Machining equipment

Abstract

The invention provides processing equipment. The processing equipment comprises a first carrying device which carries materials to be processed from a storage position for storing the materials to a designated position in the first direction and carries the processed materials from the designated position to the storage position in the first direction; the processing device is provided with a material receiving position and is used for processing the to-be-processed material moved to the material receiving position so as to form a processed material; the second carrying device is used for carrying the to-be-processed materials from the specified position to the material receiving position in the second direction perpendicular to the first direction; and the third carrying device is used for carrying the processed materials from the material receiving position to an appointed position in the second direction. Compared with an arc-shaped track in the prior art, the material carrying tracks of the first carrying device, the second carrying device and the third carrying device can be linear. The layout of the processing equipment is more reasonable, the space utilization rate is higher, the occupied space of the whole machine is smaller, and therefore the machine can be suitable for more scenes.

Description

Technical Field

[0001] The present invention relates to the technical field of material processing, and in particular to a processing device. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polysilicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod is formed into a silicon wafer, that is, a wafer. Domestic wafer production lines are mainly 8-inch and 12-inch.

[0003] The processing equipment in the prior art mainly includes a loading device, a processing device and an unloading device. Specifically, the loading device can transport the wafer to be processed to the carrier of the processing device. Then, the processing mechanism of the processing device can cut the wafer to be processed on the carrier to form a processed wafer. Then, the unloading device can unload the processed wafer from the carrier. The loading device and the unloading device can alternately transport the wafer along an arc trajectory, so as to realize the loading and unloading of the wafer.

[0004] Since the loading and unloading devices transport the wafers alternately along an arc-shaped trajectory, the arc-shaped trajectory results in low space utilization of the processing equipment and a large overall size, which is contrary to the development trend of miniaturization and leads to limited application in many scenarios. Summary of the invention

[0005] In order to at least partially solve the problems existing in the prior art, the present invention provides a processing device. The processing device includes: a first conveying device, the first conveying device is used to convey the material to be processed from the storage position where the material is stored to the designated position along the first direction, and is used to convey the processed material from the designated position to the storage position along the first direction; a processing device, the processing device has a material receiving position, and the processing device is used to process the material to be processed moved to the material receiving position to form the processed material; a second conveying device, the second conveying device is used to convey the material to be processed from the designated position to the material receiving position along the second direction perpendicular to the first direction; and a third conveying device, the third conveying device is used to convey the processed material from the material receiving position to the designated position along the second direction.

[0006] Exemplarily, the first transporting device includes a first material picking component for picking up and placing materials, the second transporting device includes a second material picking component for picking up and placing materials, and the third transporting device includes a third material picking component for picking up and placing materials. The heights of the first material picking component, the second material picking component and the third material picking component meet the condition that they do not interfere with each other when working.

[0007] Exemplarily, the first material picking component includes a first track extending along a first direction and a first material picking piece connected to the first track and used for picking up and placing materials. The first material picking piece is movable between a storage position and a designated position relative to the first track, so as to be used for transporting the material to be processed from the storage position to the designated position along the first direction, and for transporting the processed material from the designated position to the storage position along the first direction.

[0008] Exemplarily, the processing equipment also includes a material rack having a silo for placing multiple layers of materials arranged in a vertical direction, and the storage position is located in the silo. The processing equipment also includes a layer-by-layer detection component for detecting layer-by-layer whether there is material to be processed in the silo, and the first material picking component is used to transport the material to be processed from the silo of the expected layer according to the detection result of the layer-by-layer detection component.

[0009] Exemplarily, the layer-by-layer detection component includes a transmitting sensor and a receiving sensor, there is a signal transmission line between the transmitting sensor and the receiving sensor, and the materials to be processed on the silo block the signal transmission line.

[0010] Exemplarily, the second transport device includes a motor, a second track extending along the second direction, and a second material picking piece connected to the second track and used for picking up and placing materials. The second material picking piece is movable between a designated position and a material receiving position relative to the second track under the drive of the motor, so as to transport the material to be processed from the designated position to the material receiving position along the second direction.

[0011] Exemplarily, a dustproof guard plate is provided on the top of the second material picking member, and the dustproof guard plate is used to shield the material to be processed on the second material picking member.

[0012] Exemplarily, the third transport device includes a transverse cylinder, a third track extending along the second direction, and a third material picking piece connected to the third track and used for picking up and placing materials. The third material picking piece is movable between a material receiving position and a designated position relative to the third track under the drive of the transverse cylinder, so as to transport the processed material from the material receiving position to the designated position along the second direction.

[0013] Exemplarily, the third transporting device also includes a lifting cylinder connected between the transverse cylinder and the third material picking part and used to drive the third material picking part to rise and fall. The second material picking component is at a first height when transporting the material to be processed along the second direction, and the third material picking part is at a second height when transporting the processed material along the second direction, and the second height is greater than the first height.

[0014] Exemplarily, a protective lock is provided on the lifting cylinder to prevent the cylinder rod from falling.

[0015] Exemplarily, the processing equipment also includes an initial positioning component and a wide-angle camera component. The designated position is located on the initial positioning component, the initial positioning component is used to initially position the material to be processed located at the designated position, and the wide-angle camera component is used to photograph the material to be processed located at the designated position.

[0016] Exemplarily, the processing device includes a processing platform and a clamping mechanism arranged on the processing platform. The material receiving position is located on the processing platform. The processing platform is movable between the material receiving position and the processing position for transporting the material to be processed to the processing position, and for transporting the processed material from the processing position to the material receiving position. The clamping mechanism is used to clamp the material on the processing platform.

[0017] Exemplarily, the clamping mechanism includes a rotary cylinder and a clamp connected to the rotary cylinder, and the clamp can clamp the material on the processing platform when driven by the rotary cylinder.

[0018] Exemplarily, the processing equipment is a laser processing equipment, and the processing device further includes a laser unit, and the laser unit is used to process the material to be processed on the processing platform located at the processing position to form a processed material.

[0019] The processing equipment provided by the embodiment of the present invention can be a straight-line track for the first handling device, the second handling device, and the third handling device to handle materials, compared to the arc-shaped track in the prior art. The space occupied by the straight-line track can be considered to be only related to the size of the material being handled, and the occupied space can be smaller. Therefore, the layout of the processing equipment is more reasonable, the space utilization rate is higher, and the whole machine occupies less space, so that it can be applied to more scenarios. When the size of the material (such as an 8-inch wafer) is large, through simple structural changes, the second handling device and the third handling device can have a suitable interval along the first direction, so that the second handling device and the third handling device do not interfere with each other when they respectively handle the materials. Therefore, the processing equipment is more suitable for processing larger materials.

[0020] A series of simplified concepts are introduced in the summary of the invention, which will be further described in detail in the detailed description. The summary of the invention does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the scope of protection of the claimed technical solution.

[0021] The advantages and features of the present invention are described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The following drawings of the present invention are used as part of the present invention for understanding the present invention. The drawings show the embodiments of the present invention and their descriptions, and are used to explain the principles of the present invention. In the drawings,

[0023] Figure 1 is a perspective view of a processing device according to an exemplary embodiment of the present invention;

[0024] Figure 2 for Figure 1A top view of the processing equipment shown in FIG.

[0025] Figure 3 for Figure 1 A perspective view of a partial structure of a processing device shown in FIG.

[0026] Figure 4 for Figure 3 A perspective view of a second handling device shown in FIG.

[0027] Figure 5 for Figure 3 A perspective view of a first handling device shown in FIG.

[0028] Figure 6 for Figure 3 A perspective view of a third transport device and a structure arranged on the third transport device shown in FIG.

[0029] Figure 7 for Figure 6 A perspective view of a structure provided on a third transport device as shown in FIG.

[0030] Figure 8 for Figure 1 A perspective view of an angle of the initial positioning assembly shown in FIG.

[0031] Fig. 9 for Figure 8 A three-dimensional view of the initial positioning assembly from another angle is shown in FIG.

[0032] The above drawings include the following reference numerals:

[0033] 100, first handling device; 110, first material picking component; 111, first track; 112, first material picking member; 113, motor; 120, first drag chain; 130, second safety strip; 140, third safety strip; 150, second sensor; 161, gripper; 162, finger cylinder; 163, micro rail; 200, second handling device; 210, second material picking component; 211, second track; 212, second material picking member; 213, motor; 214, dust protection plate; 215, remote end; 220, second drag chain; 230, first safety strip; 240, first sensor; 251, connecting bracket; 252, suction cup; 300, third handling device; 310, third material picking component; 311, third track; 312, third material picking member Components; 313, transverse cylinder; 320, lifting cylinder; 330, third drag chain; 400, processing device; 410, processing platform; 420, laser unit; 510, material rack; 520, initial positioning component; 521, carrier; 522, limit strip; 523, synchronous wheel; 524, synchronous belt; 525, guide rail; 526, hydraulic buffer; 527, cylinder in-position sensor; 528, seat detection sensor; 530, wide-angle camera component; 540, layer-by-layer detection component; 550, mounting bracket; 561, transmitting sensor; 562, receiving sensor; 563, ion fan; 564, feed detector; 570, light source; 910, material; 920, storage position; 930, designated position; 940, receiving position; 950, processing position. DETAILED DESCRIPTION

[0034] In the following description, a large amount of details are provided so that the present invention can be thoroughly understood. However, it will be appreciated by those skilled in the art that the following description only exemplarily illustrates a preferred embodiment of the present invention, and the present invention can be implemented without one or more such details. In addition, in order to avoid confusion with the present invention, some technical features well known in the art are not described in detail.

[0035] An embodiment of the present invention provides a processing device. The processing device includes but is not limited to a cutting processing device, a welding processing device or a drilling processing device. The processing device can realize operations such as transporting and processing materials. The materials include but are not limited to wafers or plates. The processing device of the embodiment of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0036] like Figure 1-3 As shown, the processing equipment may include a first transport device 100 , a processing device 400 , a second transport device 200 , and a third transport device 300 .

[0037] The first transport device 100 can be used to transport the material to be processed from the storage position 920 to the designated position 930 along the first direction XX. In addition, the first transport device 100 can also be used to transport the processed material from the designated position 930 to the storage position 920 along the first direction XX. The storage position 920 can be used to store the material 910. It should be noted that the material 910 is the material to be processed before being processed by the processing device 400, and the material 910 is the processed material after being processed by the processing device 400. Depending on the material 910, the first transport device 100 can adopt any suitable transport device, such as a vacuum suction cup transport device, a magnetic suction transport device or a clamping claw transport device, as long as the material 910 can be transported between the storage position 920 and the designated position 930.

[0038] The processing device 400 may have a material receiving position 940. The processing device 400 may be used to process the material to be processed moved to the material receiving position 940 to form a processed material. It should be noted that the processing device 400 may directly process the material to be processed located at the material receiving position 940, or may process the material to be processed moved from the material receiving position 940 to other positions (e.g., the processing position 950 described below). Depending on the processing technology of the material 910, the processing device 400 may adopt any suitable processing device, such as a cutting processing device, a welding processing device, or a drilling processing device.

[0039] Exemplarily, the processing equipment may include a laser processing device. The processing device 400 may include a processing platform 410 and a clamping mechanism. The material receiving position 940 may be located on the processing platform 410. The processing platform 410 may be used to place the material 910. In this way, the processing platform 410 may be used to transport the material 910 between the processing position 950 and the material receiving position 940. The processing platform 410 may be used to transport the material to be processed from the material receiving position 940 to the processing position 950. Then, the processing device 400 may process the material to be processed located on the processing position 950 to form a processed material. Then, the processing platform 410 may be used to transport the processed material from the processing position 950 to the material receiving position 940. The clamping mechanism may be provided on the processing platform 410. The clamping mechanism may be used to clamp the material 910 on the processing platform 410. The clamping mechanism may clamp and fix the material 910, thereby preventing the material 910 from shifting on the processing platform 410, which may be beneficial to processing. The clamping mechanism includes but is not limited to a pneumatic clamping mechanism, a motor clamping mechanism or a hydraulic clamping mechanism. In some embodiments, the clamping mechanism may include a rotary cylinder and a clamping piece. The clamping piece may be connected to the rotary cylinder. Under the drive of the rotary cylinder, the clamping piece may clamp the material 910 on the processing platform 410. With such an arrangement, the structure of the clamping mechanism is simple and the manufacturing cost is low.

[0040] Exemplarily, the processing device 400 may also include a laser unit 420. The laser unit 420 may be used to process the material to be processed on the processing platform 410 located at the processing position 950 to form a processed material. The laser unit 420 may use various types of laser units known in the art or that may appear in the future, which may emit lasers, so that the material to be processed can be cut and processed to form a processed material. In some embodiments, the laser unit 420 may emit lasers to generate high temperatures by focusing laser energy, so that invisible cutting of the wafer can be achieved, that is, explosion points are generated inside the wafer cutting path, and cracks are generated by connecting multiple points, so that the wafer chips are separated to achieve the purpose of cutting. In this way, no dust is generated during the processing and the wafer will not be contaminated. The processing process is non-contact processing, with little thermal impact, and is very effective for processing thinner wafers. The processing device 400 can be equipped with a high-precision, high-speed marble linear motor platform with high processing efficiency, a maximum linear speed of 1m / s, and a processing accuracy of ±1 micron. The processing device 400 can use an optical positioning camera system to achieve full-piece and incomplete wafer cutting, and the positioning accuracy can reach micron level. The processing device 400 can be equipped with a Z-axis following system, which can automatically follow the Z-axis according to the wafer fluctuation at a high line speed to ensure the depth consistency of the laser focus.

[0041] The second transport device 200 can be used to transport the material to be processed from the designated position 930 to the material receiving position 940 along the second direction YY. The second direction YY can be perpendicular to the first direction XX. Depending on the material 910, the second transport device 200 can adopt any suitable transport device, such as a vacuum suction cup transport device, a magnetic suction transport device, or a clamping claw transport device, as long as the material to be processed can be transported from the designated position 930 to the material receiving position 940.

[0042] The third transport device 300 can be used to transport the processed material from the receiving position 940 to the designated position 930 along the second direction YY. According to the different materials 910, the third transport device 300 can adopt any suitable transport device, such as a vacuum suction cup transport device, a magnetic suction transport device or a clamping claw transport device, as long as the processed material can be transported from the receiving position 940 to the designated position 930.

[0043] The following schematically introduces the workflow of the processing equipment. First, the first handling device 100 can transport the material to be processed from the storage position 920 to the designated position 930 along the first direction XX. Then, the second handling device 200 can transport the material to be processed from the designated position 930 to the material receiving position 940 along the second direction YY. Then, the processing device 400 can process the material to be processed moved to the material receiving position 940 to form processed materials. Then, the third handling device 300 can transport the processed material from the material receiving position 940 to the designated position 930 along the second direction YY. Then, the first handling device 100 can transport the processed material from the designated position 930 to the storage position 920 along the first direction XX. In this way, the processing equipment completes the processing of the material 910. The processing equipment can execute the above process cyclically to process more materials 910.

[0044] In the processing equipment provided by the embodiment of the present invention, compared with the arc-shaped trajectory in the prior art, the trajectory of the first handling device 100, the second handling device 200 and the third handling device 300 for handling the material 910 can be respectively in a straight line. The size of the space occupied by the straight-line trajectory can be considered to be only related to the size of the material 910 being handled, and the occupied space can be smaller. Therefore, the layout of the processing equipment is more reasonable, the space utilization rate is higher, and the space occupied by the whole machine is smaller, so that it can be applied to more scenarios. When the size of the material 910 (such as an 8-inch wafer) is large, through simple structural changes, the second handling device 200 and the third handling device 300 can have a suitable interval along the first direction XX, so that the second handling device 200 and the third handling device 300 do not interfere with each other when they respectively handle the material 910. Therefore, the processing equipment is more suitable for processing materials 910 with larger sizes.

[0045] For example, Figure 1-6 As shown, the first handling device 100 may include a first material picking assembly 110 for picking up and placing materials 910. Specifically, the first material picking assembly 110 can pick up the material to be processed in the storage position 920, and then transport it to the designated position 930 along the first direction XX. In addition, the first material picking assembly 110 can pick up the processed material in the designated position 930, and then transport it to the storage position 920 along the first direction XX. The first handling device 100 may also include a first drag chain 120. The cables and / or pipelines such as air pipes connected to the first material picking assembly 110 can be arranged on the first drag chain 120 to avoid entanglement caused by the movement of the first material picking assembly 110.

[0046] The second handling device 200 may include a second material taking component 210 for taking and placing materials 910. Specifically, the second material taking component 210 may pick up the material to be processed at the designated position 930, and then transport it to the material receiving position 940 along the second direction YY. The second handling device 200 may also include a second drag chain 220. Cables and / or pipelines such as air pipes connected to the second material taking component 210 may be arranged on the second drag chain 220 to avoid entanglement caused by the movement of the second material taking component 210.

[0047] The third handling device 300 may include a third material taking component 310 for taking and placing materials 910. Specifically, the third material taking component 310 may pick up the processed material at the designated position 930, and then carry it to the designated position 930 along the second direction YY. The third handling device 300 may also include a third drag chain 330. Cables and / or pipelines such as air pipes connected to the third material taking component 310 may be arranged on the third drag chain 330 to avoid entanglement caused by the movement of the third material taking component 310.

[0048] The heights of the first material-picking assembly 110, the second material-picking assembly 210 and the third material-picking assembly 310 can satisfy the condition that they do not interfere with each other when working. That is to say, the first material-picking assembly 110, the second material-picking assembly 210 and the third material-picking assembly 310 can be at any suitable height, as long as they can complete the work without interfering with each other. Exemplarily, at least two of the first material-picking assembly 110, the second material-picking assembly 210 and the third material-picking assembly 310 can move and carry materials 910 at different heights. Exemplarily, in the process of the second material-picking assembly 210 carrying the material to be processed from the designated position 930 to the material receiving position 940 along the second direction YY, the third material-picking assembly 310 can carry the processed material processed by the processing device 400 from the material receiving position 940 to the designated position 930 along the second direction YY. In this way, the processing device 400 can be in a state of processing for a long time, thereby improving the working efficiency of the processing equipment.

[0049] Depending on the material 910, the first material picking component 110 can adopt various types of material picking components known in the art or that may appear in the future, including but not limited to vacuum suction cup material picking components, magnetic suction material picking components or clamping claw material picking components. Similarly, depending on the material 910, the second material picking component 210 can adopt various types of material picking components known in the art or that may appear in the future, including but not limited to vacuum suction cup material picking components, magnetic suction material picking components or clamping claw material picking components. Depending on the material 910, the third material picking component 310 can adopt various types of material picking components known in the art or that may appear in the future, including but not limited to vacuum suction cup material picking components, magnetic suction material picking components or clamping claw material picking components. In the embodiment shown in the figure, the first material picking component 110 can include a clamping claw material picking component, and the second material picking component 210 and the third material picking component 310 can both include a vacuum suction cup material picking component.

[0050] For example, Figure 1-3 As shown in Figures 5 and 6, the first material picking assembly 110 may include a first track 111 and a first material picking member 112. The first track 111 may extend along a first direction XX. The first material picking member 112 may be used to pick and place materials 910. In addition, the first material picking member 112 may be connected to the first track 111. Relative to the first track 111, the first material picking member 112 may move between a storage position 920 and a designated position 930, so as to be used to transport the material to be processed from the storage position 920 to the designated position 930 along the first direction XX, and to be used to transport the processed material from the designated position 930 to the storage position 920 along the first direction XX. Depending on the material 910, the first material picking member 112 may adopt various types of material picking members known in the art or that may appear in the future, including but not limited to vacuum suction cup material picking members, magnetic suction material picking members or clamping claw material picking members. In the embodiment shown in the figure, the first material picking member 112 may include a clamping claw material picking member. The first track 111 can improve the linearity and stability of the movement of the first material picking member 112, so that the material 910 can be transported more stably. The first material picking member 112 can be driven manually, by a cylinder, by a hydraulic cylinder, or by a motor 113 shown in the figure, so that the material 910 can be transported between the storage position 920 and the designated position 930 along the first track 111.

[0051] For example, Figure 1-2 As shown, the processing equipment may further include a material rack 510. The material rack 510 may have a material bin. The material bin may be used to place multiple layers of materials 910 arranged in a vertical direction. Exemplarily, the vertical direction may be perpendicular to the first direction XX and the second direction YY. Specifically, the material bin may have multiple layers arranged in a vertical direction, and each layer may be used to place a material 910. The multiple layers of materials 910 may include both materials to be processed and processed materials. The storage location 920 may be located in the material bin. As shown in FIG. Figure 6-7As shown, the processing equipment may further include a layer-by-layer detection component 540. The layer-by-layer detection component 540 may be used to detect layer by layer whether there is material to be processed in the silo. The first material picking component 112 may be used to transport the material to be processed from the silo of the expected layer according to the detection result of the layer-by-layer detection component 540. The layer-by-layer detection component 540 includes but is not limited to an infrared detection component or a laser detection component. With such a configuration, the first material picking component 112 will not grab other layers outside the expected layer, so that the material to be processed can be accurately picked up, thereby improving the working efficiency and reliability of the processing equipment.

[0052] Exemplarily, the layer-by-layer detection component 540 may include a transmitting sensor and a receiving sensor. A signal transmission line may exist between the transmitting sensor and the receiving sensor. Specifically, the transmitting sensor may transmit the signal transmission line, and the receiving sensor may receive the signal transmission line. The material to be processed on the silo may block the signal transmission line. In this way, when there is material to be processed on the silo, the material to be processed may block the signal transmission line so that the receiving sensor cannot receive the signal transmission line. In this way, by using the transmitting sensor and the receiving sensor, it is possible to detect whether there is material to be processed in the silo. The structure of the layer-by-layer detection component 540 is relatively simple and has high reliability.

[0053] For example, Figure 6-7 As shown, the processing equipment may further include a mounting frame 550. The layer-by-layer detection assembly 540 may be disposed on the mounting frame 550. A transmitting sensor 561 and a receiving sensor 562 may be disposed on the side of the mounting frame 550 facing the material rack 510. A signal transmission line may exist between the transmitting sensor 561 and the receiving sensor 562. Specifically, the transmitting sensor 561 may transmit the signal transmission line, and the receiving sensor 562 may receive the signal transmission line. The qualified position of the material to be processed on the material rack 510 may be located on one side of the signal transmission line. The material to be processed in an unqualified position on the material rack 510 may block the signal transmission line. In this way, when there is a material to be processed in an unqualified position on the material rack 510, the material to be processed may block the signal transmission line so that the receiving sensor 562 cannot receive the signal transmission line. In this way, through the transmitting sensor 561 and the receiving sensor 562, it is possible to detect whether the material to be processed on the material rack 510 is located at a qualified position. When the material to be processed on the material rack 510 is at a qualified position, it can be convenient for the first material picker 112 to pick it up. An ion blower 563 and a material input detector 564 can also be provided on the mounting frame 550. During the process that the first material picker 112 picks up the material to be processed and moves to the designated position 930, the material input detector 564 can detect the material to be processed, so as to confirm that the material to be processed has entered the processing flow. The ion blower 563 can blow ion wind to the material to be processed to effectively remove static electricity and prevent static electricity pollution and damage.

[0054] For example, Figure 1-4 As shown, the second handling device 200 may include a motor 213, a second track 211 and a second material picking member 212. The second track 211 may extend along the second direction YY. The second material picking member 212 may be used to pick and place the material 910. In addition, the second material picking member 212 may be connected to the second track 211. Driven by the motor 213, the second material picking member 212 may move between the designated position 930 and the material receiving position 940 relative to the second track 211, so as to carry the material to be processed from the designated position 930 to the material receiving position 940 along the second direction YY. Depending on the material 910, the second material picking member 212 may adopt various types of material picking members known in the art or that may appear in the future, including but not limited to vacuum suction cup material picking members, magnetic suction material picking members or clamping claw material picking members. In the embodiment shown in the figure, the second material picking member 212 may include a vacuum suction cup material picking member. The second track 211 may improve the linearity and stability of the movement of the second material picking member 212, so that the material 910 may be carried more stably. The motor 213 includes, but is not limited to, a servo motor or a stepper motor.

[0055] For example, Figure 4 As shown, the second material picking member 212 may include a connecting bracket 251 and a plurality of suction cups 252. The connecting bracket 251 may be connected to the second track 211. In addition, the motor 213 may be connected to the connecting bracket 251 to drive the connecting bracket 251 to move relative to the second track 211. A plurality of suction cups 252 may be provided on the connecting bracket 251. The second material picking member 212 may be used to adsorb the material to be processed so as to transport the material to be processed from the storage position 920 to the designated position 930. Specifically, one end of the plurality of suction cups 252 may be used to be connected to a vacuuming device. The vacuuming device may be vacuumed, and when the vacuum value of the plurality of suction cups 252 reaches a predetermined value, the plurality of suction cups 252 may adsorb different positions of the material to be processed.

[0056] For example, Figure 4 As shown, a dustproof guard plate 214 may be provided on the top of the second material picking member 212. The dustproof guard plate 214 may be connected to the connecting bracket 251. The dustproof guard plate 214 may be located above the second material picking member 212, so that it may be used to shield the material to be processed on the second material picking member 212. In this way, the dustproof guard plate 214 may prevent dirt such as dust from falling on the material to be processed, thereby preventing the dirt from affecting the processing of the material to be processed. In addition, the dustproof guard plate 214 may also play a protective role, preventing the components above the dustproof guard plate 214 (such as the third material picking member 312 described below) from accidentally falling and damaging the second material picking member 212 and the material to be processed thereon.

[0057] For example, Figure 1-3As shown in Figure 6, the third handling device 300 may include a transverse cylinder 313, a third track 311 and a third material picking member 312. The third track 311 may extend along the second direction YY. The third material picking member 312 may be used to pick and place materials 910. And, the third material picking member 312 may be connected to the third track 311. Driven by the transverse cylinder 313, the third material picking member 312 may move between the designated position 930 and the material receiving position 940 relative to the third track 311, so as to carry the processed material from the material receiving position 940 to the designated position 930 along the second direction YY. Depending on the material 910, the third material picking member 312 may adopt various types of material picking members known in the art or that may appear in the future, including but not limited to vacuum suction cup material picking members, magnetic suction material picking members or clamping claw material picking members. In the embodiment shown in the figure, the third material picking member 312 may include a vacuum suction cup material picking member. The third track 311 can improve the linearity and stability of the movement of the third material picking member 312, so that the material 910 can be transported more stably. The traverse cylinder 313 includes but is not limited to a rod cylinder or a rodless cylinder.

[0058] For example, Figure 6 As shown, the third handling device 300 may also include a lifting cylinder 320. The lifting cylinder 320 may be connected between the transverse cylinder 313 and the third material picking member 312. Specifically, the cylinder rod of the lifting cylinder 320 may be connected to the third material picking member 312. In this way, under the drive of the transverse cylinder 313, the third material picking member 312 and the lifting cylinder 320 may be synchronously moved between the designated position 930 and the material receiving position 940 relative to the third track 311. The lifting cylinder 320 may be used to drive the third material picking member 312 to rise and fall. The second material picking member 212 may be at a first height when carrying the material to be processed along the second direction YY. The third material picking member 312 may be at a second height when carrying the processed material along the second direction YY. The second height may be greater than the first height. Specifically, the lifting cylinder 320 may drive the third material picking member 312 to descend so that the third material picking member 312 may pick up the processed material at the material receiving position 940 or place the processed material at the designated position 930. The lifting cylinder 320 can drive the third material picking member 312 to rise to the second height, so that the third material picking member 312 can move between the material receiving position 940 and the designated position 930. In this way, when the third material picking member 312 moves between the material receiving position 940 and the designated position 930 along the second direction YY, it is not at the same height as the second material picking member 212, so that no interference occurs. In this way, the distance between the second material picking member 212 and the third material picking member 312 along the first direction XX can be appropriately reduced, so that the structure of the processing equipment can be made more compact.

[0059] For example, a protection lock for preventing the cylinder rod of the lifting cylinder 320 from falling can be provided on the lifting cylinder 320. By providing the protection lock, when the processing equipment is accidentally powered off or gas is cut off, the third material picking member 312 can be prevented from falling, thereby avoiding damage to the processed materials.

[0060] For example, Figure 4 As shown, the second track 211 may be provided with a first safety strip 230. The first safety strip 230 may extend along the second direction YY. The first safety strip 230 may be provided on the second track 211 by any suitable means such as welding, clamping or connecting with a connector. The second material picking member 212 may be provided with a first sensor 240. The first sensor 240 may select various types of sensors known in the art or that may appear in the future, including but not limited to a laser sensor or an infrared sensor. As the second material picking member 212 moves along the second track 211, when the first sensor 240 moves to the position area corresponding to the first safety strip 230, the first sensor 240 may detect the first safety strip 230. At this time, the first material picking member 112 may move freely. That is, when the first sensor 240 moves to the position area corresponding to the first safety strip 230, the second material picking member 212 and the first material picking member 112 may not interfere with each other, so that no collision occurs. In this way, the second material picking member 212 and the first material picking member 112 may move simultaneously to carry the material 910 respectively. When the first sensor 240 moves out of the position area corresponding to the first safety strip 230, the first sensor 240 cannot detect the first safety strip 230. At this time, the first material picking member 112 cannot move freely. For example, the first material picking member 112 can stop or move within a limited area to avoid interference with the second material picking member 212.

[0061] In some embodiments, when the second material picking member 212 picks up the material to be processed at the designated position 930, the first sensor 240 can be located outside the position area corresponding to the first safety strip 230. In this way, the first material picking member 112 cannot move freely, thereby avoiding interference with the second material picking member 212. When the second material picking member 212 transports the material to be processed to the material receiving position 940, the first sensor 240 can be located in the position area corresponding to the first safety strip 230. In this way, the first material picking member 112 can move freely.

[0062] In summary, by reasonably setting the position of the first safety strip 230, when the first sensor 240 moves to the position area corresponding to the first safety strip 230, the first material picker 112 will not collide with the second material picker 212 no matter how it moves. Therefore, the safety and stability of the processing equipment are relatively high. In addition, when the second material picker 212 moves a long distance along the second track 211, the range in which it does not interfere with the first material picker 112 is larger. In this way, the length of the first safety strip 230 can be appropriately increased to increase the time in which the first material picker 112 can move freely, so that the first material picker 112 can perform more operations, thereby improving the working efficiency of the processing equipment. Therefore, only the length of the first safety strip 230 needs to be changed to be applicable to the range in which the first material picker 112 and the second material picker 212 do not interfere with each other, without the need to increase the number of sensors. In this way, the structure of the processing equipment is more concise and the cost is relatively low.

[0063] For example, Figure 5 As shown, the second safety strip 130 and the third safety strip 140 may be provided at both ends of the first track 111, respectively. The structures of the second safety strip 130 and the third safety strip 140 may be the same or different. The second safety strip 130 and the third safety strip 140 may extend along the first direction XX, respectively. The second safety strip 130 and the third safety strip 140 may be provided on the first track 111, respectively, by any suitable means such as welding, clamping or connecting with a connector. A second sensor 150 may be provided on the first material picking member 112. The second sensor 150 may select various types of sensors known in the art or that may appear in the future, including but not limited to laser sensors or infrared sensors. When the first sensor 240 is located outside the position area corresponding to the first safety strip 230, the second sensor 150 may be located in the position area corresponding to the second safety strip 130, or the second sensor 150 may be located in the position area corresponding to the third safety strip 140. As the first material picking member 112 moves along the first track 111, when the second sensor 150 moves to the position area corresponding to the second safety strip 130, the second sensor 150 can detect the second safety strip 130; when the second sensor 150 moves to the position area corresponding to the third safety strip 140, the second sensor 150 can detect the third safety strip 140. When the first sensor 240 is located outside the position area corresponding to the first safety strip 230, the first material picking member 112 can move at both ends of the first track 111, so as to avoid the space in the middle of the first track 111 to avoid interference with the second material picking member 212. In this way, the first sensor 240 and the second sensor 150 can work together to prevent the first material picking member 112 and the second material picking member 212 from interfering with each other, thereby improving the reliability of the processing equipment and further reducing the probability of dangerous accidents.

[0064] For example, Figure 4 As shown, the second rail 211 may have a remote end 215 remote from the first handling device 100. The first safety bar 230 may be arranged near the remote end 215, so as to be remote from the first handling device 100. Such arrangement can further ensure that when the first sensor 240 moves to the position area corresponding to the first safety bar 230, the second material picking member 212 and the first material picking member 112 will not collide. Based on this, the second material picking member 212 and the first material picking member 112 of larger size can be assembled to be used for handling large-sized materials 910.

[0065] For example, Figure 4 As shown, along the second direction YY, the length of the first safety strip 230 can be less than the length of the second track 211. With this arrangement, as the second material picking member 212 moves along the second track 211, the first sensor 240 can move between inside and outside the position area corresponding to the first safety strip 230. The structure of the second transport device 200 is relatively simple, and the user experience is better.

[0066] For example, Figure 5 As shown, the first material picking member 112 may include a clamp 161 and a finger cylinder 162. The finger cylinder 162 may be connected to the first track 111. And, the finger cylinder 162 may move relative to the first track 111. The clamp 161 may be connected to the finger cylinder 162. The finger cylinder 162 may drive the clamp 161 to open and close, so as to transport the material to be processed from the storage position 920 to the designated position 930 along the first direction XX, and may also be used to transport the processed material from the designated position 930 to the storage position 920 along the first direction XX. The first material picking member 112 may also include a micro-rail 163, a spring (not shown) and a stopper (not shown). The finger cylinder 162 is movable along the micro-rail 163. The spring may be connected between the stopper and the finger cylinder 162. In this arrangement, when the clamp 161 clamps the material 910, if the material 910 abuts against the clamp 161, the finger cylinder 162 will move along the micro-rail 163 to compress the spring. When the material 910 no longer abuts against the clamping jaw 161, the spring can release elastic potential energy to move the clamping jaw 161 to the initial position, so as to be ready for the next clamping of the material 910. In this way, the clamping jaw 161 can achieve a flexible collision with the material 910, so there is no need to worry about a hard collision when clamping the material 910. In this way, the clamping jaw 161 can get as close as possible to and clamp the material 910, so as to avoid the material 910 from falling due to inadequate clamping.

[0067] For example, Figure 1 and 8-9, the processing equipment may also include an initial positioning component 520 and a wide-angle camera component 530. The designated position 930 may be located on the initial positioning component 520. The first handling device 100 may pick up the material to be processed at the storage position 920, and then transport it to the designated position 930 on the initial positioning component 520 along the first direction XX. The initial positioning component 520 may be used to initially position the material to be processed at the designated position 930. The structure of the initial positioning component 520 may be arbitrary, for example, it may include an initial positioning component for initially positioning the material to be processed through a magnetic suction member, or an initial positioning component for initially positioning the material to be processed through a guide channel. In this way, the second handling device 200 may accurately pick up the material to be processed, so that the material to be processed may be transported from the designated position 930 to the material receiving position 940. With such a configuration, the reliability of the processing equipment is high. The wide-angle camera component 530 may be used to photograph the material to be processed at the designated position 930. The wide-angle camera assembly 530 can capture information such as the shape and / or position of the material to be processed, so as to determine the general outline of the material to be processed in advance, reduce the calculation range for subsequent precise positioning, and provide a basis for subsequent processing. A light source 570 can be provided at the bottom of the initial positioning assembly 520. The wide-angle camera assembly 530 can be located above the light source 570. The light source 570 can provide lighting for the wide-angle camera assembly 530.

[0068] For example, Figure 8-9As shown, the initial positioning component 520 may include a carrier 521 and two limit bars 522. Both limit bars 522 may extend along the first direction XX. The light source 570 may be arranged on the top of the carrier 521. The two limit bars 522 may be arranged on both sides of the carrier 521 along the second direction YY. The storage position 920 may be located on the carrier 521. In addition, the storage position 920 may be located between the two limit bars 522. When the first handling device 100 carries the material to be processed to the storage position 920, the two limit bars 522 may hold the material to be processed. Then, the two limit bars 522 may be combined along the second direction YY, so that the material to be processed may be clamped and positioned. The two limit bars 522 may be driven by any suitable means such as manual, motor or cylinder. Exemplarily, the initial positioning component 520 may also include a synchronous wheel 523 and a synchronous belt 524 sleeved on the synchronous wheel 523. The synchronous wheel 523 may be arranged on the carrier 521. The two limit bars 522 can be connected to the synchronous belt 524. The two limit bars 522 can be opened and closed synchronously by the synchronous belt 524 moving on the synchronous wheel 523. Exemplarily, the initial positioning assembly 520 can also include a guide rail 525, a hydraulic buffer 526, a cylinder in-position sensor 527 and a seat detection sensor 528 arranged on the carrier 521. The guide rail 525 can extend along the second direction YY. The two limit bars 522 can slide along the guide rail 525. When the two limit bars 522 are merged into place, the two limit bars 522 can be pressed against the hydraulic buffer 526. The hydraulic buffer 526 can play a role of buffering and limiting, preventing the two limit bars 522 from continuing to merge and damaging the material to be processed. In the embodiment where the two limit bars 522 are driven by a cylinder, when the cylinder drives the two limit bars 522 to merge into place, the cylinder in-position sensor 527 can detect the position of the cylinder, thereby preventing the two limit bars 522 from continuing to merge and damaging the material to be processed. The presence detection sensor 528 can be used to detect whether there is material to be processed on the initial positioning component 520 to prevent the material to be processed from colliding with the initial positioning component 520 .

[0069] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by directional words such as "front", "back", "up", "down", "left", "right", "lateral", "vertical", "vertical", "horizontal", "top", "bottom", etc. is usually based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present invention; the directional words "inside" and "outside" refer to the inside and outside relative to the contour of each component itself.

[0070] For ease of description, regional relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the regional positional relationship between one or more components or features shown in the figure and other components or features. It should be understood that regional relative terms include not only the orientation of the components as described in the figure, but also different orientations in use or operation. For example, if the components in the accompanying drawings are inverted as a whole, the components "above other components or features" or "above other components or features" will include the situation where the components are "below other components or structures" or "below other components or structures". Therefore, the exemplary term "above" may include both "above" and "below". In addition, these components or features may also be positioned at other different angles (e.g., rotated 90 degrees or other angles), and this article is intended to include all of these situations.

[0071] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, parts, components and / or combinations thereof.

[0072] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein.

[0073] The present invention has been described by the above embodiments, but it should be understood that the above embodiments are only for the purpose of example and description, and are not intended to limit the present invention to the scope of the described embodiments. In addition, it can be understood by those skilled in the art that the present invention is not limited to the above embodiments, and more variations and modifications can be made according to the teachings of the present invention, and these variations and modifications all fall within the scope of the protection claimed by the present invention. The protection scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A processing equipment, characterized in that: include: A first transport device, the first transport device is used to transport the material to be processed from a storage location for storing the material to a designated location along a first direction, and is used to transport the processed material from the designated location to the storage location along the first direction; A processing device, wherein the processing device has a material receiving position, and the processing device is used to process the material to be processed moved to the material receiving position to form a processed material; a second transport device, the second transport device being used to transport the material to be processed from the designated position to the material receiving position along a second direction perpendicular to the first direction; as well as A third transporting device is used to transport the processed material from the material receiving position to the designated position along the second direction.

2. The processing equipment according to claim 1, characterized in that: The first handling device includes a first material picking component for picking up and placing materials, the second handling device includes a second material picking component for picking up and placing materials, and the third handling device includes a third material picking component for picking up and placing materials. The heights of the first material picking component, the second material picking component and the third material picking component meet the condition that they do not interfere with each other when working.

3. The processing equipment according to claim 2, characterized in that: The first material picking component includes a first track extending along the first direction and a first material picking piece connected to the first track and used for picking up and placing materials. The first material picking piece is movable between the storage position and the designated position relative to the first track, so as to be used for transporting the material to be processed from the storage position to the designated position along the first direction, and for transporting the processed material from the designated position to the storage position along the first direction.

4. The processing equipment according to claim 3, characterized in that: The processing equipment also includes a material rack, which has a silo for placing multiple layers of materials arranged in a vertical direction, and the storage position is located in the silo. The processing equipment also includes a layer-by-layer detection component for detecting whether there is material to be processed in the silo layer by layer, and the first material picking component is used to transport the material to be processed from the silo of the expected layer according to the detection result of the layer-by-layer detection component.

5. The processing equipment according to claim 4, characterized in that: The layer-by-layer detection component includes a transmitting sensor and a receiving sensor. A signal transmission line exists between the transmitting sensor and the receiving sensor, and the material to be processed on the silo blocks the signal transmission line.

6. The processing equipment according to claim 2, characterized in that: The second transport device includes a motor, a second track extending along the second direction, and a second material picking piece connected to the second track and used for picking up and placing materials. The second material picking piece is movable between the designated position and the material receiving position relative to the second track under the drive of the motor, so as to transport the material to be processed from the designated position to the material receiving position along the second direction.

7. The processing equipment according to claim 6, characterized in that A dustproof guard plate is arranged on the top of the second material taking member, and the dustproof guard plate is used to shield the material to be processed on the second material taking member.

8. The processing equipment according to claim 2, characterized in that: The third transporting device includes a transverse cylinder, a third track extending along the second direction, and a third material picking piece connected to the third track and used for picking up and placing materials. The third material picking piece is movable between the material receiving position and the designated position relative to the third track under the drive of the transverse cylinder, so as to transport the processed material from the material receiving position to the designated position along the second direction.

9. The processing equipment according to claim 8, characterized in that The third handling device also includes a lifting cylinder connected between the transverse cylinder and the third material picking component and used to drive the third material picking component to rise and fall. The second material picking component is at a first height when transporting the material to be processed along the second direction, and the third material picking component is at a second height when transporting the processed material along the second direction. The second height is greater than the first height.

10. The processing equipment according to claim 9, characterized in that The lifting cylinder is provided with a protection lock for preventing the cylinder rod from falling.

11. The processing equipment according to claim 1, characterized in that: The processing equipment also includes an initial positioning component and a wide-angle camera component. The designated position is located on the initial positioning component. The initial positioning component is used to initially position the material to be processed located at the designated position. The wide-angle camera component is used to photograph the material to be processed located at the designated position.

12. The processing equipment according to claim 1, characterized in that: The processing device includes a processing platform and a clamping mechanism arranged on the processing platform. The material receiving position is located on the processing platform. The processing platform is movable between the material receiving position and the processing position so as to be used for transporting the material to be processed to the processing position and for transporting the processed material from the processing position to the material receiving position. The clamping mechanism is used for clamping the material on the processing platform.

13. The processing equipment according to claim 12, characterized in that: The clamping mechanism comprises a rotary cylinder and a clamping piece connected to the rotary cylinder, and the clamping piece can clamp the material on the processing platform under the drive of the rotary cylinder.

14. The processing equipment according to claim 12, characterized in that: The processing equipment is a laser processing equipment, and the processing device further comprises a laser unit, and the laser unit is used to process the material to be processed on the processing platform located at the processing position to form a processed material.

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