.

[0095] In a possible implementation manner, the mounting base 110 and the nozzle assembly 120 can be slidably detachably connected. In this way, the sliding connection enables the nozzle assembly 120 to easily slide into place along the mounting base 110 or be removed therefrom, simplifying the installation and disassembly processes.

[0096] Exemplarily, referring to Figure 8 as shown in the figure, the nozzle 122 can slide along the A direction, or the nozzle 122 can slide along the B direction.

[0097] Specifically, one of the mounting base 110 and the nozzle assembly 120 can be provided with a sliding groove, and one of the mounting base 110 and the nozzle assembly 120 can be provided with a sliding block; the sliding block correspondingly slides in the sliding groove to form the sliding state of the nozzle assembly 120 on the mounting base 110. Among them, the positions of the sliding groove and the sliding block are not limited.

[0098] In this way, the sliding of the sliding block in the sliding groove provides precise linear guidance, enabling the nozzle assembly 120 to move stably and accurately on the mounting base 110, which helps ensure that the nozzle maintains a stable position during operation and reduces position deviation caused by vibration or other factors.

[0099] In a possible implementation manner, a magnetic member can be provided between the mounting base 110 and the nozzle assembly 120, and the nozzle assembly 120 is adsorbed on the mounting base 110 through the magnetic member.

[0100] Exemplarily, the magnetic member can be a magnet. For example, magnetic members can be provided at the relative positions of the mounting base 110 and the nozzle assembly 120 to achieve the attraction between the two.

[0101] In this way, the magnetic connection enables the nozzle assembly 120 to be quickly and easily installed on the mounting base 110 or removed therefrom without using tools, simplifying the operation process; in addition, due to the non-mechanical nature of the magnetic connection, the replacement and maintenance of the nozzle assembly 120 become more efficient, improving production efficiency; in addition, the magnetic connection can provide an automatic alignment function to a certain extent, reducing operation errors caused by misaligned installation, and moreover, the magnetic connection has no mechanical wear parts, which helps reduce wear and damage caused by frequent disassembly and assembly and extends the service life of the components.

[0102] In a possible implementation, one of the mounting base 110 and the nozzle assembly 120 may be provided with a plug-in member, and the other of the mounting base 110 and the nozzle assembly 120 may be provided with a slot, and the plug-in member is correspondingly plugged into the slot. Wherein, the specific positions of the slot and the plug-in member are not limited.

[0103] Exemplarily, the plug-in member may be a pin.

[0104] In this way, the cooperation between the plug-in member and the slot provides a reliable and stable connection, ensuring that the nozzle assembly 120 will not loosen or shift during operation. The structures of the plug-in member and the slot are generally relatively simple, easy to manufacture and maintain, and reduce the manufacturing and cost of the equipment.

[0105] In some embodiments, one of the mounting base 110 and the nozzle assembly 120 may be provided with a connecting portion, and the other of the mounting base 110 and the nozzle assembly 120 may be provided with a connecting hole. The outer wall surface of the connecting portion has an external thread, and the inner wall surface of the connecting hole has an internal thread, and the connecting portion is fitted and connected in the connecting hole.

[0106] In this way, the threaded connection provides a strong mechanical locking ability, ensuring that the nozzle assembly 120 remains stable during operation and is not easy to loosen or shift. Moreover, the threaded connection allows precise positioning and alignment. By rotating the threaded connection, the tightening force of the connection can be adjusted to meet different operating conditions and requirements, with higher flexibility.

[0107] In a possible implementation, the nozzle base 121 has a nozzle mounting portion 1212 (specifically refer to Figure 6 as shown), the mounting base 110 has a base mounting portion 113, the nozzle assembly 120 is embedded in the base mounting portion 113 through the nozzle mounting portion 1212, and the nozzle assembly 120 and the mounting base 110 are movably and detachably connected through the nozzle mounting portion 1212 and the base mounting portion 113.

[0108] In the embodiments of the present application, the nozzle assembly 120 and the mounting base 110 are movably and detachably connected through the nozzle mounting portion 1212 and the base mounting portion 113. Wherein, "sliding" means that the nozzle assembly 120 can move horizontally on the mounting base 110, or the nozzle assembly 120 can move vertically on the mounting base 110. This is not limited in this embodiment. Wherein, "detachably connected" means that the nozzle assembly 120 and the mounting base 110 are not fixedly connected.

[0109] In the embodiment of the present application, the specific structure of the base mounting portion 113 and the nozzle mounting portion 1212 is not limited. For example, the base mounting portion 113 may be provided with a protrusion, and the nozzle mounting portion 1212 may be provided with a groove, and the protrusion is correspondingly embedded in the groove, or the arrangement may be reversed. For example, the base mounting portion 113 may be provided with a buckle, and the nozzle mounting portion 1212 may be provided with a slot, or the arrangement may be reversed, and the buckle is correspondingly inserted into the slot. This embodiment does not limit this.

[0110] It should be noted that the mounting base 110 of this embodiment is a universal base, so the nozzle assembly 120 can be installed at any position of the mounting base 110 according to actual needs, which is more flexible and can meet the coating requirements of different products. At the same time, since the nozzle assembly 120 and the mounting base 110 are movably and detachably connected, only the corresponding nozzle assembly 120 needs to be replaced, and there is no need to replace the entire nozzle device 100, which is conducive to improving replacement efficiency and saving replacement costs.

[0111] In addition, by including the base mounting portion 113 and the nozzle mounting portion 1212, the nozzle assembly 120 is embedded in the base mounting portion 113 through the nozzle mounting portion 1212, so that the installation accuracy of the mounting base 110 and the nozzle assembly 120 can be guaranteed, and at the same time, it is beneficial to avoid the occurrence of material leakage during the evaporation process, thereby maximizing the evaporation effect. In addition, the present application can adjust the position, aperture, size and angle of the nozzle 122 at any time according to actual needs, which is beneficial to improving the versatility of the nozzle device 100, and the application range is wider, improving the user experience.

[0112] In one possible implementation, referring to Figure 6 and Figure 7 As shown, the nozzle assembly 120 may include a nozzle base 121 and a nozzle 122 disposed on the nozzle base 121, and the nozzle 122 is located on a side of the nozzle base 121 away from the mounting base 110. The nozzle mounting portion 1212 is disposed on the nozzle base 121, and the nozzle base 121 is embedded in the base mounting portion 113, and the nozzle base 121 and the mounting base 110 are movably and detachably connected through the nozzle mounting portion 1212 and the base mounting portion 113.

[0113] In the embodiment of the present application, there is no limitation on the assembly relationship between the nozzle base 121 and the nozzle 122. For example, the nozzle base 121 and the nozzle 122 may be an integral part, or the nozzle base 121 and the nozzle 122 may be movable and detachably connected. This embodiment does not limit this.

[0114] It is understandable that the nozzle base 121 and the nozzle 122 are made of the same thermally conductive material.

[0115] In a possible implementation, referring to Figure 2 and Figure 3 As shown, the number of nozzle assemblies 120 may include multiple. Nozzles 122 may be provided on at least a part of the nozzle bases 121, and the nozzle assemblies 120 provided with nozzles 122 communicate with the material chamber 211. Nozzle mounting portions 1212 are respectively provided on each nozzle base 121, and the multiple nozzle bases 121 are respectively embedded in the base mounting portion 113 through the multiple nozzle mounting portions 1212 in a one-to-one correspondence.

[0116] In the embodiments of the present application, the number of nozzle assemblies 120 is not limited. Exemplarily, the number of nozzle assemblies 120 may include two, three or more. This is not limited in this embodiment.

[0117] In the embodiments of the present application, the distance between any adjacent nozzle assemblies 120 among the multiple nozzle assemblies 120 is not limited. In addition, the outlet diameter, outlet angle, etc. of different nozzles 122 are not limited either, and can be specifically set according to the actual coating requirements.

[0118] It should be noted that the statement that nozzles 122 may be provided on at least a part of the nozzle bases 121 means that nozzles 122 can be installed according to requirements. At positions where nozzles 122 do not need to be installed, the nozzle bases 121 without openings can be used for shielding. At positions where nozzles 122 need to be installed, the nozzle bases 121 with openings can be used. In this way, the nozzle bases 121 can be reasonably utilized, so that different nozzles 122 can be installed and used according to the usage requirements, with higher flexibility and the ability to meet the coating requirements for different products.

[0119] In a possible implementation, referring to Figure 4 and Figure 5 As shown, the base mounting portion 113 may include a base mounting body 1131 and a base mounting groove 1132 opened on the base mounting body 1131.

[0120] Among them, the base mounting groove 1132 extends along the length direction of the mounting base 110, and the base mounting groove 1132 forms a sliding groove.

[0121] Referring to Figure 6 and Figure 7 As shown, the nozzle base 121 may include a nozzle mounting body 1211, and the nozzle mounting portion 1212 is provided on the nozzle mounting body 1211. The nozzle mounting body 1211 slides in the base mounting groove 1132.

[0122] In the embodiments of the present application, the depth, width, etc. of the base mounting groove 1132 are not limited, and can be specifically set according to actual needs.

[0123] In the embodiments of the present application, the assembly relationship between the nozzle mounting portion 1212 and the nozzle mounting body 1211 is not limited. Exemplarily, the nozzle mounting portion 1212 and the nozzle mounting body 1211 may be an integral part, or the nozzle mounting portion 1212 and the nozzle mounting body 1211 may be connected by welding, bonding or other means. In this embodiment, the nozzle mounting portion 1212 and the nozzle mounting body 1211 are taken as an integral part as an example for illustration, which helps to improve the structural strength of the nozzle base 121.

[0124] In a possible implementation manner, a plurality of mounting bosses may be provided on one of the base mounting body 1131 and the nozzle mounting portion 1212, and a plurality of mounting grooves may be provided on the other of the base mounting body 1131 and the nozzle mounting portion 1212; when the nozzle mounting portion 1212 is embedded in the base mounting body 1131, the plurality of mounting bosses are respectively clamped in the plurality of mounting grooves.

[0125] In the embodiments of the present application, the specific opening positions of the mounting bosses and the mounting grooves are not limited. Specifically, they can be set according to actual needs.

[0126] Exemplarily, referring to Figure 5 As shown, along the height direction of the base mounting body 1131, a plurality of base mounting bosses 1133 and base assembly grooves 1134 may be provided on the base mounting body 1131, the base assembly grooves 1134 extend along the length direction of the mounting base 110, and the base assembly grooves 1134 form sliding grooves.

[0127] Correspondingly, referring to Figure 6 and Figure 7 As shown, along the height direction of the nozzle base 121, a mounting boss 1213 and a mounting groove 1214 may be provided on the nozzle mounting portion 1212, the mounting boss 1213 is correspondingly embedded in the base assembly groove 1134, and the base mounting boss 1133 is correspondingly embedded in the mounting groove 1214. This embodiment is not limited thereto.

[0128] Exemplarily, the base mounting boss 1133 and the base mounting body 1131 may be an integral part, which helps to improve the structural strength of the mounting base 110, and the mounting boss 1213 and the nozzle mounting portion 1212 may be an integral part, which helps to improve the structural strength of the nozzle base 121.

[0129] Through the above assembly method, the installation accuracy of the mounting base 110 and the nozzle assembly 120 can be ensured. At the same time, during the evaporation process, it helps to improve the installation sealing performance of the mounting base 110 and the nozzle assembly 120, thereby avoiding the occurrence of material leakage, and thus maximizing the evaporation effect.

[0130] In a possible implementation manner, referring toFigure 2 and Figure 3 As shown in Figure 3 , the mounting base 110 may include a first mounting table 111 and a second mounting table 112, and a base mounting portion 113 is disposed on the first mounting table 111.

[0131] In the embodiments of the present application, the assembly relationship between the first mounting table 111 and the second mounting table 112, and between the first mounting table 111 and the base mounting portion 113 is not limited. Exemplarily, the first mounting table 111 and the second mounting table 112, and the first mounting table 111 and the base mounting portion 113 may be an integral part, which is beneficial to improving the structural strength of the mounting base 110.

[0132] When the nozzle mounting portion 1212 is embedded in the base mounting body 1131, the surface of the base mounting body 1131 may be flush with the surface of the nozzle mounting body 1211. In this way, after the mounting base 110 and the nozzle assembly 120 are installed, there is no gap between the surface of the base mounting body 1131 and the surface of the nozzle mounting body 1211, which is beneficial to avoiding the occurrence of material leakage, thereby maximizing the evaporation coating effect.

[0133] In a possible implementation manner, referring to Figure 2 and Figure 3 As shown in Figure 3 , a stepped portion 114 may be formed between the first mounting table 111 and the second mounting table 112. The nozzle device 100 may further include a stopper 130. Along the length direction of the mounting base 110, the stopper 130 is disposed at the edge of the stepped portion 114, and the stopper 130 stops the nozzle assembly 120.

[0134] In the embodiments of the present application, the shape, material, size, etc. of the stopper 130 are not limited, and may be specifically set according to actual needs. Exemplarily, the stopper 130 may be a baffle.

[0135] In this way, by disposing the stopper 130 at the edge of the stepped portion 114, after the nozzle assembly 120 and the mounting base 110 are installed, the nozzle assembly 120 and the mounting base 110 can be fixed at the edge position, which helps to ensure that the installation position of the nozzle assembly 120 remains unchanged, and further guarantees the evaporation coating effect. In addition, the stepped portion 114 can support and fix the stopper 130, further ensuring the stopping effect.

[0136] In a possible implementation manner, referring to Figure 1As shown, the mounting base 110 may be provided with a first through hole 115, and the first through hole 115 communicates with the material chamber 211 of the evaporation coating device 200; at least a part of the nozzle assemblies 120 may be provided with second through holes 123; when the nozzle assemblies 120 are embedded in the base mounting portion 113, the second through holes 123 and the first through hole 115 correspond to each other and communicate with each other, and the second through holes 123 communicate with the material chamber 211 through the first through hole 115.

[0137] Among them, the shape, size, etc. of the first through hole 115 and the second through hole 123 are not limited, and can be specifically set according to actual needs. It can be understood that the second through hole 123 penetrates through the nozzle 122 and the nozzle base 121.

[0138] In a possible implementation manner, at least a part of the nozzles 122 and the nozzle base 121 may be rotatably connected, and the rotation direction of the nozzle 122 intersects with the length direction of the mounting base 110. Exemplarily, the central axis of the nozzle 122 may have an included angle with respect to the length direction of the mounting base 110.

[0139] Exemplarily, at least a part means that: a part of the nozzles 122 and the nozzle base 121 may be rotatably connected, and a part of the nozzles 122 and the nozzle base 121 may be fixedly connected; or, all the nozzles 122 and the nozzle base 121 may be rotatably connected.

[0140] Exemplarily, referring to Figure 9 and Figure 10 as shown, the nozzle 122 may rotate clockwise along the Figure 9 arrow direction in Figure 10 as shown. Among them, the rotation angle of the nozzle 122 may be a.

[0141] It should be noted that in this embodiment, the rotation direction of the nozzle 122 is not limited, and it may rotate clockwise or counterclockwise.

[0142] In this way, the rotation of the nozzle 122 can change the direction of the gaseous evaporation coating material ejected from the nozzle 122, thereby expanding the range that the nozzle 122 can cover the target substrate 220 in its rotation direction, reducing the overlapping area of the evaporation coating layer, and improving the uniformity of the evaporation coating layer.

[0143] In a possible implementation manner, at least a part of the nozzles 122 and the nozzle base 121 are detachably connected. In this way, since the nozzle 122 can be separately disassembled and replaced, the cost of replacing the entire nozzle assembly 120 due to wear or blockage of the nozzle 122 is reduced.

[0144] In a possible implementation manner, referring to Figure 2 and Figure 3As shown, the nozzle 122 has a spray hole 124 on the side facing away from the material chamber 211. The shape of the longitudinal section of the spray hole 124 may include a circular hole, a square hole, or a fan-shaped hole. This embodiment does not limit this.

[0145] Exemplarily, the circular spray hole 124 helps to provide a uniform spray flow; the square hole can provide a spray flow with a clear boundary; the fan-shaped hole provides a wide spray flow, which is suitable for applications that require large-area coverage. This embodiment does not limit this.

[0146] In a possible implementation manner, the aperture of the spray hole 124 can be adjusted according to actual needs. Exemplarily, referring to Figure 11 and Figure 12 as shown, Figure 11 the aperture of the spray hole 124 of Figure 12 can be D1, and the aperture of the spray hole 124 of

[0147] can be D2, where D1 is greater than D2. It should be noted that this embodiment does not limit this, and the appropriate aperture can be selected specifically according to actual needs.

[0148] In this way, by adjusting the aperture, the performance of the nozzle 122 can be optimized to achieve the best effect, including improving the uniformity, coverage range, and efficiency of spraying, thereby improving the overall process effect; in addition, it helps to reduce the waste of materials and energy. For example, when a smaller flow rate is required, the aperture can be reduced to reduce material consumption.

[0149] The nozzle device and evaporation coating equipment provided by this application can be installed at any position on the installation base according to actual needs, with higher flexibility, and can meet the coating requirements for different products. At the same time, only the corresponding nozzle assembly needs to be replaced, without replacing the entire nozzle device, which is beneficial to improving the replacement efficiency and saving the replacement cost.

[0150] In the description of this application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0151] In the description of the present application, it should be understood that the terms "including" and "having" and any variations thereof used herein are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units need not be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0152] Unless otherwise clearly specified and defined, terms such as "installed", "connected", "coupled", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0153] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A nozzle device, used for a vapor deposition device, connected to a material chamber of the vapor deposition device, characterized in that: The nozzle device comprises a mounting base (110) and a nozzle assembly (120); The mounting base (110) is used to buckle with the cavity opening (212) of the material cavity (211); the nozzle assembly (120) is located on a side of the mounting base (110) away from the material cavity (211); and the nozzle assembly (120) is connected to the material cavity (211) through the mounting base (110); The number of the nozzle assemblies (120) includes a plurality, and the plurality of nozzle assemblies (120) are arranged at intervals along the length direction of the mounting base (110); Furthermore, the plurality of nozzle assemblies (120) and the mounting base (110) are movably and detachably connected, so that the positions of the plurality of nozzle assemblies (120) relative to the mounting base (110) are adjustable; The mounting base (110) and the nozzle assembly (120) are slidably and detachably connected; The nozzle assembly (120) comprises a nozzle base (121) and a nozzle (122) arranged on the nozzle base (121), wherein the nozzle (122) is located on a side of the nozzle base (121) facing away from the mounting base (110); The nozzle base (121) has a nozzle mounting portion (1212), the mounting base (110) has a base mounting portion (113), and the nozzle base (121) and the mounting base (110) are slidably and detachably connected via the nozzle mounting portion (1212) and the base mounting portion (113); The number of the nozzle assemblies (120) includes a plurality, and the nozzles (122) are arranged on at least a portion of the nozzle bases (121); Each of the nozzle bases (121) is provided with a nozzle mounting portion (1212), and a plurality of the nozzle bases (121) are embedded in the base mounting portion (113) via the plurality of the nozzle mounting portions (1212) in a one-to-one correspondence; At least a portion of the nozzles (122) are rotatably connected to the nozzle base (121), and the rotation direction of the nozzles (122) intersects with the length direction of the mounting base (110).

2. The nozzle device according to claim 1, characterized in that Along the length direction of the mounting base (110), the disassembly directions of the plurality of nozzle assemblies (120) relative to the mounting base (110) are consistent.

3. The nozzle device according to claim 1, characterized in that One of the mounting base (110) and the nozzle assembly (120) is provided with a slide groove, and one of the mounting base (110) and the nozzle assembly (120) is provided with a sliding block; The sliding block slides correspondingly in the sliding groove, forming a sliding state of the nozzle assembly (120) on the mounting base (110).

4. The nozzle device according to claim 1, characterized in that A magnetic component is provided between the mounting base (110) and the nozzle assembly (120), and the nozzle assembly (120) is adsorbed on the mounting base (110) via the magnetic component.

5. The nozzle device according to claim 1, characterized in that One of the mounting base (110) and the nozzle assembly (120) is provided with a plug-in component, and the other of the mounting base (110) and the nozzle assembly (120) is provided with a slot, and the plug-in component is correspondingly plugged into the slot; And / or, one of the mounting base (110) and the nozzle assembly (120) is provided with a connecting portion, and the other of the mounting base (110) and the nozzle assembly (120) is provided with a connecting hole, the outer wall surface of the connecting portion has an external thread, the inner wall surface of the connecting hole has an internal thread, and the connecting portion is fitted and connected in the connecting hole.

6. The nozzle device according to claim 1, characterized in that The base mounting portion (113) comprises a base mounting body (1131) and a base mounting groove (1132) provided on the base mounting body (1131), wherein the base mounting groove (1132) extends along the length direction of the mounting base (110), and the base mounting groove (1132) forms a slide groove; The nozzle base (121) comprises a nozzle mounting body (1211), and the nozzle mounting body (1211) slides in the base mounting groove (1132).

7. The nozzle device according to claim 6, characterized in that A mounting boss (1213) is provided on one of the base mounting body (1131) and the nozzle mounting portion (1212), and a base assembly groove (1134) is provided on the other of the base mounting body (1131) and the nozzle mounting portion (1212), wherein the base assembly groove (1134) extends along the length direction of the mounting base (110), and the base assembly groove (1134) forms a slide groove; When the nozzle mounting portion (1212) is embedded in the base mounting body (1131), the mounting boss (1213) slides in the base assembly groove (1134).

8. The nozzle device according to claim 7, characterized in that The mounting base (110) comprises a first mounting platform (111) and a second mounting platform (112), and the base mounting portion (113) is arranged on the first mounting platform (111); When the nozzle mounting portion (1212) is embedded in the base mounting body (1131), the surface of the base mounting body (1131) is flush with the surface of the nozzle mounting body (1211).

9. The nozzle device according to claim 8, characterized in that A step portion (114) is formed between the first mounting platform (111) and the second mounting platform (112); The nozzle device further comprises a stopper (130), which is arranged at the edge of the step portion (114) along the length direction of the mounting base (110), and the stopper (130) stops the nozzle assembly (120).

10. The nozzle device according to any one of claims 1 to 9, characterized in that The mounting base (110) is provided with a first through hole (115), the first through hole (115) being connected to the material chamber (211) of the evaporation device; at least some of the nozzle assemblies (120) are provided with a second through hole (123); The second through hole (123) corresponds to the first through hole (115) and is in communication with each other; the second through hole (123) is in communication with the material cavity (211) via the first through hole (115).

11. The nozzle device according to claim 1, characterized in that At least a portion of the nozzles (122) are detachably connected to the nozzle base (121).

12. The nozzle device according to claim 1, characterized in that The nozzle (122) has a spray hole (124) on a side away from the material chamber (211); the shape of the longitudinal cross-section of the spray hole (124) includes a circular hole, a square hole or a fan-shaped hole.

13. The nozzle device according to claim 1, characterized in that The nozzle base (121) is a heat-conducting metal part; and / or the nozzle (122) is a heat-conducting metal part; and / or the mounting base (110) is a heat-conducting metal part; Alternatively, a heat-conducting layer is provided between the nozzle assembly (120) and the mounting base (110).

14. A vapor deposition device, characterized in that: The invention comprises a vapor deposition crucible and a nozzle device according to any one of claims 1 to 13, wherein the vapor deposition crucible (210) has a material cavity (211), a mounting base (110) of the nozzle device is buckled into a cavity opening (212) of the material cavity (211), and a nozzle assembly (120) of the nozzle device is connected to the material cavity (211) via the mounting base (110).

15. The evaporation device according to claim 14, characterized in that: Also included is a heating device, the heating device being configured to heat the evaporation crucible; And / or, the evaporation equipment includes a heat preservation device, and the heat preservation device is arranged outside the evaporation crucible.

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